JP3592872B2 - Total surface treatment method and total surface treatment device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for treating a total surface by electric discharge and a device for treating a total surface. According to the present invention, regardless of whether the object to be processed is a conductive material or a non-conductive material, the entire surface of the object to be processed is, for example, imparted with hydrophilicity, hydrophobicity, or adhesion. The hydrophilicity, hydrophobicity, or adhesiveness of the entire surface can be improved, or the entire surface of the object can be roughened.
[0002]
[Prior art]
Conventionally, as a surface treatment method of an object to be treated by discharge, for example, a method using an AC corona discharge or a DC corona discharge, a method using a low-pressure glow discharge, a method using an atmospheric pressure glow discharge, and the like are known. Was.
In the method using the AC corona discharge, an object to be processed is brought into contact with a surface of a dielectric provided in surface contact with a surface of a counter electrode (induction electrode) such as a plate electrode, and a predetermined distance ( A discharge electrode such as a wire electrode or a needle electrode is arranged at a distance of about 1 mm to several mm), and an AC high voltage is applied between the discharge electrode and the counter electrode in air or a predetermined gas. This is a method of performing a surface treatment of the object to be processed by the action of a linear corona generated from an applied and discharged electrode. In order to stabilize the generated linear corona, it is general to insert a dielectric between the object to be processed and the counter electrode as described above. The gas is appropriately selected according to the type of the functional group introduced to the surface of the object. The surface treatment of the object to be processed can be performed by using a DC corona discharge generated by applying a DC high voltage instead of an AC high voltage.
In this method, in order to generate a corona discharge, it is necessary to apply a certain or more electric field strength between the discharge electrode and the counter electrode, that is, a high voltage equal to or higher than the corona starting voltage. If it is too much, spark discharge may occur between the electrodes through a weak portion of the object to be processed, which may cause damage such as making a large hole in the object to be processed. Further, in the case of processing a processing object having irregularities, the discharge cannot be performed uniformly, which may cause processing unevenness or damage such as a hole in the processing object.
[0003]
In a method using low-pressure glow discharge, a pair of electrodes facing each other are provided inside a discharge vessel that can be decompressed, a target object is arranged between the electrodes, and air or a predetermined pressure in the discharge vessel is reduced by a decompression device. Gas pressure of about 10^-2While maintaining the pressure to about 10 Torr, an AC voltage of several KHz to several tens KHz is usually applied between the electrodes, and the surface treatment of the workpiece is performed by the action of a glow discharge generated between the electrodes. Is the way. In this method, an AC voltage is applied to the object to be processed in a state where the object is arranged so as not to contact the electrode or in a state where the object is arranged so as to contact only one of the electrodes. According to this method, it is more likely that a certain distance between the electrodes is generated in the discharge under low pressure according to Paschen's law, so that the distance between the electrodes should be wider than in the above-described method using AC corona discharge. Can be. In addition, at low pressure, ionized chemical species are hardly deactivated and spark discharge is unlikely to occur, so that there are many types of gases that can be used for discharge. However, it requires a decompression device for reducing the atmospheric pressure in the discharge vessel, and is not suitable for continuous machining. Further, when the object to be treated contains a volatile substance, for example, water or a plasticizer, it is difficult to control the pressure.
[0004]
A method using an atmospheric pressure glow discharge (for example, described in Industrial Heating, Vol. 27, No. 1 (1990), and Japanese Patent Application Laid-Open No. 4-74525) discloses a method in which a predetermined distance is provided inside a discharge vessel that can be sealed. A pair of electrodes facing each other (usually several mm) are provided, and a rare gas, particularly a mixed gas containing helium as a main component and a predetermined gas used for introducing a functional group is supplied to the discharge vessel at the same time. In this method, an AC voltage of several KHz to several tens of MHz is usually applied between the electrodes, and the surface of the object is subjected to a surface treatment by the action of a glow discharge generated between the electrodes. In this method, in order to stabilize the generated glow discharge, a dielectric is generally provided in contact with the surface of one of the electrodes. An AC voltage is applied to the object to be processed in a state where it is arranged so as not to contact with any of the electrode and / or the dielectric, or in a state where it is arranged so as to contact only one of the dielectric and the electrode. . In this method, an expensive rare gas is required, the types of gases capable of generating a stable discharge are limited, and the discharge becomes unstable when the amount of gas used for introducing a functional group is increased. Therefore, the amount of gas is also limited. Generally, a reactive gas can be mixed only up to about 10%. Further, when treating a porous body, it is difficult to uniformly treat the entire surface of the porous body, probably because gas does not enter the voids inside the body to be treated.
[0005]
[Problems to be solved by the invention]
Therefore, an object of the present invention is to prevent damage to a processing target by spark discharge or the like, or to prevent processing unevenness, to use any kind of gas, and to perform continuous processing, It is to provide a means for treating the total surface.
[0006]
[Means for Solving the Problems]
The above objects are achieved by the present invention.,
Placed opposite, InvitationBetween a first electrode provided with an electric conductor layer on the facing surface side and a second electrodePorousPlace the objectHere, the dielectric layer provided on the first electrode includes a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the first electrode side.
AndA porous dielectric material provided on the first electrode without directly contacting the first electrode and the object to be processed;layerAnd applying an AC voltage between the two electrodes in a state where each of the second electrodes and the outer surface of the object to be processed are in direct contact with each other, and a porous dielectric material sandwiched between the two electrodes.layerInternal void ofAnd internal voids of the porous objectGenerating a discharge atPorousThis can be achieved by a method of treating the entire surface of the object.
Further, the above object is achieved by the present invention
A porous object is placed between a first electrode provided with a dielectric layer on the facing surface side and a second electrode provided with a dielectric layer on the facing surface side. The dielectric layer provided on the first electrode includes a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the first electrode side.
Then, without directly contacting each of the two electrodes and the object to be processed, each of the porous dielectric layer provided on the first electrode and the dielectric layer provided on the second electrode, An AC voltage is applied between the two electrodes in a state where the outer surface of the body is in direct contact with the outer surface of the body, so that the internal gap of the porous dielectric layer and the internal gap of the porous object to be processed are sandwiched between the two electrodes. This can also be achieved by a method for treating the entire surface of the porous object, characterized in that a discharge is generated by the method.
Also,Furthermore,The above objects are achieved by the present invention.,
(1) a first electrode and a second electrode that are arranged to face each other,
(2) disposed on the side facing the first electrode;Consisting of a porous dielectric layer on the opposite surface side and a non-porous dielectric layer on the first electrode sideDielectric layer,
(3) A porous dielectric material that does not directly contact the first electrode but is provided on the first electrodelayerAnd the outer surface is in direct contact with each of the second electrodes.PorousMeans for arranging the object to be processed, and
(4) a means for electrically connecting to the two electrodes and applying an AC voltage between the two electrodes;PorousThis can also be achieved by a processing device for the entire surface of the object to be processed.
[0007]
In this specification, the “total surface” means all surfaces of the object. That is, the object to be processedIsA concept that includes both the outer and inner surfaces of a porous bodyis there.Porous bodyWhat is the outer surface,The surface of the object to be processed is in contact with a virtual solid having a smooth surface circumscribing the object. The inner surface of the porous body means the entire surface of all the internal voids included in the virtual solid of the porous body. Therefore, the inner surface of the porous body is the surface of each cell in the foam-type porous body, and the surface of the concave structure (for example, a hollow or a groove) or the surface of the through-hole in the film-type porous body. In the fibrous porous body, the surface of the internal space formed by the constituent fibers, that is, the entire surface of each constituent fiber is included. In addition, the bubbles include both open-cells and closed-cells.
[0008]
In this specification, “treatment of the total surface” means that at least a part of the total surface of the object is chemically or physically treated.
The chemical treatment means chemically modifying the entire surface of the object to be treated, and includes, for example, a process of introducing a desired functional group into a compound constituting the object to be treated. Can impart hydrophilicity, hydrophobicity, or adhesiveness to the total surface of, or can improve hydrophilicity, hydrophobicity, or adhesiveness. In the presence of the total surface treatment gas capable of introducing a desired functional group, the outer surface of the object to be processed is brought into contact with the porous dielectric portion, and the inside of the porous dielectric portion is By generating a discharge in the gap, a chemical treatment for introducing a desired functional group can be performed.
[0009]
The physical treatment means physically modifying the entire surface of the object to be treated, and includes, for example, rough surface processing by plasma treatment. Roughening can be performed by generating a discharge in a total surface treatment gas such as air. Note that the chemical treatment and the physical treatment can be performed simultaneously. For example, when air is used as the total surface treatment gas, the hydrophilicity of the object to be treated can be improved and rough surface processing can be performed. In general, when performing a physical treatment, a chemical treatment also occurs at the same time, but when it is necessary to selectively perform a chemical treatment, treatment conditions, such as an applied voltage, an applied time, and The chemical treatment can be mainly performed by appropriately selecting the type of the total surface treatment gas and the like according to the purpose of the treatment of the total surface.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
In the present invention, a dielectric layer is provided on a facing surface side of at least one of a pair of electrodes arranged to face each other. Provided on the opposite surface side of the electrodeThe dielectric layer,Consists of a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the electrode side.
[0011]
In the present invention, one of the pair of electrodes arranged opposite to each other needs to carry a dielectric layer on the facing surface side, and the other electrode carries the dielectric layer. Do not carry, or do not carryComeIt is preferable that both electrodes arranged opposite to each other carry a dielectric layer.
When each of the pair of electrodes arranged opposite to each other carries a dielectric layer on the facing surface side, the dielectric layer of one of the pair of electrodes is a porous dielectric.layerMust be contained. Hereinafter, this electrode may be referred to as a first electrode.You.
[0012]
The dielectric layer carried on the other electrode may or may not contain a porous dielectric portion on a part of the surface in contact with the porous object. This electrode may be hereinafter referred to as a second electrode. Therefore, the dielectric layer provided on the second electrode may be any dielectric layer, for example, a dielectric layer made entirely of a non-porous dielectric layer, and a porous dielectric layer may be formed on at least a part of the surface on the opposite surface side. A dielectric layer including a body portion, a dielectric layer including a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the second electrode side, or a dielectric layer entirely including a porous dielectric layer Can be used.
In addition to the first electrode, a dielectric layer including a porous dielectric portion on a part of the opposing surface side of the second electrode, in particular, a porous dielectric layer on the opposing surface side and a non-porous dielectric layer on the electrode side It is preferable to provide a dielectric layer composed of a dielectric layer or a dielectric layer composed entirely of a porous dielectric layer, since both of the outer surfaces of the object can be treated at the same time.
[0013]
The object to be treated whose entire surface can be treated according to the present invention includes, for example, a porous material made of any conductive material or non-conductive material.BodyCan be used. The shape of the object to be processed is not particularly limited, but a space formed between the dielectric layer carried on the first electrode and the dielectric layer carried on the second electrode. Is preferably a shape that can be substantially satisfied by the object to be processed. Therefore, even powder or fiber can be treated as long as the space between the first electrode and the second electrode can be substantially filled.
[0014]
Examples of the conductive material include various metals or alloys, for example, aluminum, copper, or a carbonaceous material, or a composite of a conductor and an insulator, for example, conductive rubber or conductive plastic.
Examples of the non-conductive organic material include various organic polymer compounds, for example, polyolefin such as polyethylene and polypropylene, polyester, polycarbonate, polyvinyl chloride, fluorinated ethylene propylene copolymer (FEP), polyvinylidene fluoride (PVDF), Or a vinylidene fluoride-trifluoroethylene copolymer etc. can be mentioned.
Examples of the non-conductive inorganic material include various ceramics (for example, alumina, silica, and silica-alumina), and glasses (for example, soda glass and silica glass).
[0015]
Examples of the porous body made of the various materials include a fibrous porous body, a film porous body, and a foamed porous body. Note that the porous body that can be treated according to the present invention does not necessarily need to be an integral molded body, but may be a mere aggregate such as an irregularly shaped powder or fiber. In the case of a simple aggregate such as a powder or a granule or a fiber, it is desirable that the thickness is adjusted to a certain value at the time of processing.
Examples of the fibrous porous body include a woven fabric, a knitted fabric, a fibrous porous film, and a nonwoven fabric. Examples of the nonwoven fabric include a dry nonwoven fabric (for example, a spunbonded nonwoven fabric, a meltblown nonwoven fabric, or a hydroentangled nonwoven fabric), a wet nonwoven fabric, and the like.
Examples of the foam-type porous body include an open-cell foam and a closed-cell foam made of a resin such as a polyolefin-based, polyester-based, or polyurethane-based resin.
Examples of the film-type porous body include a film having an uneven structure and a perforated film.
[0016]
When the object to be processed is made of a non-conductive material, the thickness of the object to be processed is preferably 1 mm or less.
[0017]
ThickIf there is only one, it is preferable to use one that is compressed to 1 mm or less. Note that this does not apply when the object to be processed is made of a conductive material.
[0018]
Hereinafter, the present invention will be described with reference to the accompanying drawings.
FIG. 1 shows the basic principle of the present invention. As shown in FIG. 1, electrodes 21 and 22 composed of a plate-like electrode or the like are arranged to face each other. The electrode 21, which is the first electrode, carries a dielectric layer 71 on the opposing surface side. The dielectric layer 71 is composed of the non-porous dielectric layer 31 on the electrode 21 side and the porous dielectric layer 31 on the opposing surface side. And a layer 41. The electrode 22, which is the second electrode, carries the non-porous dielectric layer 32 on the opposing surface side. Furthermore, the porous dielectric layer 41 and the non-porous dielectric layer 41 are not in contact with any of the electrodes 21 and 22, but the porous dielectric layer 41 and the non-porous dielectric layer 32 are in direct contact with the outer surface. The target object 11 is arranged between the body layer 32 and the body layer 32. At this time, by pressing the electrode 21 and the electrode 22 with an appropriate pressure, the gap between the porous dielectric layer 41 and the processing target 11 and between the processing target 11 and the non-porous dielectric layer 32 are reduced. Between them so that a space (a gap) is not substantially formed. When a space is formed between the dielectric layer and the object to be processed, discharge does not occur uniformly, and a hole may be formed in the object to be processed. It is preferable that the size of the electrodes 21 and 22 is made smaller than the size of the non-porous dielectric layers 31 and 32 carried thereon, since the electrodes 21 and 22 do not come into contact with the object 11 to be processed. In the case where the size of the electrodes 21 and 22 is the same as the size of the non-porous dielectric layers 31 and 32 carried respectively, a covering material (for example, vinyl tape) made of a dielectric material is provided around the electrodes. Is provided, it is possible to prevent the electrodes 21 and 22 from contacting the object 11 to be processed. One electrode, for example, electrode 21, is connected to an AC power supply 51, and the other electrode, for example, electrode 22, is grounded.
[0019]
When an AC high voltage is applied from the AC power supply 51 to the porous object 11, discharge occurs not only in the internal gap of the porous dielectric layer 41 but also in the internal gap of the porous body as the object to be processed. A plasma is generated. The plasma generated in the internal voids of the porous dielectric layer 41 has an outer surface directly contacting the porous dielectric layer 41 (hereinafter referred to as a porous dielectric layer contact outer surface). By acting on the inner surface in the vicinity of the porous dielectric layer contact outer surface of the inner surface of the object 11, and thereby the porous dielectric layer contact outer surface and inner surface of the object 11 to be processed. A portion of the surface is treated and modified. At the same time, plasma generated in the internal voids of the porous body as the object to be processed is generated by the dielectric layer 32 inside the inner surface of the porous body as the object to be processed and the outer surface of the object to be processed 11. By acting on the outer surface that is in direct contact with the substrate (hereinafter referred to as the dielectric layer contact outer surface), the inner surface of the object to be processed 11 and the dielectric layer contact outer surface are modified.
[0020]
BookIn the invention, ManyDischarge occurs in the internal voids of the porous dielectric portion and the internal voids of the porous body that is the processing target, so that the processing target is porous.Even soIn addition, the object to be processed is not easily damaged by spark discharge or the like. Further, in the present invention, since the dielectric is interposed and the dielectric and the object to be processed are in contact with each other, the discharge is uniformly generated without generating spark discharge, and as a result, the processing is performed without causing uneven processing. The processing object can be processed.
[0021]
SufferedThe treated body is a porous bodyBecauseIf the entire dielectric layer 71 is made of the porous dielectric layer 41, sparks are likely to occur and holes may be formed in the object to be processed. for that reason, NonIt is necessary to use a dielectric layer 71 having a porous dielectric layer 31.
[0022]
In the present invention, the lower limit of the AC voltage applied to generate a discharge by the AC power source is particularly limited because it depends on the distance between the electrodes including the dielectric layer and the type of gas described later used for the total surface treatment. However, it is preferably 0.5 KVp-p or more, more preferably 1 KVp-p or more (KVp-p indicates a voltage difference from the maximum peak to the minimum peak of the AC voltage). This is because when the voltage is less than 0.5 KVp-p, substantially no discharge occurs. The upper limit of the AC voltage is not particularly limited as long as the voltage does not cause damage to the object. The frequency is not particularly limited, but is preferably 0.1 to 100 KHz, more preferably 1 to 50 KHz. When the frequency is less than 0.1 KHz, the processing efficiency due to discharge decreases, and when it exceeds 100 KHz, there is a problem that the object to be processed is overheated by dielectric heating and may be broken. Since these values greatly depend on the shape of each electrode, the material of the object to be processed, the discharge voltage waveform, and the processing time, they may be used outside the above range.
[0023]
FIG. 1 shows an embodiment in which an AC power supply 51 is connected to the electrode 21 and the electrode 22 is grounded. However, in the present invention, the AC power supply 51 is connected to the electrode 22 and the electrode 21 is grounded. Is also good.
[0024]
The material of the electrode that can be used in the present invention has a specific resistance of preferably 10³Ω · cm or less, more preferably 10⁰  A conductor of Ω · cm or less can be used. For example, a metal (eg, stainless steel, aluminum, tungsten, or the like), a conductive metal oxide, carbon, or a conductor (eg, a metal powder or a carbon powder) Conductive rubber or the like that is a composite of rubber and rubber can be used.
As the shape of the electrode, for example, a needle electrode, a sheet electrode, a plate electrode, or a columnar electrode can be used. When the contact position between the object and the electrode relatively moves as shown in FIGS. 2 to 5 described later, the object to be processed is hardly damaged. It is preferable to use a columnar electrode which can rotate itself around the central axis of the column in synchronization with the parallel movement of the column.
[0025]
In the present invention, the lower limit of the pressure applied between the electrodes is a pressure that guarantees surface contact between the dielectric layer and the object to be processed and does not substantially form a space. The upper limit is a pressure that does not destroy the shape of the object.
[0026]
Examples of the dielectric that can be used in the present invention include a dielectric made of any non-conductive organic or inorganic material.
Examples of the organic material include various organic polymer compounds, for example, polyolefins such as polyethylene and polypropylene, polytetrafluoroethylene, polyester, polycarbonate, polyvinyl chloride, fluorinated ethylene-propylene copolymer (FEP), polyvinylidene fluoride (PVDF) ), Vinylidene fluoride-trifluoroethylene copolymer, silicone rubber or chloroprene rubber.
Examples of the inorganic material include various ceramics (for example, alumina, silica, or silica-alumina), and glasses (for example, soda glass or silica glass).
[0027]
As the porous dielectric that can be used in the present invention, a porous body composed of the above various materials that can be used as a dielectric can be used. For example, a fibrous porous dielectric, a film porous A dielectric or a foam-type porous dielectric may be used.
Examples of the fibrous porous dielectric include a woven fabric, a knitted fabric, a fibrous porous film, and a nonwoven fabric. Examples of the nonwoven fabric include a dry nonwoven fabric (eg, a spunbonded nonwoven fabric, a meltblown nonwoven fabric, and a hydroentangled nonwoven fabric) and a wet nonwoven fabric.
Examples of the foam-type porous dielectric include an open-cell foam and a closed-cell foam made of a resin such as polyolefin, polyester, or polyurethane.
Examples of the film-type porous dielectric include a film having an uneven structure and a perforated film.
[0028]
In the present invention, the upper limit of the size of the internal void in the porous dielectric portion is not particularly limited, but is preferably a void having an average void height of 500 μm or less in the thickness direction. If the average gap height exceeds 500 μm, arc discharge may occur and damage the workpiece. However, even if the average gap height exceeds 500 μm, any material can be used as long as it can be compressed during processing to make the average gap height 500 μm or less. The lower limit of the size of the internal void is not particularly limited as long as a discharge can be generated in the internal void of the porous dielectric portion, but the average void height is 10 μm or more. Is preferred.
[0029]
The thickness of the non-porous dielectric layer is not particularly limited, but is preferably about 0.05 to 5 mm. If the thickness is more than 5 mm, a very high voltage is required for discharging, and if the thickness is less than 0.05 mm, the mechanical strength is reduced and dielectric breakdown is likely to occur.
The thickness of the porous dielectric portion or the porous dielectric layer is also not particularly limited since a suitable thickness varies depending on the thickness of the entire dielectric layer, the type of the object to be processed, and the like. It is preferably 0.5 mm. If the thickness exceeds 0.5 mm, arc discharge is likely to occur and a high discharge voltage is required. If the thickness is less than 10 μm, discharge in the porous portion may not easily occur.
[0030]
The present invention is generally carried out in an open system (in air). However, the internal gap of the porous dielectric portion, the contact region between the porous dielectric portion and the object, and the vicinity thereof, andPorous objectIt is also possible to generate a discharge while supplying a total surface treatment gas other than air to the internal voids (hereinafter, these are referred to as treatment regions). As a means for supplying the total surface treatment gas to the processing region, for example, a method of forcibly sending the total surface treatment gas to the processing region, a method of spraying the total surface treatment gas to the processing region, or A method of setting the atmosphere of the total surface treatment gas may be used.
[0031]
For example, when a discharge is generated by applying an AC high voltage while supplying a total surface treatment gas to the treatment area using a gas supply pipe or the like, the internal voids of the porous dielectric portion, and theof a bodyBy the action of the plasma generated in the internal voids, the entire surface of the object to be treated reacts with the total surface treatment gas, so that the entire surface of the object to be treated can be modified, for example, a desired functional group can be introduced.
[0032]
When supplying a total surface treatment gas other than air to the treatment area, the periphery of the treatment area is filled with a specific gas so that contact with air does not occur and an unintended reaction does not occur. Is preferable. When the atmosphere around the processing area is set to the atmosphere of the total surface treatment gas, for example, the object to be processed, the electrodes, and the dielectric layer are arranged in an airtight container, and the total surface treatment gas is placed therein. The discharge treatment can be performed in a state where is sealed. In this case, the processing region can be filled with a specific gas, and no contact with air occurs, which is preferable.
[0033]
The “total surface treatment gas” that can be used in the present invention is not particularly limited, and can be appropriately selected from known surface treatment gases according to a desired surface treatment. When imparting hydrophilicity to the object to be treated or performing a surface treatment for improving the hydrophilicity, for example, air or oxygen gas can be used to impart hydrophobicity to the object or When performing a surface treatment for improving the property, for example, tetrafluoromethane (CF₄  ) Can be used.
Also, the concentration of the total surface treatment gas is not particularly limited, and can be appropriately selected according to a desired total surface treatment. Further, the type and / or concentration of the total surface treatment gas can be subjected to the total surface treatment of the object to be treated under a constant condition without changing or with a change over time.
[0034]
When a physical treatment is performed on the entire surface of the object to be processed, for example, when rough surface processing is performed, a higher voltage AC is applied as compared with a case where only a chemical treatment in which a discharge treatment is performed while supplying a total surface treatment gas. It is preferable to apply a voltage, and it is preferable to lengthen the discharge processing time. In particular, when it is desired to perform rough surface processing while maintaining the water repellency of the object to be processed, it is preferable to perform the treatment while supplying a gas (for example, tetrafluoromethane) that imparts water repellency as a total surface treatment gas. .
[0035]
Further, according to the present invention, since the object to be processed is substantially processed only on the entire surface of the portion sandwiched between the pair of electrodes, by changing the shape of at least one of the electrodes, The shape can be arbitrarily changed. For example, one of the electrodes is a plate-shaped electrode, the other electrode is a predetermined shape of the electrode, for example, by forming a reticulated electrode or a linear electrode, the same pattern as the predetermined shape, for example, a reticulated pattern or a linear pattern The object to be processed can be selectively processed.
[0036]
In the present invention, only one electrode,PorousA dielectric layer can be provided, butTo the other electrodeA dielectric layer including a porous dielectric portion on at least a part of the surface thereof (for example, a dielectric layer including a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the second electrode side, or When a dielectric layer made entirely of a porous dielectric layer is provided, both of the outer surfaces of the object can be processed simultaneously. In this case, without directly contacting each of the two electrodes and the object to be processed,A porous dielectric layer;In a state where each of the porous dielectric portions is directly contacted with the outer surface of the object to be processed, an AC voltage is applied between the two electrodes, and the inside of the porous dielectric portion sandwiched between the two electrodes is applied. By generating a discharge in the gap, both the outer surface of the object to be processed can be processed simultaneously.
The object to be processed is a porous bodyBecauseIf both of the dielectric layers provided on both electrodes are entirely made of a porous dielectric layer, sparks are likely to occur and holes may be formed in the object to be processed. for that reason,versusIt is necessary to provide at least one non-porous dielectric layer between facing electrodes.is there.
[0037]
The present invention is not limited to the mode shown in FIG. 1 in which the discharge is generated in a state where the object to be processed is stationary, and the surface treatment of the object to be processed can be continuously performed while moving the object to be processed. . Another embodiment of the present invention is shown in FIG.
In this embodiment, the columnar electrode 21 and the columnar electrode 22 are arranged so as to face each other. The surfaces of the electrodes 21 and 22 are covered with dielectric layers 71 and 72, respectively. The dielectric layers 71 and 72 are composed of non-porous dielectric layers 31 and 32 and porous dielectric layers 41 and 42, respectively. . The electrodes 21 and 22 may be capable of rotating themselves with the cylindrical central axis as a rotation axis, or may be fixed without rotating, and the workpiece 11 moves. In this case, it is preferable that the electrode itself be able to rotate about the central axis of the cylinder as a rotation axis, since the surface of the processing target 11 is not easily damaged.
[0038]
The electrode 21 is connected to an AC power supply 51, and the electrode 22 is grounded. The object to be processed 11 is placed on the surfaces of the electrodes 21 and 22 via non-porous dielectric layers 31 and 32 by a transfer means (for example, a pair of delivery rollers: not shown) provided upstream of the electrodes 21 and 22. Are continuously supplied at a predetermined speed in the direction indicated by the arrow A between the porous dielectric layers 41 and 42 carried respectively, and pass between the porous dielectric layers 41 and 42 while being in contact with them. . The object 11 having passed between the porous dielectric layers 41 and 42 is continuously transferred at a predetermined speed by a transfer means (for example, a pair of delivery rollers: not shown) provided downstream of the electrodes 21 and 22. Be transported.
The supply speed and the transfer speed of the object 11 are not particularly limited, and may be a constant speed or a speed that changes periodically or irregularly. These speeds are preferably constant so that the surface treatment time of the object to be processed becomes 0.1 seconds or more. If the speed is higher than this, a sufficient total surface treatment effect cannot be obtained.
When the entire surface is treated, the supply speed and the transfer speed may be the same as the moving speed of the porous dielectric layers 41 and 42 carried on the electrodes 21 and 22, respectively. Each of the supply speed and the transfer speed is adjusted so that all the outer surfaces of the object 11 can contact the surfaces of the porous dielectric layers 41 and 42 capable of generating plasma at least once. , 22 may have a speed different from the moving speed of the porous dielectric layers 41, 42.
[0039]
When an AC high voltage is applied from an AC power supply 51 when the porous object 11 passes between the porous dielectric layers 41 and 42 while making contact with the porous dielectric layers 41 and 42, the porous dielectric material sandwiched between the two electrodes is removed. Discharge occurs in the internal voids of the body layers 41 and 42 and the internal voids of the porous body that is the object to be processed, and plasma is generated.
[0040]
SubordinateThus, the plasma generated in the internal voids of the porous dielectric layers 41 and 42 and the plasma generated in the internal voids of the porous body that is the processing target cause the outer surface of the processing target 11 and the processing target 11 can be modified.
[0041]
SufferedSince the processing object 11 is continuously transferred at a predetermined speed, the processing object 11 on which the total surface has been modified or has been transferred is transferred in the direction indicated by arrow A, Is newly supplied between the porous dielectric layers 41 and 42. Since the AC high voltage from the AC power supply 51 is continuously applied, the entire surface of the object 11 to be newly supplied is reformed in the same manner as described above. In this way, while the untreated object 11 is continuously supplied between the porous dielectric layers 41 and 42, the object whose total surface has been modified or has been modified Since 11 is continuously supplied from between the porous dielectric layers 41 and 42, the entire surface treatment of the object 11 can be continuously performed.
[0042]
The AC voltage applied to generate the discharge by the AC power supply is not particularly limited, but is preferably in the same range as the AC voltage and the frequency for the same reason as described above. In the embodiment shown in FIG. 2, the AC power supply 51 is connected to the electrode 21 and the electrode 22 is grounded, but the AC power supply 51 may be connected to the electrode 22 and the electrode 21 may be grounded. .
The embodiment shown in FIG. 2 is generally performed in an open system (in air), but if it is necessary to use a total surface treatment gas other than air depending on the desired total surface treatment, the embodiment shown in FIG. Discharge can be generated while supplying the processing gas to the processing region.
[0043]
In the embodiment shown in FIG. 2, only one cylindrical electrode 21 carrying the non-porous dielectric layer 31 and the porous dielectric layer 41 is provided on the surface thereof, but the number of the electrodes 21 is not particularly limited. However, one or a plurality can be provided. A porous dielectric material is provided so that any one point on the outer surface of the object can be contacted with the porous dielectric layer carried on the surface of the electrode a plurality of times along the transport direction of the object. It is preferable to provide a plurality of electrodes for supporting the layer in that the processing effect can be enhanced and the processing speed can be increased.
[0044]
A dielectric layer composed of a non-porous dielectric layer and a porous dielectric layer is supported on the surface, and five cylindrical electrodes having a small diameter are supported on the surface of a cylindrical electrode having a large diameter. FIG. 3 shows still another embodiment of the present invention in which a predetermined interval is provided in parallel along the surface of a dielectric layer composed of a porous dielectric layer and a porous dielectric layer. Five cylindrical electrodes 21 (sometimes referred to as 21a, 21b, 21c, 21d, and 21e from the upstream side) are mounted on a surface of a cylindrical electrode 22 having a diameter larger than those electrodes. The electrodes are arranged in parallel at predetermined intervals along the surface of the body layer (consisting of the non-porous dielectric layer 32 and the porous dielectric layer), and are arranged so that the electrodes 21 and 22 face each other. The electrodes 21a to 21e are in contact with non-porous dielectric layers 31a to 31e provided in contact with the electrodes (hereinafter, may be collectively referred to as non-porous dielectric layers 31), and further contact the surfaces thereof. The dielectric layers are respectively covered with porous dielectric layers 41a to 41e (hereinafter, may be collectively referred to as a porous dielectric layer 41). The electrodes 21 and 22 may be capable of rotating themselves with the column central axis as a rotation axis, or may be fixed without rotating, and the object 11 and the electrode 21 may be fixed. , 22 is preferably an electrode that can rotate itself around the center axis of the cylinder because the surface of the object to be processed is not easily damaged when relatively moved.
[0045]
The five electrodes 21 are connected to one AC power supply 51, and the electrodes 22 are grounded. When the electrodes 21 are connected to the same AC power supply, the electrodes may be arranged so as to be in contact with each other. The embodiment shown in FIG. 3 connects five electrodes 21 to one AC power supply 51 and applies the same AC high voltage to all five electrodes 21. Different AC high voltages may be applied to the electrodes by connecting to a power supply. However, when different electrodes are connected to different AC power supplies, they need to be separated and arranged so that the electrodes do not contact each other.
[0046]
The object to be processed 11 is placed on the surfaces of the electrodes 21 and 22 via non-porous dielectric layers 31 and 32 by a transfer means (for example, a pair of delivery rollers: not shown) provided upstream of the electrodes 21 and 22. Is continuously supplied at a predetermined speed in the direction indicated by the arrow A between the porous dielectric layers 41 and 42 respectively supported, and has one surface supported on the surface of the electrode 22. At the same time, while simultaneously contacting the opposite surface with the porous dielectric layers 41 a, 41 b, 41 c, 41 d, and 41 e while passing between the porous dielectric layer 41 e and the porous dielectric layer 42. pass. The object 11 having passed between the porous dielectric layers 41 and 42 is continuously transferred at a predetermined speed by a transfer means (for example, a pair of delivery rollers: not shown) provided downstream of the electrodes 21 and 22. Be transported.
The supply speed and the transfer speed of the object 11 are not particularly limited, and may be a constant speed or a speed that changes periodically or irregularly. In this aspect, it is preferable that the speed is constant and the speed is such that the total surface treatment time of the object to be processed is 0.1 second or more. If the speed is higher than this, a sufficient total surface treatment effect cannot be obtained.
[0047]
When an object to be processed 11 passes between the porous dielectric layers 41 and 42 while being in contact therewith, when an AC high voltage is applied from an AC power supply 51, the porous dielectric layer sandwiched between both electrodes is applied. 41 and 42 internal voids, UpdateThen, electric discharge is generated between the internal space of the porous body as the object to be processed and plasma is generated. As described in the embodiment shown in FIG. 2, the entire surface of the processing target 11 is modified by the action of these plasmas.
In this aspect, any one point on the outer surface of the processing target 11 can be contacted with the porous dielectric layer a plurality of times along the transport direction of the processing target 11 (the direction indicated by arrow A). In addition, five electrodes 21 carrying a porous dielectric layer 41 are provided on the surface thereof. Therefore, the object to be processed 11 whose overall surface has been modified or has been modified by the porous dielectric layers 41a and 42 carried on the surface of the electrode 21a is transferred in the direction shown by the arrow A, and The porous dielectric layers 41b and 42 are supplied between the porous dielectric layer 41b and the porous dielectric layer 42 carried on the surface of the surface 21b, and the porous dielectric layers 41b and 42 again reform the entire surface. , 41d, and 41e and the porous dielectric layer 42, the surface is sequentially modified, and is supplied from between the porous dielectric layer 41e and the porous dielectric layer 42. .
Since the object to be processed 11 is continuously transferred at a predetermined speed, the unprocessed object to be processed 11 is continuously supplied between the porous dielectric layer 41a and the porous dielectric layer 42, The object to be processed 11 whose surface has been or has been modified is continuously supplied from between the porous dielectric layer 41e and the porous dielectric layer 42, and the total surface treatment of the object to be processed 11 is performed. Can be performed continuously.
[0048]
The embodiment shown in FIG. 3 is generally performed in an open system (in air), but if it is necessary to use a total surface treatment gas other than air depending on the desired total surface treatment, the embodiment shown in FIG. Discharge can be generated while supplying the processing gas to the processing region. For example, a discharge treatment can be performed in a state in which an object to be processed, an electrode, and a dielectric layer are arranged in an airtight container, and a desired total surface treatment gas is sealed therein. Further, as a means capable of supplying the total surface treatment gas to the processing region, for example, a gas supply pipe capable of supplying a total surface treatment gas which can be appropriately selected according to a desired total surface treatment is provided. May be arranged at a position where the gas can be supplied to the processing region. The number of gas supply pipes is not particularly limited as long as gas can be sufficiently supplied to the processing region. For example, one gas supply pipe may be provided for each electrode and dielectric layer, or a plurality of gas supply pipes may be provided. One electrode and one dielectric layer may be provided. Further, the total surface treatment can be performed by changing the type and / or concentration of the total surface treatment gas supplied to each gas supply pipe. Furthermore, the total surface treatment may be performed by changing the type and / or concentration of the gas over time. By changing the type and / or concentration of the total surface treatment gas, the state of the total surface treatment (for example, a hydrophilic or hydrophobic state) and its degree can be controlled.
[0049]
Instead of the five sets of electrodes 21, non-porous dielectric layer 31, and porous dielectric layer 41 shown in FIG. 3, a belt-shaped laminate of an electrode layer, a non-porous dielectric layer, and a porous dielectric layer Still another embodiment of the present invention using, for example, a belt-shaped aluminum evaporated film is shown in FIG.
The four fixed rollers 91a, 91b, 91c, and 91d are arranged so that the axial directions are parallel to each other, and the four fixed rollers are positioned at the vertices of the rectangle when viewed from the axial direction. I do. The fixed roller 91a is provided close to the porous dielectric layer 42 on the columnar electrode 22, and the fixed roller 91b is provided downstream of the fixed roller 91a and close to the porous dielectric layer 42. The fixed rollers 91c and 91d are arranged apart from the porous dielectric layer 42. Four endless belt-shaped aluminum vapor-deposited films 63 in which a porous derivative layer 43 was attached to one surface of a polyester derivative film layer 33 and an aluminum layer 23 was formed by vapor-depositing aluminum on the other surface. Are arranged so as to pass outside the fixed rollers 91a, 91b, 91c and 91d. At this time, the aluminum layer 23 of the aluminum vapor-deposited film 63 is set inside (that is, so as to be able to contact the fixing rollers 91a, 91b, 91c, and 91d), and the porous derivative layer 43 is set outside (that is, fixed). A porous dielectric layer 43 of the aluminum vapor-deposited film 63 passing between the rollers 91a and 91b, and a porous dielectric layer 42 carried on the surface of the cylindrical electrode 22 via the non-porous dielectric layer 32. So that they face each other).
[0050]
On the other hand, the electrode 22 supporting the dielectric layer composed of the non-porous dielectric layer 32 and the porous dielectric layer 42 on the surface is provided with an endless belt-like aluminum vapor deposition in the entire region between the fixed rollers 91a to 91b. The film 63 and the porous dielectric layer 42 are arranged so as to be in continuous surface contact with each other via the object to be processed. In this embodiment, it is not always necessary to make surface contact in the entire area between the fixed rollers 91a to 91b, and by adjusting the distance between the endless belt-shaped aluminum vapor-deposited film 63 and the electrode 22, the fixed roller 91a It is sufficient that at least a part of the region up to 91b and the porous dielectric layer 42 are in contact with each other via the object to be processed. The electrode 22 itself can rotate around the column central axis as a rotation axis. Also, since the fixed rollers 91a, 91b, 91c, and 91d can also rotate on their cylindrical central axes as rotation axes, the aluminum-deposited film 63 disposed outside the fixed rollers 91a, 91b, 91c, and 91d moves in one direction (for example, as indicated by an arrow B). (Direction shown). The aluminum layer 23 of the aluminum vapor-deposited film 63 is connected to an AC power supply 51, and the electrode 22 is grounded. In the embodiment shown in FIG. 4, an AC power supply 51 is connected to the aluminum layer 23 and the electrode 22 is grounded. Conversely, the AC power supply 51 is connected to the electrode 22 and the aluminum vapor-deposited film 63 is grounded. Good.
[0051]
The object to be processed 11 is carried on the surface of the electrode 22 via the non-porous dielectric layer 32 by a transfer means (for example, a pair of sending rollers: not shown) provided upstream of the fixed roller 91a and the electrode 22. Between the fixed porous dielectric layer 42 and the fixed roller 91a, the porous dielectric layer 42 being continuously supplied at a predetermined speed in the direction indicated by the arrow A, and having one surface supported by the electrode 22. It passes between the porous dielectric layer 42 and the fixed roller 91b while continuously contacting and simultaneously contacting the opposite surface with the porous derivative layer 43 at the same time. The object 11 that has passed between the porous dielectric layer 42 and the fixed roller 91b is moved to a predetermined position by a transfer unit (for example, a pair of sending rollers: not shown) provided downstream of the fixed roller 91b and the electrode 22. Conveyed continuously at speed. Also in this embodiment, the entire surface treatment of the object 11 can be continuously performed in the same manner as the embodiment shown in FIG. The embodiment shown in FIG. 4 has a larger discharge area than the embodiment shown in FIG. 3, so that the processing effect can be enhanced and the processing speed can be increased.
The embodiment shown in FIG. 4 is generally carried out in an open system (in air), but if it is necessary to use a total surface treatment gas other than air depending on the desired total surface treatment, the embodiment shown in FIG. Discharge can be generated while supplying the processing gas to the processing region.
As an example of the embodiment shown in FIG. 4, an example is shown in which a belt-like aluminum vapor-deposited film is used as a belt-like laminate of an electrode layer, a non-porous dielectric layer, and a porous dielectric layer. Examples of the body electrode include, for example, a metal foil, a metal sheet, or a conductive resin sheet containing a conductive substance.Examples of the non-porous dielectric of the belt-shaped laminate include a resin film, Or a resin sheet. Examples of the porous dielectric of the belt-shaped laminate include the above-mentioned fibrous porous dielectric, foam-type porous dielectric, and film-type porous dielectric. These can be used by appropriately laminating them. Naturally, a metal vapor deposition film other than aluminum can also be used.
[0052]
FIG. 5 shows still another embodiment of the present invention in which a flat electrode 22 and a dielectric carrier 64 are used as a set of electrodes and a dielectric layer.
A pair of rollers 92a and 92b arranged at a predetermined interval, a dielectric carrier 64 capable of transporting the object 11 in a fixed direction (the direction indicated by arrow A), and the dielectric carrier 64 5 cylindrical electrodes 21 (which may be referred to as 21a, 21b, 21c, 21d, and 21e from the upstream side) arranged in parallel at a predetermined interval along the surface of Deploy. The dielectric carrier 64 includes a non-porous dielectric layer 34 and a porous dielectric layer 44, and is arranged such that the porous dielectric layer 44 is on the outside and the non-porous dielectric layer 34 is on the inside. . The electrodes 21a to 21e are composed of non-porous dielectric layers 31a to 31e (hereinafter, sometimes collectively referred to as a non-porous dielectric layer 31) and a porous dielectric layer 41a provided in contact with the surface thereof. To 41e (hereinafter, may be collectively referred to as a dielectric layer 41). The electrode 21 may be capable of rotating itself with the central axis of the cylinder as a rotation axis, or may be fixed without rotating. It is preferable that the electrode itself be able to rotate around its central axis as a rotation axis, since the surface of the object to be processed is less likely to be damaged when moving. With respect to the dielectric carrier 64, the electrode 22 made of a plate-like electrode or the like is arranged on the opposite side of the electrode 21 so as to face the electrode 21. With the use of the apparatus as shown in FIG. 5, even if the object to be processed is a powder or a single fiber, it can be easily processed. In the case of processing these objects, it is preferable to provide a means for adjusting the thickness to a certain value, for example, a roll (not shown) before supplying the material to the discharge region.
[0053]
The five electrodes 21 are connected to one AC power supply 51, and the electrodes 22 are grounded. In the embodiment shown in FIG. 5, an AC power supply 51 is connected to the electrode 21 and the electrode 22 is grounded. Alternatively, the AC power supply 51 may be connected to the electrode 22 and the electrode 21 may be grounded. In the embodiment shown in FIG. 5, the five electrodes 21 are connected to one AC power supply 51, and the same AC high voltage is applied to all the five electrodes 21. A different AC high voltage may be applied to each electrode 21 by connecting to a different AC power supply.
[0054]
The object to be processed 11 is transferred onto the dielectric carrier 64 by a transfer means (for example, a pair of delivery rollers: not shown) provided upstream of the electrodes 21 and 22, and the electrode 21 a is connected to the dielectric carrier 64 by the dielectric carrier 64. It is continuously supplied at a predetermined speed in the direction indicated by arrow A between the electrode 22 and one surface thereof, and one surface thereof is always in contact with the porous dielectric layer 44 of the dielectric carrier 64, and at the same time, the other surface is the electrode 21a. , 21b, 21c, 21d, and 21e while passing between the electrodes 21e and 22. The object 11 that has passed between the electrode 21 e and the electrode 22 is transferred on the dielectric carrier 64, and is provided with a transfer unit (for example, a pair of delivery rollers: not shown) provided downstream of the electrodes 21 and 22. Is continuously transferred at a predetermined speed.
Also in this embodiment, the entire surface treatment of the object 11 can be continuously performed in the same manner as the embodiment shown in FIG. In this embodiment, by using the dielectric carrier, a normal flat electrode can be used as the inducing electrode.
[0055]
The embodiment shown in FIG. 5 is generally carried out in an open system (in air), but if it is necessary to use a total surface treatment gas other than air depending on the desired total surface treatment, the embodiment shown in FIG. Discharge can be generated while supplying the processing gas to the processing region.
In the embodiment shown in FIG. 5, as the combination of the electrode and the dielectric layer, a combination of the plate-shaped electrode 22 and the dielectric carrier 64, and the electrodes 21a to 21e, the non-porous dielectric layers 31a to 31e, and the porous A combination of the dielectric layers 41a to 41e is used, but instead of one or both of them, a belt-like lamination of the electrode layer, the non-porous dielectric layer, and the porous dielectric layer shown in FIG. The body can be used.
[0056]
【Example】
Hereinafter, the present invention will be described specifically with reference to Examples, but these do not limit the scope of the present invention.
[referenceExample 1)
A polyester film (width = 200 mm, length = 250 mm, thickness = 50 μm) was used as the object to be processed.
An apparatus similar to the apparatus shown in FIG. 1 was used as the apparatus for treating the entire surface. A glass nonwoven fabric (width = 200 mm, length = 250 mm, thickness = 0.2 mm, gap height in the thickness direction = 100 μm or less) is used for the porous dielectric layer, and Teflon is used for the non-porous dielectric layer. A sheet (width = 200 mm, length = 250 mm, thickness = 0.1 mm) was used, and flat stainless steel (width = 160 mm, length = 210 mm) was used for the electrode.
The total surface treatment was performed in the air by applying an alternating current of 400 W for 1 second using an impulse power supply (frequency = 5 KHz).
The contact angle of the polyester film before and after the total surface treatment was measured using a Face contact angle meter (manufactured by Kyowa Interface Science Co., Ltd .; contact angle meter CA-S-micro II type). While the contact angle with water before was 63.8 °, the contact angle with water after treatment was 36.6 °, and the hydrophilicity was improved.
[0057]
[referenceExample 2)
The same operation as in Example 1 was performed except that the total surface treatment was performed using an aluminum foil (width = 200 mm, length = 250 mm, thickness = 20 μm) as an object to be processed.
When the contact angle of the aluminum foil before and after the total surface treatment was measured, the contact angle with water before treatment was 52.1 °, whereas the contact angle with water after treatment was 15.1 °. 5 °, and the hydrophilicity was improved.
[0058]
【Example1]
As an object to be treated, a polypropylene / polyethylene split fiber having a mass ratio of polypropylene to polyethylene of 50:50 is wet-processed, then the split fiber is split by a water entanglement treatment, and the entangled nonwoven fabric (width = 200 mm, length = 250 mm, thickness = 0.3 mm). The total surface treatment equipment isreferenceThe equipment used in Example 1 was used.
The total surface treatment was performed in the atmosphere by applying an alternating current of 800 W for 10 seconds using an impulse power supply (frequency = 5 KHz).
The nonwoven fabric before the total surface treatment was very hard to wet even when immersed in water, whereas the nonwoven fabric after the treatment was instantly wetted to the inside when immersed in water.
[0059]
【The invention's effect】
According to the present invention,CoatThe entire surface of the processing object can be processed. Further, according to the present invention, damage to the object to be processed due to spark discharge or the like, or uneven processing is unlikely to occur, any kind of total surface treatment gas can be used, and the total Surface treatment can be performed.
Further, according to the present invention, it is not necessary to use a specific gas, and the total surface of the object can be uniformly treated regardless of the total surface treatment gas.
Furthermore, according to the present invention, since only the entire surface of the portion of the object to be processed is sandwiched between the pair of electrodes, one of the electrodes is a plate-like electrode, and the other of the electrodes is desired. , For example, a reticulated electrode or a linear electrode, the surface of the object to be processed can be selectively treated in the same pattern as the desired shape.
[Brief description of the drawings]
FIG. 1 is a sectional view schematically showing the basic principle of the device of the present invention.
FIG. 2 is a perspective view schematically showing one embodiment of the device of the present invention.
FIG. 3 is a cross-sectional view schematically showing another embodiment of the device of the present invention.
FIG. 4 is a sectional view schematically showing still another embodiment of the device of the present invention.
FIG. 5 is a cross-sectional view schematically showing still another embodiment of the device of the present invention.
[Explanation of symbols]
11. Object to be processed; 21, 22. Electrode; 23. Aluminum layer;
31, 32, 34 ··· non-porous dielectric layer;
33. · Polyester dielectric film layer;
41, 42, 43, 44 ··· porous dielectric layer; 51 · · · AC power supply;
63 .. Aluminum vapor-deposited film; 64 .. Dielectric carrier;
71, 72 ··· dielectric layer; 91a, 91b, 91c, 91d ··· fixed roller; 92a, 92b ··· roller

Claims (4)

Opposing and disposed, disposed a first electrode provided with induction conductor layer on the opposite surface side, the porous object to be processed between a second electrode, wherein, provided on the first electrode The dielectric layer comprises a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the first electrode side,
Then, without directly contacting the first electrode and the object to be processed, each of the porous dielectric layer and the second electrode provided on the first electrode and the outer surface of the object to be processed are directly In a state where the electrodes are in contact with each other, an AC voltage is applied between the two electrodes to generate a discharge in the internal voids of the porous dielectric layer and the internal voids of the porous workpiece sandwiched between the two electrodes. A method for treating the entire surface of a porous object, which is characterized by the following. And oppositely disposed, a first electrode, a porous object to be processed between a second electrode having a dielectric layer on the opposite surface side is arranged provided with induction conductor layer on the opposite surface side, Here, the dielectric layer provided on the first electrode includes a porous dielectric layer on the facing surface side and a non-porous dielectric layer on the first electrode side.
Then, without directly contacting each of the two electrodes and the object to be processed, each of the porous dielectric layer provided on the first electrode and the dielectric layer provided on the second electrode, An AC voltage is applied between the two electrodes in a state where the outer surface of the body is in direct contact with the outer surface of the body, so that the internal gap of the porous dielectric layer and the internal gap of the porous object to be processed are sandwiched between the two electrodes. A method for treating the entire surface of a porous object to be processed, characterized in that: The dielectric layer provided on the second electrode includes (1) a porous dielectric portion on at least a part of the surface on the facing surface side, or (2) a porous dielectric layer on the facing surface side, 3. The method according to claim 2 , comprising a non-porous dielectric layer on the electrode side or (3) entirely comprising a porous dielectric layer. (1) a first electrode and a second electrode that are arranged to face each other,
(2) a dielectric layer disposed on the opposing surface side of the first electrode, the dielectric layer comprising a porous dielectric layer on the opposing surface side and a non-porous dielectric layer on the first electrode side ;
(3) wherein the first electrode is not in direct contact with, the respectively first provided on the electrode porous dielectric layer and the second electrode, the porous object to be processed such that the outer surface in direct contact means can be placed, and (4) by connecting the both electrodes electrically, characterized in that it comprises a means capable of applying an alternating voltage between the electrodes, the porous object to be processed Total surface treatment equipment.

Images