JP3578562B2 - Surface treatment equipment - Google Patents

Surface treatment equipment Download PDF

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Publication number
JP3578562B2
JP3578562B2 JP19558696A JP19558696A JP3578562B2 JP 3578562 B2 JP3578562 B2 JP 3578562B2 JP 19558696 A JP19558696 A JP 19558696A JP 19558696 A JP19558696 A JP 19558696A JP 3578562 B2 JP3578562 B2 JP 3578562B2
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JP
Japan
Prior art keywords
surface treatment
auxiliary tool
workpiece
electrode
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP19558696A
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Japanese (ja)
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JPH1018097A (en
Inventor
篤 関
正道 袖
敦 雲居
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippi Corp
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Nippi Corp
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Filing date
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Priority to JP19558696A priority Critical patent/JP3578562B2/en
Publication of JPH1018097A publication Critical patent/JPH1018097A/en
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  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Description

【0001】
【発明の属する技術分野】
本発明はアルミ材の表面処理槽に充填された陽極処理液中に被処理部品、例えばスタブビームを浸漬する表面処理装置に関する。
【0002】
【発明が解決しようとする課題】
本発明は後述の従来の技術を更に発展させたものである。本発明は処理液中に浸漬した場合に形状が空気溜りの出来易いポケット形状のある被処理物であって、形状又は大きさもしくは形状大きさ共に異なる被処理物のポケット部が完全に処理出来、コストの安い表面処理装置を提供することを目的とする。
【0003】
【課題を解決するための手段】
本発明の第1の発明は被処理物を空中と処理槽中のとの間を上下動し、被処理物を処理槽中の処理液中にて揺動可能とした表面処理装置において、電極と、前記電極と被処理物とを結合する導電性部材と、被処理物をぶら下げる吊り下げ部材と、上端を支点として揺動自在に支持され、前記吊り下げ部材で吊り下げられた被処理物に添う電気絶縁性の補助具と、上記補助具を揺動させるための駆動手段と、被処理物と補助具間を結合する結合部材と、前記各部材を担持する枠体と、を有することを特徴とする表面処理装置である。
【0004】
本発明の第2の発明は前記電極は横設された梁形状で前記枠体に固定されている第1の発明に記載の表面処理装置である。
【0005】
本発明の第3の発明は前記吊り下げ部材が前記導電性部材を兼ねている第1の発明に記載の表面処理装置である。
【0006】
本発明の第4の発明は前記導電性部材はアルミ線材である第1の発明に記載の表面処理装置である。
【0007】
本発明の第5の発明は前記吊り下げ部材は線材である第1の発明に記載の表面処理装置である。
【0008】
本発明の第6の発明は前記補助具は耐熱・耐薬品性樹脂材を梯子状に構成した第1の発明に記載の表面処理装置である。
【0009】
本発明の第7の発明は上記補助具を揺動するための駆動手段は、上記補助具に補助具の揺動と共に揺動するように設けられたアーム端と枠体間を連結するクレビス形エアシリンダである第1の発明に記載の表面処理装置である。
【0010】
本発明の第8の発明は前記電極は前記枠体の一部である第1の発明に記載の表面処理装置である。
【0011】
【従来の技術】
めっき処理槽に充填された、エアーバブリングされるめっき液中にプリント基板を浸漬するめっき治具において、プリント基板を縦置きに保持するキャリアを治具本体に揺動可能に支持したプリント基板のめっき治具が、特開平1−316498号公報に開示されている。
【0012】
従来、空気溜り部は反応ガスの存在のために処理液との接触が不十分となり、周囲の部分に比べて表面処理が不良となるので、処理液に浸漬した被処理物を人が揺動して反応ガスを逃がしたり、処理後に不十分な表面処理部を補修して、周りと同等な処理面としていた。
【0013】
【発明の実施の形態】
以下、本発明の実施の形態を図面に従って説明する。
【0014】
〔実施の形態1〕
図1は、正面図、図2は図1の側面図である。被処理物Wを吊り下げる吊り下げ部材1の上端は横設した電極2に支持されている。電極2は絶縁して支持部材2aに固定され、支持部材2aは枠体13に固定されている。この電極2への吊り下げ部材1の支持は電極2にハンガ3を設け、このハンガ3に吊り下げ部材1の上端に結合した金属の輪環4を引っかける。被処理物Wは吊り下げ部材1で結束される。ここで吊り下げ部材1としては処理槽5中の処理液Lに侵されない材質のアルミニウム線材等が選ばれる。
【0015】
本例では、吊り下げ部材1は2本であるが被処理物Wの形状により1本以上必要な数だけ用いる。また二つの被処理物Wは夫々が共通の吊り下げ部材1に結合されている。この吊り下げ部材1は導電性として電極2と被処理物Wを結ぶ導電性部材を兼ねてもよい。本例では電極2と被処理物Wは導電性部材1aでゆるく結合されている。この導電性部材1aはアルミニウム線である。この導電性部材1aとしては導電性と可撓性があれば他の材料でもよい。なお、吊り下げ部材1はひも、ワイヤ、チェン、等被処理物Wが吊り下げ状態で自在に揺動できるものであればよい。
【0016】
補助具6は梯子状に絶縁材、例えば変成PPE(ポリフェニレンエーテル)材で形成され、上端の水平軸6aは、ブラケット7に固定して垂下しているハンガ7a下端に設けた軸受7bに回動自在に嵌合しており、補助具6はブラケット7に吊り下げられ、水平軸6aを中心に揺動自在である。
【0017】
補助具6と被処理物Wはワイヤ8により、結ばれている。このワイヤ8は特に制約はなく、補助具6と被処理物Wが結合されればよい。本例では被処理物Wの下端よりも一方へ向ってワイヤ8を張るように用いている。
【0018】
補助具6を揺動させるための駆動手段9についてのべる。上記補助具6の軸6aの中央に固定又は一体に設けたアーム11にピストンロッド端を枢着されると共に、シリンダ後端をブラケット7に結合されたクレビス形のエアシリンダ12を備えている。
【0019】
ブラケット7は装置全体を支持する枠体13に取り付けられている。枠体13には電極2が固定されている。枠体13は上下方向のガイド手段で垂直に上下できるように規制してもよい。
【0020】
上記エアシリンダ12へは圧縮空気源14から、切換バルブを含むコントローラ15を介して圧縮空気配管が設けられている。
【0021】
枠体13は図示されないホイストにより吊り下げられ上下動して、被処理物Wを含み装置全体が処理槽5内の処理液Lに被処理物Wが浸漬する位置と、処理槽5の上方の空間の位置をとることができるようになっている。
【0022】
上記における作用を説明する。装置全体は枠体13をホイストで引き上げられて上限の位置に有り、全てが空中にある。この状態で吊り下げ部材1で被処理物Wを結束して輪環4をハンガ3に掛けて被処理物Wを吊り下げる。次にワイヤ8でもって被処理物Wと補助具6を結びつける。この結び方はゆるみなく結束してもよく、たるませて結んでもよい。次に電極2と被処理物Wを導電線部材1aで結合する。図示されないホイストにより、枠体13を吊り下げたまま処理液L中へ被処理物Wが全部浸漬するまで降下させ停止する。ここで図2に示すように、補助具6は垂下していて鉛直方向を保ったままであり、エアシリンダ12はピストンが中間位置にある。被処理物Wは電極2から下る吊り下げ部材1で吊り下げられ、ほぼ垂直方向を向いている。図1において上記の被処理物Wを支持すると共に、上記の被処理物Wを吊り下げることにより垂直方向を向いた吊り下げ部材1には、更に張力が加わるように下側の被処理物Wがぶらさがっている。そして、図1において右側の導電性部材1aは電極2から各被処理物Wへゆるく結合されていて導電状態となっている。
【0023】
ここでエアシリンダ12は圧縮空気源14から切換弁を介して交互に左右のシリンダ室へ送られる圧縮空気で伸縮し、これによってアーム11を補助具6の軸6aを中心に揺動しこれによって軸6aは軸受7b中で揺動して補助具6を図2に示す位置から左右へ夫々約7°の範囲で揺動する。この揺動につれてワイヤ8で結ばれている被処理物Wはハンガ3を中心にして吊り下げ部材1に吊り下げられ乍ら揺動する。
【0024】
このように揺動するため、被処理物Wに空気のポケットがあったとしても、このポケットが解消する。被処理物Wは吊り下げ部材1で吊り下げられるので大小、形状の差異にかかわらず、この装置を用いることができ、特に被処理物Wに合わせるための治具の必要がない。補助具6が梯子状であるので被処理物Wの大小、形状の相違にかかわらず、被処理物Wと補助具6を結合するのみですむ。吊り下げ部材1と導電性部材1aを兼用すれば部材が節約される。特に補助具6は耐熱・耐薬品性樹脂材を梯子状に組んだのみであり、全体の設備コストを著しく引き下げている。
【0025】
【実施例】
被処理物Wアルミ材のスタブビームは陽極、処理液Lの極性は陰極である。
【0026】
【発明の効果】
本出願に係る第1の発明は、吊り下げ部材で被処理物を被処理液中にぶら下げておいて、被処理物に沿う上端を支点として揺動自在な補助具と被処理物を結合して被処理物を揺動させるようにしたので、(1)被処理物の大小、形状の相違に対して装置を変更することなくそのまま使用できる。(2)吊り下げ具で他の工程終了後の被処理物を枠体に吊り下げ、被処理物と補助具を結合部材で結ぶだけであり、治具への被処理物取り付けというような繁雑な作業がない。(3)簡単な補助具を用いて、これを駆動するのみであり、設備コストが非常に安い。
【0027】
本出願に係る第2の発明は、第1の発明において、電極が横設されているので、導電線部材の結合部分が選び易く、適宜、被処理物の揺動の障害とならない場所が選べる。
【0028】
本出願に係る第3の発明は、第1の発明において吊り下げ部材が導電線部材を兼ねているので、被処理物を電極にぶら下げるだけでよい。
【0029】
本出願に係る第4の発明は、第1の発明において導電性部材をアルミ線材としたので陽極処理液に対応できる。
【0030】
本出願に係る第5の発明は、吊り下げ部材は線材であることにより、揺動に対する自由度が大きく且つそのまま被処理物を結束できる。
【0031】
本出願に係る第6の発明は、第1の発明において、補助具を耐熱・耐薬品性樹脂材としたことにより、比較的安価な装置を提供できた。
【0032】
本出願に係る第7の発明は第1の発明において、補助具にアームを設けこのアームと枠体間をクレビス形エアシリンダで結合したので、構成要素が極めて少なく動作確実で且つ揺動に際して、揺動の端部において補助具を急速度で揺動の方向変換を行わせるので、被処理物の気泡を取り除く効果が大きい。
【0033】
本出願に係る第8の発明は、第1の発明において、電極を枠体の一部としたことにより、電極を枠体として用いることができる。従って電極に被処理物を吊り下げられる。
【図面の簡単な説明】
【図1】本発明の実施の形態の正面図である。
【図2】図1の側面図である。
【符号の説明】
1…吊り下げ部材 1a…導電性部材
2…電極
3…ハンガ
4…輪環
5…処理槽
6…補助具 6a…水平軸
7…ブラケット 7a…ハンガ 7b…軸受
8…ワイヤ
9…駆動手段
11…アーム
12…エアシリンダ
13…枠体
14…圧縮空気源
15…コントローラ
W…被処理物
L…処理液
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a surface treatment apparatus for immersing a component to be treated, for example, a stub beam, in an anodizing solution filled in an aluminum surface treatment tank.
[0002]
[Problems to be solved by the invention]
The present invention is a further development of the prior art described below. The present invention relates to an object to be processed having a pocket shape whose shape is liable to form an air pocket when immersed in a processing solution, and a pocket portion of an object to be processed which is different in shape, size or shape and size can be completely processed. It is an object of the present invention to provide a low-cost surface treatment apparatus.
[0003]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided a surface treatment apparatus in which an object to be processed is moved up and down between the air and a processing tank, and the object can be swung in a processing liquid in the processing tank. A conductive member that couples the electrode and the workpiece; a hanging member that hangs the workpiece; and a workpiece that is swingably supported at an upper end as a fulcrum and is suspended by the hanging member. , An electrically-insulating auxiliary tool, a driving unit for swinging the auxiliary tool, a connecting member for connecting the workpiece and the auxiliary tool, and a frame supporting the respective members. A surface treatment apparatus characterized by the following.
[0004]
A second invention of the present invention is the surface treatment apparatus according to the first invention, wherein the electrode is fixed to the frame in a laterally beam shape.
[0005]
A third aspect of the present invention is the surface treatment apparatus according to the first aspect, wherein the hanging member also serves as the conductive member.
[0006]
A fourth invention of the present invention is the surface treatment apparatus according to the first invention, wherein said conductive member is an aluminum wire.
[0007]
A fifth invention of the present invention is the surface treatment apparatus according to the first invention, wherein the hanging member is a wire.
[0008]
A sixth invention of the present invention is the surface treatment apparatus according to the first invention, wherein the auxiliary tool is made of a heat-resistant / chemical-resistant resin material in a ladder shape.
[0009]
According to a seventh aspect of the present invention, the driving means for swinging the auxiliary tool is a clevis type connecting between an end of an arm and a frame provided to the auxiliary tool so as to swing together with the swing of the auxiliary tool. The surface treatment apparatus according to the first invention, which is an air cylinder.
[0010]
An eighth invention of the present invention is the surface treatment apparatus according to the first invention, wherein said electrode is a part of said frame.
[0011]
[Prior art]
In a plating jig for immersing a printed board in a plating solution to be air-bubbled filled in a plating bath, plating of the printed board in which a carrier for holding the printed board vertically is swingably supported by the jig body. A jig is disclosed in JP-A-1-316498.
[0012]
Conventionally, the contact of the air reservoir with the processing liquid is insufficient due to the presence of the reaction gas, and the surface treatment is poor compared to the surrounding area. Then, the reaction gas was escaped, or an insufficient surface treatment part was repaired after the treatment, so that the treated surface was equivalent to the surrounding area.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0014]
[Embodiment 1]
1 is a front view, and FIG. 2 is a side view of FIG. The upper end of the suspending member 1 for suspending the workpiece W is supported by a horizontally disposed electrode 2. The electrode 2 is insulated and fixed to the support member 2a, and the support member 2a is fixed to the frame 13. In order to support the hanging member 1 on the electrode 2, a hanger 3 is provided on the electrode 2, and a metal ring 4 connected to the upper end of the hanging member 1 is hooked on the hanger 3. The workpiece W is bound by the hanging member 1. Here, as the hanging member 1, an aluminum wire rod or the like, which is not affected by the processing liquid L in the processing tank 5, is selected.
[0015]
In the present example, the number of the hanging members 1 is two, but one or more necessary members are used depending on the shape of the workpiece W. Each of the two workpieces W is connected to a common hanging member 1. The hanging member 1 may also serve as a conductive member that connects the electrode 2 and the workpiece W as conductive. In this example, the electrode 2 and the workpiece W are loosely coupled by the conductive member 1a. This conductive member 1a is an aluminum wire. As the conductive member 1a, another material may be used as long as it has conductivity and flexibility. The hanging member 1 may be a string, a wire, a chain, or any other member capable of freely swinging the workpiece W in a suspended state.
[0016]
The auxiliary tool 6 is made of an insulating material such as a modified PPE (polyphenylene ether) material in a ladder shape, and the horizontal shaft 6a at the upper end is rotated by a bearing 7b provided at the lower end of a hanger 7a fixed to the bracket 7 and hanging therefrom. The auxiliary tool 6 is freely hung on the bracket 7 and is swingable about a horizontal shaft 6a.
[0017]
The auxiliary tool 6 and the workpiece W are connected by a wire 8. The wire 8 is not particularly limited, as long as the auxiliary tool 6 and the workpiece W are connected. In this example, the wire 8 is used to stretch the wire 8 toward one side from the lower end of the workpiece W.
[0018]
The driving means 9 for swinging the auxiliary tool 6 will be described. The auxiliary tool 6 includes a clevis-type air cylinder 12 having a piston rod end pivotally attached to an arm 11 fixed or integrally provided at the center of a shaft 6a of the auxiliary tool 6, and a cylinder rear end connected to a bracket 7.
[0019]
The bracket 7 is attached to a frame 13 that supports the entire apparatus. The electrode 2 is fixed to the frame 13. The frame 13 may be regulated so as to be able to move up and down vertically by a vertical guide means.
[0020]
A compressed air pipe is provided to the air cylinder 12 from a compressed air source 14 via a controller 15 including a switching valve.
[0021]
The frame 13 is suspended by a hoist (not shown) and moves up and down, so that the entire apparatus including the processing object W is immersed in the processing liquid L in the processing tank 5 and a position above the processing tank 5. You can take the position of the space.
[0022]
The operation in the above will be described. The entire apparatus is at the upper limit position by lifting the frame 13 with a hoist, and all are in the air. In this state, the workpiece W is bound by the suspending member 1 and the ring 4 is hung on the hanger 3 to suspend the workpiece W. Next, the workpiece W and the auxiliary tool 6 are connected with the wire 8. This tying method may be tightly bound or loosened. Next, the electrode 2 and the workpiece W are joined by the conductive wire member 1a. The workpiece W is lowered and stopped by the hoist (not shown) until the workpiece W is completely immersed in the processing liquid L while the frame 13 is suspended. Here, as shown in FIG. 2, the assisting tool 6 is hung down and remains vertical, and the air cylinder 12 has a piston at an intermediate position. The object to be processed W is suspended by the suspension member 1 descending from the electrode 2 and is oriented substantially vertically. In FIG. 1, the above-mentioned workpiece W is supported and, at the same time, the above-mentioned workpiece W is suspended so that the hanging member 1 which is oriented vertically is further tensioned. Is hanging. In FIG. 1, the conductive member 1a on the right side is loosely coupled from the electrode 2 to each workpiece W and is in a conductive state.
[0023]
Here, the air cylinder 12 expands and contracts with the compressed air which is alternately sent from the compressed air source 14 to the left and right cylinder chambers via the switching valve, whereby the arm 11 swings about the shaft 6a of the assisting tool 6, thereby The shaft 6a swings in the bearing 7b, and swings the assisting tool 6 from the position shown in FIG. With this swing, the workpiece W connected by the wire 8 swings around the hanger 3 while being hung by the hanging member 1.
[0024]
Due to such swinging, even if there is an air pocket in the workpiece W, this pocket is eliminated. Since the workpiece W is hung by the hanging member 1, this apparatus can be used regardless of the difference in size and shape, and there is no need for a jig for adjusting the workpiece W. Since the auxiliary tool 6 has a ladder shape, it is only necessary to connect the workpiece W and the auxiliary tool 6 irrespective of the size and the shape of the workpiece W. If the hanging member 1 and the conductive member 1a are also used, the number of members can be reduced. In particular, the auxiliary tool 6 is formed only by assembling a heat-resistant and chemical-resistant resin material in a ladder shape, which significantly reduces the overall equipment cost.
[0025]
【Example】
The aluminum stub beam of the workpiece W is an anode, and the polarity of the processing liquid L is a cathode.
[0026]
【The invention's effect】
According to a first aspect of the present invention, an object to be processed is suspended in a liquid to be processed by a suspending member, and a swingable auxiliary tool and an object to be processed are coupled with the upper end along the object to be processed as a fulcrum. Since the object to be processed is swung, (1) the object to be processed can be used as it is without changing the apparatus for the difference in size and shape of the object. (2) An object to be processed after completion of another process is simply hung on a frame with a hanging tool, and the object to be processed and an auxiliary tool are simply connected by a connecting member. No work. (3) It is only driven by a simple auxiliary tool, and the equipment cost is very low.
[0027]
According to a second aspect of the present invention, in the first aspect, since the electrodes are provided horizontally, a coupling portion of the conductive wire member can be easily selected, and a place which does not obstruct the swing of the workpiece can be appropriately selected. .
[0028]
In the third invention according to the present application, since the hanging member also serves as the conductive wire member in the first invention, it is only necessary to hang the object to be processed on the electrode.
[0029]
The fourth invention according to the present application can correspond to an anodizing solution because the conductive member is an aluminum wire in the first invention.
[0030]
In the fifth invention according to the present application, since the hanging member is a wire, the degree of freedom for swing is large and the object to be processed can be bound as it is.
[0031]
The sixth invention according to the present application can provide a relatively inexpensive device by using the heat-resistant and chemical-resistant resin material in the first invention.
[0032]
According to a seventh aspect of the present invention, in the first aspect, an arm is provided on the auxiliary tool, and the arm and the frame are connected by a clevis-type air cylinder. Since the direction of the swing is changed by the assisting tool at the end of the swing at a rapid speed, the effect of removing air bubbles from the object to be processed is large.
[0033]
According to an eighth aspect of the present invention, in the first aspect, the electrode is used as a frame by forming the electrode as a part of the frame. Therefore, the object to be processed can be hung on the electrode.
[Brief description of the drawings]
FIG. 1 is a front view of an embodiment of the present invention.
FIG. 2 is a side view of FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Hanging member 1a ... Conductive member 2 ... Electrode 3 ... Hanger 4 ... Ring 5 ... Processing tank 6 ... Auxiliary tool 6a ... Horizontal shaft 7 ... Bracket 7a ... Hanger 7b ... Bearing 8 ... Wire 9 ... Driving means 11 ... Arm 12 Air cylinder 13 Frame 14 Compressed air source 15 Controller W Processing object L Processing liquid

Claims (8)

被処理物を空中と処理槽の中との間を上下動し、被処理物を処理槽中の処理液中にて揺動可能とした表面処理装置において、
電極と、
前記電極と被処理物とを結合する導電性部材と、
被処理物をぶら下げる吊り下げ部材と、
上端を支点として揺動自在に支持され、前記吊り下げ部材で吊り下げられた被処理物に添う電気絶縁性の補助具と、
上記補助具を揺動させるための駆動手段と、
被処理物と補助具間を結合する結合部材と、
前記各部材を担持する枠体と、
を有することを特徴とする表面処理装置。
In a surface treatment apparatus in which the object to be processed is moved up and down between the air and the inside of the processing tank, and the object to be processed can be swung in the processing liquid in the processing tank,
Electrodes and
A conductive member that couples the electrode and the object,
A suspending member for hanging the workpiece,
An electrically insulating auxiliary tool that is swingably supported on the upper end as a fulcrum and accompanies the workpiece suspended by the suspending member;
Driving means for swinging the auxiliary tool,
A coupling member for coupling between the workpiece and the auxiliary tool,
A frame supporting each of the members,
A surface treatment apparatus comprising:
前記電極は横設された梁形状で前記枠体に固定されている請求項1に記載の表面処理装置。The surface treatment device according to claim 1, wherein the electrode is fixed to the frame body in a laterally beam shape. 前記吊り下げ部材が前記導電性部材を兼ねている請求項1に記載の表面処理装置。The surface treatment device according to claim 1, wherein the hanging member also serves as the conductive member. 前記導電性部材はアルミ線材である請求項1に記載の表面処理装置。The surface treatment device according to claim 1, wherein the conductive member is an aluminum wire. 前記吊り下げ部材は線材である請求項1に記載の表面処理装置。The surface treatment device according to claim 1, wherein the hanging member is a wire. 前記補助具は耐熱・耐薬品性樹脂材を梯子状に構成した請求項1に記載の表面処理装置。The surface treatment apparatus according to claim 1, wherein the auxiliary tool is made of a heat-resistant / chemical-resistant resin material in a ladder shape. 上記補助具を揺動するための駆動手段は、上記補助具に補助具の揺動と共に揺動するように設けられたアーム端と枠体間を連結するクレビス形エアシリンダである請求項1に記載の表面処理装置。The driving means for swinging the auxiliary tool is a clevis-type air cylinder which connects an arm end and a frame provided to the auxiliary tool so as to swing together with the swing of the assist tool. Description: 前記電極は前記枠体の一部である請求項1に記載の表面処理装置。The surface treatment device according to claim 1, wherein the electrode is a part of the frame.
JP19558696A 1996-07-04 1996-07-04 Surface treatment equipment Expired - Lifetime JP3578562B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19558696A JP3578562B2 (en) 1996-07-04 1996-07-04 Surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19558696A JP3578562B2 (en) 1996-07-04 1996-07-04 Surface treatment equipment

Publications (2)

Publication Number Publication Date
JPH1018097A JPH1018097A (en) 1998-01-20
JP3578562B2 true JP3578562B2 (en) 2004-10-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP19558696A Expired - Lifetime JP3578562B2 (en) 1996-07-04 1996-07-04 Surface treatment equipment

Country Status (1)

Country Link
JP (1) JP3578562B2 (en)

Also Published As

Publication number Publication date
JPH1018097A (en) 1998-01-20

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