JP3574220B2 - Vacuum pump device - Google Patents

Vacuum pump device Download PDF

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Publication number
JP3574220B2
JP3574220B2 JP14121495A JP14121495A JP3574220B2 JP 3574220 B2 JP3574220 B2 JP 3574220B2 JP 14121495 A JP14121495 A JP 14121495A JP 14121495 A JP14121495 A JP 14121495A JP 3574220 B2 JP3574220 B2 JP 3574220B2
Authority
JP
Japan
Prior art keywords
ejector
tank
diffuser
circulation pump
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14121495A
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Japanese (ja)
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JPH08312600A (en
Inventor
高之 森井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tlv Co Ltd
Original Assignee
Tlv Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tlv Co Ltd filed Critical Tlv Co Ltd
Priority to JP14121495A priority Critical patent/JP3574220B2/en
Publication of JPH08312600A publication Critical patent/JPH08312600A/en
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Publication of JP3574220B2 publication Critical patent/JP3574220B2/en
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Expired - Fee Related legal-status Critical Current

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Description

【0001】
【産業上の利用分野】
本発明は、エゼクタとタンクと循環ポンプを組み合わせた真空ポンプ装置に関し、特に、エゼクタの吸引効率を高めると共に、循環ポンプのポンプ効率も高く維持することのできるものに関する。エゼクタを用いた組み合わせ真空ポンプは、エゼクタ内のノズルに水等の駆動流体を循環ポンプで噴出させて、その流体の速度エネルギによりエゼクタに吸引力を発生し、ガスや蒸気等の流体をエゼクタに吸引するもので、排ガスの吸引排除や、蒸気の回収等各種の真空源として用いられている。
【0002】
【従来の技術】
従来の真空ポンプ装置としては、例えば特公昭57−32240号公報に示されているようなものが用いられていた。これは、エゼクタのディフュ―ザと循環ポンプとしての渦巻きポンプの吸引口とを開放タンクを介して連通して、該開放タンクへ冷却水を供給する冷却水供給通路と制御弁を設けたもので、エゼクタを通過する循環流体の温度を制御してエゼクタでの真空吸引力を所定値に維持することができるものである。
【0003】
【本発明が解決しようとする課題】
上記従来の真空ポンプ装置では、エゼクタを通過する循環流体の量によっては充分な吸引力を得られない問題があった。これは、タンク内においてエゼクタとディフュ―ザを鉛直方向の下から上向きに設置しているためであり、特に循環流量が少ない場合は、エゼクタのノズルから吐出される流体が重力の影響を受けやすくなって吸引した流体により吐出流が乱され、充分な吸引力を生じなくなってしまうためである。
【0004】
また、エゼクタとディフュ―ザを鉛直方向の上から下向きに設置すれば、重力の影響による吸引力の低下は防止することができるが、エゼクタが多量の空気等の気体を吸引した場合に、循環ポンプがその気体を吸入してポンプ効率が低下してしまう恐れがある。
【0005】
従って本発明の技術的課題は、気体の吸引によるポンプ効率の低下を生じることがないと共に、充分なエゼクタの吸引力を得ることである。
【0006】
【課題を解決するための手段】
本発明の真空ポンプ装置の構成は次の通りである。少なくともエゼクタの一部またはディフューザの一部をタンク内に配置して、該タンクとエゼクタを循環ポンプを介して接続し、エゼクタを鉛直方向の上から下方向に配置し、ディフューザの外周に隔壁部材を配置したものにおいて、ディフューザの出口部の下方に流体衝突して質量の差異によって気体と液体を分離する衝突部を取り付けて、循環ポンプの吸込み口とタンクを接続し、循環ポンプの吐出口とエゼクタを接続して、当該循環ポンプでタンク内の流体をエゼクタに供給するものである。
【0007】
【作用】
エゼクタを鉛直方向の上から下方向に配置したことにより、循環流体が重力の影響を受けて吐出流が乱されることがなくなって、エゼクタの吸引力が低下することがない。
【0008】
ディフュ―ザの外周に隔壁部材を配置すると共に、出口部の下方に衝突部を取り付けたことにより、ディフュ―ザを出た流体はまず衝突部に衝突し質量の差異によって気体と液体が分離する。気体は軽いために外周の隔壁部材の内部に溜り、液体は下部に落ちる。すなわち、隔壁部材の内と外へ気液が分離される。隔壁部材の内側の気体を外部に排出し、下部に溜った液体だけを循環ポンプで吸引することにより、ポンプ効率が低下することはない。
【0009】
【実施例】
図示の実施例を詳細に説明する。
図1に真空ポンプ装置の全体構成図を示す。タンク1とエゼクタ2と、タンク1とエゼクタ2の間に配置した循環ポンプ3とで真空ポンプ装置を構成する。タンク1の上部にエゼクタ2を取り付け、タンク1内にディフュ―ザ6の下端部7を開口して形成する。ディフュ―ザ6の外周に隔壁部材4,5を配置すると共に、ディフュ―ザ6の下端部7の下方に衝突部としての衝突板8を取り付ける。隔壁部材4,5は、ディフュ―ザ6と同心円上に配置し、隔壁部材4の上端をタンク1の上板内面に溶接して取り付け、隔壁部材5はリブ9により隔壁部材4と同心円上に取り付ける。隔壁部材4の上部には複数の貫通孔10を設ける。衝突板8は、ディフュ―ザ6側端面に凹凸部を設けると共に、隔壁部材4と5の下端部の中間に位置するように取り付ける。
【0010】
タンク1の下方部開口11と循環ポンプ3の吸込み口を接続し、循環ポンプ3の吐出口12をエゼクタ2と接続する。エゼクタ2は図示はしていないが内部にノズルとその周囲に吸込み室を設けたものであり、循環ポンプ3の吐出口12とノズル部を接続すると共に、吸込み室を吸引通路13と接続して、吸引通路13から排ガスや回収蒸気等を吸引するものである。
【0011】
タンク1の上部にバルブ15を介して大気連通管16を取り付けると共に、下部にはブロ―管17を取り付ける。
【0012】
次に作用を説明する。
循環ポンプ3を駆動してタンク1内の流体をエゼクタ2に供給することにより、エゼクタ2で吸引通路13から排ガスや蒸気等を吸引する。エゼクタ2に吸引されたガスや蒸気等の気体は、循環流体と共にディフュ―ザ6から排出されて衝突板8の上面に衝突する。衝突板8に衝突後、質量の小さな気体は隔壁部材4の内側あるいは隔壁部材5の内側に至り大気連通管16から外部に排除され、質量の大きな液体は隔壁部材4,5の下部に落下することにより、気液が分離される。液体は開口11から循環ポンプ3により吸引され再度循環する。
【0013】
本実施例においては、2つの隔壁部材4,5を用いた例を示したが、1つの隔壁部材で足りることも、あるいは、2つ以上の隔壁部材を用いることもできる。また本実施例においては、衝突板8を用いた例を示したが、板8に代えてタンク1の底部内面を衝突部とすることもできる。
【0014】
【発明の効果】
エゼクタを鉛直方向の上から下向きに設置したことにより、循環流体が重力の影響を受けることがなく、エゼクタで充分な吸引力を確保することができると共に、衝突板と隔壁部材を配置したことにより気液を分離することができ、循環ポンプに排ガスや空気等の気体が吸入されることがなく、ポンプ効率が低下することがない。
【図面の簡単な説明】
【図1】本発明の真空ポンプ装置の実施例の一部断面構成図である。
【符号の説明】
1 タンク
2 エゼクタ
3 循環ポンプ
4 隔壁部材
5 隔壁部材
6 ディフュ―ザ
8 衝突板
13 吸引通路
[0001]
[Industrial applications]
The present invention relates to a vacuum pump device that combines an ejector, a tank, and a circulation pump, and more particularly to a vacuum pump device that can increase the suction efficiency of the ejector and maintain the pump efficiency of the circulation pump high. A combined vacuum pump using an ejector ejects a driving fluid such as water to a nozzle in the ejector by a circulating pump, generates a suction force in the ejector by the velocity energy of the fluid, and sends a fluid such as gas or vapor to the ejector. It is used for various vacuum sources such as exhaust elimination of exhaust gas and recovery of steam.
[0002]
[Prior art]
As a conventional vacuum pump device, for example, a device as disclosed in Japanese Patent Publication No. 57-32240 has been used. This is a device in which a diffuser of an ejector communicates with a suction port of a spiral pump as a circulation pump through an open tank, and a cooling water supply passage for supplying cooling water to the open tank and a control valve are provided. The vacuum suction force at the ejector can be maintained at a predetermined value by controlling the temperature of the circulating fluid passing through the ejector.
[0003]
[Problems to be solved by the present invention]
The above-described conventional vacuum pump device has a problem that a sufficient suction force cannot be obtained depending on the amount of circulating fluid passing through the ejector. This is because the ejector and the diffuser are installed vertically upward from the bottom in the tank, and especially when the circulation flow rate is small, the fluid discharged from the ejector nozzle is easily affected by gravity. This is because the discharged flow is disturbed by the sucked fluid, and a sufficient suction force is not generated.
[0004]
In addition, if the ejector and diffuser are installed vertically downward from the top, it is possible to prevent the suction force from decreasing due to the effect of gravity.However, when the ejector sucks a large amount of gas such as air, The pump may draw the gas and the pump efficiency may be reduced.
[0005]
Accordingly, it is an object of the present invention to obtain a sufficient ejector suction force while preventing a decrease in pump efficiency due to gas suction.
[0006]
[Means for Solving the Problems]
The configuration of the vacuum pump device of the present invention is as follows. At least a part of the ejector or a part of the diffuser is disposed in the tank, the tank and the ejector are connected via a circulation pump, the ejector is disposed vertically downward from above, and a partition member is provided on the outer periphery of the diffuser. in that place, by attaching a collision portion for separating the gas and liquid by the difference in mass fluid collides with the lower outlet portion of the diffuser, to connect the suction port and the tank of the circulation pump, the discharge port of the circulating pump And the ejector, and the circulation pump supplies the fluid in the tank to the ejector .
[0007]
[Action]
By disposing the ejector vertically downward from above, the discharge flow is not disturbed by the influence of gravity on the circulating fluid, and the suction force of the ejector does not decrease.
[0008]
By placing the partition member on the outer periphery of the diffuser and attaching the collision part below the outlet, the fluid that has exited the diffuser first collides with the collision part, and the gas and liquid are separated by the difference in mass . Since the gas is light, it stays inside the partition member on the outer periphery, and the liquid falls to the lower part. That is, gas-liquid is separated into and out of the partition member. By discharging the gas inside the partition member to the outside and sucking only the liquid stored in the lower part by the circulation pump, the pump efficiency does not decrease.
[0009]
【Example】
The illustrated embodiment will be described in detail.
FIG. 1 shows an overall configuration diagram of a vacuum pump device. A vacuum pump device is constituted by the tank 1 and the ejector 2, and the circulation pump 3 disposed between the tank 1 and the ejector 2. The ejector 2 is attached to the upper part of the tank 1, and the lower end 7 of the diffuser 6 is formed in the tank 1 by opening. The partition members 4 and 5 are arranged on the outer periphery of the diffuser 6, and a collision plate 8 as a collision portion is attached below the lower end 7 of the diffuser 6. The partition members 4 and 5 are arranged concentrically with the diffuser 6, and the upper end of the partition member 4 is attached by welding to the inner surface of the upper plate of the tank 1. The partition member 5 is concentric with the partition member 4 by the rib 9. Attach. A plurality of through holes 10 are provided in the upper part of the partition member 4. The collision plate 8 is provided with an uneven portion on the end surface on the diffuser 6 side, and is mounted so as to be located between the lower ends of the partition members 4 and 5.
[0010]
The lower opening 11 of the tank 1 is connected to the suction port of the circulation pump 3, and the discharge port 12 of the circulation pump 3 is connected to the ejector 2. Although not shown, the ejector 2 is provided with a nozzle therein and a suction chamber around the nozzle, and connects the discharge port 12 of the circulation pump 3 to the nozzle portion, and connects the suction chamber to the suction passage 13. The suction passage 13 sucks exhaust gas, collected steam, and the like.
[0011]
An air communication pipe 16 is attached to the upper part of the tank 1 via a valve 15, and a blow pipe 17 is attached to the lower part.
[0012]
Next, the operation will be described.
By driving the circulation pump 3 to supply the fluid in the tank 1 to the ejector 2, the ejector 2 sucks exhaust gas, steam, and the like from the suction passage 13. The gas such as gas or vapor sucked into the ejector 2 is discharged from the diffuser 6 together with the circulating fluid and collides with the upper surface of the collision plate 8. After colliding with the collision plate 8, the gas having a small mass reaches the inside of the partition member 4 or the inside of the partition member 5 and is discharged to the outside from the atmosphere communication pipe 16. Thereby, gas-liquid is separated. The liquid is sucked by the circulation pump 3 from the opening 11 and circulates again.
[0013]
In this embodiment, an example using two partition members 4 and 5 has been described. However, one partition member may be sufficient, or two or more partition members may be used. Further, in the present embodiment, the example in which the collision plate 8 is used has been described.
[0014]
【The invention's effect】
By placing the ejector vertically downward from the top, the circulating fluid is not affected by gravity, ensuring a sufficient suction force with the ejector, and by arranging the collision plate and the partition member Gas and liquid can be separated, and no gas such as exhaust gas or air is sucked into the circulation pump, and the pump efficiency does not decrease.
[Brief description of the drawings]
FIG. 1 is a partial cross-sectional configuration diagram of an embodiment of a vacuum pump device of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Tank 2 Ejector 3 Circulation pump 4 Partition member 5 Partition member 6 Diffuser 8 Impact plate 13 Suction passage

Claims (1)

少なくともエゼクタの一部またはディフューザの一部をタンク内に配置して、該タンクとエゼクタを循環ポンプを介して接続し、エゼクタを鉛直方向の上から下方向に配置し、ディフューザの外周に隔壁部材を配置したものにおいて、ディフューザの出口部の下方に流体衝突して質量の差異によって気体と液体を分離する衝突部を取り付けて、循環ポンプの吸込み口とタンクを接続し、循環ポンプの吐出口とエゼクタを接続して、当該循環ポンプでタンク内の流体をエゼクタに供給することを特徴とする真空ポンプ装置。At least a part of the ejector or a part of the diffuser is disposed in the tank, the tank and the ejector are connected via a circulation pump, the ejector is disposed vertically downward from above, and a partition member is provided on the outer periphery of the diffuser. in that place, by attaching a collision portion for separating the gas and liquid by the difference in mass fluid collides with the lower outlet portion of the diffuser, to connect the suction port and the tank of the circulation pump, the discharge port of the circulating pump A vacuum pump device , wherein the fluid in the tank is supplied to the ejector by the circulation pump .
JP14121495A 1995-05-15 1995-05-15 Vacuum pump device Expired - Fee Related JP3574220B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14121495A JP3574220B2 (en) 1995-05-15 1995-05-15 Vacuum pump device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14121495A JP3574220B2 (en) 1995-05-15 1995-05-15 Vacuum pump device

Publications (2)

Publication Number Publication Date
JPH08312600A JPH08312600A (en) 1996-11-26
JP3574220B2 true JP3574220B2 (en) 2004-10-06

Family

ID=15286801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14121495A Expired - Fee Related JP3574220B2 (en) 1995-05-15 1995-05-15 Vacuum pump device

Country Status (1)

Country Link
JP (1) JP3574220B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4974879B2 (en) * 2007-12-06 2012-07-11 康文 福本 Vacuuming device
JP2011226305A (en) * 2010-04-15 2011-11-10 Tlv Co Ltd Vacuum pump device
JP6434557B2 (en) * 2017-04-05 2018-12-05 コーベックス株式会社 Evacuated vacuum apparatus and method using liquid seal
KR102498282B1 (en) * 2017-11-01 2023-02-10 대우조선해양 주식회사 System for discharging and ventilating harmful material
CN110864012B (en) * 2019-10-29 2021-06-15 合肥工业大学 Multilayer oil curtain partition device for realizing rapid flexible partition of vacuum pipeline

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Publication number Publication date
JPH08312600A (en) 1996-11-26

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