JP3571570B2 - Container contact detection device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a container contact detection device that detects contact of a second container disposed in a first container with the first container in a scanning tunnel microscope or the like.
[0002]
[Prior art]
FIG. 1 is a diagram showing a conventional scanning tunnel microscope, and is a diagram showing a scanning tunnel microscope for observing a sample in a very low temperature and high magnetic field state.
[0003]
In FIG. 1, reference numeral 1 denotes a base placed on a floor, and an external container 2 is attached to the base 1. A first container 3 which is a metal container is disposed in the outer container 2, and the first container 3 is attached to the outer container 2. Further, the first container 3 is grounded through the external container 2.
[0004]
Reference numeral 4 denotes an arm as a gantry, and the arm 4 is placed on the base 1 via vibration dampers 5a and 5b. A hole 6 is formed in the arm 4, and a vacuum chamber 7 is attached to the arm 4 via a bellows B ₁ so as to close the hole 6 from above. The vacuum chamber 7 is attached to the base 1. On the other hand, a second container 8 as an internal chamber is attached to the arm 4 so as to close the hole 6 from below. The second container 8 is disposed in the first container 3. In the state shown in FIG. 1, the second container 8 is not in contact with the first container 3. Further, a second container 8 the first container 3 is connected by a cylindrical bellows B _2. Exhaust device P is mounted on the bellows B _2.
[0005]
Further, a cylindrical contact detection electrode 9 is attached to an outer lower end of the second container 8. FIG. 2A is a cross-sectional view of the second container 8, and FIG. 2B is a view of the second container 8 as viewed from the bottom. A cylindrical contact detection electrode 9 is attached.
[0006]
This contact detection electrode 9 is connected to a core wire of a BNC connector 11 attached to the outer upper end of the second container 8 via an electrically insulated lead wire 10, and the outer wire of the connector 11 passes through the vacuum chamber 7. Grounded.
[0007]
Reference numeral 12 denotes liquid helium stored in the outer container 2, and reference numeral 13 denotes a superconducting magnet attached to the inner wall of the outer container 2. 14a and 14b are posture adjusting screws which are position adjusting means attached to the arm 4. When the screws are adjusted, the vibration damper expands and contracts, and the second container 8 moves up and down or tilts. As a result, the position of the second container 8 with respect to the first container 3 changes. FIG. 1 shows only two posture adjusting screws and two vibration dampers, but actually more screws and vibration dampers are provided.
[0008]
Although not shown in FIGS. 1 and 2, a scanning tunneling microscope (STM) mechanism equipped with a probe and the like and a sample are arranged at the bottom inside the second container 8. Are sent from the vacuum chamber 7 side and arranged.
[0009]
In such a configuration, when the inside of the first container 3 is evacuated by the exhaust device P, the liquid helium 12 flows through the hole of the first container 3 because the needle valve is formed at the bottom of the first container 3. To enter. The liquid helium 12 that has entered the first container 3 is vaporized into helium gas, and the space between the first container 3 and the second container 8 is filled with helium gas. As a result, the second container 8 is cooled, and the sample placed therein is cooled to a very low temperature. Further, a high magnetic field is generated around the sample by the superconducting magnet 13, and the sample is observed by the STM mechanism at a very low temperature and a high magnetic field.
[0010]
Now, as shown in FIG. 3, when the second container 8 comes into contact with the first container 3, vibration due to liquid helium and vibration from the floor are transmitted to the STM mechanism and the sample in the second container 8, so that image observation can be performed successfully. Will not be done. Therefore, the operator confirms the contact state of the second container 8 with the first container 3 by, for example, bringing the tester into contact with the connector 11. That is, when the second container 8 comes into contact with the first container 3, the core wire and the outer wire of the connector 11 are short-circuited, while when not in contact, the core wire and the outer wire of the connector 11 are opened. The contact state of the second container 8 with the first container 3 can be confirmed. Then, when the second container 8 is in contact with the first container 3, the operator adjusts the posture adjusting screw so that the second container 8 does not contact the first container 3.
[0011]
[Problems to be solved by the invention]
However, in such a conventional apparatus, it is known that the second container 8 has contacted the first container 3, but it is not clear how the second container 8 was inclined and contacted the first container 3. I did not know which posture adjustment screw to adjust. Therefore, the work of adjusting the posture of the second container 8 takes time.
[0012]
The present invention has been made in view of such a point, and an object of the present invention is to provide a container contact detection device that can perform the posture adjustment work of the second container in a shorter time than before.
[0013]
[Means for Solving the Problems]
A container contact detection device of the present invention that achieves this object includes a first container, a pedestal, and a second container attached to the pedestal and arranged in a non-contact state with the container in the first container. And a position detecting means for detecting a contact position of the second container with the first container, and a position adjusting means for adjusting a position of the second container with respect to the first container.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0015]
FIG. 4 is a diagram showing an example of the present invention. In the configuration of FIG. 4, the same components as those in FIG. 1 are denoted by the same reference numerals as in FIG.
[0016]
In FIG. 4, reference numeral 15 denotes a second container, and the second container 15 is attached to the arm 4 so as to close the hole 6 of the arm 4 from below. The second container 15 is disposed in the first container 3, and the second container 15 is not in contact with the first container 3 in the state shown in FIG. Further, a second container 15 the first container 3 is connected by a cylindrical bellows B _2.
[0017]
In addition, L-shaped contact detection electrodes 16, 17, 18, and 19 are independently attached to the outer lower end of the second container 15, respectively. That is, the electrodes are electrically insulated. FIG. 5A is a cross-sectional view of the second container 15, and FIG. 5B is a view of the second container 15 as viewed from the bottom. And L-shaped contact detection electrodes 16, 17, 18, and 19, which also wrap around the bottom.
[0018]
The contact detection electrode 16 is connected to a core wire of a connector 24 attached to an upper end on the outside of the second container 15 via an electrically insulated lead wire 20. The contact detection electrode 17 is connected to the core of the connector 25 via the electrically insulated lead 21, the contact detection electrode 18 is connected to the core of the connector 26 via the electrically insulated lead 22, and the contact detection electrode 19 is connected to the It is connected to the core wire of the connector 27 via the insulated lead wire 23. The external wires of the connectors 24, 25, 26, 27 are grounded through the vacuum chamber 7.
[0019]
Although not shown in FIGS. 4 and 5, an STM mechanism provided with a probe and the like and a sample are arranged at a bottom portion inside the second container 15.
[0020]
In such a configuration, when the second container 15 comes into contact with the first container 3 as described above, the image observation is not performed well. Therefore, the operator, for example, sequentially contacts the tester with the connectors 24, 25, 26, and 27. Then, the state of contact of the second container 15 with the first container 3 is confirmed. That is, the operator checks whether or not the contact detection electrodes 16, 17, 18, and 19 are in contact with the first container 3 based on the measurement values of the tester. If any of the four electrodes is in contact with the first container 3, the operator can adjust the tilting state of the second container 15 from the position of the contacting electrode and the posture adjustment screw to be adjusted. And adjust the screw. By such adjustment, the second container 15 does not contact the first container 3.
[0021]
As described above, in the apparatus shown in FIG. 4, when the second container comes into contact with the first container, it is possible to grasp in what kind of inclined state the second container came into contact with the first container. The posture of the second container can be adjusted in time.
[0022]
Note that the present invention is not limited to the above-described example. For example, the number of contact detection electrodes is not limited to four, but may be more, or two or three. Further, the present invention is not limited to the STM, but can be applied to other devices that need to avoid contact of the second container with the first container.
[Brief description of the drawings]
FIG. 1 is a diagram showing a conventional STM.
FIG. 2 is a view showing a second container 8 in FIG.
FIG. 3 is a view showing a state where the second container 8 is in contact with the first container 3 in the apparatus of FIG.
FIG. 4 is a diagram showing an example of the present invention.
FIG. 5 is a view showing a second container 15 in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... external container, 3 ... 1st container, 4 ... Arm, 5a, 5b ... Vibration damper, 6 ... Hole, 7 ... Vacuum chamber, 8 ... 2nd container, 9 ... Contact detection electrode, 10 ... Lead wire, 11 connector, 12 liquid helium, 13 superconducting magnet, 14a, 14b posture adjustment screw, 15 second container, 16, 17, 18, 19 contact detection electrodes 20, 21, 22, 23 Lead wire, 24, 25, 26, 27 Connector

Claims (3)

A first container;
A trestle,
A second container attached to the gantry and arranged in the first container in a non-contact state with the container;
Position detecting means for detecting a contact position of the second container with the first container;
A container contact detection device comprising a position adjusting means for adjusting a position of a second container with respect to a first container. 2. The container contact detection device according to claim 1, wherein the position detection unit includes a plurality of contact detection electrodes provided at an outer lower end of the second container. 3. The container contact detection device according to claim 2, wherein the shape of the contact detection electrode is L-shaped.

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