JP3528268B2 - Illumination method and illumination device for diffraction grating array - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention arranges a plurality of dots of a diffraction grating element, which is a minute diffraction grating, as pixels in a matrix on the surface of a flat substrate, and a pattern expressed by a collection of these dots ( (Multi-dot pattern)
TECHNICAL FIELD The present invention relates to a method and an apparatus for illuminating a diffraction grating array having the above, and more particularly, to a method and an apparatus for illuminating a diffraction grating array in which a brighter reproduction pattern can be obtained while easily producing a diffraction grating.

[0002]

2. Description of the Related Art Conventionally, a display having a diffraction grating pattern formed by arranging a plurality of dots of a diffraction grating element composed of a minute diffraction grating as pixels on a surface of a flat substrate has been widely used. ing. As a method for producing a display having this kind of diffraction grating pattern, for example, "Japanese Patent Laid-Open No. 60-156004" is used.
There is a method as disclosed in. This method uses minute interference fringes due to two-beam interference (hereinafter referred to as diffraction grating)
Are sequentially exposed to the photosensitive film by changing the pitch, the direction, and the light intensity.

On the other hand, recently, for example, an electron beam exposure apparatus is used and a computer control is used to move an XY stage on which a flat substrate is placed, and a plurality of minute gratings made up of diffraction gratings are formed on the surface of the substrate. The present inventors have proposed a method for producing a display in which a diffraction grating pattern of a certain pattern is formed by arranging dots of different diffraction grating elements. The method is 1988 1
“USP 5,058,99 filed January 25th
2 ".

Furthermore, recently, a plurality of dots of a diffraction grating element composed of a minute diffraction grating are arranged in a matrix as pixels on a surface of a flat substrate, and a pattern expressed by a collection of these dots (multidot pattern). )
A display using a diffraction grating array having a has been proposed.

A display having such a diffraction grating pattern is one in which dots of diffraction grating elements made of a diffraction grating are arranged as pixels on a flat substrate. And
This type of display can be easily manufactured optically by utilizing the coherence of laser light or by utilizing the fine processing ability of electron beams or the like.

By the way, in the display having such a diffraction grating pattern, the diffraction grating is designed on the assumption of illumination by illumination light from a single direction as reproduction of the multi-dot pattern.

However, since these devices use the diffraction phenomenon of the diffraction grating, in order to obtain a bright reproduction pattern, the shape of the diffraction grating is made to be a volume type or a deep groove diffraction grating is used. I have no choice but to take.

As a result, the size of one diffraction grating element cannot be increased, which makes the manufacture of the diffraction grating very difficult.

[0009]

As described above, the conventional illumination method for a display having a diffraction grating pattern has a problem that it is difficult to manufacture the diffraction grating when a bright reproduction pattern is to be obtained. .

The present invention has been made to solve the above problems, and a method of illuminating a diffraction grating array capable of obtaining a brighter reproduction pattern while facilitating the production of a diffraction grating. And an illumination device.

[0011]

In order to achieve the above-mentioned object, a plurality of dots of a diffraction grating element composed of a minute diffraction grating are arranged in a matrix on the surface of a flat substrate, and the dots are aggregated by In a method of illuminating a diffraction grating array having a represented pattern (multidot pattern) ,

According to the first aspect of the present invention, a plurality of illumination lights having different colors are made incident on the same diffraction grating element in the diffraction grating array at different angles for each illumination light. ing.

[0013]

Further, the plurality of illumination lights of different colors are modulated by the spatial modulation element and are made incident by the imaging element at different angles.

Further, the plurality of illumination lights of different colors are scanned by the scanning element, the position of the illumination light source of each illumination light is changed so as to satisfy the following expression, and the illumination lights are made incident at mutually different angles. I have to.

[0016] _{(sinθ y 1-sinα y)} / λ1 = (sinθ y 2-sinα y) / λ2 (sinθ y 1-sinα y) / λ1 = (sinθ y 3-sinα y) / λ3 (sinθ y 1- sin α _y ) / λ 1 = (sin θ _y 4-sin α _y ) / λ 4 :: (sin θ _y 1-sin α _y ) / λ 1 = (sin θ _y n-sin α _y ) / λn where n is the number of illumination lights and each illumination is The wavelengths of light are λ1, λ2,
... Let λn. Further, the incident angle of the illumination light with respect to the direction of the diffraction grating surface is θ, the component of θ in the Y-axis direction is θ _y , and the incident angle of each illumination light in the Y-axis direction is θ _y 1, θ _y 2, ... _y n
And Furthermore, the angle of the desired diffracted light is indicated by an angle α with respect to the direction of the diffraction grating surface, and the component in the Y-axis direction is α _y .

On the other hand, a plurality of dots of diffraction grating elements, which are minute diffraction gratings, are arranged in a matrix on the surface of a flat substrate, and a diffraction grating having a pattern (multi-dot pattern) expressed by a collection of the dots. In an apparatus for illuminating an array, first, in the invention according to claim 11, a plurality of illumination light sources for generating illumination light of different colors for illuminating a diffraction grating array, and respective illumination light from each illumination light source. With a scanning element for scanning the same diffraction grating element in the diffraction grating array so that the respective illumination lights are made to enter at different angles.

According to the twelfth aspect of the invention, a plurality of illumination light sources for generating illumination light of different colors for illuminating the diffraction grating array, and the same number of illumination light sources are provided, and the corresponding illumination is provided. Spatial modulation elements that respectively modulate the illumination light from the light source, and the same number of spatial modulation elements as the illumination light from the corresponding spatial modulation elements are distributed to the same diffraction grating element in the diffraction grating array. And an image forming element that forms an image so that the light enters at different angles.

Here, in particular, as the plurality of illumination light sources, three illumination light sources that generate illumination light of red (R), green (G), and blue (B) colors are used.

As the diffraction grating element, a diffraction grating obtained by moving a curve in parallel is used.

Further, as the illumination light source, a light emitting diode, a semiconductor laser, a laser, a light guided to an optical fiber, a tungsten lamp, a krypton lamp, a light guided to a waveguide, or an EL emitting light is used. I am trying.

As the scanning element, either a rotary mirror such as a galvano mirror or a polygon mirror, or an element using sound waves such as an AO deflector is used.

Further, as the diffraction grating element, the diffraction grating itself has a reproduction pattern component.

[0024]

Therefore, in the method and apparatus for illuminating a diffraction grating array according to the present invention, a plurality of illumination lights having different colors (wavelengths) are applied to the same diffraction grating element in the diffraction grating array as necessary. By illuminating each light by making it incident at different angles, it is possible to use the same diffraction grating element area for diffraction of light of multiple colors, thus producing a brighter reproduction pattern. You can

Further, since it is not necessary to separate the diffraction grating element for each color to be reproduced, it is possible to increase the size of one diffraction grating element, so that the diffraction grating can be easily manufactured. Moreover, the influence of diffraction blur due to the size of the diffraction grating element can be reduced.

On the other hand, it is possible to obtain a full-color image by using illumination lights of red (R), green (G), and blue (B) as a plurality of illumination lights of different colors.

A full-color stereoscopic image can be obtained by using a diffraction grating obtained by moving a curve in parallel as the diffraction grating element.

Furthermore, by using a diffraction grating having a reproduction pattern component in the diffraction grating itself as the diffraction grating element, a plurality of illumination lights having different colors can be used without using a scanning element, a spatial modulation element or an imaging element. Simply illuminate at different angles.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention uses a plurality of illumination lights having different colors (wavelengths) and makes them incident on the same diffraction grating element in a diffraction grating array at different angles for each illumination light, as required. By illuminating the same diffraction grating element, the areas of the same diffraction grating element are utilized for diffraction of a plurality of illumination lights to generate a brighter reproduction pattern.

Embodiments of the present invention based on the above concept will be described below in detail with reference to the drawings.

(First Embodiment) FIG. 1 is an overall perspective view showing a structural example of an illumination device for a diffraction grating array according to a first embodiment of the present invention.

That is, as shown in FIG. 1, the illuminating device for the diffraction grating array of the present embodiment illuminates the diffraction grating array 1 with different illumination light (red (R) in the figure). ), Green (G), and blue (B) colors of illumination light (laser light)), and a plurality of (three in the figure) illumination light sources 21, 22, 23, and the respective illumination light sources 31, 32, 3.
The same number as that of the three illumination light sources 31, 32,
AO elements 31, 32, 33 for modulating the light intensity of each illumination light from 33 at high speed, and each AO element 31, 32,
The same number of AO elements 31 and 3 as the number of 33 are provided.
Each of the illumination light from the light source 2
In order to make the diffracted light of the illumination light have the same diffracting direction by making the illumination light incident on the same diffraction grating element in, respectively, at different angles, that is, by satisfying the condition of formula (5) described later. It is composed of two-axis galvanometer mirrors 41, 42, 43 which are scanning elements for scanning as described above.

The diffraction grating array 1 shown in FIG.
As shown in the plan view, a large number of dots of a diffraction grating element composed of a minute diffraction grating are arranged in a matrix on the surface of a planar substrate, and a pattern (multidot Pattern) is used.

The illumination light sources 21, 22 and 23 are, for example, light emitting diodes, semiconductor lasers, lasers, light guided to optical fibers, tungsten lamps,
Krypton lamp, light guided to waveguide, or EL
Etc. that emit light.

Further, as the diffraction grating element of the diffraction grating array 1, for example, as shown in the plan view of FIG. 3, a diffraction grating obtained by translating a curve at a constant pitch d is used.

Next, three illumination lights having different colors are
The rationale for making the same diffraction grating element in the diffraction grating array 1 enter at different angles for each illumination light will be described.

First, as shown in the conceptual diagram of FIG. 4, when the illumination light is incident on the diffraction grating at an angle of θ, the shape of the diffraction grating for diffracting the diffracted light in the direction of α should be obtained by the following equation. You can

The components of the illumination light and the diffracted light in the X direction and the Y direction are θ _x , θ _y , α _x and α _y , respectively.
The shape of the diffraction grating is defined as shown in the plan view of FIG.

[0039] _{d x = (sinθ x -sinα x} ) / λ ... (1) d y = (sinθ y -sinα y) / λ ... (2) d = (d x 2 + d y 2) 1/2 ... ( _{3) tanΩ = d y / d} x = (sinθ y -sinα y) / (sinθ x -sinα x) ... (4) in this way, with a pitch d, it may be used a diffraction grating inclined at an angle Omega.

Therefore, as shown in the conceptual diagram of FIG. 6, when a plurality of illumination lights having different colors (wavelengths) are incident on the diffraction grating elements of the diffraction grating array 1 at different angles, the respective illumination lights are emitted. The conditions for the case where the direction of the diffracted light is constant are as follows.

That is, assuming that the wavelengths of the three illumination lights are λ1, λ2, and λ3, respectively, d _y = (sin θ _y 1-sin α _y ) / λ 1 d _y = (sin θ _y 2-sin α) _{y) / λ2 d y = (} sinθ y 3-sinα y) / λ3 _{Therefore, (sinθ y 1-sinα y} ) / λ1 = (sinθ y 2-sinα y) / λ2 (sinθ y 1-sinα y) / λ1 _{= (sinθ y 3-sinα y} ) / λ3 (sinθ y 1-sinα y) / λ1 = (sinθ y 4-sinα y) / λ4:: (sinθ y 1-sinα y) / λ1 = (sinθ y n- sin α _y ) / λn (5) where n is the number of illumination lights and λ 1, λ 2 are the wavelengths of each illumination light,
... Let λn. Further, the incident angle of the illumination light with respect to the direction of the diffraction grating surface is θ, the component of θ in the Y-axis direction is θ _y , and the incident angle of each illumination light in the Y-axis direction is θ _y 1, θ _y 2, ... _y n
And Furthermore, the angle of the desired diffracted light is indicated by an angle α with respect to the direction of the diffraction grating surface, and the component in the Y-axis direction is α _y .

From the above, when n pieces of illumination light having different colors (wavelengths) are made to enter, wavelengths λ1 of the respective illumination lights,
The incident angle θ with respect to λ2, ..., λn may be the angles θ _y 1, θ _y 2, and θ _y 3 that satisfy the equation (5).

As described above, when a plurality of illumination light beams of different colors (wavelengths) are incident on the same diffraction grating element, the diffracted light beams are emitted in the same direction by satisfying the condition of the above expression (5). Can be diffracted.

Next, in the illuminating device of the diffraction grating array of the present embodiment having the above-mentioned configuration, each illuminating light source 31, 3
The illumination lights of different colors (wavelengths) from 2 and 33, that is, the illumination lights of the colors of red (R), green (G), and blue (B), are emitted by the AO elements 31, 32, and 33. Is modulated at high speed. The modulated illumination lights are scanned by the biaxial galvanometer mirrors 41, 42 and 43, and the same diffraction grating element in the diffraction grating array 1 is scanned at different angles for each illumination light. That is, in order to satisfy the above formula (5), the illumination lights are made incident so that the diffraction directions of the diffracted lights of the illumination lights are equal to each other.

As a result, a region of the same diffraction grating element in the diffraction grating array 1 is used for diffracting light of a plurality of colors, so that a brighter reproduction pattern can be generated.

Further, since it is not necessary to separate the diffraction grating element for each color to be reproduced, the size of one diffraction grating element can be increased, so that the diffraction grating can be easily manufactured. Further, the influence of diffraction blur due to the size of the diffraction grating element can be reduced.

Further, by using illumination lights of red (R), green (G), and blue (B) colors as a plurality of illumination lights of different colors, a full-color image can be obtained.

Furthermore, a full-color stereoscopic image can be obtained by using, as the diffraction grating element, a diffraction grating obtained by moving a curve in parallel.

As described above, the illuminating device for the diffraction grating array of the present embodiment illuminates the diffraction grating array 1 with illumination lights (red (R), green (G), and colors (wavelengths) different from each other. Three illumination light sources 21, 22, 23 that generate blue (B) illumination light, and the respective illumination light sources 31, 32, 33
And the corresponding illumination light sources 31, 32, 3
A that modulates the light intensity of each illumination light from 3 at high speed
O element 31, 32, 33 and each AO element 31, 32, 3
The same number as that of the three AO elements 31, 32,
By making the respective illumination lights from 33 incident on the same diffraction grating element in the diffraction grating array 1 at different angles for each illumination light (so as to satisfy the condition of the expression (5)), Three illumination lights (red (R) and green) each having a different color from each other are configured by a biaxial galvano-mirror 41, 42, 43 which is a scanning element that scans so that the diffraction directions of the diffracted lights of the respective illumination lights become equal. Illumination light of colors (G) and blue (B) is incident on the same diffraction grating element in the diffraction grating array 1 at different angles for each illumination light to illuminate. .

Therefore, since the regions of the same diffraction grating element in the diffraction grating array 1 can be utilized for diffraction of light of three colors, it is possible to generate a brighter reproduction pattern.

Further, since it is not necessary to separate the diffraction grating element for each color to be reproduced, the size of one diffraction grating element can be increased, so that the diffraction grating can be easily manufactured. Moreover, it is possible to reduce the influence of diffraction blur caused by the size of the diffraction grating element.

Furthermore, it is possible to obtain a full-color image by using illumination lights of red (R), green (G), and blue (B) as three illumination lights of different colors.

Furthermore, since a diffraction grating obtained by moving a curve in parallel is used as the diffraction grating element, it is possible to obtain a full-color stereoscopic image.

As the illumination light sources 21, 22, 23,
Since a small and inexpensive illumination light source such as a light emitting diode, a semiconductor laser, and an optical fiber is used, it is possible to reduce the size and cost of the illumination device itself, and further consume less power and generate less heat. Can be obtained.

(Second Embodiment) In the first embodiment,
The case where the illumination lights of different colors from the three illumination light sources 21, 22, 23 are scanned by the biaxial galvano mirrors 41, 42, 43 has been described, but the invention is not limited to this.
It is also possible to illuminate a plurality of spatial modulation elements with illumination lights of different colors and to form an image on the diffraction grating array 1 with the imaging element.

FIG. 7 is an overall perspective view showing an example of the construction of an illumination device for a diffraction grating array according to the second embodiment of the present invention. The same elements as those in FIG. Description is omitted, and only different parts will be described here.

That is, as shown in FIG. 7, the illumination device for the diffraction grating array of the present embodiment has the AO element 3 shown in FIG.
1, 32, 33 and galvanometer mirrors 41, 42, 4
3 are omitted, and instead of these, the respective illumination light sources 21, 22,
The same number as 23 is provided, and the corresponding illumination light sources 21, 2
Spatial modulation elements 51, 52, 53 for respectively modulating the illumination light from 2, 23, and spatial modulation elements 51, 52, 53
And the corresponding spatial modulation elements 51, 5 are arranged in the same number as
By making the illumination light from 2, 53 incident on the same diffraction grating element in the diffraction grating array 1 at different angles for each illumination light, that is, by satisfying the condition of the above equation (5). , Imaging lenses 61 and 6 which form an image so that the diffraction directions of the diffracted lights of the respective illumination lights are the same.
2, 63 are provided.

Next, in the illuminating device of the diffraction grating array of the present embodiment having the above-mentioned configuration, the respective illuminating light sources 31, 3 are
Illumination lights of different colors (wavelengths) from 2 and 33, that is, illumination lights of red (R), green (G), and blue (B) colors are modulated by the spatial modulation elements 51, 52, and 53. . Then, each of the modulated illumination lights is directed to the same diffraction grating element in the diffraction grating array 1 by the imaging lenses 61, 62 and 63 at different angles for each illumination light, that is, (5) In order to satisfy the equation, the diffracted lights of the illumination lights are imaged and made incident so that the diffraction directions of the diffracted lights are the same.

As a result, a region of the same diffraction grating element in the diffraction grating array 1 is used for diffracting light of a plurality of colors, so that a brighter reproduction pattern can be generated.

The operation other than this is the same as in the case of the first embodiment.

As described above, the illuminating device for the diffraction grating array of the present embodiment illuminates the diffraction grating array 1 with illumination light (red (R), green (G), respectively) having different colors (wavelengths). Three illumination light sources 21, 22, 23 that generate blue (B) illumination light and each illumination light source 21, 22, 23
And the corresponding illumination light sources 21, 22, 2
Spatial modulation element 51 for respectively modulating the illumination light from 3,
52 and 53, and the same number of spatial modulation elements 51, 52 and 53 are arranged, and the corresponding spatial modulation elements 51, 52 and 53 are provided.
The illuminating light from the illuminating light is incident on the same diffraction grating element in the diffraction grating array 1 at different angles for each illuminating light (so as to satisfy the condition of the expression (5)). Of the three illumination lights (red (R), green (G), and blue (B)) having different colors from each other. Illumination light) of the diffraction grating array 1
In the same diffraction grating element in, the respective illumination lights are made incident at different angles and illuminated.

Therefore, since the regions of the same diffraction grating element in the diffraction grating array 1 can be utilized for diffraction of light of three colors, it is possible to generate a brighter reproduction pattern.

Further, as in the case of the first embodiment,
Since it is not necessary to separate the diffraction grating element for each color to be reproduced, it is possible to increase the size of one diffraction grating element, which makes it possible to easily manufacture the diffraction grating and further It is possible to reduce the influence of diffraction blur due to the size of the.

Furthermore, it is possible to obtain a full-color image by using illumination lights of red (R), green (G), and blue (B) colors as the three illumination lights of different colors.

Furthermore, since a diffraction grating obtained by moving a curve in parallel is used as the diffraction grating element, it is possible to obtain a full-color stereoscopic image.

As the illumination light sources 21, 22, 23,
Since a small and inexpensive illumination light source such as a light emitting diode, a semiconductor laser, and an optical fiber is used, it is possible to reduce the size and cost of the illumination device itself, and further consume less power and generate less heat. Can be obtained.

(Third Embodiment) In each of the above embodiments,
When a diffraction grating having a reproduction pattern component in the diffraction grating itself is used as the diffraction grating element in the diffraction grating array 1, it is possible to make the colors mutually different without using the scanning element, the spatial modulation element or the imaging element as described above. It is also possible to simply illuminate different illumination lights at different angles.

FIG. 8 is an overall perspective view showing an example of the construction of a diffraction grating array illuminating device according to the third embodiment of the present invention. The same elements as those in FIGS. 1 and 7 are designated by the same reference numerals. The description thereof will be omitted, and only different parts will be described here.

That is, as shown in FIG. 8, the illuminating device for the diffraction grating array of this embodiment has the AO elements 31, 32, 33 and the galvano mirrors 41, 4 shown in FIGS. 1 and 7.
2, 43, the spatial modulation elements 51, 52, 53 and the imaging lenses 61, 62, 63 are omitted, and illumination lights (red (R), green (G), blue (B) having different colors (wavelengths) from each other are omitted. The illumination lights from the three illumination light sources 21, 22, and 23 that generate the illumination light of the color are incident on the diffraction grating array 1 at different angles so as to satisfy the condition of the expression (5). It is configured to illuminate.

Also in the illumination device of the diffraction grating array of the present embodiment configured as described above, it is possible to obtain the same operation and effect as in the case of each of the above embodiments.

The present invention is not limited to the above embodiments, but can be implemented in the same manner as described below.

(A) In each of the above-described embodiments, the case where a galvano mirror is used as a scanning element has been described, but the present invention is not limited to this, and a scanning element such as a rotating mirror such as a polygon mirror or Other methods such as a method using sound waves such as an AO deflector may be used.

By using such a method,
Light of a plurality of colors (wavelengths) can be diffracted by one diffraction grating element, and an extremely bright reproduction pattern can be obtained.

(B) In each of the above embodiments, as the plurality of illumination light sources, three illumination light sources which generate illumination light of red (R), green (G) and blue (B) colors are used. Although the case has been described, the present invention is not limited to this, and two or four or more illumination light sources that generate illumination lights having different colors may be used.

(C) In each of the above embodiments, the case where the diffraction grating obtained by moving the curve in parallel is used as the diffraction grating element of the diffraction grating array 1 has been described, but the present invention is not limited to this. Instead, a diffraction grating having another shape (pattern) may be used.

(D) In each of the above embodiments, the illumination light source is a light emitting diode, a semiconductor laser, a laser, light guided to an optical fiber, a tungsten lamp,
Krypton lamp, light guided to waveguide, or EL
However, the present invention is not limited to this, and other light sources that emit light may be used.

(E) In the first embodiment, the AO elements 31, 32, 33 are not essential elements for the present invention, but may be provided as needed.

(F) In each of the above-described embodiments, the case where the present invention is applied to the one that brings various display effects by the multi-dot pattern having the diffraction grating has been described, but the present invention is not limited to this. The present invention can be similarly applied to other devices such as a memory and an optical element to obtain the same effects as those described above.

[0079]

As described above, according to the present invention, a plurality of dots of a diffraction grating element composed of a minute diffraction grating are arranged in a matrix on the surface of a flat substrate, and the dots are expressed by a collection of the dots. In a method and apparatus for illuminating a diffraction grating array having a pattern (multi-dot pattern), a plurality of illumination light sources for generating illumination light of different colors for illuminating the diffraction grating array, Or a scanning element that scans the same diffraction grating element in the diffraction grating array so as to be incident at different angles for each illumination light, or to scan the diffraction grating array with each other. A plurality of illumination light sources that generate illumination light of different colors,
The same number of light sources as the illumination light sources are arranged to modulate the illumination light from the corresponding light sources, and the same number as each of the spatial modulation elements are arranged to diffract the illumination light from the corresponding space modulation elements. The same diffraction grating element in the grating array is provided with an imaging element that forms an image so that each illumination light enters at different angles, and a plurality of illumination lights having different colors are provided in the same diffraction grating array. Since the diffraction grating element is illuminated by being incident on the diffraction grating element (at different angles for each illumination light as needed), it is possible to easily manufacture the diffraction grating and obtain a brighter reproduction pattern. It is possible to provide a method and an apparatus for illuminating a diffraction grating array capable of performing the above.

[Brief description of drawings]

FIG. 1 is a first illuminator for a diffraction grating array according to the present invention.
FIG.

FIG. 2 is a plan view showing a configuration example of a diffraction grating array in the example.

FIG. 3 is a plan view showing an example of a diffraction grating element of the diffraction grating array.

FIG. 4 is a conceptual diagram for explaining the basis for making a plurality of illumination lights having different colors incident on the same diffraction grating element in the same diffraction grating array at different angles for each illumination light.

FIG. 5 is a plan view showing an example of the shape of a diffraction grating.

FIG. 6 is a conceptual diagram for explaining the grounds for making a plurality of illumination lights of different colors incident on the same diffraction grating element in the same diffraction grating array at different angles.

FIG. 7 is a second illuminating device for a diffraction grating array according to the present invention.
FIG.

FIG. 8 is a third illumination device for a diffraction grating array according to the present invention.
FIG.

[Explanation of symbols]

1 ... Diffraction grating array, 21, 22, 23 ... Illumination light source, 3
1, 32, 33 ... AO element, 41, 42, 43 ... Galvano mirror, 51, 52, 53 ... Spatial modulation element, 61, 6
2, 63 ... Imaging lens, 71, 72, 73 ... Illumination light source.

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G03H 1/00-1/30

Claims (15)

(57) [Claims] 1. A fine diffraction grating is provided on the surface of a flat substrate.
Diffraction grating element dots consisting of
Placed, the pattern represented by the set of dots
Illuminate a diffraction grating array with (multi-dot pattern)
Illumination light with different colors
The same diffraction grating element in the diffraction grating array
At different angles for each illumination light incident
The diffraction grating array is characterized in that it is made to illuminate.
Ray lighting method. 2. The diffraction grating array according to claim 1.
Depending on the lighting method, multiple illumination lights with different colors are
Are modulated by the intermodulation elements, and the imaging elements modulate each other.
At different angles It is characterized by making it incident
Method for illuminating a diffraction grating array. 3. A diffraction grating array according to claim 1,
Depending on the lighting method, run multiple illumination lights of different colors.
Scan the position of the illumination light source of each illumination light by
Change to satisfy, each different
At an angle Diffraction case characterized by being made incident
Illumination method of child array. However, the number of illumination light is n, the wavelength of each illumination light is λ1, λ2,
... Let λn. Also, the illumination light for the direction of the diffraction grating surface
The incident angle of θ, the component of θ in the Y-axis direction is θ y , and each illumination light
The incident angle component of the Y-axis direction is θ y 1, θ y 2, ... θ y n
And Furthermore, set the angle of the desired diffracted light to the direction of the diffraction grating surface.
It is shown at an angle alpha with respect to the line, and the Y-axis direction component alpha y
To do. 4. The diffraction grating array according to claim 1.
In the illumination method, the plurality of illumination lights having different colors from each other
As for, three colors of light of red (R), green (G), and blue (B)
Illumination of a diffraction grating array characterized by being used
Ming method. 5. The diffraction grating array according to claim 1,
In the illumination method, a curved line is used as the diffraction grating element.
I will use the diffraction grating obtained by translating
A method of illuminating a diffraction grating array, characterized in that 6. The diffraction grating array according to claim 1.
In the illumination method, the illumination light source is a light emitting diode.
Guide to laser, semiconductor laser, laser, optical fiber
Light, tungsten lamp, krypton lamp, waveguide
Use either light guided into the road or EL
A method of illuminating a diffraction grating array, characterized in that 7. The diffraction grating array according to claim 3,
In the illumination method, the scanning element is a galvanometer.
Mirrors, rotating mirrors such as polygon mirrors, and AO turning machines.
One of the elements using the sound wave is used.
And a method of illuminating a diffraction grating array. 8. A diffraction grating array according to claim 1,
In the illumination method, the diffraction grating element is a diffraction grating
Use a diffraction grating with a reproduction pattern component on the child itself
A method of illuminating a diffraction grating array, characterized in that 9. A fine diffraction grating is provided on the surface of a flat substrate.
Diffraction grating element dots consisting of
Placed, the pattern represented by the set of dots
Illuminate a diffraction grating array with (multi-dot pattern)
In the illuminating device, the diffraction grating array is illuminated.
Illumination lights that generate different illumination colors
Source and respective illumination light from each of the illumination light sources,
Each illumination on the same grating element in the grating array
At different angles for each light To make it incident
A scanning element for scanning to
Illumination device for diffraction grating array. 10. A minute diffraction grating on the surface of a flat substrate
Multiple dots of the diffraction grating element consisting of
Putters that are placed and represented by a collection of the dots
Down the diffraction grating array having a (multi dot pattern)
Illuminating the diffraction grating array in an illuminating device
Lighting for generating illumination light of different colors for
The same number of light sources and the respective illumination light sources are provided and correspond.
Spatial modulation element that individually modulates the illumination light from the illumination light source
And the same number as each of the spatial modulation elements
Illumination light from the spatial modulation element is transmitted to the diffraction grating array.
On the same diffraction grating element for each illumination light
At different angles Imaging element that forms an image to make it incident
Of a diffraction grating array, characterized by comprising:
Light device. 11. The method according to claim 9 or 10.
In the illuminating device of the diffraction grating array of,
As a bright light source, there are red (R), green (G), and blue (B) colors.
It is designed to use three illumination light sources that generate illumination light.
And a diffraction grating array illuminating device. 12. The method according to claim 9 or claim 10.
In the illuminating device of the diffraction grating array,
As a prime, it is obtained by translating the curve
Diffraction grating characterized by using a diffraction grating
Array lighting system. 13. The method according to claim 9 or 10.
In the illumination device of the diffraction grating array of
Then, light emitting diode, semiconductor laser, laser,
Light guided by optical fiber, tungsten lamp, clear
Puton lamp, light guided to waveguide, or EL
Diffraction grating array characterized by using
Ray's lighting system. 14. The diffraction grating array according to claim 9.
In the lighting device of the above, the scanning element is a galvanometer.
Rotating mirrors such as mirrors and polygon mirrors
To use any of the elements with sound waves like
An illumination device for a diffraction grating array, which is characterized in that 15. The method according to claim 9 or 10.
In the illuminating device of the diffraction grating array,
As an element, the diffraction grating itself has a reproduction pattern component.
A diffraction grating array characterized by using a folded grating
Ray's lighting system.