JP3516065B2 - Pressure adjustment damper - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air flow rate adjusting damper, and more particularly to a pressure adjusting damper capable of adjusting an opening by sliding a blade body in a sliding manner by a rotary input operation.

[0002]

2. Description of the Related Art In semiconductor manufacturing factories, precision machinery factories, other food factories, various kinds of laboratories, etc., it is important to maintain a highly clean clean room which is kept in a highly clean space while avoiding dust.

FIG. 8 shows a schematic air conditioning structure of a conventional clean room. For example, in a room space S of the clean room, a semiconductor manufacturing apparatus 102 is arranged on a grating floor 100. A suction port 106 is provided on one wall side of the underfloor space 104, and an air conditioning fan 108 is communicated with the suction port.
The air sent by the air reaches the above-ceiling space 110, and H
After passing through the ceiling filter 112 formed of an EPA filter, an ULPA filter, or the like, the air flows downward in the indoor space S again, and then passes downward from the grating floor 100. The grating floor 100 is supported by a plurality of beam members 114, and the dampers 11 are provided between the beam members 114.
6 is provided to adjust the flow rate of air flowing into the underfloor space 104.

As a structure for adjusting the flow rate in such a clean room, one disclosed in Japanese Patent Laid-Open No. 3-186133 or Japanese Patent Laid-Open No. 3-291438 has been proposed.

[0005]

Problems to be Solved by the Invention
According to the one disclosed in Japanese Patent No. 33, an opening slide plate 3 is provided between the grating plate 1 and the opening bottom plate 2, and when adjusting the opening, the set screw is loosened each time to manually shift the opening slide plate 3. In order to avoid the complexity of the work involved, the two opening plates are set so as to overlap in the up-down direction, and the adjustment screws (7) and the handle (8) provided through them set the opening plates in the up-down direction. The air volume is adjusted while changing the distance.

Further, the one disclosed in Japanese Patent Laid-Open No. 3-291438 discloses a configuration in which the damper blade 14 opens and closes in a butterfly shape.

However, in the former structure, the opening is adjusted while the upper opening plate 5 and the lower opening plate 6 are moved back and forth in the stacking direction. Further, since a plurality of trapezoidal convex portions are formed on a plate having a required thickness width, these are confronted so as to mesh with each other, and air is circulated through the trapezoidal meshing portion gaps. Not only is it difficult to adjust the air flow rate accurately and appropriately, but the manufacturing cost of each aperture plate is high, and the air flow flowing to the underfloor space side also causes turbulence to make the flow easy to control. There was a problem that it was difficult.

Further, according to the latter, since the plurality of blades 14 are individually pivotally supported, separate blade bodies are required, and a pin for pivotal support, a gear for interlocking, or the like is required. There is a drawback that the structure is complicated and the manufacturing cost is high if necessary.

The present invention has been made in view of the above-mentioned problems of the prior art, and its object is an extremely simple structure, which can maintain the manufacturing cost at a low cost and can perform highly accurate air resistance adjustment. The object is to provide an improved pressure adjustment damper.

[0010]

In order to achieve the above object, the present invention is directed to a fixed blade body 12 having a first opening 16 which serves as a flow path for the wind, and to the fixed blade body 12. It includes a movable blade body 14 that is movably provided and has a second opening 18 formed at a position substantially corresponding to the formation position of the first opening 16, and a rotation input unit 28 that slides the movable blade body 14 by a rotation input. While the movable blade body 14 is linearly slid so that the rotational movement angle in the rotation input portion and the flow path resistance of the air flowing through the communication opening 26 are maintained in a substantially proportional relationship, the communication openings 26 of both openings 16 and 18 are The pressure adjusting damper 10 is provided with a rotary slide converting mechanism 30 for changing.

Further, the rotary slide conversion mechanism 30 includes a guide groove 36 linked to the rotary input section 28 and a pin 42 engaging with the guide groove 36, and the guide groove 36, or the first and second openings 16, The communication opening 26 formed by
The groove shape or the opening shape may be set to have a substantially proportional relationship between the rotational movement angle of the rotation input unit 28 and the flow path resistance of the air flowing through the communication opening.

Further, the rotation input section 28 is composed of the both blades 1
A rotary input shaft 32 provided so as to penetrate through both blades in a direction intersecting the sliding direction of 2 and 14, and the rotary input shaft 32.
And a guide board 34 fixed to the guide board 34 having a substantially C-shaped guide groove 36 bored therein.

Further, the guide board 34 may be provided with a direct-reading scale portion 44 which directly displays the resistance value corresponding to the rotation angle from the rotation input portion 28.

Further, the first and second openings 16 and 18
Any of the above may be triangular, and the other openings may be rectangular.

[0015]

The fixed blade body having the first opening and the movable blade body having the second opening relatively move in a sliding manner, and the communication opening of both openings at this time is changed. , The movable blade body is slid by inputting the rotation from the rotation input unit, and the pressure between the adjacent spaces is adjusted while adjusting the opening degree of the communication opening.

The rotary slide conversion mechanism includes a rotary input shaft,
A rotation input unit is provided, which is fixed to the rotation input shaft and has a guide disk having a substantially C-shaped guide groove formed therein. By providing the long groove provided on the fixed blade body side, the linking pin fixed to the movable blade body and protruding into the long groove, and the moving pin protruding into the guide groove of the guide board, the rotation input from the input shaft can be achieved. Accordingly, the guide board rotates.

Thus, when the rotary input shaft is rotated, the movable blade body is slid in the sliding direction regulated by the long groove by the radial distance of the circular guide plate created by the guide groove. by this,
The movable blade body is smoothly slid by the rotation input.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings, in which the same structure as a conventional structure or member, or the same member is denoted by the same reference numeral.
1 to 5 show a pressure adjusting damper 10 according to the present invention.
1 and 2, the pressure adjusting damper 10 is formed of two thin steel plates and includes a fixed blade body 12 and a movable blade body 14 arranged in a superposed state. ing.

The fixed blade body 12 is formed with a plurality of first openings 16 which serve as wind passages, and the movable blade body 14 is also provided with a second opening 18 at a position substantially corresponding to the first opening 16. ing. The first openings 16 formed in the fixed blade body 12 are in the shape of a triangle with the left side in the drawing as the upper side and the right side as the bottom side, and five rows are vertically formed in eight rows with a required gap.

On the other hand, the second opening 18 formed in the movable blade body 14 is formed in a vertically long rectangular shape in the figure, and in this embodiment, it has the same long side length as the bottom side length of the first opening 16. , A short side length corresponding to the height width h of the first opening. The second opening 18 is also the first opening 1 of the fixed blade body 12.
6 has a cross section 20 corresponding to the gap between the cross sections 6, and the cross section 2 is provided when the movable blade body 14 slides and moves as described later.
With 0, the first opening 16 is closed.

Guide pins 22 are erected at appropriate positions on the vertical and horizontal crosspieces 20 that divide the first opening 16 of the fixed blade body 12. In addition, a long hole 24 is provided at a position substantially corresponding to the position where the guide pin 22 is provided, and at an appropriate position of a vertical and horizontal crosspiece that divides the second opening 18 of the movable blade body 14 into the first opening 16. It is provided along the height h direction. Each guide pin 22 has a long hole 24.
The movable blade body 14 is slidable relative to the fixed blade body 12 by the length of the elongated hole 24.

As described above, as the movable blade 14 slides, the second opening 18 and the first opening 16 of the fixed blade 12 overlap with each other to change the communication opening 26.

One feature of the present invention is that a rotary slide conversion mechanism 30 having a rotary input section 28 is provided in the vicinity of both blade bodies 12 and 14. As a result, the opening of the communication opening 26 can be adjusted simply by sliding the movable vane body 14 while rotationally inputting it. Therefore, the air differential pressure can be adjusted accurately, and the low cost and maintenance can be achieved by the small number of members and the simple structure. To ensure the ease of.

As shown also in FIGS. 2 and 5, a rotary input shaft 32 is provided at a substantially central portion of the two blade bodies which are superposed, and the blades are arranged in a direction intersecting the sliding direction of the blade bodies 12 and 14. It is provided through the body.

In addition, as shown in FIG.
A circular guide board 34 is fixed to the rotary input shaft 32 at the center thereof on the upper surface side thereof. As shown in FIGS. 1 and 5, the guide board 34 is provided with a guide groove 36 having a substantially C shape or an involute curve shape. In this embodiment, the rotation input unit 28 includes the rotation input shaft 32 and a guide board 34 having a guide groove.

On the other hand, in FIG. 3 showing the rear surface side of the pressure adjusting damper 10 of FIG. 1, the fixed blade body 12 extends in the sliding direction, that is, in the height width h direction of the first opening 16 of the triangle. Thus, the long groove 38 is provided.

Further, the movable blade body 14 is provided with a linking pin 40 projecting through the long groove 38 formed on the fixed blade body 12 side, and the movable blade body has a surface side as shown in FIG. A moving pin 42 is vertically installed and fixed at a position substantially corresponding to the front and back positions of the linking pin 40. And
The moving pin 42 projects through the inside of the guide groove 36 of the guide board 34, so that when the rotation input shaft 32 is rotated, the moving pin 42 moves as if along the guide groove 36 (actually, Is fixed to the movable blade 14 and does not move) and moves in the sliding direction regulated by the long groove 38 by the radial distance of the circular guide plate 34 created by the guide groove 36. Is to slide.

As described above, in this embodiment, the guide groove 36 is substantially C-shaped, that is, it is formed in an involute curve shape so as to rise from a portion close to the axial center and follow the circumference around the axial center. There is. In other words, the rising portion has an arc locus with a steep curvature, whereas the arc locus with a gentle curvature has a gentle curvature shape along the circumference.

As a result, when the rotary input shaft 32 is rotated, the rotational movement angle and the resistance value, that is, the static pressure value on the downstream side of the flow maintain a substantially linear proportional relationship, and the opening shape and the opening shape. Therefore, it is not difficult to finely adjust the resistance or the air volume due to the large resistance loss even with a slight turning operation.

That is, as a result, the static pressure resistance value increases or decreases substantially corresponding to the rotation angle of the input shaft, so that the fine adjustment operation can be performed.

Further, as shown in FIG. 5, the guide board 34 may be provided with a direct-reading scale portion 44 that directly displays, for example, static pressure, the resistance value corresponding to the rotation angle about the rotation input shaft 32. As a result, the resistance can be directly set during the rotation input operation without referring to the correspondence table between the angle and the resistance value, and the desired air flow rate can be surely adjusted.

Reference numeral 46 is an engaging groove at the tip of the driver when rotating from the upper part of the grating floor, 48 is a screw hole for attaching to the underfloor slab material, and 50 is provided in the fixed blade body 12 and is movable. Groove 52 provided in blade body 14
It is a pointer that penetrates the inside (formed to the same length as the long groove 38 provided on the fixed blade side) and has an indicator at the upper end.

The present invention is not limited to the structure of this embodiment, and the movable blade body is slid by the rotation input to adjust the pressure by the opening change formed by the communication opening of the first and second openings. Applicable to damper.

As will be described later, the first and second openings may have the same shape or different shapes.
Further, the shapes of the first and second openings themselves are circles, squares,
It may be parallelogram, other polygon, irregular shape, etc.,
Further, the shape of the communication opening formed by them may be arbitrarily set.

The rotary slide conversion mechanism 30 is not limited to the structure of the embodiment, but a guide groove structure as in the embodiment having a simple structure is suitable for adjusting a subtle flow rate change. The guide board 34 does not have to be circular and may have any other shape.

As described above, in the present embodiment, the static pressure resistance value can be increased / decreased in proportion to the rotation angle of the input shaft 32, whereby fine adjustment operation of the resistance and thus the air flow rate in the rotary input mode is possible. I have to.

As described above, when the rotational movement angle of the input shaft is proportional to the resistance value, in the embodiment, the communication opening is triangular, and the communication opening is movable from the bottom side to the top side so as to be closed. The blade body 14 is made to slide. On this premise, in order to maintain the proportional relationship between the rotation angle and the resistance value, the guide groove 36 of the guide board 34 is formed in a substantially C shape or an involute curve shape.

In order to make the rotation angle and the resistance change linearly in this way, the communication opening 26 is set to a certain shape, and the closed shape by the sliding movement at that time is set, and then the guide groove 36 corresponding thereto is set. The groove shape may be determined by simulating the shape. Alternatively, conversely, the groove shape may be fixedly set and the problem on the communication opening side may be examined and set.

In this way, the groove shape itself is not limited to the substantially C shape as in the present embodiment, and any other shape is set so that the rotation angle and the resistance can maintain a proportional relationship. Is also good.

FIG. 6 is a performance diagram mainly showing the damper 10 of the present application, and the curve of is the experimental data when both blades each having an opening are slid at the same pitch width.

Among them, the communication opening has a rectangular shape,
By the sliding movement, the quadrangle changes the communication opening area while changing the side length. In this case, for example, the static pressure is 2 mmA up to a pitch movement width of about 15 mm.
Although it rises from q to about 8 mmAq and rises only very gently, the degree of change in static pressure rises sharply after the pitch width exceeds 15 mm, and changes into a curved shape as shown in the figure.

Is a transition characteristic when a damper having the same structure as that of the present application is used except for the rotary slide conversion mechanism, that is, the communication openings are triangular and the sliding directions are the same, but the slide pitch widths are equal intervals. This shows that the static pressure is gradually increased up to about 13 mm and the static pressure is about 10 mmAq. However, when the pitch scale is exceeded, the static pressure value is rapidly increased.

Is a performance characteristic line using the pressure adjustment damper according to the present invention, and it is understood that the static pressure resistance value linearly increases in proportion to the rotation angle of the input shaft 32. As a result, the resistance value does not change abruptly at a slight rotation angle and it becomes difficult to finely adjust the resistance. It can be operated.

Although not shown, in the structure of the embodiment, when the first opening 16 is slid and changed from the top side to the bottom side of the triangle at an equal pitch, a curve having a steeper curvature than the curve, That is, it has been confirmed that the static pressure does not rise easily from the start-up, and that the static pressure rises rapidly near the time of blockage.

It is the shape of the guide groove 36 of the rotary slide conversion mechanism 30 that causes such a curve-like change in resistance and rotation angle to be changed linearly as in the present invention. Therefore, conversely, by fixing the shape of the guide groove 36 and operating the communication opening side, the rotation angle and the resistance may be set to maintain a proportional relationship.

Next, the operation of the configuration of the above embodiment will be described. For example, in FIG.
When in the position a, the triangular shape which is the first opening of the fixed blade body 12 in FIG.
4 is at a position such that the cross section 20 thereof overlaps the bottom of the same triangular shape. At this time, the tip of the pointer 50 is held at a position on the direct-reading scale portion 44 on the guide board 34 so as to indicate 2 mmAq, which corresponds to 2 mmAq at the beginning of rising in the performance diagram of FIG.

From this state, for example, a driver is inserted from the gap of the grating floor and the tip portion thereof is rotated to the rotary input shaft 32.
4 into the driver engagement groove 46 and rotated clockwise in the direction of the arrow in FIG.

Along with this, the guide board 34 rotates in the direction of the arrow, and for example, at a rotation angle of 100 degrees, 18 mmA.
q, about 36 mmAq. at a rotation angle of 200 degrees. ． ． 4 and FIG. 5 according to the change.
As the check groove 52 moves leftward as it moves upward and leftward, the pointer 50 points the scale portion 44 corresponding thereto. As a result, a change in resistance corresponding to the performance diagram of FIG. 6 can be obtained, and a resistance value proportional to this can be easily set with a uniform rotational movement amount, so that the differential pressure, that is, the fine adjustment of the air flow rate can be performed accurately. You can do it.

As a result, as shown in FIG. 7, each semiconductor manufacturing apparatus is arranged on the lower surface of the grating floor or the like at the installation location, each pressure adjusting damper 10 under each apparatus is adjusted, and the suction port 106 The resistance value on the farthest wall side is set to be small, and the resistance value on the lower floor side on the near side is increased to perform highly accurate underfloor air conditioning so as to generate a unidirectional flow or a parallel flow.

As a premise, the opening of the communication opening 26 can be adjusted simply by sliding the movable vane body 14 while rotationally inputting it. Therefore, the air pressure can be adjusted accurately, and the number of members and the simple structure are small. As described above, it is possible to ensure low cost and ease of maintenance.

The pressure adjusting damper according to the present invention may be used not only for adjusting the air volume when used under the floor, but also on the ceiling or in a vertical shape on a wall or the like.
In addition to semiconductor manufacturing factories, other food factories,
It may be applied to a clean room such as a research room or an operating room and a place requiring the same air conditioning.

Further, the pressure adjusting damper according to the present invention is not limited to the above-mentioned constitution of the embodiment, and may be arbitrarily modified within a range not departing from the spirit of the invention described in the claims. .

[0053]

As described above, according to the pressure adjusting damper of the present invention, the rotary slide conversion mechanism is provided in the blade body having the first and second openings that relatively slide.
Since the movable blade body is slid by the rotation input and the pressure is adjusted while adjusting the opening degree of the communication opening, the opening degree of the communication opening can be adjusted simply by sliding the movable blade body while rotating input.
In addition, the air pressure can be adjusted accurately, and the damper can be manufactured at an extremely low cost with a small number of members and a simple structure.

At this time, by forming the first and second openings in arbitrary shapes, it is possible to form a desired communication opening shape corresponding to the guide groove structure, and it is easy to adjust the resistance value during manufacturing.

Further, either the first opening or the second opening is triangular and the other openings are rectangular, so that the communication opening can be formed in a triangular shape, and the slide direction can be set to a height or the like so that the guide groove is formed. This makes it easier to perform shape simulations.

Further, in the pressure adjustment damper of the present invention, the rotary slide conversion mechanism has a rotary input shaft provided through the both blade bodies in a direction intersecting with the sliding direction of the both blade bodies, and the rotation input shaft. By providing a guide plate fixed to the input shaft and having a substantially C-shaped guide groove perforated, it is possible to realize a highly accurate pressure adjusting operation by rotational input.

Further, the guide groove of the rotation input section or the communication opening formed by the first and second openings is set to a required groove shape or opening shape, and the movable blade is slid by the rotation input from the rotation input section. When moving, the rotational movement angle,
By maintaining a substantially linear proportional relationship with the resistance value, it is possible to reliably and accurately perform the fine adjustment operation of the resistance when slidingly moving while inputting the rotation.

Further, in the pressure adjusting damper of the present invention, since the guide board is provided with the direct reading scale portion directly displaying the resistance value corresponding to the rotation angle from the rotation input portion,
There is an effect that the resistance can be directly set during the rotation input operation without referring to the correspondence table of the rotation operation angle and the resistance value, and the desired air flow rate can be surely adjusted.

[Brief description of drawings]

FIG. 1 is a front view (surface view) of a pressure adjustment damper according to an embodiment of the present invention.

FIG. 2 is a side view of the pressure adjustment damper according to the embodiment of the present invention.

FIG. 3 is a rear view (rear view) of FIG.

FIG. 4 is an enlarged explanatory view of a main part of a communication opening and a rotary slide conversion mechanism.

FIG. 5 is an enlarged explanatory view of a rotary slide conversion mechanism.

FIG. 6 is a static pressure mainly of the pressure adjustment damper of the present embodiment-
It is a rotation angle corresponding performance diagram.

FIG. 7 is a schematic explanatory diagram showing an air conditioning configuration of a clean room or the like in which the apparatus of this embodiment is arranged.

FIG. 8 is a schematic explanatory diagram showing an air conditioning configuration of a conventional clean room or the like.

[Explanation of symbols]

10 Pressure adjustment damper 12 Fixed blade 14 movable wings 16 First opening 18 Second opening 26 communication openings 28 Rotation input section 30 rotary slide conversion mechanism 32 rotation input shaft 34 Guide board 36 Guide groove 38 long groove 42 Moving pin 44 Direct reading scale section h Triangle height width

Continued from the front page (73) Patent holder 000003078 Toshiba Corporation 1-1-1 Shibaura, Minato-ku, Tokyo (72) Inventor Yukio Kuno 1034 Wada, Shinoguri-machi, Kasuya-gun, Fukuoka 4 Kyoritsu Airtech Co., Ltd. ( 72) Inventor Yoji Mori 1034, Wada, Shinoguri-cho, Kasuya-gun, Fukuoka 4 Kyoritsu Airtech Co., Ltd. (72) Inventor Shuichi Kitamura 4-4-20 Nihonbashi Honishicho, Chuo-ku, Tokyo Mitsui Second Annex Shin Nihon Air Conditioning (72) Inventor Tetsuji Kirishima 4-4-20 Nihonbashi Hongokucho, Chuo-ku, Tokyo Mitsui Second Annex Shin Nihon Air Conditioning Co., Ltd. (72) Inventor Akio 2-25, Kandasuda-cho, Chiyoda-ku, Tokyo Address 2 Toshiba Air Conditioning Co., Ltd. (72) Inventor Yuji Unno 2-25-2 Kandasuda-cho, Chiyoda-ku, Tokyo 2 Toshiba Air Conditioning Co., Ltd. (72) Inventor Shigenobu Ishizaka 72 Horikawa-cho, Kawasaki-shi, Kanagawa Stock Company Toshiba (56) References: 62-117461 (JP, U) 60-108946 (JP, U) Actual Kaihei 6-73626 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) F24F 13 / 00-13 / 18

Claims (5)

(57) [Claims] 1. A fixed vane body having a first opening which serves as a flow path for wind, and a fixed vane body slidably provided with respect to the fixed vane body and provided at a position substantially corresponding to the formation position of the first opening. A movable blade body having an opening, and a rotation input unit for slidingly moving the movable blade body by a rotation input.
Flow through the rotation movement angle and the communication opening in the rotation input section.
Movable to maintain a substantially proportional relationship with the flow resistance of the wind
While sliding the blade in a straight line,
It is equipped with a rotary slide conversion mechanism that changes.
A pressure adjustment damper to be used. 2. A rotary slide conversion mechanism is provided in a rotary input section.
Includes a linked guide groove and a pin that engages with the guide groove.
Groove, a guide groove, or a connection formed by the first and second openings.
Set the through opening to the required groove shape or opening shape.
Flow through the rotation opening and the communication opening in the rotation input section
The pressure adjusting damper according to claim 1, wherein the pressure adjusting damper maintains a substantially proportional relationship with the flow path resistance of the wind . 3. The rotation input portion is a sliding direction of the both blades.
Is a rotation provided through both blades in a direction intersecting with
Input shaft and guide that is fixed to this rotary input shaft and has a substantially C shape
The pressure adjusting damper according to claim 1 or 2 , further comprising: a guide plate having a groove formed therein . 4. The guide panel is provided with a rotation angle from the rotation input section.
A direct-reading scale section that directly displays the corresponding resistance value is provided.
The pressure adjusting damper according to claim 3, wherein 5. One of the first and second openings is triangular.
It is shaped and the other openings are rectangular
The pressure adjustment damper according to any one of claims 1 to 4 .