JP3515870B2 - Ingot stretching equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for drawing an ingot made of, for example, synthetic quartz.

[0002]

2. Description of the Related Art Optical fibers often used in the field of communication and the like are manufactured by drawing an ingot of synthetic quartz or the like. Since a large synthetic quartz ingot is inconvenient to handle, it may be stretched by a stretching device into a small synthetic quartz rod and then drawn.

An example of a conventional stretching device is shown in FIG. As shown in the figure, a ball screw 5 connected to a motor 7 is fixed to the column 4, and a synthetic quartz ingot 1 is suspended on a scanning tool 6 screwed onto the ball screw 5. Inside the heating furnace 8 attached to the column 4, there is a heating element 9, an outside diameter sensor 11 for measuring the outside diameter of the taper portion 2 is attached to the side, and a guide roller 22 and a pinch roller 2 are provided below.
1 is arranged. This drawing apparatus drives the motor 7 to lower the ingot 1 and insert it into the heating furnace 8, and heats the ingot 1 above the softening point in the heating furnace 8 so that the softened ingot 1 is faster than its descending speed. By pulling it out with the pinch roller 21 at a speed, the rod 3 obtained by stretching the ingot 1 is obtained.

[0004]

When the ingot 1 is stretched by this stretching apparatus, a force may be applied to the taper portion 2 of the softened ingot 1 in the horizontal direction, and the temperature distribution may become non-uniform. When it goes out of the furnace 8 and is solidified again, a slight inclination may occur, and the drawn rod 3 may bend. In addition, the ingot 1 before stretching often has a bend originally. For this reason, it is usually necessary to perform a work of correcting the rod 3 obtained after the ingot 1 is stretched by a glass lathe.

The present invention has been made to solve the above-mentioned problems, and provides an ingot stretching apparatus in which a rod obtained by stretching an ingot does not bend, and correction processing of the rod is not required. The purpose is to

[0006]

The drawing apparatus for the ingot 1 of the present invention made to achieve the above-mentioned object is shown in FIG.
As shown in FIG. 1, in a device for heating and stretching an ingot 1 having a circular cross section and pulling out a circular rod 3, a heating furnace 8 for the ingot 1 and an eccentricity adjusting spin for suspending the ingot 1 are used.
Rolling device 10, insertion means 5, 6, 7 for inserting ingot 1 into heating furnace 8, holding means 13, 14 for holding circular rod 3 in synchronization with ingot 1, and stretching means for pulling out the circular rod. 12a, 12b, 15a, 15b, 1
And a 6 and 17, the whirling ingot 1 in the heating furnace 8
An outer diameter sensor 11 for measuring the outer diameter including the amount is attached, and a control circuit 1 for outputting a signal by comparing the outer diameter value including the whirling amount measured by the outer diameter sensor 11 with the outer diameter value of the reference circle.
8, 19, 30 (see FIG. 4) and the eccentricity adjusting rotation device 10
Has an eccentricity adjusting device for the ingot 1 driven in the X and Y directions by the signal.

It is preferable that the gripping means 13 and 14 include a plurality of rotary chucks 13 and 14 that alternately repeat gripping and opening.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below.

FIG. 1 is a side view showing an embodiment of a stretching device for an ingot 1 to which the present invention is applied. As shown in the figure, a ball screw 5 connected to a motor 7 is fixed to the support 4, and the scanning tool 6 screwed onto the ball screw 5 rotates the ingot 1 and at the same time, the curved ingot 1 rotates. An eccentricity adjustment rotation device 10 for adjusting the whirling caused by is attached. An upper end of the synthetic quartz ingot 1 is connected to and suspended from the eccentricity adjusting rotation device 10. Below the heating furnace 8 attached to the column 4, ball screws 12a and 12b connected to two motors 15a and 15b (added on the drawing), respectively.
(Added on the drawing) is fixed to the column 4, and the ball screw 12a
The scanning tool 16 is screwed onto the ball screw 12b and the scanning tool 17 is screwed onto the ball screw 12b. The rotary chuck 13 holds the circular rod 3 while rotating in synchronization with the ingot 1.
14 is attached. A heating element 9 is provided inside the heating furnace 8, and an outer diameter sensor 11 of the taper portion 2 of the ingot 1 is attached to a side portion of the heating element 9.

FIG. 2 is a sectional view showing the structure of the eccentricity adjusting rotation device 10. As shown in FIG.
A guide rail 38 and an X motor 34 are fixed to the X motor 34, and a ball screw 35 is connected to the X motor 34. A linear bearing 37 and a ball nut 36 are attached to the lower surface of the X moving table 33 that moves in the X axis direction.
The linear bearing 37 is slidably mounted on the guide rail 38, and the ball nut 36 is screwed into the ball screw 35. Further, the guide rail 2 is provided on the upper surface of the X moving table 33.
8 is fixed. A linear bearing 27 and a ball nut 26 are provided on the lower surface of the Y moving table 23 that moves in the Y axis direction.
, The linear motion bearing 27 is slidably mounted on the guide rail 28, and the ball nut 26 is attached to the ball screw 25.
The ball screw 25 to the Y motor 55 (see FIG. 4).
Are linked to. Further, the X moving table 33 and the fixed table 31 have holes 39 and 32, respectively, and a chuck 29 for holding the ingot 1 is attached to the lower surface of the Y moving table 23. The chuck 29 is connected to the motor 24 and rotates. It is like this.

FIG. 3 is a partial sectional view showing the structure of the rotary chucks 13 and 14. As shown in the figure, the rotary base 43 is connected to the fixed base 44 via a rolling bearing 46, and the rotary base 42 is connected to the fixed base 41 via a rolling bearing 45. An air cylinder 52 is attached to the fixed base 41, and a piston 53 attached to the fixed base 44 is inserted into the air cylinder 52. A groove 60 is formed on a part of the inner surface of the rotation base 42, and a protrusion 50 is formed on a part of the outer surface of the rotation base 43. The protrusion 50 fits along the groove 60 when the rotation base 43 moves up. Further, the fixed base 41 has a motor 59,
A gear 56 is attached, and the gear 56 is connected to a motor 59 via a bevel gear 57 and a bevel gear 58. A gear 54 is fixed to the rotation base 42, and a support base 40 that horizontally moves the grip portion 51 is fixed to the gear 54. The gear 54 and the gear 56 mesh with each other. A cam plate 47 having an elongated hole 48 is fixed to the rotary base 43, and a shaft 49 fixed to a grip portion 51 is inserted into the elongated hole 48.

FIG. 4 is a block diagram of an embodiment of a stretching apparatus for an ingot 1 to which the present invention is applied. As shown in the figure, the motors 7, 15 a, 15 b for driving the ball screws 5, 12 a, 12 b and the motor 24 of the eccentricity adjusting rotation device 10 for rotating the ingot 1 are connected to the control circuit 20. Further, the control circuit 20 includes a rotary chuck 13
An air cylinder 52 that operates the gripping portion 51 of the fourteenth motor 14 and a motor 59 that rotates the rotary base 42 of the rotary chucks 13 and 14 in synchronization with the ingot 1 are connected.

The outer diameter sensor 11 compares the outer diameter value of the ingot 1 measured by the outer diameter sensor 11 with the outer diameter value of the ingot 1 when there is no whirling, and the measured value is detected when whirling is detected. The output comparison circuit 18 is connected, and the comparison circuit 18 is connected to an arithmetic circuit 19 which calculates the amount of whirling in the X and Y directions from the measured value. The arithmetic circuit 19 is connected to the eccentricity control circuit 30. The eccentricity control circuit 30 includes
An X motor 34 that drives the X movement table 33 and the Y movement table 23 of the eccentricity adjustment rotation device 10 from the values calculated by the arithmetic circuit 19 so as to correct the whirling of the ingot 1.
-Y motor 55 is connected. Also, the outer diameter sensor 11
Is also connected to the control circuit 20, and the motor 7 ・ 15a
-Referenced for calculating the rotational speed of 15b.

The ingot stretching device operates as follows.

As shown in FIG. 1, the motor 7 and the motor 24 (see FIG. 2) of the eccentricity adjusting and rotating device 10 are actuated to gradually lower the scanning tool 6 while rotating the synthetic quartz ingot 1 to heat the heating furnace 8. When inserted into the inside, the tapered portion 2 of the ingot 1 is heated and softened. The outer diameter sensor 11 measures the outer diameter of the rotating tapered portion 2. The measured value is compared by the comparison circuit 18 (see FIG. 4) with the outer diameter of the ingot 1 when there is no whirling, and when whirling is detected, the arithmetic circuit 1
9 calculates the amount of whirling in the X and Y directions. Based on the calculated value, the eccentricity control circuit 30 outputs a signal to the eccentricity adjustment rotation device 10, drives the X moving table 33 and the Y moving table 23, and corrects whirling of the ingot 1.
Therefore, the center of rotation of the eccentricity adjustment rotation device 10 is eccentric .

Further, the control circuit 20 includes a rotary chuck 13
The motor 59 (see FIG. 3) of the air cylinder 52 is rotated while the rotation base 42 is rotated in synchronization with the ingot 1.
Is operated to raise the cam plate 47, the grip portion 51 is closed to grip the rod 3, and the motor 15a is driven to drive the scanning tool 6
After lowering the scanning tool 16 at a speed faster than the descending speed of the ingot 1 to pull out and stretch the ingot 1, the rotary chuck 13
Release the grip. Next, the motor 15b reversely rotates at an appropriate timing to raise the scanning tool 17 and rotate the chuck 14
Is returned to the upper part and the motor 59 of the rotary chuck 14 is driven to rotate the rotary base 42 synchronously with the ingot 1, while the grip portion 51 is closed to grip the towed rod 3 and further tow the ingot 1. Stretch. In this way, the rods 3 are alternately gripped by the rotary chucks 13 and 14 and pulled out, whereby the ingot 1 is continuously stretched.

[0017]

As described in detail above, when an ingot is rotationally stretched using the apparatus of the present invention, the force and thermal bias applied to the ingot are dispersed, so that the rod after stretching bends. The bending of the originally bent ingot is corrected and the rod becomes an unbent rod after stretching. For this reason, it is not necessary to perform a correction process after the ingot drawing, and the ingot drawing process can be greatly simplified.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of an ingot stretching device to which the present invention is applied.

FIG. 2 is a cross-sectional view showing the structure of an eccentricity adjusting rotation device which is one component of an ingot drawing device to which the present invention is applied.

FIG. 3 is a partial cross-sectional view showing the structure of a rotary chuck which is a component of an ingot stretching device to which the present invention is applied.

FIG. 4 is a block diagram of an embodiment of an ingot stretching device to which the present invention is applied.

FIG. 5 is a side view showing an example of a conventional ingot stretching device.

[Explanation of symbols]

1 is a synthetic quartz ingot, 2 is a tapered portion, 3 is a synthetic quartz rod, 4 is a support, 5 / 12a / 12b / 25/35.
Is a ball screw, 6/16/17 is a scanning tool, 7 / 15a /
15b, 24 and 59 are motors, 8 is a heating furnace, 9 is a heating element, 10 is an eccentricity adjusting rotation device, 11 is an outer diameter sensor, 13
・ 14 is a rotary chuck, 18 is a comparison circuit, 19 is an arithmetic circuit, 20 is a control circuit, 21 is a pinch roller, 22 is a guide roller, 23 is a Y moving table, 26 and 36 are ball nuts, and 27 and 37 are linear. Bearings, 28 and 38 are guide rails, 29 is a chuck, 30 is an eccentricity control circuit, 31 is a fixed table, 32 and 39 are holes, 33 is an X movement table,
34 is an X motor, 40 is a support base, 41 and 44 are fixed bases, 42 and 43 are rotation bases, 45 and 46 are rolling bearings, 47 is a cam plate, 48 is an elongated hole, 49 is a shaft, 50 is a protrusion, 51 Is a grip portion, 52 is an air cylinder, 53 is a piston, 54 and 56 are gears, 55 is a Y motor, 57 and 58 are bevel gears, and 60 is a groove.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Tadakatsu Shimada               2-13-1, Isobe, Annaka-shi, Gunma Shinetsu               Precision Industry Materials Laboratory, Chemical Industry Co., Ltd. (72) Inventor Akihiko Suzuki               2-6-1, Otemachi, Chiyoda-ku, Tokyo               Shin-Etsu Chemical Co., Ltd. (72) Inventor Yamamura Waichi               2-13-1, Isobe, Annaka-shi, Gunma Shinetsu               Precision Industry Materials Laboratory, Chemical Industry Co., Ltd. (72) Inventor Yoshimasa Shimizu               2-13-1, Isobe, Annaka-shi, Gunma Shinetsu               Precision Industry Materials Laboratory, Chemical Industry Co., Ltd.                (56) Reference JP-A-9-30825 (JP, A)                 JP-A-9-30278 (JP, A)                 JP-A-9-30826 (JP, A)                 JP 63-195139 (JP, A)                 Japanese Unexamined Patent Publication No. 5-147971 (JP, A)                 JP-A-7-17736 (JP, A)                 JP-A-7-69665 (JP, A)

Claims (2)

(57) [Claims] 1. An ingot having a circular cross section is drawn by heating,
In a device for pulling out a circular rod, the addition of the ingot
Heat furnace and the ingotEccentricity adjustment rotating device
A means for inserting the ingot into the heating furnace, and the circular roll.
Gripping means for gripping the head by rotating in synchronization with the ingot
And a stretching means for pulling out the circular rod,
Of the ingot in the furnaceIncluding amount of whirlingMeasure the outer diameterRuse
Sensor is installed,ThisMeasured with a sensorThe amount of whirling
IncludingOutput the signal by comparing the outer diameter value with the outer diameter value of the reference circle.
A control circuit,The eccentricity adjustment rotation device,Depending on the signal
handIn the X and Y directionsEccentricity adjustment device for driving the ingot
An ingot drawing apparatus, which comprises a storage device. 2. The ingot stretching device according to claim 1, wherein the gripping means is composed of a plurality of rotary chucks which alternately repeat gripping and opening.