JP3515147B2 - Anomaly detection device by detecting phase of high frequency power supply of laser oscillator - Google Patents
Anomaly detection device by detecting phase of high frequency power supply of laser oscillatorInfo
- Publication number
- JP3515147B2 JP3515147B2 JP27225493A JP27225493A JP3515147B2 JP 3515147 B2 JP3515147 B2 JP 3515147B2 JP 27225493 A JP27225493 A JP 27225493A JP 27225493 A JP27225493 A JP 27225493A JP 3515147 B2 JP3515147 B2 JP 3515147B2
- Authority
- JP
- Japan
- Prior art keywords
- phase
- laser oscillator
- phase difference
- output
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】
【０００１】
【産業上の利用分野】この発明は、レーザ発振器の高周
波電源の位相検出による異常検出装置に関する。
【０００２】
【従来の技術】図２に、レーザ発振器の高周波電源の一
例として、高周波インバータ１、昇圧トランス３、整合
回路５等を示してある。高周波インバータ１は、入力端
子から供給される直流電力を、ブリッジに組み込まれた
４個のＦＥＴ素子Ｔ1 〜Ｔ4 と、図示を省略した制御回
路によって前記４個の素子のゲートｇを制御することに
より、所定の高周波交流電力に変換する。昇圧トランス
３は、高周波インバータ１から供給される高周波交流電
圧を所定の高圧の高周波交流電圧へ昇圧する。
【０００３】整合回路５は電力伝達の効率の向上を図る
もので、可変Ｌ、Ｃ回路からなり、昇圧トランス３（電
源）と図示を省略したレーザ発振器の放電部（負荷）と
の整合を行う。Ｌ、Ｃを可変にしてあるので、レーザ発
振器の放電電流の広い範囲で整合する。整合時には、昇
圧トランス３の出力の力率は１になる。
【０００４】高周波インバータ１、昇圧トランス３、整
合回路５等が正常に動作しているかどうかは、従来は、
例えば図に示すように、高周波インバータ１、昇圧トラ
ンス３および整合回路５の各出力部ａｂ、ｃｄ、ｅｆ等
の電圧とその電流を、それぞれ交流電圧電流計１５、１
７、１９等によって計測して判断していた。
【０００５】
【発明が解決しようとする課題】前記のように、高周波
電源の高周波インバータ１、昇圧トランス３、整合回路
５等の出力は、通常の交流電圧、電流計によって計測さ
れ、計測値が規定値の範囲にあれば、一応正常に動作し
ているものと判断されていた。しかし、レーザ発振器の
出力を低下させる高周波電源内や発振器の電極外の異常
放電や、高周波インバータの出力の電圧と電流の位相差
に基づくスイッチング素子の破損等の防止、保護手段と
しては、交流電圧、電流計に替わる装置が必要であっ
た。
【０００６】この発明は、このような点に着目してなさ
れたもので、高周波電源を構成する各部の出力の電圧と
電流の位相差を検出することにより、電源装置の異常を
検出する装置を提供することを目的とする。
【０００７】
【課題を解決するための手段】前記の目的を達成するた
めに、この発明のレーザ発振器の高周波電源の異常検出
装置は、高周波インバータ、当該高周波インバータの出
力を昇圧する昇圧トランス、および、当該昇圧トランス
とレーザ発振器の放電部との整合をとる整合回路を備え
たレーザ発振器の高周波電源において、前記高周波イン
バータの出力部における電圧と電流の位相差を検出する
第１の位相比較器と、前記昇圧トランスの出力部におけ
る電圧と電流の位相差を検出する第２の位相比較器と、
前記整合回路の出力部における電圧と電流の位相差を検
出する第３の位相比較器と、前記各位相比較器により検
出された位相差が、各位相比較器ごとに予め設定された
所定値を越えたとき警報を出力する警報器と、を備えて
いるものである。
【０００８】
【作用】このように、構成されているので、高周波電源
装置の高周波インバータ、昇圧トランスおよび整合回路
の各出力の少なくとも一つの出力の電圧と電流の位相差
が、位相比較器によって検出され、検出値が所定値を越
えた場合には、警報器から警報が出力される。これによ
って、必要な処置を講ずることができる。
【０００９】
【実施例】次に、この発明の実施例について、図１に基
づいて説明する。この図の高周波電源装置は、前述の従
来のレーザ発振器の高周波電源の説明図２と同様である
ので、高周波インバータ１、昇圧トランス３および整合
回路５の構成についての説明は省略する。図示のよう
に、高周波インバータ１、昇圧トランス３および整合回
路５の各出力部は、それぞれ位相比較器７、９、１１へ
接続され、これらの出力は警報器１３へ接続されてい
る。
【００１０】位相比較器７、９、１１の構成は、例え
ば、入力した電圧と電流の乗算を行い、フィルタによっ
て高周波を除去したもので、方形波の場合には位相差
に、正弦波の場合には位相差のｓｉｎに、それぞれ比例
した電圧を出力する。これらの位相比較器の出力が、そ
れぞれに予め設定された基準値を越えた場合には、該当
する位相比較器から警報信号が出力され、警報器１３が
警報を発する。
【００１１】次に、各位相比較器の作用について説明す
る。位相比較器７は、高周波インバータ１の出力部ａｂ
の電圧と電流間の位相差を検出するもので、位相差が生
ずると、スイッチング素子が破損する恐れがあるので、
速やかな対策を講ずるために設けたものである。
【００１２】位相比較器９は、整合回路５の電源側の昇
圧トランス３の出力部ｃｄの電圧と電流の位相差を検出
するものである。整合回路５は、前記のように、昇圧ト
ランス３と図示を省略したレーザ発振器の放電部との整
合を行うものである。整合状態では、昇圧トランス３の
出力部ｃｄの電圧と電流間の位相差は無いが、非整合状
態では、その程度に応じて位相差を生ずる。高周波電源
が整合状態にあるとき、電極外放電等の異常放電が生ず
ると、整合が崩れ、位相差を生ずる。異常放電の程度が
大きくなると位相差も大きくなる。従って、位相比較器
９によって位相差を検出すれば異常放電の程度を知るこ
とができ、所定値を越えた場合には警報を出力させる。
【００１３】位相比較器１１は整合回路５の出力部ｅｆ
の電圧と電流間の位相差を検出するもので、整合状態に
あるときは位相差はないが、出力部ｅｆとレーザ発振器
を接続するケーブル等に異常放電があれば位相差を生ず
る。この値が所定値を越えた場合には警報を出力させ
る。
【００１４】このように、それぞれの位相比較器にはそ
れぞれの作用があり、高周波電源装置に対応して効率的
に設ければよく、必ずしも全部設けなくてもよい。
【００１５】
【発明の効果】この発明は以上のように、高周波インバ
ータ、高周波インバータの出力を昇圧する昇圧トラン
ス、および、昇圧トランスとレーザ発振器の放電部との
整合をとる整合回路を備えたレーザ発振器の高周波電源
において、高周波インバータの出力部における電圧と電
流の位相差を検出する第１の位相比較器と、昇圧トラン
スの出力部における電圧と電流の位相差を検出する第２
の位相比較器と、整合回路の出力部における電圧と電流
の位相差を検出する第３の位相比較器と、各位相比較器
により検出された位相差が、各位相比較器ごとに予め設
定された所定値を越えたとき警報を出力する警報器とを
備えて構成したので、第１の位相比較器が位相差を検出
して警報器が警報を出力することで、高周波インバータ
のスイッチング素子の破損を未然に防止することができ
る。また、第２の位相比較器が位相差を検出して警報器
が警報を出力することで、電極外放電等の異常放電の発
生を警告することができる。さらに、第３の位相比較器
が位相差を検出して警報器が警報を出力することで、整
合回路の出力部とレーザ発振器とを接続するケーブル等
の異常放電の発生を警告することができる。 Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an abnormality detecting apparatus for detecting the phase of a high-frequency power supply of a laser oscillator. 2. Description of the Related Art FIG. 2 shows a high-frequency inverter 1, a step-up transformer 3, a matching circuit 5 and the like as an example of a high-frequency power supply of a laser oscillator. The high-frequency inverter 1 converts the DC power supplied from the input terminal into four FET elements T1 to T4 incorporated in a bridge and a control circuit (not shown) to control the gates g of the four elements. , And converts it into predetermined high-frequency AC power. The step-up transformer 3 boosts a high-frequency AC voltage supplied from the high-frequency inverter 1 to a predetermined high-frequency high-frequency AC voltage. The matching circuit 5 is for improving the efficiency of power transmission, and is composed of variable L and C circuits, and performs matching between the step-up transformer 3 (power supply) and a discharge unit (load) of a laser oscillator (not shown). . Since L and C are variable, matching is achieved in a wide range of the discharge current of the laser oscillator. At the time of matching, the power factor of the output of the step-up transformer 3 becomes 1. Conventionally, it is determined whether the high-frequency inverter 1, the step-up transformer 3, the matching circuit 5 and the like are operating normally.
For example, as shown in the figure, the voltages and currents of the output portions ab, cd, ef and the like of the high-frequency inverter 1, the boost transformer 3, and the matching circuit 5 are respectively measured by AC voltage ammeters 15, 1 and 2.
It was determined by measuring with 7, 19, etc. [0005] As described above, the outputs of the high-frequency inverter 1 of the high-frequency power supply, the step-up transformer 3, the matching circuit 5, and the like are measured by a normal AC voltage and ammeter, and the measured value is obtained. If it was within the specified value range, it was determined that it was operating normally. However, to prevent abnormal discharge inside the high frequency power supply or outside the electrodes of the oscillator that lowers the output of the laser oscillator, breakage of the switching element based on the phase difference between the voltage and current of the output of the high frequency inverter, etc. However, a device was required to replace the ammeter. The present invention has been made in view of such a point, and an apparatus for detecting an abnormality of a power supply device by detecting a phase difference between a voltage and a current of an output of each unit constituting a high-frequency power supply. The purpose is to provide. In order to achieve the above object, an apparatus for detecting an abnormality of a high-frequency power supply of a laser oscillator according to the present invention comprises a high-frequency inverter and an output of the high- frequency inverter.
Step-up transformer for boosting power and the step-up transformer
And a matching circuit for matching the laser and the discharge part of the laser oscillator
The high frequency power supply of the laser oscillator,
Detect phase difference between voltage and current at output of barter
A first phase comparator and an output section of the step-up transformer.
A second phase comparator for detecting a phase difference between the voltage and the current,
The phase difference between the voltage and the current at the output of the matching circuit is detected.
And a third phase comparator that outputs the signals and the respective phase comparators.
The output phase difference is preset for each phase comparator.
An alarm device that outputs an alarm when a predetermined value is exceeded.
Is what it is. With the above configuration, the phase difference between the voltage and the current of at least one of the outputs of the high-frequency inverter, the boosting transformer, and the matching circuit of the high-frequency power supply is detected by the phase comparator. When the detected value exceeds a predetermined value, an alarm is output from the alarm device. As a result, necessary measures can be taken. Next, an embodiment of the present invention will be described with reference to FIG. The high-frequency power supply device of this figure is the same as that of the above-described conventional high-frequency power supply of a laser oscillator shown in FIG. As shown in the figure, the respective outputs of the high-frequency inverter 1, the step-up transformer 3, and the matching circuit 5 are connected to phase comparators 7, 9, and 11, respectively, and their outputs are connected to an alarm 13. The configuration of the phase comparators 7, 9 and 11 is, for example, that the input voltage is multiplied by the current and the high frequency is removed by a filter. Output voltages proportional to sin of the phase difference. When the outputs of these phase comparators exceed respective preset reference values, a warning signal is output from the corresponding phase comparator, and the warning device 13 issues a warning. Next, the operation of each phase comparator will be described. The phase comparator 7 is connected to the output unit ab of the high-frequency inverter 1.
It detects the phase difference between the voltage and the current, and if the phase difference occurs, the switching element may be damaged.
This is provided to take prompt measures. The phase comparator 9 detects a phase difference between the voltage and the current of the output unit cd of the step-up transformer 3 on the power supply side of the matching circuit 5. As described above, the matching circuit 5 matches the step-up transformer 3 with a discharge unit of a laser oscillator (not shown). In the matching state, there is no phase difference between the voltage and the current of the output unit cd of the step-up transformer 3, but in the non-matching state, a phase difference occurs depending on the degree. When an abnormal discharge such as an off-electrode discharge occurs when the high-frequency power supply is in a matching state, the matching is broken and a phase difference is generated. As the degree of abnormal discharge increases, the phase difference also increases. Therefore, if the phase difference is detected by the phase comparator 9, it is possible to know the degree of abnormal discharge, and if it exceeds a predetermined value, an alarm is output. The phase comparator 11 is connected to an output section ef of the matching circuit 5.
The phase difference between the voltage and the current is detected. There is no phase difference in the matching state, but a phase difference occurs if there is an abnormal discharge in a cable connecting the output unit ef and the laser oscillator. If this value exceeds a predetermined value, an alarm is output. As described above, the respective phase comparators have respective functions, and may be provided efficiently corresponding to the high-frequency power supply device, and may not necessarily be provided all. As described above, the present invention provides a high frequency
Step-up transformer that boosts the output of
Between the step-up transformer and the discharge unit of the laser oscillator.
High frequency power supply of laser oscillator with matching circuit for matching
Voltage and voltage at the output of the high-frequency inverter
A first phase comparator for detecting a phase difference between
The second is to detect the phase difference between the voltage and the current at the output of the
Phase comparator and the voltage and current at the output of the matching circuit
A third phase comparator for detecting a phase difference, the phase comparator
The phase difference detected by the phase comparator is set in advance for each phase comparator.
And an alarm device that outputs an alarm when the specified value is exceeded.
The first phase comparator detects the phase difference
The alarm outputs an alarm and the high-frequency inverter
Of the switching element can be prevented beforehand.
You. Also, the second phase comparator detects the phase difference and outputs an alarm.
Outputs an alarm, causing abnormal discharge such as discharge outside the electrode.
Be warned of life. Further, a third phase comparator
Detects the phase difference and the alarm outputs an alarm,
Cable, etc. connecting the output part of the combined circuit and the laser oscillator
Can be warned that abnormal discharge has occurred.
【図面の簡単な説明】
【図１】この発明のレーザ発振器の高周波電源の異常検
出装置の説明図である。
【図２】従来のレーザ発振器の高周波電源の異常検出装
置の説明図である。
【符号の説明】
１ 高周波インバータ
３ 昇圧トランス
５ 整合回路
７、９、１１ 位相比較器
１３ 警報器BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram of an abnormality detection device for a high-frequency power supply of a laser oscillator according to the present invention. FIG. 2 is an explanatory diagram of a conventional abnormality detection device for a high-frequency power supply of a laser oscillator. [Description of Signs] 1 High-frequency inverter 3 Step-up transformer 5 Matching circuits 7, 9, 11 Phase comparator 13 Alarm
Claims (1)
タの出力を昇圧する昇圧トランス、および、当該昇圧ト
ランスとレーザ発振器の放電部との整合をとる整合回路
を備えたレーザ発振器の高周波電源において、 前記高周波インバータの出力部における電圧と電流の位
相差を検出する第１の位相比較器と、 前記昇圧トランスの出力部における電圧と電流の位相差
を検出する第２の位相比較器と、 前記整合回路の出力部における電圧と電流の位相差を検
出する第３の位相比較器と 、前記各位相比較器により検出された位相差が、各位相比
較器ごとに予め設定された所定値を越えたとき警報を出
力する警報器と、 を備えている ことを特徴とするレーザ発振器の高周波電
源の位相検出による異常検出装置。(57) [Claims] [Claim 1] High frequency inverter, high frequency inverter
Transformer for boosting the output of the
Matching circuit for matching the lance with the discharge part of the laser oscillator
In the high frequency power source of the laser oscillator having a position of voltage and current at the output of the high-frequency inverter
A first phase comparator for detecting a phase difference, and a phase difference between a voltage and a current at an output section of the step-up transformer.
Test a second phase comparator for detecting a phase difference between the voltage and current at the output of the matching circuit
And a phase difference detected by each of the phase comparators is a phase ratio.
Alarm when the value exceeds the preset value set for each comparator.
Abnormality detecting apparatus according to the phase detection of the high frequency power source of the laser oscillator, characterized by comprising a, an alarm device that force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27225493A JP3515147B2 (en) | 1993-10-29 | 1993-10-29 | Anomaly detection device by detecting phase of high frequency power supply of laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27225493A JP3515147B2 (en) | 1993-10-29 | 1993-10-29 | Anomaly detection device by detecting phase of high frequency power supply of laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07131094A JPH07131094A (en) | 1995-05-19 |
| JP3515147B2 true JP3515147B2 (en) | 2004-04-05 |
Family
ID=17511287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27225493A Expired - Fee Related JP3515147B2 (en) | 1993-10-29 | 1993-10-29 | Anomaly detection device by detecting phase of high frequency power supply of laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3515147B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4580560B2 (en) * | 2001-01-09 | 2010-11-17 | 株式会社アマダエンジニアリングセンター | Power supply for laser oscillator |
| JP4906752B2 (en) * | 2008-02-13 | 2012-03-28 | ギガフォトン株式会社 | Discharge excitation type gas laser apparatus and fault location determination method thereof |
| JP5093181B2 (en) * | 2009-04-13 | 2012-12-05 | 三菱電機株式会社 | Gas laser oscillator |
| JP6213163B2 (en) * | 2013-01-24 | 2017-10-18 | オムロン株式会社 | Power conditioner, solar cell system, and abnormality determination method |
| JP6356416B2 (en) * | 2013-12-19 | 2018-07-11 | 株式会社ダイヘン | Control circuit for inverter circuit, inverter device provided with this control circuit, induction heating device provided with this inverter device, and control method |
-
1993
- 1993-10-29 JP JP27225493A patent/JP3515147B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07131094A (en) | 1995-05-19 |
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