JP3511181B2 - Surface processing method of spray board of rotary atomizer - Google Patents
Surface processing method of spray board of rotary atomizerInfo
- Publication number
- JP3511181B2 JP3511181B2 JP13208594A JP13208594A JP3511181B2 JP 3511181 B2 JP3511181 B2 JP 3511181B2 JP 13208594 A JP13208594 A JP 13208594A JP 13208594 A JP13208594 A JP 13208594A JP 3511181 B2 JP3511181 B2 JP 3511181B2
- Authority
- JP
- Japan
- Prior art keywords
- rotary atomizer
- undercoat
- atomizer
- surface processing
- processing method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007921 spray Substances 0.000 title claims description 12
- 238000003672 processing method Methods 0.000 title claims description 6
- 238000005524 ceramic coating Methods 0.000 claims description 13
- 238000005507 spraying Methods 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 229920001187 thermosetting polymer Polymers 0.000 claims description 6
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 229910003310 Ni-Al Inorganic materials 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000005470 impregnation Methods 0.000 claims description 2
- 238000013007 heat curing Methods 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 239000002002 slurry Substances 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 239000002253 acid Substances 0.000 description 5
- 239000003513 alkali Substances 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 239000010687 lubricating oil Substances 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000007751 thermal spraying Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052815 sulfur oxide Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
- B05B3/02—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
- B05B3/10—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces
- B05B3/1007—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces characterised by the rotating member
- B05B3/1021—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces characterised by the rotating member with individual passages at its periphery
Landscapes
- Coating By Spraying Or Casting (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Gas Separation By Absorption (AREA)
- Nozzles (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ロータリーアトマイザ
の噴霧盤及び該噴霧盤の表面加工方法に関し、詳しくは
ゴミ焼却炉における燃焼排ガスに含まれる酸性ガス成
分、例えば、硫黄酸化物等を中和するために、アルカリ
性のスラリーを噴霧するのに好適なロータリーアトマイ
ザの噴霧盤の表面加工方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spraying machine for a rotary atomizer and a surface processing method for the spraying machine. More specifically, it neutralizes acidic gas components contained in combustion exhaust gas in a refuse incinerator, such as sulfur oxides. In order to do so, the present invention relates to a surface processing method of a spray disk of a rotary atomizer suitable for spraying an alkaline slurry.
【０００２】[0002]
【従来の技術】ゴミ焼却時に出る燃焼排ガスに含まれる
酸性ガス成分を中和するために、アルカリ性のスラリー
を噴霧するロータリーアトマイザの噴霧盤は、スラリー
のアルカリと燃焼排ガス中の酸性ガス成分とが反応して
生成する塩類やもともと燃焼排ガス中に含まれる酸によ
り、噴霧盤の腐食が発生する可能性があり、耐久性に問
題が生ずるばかりでなく、噴霧盤のアンバランスにより
ロータリーアトマイザの振動の原因及び増速機構の損傷
の原因にもなっている。2. Description of the Related Art The atomizer of a rotary atomizer that sprays an alkaline slurry to neutralize the acidic gas components contained in the combustion exhaust gas generated when incinerating refuse is composed of the alkali of the slurry and the acidic gas components in the combustion exhaust gas. Corrosion of the spray disc may occur due to the salts produced by the reaction and the acid originally contained in the combustion exhaust gas, which not only causes a problem in durability, but also causes imbalance of the spray disc to cause vibration of the rotary atomizer. It is also a cause and damage to the speed increasing mechanism.
【０００３】[0003]
【発明が解決しようとする課題】この腐食を防止するた
めに、ハステロイやインコネルといった耐蝕性の高い特
殊合金の使用や、セラミックスの溶射被膜加工が考えら
れるが、特殊合金は高価な材料であり、また、セラミッ
クスの大気中における溶射被膜加工は、被膜中に小孔や
微小クラックが存在し、小孔から基材にアルカリや酸が
侵入して腐蝕を生じたり、噴霧盤の高速回転の遠心力で
生ずる応力による剥離がでる。In order to prevent this corrosion, use of a special alloy having high corrosion resistance such as Hastelloy or Inconel, or spray coating of ceramics can be considered, but the special alloy is an expensive material. Also, in the process of spray coating of ceramics in the atmosphere, there are small holes and minute cracks in the coating, alkali and acid penetrate into the substrate through the small holes to cause corrosion, and the centrifugal force of the high-speed rotation of the sprayer Delamination occurs due to the stress generated in.
【０００４】そこで本発明は、安価な材料で、腐蝕に耐
え、かつ磨耗にも耐えるロータリーアトマイザの噴霧盤
の表面加工方法を提供することを目的としている。Therefore, the present invention is a spraying machine of a rotary atomizer which is an inexpensive material and is resistant to corrosion and abrasion.
And its object is to provide a surface processing method.
【０００５】[0005]
【課題を解決するための手段】上記した目的を達成する
ため本発明は、本体ケースに内蔵した増速機構の出力軸
先端に取付けられるロータリーアトマイザの噴霧盤の表
面加工方法において、噴霧盤の表面に、Ｎｉ−Ａｌある
いはＮｉ−Ｃｒを溶射して膜厚２００μｍ±５０μｍの
アンダーコートを形成し、該アンダーコートの上にアル
ミナ系のセラミックスを溶射して膜厚３００μｍ±５０
μｍのセラミックスの被膜を形成し、該セラミックスの
被膜に、アクリル系の熱硬化型樹脂を減圧下で充填し、
加圧して含浸させ、加熱硬化させて、前記セラミックス
の被膜の封孔処理を行うことを特徴とし、さらに、前記
含浸工程を２回行うことも可能としている。In order to achieve the above-mentioned object, the present invention is a table of a sprayer of a rotary atomizer attached to the tip of the output shaft of a speed increasing mechanism built in a main body case.
In the surface processing method, the surface of the spray plate, the undercoat having a thickness of 200 [mu] m ± 50 [mu] m was formed by spraying a Ni-Al or Ni-Cr, by spraying the ceramics of alumina on top of the undercoat film Thickness 300 μm ± 50
A ceramic coating of μm is formed, and an acrylic thermosetting resin is filled in the ceramic coating under reduced pressure,
Pressurized impregnated, and cured by heating to form, characterized by performing the sealing process of coating the ceramic, further possible and to be performed twice the impregnation step.
【０００６】[0006]
【作 用】上記構成によれば、アルカリや酸に対して抵
抗力の強いセラミックスでコーティングされ、かつアク
リル系の熱硬化型樹脂を含浸させることにより強度的に
安定したものとなる。[Operation] According to the above configuration, the ceramic is coated with a ceramic having a strong resistance to alkalis and acids, and the actuation is performed.
By impregnating a ril type thermosetting resin, the strength becomes stable.
【０００７】[0007]
【実施例】以下、本発明を、図面に示す実施例に基づい
て、さらに詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail below based on the embodiments shown in the drawings.
【０００８】ロータリーアトマイザ１は、チャンバ２上
部の取付板３に設置されるもので、該ロータリーアトマ
イザ１は、本体ケース４の上部に駆動モータ５を備え、
本体ケース４には、スラリー等の供給管６と、高圧エア
ー供給装置７からのエアー供給管８とが接続されてい
る。The rotary atomizer 1 is installed on a mounting plate 3 above the chamber 2. The rotary atomizer 1 is provided with a drive motor 5 above a main body case 4,
A supply pipe 6 for slurry or the like and an air supply pipe 8 from a high-pressure air supply device 7 are connected to the main body case 4.
【０００９】本体ケース４は、取付板３の上部に着脱可
能に設けられる円筒状の上部ケース９と、取付板３の下
部に着脱可能に設けられる逆円錐形状の下部ケース１０
とから構成され、上部ケース９内には、増速機構を内蔵
した円筒ケース１１が着脱可能に設けられ、下部ケース
１０内は、内側の潤滑油タンク１２と、該潤滑油タンク
１２外側の冷却室１３との二重構造に形成されている。The main body case 4 has a cylindrical upper case 9 which is detachably provided on the upper portion of the mounting plate 3 and an inverted conical lower case 10 which is detachably provided on the lower portion of the mounting plate 3.
A cylindrical case 11 having a speed increasing mechanism built therein is detachably provided in the upper case 9, and an inner lubricating oil tank 12 and a cooling outside the lubricating oil tank 12 are provided in the lower case 10. It is formed in a double structure with the chamber 13.
【００１０】円筒ケース１１の下部から突出する増速機
構の出力軸１４は、潤滑油タンク１２内に形成された円
筒部１５と、下部ケース１０の潤滑油タンク１２下部に
形成された出力軸挿通孔１６を貫通し、下部ケース１０
下端から突出する先端に噴霧盤１７を取付けている。The output shaft 14 of the speed increasing mechanism protruding from the lower portion of the cylindrical case 11 has a cylindrical portion 15 formed inside the lubricating oil tank 12 and an output shaft inserted through the lower portion of the lubricating oil tank 12 of the lower case 10. The lower case 10 through the hole 16
A spraying disc 17 is attached to the tip protruding from the lower end.
【００１１】出力軸挿通孔１６の側面には、冷却室１３
内を貫通して設けられたエアー供給管８と連通するエア
ー供給口１８が開口し、また、下部ケース１０の下面に
は、冷却室１３内を貫通して設けられたスラリー等の供
給管６と連通するスラリー等の供給口１９が複数個等間
隔に開口し、さらに、下部ケース１０の下面には、図示
していない別のエアー供給管から冷却室１３に供給され
る高圧エアーを噴霧盤１７上面に高速噴気するエアー噴
出口２０が周状に開口している。A cooling chamber 13 is provided on the side surface of the output shaft insertion hole 16.
An air supply port 18 communicating with an air supply pipe 8 penetrating therethrough is opened, and a supply pipe 6 for slurry etc. provided penetrating the cooling chamber 13 is provided on the lower surface of the lower case 10. A plurality of supply ports 19 for slurry and the like communicating with the slurry are opened at equal intervals, and the lower surface of the lower case 10 is further sprayed with high-pressure air supplied from another air supply pipe (not shown) to the cooling chamber 13. An air jet port 20 for high-speed air jet is opened in a circumferential shape on the upper surface of the nozzle 17.
【００１２】噴霧盤１７は、側面に複数の噴射ノズル２
１を等間隔に備え、出力軸１４によって高速回転し、ス
ラリー等の供給口１９から供給されるスラリー等を、回
転による遠心力で噴射ノズル２１からチャンバ２内に噴
射して噴霧化する。The spray disc 17 has a plurality of injection nozzles 2 on its side surface.
1 are equidistantly arranged, rotate at a high speed by the output shaft 14, and the slurry or the like supplied from the supply port 19 for the slurry or the like is sprayed into the chamber 2 from the spray nozzle 21 by the centrifugal force due to the rotation and atomized.
【００１３】噴霧盤１７は、その表面にＮｉ−５％Ａｌ
のアンダーコート２２と、アルミナ系（Ａｌ2 Ｏ3 ）セ
ラミックスの被膜２３を溶射にて形成し、さらに、該セ
ラミックスの被膜２３にアクリル系の樹脂を含浸させて
いる。The spray disk 17 has Ni-5% Al on its surface.
Undercoat 22 and an alumina (Al 2 O 3 ) ceramic coating 23 are formed by thermal spraying, and the ceramic coating 23 is further impregnated with an acrylic resin.
【００１４】この表面加工は、噴霧盤１７をアルカリ浴
にて脱脂後、ショットブラストで錆、酸化物の除去及び
表面の粗面化をして、Ｎｉ−５％Ａｌを溶射して膜厚２
００μｍ±５０μｍのアンダーコート２２を形成し、こ
の上に膜厚３００μｍ±５０μｍのＡｌ2 Ｏ3 のセラミ
ックスの被膜２３を溶射にて形成する。尚、アンダーコ
ート２２はＮｉ−Ｃｒでも良い。In this surface processing, after degreasing the spray disc 17 in an alkaline bath, rust and oxides are removed and the surface is roughened by shot blasting, and Ni-5% Al is sprayed to a film thickness of 2
An undercoat 22 having a thickness of 00 μm ± 50 μm is formed, and a ceramic coating 23 of Al 2 O 3 having a film thickness of 300 μm ± 50 μm is formed thereon by thermal spraying. The undercoat 22 may be Ni-Cr.
【００１５】セラミックスの被膜２３を形成した後に、
セラミックスの封孔処理のために、アクリル系の熱硬化
型樹脂を減圧下でセラミックスの被膜２３に充填し、の
ち加圧して含浸させ、加熱硬化する含浸工程を２回行
う。After forming the ceramic coating 23,
For the ceramic sealing treatment, an acrylic thermosetting resin is filled into the ceramic coating 23 under reduced pressure, and then the ceramic coating 23 is pressurized to impregnate it and then heat-cured.
【００１６】このように加工された噴霧盤１７は、セラ
ミックスの被膜２３の小孔や微小クラックに樹脂が含浸
されることによって、アルカリや酸の侵入を防止できて
耐蝕性が向上できると共に、セラミックスの被膜２３の
靭性が向上し、高速回転の遠心力で生ずる応力による剥
離を防止でき、強度的に安定した噴霧盤１７を形成でき
るので、コスト的にも安価なものとすることができる。In the spray plate 17 processed in this way, resin is impregnated into the small holes and minute cracks of the ceramic coating 23, whereby alkali and acid can be prevented from entering and corrosion resistance can be improved. The toughness of the coating 23 is improved, peeling due to the stress generated by the centrifugal force of high-speed rotation can be prevented, and the spraying plate 17 having stable strength can be formed, so that the cost can be reduced.
【００１７】[0017]
【発明の効果】以上説明したように本発明は、ロータリ
ーアトマイザの噴霧盤の表面に、膜厚２００μｍ±５０
μｍのＮｉ−Ａｌ系あるいはＮｉ−Ｃｒ系のアンダーコ
ートと、膜厚３００μｍ±５０μｍのアルミナ系のセラ
ミックスの被膜とを溶射にて形成し、さらに、該セラミ
ックスの被膜に、アクリル系の熱硬化型樹脂を減圧下で
含浸せしめたから、セラミックスの被膜の小孔や微小ク
ラックにアクリル系の熱硬化型樹脂が含浸されることに
よって、アルカリや酸の侵入を防止できて耐蝕性が向上
できると共に、セラミックスの被膜の靱性が向上し、高
速回転の遠心力で生ずる応力による剥離を防止し、強度
的に安定してコスト的にも安価なものとすることができ
る。As described above, according to the present invention, the film thickness of 200 μm ± 50 is formed on the surface of the atomizer of the rotary atomizer.
and Ni-Al-based or Ni-Cr-based undercoat of [mu] m, and a coating of ceramic alumina having a thickness of 300 [mu] m ± 50 [mu] m was formed by thermal spraying, further, the coating of the ceramic, thermosetting acrylic Since the resin is impregnated under reduced pressure , the acrylic thermosetting resin is impregnated into the small holes and minute cracks in the ceramic coating, preventing alkali and acid from entering and improving corrosion resistance. At the same time, the toughness of the ceramic coating is improved, peeling due to the stress generated by the centrifugal force of high-speed rotation is prevented, and the strength is stable and the cost is low.
【図１】 本発明の一実施例を示す拡大断面図である。FIG. 1 is an enlarged sectional view showing an embodiment of the present invention.
【図２】 溶射被膜の拡大図である。FIG. 2 is an enlarged view of a thermal spray coating.
【図３】 ロータリーアトマイザーの取付状態の正面図
である。FIG. 3 is a front view of a mounted state of a rotary atomizer.
【図４】 ロータリーアトマイザーの正面図である。FIG. 4 is a front view of a rotary atomizer.
１…ロータリーアトマイザ、２…チャンバ、４…本体ケ
ース、１４…出力軸、１７…噴霧盤、２２…アンダーコ
ート、２３…セラミックスの被膜DESCRIPTION OF SYMBOLS 1 ... Rotary atomizer, 2 ... Chamber, 4 ... Main body case, 14 ... Output shaft, 17 ... Sprayer, 22 ... Undercoat, 23 ... Ceramic coating
───────────────────────────────────────────────────── フロントページの続き (72)発明者 洞口 光弘 神奈川県横浜市中区錦町12番地 三菱重 工業株式会社横浜研究所内 (56)参考文献 特開 平６−23226（ＪＰ，Ａ) 特開 平１−240677（ＪＰ，Ａ) 特開 平６−57446（ＪＰ，Ａ) 特開 平５−106014（ＪＰ，Ａ) 特開 平１−142070（ＪＰ，Ａ) 特開 平５−156257（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B05B 3/00 - 3/18 B01D 53/14 - 53/18 C23C 4/00 - 6/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mitsuhiro Doroguchi 12 Nishiki-cho, Naka-ku, Yokohama-shi, Kanagawa Mitsubishi Heavy Industries, Ltd. Yokohama Research Laboratory (56) Reference JP 6-23226 (JP, A) JP JP 1-240677 (JP, A) JP-A-6-57446 (JP, A) JP-A-5-106014 (JP, A) JP-A-1-142070 (JP, A) JP-A-5-156257 (JP, A) A) (58) Fields investigated (Int.Cl. 7 , DB name) B05B 3/00-3/18 B01D 53/14-53/18 C23C 4/00-6/00
Claims (2)
先端に取付けられるロータリーアトマイザの噴霧盤の表
面処理方法において、該噴霧盤の表面に、Ｎｉ−Ａｌあ
るいはＮｉ−Ｃｒを溶射して膜厚２００μｍ±５０μｍ
のアンダーコートを形成し、該アンダーコートの上にア
ルミナ系のセラミックスを溶射して膜厚３００μｍ±５
０μｍのセラミックスの被膜を形成し、該セラミックス
の被膜に、アクリル系の熱硬化型樹脂を減圧下で充填
し、加圧して含浸させ、加熱硬化さて、前記セラミック
スの被膜の封孔処理を行うことを特徴とするロータリー
アトマイザの噴霧盤の表面加工方法。1. An output shaft of a speed increasing mechanism built in a main body case.
Table of atomizer of rotary atomizer installed at the tip
In the surface treatment method, the surface of the sprayer is coated with Ni-Al.
Rui or Ni-Cr sprayed to a film thickness of 200μm ± 50μm
Undercoat, and apply an undercoat over the undercoat.
Film thickness 300μm ± 5 by spraying Lumina ceramics
Forming a ceramic coating of 0 μm
The acrylic film is filled with acrylic thermosetting resin under reduced pressure.
Then, pressurize and impregnate, heat cure, and then
Rotary characterized by performing a sealing treatment on the coating
Surface processing method for atomizer sprayer .
る請求項１記載のロータリーアトマイザの噴霧盤の表面
加工方法。2. The impregnation step is performed twice.
The method for surface processing of a spray disk of a rotary atomizer according to claim 1 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13208594A JP3511181B2 (en) | 1994-06-14 | 1994-06-14 | Surface processing method of spray board of rotary atomizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13208594A JP3511181B2 (en) | 1994-06-14 | 1994-06-14 | Surface processing method of spray board of rotary atomizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07328490A JPH07328490A (en) | 1995-12-19 |
| JP3511181B2 true JP3511181B2 (en) | 2004-03-29 |
Family
ID=15073153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13208594A Expired - Fee Related JP3511181B2 (en) | 1994-06-14 | 1994-06-14 | Surface processing method of spray board of rotary atomizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3511181B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008056411A1 (en) | 2008-11-07 | 2010-05-20 | Dürr Systems GmbH | Coating plant component, in particular bell cup, and corresponding manufacturing method |
| DE102009057444A1 (en) | 2009-12-08 | 2011-06-09 | Dürr Systems GmbH | Lackieranlagenbauteil with a surface coating |
| CN103920608A (en) * | 2013-01-10 | 2014-07-16 | 林文斌 | Aluminum oxide ceramic material and lubricating method applied to rotating nozzle |
| JP6155739B2 (en) * | 2013-03-22 | 2017-07-05 | セイコーエプソン株式会社 | Channel unit, liquid ejecting head, liquid ejecting apparatus, and method for manufacturing channel unit |
| CN117504540B (en) * | 2023-11-08 | 2024-05-07 | 南京华瑞微集成电路有限公司 | CVD tail gas treatment equipment |
-
1994
- 1994-06-14 JP JP13208594A patent/JP3511181B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07328490A (en) | 1995-12-19 |
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