JP3496369B2 - Power supply for laser - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser power supply device for supplying an AC voltage to generate a discharge.

[0002]

2. Description of the Related Art Conventionally, as an apparatus of this type, FIGS.
There was a laser power supply device as shown in FIG.
In FIG. 18, 1 is a commercial power source, 2 is a converter unit whose input side is connected to the commercial power source 1, 3 is an inverter unit whose input side is connected to the output side of this converter unit 2, and 4 is this inverter. The high frequency transformers 5a and 5b whose input side (primary side) is connected to the output side of the section 3 are dielectric electrodes which are connected to the output side (secondary side) of this high frequency transformer 4 and generate the discharge 6. The high frequency transformer 4 and the dielectric electrodes 5a and 5b are
The inductance (using leakage inductance or the like) and the capacitance of the dielectric electrodes 5a and 5b form a series resonance circuit. Reference numeral 7 is a current detection means provided on the output side of the high frequency transformer 4 for detecting a discharge current flowing between the dielectric electrodes 5a and 5b, 8 is a current setting means for setting the magnitude of the discharge current, and 9 is a current setting means. The signals of the current setting means 8 and the current detection means 7 are input to the signal T having a pulse width Tw.
It is a pulse width control means for outputting the signal fso of w and the frequency fso to the gate circuit 14 and controlling the inverter unit 3 based on this.

FIG. 19 is a diagram showing in detail the configuration of the inverter section 3 in FIG.
11a, 11b, 11c and 11d are switching elements, and 12a, 12b, 12c and 12d are freewheeling diodes respectively connected in parallel to the switching elements 11a, 11b, 11c and 11d, and these freewheeling diodes 12a, 12b and 12c. , 12d constitute a single-phase voltage type inverter together with the switching elements 11a, 11b, 11c and 11d. The switching element 11a, 11b, 11c, 11 receives the pulse width signal Tw and the frequency signal fso of the pulse width control means 9 as inputs.
It is a gate circuit that outputs a gate signal for controlling d.

FIG. 20 is a diagram showing the configuration of the pulse width control means 9, and 15 amplifies the difference between the current setting value of the current setting means 8 and the current detection value detected by the current detection means 7. , An error amplifier which outputs an error signal a, 16 is a voltage controlled oscillator (so-called VCO) which oscillates a triangular wave b and a square wave d (frequency signal fso) having a frequency proportional to a set voltage, and 17 is an output of the error amplifier 15. It is a comparator that compares the magnitude of the triangular wave b of the voltage controlled oscillation circuit 16 and outputs a signal c (pulse width signal Tw). In addition,
The frequencies of the triangular wave b and the square wave d are the same, and the predetermined value fs
It is fixed at o.

Next, the operation of the conventional laser power supply device will be described. The AC voltage of the commercial power source 1 is the converter unit 2
Is converted into a DC voltage by and input to the inverter unit 3.
In the inverter unit 3, the switching elements 11a, 11b, 11c and 11d are turned on / off by the gate signal of the gate circuit 14, and the DC voltage is converted into a ± V square wave AC voltage as shown in FIG. Output voltage V of the inverter unit 3
Is boosted by the high frequency transformer 4, and the dielectric electrodes 5a, 5
It is applied between b and the discharge 6 generate | occur | produces. In order to operate the inverter unit 3 with a high power factor, the frequency of the output voltage V of the inverter unit 3 (hereinafter referred to as switching frequency) is determined by the inductance L of the high frequency transformer 4 and the electrostatic capacitance C of the dielectric electrodes 5a and 5b. Series resonance frequency fr (= 1 / 2π√
(LC)), which is a little higher than fso. This frequency fso is a value determined by the VCO 16 of the pulse width control means 9. On the other hand, in order to control the discharge current at high speed, the pulse width control means 9 controls the pulse width T of the output voltage V.
Pulse width control for changing w is performed. FIG. 21 shows waveforms of the output voltage V and the output current I of the inverter unit 3 during the pulse width control. In FIG. 21, in FIG.
21 shows the waveforms of the output voltage V and the output current I at the time of high output.
(B) is a waveform of the output voltage V and the output current I at the time of low output. In this figure, the output voltage V is the pulse width T
It becomes a square wave of w, and the output current I becomes almost a sine wave because the load of the inverter unit 3 is close to series resonance.

For the pulse width Tw of the output voltage V, the pulse width control means 9 compares the error signal a of the error amplifier 15 with the triangular wave b of the voltage controlled oscillation circuit 16, and the error signal a ≧ triangular wave b
Is determined by the signal c output from the comparator 17. FIG. 22 shows the error signal a,
FIG. 22A shows a time chart of the triangular wave b, the pulse width signal c, and the output voltage V. FIG. 22A shows a high output with a wide pulse width Tw, and FIG. 22B shows a low output with a narrow pulse width Tw. Is. With respect to the desired current setting value set by the current setting means 8, the error amplifier 15 changes the value of the error signal a so that the current detection value detected by the current detection means 7 matches this current setting value. Perform feedback control. The square wave output d of the voltage controlled oscillator circuit 16 is used as a command signal of the switching frequency fso as the gate circuit 14
Is output to.

[0007]

In the conventional laser power supply device as described above, the high frequency transformer 4 constitutes a series resonance circuit with the dielectric electrodes 5a and 5b, and the inverter section 3 is provided.
Since the pulse width is controlled by fixing the frequency of the output voltage and changing the pulse width to control the discharge current, the discharge current can be controlled at high speed, but there are the following problems. At the point where the output voltage V and the output current I of the inverter unit 3 shown in FIG. 21 intersect, the switching elements 11a, 11
b, 11c, and 11d generate power loss called switching loss that occurs when they are turned on and off. The switching loss when turning on from off is called turn-on loss, and the switching loss when turning off from on is called turn-off loss.
When the pulse width of the output voltage V is long as shown in FIG. 21A, turn-off loss occurs, and when the pulse width of the output voltage V is short as shown in FIG. 21B, both turn-on loss and turn-off loss occur. Occurs. In particular, when the pulse width of the output voltage V is short as shown in FIG. 21B, the turn-on loss is added to the turn-off loss, so that the loss is large. Figure 21
In (b), the turn-on loss occurs in the mode in which the rising point ti of the output current I advances from the rising point tv of the output voltage V. In this mode, the switching elements 11a, 11b, 11c and 11d are turned on. The freewheeling diodes 12a, 12 previously connected in series
This is because the circulating current flows through b, 12c and 12d, so that the recovery currents of the circulating diodes 12a, 12b, 12c and 12d flow when the switching elements 11a, 11b, 11c and 11d are turned on. For example, during the period from ti to tv in FIG. 21B, the circulating current IF due to circuit resonance flows through the circulating diode 12a in FIG.
At the point of tv of (b) of 1 the switching element 11b
Is turned on from off, the recovery current IR of the freewheeling diode 12a rapidly flows into the switching element 11b, and turn-on loss occurs. On the other hand, in the mode in which the rising point ti of the output current I is delayed from the rising point tv of the output voltage V as shown in FIG. 21A, the freewheeling diodes 12a, 12b, 12c, 1 connected in parallel are connected.
Since the switching element is turned on while the circulating current is flowing in 2d, switching is performed at zero voltage, and the recovery current does not flow, so that no turn-on loss occurs.

As described above, the turn-on loss occurs in a mode in which the rising point ti of the output current I advances from the rising point tv of the output voltage V, and an AC discharge is applied to the dielectric electrode shown below. Due to the load characteristics peculiar to a device having a capacitive load such as a gas laser device to be generated, this mode is set in almost all regions except a part of the region on the high output side. FIG. 23 shows the dielectric electrodes 5a and 5
The relationship between the capacitance C of b and the discharge current id is shown, and the dielectrics 5a and 5b in which the discharge 6 is generated as the discharge current id decreases.
Has a characteristic that the electrostatic capacitance C decreases. Therefore, when the series resonance frequency fr (= 1 / 2π√ (LC) rises and becomes larger than the switching frequency fso with the decrease of the discharge current id, the load characteristic viewed from the inverter unit 3 is that the current is delayed and the current advances due to the inductive property. The discharge current id changes to the capacitive characteristic.
The above-mentioned operation mode in which turn-on loss occurs over a wide operating region in combination with the phenomenon of the pulse width of the output voltage V accompanying the decrease of

Although it is conceivable to connect a snubber capacitor in parallel with the switching element to reduce the turn-off loss, it is effective in reducing the turn-off loss in parallel with the switching element in the operation mode in which the turn-on loss occurs. When a snubber capacitor is connected, the turn-on loss further increases because the discharge current of the snubber capacitor flows into the switching element in addition to the recovery current of the freewheeling diode at turn-on. Therefore, in an operation mode in which turn-on loss occurs over a wide range of operating regions, it is difficult to use a snubber capacitor effective for reducing turn-off loss, and it is difficult to reduce turn-off loss.

These switching loss problems become more serious when used at a high frequency of several tens of KHz or more. In this case, the power loss due to the switching loss becomes large, the efficiency of the device deteriorates, and heat is radiated. However, there is a problem that the device becomes large. Further, the recovery currents of the free wheeling diodes 12a, 12b, 12c, 12d cause a turn-on loss and at the same time generate switching noise, which causes a problem such as noise malfunction.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a power supply device for a laser that reduces switching loss, is highly efficient, and has low noise.

[0012]

[Means for Solving the Problems]

A laser power supply device according to the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element, and a free-wheeling diode connected in parallel with the converter section, and the DC output voltage of the converter section is converted into an AC voltage. Inverter for converting into voltage, transformer with inductance connected to the output side of this inverter and constituting the series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, current detection provided on the output side of this transformer means,
Current setting means for setting the value of the discharge current generated between the dielectric electrodes, and the output of the inverter section so that the current setting value set by the current setting means and the current detection value detected by the current detecting means match. Pulse width control means for controlling the pulse width of the voltage, switching of the inverter section according to the decrease of the discharge current so that the rising of the output current of the inverter section is delayed from the rising of the output voltage of the inverter section. It is provided with a frequency command means for increasing the frequency.

A laser power supply device according to still another invention of the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element, and a free-wheeling diode connected in parallel with the converter section as a pair. Section for converting the DC output voltage of the section into an AC voltage, a transformer connected to the output side of this inverter section and having an inductance that forms a series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, and the output of this transformer Side current detecting means, current setting means for setting the value of the discharge current generated between the dielectric electrodes, current setting value set by the current setting means and current detection value detected by the current detecting means Frequency control to control the switching frequency of the inverter section above the resonance frequency of the series resonance circuit so that Those having a pulse width control means for reducing the pulse width of the output voltage of the motor unit - stage, the discharge current generated between the dielectric electrodes inverter accordance decrease in the discharge current falls below a predetermined value.

A laser power supply device according to still another invention of the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element, and a free-wheeling diode connected in parallel with the converter section as a pair. Section for converting the DC output voltage of the section into an AC voltage, a transformer connected to the output side of this inverter section and having an inductance that forms a series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, and the output of this transformer The current detection means provided on the side, the current setting means for setting the value of the discharge current generated between the dielectric electrodes, the current setting value set by this current setting means and the current detection value detected by the current detection means. The pulse width control means for controlling the pulse width of the output voltage of the inverter section so that they coincide with each other, and the current setting set by the current setting means. Frequency control means for controlling the switching frequency of the inverter section within the range of the resonance frequency of the series resonance circuit or higher so that the value and the current detection value detected by the current detection means match, and when the discharge current becomes equal to or lower than a predetermined value. A switching means for switching the control of the discharge current from the frequency control means to the pulse width control means is provided.

A laser power supply device according to yet another aspect of the present invention is a transformer on the output side of the inverter section.
Equipped with a saturation reactor connected in series with the inductance
It is a gift.

Further, a laser power source device according to still another invention of the present invention is a laser power source device having the above-mentioned configuration of the invention.
The wave number command means or the frequency control means is provided with an upper and lower limit limiter circuit for controlling the frequency to be within a predetermined range.

Further, in a laser power source device according to still another invention of the present invention, the inverter unit in the above-described configuration of the invention is provided with a switching element and a snubber capacitor connected in parallel therewith. It was done.

[0019]

DETAILED DESCRIPTION OF THE INVENTION

Embodiment 1 FIGS. 1, 2, and 3 are configuration diagrams showing an embodiment of the present invention. In FIG. 1, 1 is a commercial power supply, 2 is a
A converter unit whose input side is connected to the commercial power source 1, 3
Is an inverter unit whose input side is connected to the output side of the converter unit 2, and 4 is a high frequency transformer 5a, 5a, 5a whose input side (primary side) is connected to the output side of the inverter unit 3.
Reference numeral b is a dielectric electrode that is connected to the output side (secondary side) of the high frequency transformer 4 and generates a discharge 6. The high frequency transformer 4 and the dielectric electrodes 5a and 5b are the inductances of the high frequency transformer 4 ( A series resonance circuit is configured by the leakage inductance and the like) and the capacitance of the dielectric electrodes 5a and 5b. Reference numeral 7 is a current detection means provided on the output side of the high frequency transformer 4 for detecting the discharge current flowing between the dielectric electrodes 5a and 5b, and 8 is a current setting for setting the magnitude of the discharge current according to the processing conditions. The means 9 receives the signals of the current setting means 8 and the current detecting means 7 as input, and outputs the signal Tw of the pulse width Tw and the signal f of the frequency fso.
output so to the gate circuit 14 (including: logic circuit),
The pulse width control means controls the inverter unit 3 based on this. The current setting value of the current setting means 8 is input to 10 (in this embodiment, the current setting value has a peak value of 1).
The average value is 5A. ) Frequency command means for outputting a frequency setting signal to the pulse width control means 9 according to the current setting value. FIG. 2 shows the configuration of the inverter unit 3 of the present embodiment, and in the figure, 13a, 13b, 1
3c and 13d are switching elements 11a, 11b and 1
Snubber capacitors connected in parallel to 1c and 11d, respectively. FIG. 3 shows the configuration of the frequency command means 10 of the present embodiment. In FIG. 3, 18 is a set voltage value according to the set value of the discharge current set by the current setting means 8, which is inputted to one side, and from that value, A subtraction circuit that subtracts a predetermined voltage value set in advance, and 19 is an upper / lower limit limiter circuit that defines an upper limit value and a lower limit value of the output of the subtraction circuit 18 (in this embodiment, the upper limit value is 8A and the lower limit value is 8A). The value is 3 A.), and the output of the upper and lower limiter circuit 19 is input to the voltage controlled oscillator circuit (VCO) 16 of the pulse width control means 9.

In the laser power supply device constructed as described above, the subtraction circuit 18 in the frequency command means 10 is used.
Causes the current setting value to be subtracted from the predetermined voltage value, and the voltage control oscillation circuit (VCO) 16 increases as the operator increases the current setting value based on the change in the machining conditions, that is, the difference.
On the other hand, a signal that reduces the switching frequency fs is output. At this time, the upper and lower limiter circuits 19 set the upper limit value and the lower limit value of the switching frequency fs, and when the switching frequency fs is within the limit value, a signal for changing the frequency fs according to the difference is output. The output of the upper and lower limiter circuit 19 is input to the voltage controlled oscillator circuit 16 as a frequency command signal that commands the switching frequency fs of the inverter unit 3, so the switching frequency fs is variable according to the discharge current set by the current setting means 8. Will be done. FIG. 4 shows the characteristics of the current set value ids and the switching frequency fs. When the current set value ids is low, the upper limit frequency fsmax set by the upper and lower limit limiter circuit 19 is shown.
When the current set value ids becomes a predetermined value or more, the current set value ids linearly decreases as the current set value increases, and when the current set value ids further rises, the lower limit frequency fsmin set by the upper and lower limit limiter circuit 19 is fixed. The lower limit frequency fsmin is
It is set to a value slightly higher than the series resonance frequency fr, which corresponds to the fixed switching frequency fso of the conventional example. The upper limit frequency fsmax is the switching element 11a,
It is set to about 1.1 to 2 times the normal switching frequency fs (matching frequency) determined by the performance of components such as 11b, 11c, 11d, the gate circuit 14, and the high frequency transformer 4.

FIG. 5 shows an operation in which the turn-on loss as shown in FIG. 21B, that is, the turn-on loss caused by the rise ti of the output current I of the inverter section being delayed from the rise tv of the output voltage V is not generated ( Switching frequency fs and discharge current id for inductive operation)
Is shown, and the shaded area in the figure is the inductive motion range. Further, the curve of the idmax-fs characteristic in the figure is a so-called resonance curve showing the relationship between the discharge current id and the switching frequency fs when the pulse width of the output voltage V is maximum. As shown in FIG. 5, as the switching frequency fs increases, the lower limit of the discharge current id for inductive operation decreases, but the maximum discharge current idmax also decreases. Therefore, the lower limit frequency fsmin
To be almost the same as the switching frequency fso of the conventional example,
Further, by setting the slopes of the current setting value ids and the switching frequency fs so that the characteristics of the current setting value ids and the switching frequency fs shown in FIG. 4 are substantially within the inductive operation range of FIG. 5, the discharge current id The maximum value of is the same as that of the conventional example, and the range of the discharge current id in which the turn-on loss does not occur can be made much wider than that of the conventional example.
FIG. 6 is a point (a) of the lower limit frequency fsmin in FIG.
And the upper limit frequency fsmax and the lower limit frequency f in FIG.
The waveforms of the output voltage V and the output current I of the inverter unit 3 at the point (b) during smin are shown. As is apparent from FIG. 6, in the present embodiment, not only in the high output region where the pulse width of the output voltage V is long as shown in FIG. 6A, but also the pulse width of the output voltage V is shown as shown in FIG. 6B. Even in the short low output region, the rise of the output current I is delayed from the rise of the output voltage V, so that no turn-on loss occurs. The feedback control for matching the current setting value of the discharge current with the current detection value is the same as in the conventional example.
Done in.

Next, in the present embodiment, the operation mode is such that turn-on loss does not occur over a wide range of operation regions, so snubber capacitors 13a, 13b, 13c and 13d that are effective in reducing turn-off loss can be connected. . FIG. 7 is a diagram showing the effect of reducing turn-off loss by the snubber capacitor. As shown in the figure, the rate of increase of the voltage Vc charged when the switching element is switched from ON to OFF is slower than in the conventional example without the snubber capacitor. become. On the other hand, the fall of the current Ic flowing through the switching element is almost the same as the conventional example because it is almost determined by the characteristics of the switching element. Therefore, the turn-off loss, which is the product of Vc and Ic, is reduced as compared with the conventional example because the rate of increase of Vc becomes gentle.

As described above, in the present embodiment, even if the electrostatic capacity of the dielectric electrodes 5a and 5b changes due to the change of the discharge current, the change of the discharge current id by the frequency command means 10 is within the inductive operating range. Therefore, turn-on loss does not occur in a wide range of discharge current. Further, since the snubber capacitors 13a, 13b, 13c and 13d can be connected, the turn-off loss is reduced, the efficiency of the device is improved and the noise is also reduced.

In this embodiment, the characteristics of the current set value ids and the switching frequency fs shown in FIG. 4 are linearly changed within the limit value, but they are changed in a curve along the inductive operation range of FIG. Even if it does, the same effect can be expected.

Embodiment 2. In the first embodiment, the current setting value of the current setting means 8 is input to the frequency command means 10, but in the present embodiment, as shown in FIG.
The current detection value of the current detection means 7 is input to the frequency command means 10. In the present embodiment, the switching frequency fs is controlled so that the discharge current id in FIG. 5 falls within the inductive operating range according to the detected current value, and the same effect as in the first embodiment can be expected.

Embodiment 3. In the first and second embodiments, the current set value ids is set so that the characteristics of the discharge current id and the switching frequency fs fall within the inductive operation range.
Since the characteristics of the switching frequency fs and the characteristics of the switching frequency fs are set, it is necessary to adjust the characteristics of the current setting value ids and the switching frequency fs each time the inductive operating range varies due to the variation of the circuit constant. A configuration example in which is unnecessary is shown. In the third embodiment shown in FIG. 9, the frequency control means 20 that inputs the current setting value ids and the current detection value and controls the switching frequency fs of the inverter unit 3 so that the current setting value ids and the current detection value match. A pulse width command means 21 is provided to reduce the pulse width of the output voltage of the inverter unit when the input current set value ids becomes a predetermined value or less, according to the decrease of the current set value ids. A snubber capacitor is connected in parallel to each switching element of the inverter unit 3 as in the first embodiment. FIG. 10 shows the frequency control means 20,
2 shows the configuration of the pulse width command means 21.

The pulse width command means 21 sets the maximum value of the pulse width signal Tw when ids (current setting value) ≧ ido (ido is 1/2 of the maximum discharge current idmax and is about 4.5 A). It is fixed to Twmax so that the inverter 3 operates at the maximum firing angle (180 °). Also, id
When s <ido, the pulse width signal Tw is controlled to decrease in accordance with the decrease in the current setting value ids. That is, in the pulse width command means 21, the current setting value ids is the polygonal line amplifier circuit 22 (in the polygonal line amplifier circuit 22, when the input current setting value ids is ids ≧ ido, the current setting value ids
Is amplified by a predetermined multiple (a multiple larger than 1), and ids <i
It is a circuit that reduces the current setting value ids by a predetermined multiple (a multiple smaller than 1) when do. }, It is amplified to a predetermined value, and this is compared with the triangular wave b of the voltage controlled oscillation circuit 16 by the comparator 17. As a result, the amplified signal a
The pulse width signal Tw is fixed to the maximum value Twmax from the comparator 17 during the period of ≧ triangle wave b so that the inverter 3 operates at the maximum firing angle (180 °).
w is commanded. FIG. 11 shows the relationship between the current setting value ids and the pulse width signal Tw, where the pulse width signal Tw is ids ≧ i.
do (ido is 1/2 of the maximum discharge current idmax,
It is about 4.5A. In case of id), it is fixed to the maximum value Twmax, and when ids <ido, it is controlled by the polygonal line amplifier circuit 22 so as to decrease in accordance with the decrease of ids. In the frequency control means 20, the difference between the current detection value and the current setting value is calculated by the arithmetic circuit 1.
The signal is amplified in 5 and is input to the voltage controlled oscillator circuit 16 through the upper and lower limiter circuit 19. FIG. 12 is a diagram showing a resonance curve and an inductive operating range similar to FIG. 5, where ids ≧ i
When it is do, the pulse width signal Tw is the maximum value Twm from FIG.
Since it becomes ax, the relationship between the discharge current id and the switching frequency switching frequency fs changes along the resonance curve.

Since the present embodiment is configured as described above, turn-on loss does not occur in a wide range of discharge current, and a snubber capacitor can be connected to reduce turn-off loss. Will be improved and noise will be reduced. Further, along the resonance curve, i
Since d and the switching frequency fs change, it is not necessary to adjust the characteristics of ids and the switching frequency fs each time even if the inductive operating range varies due to the variation of the circuit constant.

Fourth Embodiment Although not shown, in the third embodiment, the current setting value of the current setting means 8 is input to the pulse width commanding means 21, but the current detection value of the current detecting means 7 is input to the pulse width commanding means 21. Also, the same effect as that of the third embodiment can be expected.

Embodiment 5. In the embodiment shown in FIG. 13, pulse width control means 9 for controlling the pulse width of the output voltage of the inverter unit 3 so that the current setting value and the current detection value are input and the current setting value and the current detection value match. Frequency control means 20 for controlling the switching frequency of the inverter unit 3 so that the current setting value and the current detection value are input and the current setting value and the current detection value match, the current setting value is input and the current setting value is less than or equal to a predetermined value. Then, the switching means 23 for switching the control of the discharge current from the frequency control means 20 to the pulse width control means 9 is provided. A snubber capacitor is connected in parallel to each switching element of the inverter unit 3 as in the first embodiment. FIG. 14 shows frequency control means 2
0, pulse width control means 9 and switching means 23 are shown.

In the switching means 23, the current discriminating circuit 24 detects the magnitude of the current set value ids with respect to the predetermined current value ido, and outputs a detection signal to the switching signal generating circuit 25. The changeover signal generating circuit 25 changes the changeover switch 26 according to the detection signal.
a and 26b are set at the position (1) when ids ≧ ido, and set at the position (2) when ids <ido. ids ≧
In the case of ido, the pulse width control means 9 fixes the pulse width of the output voltage V of the inverter unit 3 to the maximum value Twmax,
The discharge current id is changed by the frequency control means 20 in the same manner as in the fourth embodiment. Switching frequency Switching frequency fs
Is controlled by feedback. Then ids <
In the case of ido, the switching frequency switching frequency fs is fixed to the upper limit frequency switching frequency fsmax by the frequency control means 20, and the discharge current id is feedback-controlled by the pulse width control means 9 by varying the pulse width Tw as in the conventional example. FIG. 15 is a diagram showing the characteristics of the discharge current id and the switching frequency switching frequency fs according to the present embodiment. In the region where id ≧ id, id
And the switching frequency fs changes along the resonance curve,
In the region where id <ido, the switching frequency fs is fixed and changes at the upper limit frequency switching frequency fsmax. The lower limit frequency switching frequency fsmin is set to a value higher than the resonance frequency fr of the series resonance circuit so that the variable range of the switching frequency fs falls within the inductive operating range.

Since the present embodiment is configured as described above, the maximum value of the switching frequency fs changing along the resonance curve is set to the upper limit frequency switching frequency fsma.
It can be increased to x, and the range of the discharge current that does not cause the turn-on loss becomes the widest. Further, since a snubber capacitor can be connected and turn-off loss is reduced, the efficiency of the device is improved and noise is also reduced. Further, since id and the switching frequency fs change along the resonance curve, it is not necessary to adjust the characteristics of ids and the switching frequency fs each time even if the inductive operating range varies due to the variation of the circuit constant.

Sixth Embodiment Although not shown, in the fifth embodiment, the current setting value of the current setting means 8 is input to the switching means 23, but the current detection value of the current detecting means 7 is input to the switching means 23 also in the fifth embodiment. You can expect the same effect as.

Embodiment 7. In the embodiment shown in FIG. 16, saturation reactor 27 is connected between inverter unit 3 and high frequency transformer 4. A snubber capacitor is connected in parallel to each switching element of the inverter unit 3 as in the first embodiment. Switching frequency Switching frequency fs is the same as the conventional example.
The discharge current id is fixed to so and the discharge current id is feedback-controlled by the pulse width control means 9 as in the conventional example. FIG. 17 shows the relationship between the current flowing through the saturation reactor 27 and the magnetic flux. The magnetic flux saturates as the current increases, so that the inductance decreases as the current increases. The inductance of the series resonance circuit viewed from the inverter unit 3 is the inductance l of the saturation reactor 27 and the high frequency transformer 4.
And the series resonance frequency fr is given by the following equation. fr = 1 / 2π√ ((L + 1) C) Since the output current I of the inverter unit 3 flows through the saturated reactor 27 and the inductance l of the saturated reactor 27 increases in a region where the output current I is low, the dielectric electrodes 5a, 5b.
The serial resonance frequency fr does not decrease even if the electrostatic capacitance C of the above decreases. Therefore, from the viewpoint of the inverter unit 3, the switching frequency is equivalently increased as the switching frequency fs is increased, and the inductive operating range in which the turn-on loss does not occur can be expanded to the low current region. Further, since a snubber capacitor can be connected and turn-off loss is reduced, the efficiency of the device is improved and noise is also reduced.

Embodiment 8. Although not shown, in the seventh embodiment, the saturation reactor 27 is connected between the inverter unit 3 and the high frequency transformer 4, but it may be connected between the high frequency transformer 4 and the dielectric electrodes 5a and 5b as in the seventh embodiment. You can expect a great effect.

In addition, since the inductive operation range of the first to sixth embodiments is further expanded by combining the first to sixth embodiments with the saturated reactor of the seventh or eighth embodiment, The effects of modes 1 to 6 can be more stably realized.

[0037]

【The invention's effect】

Further, a laser power supply device according to another invention of the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element and a free-wheeling diode connected in parallel to the converter section as a pair. An inverter section for converting the DC output voltage of the inverter into an AC voltage, a transformer connected to the output side of the inverter section and having an inductance that constitutes a series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, and the output side of this transformer Current detection means provided in the, the current setting means for setting the value of the discharge current generated between the dielectric electrodes, the current setting value set by the current setting means and the current detection value detected by the current detection means are the same. Pulse width control means for controlling the pulse width of the output voltage of the inverter section so that the rise of the output current of the inverter section is Is provided with frequency command means for increasing the switching frequency of the inverter unit according to the decrease of the discharge current so that the output voltage of the inverter unit is delayed from the rise of the output voltage of the inverter unit. However, it is possible to obtain a highly efficient and low-noise laser power supply device. .

Further, a laser power supply device according to still another invention of the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element and a free-wheeling diode connected in parallel with the converter section as a pair. Section for converting the DC output voltage of the section into an AC voltage, a transformer connected to the output side of this inverter section and having an inductance that forms a series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, and the output of this transformer Side current detecting means, current setting means for setting the value of the discharge current generated between the dielectric electrodes, current setting value set by the current setting means and current detection value detected by the current detecting means Frequency control to control the switching frequency of the inverter section above the resonance frequency of the series resonance circuit so that If the discharge current generated between the dielectric electrodes is less than a predetermined value, the pulse width control means for decreasing the pulse width of the output voltage of the inverter unit according to the decrease of the discharge current is provided. Even if the inductive operating range varies due to the
It is not necessary to adjust the switching frequency characteristic, the switching loss is reduced, and a highly efficient and low-noise laser power supply device can be obtained.

A laser power supply device according to still another invention of the present invention comprises a converter section for converting an AC voltage into a DC voltage, a switching element, and a free-wheeling diode connected in parallel to the converter section as a pair. Section for converting the DC output voltage of the section into an AC voltage, a transformer connected to the output side of this inverter section and having an inductance that forms a series resonance circuit with the capacitance of the dielectric electrode of the laser oscillator, and the output of this transformer The current detection means provided on the side, the current setting means for setting the value of the discharge current generated between the dielectric electrodes, the current setting value set by this current setting means and the current detection value detected by the current detection means. The pulse width control means for controlling the pulse width of the output voltage of the inverter section so that they coincide with each other, and the current setting set by the current setting means. Frequency control means for controlling the switching frequency of the inverter section within the range of the resonance frequency of the series resonance circuit or higher so that the value and the current detection value detected by the current detection means match, and when the discharge current becomes equal to or lower than a predetermined value. Since the switching means for switching the control of the discharge current from the frequency control means to the pulse width control means is provided, the maximum value of the switching frequency that changes along the resonance curve can be increased to the upper limit frequency, and turn-on loss does not occur. As a result of the widest range of the discharge current, it is possible to obtain the laser power supply device with the highest switching efficiency, the lowest switching loss, and the low noise.

Further, a laser power supply device according to still another invention of the present invention has a transformer on the output side of the inverter section.
Equipped with a saturation reactor connected in series with the inductance
The inductive operating range that does not cause turn-on loss.
It can be extended to the low current range and even in the low current range.
For laser with high efficiency and low noise by reducing itching loss
A power supply can be obtained.

Further, in a laser power source device according to still another invention of the present invention, the inverter unit in the above-mentioned configuration of the invention is provided with a switching element and a snubber capacitor connected in parallel therewith. Therefore, the turn-off loss can be effectively reduced, the switching loss as a whole can be reduced, and a highly efficient and low-noise laser power supply device can be obtained.

[Brief description of drawings]

FIG. 1 is a circuit configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a circuit configuration diagram showing an inverter unit according to the first embodiment of the present invention.

FIG. 3 is a circuit configuration diagram showing a pulse width control means and a frequency command means according to the first embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a turn-off loss reducing effect according to the first embodiment of the present invention.

FIG. 5 is a characteristic diagram of the current setting value ids and the switching frequency fs according to the first embodiment of the present invention.

FIG. 6 is a diagram showing an output voltage and an output current of the inverter unit according to the first embodiment of the present invention.

FIG. 7 is a diagram showing an effect of reducing turn-off loss by the snubber capacitor according to the first embodiment of the present invention.

FIG. 8 is a circuit configuration diagram showing a second embodiment of the present invention.

FIG. 9 is a circuit configuration diagram showing a third embodiment of the present invention.

FIG. 10 is a circuit configuration diagram showing frequency control means and pulse width command means according to a third embodiment of the present invention.

FIG. 11 is a characteristic diagram of the current set value ids and the pulse width signal Tw according to the third embodiment of the present invention.

FIG. 12 is a characteristic diagram of discharge current id and switching frequency fs according to the third embodiment of the present invention.

FIG. 13 is a circuit configuration diagram showing a fifth embodiment of the present invention.

FIG. 14 is a frequency control means according to the fifth embodiment of the present invention;
It is a circuit block diagram which shows a pulse width control means and a switching means.

FIG. 15 is a characteristic diagram of the discharge current id and the switching frequency fs according to the fifth embodiment of the present invention.

FIG. 16 is a circuit configuration diagram showing a seventh embodiment of the present invention.

FIG. 17 is a diagram showing a relationship between current and magnetic flux of the saturated reactor of the present invention.

FIG. 18 is a circuit configuration diagram showing a conventional laser power supply device.

FIG. 19 is a circuit configuration diagram showing an inverter unit of a conventional laser power supply device.

FIG. 20 is a circuit configuration diagram showing a pulse width control means of a conventional laser power supply device.

FIG. 21 is a diagram showing an output voltage and an output current of an inverter unit of a conventional laser power supply device.

FIG. 22 is a diagram showing a time chart of a conventional laser power supply device.

FIG. 23 is a diagram showing a relationship between a capacitance C of a dielectric electrode and a discharge current id of a conventional laser power supply device.

[Explanation of symbols]

1 Commercial power supply 2 Converter section 3 Inverter section 4 high frequency transformer 5 Dielectric electrode 7 Current detection means 8 Current setting means 9 Pulse width control means 10 Frequency command means 11 Switching element 13 Snubber capacitor 20 Frequency control means 21 Pulse width command circuit 23 Switching means 27 Saturated reactor

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-64-23589 (JP, A) JP-A-1-143378 (JP, A) JP-A-2-131364 (JP, A) JP-A-5- 115181 (JP, A) JP 5-41291 (JP, A) JP 58-206182 (JP, A) JP 1-251683 (JP, A) Actually developed 60-144260 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01S 3/00-3/30

Claims (6)

(57) [Claims] 1. A converter for converting an AC voltage into a DC voltage.
Section, switching element, and reflux diode connected in parallel
DC output of the converter section
An inverter unit that converts the voltage into an AC voltage, and is connected to the output side of this inverter unit to induce the laser oscillator.
Inductor that forms series resonance circuit with capacitance of electric electrode
A transformer having a closet, a current detecting means provided on the output side of the transformer, and an electric current for setting the value of the discharge current generated between the dielectric electrodes.
Current setting means, the current setting value set by this current setting means and the above current detection
If the current detected by the
Pulse width control for controlling the pulse width of the output voltage of the data section
Stage, the rise of the output current of the inverter section
-Be sure to delay the above-mentioned
Switching of the inverter section according to the decrease of the electric current
It is equipped with frequency command means to increase the frequency.
Power supply device for laser to be collected. 2. A converter for converting an AC voltage into a DC voltage.
Section, switching element, and reflux diode connected in parallel
DC output of the converter section
An inverter unit that converts the voltage into an AC voltage, and is connected to the output side of this inverter unit to induce the laser oscillator.
Inductor that forms series resonance circuit with capacitance of electric electrode
A transformer having a closet, a current detecting means provided on the output side of the transformer, and an electric current for setting the value of the discharge current generated between the dielectric electrodes.
Current setting means, the current set value set by the current setting means and the current
Make sure that the current values detected by the detection means match so that
The switching frequency of the inverter circuit to the resonance of the series resonance circuit.
Frequency control means for controlling in the range above the frequency, the discharge current generated between the dielectric electrodes below a predetermined value
Then, as the discharge current decreases, the output voltage of the inverter section
Pulse width control means for reducing the pulse width,
A power supply device for a laser. 3. A converter for converting an AC voltage into a DC voltage.
Section, switching element, and reflux diode connected in parallel
DC output of the converter section
An inverter unit that converts the voltage into an AC voltage, and is connected to the output side of this inverter unit to induce the laser oscillator.
Inductor that forms series resonance circuit with capacitance of electric electrode
A transformer having a closet, a current detecting means provided on the output side of the transformer, and an electric current for setting the value of the discharge current generated between the dielectric electrodes.
Current setting means, the current setting value set by this current setting means and the above current detection
If the current detected by the
Pulse width control for controlling the pulse width of the output voltage of the data section
Stage, the current setting value set by the current setting means and the current detection
If the current detected by the
The switching frequency of the circuit part is the resonance frequency of the series resonance circuit.
Frequency control means for controlling in the range of several or more, and controlling the discharge current when the discharge current becomes a predetermined value or less.
Switching from the frequency control means to the pulse width control means
For a laser characterized by a switching means
Power supply. 4. A transformer is installed on the output side of the inverter section.
Equipped with a saturation reactor, which is connected in series with the inductance
The laser according to claim 1, characterized in that
Power supply. 5. Frequency command means or frequency control means
Is below the upper limit to control the frequency so that it is within the specified range.
A limiter circuit is provided, and the limiter circuit is provided.
The power supply device for a laser according to claim 4. 6. The inverter section includes a switching element,
And a snubber capacitor connected in parallel therewith,
The laser according to claim 1 to 5, characterized in that
Power supply.