JP3494576B2 - Optical declination measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] The present invention relates to a base point and a distance between the base point and the base point.
To connect each point to the points set on both sides of the base point.
Optical declination measuring device that measures the declination of two line segments with light
Especially useful for construction work above ground and underground
It is something. [0002] 2. Description of the Related Art When performing construction work on the ground or underground,
At each point and at both sides
Angle relationship between two line segments connecting each
You need to know the person in charge. For example, constructing a curved road
Need to know the angle of the bend on the construction road
become. In that case, the measurement that becomes the base point in the right place of the bent part
Set a point and set a distance from this point on both sides
Measurement points are also set in the road construction area of
The same line segment connecting the measurement point and the measurement points on both sides
Measure the angle of the chief. In addition, the ground curved by the underground excavator
In order to excavate the lower shaft, the underground excavator must be
Along the excavated path)
In order to find out, you must check its excavation position.
In that case, the measurement point that is the base point and each measurement on both sides
It is necessary to know the angular relationship between the line segments connecting the points.
You. Angle between line segments on both sides with such a base point at the vertex
To know the relationship, measure either the inner angle or the outer angle between the two line segments.
So that the angular relationship can be uniquely identified.
If the values for the various angles can be measured, the purpose can be fulfilled.
In this specification, we describe the angular relationship between these two line segments.
A value relating to an angle that can be specified is called an argument. [0003] The applicant previously measured such declination with light.
Invented an optical declination measuring device,
A patent application was filed as No. 7295. Until then, the declination
When measuring, usually using a transit
The law had been adopted, but the technology of
Some of them are described in, for example, JP-A-5-340186.
Deflection angle is measured by laser beam when measuring excavation position like technology
Some have adopted a method of optical measurement. This
Deflection measurement technology using laser beam
The time required for one survey is long due to the labor
Laser light with high convergence
Laser beam from the laser sight
The target position detection element
Rotate the wedge prism around the optical axis to measure
It required a rotating mechanism to allow it to move.
Therefore, as with the transit method,
High measurement accuracy due to mechanical measurement errors
It was difficult to do. In addition, laser sighting machines,
Yaw direction and pitch on diprism or target
When an external force such as vibration that tilts in the
A measurement error due to external force occurs, and the measurement result of declination has a large influence.
There was also the problem of affecting the sound. [0004] The above-mentioned Japanese Patent Application No. 9-2, filed with the applicant's patent application
The optical declination measuring apparatus of the invention of No. 97295,
It was created in response to the problem
When measuring, perform an operation to shine light on the position detection element.
No need, even if external force such as vibration acts on the measurement result
To be able to measure declination accurately
It is a novel thing. The present invention relates to such an optical type
For declination measuring devices, declination can be measured more accurately
This is an improvement. Therefore, this Japanese Patent Application Hei 9-2
No. 97295, the optical declination measuring apparatus of the invention
The technique is described below with reference to FIGS.
The main points of the operation will be explained. FIG. 4 shows a conventional light source.
FIG. 5 is a perspective view showing a detector in a scientific declination measuring apparatus.
Is an optical declination measurement to explain the principle of declination measurement.
FIG. 6 is a conceptual diagram of a measuring device, and FIG.
FIG. 7 is a conceptual diagram for explaining the principle of detection, and FIG.
FIG. 3 is an arrangement diagram of pixels of a position detection element in the detector. As described above, the optical declination measuring device
Is the base point and each set on both sides of the base point at a distance from the base point
Measuring the declination of two line segments connecting a point with light
Device. Here, the base point is the angle to be measured
Means the measurement point to be set at the vertex. This conventional
The optical declination measuring device 4 according to the technology is shown in FIG.
It is shown, and roughly classified, the points set on both sides of the base point
The light sources 41 and 42 for declination measurement respectively installed in
And the direction of each light source 41, 42 installed at the base point can be detected.
And a detector 410 for measuring the deflection angle. Light sources 41, 4
2 emits diffused light such as a light emitting diode
What is called a point light source is used. That is,
Use those that emit light beams with high convergence such as the beam
Can not be released, but basically,
If it emits diffused light that spreads out,
Above, they can be appropriately selected and used. [0006] The detector 410 for measuring the declination will be described.
Then, 411 separates the diffused light from each of the light sources 41 and 42
As a common light condensing means for both light sources 41 and 42 for condensing and condensing light.
The lens 412-1 is the light collected by the lens 411.
For receiving the diffused light from the source 42 and detecting the position of the received light.
Detecting element as a two-dimensional optical sensor
Receives the diffused light from the light source 41 collected by the lens 411.
A similar position detection element for detecting the light receiving position
And 413-1 from the light source 42 condensed by the lens 411.
Of the light so as to guide the diffused light to the position detecting element 412-1.
Reflecting prism as light redirecting means for redirecting light, 4
13-2 is diffusion from the light source 41 condensed by the lens 411
The direction of the light is changed so as to guide the light to the position detecting element 412-2.
This is a similar reflecting prism to be replaced. The detector 410
A built-in arithmetic processing unit (not shown)
The declination based on the detection results of the elements 412-1 and 412-2.
Various calculations for calculation are performed. The detector 410 is
Apart from these, the lens 411 and the position detecting element 412-
1, 412-2, reflection prisms 413-1, 413-2
And an arithmetic processing unit. Each position detecting element 412-1, 412-2
Tries to enter the lens 411 from each of the light sources 41 and 42
It is arranged at a position where the diffused light is not blocked. This
In the example of (1), the position detecting element 412-1 changes its light receiving surface.
Lens 411 in the direction perpendicular to the optical axis C.
And the position detecting element 412-2 has a light receiving surface as a lens.
411 is arranged upward in the direction orthogonal to the optical axis C of
I have. The reflecting prisms 413-1 and 413-2 are lenses
411 are arranged before and after the lens 411, respectively.
Of the diffused light from the light sources 42 and 41
It is directed to the light receiving surface of the detection elements 412-1 and 412-2,
At least a part of the diffused light incident from the light sources 41 and 42
Can be transmitted. The diffused light emitted from the light source 41 is
After entering the reflection prism 413-1, at least a part thereof
Is transmitted through the reflecting prism 413-1 and passes through the lens 411.
The light is focused, and then the reflecting prism 413-2 behind it.
Is changed by turning on the position detecting element 412-2.
Image. Similarly, the diffused light from the light source 42 is
At least a part of the light passes through the reflection prism 413-2 on the front side.
And the light is focused by the lens 411,
Reflected by the projection prism 413-1 and the position detection element 412
-1. Thus, the reflection prism 413-
By using 1,413-2, each light source 41, 42
Does not prevent diffused light from entering the lens 411
The position detection elements 412-1 and 412-2 are arranged at positions.
To collect the diffused light.
It is not necessary to provide a lens for each light source 41, 42 and it is common
Can be Each position detecting element 412-1, 41
2-2 has a large number of pixels and receives each light as described later.
Detects the amount of light received at many positions on the surface
The focus of light collected by the lens 411 on the light receiving surface
The corresponding position, that is, the position of the imaging point is detected by the method described later.
Put out. Next, based on the position of the image forming point, the light
The principle of detecting the directions of the sources 41 and 42 is based on the position detection element.
Of the light source 42 based on the position of the imaging point on the
The case of detecting the direction will be described as an example with reference to FIG.
The direction of the light source 42 is relative to the reference line of the detector 410.
The optical axis D of 42 (connects the light source 42 to the center of the lens 411)
Line), where the reference of the detector 410 is
As a line, the optical axis C of the lens 411 (the center of the lens 411 is
(An axis perpendicular to this). Of light source 42
When detecting the direction, the horizontal direction of the direction of the light source 42 is
Component (the optical axis C of the lens 411 and the optical axis D of the light source 42 are
The angle between the lines orthogonally projected onto the surface) and the vertical component
(These optical axes C and D are parallel to the optical axis C of the lens 411.
Angle between lines orthogonally projected on a vertical surface)
However, for convenience of explanation, the vertical
The case of detecting the minute will be described. Position detection element 412
-1, the origin is at the center of the lens 411, and the horizontal direction
The (left-right direction) is the X-axis, and the vertical direction (up-down direction) is the Y-axis.
XY plane coordinates are set. Now, as shown in FIG.
The position detecting element 412-1 is arranged in parallel at the interval of F
When the diffused light is emitted from the light source 42, the diffused light from the light source 42 is reflected.
Of the position detecting element 412-1
An image is formed on a surface. The image forming point of the light source 42 at that time
The component of the coordinate position in the Y-axis direction is Y_GAnd the direction of the light source 42
Assuming that the angle representing the vertical component of is ψ, the angle ψ is
It can be obtained by the following (1). [0011] (Equation 1) In the above equation, F, Y_GAre known values
Therefore, the angle に 関 す る with respect to the direction of the light source 42 is
One based on the detection result of the light receiving position by the output element 412-1
It can be calculated unambiguously. FIG.
The lens 411 in the optical declination measuring apparatus of FIG.
The arrangement of the position detection element 412-1 is schematically illustrated and
The state in which the lenses are arranged in parallel at an interval of F is shown.
1 and the position detecting element 412-1 were arranged as shown in FIG.
When the angle ψ is obtained from the equation (1) in the state
Is the value of F, the light source 42 passing on the optical axis C of the lens 411.
After the optical axis D is incident on the lens 411, the position detecting element 412
In terms of the total distance traveled to reach -1
Good. Similarly, the component in the vertical direction of the direction of the light source 41
Is also detected based on the detection result of the position detection element 412-2.
Can be issued. Thus, the direction perpendicular to the direction of the light sources 41 and 42 is
Direction component, each light source is determined based on the detection result.
The vertical component of the declination between the optical axes D of 41 and 42 (each light
The optical axes D of the sources 41 and 42 are parallel to the optical axis C of the lens 411.
The angle between the lines orthogonally projected on the vertical plane is calculated.
The calculation method will be described with reference to FIG. Now, light source 4
The vertical component of the angle representing the direction of 1 is φ, and each light source
The vertical component of the declination between the optical axes D of 41 and 42 is Φ.
I do. The angles Φ, φ, and ψ have polarities,
The optical axis D of the sources 41 and 42 overlaps the optical axis C of the lens 411
If the direction of rotation at the minimum angle is clockwise
Is positive and negative when counterclockwise. To be so
Then, as is apparent from FIG. 5, the declination Φ becomes the following (2)
It can be obtained by the formula. Φ = φ-ψ (2) The calculation of the declination Φ is performed by the position detection elements 412-1 and 41-2.
The processing is performed by the arithmetic processing unit based on the detection result in 12-2.
You. As described above, the declination between the optical axes D of the light sources 41 and 42 is perpendicular.
The method of obtaining the component Φ in the direction has been described.
The horizontal component of the declination between the optical axes D of 1, 42 (each light source
The lines which are obtained by orthogonally projecting the optical axes D of 41 and 42 on the horizontal plane are used.
Angle) with respect to the image forming point of the light sources 41 and 42.
The same method as described above, based on the component in the X-axis direction
Can be obtained by The measured value of the argument Φ is compared with the upper and lower figures of FIG.
As can be clearly understood, the detector 410 is vertically
(Lighting direction), the light source 4
The angle in the direction of 1, 42 changes from φ, ψ to φ ', ψ'
Even if it fluctuates, it is always constant without being affected by the fluctuation
Will be kept. In addition, the detector 410 is moved in the left-right direction (yawing).
The same applies to the case of tilting in the direction. Accordingly
The posture of the detector 410 is not correct due to external force such as vibration or the mounting posture.
Fluctuates in pitching direction and yawing direction
Even if the measurement results of declination are affected by
There is no. In addition, the light sources 41 and 42 particularly emit diffused light.
Use a light source to illuminate a large area with a broadened light
The light sources 41 and 42 have similar causes
Even if it fluctuates, the light is collected by the common lens 411.
To apply to the position detecting elements 412-1 and 412-2
Image at the correct position without
The measurement result of the angle is affected by the variation of the posture of the light sources 41 and 42.
Never even. The position detecting elements 412-1 and 412-2 are:
As shown in FIG. 7, each light source 4 collected by the lens 411
Light from the light received from each of the light sources 2, 41
It has a number of pixels 412e for detecting the quantity, each pixel
The detection value regarding the light amount at 412e is output.
ing. In the example shown here, the pixel 412e is
Pixel pitch in the X-axis direction and ΔY in the Y-axis direction.
It has a rectangular shape, with about M pieces in the X-axis direction and about N pieces in the Y-axis direction.
They are arranged in a matrix. These many
Position detection elements 412-1 and 41 composed of pixels 412e
2-2 receives the light collected by the lens 411,
The amount of light at each position on the XY plane coordinates is determined by each pixel 412e.
The electrical signals related to the detected value of each position.
That is, the detection signals are sequentially output to the arithmetic processing unit in a predetermined order.
You. Here, each position detection element 412-1, 412-2
Any position on the XY plane coordinates on the light receiving surface of
(X_m, Y_n) Is proportional to the amount of light (light intensity)
When the sensor output value is I (X_m, Y_n). In the arithmetic processing unit, the sensor output value I
(X_m, Y_n), Each position detecting element 412-
Light from each light source 42, 41 on the light receiving surface 1, 412-2
The imaging position (X_G, Y_G) To the operation
Find more. This image forming position (X_G, Y_G)
Usually, pixel pitches ΔX, ΔY (for example, about 12 microns)
The sensor output value I (X_m, Y_n) Weight
The center coordinate position is calculated and calculated.
Can be expressed by the following equation. [0017] (Equation 2) In the above expression, (X_G,
Y_G) Is a certain reference coordinate point (X_G ⁰, Y
_G ⁰) To the imaging position in the X-axis and Y-axis directions.
And (X_m, Y_n) Is the XY plane coordinates
X-axis direction and Y-axis from the origin to arbitrary pixel 412e
Directional distances, and these distances
Is a value to which the pixel pitches ΔX and ΔY are added. [0019] The position detecting element
Are detected by an optical sensor such as
Detected value includes a sensor output I caused by light from the light source.
_S(X_m, Y_n) Besides, not due to the light of the light source
Sensor output I_N(X_m, Y_n) As an ingredient
I have. Then, the sensor output value I (X_m, Y_n)
It can be expressed by the following equation.   I (X_m, Y_n) = I_S(X_m, Y_n) + I_N(X_m, Y_n) ‥‥‥ (4) In the above equation, the sensor output I generated without being caused by the light of the light source_N
(X_m, Y_n) Includes ambient light (sunlight, lighting
Sensor output and darkness caused by light other than the light of the light source
Sensor output caused by current (in the electric circuit of the position detection element
Sensor output). Then, the light of the light source collected by the lens
The exact imaging position where the image forms on the light receiving surface of the optical sensor is
(3) I in the formula is I_SIs the value obtained by replacing
As shown in the following equation, the image forming position (X_G, Y
_G) Does not match. [0021] (Equation 3) As described above, the prior art uses the declination Φ
When measuring optically, do not be affected by external force such as vibration.
Can accurately measure the deflection angle Φ, but the light of the light source
The imaging position of is calculated by the usual method as shown in equation (3).
As far as required, there is a limit even if declination Φ can be measured accurately
There is. The present invention seeks to eliminate these problems.
The technical challenge is to measure the declination optically
Caused by factors other than the light of the light source for declination measurement
High accuracy of declination without being affected by sensor output
To provide an optical declination measuring device that can be measured by
It is in. [0024] SUMMARY OF THE INVENTION The technical section of the present invention.
The title is "Set a distance from the base point and set it on both sides of the base point.
The declination of two line segments connecting each point with
Optical declination measuring device ''
It is installed at each point set on both sides and emits diffused light
And at least some of the diffused light from each light source.
The common light condensing means for condensing light and the light condensing means
Receives light from each light source and detects the amount of light
Each pixel has a large number of pixels to output the detection value of each pixel
The position detection element and the light from each light source focused by the focusing means
Turn each direction to lead to each position detection element
Light redirecting means and each point that is not caused by the light of the light source
The set value for the output of the position detection element
Offset means for subtracting from the detected value of each pixel;This o
If the result of the subtraction by the offset means is negative,
Conversion means for converting to 0;Result of subtraction by offset means
And the conversion result by the conversion meansBased on the optical axis of each light source
And declination calculating means for calculating the declination of
This is achieved by: The optical declination measuring device which is the base of the present invention
Is particularly suitable for light sources installed at each point set on both sides of the base point.
Using a light source that emits diffused light, a wide area
To illuminate the area, and each light with its spread
The light from the source is collected by a common light condensing means and
Each light is received and the light receiving position is detected.
To determine the declination between the optical axes of each light source based on
When measuring declination optically, the laser
Light is applied to the position detection element as in the case of using the beam.
And no mechanical measurement error is required.
And the light-condensing means,
If the posture of the light source is
Even if it fluctuates in the pitching and yawing directions,
Make sure that force fluctuations do not affect declination measurements
Can be measured accurately.
You. The present invention provides a light source having such excellent measurement accuracy.
Based on the eccentric angle measuring device, the offset
A step is provided to detect light from each pixel value of each position detection element.
The output of each position detection element that is not caused by the light of the source
The set value is subtracted from the
To the detection value caused by the light of the light source.ValueSupplement
Can be corrected.And if this offset hand
If the result of the subtraction at the stage is negative, the result of the
Since it is converted to 0 at the stage, offset means
To eliminate disturbances caused by artificial correction
Can also be.In the declination calculation means, the appropriate
Calculate the declination between the optical axes of each light source based on the
When measuring the declination optically,
Of the sensor output caused by factors other than the light from the light source
Measurement of declination with higher accuracy.
Can be. [0027] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention
A concrete example showing whether it is embodied will be described with reference to FIGS.
The embodiments of the present invention are clarified by
To FIG. 1 shows an optical declination measuring apparatus according to an embodiment of the present invention.
And FIG. 2 is a block diagram showing an arithmetic processing unit in the device.
4 to the light of the light source in the components of the detection value detected by the detector
FIG. 3 is a diagram showing components that do not occur, and FIG.
FIG. 3 is a diagram showing a detection value including the components of FIG.
You. An optical declination measuring apparatus according to an embodiment of the present invention.
Is an optical declination according to the prior art shown in FIGS.
As with the measuring device, the base point and both sides of the base point at a distance from the base point
Deflection of two line segments connecting each point set in
This is a device for measuring Φ with light. And set on both sides of the base point
Optical system that emits diffused light that is installed at each specified location
From the light sources 41 and 42 for measuring declination and the respective light sources 41 and 42
Common collection that collects at least part of the diffused light
The lens 411 as light means and the light condensing means 411
Receiving light from each of the light sources 42 and 41 condensed respectively
And has a large number of pixels 412e for detecting the amount of light.
Each position detection element 412 that outputs a detection value of the pixel 412e
-1, 412-2 and trying to enter the lens 411
Transmit at least a part of the diffused light from each light source 41, 42
From each light source 42 and 41 condensed by the lens 411
Light is applied to each of the position detecting elements 412-1 and 412-2.
Each countermeasure as a light turning means to turn to guide
Lens 4 having projection prisms 413-1 and 413-2.
Diffused light from each of the light sources 41 and 42 to be incident on the light source 11
Position detection elements 412-1 and 412 at positions where
-2, and the basic structure is related to the conventional technology.
It is not different from the one. It also has an arithmetic processing unit,
The declination Φ between the optical axes D of the sources 41 and 42 is calculated by an arithmetic processing unit.
In this regard, and also in this regard,
It is no different from a device that does. The apparatus of this embodiment is an apparatus according to the prior art.
The fundamental difference from the above lies in the contents of the arithmetic processing unit. So
Here, the contents of the arithmetic processing unit will be described below with reference to FIG.
I will tell. The arithmetic processing device 10 shown in FIG.
Path 1, analog-to-digital converter 2, image memory 3, and
A center-of-gravity position / deviation calculating circuit 4;
Offset circuit 1, analog-to-digital converter 2, and image
Memory 3 is a number corresponding to the number of light sources 41 and 42
Provided. First, as the main technical means of the present invention
Offset Circuit 1 Related to Offset Means
explain. As described above, the position detecting elements 412-1, 41-1,
The output value I of the detection signal 412-2 includes disturbance light and dark current.
Due to the light from the light sources 42 and 41 such as the sensor output caused by the
Sensor output I related to noise signal generated_N(X
_m, Y_n) Is included as an ingredient. Figure 2
Sensor output I related to the noise signal_N(X_m, Y_n) Wave
For each pixel 412e on the same row of the shape,
5 is a diagram illustratively showing waveforms in all experiments. FIG.
Then, the origin of the XY plane coordinates shown in FIG.
The distance (mm) between 2e is taken on the X axis (horizontal axis), and each pixel
The relative value of the sensor output I corresponding to the
Since the physical quantity to be detected changes depending on the type of sensor,
No units are shown using the term value. ) To the Y axis
(Vertical axis). According to the waveform of FIG.
Sensor output I_N(X_m, Y_n) Is the X-axis
At any point, it is almost constant at about 0.12. The offset circuit 1 includes a position detecting element 41
A large number of pixels 41 included in 2-1 and 412-2, respectively
2e output value I (X_m, Y_n) Is entered
Together with a preset value from input means (not shown).
Offset setting value V_OFF Is entered. This offset
Set value V_OFF Is not due to the light of each light source 42, 41
The resulting output I of each position detecting element 412-1, 412-2
_N(X_m, Y_n), Ie the disturbance mentioned above
Set the sensor output set value caused by noise such as light and dark current.
Meaning, conditions such as measurement location, optical sensor standard, and experiment
And so on can be determined almost exactly. Offset
Set value V_OFF Is basically a noise signal
Sensor output I_N(X_m, Y_nThe largest of
Set up so that you can eliminate unwanted things. This noise signal
Output value I_N(X_m, Y_n) May be strange
The offset setting value V_OFF Is the above condition or
1.5 times the standard value determined based on experiments, etc.
Should be set with a margin about twice as large as. Also, each
For the position detection elements 412-1 and 412-2, uniformly
They may be set or may be set separately. Offset times
The path 1 detects the detection signal of each pixel 412e input to the circuit 1.
Signal output value I (X_m, Y_n) To offset set value V
_OFF Is subtracted to perform offset correction. The analog-to-digital converter 2 detects each position.
Output from the output elements 412-1 and 412-2
The analog signal whose offset has been corrected by the circuit 1 is digital
Signal, and subtraction in the offset circuit 1
When the result is negative, it works to convert the subtraction result to 0.
You. If the subtraction result in the offset circuit 1 is negative, the
The reason why the calculation result is set to 0 is that
This is in order to eliminate the resulting disturbance. These offices
Through the reset circuit 1 and the analog-digital converter 2.
The calculated operation result is the output value I ′ (X_m, Y
_n) Is output to the image memory 3. This output value I '
(X_m, Y_nWhen the calculation method of ()) is expressed by a mathematical expression, the following expression is obtained.
I can do it.   I '(X_m, Y_n) = I (X_m, Y_n) -V_OFF      if I ′ ≦ 0 then I ′ = 0 (6) In the above formula, I 'is the position detection element 412-1, 412-2.
The output value of the signal excluding the noise signal from the detection signal
Therefore, the sensor output generated due to the light of the light sources 41 and 42
I_SIs a value that approximates FIG. 3 shows position detecting elements 412-1 and 41-1.
The output value I (X_m, Y_n) Against
Example when performing offset correction using the same method as in Fig. 2
FIG. The coordinates shown in FIG.
Output value I of noise signal_N(X_m, Y_n) Mixed output
Value I (X_m, Y_n) Is drawn, and FIG.
The waveform drawn to the left on the coordinates is the light source 4
Sensor output I caused by 1,42 light_S(X_m,
Y_n) Is a remarkable point. As shown in FIG.
Components of the sensor output that are not caused by the light of 41 and 42
I_N(X_m, Y_n) Is almost constant at around 0.12
However, in Fig. 3, allowance is given in consideration of waveform fluctuation.
Only, offset set value V_OFF Is set to 0.2
An example is shown. Therefore, in the example shown in FIG.
Offset set value V_OFF 0.2 as the output value I (X_m, Y
_n) And offset correction by the offset circuit 1
I do. Such an offset set value V_OFF Off at 0.2
When set correction is performed, the offset is clearly
The correction value resulting from the correction is the value of the sharply drawn waveform.
The analog-digital converter 2 becomes negative at both places.
Then, the correction value is converted to 0 as described above. did
Therefore, in the waveform drawn in FIG._OFF Above the line
The peak value of the other waveform becomes the value calculated by the above equation (6).
You. The image memory 3 is operated by the above equation (6).
Output value I ′ (X_m, Y_n) Day
Works to memorize data. With the center of gravity position and declination calculation circuit 4
First, the argument for the declination calculation stored in the image memory 3 is
Output value I '(X_m, Y_n), And use the data
Image formation position on each light receiving surface of detection elements 412-1 and 412-2
(X_G, Y_G) 'Is calculated by the equation (3).
Ask. When the operation method is represented by a mathematical formula, it is represented by the following formula.
be able to. [0034] (Equation 4)In the center-of-gravity position / deviation calculating circuit 4, this image formation is performed.
Position (X_G, Y_G) ', The light of each light source 41, 42
The declination between the axes D is obtained by calculation. This declination is
Position (X_G, Y_G) ’, The“ conventional technology ”
Of the argument Φ by the equations (1) and (2) already described in the section
It can be calculated according to the calculation method. As described above, in the arithmetic processing unit 10,
The offset circuit 1 is provided, and each position detecting element 412-1,
The output value I (X of the detection signal of 412-2_m, Y_n),
Noise signal output I_N(X_m, Y_n)
A certain offset setting value V_OFFIs to subtract
Therefore, the output value I (X_m, Y_n) To light sources 42 and 41
Output I caused by the light_S(X_m, Y_n)
It can be corrected to an approximate appropriate value. And the performance
In the center-of-gravity position and declination calculation circuit 4 of the arithmetic processing device 10,
Correct output value I '(X_m, Y_n)
Each light reception of the position detecting elements 412-1 and 412-2 based on the
Image position (X_G, Y_G) ', And each light source 4
The declination between the 1, 42 optical axes D is calculated.
When optically measuring the declination, the light from the light sources 41 and 42
Sensor output I caused by external factors_N(X_m, Y_n)of
Measure declination with higher accuracy without being affected
can do. In addition, such an arithmetic processing unit 10 is provided.
The optical declination measuring device, which is the base for
As described in the “Technology” section, each point set on both sides of the base point
Light sources that emit diffused light particularly to the light sources 41 and 42 installed in the
To illuminate a large area with light with a spread
Further, the light of each of the light sources 41 and 42 having the spread is
Collected by a common lens 411, and each position detecting element 412-
2, 412-1 to detect the light receiving position, respectively,
Optical axis of each light source 41, 42 based on each detection result
Since the declination between D can be obtained, the declination is
When performing a biological measurement, a laser beam is applied to the light sources 41 and 42.
For directing light to the position detecting element as in the case of using
A mechanical measurement error is less likely to occur without an operation mechanism.
And the postures of the detector 410 and the light sources 41 and 42 are
Pitching direction and yaw
Even if it fluctuates in the shifting direction, the change in its attitude will result in the measurement of declination.
It is possible not to affect the result. The result
As a result, the declination can be measured with high accuracy by itself.
This effect is combined with
Measurement with high accuracy. When embodying the present invention, in particular, each light source 4
The diffused light from the light sources 1 and 42
Make it a diffused light of polarized light and a reflective prism
The light enters the lens 411 as 413-1 and 413-2.
To transmit the diffused light of one linearly polarized light, and
Diffusion of the other linearly polarized light in the process collected by the lens 411
To guide light to the position detection elements 412-1 and 412-2
By using a polarizing and reflecting prism that reflects light,
The diffused light from the sources 41 and 42 loses its light quantity, respectively.
Position detecting elements 412-2 and 412-1 without being lost
To improve the accuracy of declination measurement.
can do. In the example shown here, the arithmetic processing unit 10 is
Built-in the detector 410, offset correction, image position
(X_G, Y_G) 'And the argument calculation are all the same.
Although the arithmetic processing device 10 performs the calculation,
The device 10 does not necessarily have to be built into the detector 410
Absent. In addition, offset correction, image formation position (X_G,
Y_G) 'And the declination calculation
It may be performed by a single device. Position detection element 412
-1 and 412-2 are photo sensors
MOS type image sensor with diodes arranged in a matrix
And CCD (Charge-Coupled-Devi)
ce) A two-dimensional optical sensor such as an image sensor can be used.
In addition, light spots are utilized by utilizing the surface resistance of the photodiode.
PSD (Position)
Something like n-Sensitive-Device)
The key is to receive the light collected by the lens.
A large number of detection parts for detecting the amount of light received
It only has to have pixels, and the type is limited.
Absent. [0040] As is apparent from the above description, the present invention
Is set on the both sides of the base point at a distance from the base point
Measuring the declination of two line segments connecting each point with light
When configuring an optical declination measuring device that performs
It is installed at each point set on the side and emits diffused light
Each light source and at least part of the diffused light from each light source
Collected light by common light collecting means and light collecting means
Light from each light source
To output the detection value of each pixel.
And the light from each light source condensed by the
Each light that changes direction to lead to each position detecting element
Direction changing means and each position that is not caused by the light of the light source
The set value for the output of the detection element is
Offset means for subtracting from the detected value of the pixel,This off
When the subtraction result in the setting means is negative, the subtraction result is set to 0
Conversion means for converting toResult of subtraction by offset meansPassing
And conversion result by conversion meansBased on the optical axis of each light source
And an argument calculating means for calculating the argument. "
According to the present invention, when the declination is optically measured, the declination is
Sensor output caused by factors other than the light of the measurement light source
Measuring declination with high accuracy without being affected
Thus, an optical declination measuring device that can be obtained is obtained. In addition, the offset means and the declination calculating means are provided.
Light source, light condensing means, and position detection element as bases for installation
The optical declination measuring device composed of
When using a laser beam as the light source
Operation mechanism for directing light to the position detection element
To reduce mechanical measurement errors,
The position of the light source on the detection side such as the position detection element, etc.
Pitching direction and yaw
Even if it fluctuates in the shifting direction, the change in its attitude will result in the measurement of declination.
Results in a
The declination can be accurately measured by itself.
Therefore, the present invention makes it possible to determine the declination
Measurement with high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an arithmetic processing unit in an optical declination measuring apparatus according to an embodiment of the present invention. FIG. 2 is a diagram showing components generated without being attributed to light of a light source among components of a detection value detected by the detector of FIG. 4; FIG. 3 is a diagram showing detected values including the components of FIG. 2 detected by the detector of FIG. 4; FIG. 4 is a perspective view showing a detector in an optical declination measuring apparatus according to a conventional technique. FIG. 5 is a conceptual diagram of an optical declination measuring device for explaining the principle of measuring declination. FIG. 6 is a conceptual diagram for explaining the principle of detecting the direction of a light source with the detector of FIG. FIG. 7 is a layout diagram of pixels of a position detecting element in the detector of FIG. 1; [Description of Signs] 1 Offset circuit 2 Analog-to-digital converter 2 3 Image memory 4 Center of gravity position / declination calculation circuit 10 Arithmetic processors 41 and 42 Light source 410 Detector 411 for measurement of declination lenses 412-1 and 412- 2 position the optical axis V _OFF offset value Φ polarization angle of the light axis D source of the detector elements 412e position detection element of the pixel 413-1,413-2 reflecting prism C lens

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-129850 (JP, A) JP-A-7-294248 (JP, A) Patent 3340705 (JP, B2) (58) Fields investigated (Int. Cl. ^7, DB name) G01B 11/00 G01B 11/26 G01C 15/00

Claims (1)

(57) [Claims 1] An optical deflector for measuring the declination of two line segments connecting a base point and each point set on both sides of the base point at a distance from the base point using light. An angle measuring device, a light source that is installed at each of the points set on both sides of the base point and emits diffused light, a common light-collecting unit that collects at least a part of the diffused light from each light source, Each position detecting element having a number of pixels for receiving the light from each light source condensed by the respective means and detecting the amount of light and outputting the detection value of each pixel, Each light direction changing means for changing the direction so that light from the light source is guided to each position detection element, and a set value for the output of each position detection element generated without being caused by the light of the light source, for each pixel of each position detection element and offset means for subtracting from the detected values, the O Se
If the result of the subtraction by the
Conversion means for converting , a subtraction result by the offset means, and
An optical declination measuring device comprising: a declination calculating means for calculating a declination between optical axes of respective light sources based on a conversion result by the converting means .