JP3494553B2 - Mass spectrometer - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass spectrometer, and more particularly to a mass spectrometer capable of easily disassembling, cleaning, and replacing parts of an interface mechanism for ionizing a sample and introducing it into an analyzing section. Regarding the device.

[0002]

2. Description of the Related Art Generally, conventional mass spectrometers include a liquid chromatograph type and a gas chromatograph. In the case of the gas chromatograph type, an interface mechanism for vaporizing and ionizing a sample to be analyzed and the ionized particles are used. To an ion trap section controlled by a high-frequency electric field via an electrostatic lens and an ion guide, and an analysis section that analyzes the mass of sample particles by detecting particles output from the ion trap section. There is. And the gas chromatograph mass spectrometer is
Generally, the above-mentioned analysis unit is arranged in a high vacuum space, the ionization unit constituting the interface mechanism is arranged in a low vacuum, and the vaporization unit is arranged in the atmosphere.

As the above-mentioned interface mechanism, what is called an electrospray ionizer (ESI) and what is called an atmospheric pressure chemical ionizer (APCI) are known. The ESI is composed of a vaporizer that vaporizes a sample by injecting an inert gas and a liquid sample into a double pipe to which a high voltage is applied, and an ionization electrode having a pore in the center, and APCI is the center. Atomizer with a member that has pores in the center and is heated to about 150 to 200 degrees, and a vaporizer with a member that has a small hole in the center and is heated to about 400 degrees, and in the center And an ionization electrode having pores.

FIG. 16 shows an E of a conventional mass spectrometer.
FIG. 17 is a perspective view showing a configuration of an SI interface mechanism, and an interface mechanism according to a conventional technique will be described below with reference to FIG. 16. In FIG. 16, 1 is a main body housing, 2 is a vaporizer, 3 is an ionization electrode, 4 is a fixing screw, 4 is a vacuum extraction duct, 6 is an atomizer, 7 is a tube, and 17 is a top plate. is there.

The mass spectrometer according to the prior art is a main body having a top plate 17 including an electrostatic lens, an ion guide, an ion trap, a mass detector composed of a particle detector, a vacuum pump, a power supply, a control circuit, etc., which are not shown. As shown in FIG. 16, the ionization electrode 3 and the vaporizer 2 which are housed in the sub-casing 1 and constitute the ESI interface mechanism are attached to a portion separated from the inside of the main-body casing 1. ing.

A portion of the top plate 17 to which the ESI interface mechanism is attached is shown in a cutaway state in FIG. 16, but this portion is a removable lid which is flush with the top plate 17. Alternatively, it is configured as an openable door. In addition, in FIG. 16, the side surface plate of the main body housing 1 is shown as being cut away, but the side surface plate is not actually cut out, and extends to a position just below the top plate 17 and ES.
It surrounds the I interface mechanism. And ES
Maintenance of the I interface mechanism is performed from the upper side by removing the lid provided on a part of the top plate 17 described above or opening the door.

Further, the ESI interface mechanism is attached through a vacuum drawing duct 5 that draws the pores of the ESI interface mechanism to a medium vacuum, and a plurality of disc-shaped pore electrodes having pores in the center thereof. Ionization electrode 3 composed of
And a vaporizer 2 for vaporizing a sample dissolved in a solvent or the like sent through the tube 7. The vacuum extraction duct 5 is attached to the main body housing 1 with a fixing screw 4'and is connected to an internal vacuum pump.

The ESI interface mechanism and a vacuum pump (not shown) are usually connected via two vacuum chambers. Although not shown in FIG. 16, one is a high-vacuum vacuum chamber in which the analysis unit is arranged, and the other is a vacuum chamber in which the ionization unit constituting the interface mechanism has a low vacuum. The gas inside the vacuum chambers is sucked by three vacuum pumps. That is, one vacuum pump is assigned to the vacuum chamber in which the ionization section of the interface mechanism is set to a low vacuum, and a turbo molecular vacuum pump is assigned to the high vacuum vacuum chamber in which the analysis section is arranged.
Another vacuum pump is arranged for exhausting the exhaust pressure of the turbo molecular vacuum pump.

Although not shown in the figure, the vaporizer 2 is formed in a double pipe shape, and the sample from the tube 7 is sent to the inner center pipe, and the vaporizer 2 is not connected between the inner pipe and the outer pipe. The active gas is blown in to spray and vaporize the sample, and the vaporized sample is blown toward the central pore of the ionization electrode 3. In addition, in the outer pipe of this vaporizer 2,
A high voltage of about 3 kV is applied from inside the main body housing 1 via a cable (not shown).

The ionization electrode 3 is fixedly attached to the vacuum extraction duct 5 with fixing screws 4 by aligning the pores of a plurality of pore electrodes. Although not shown in the figure, voltages of different potentials for ionizing the particles of the blown sample are applied to each of the plurality of pore electrodes forming the ionization electrode 3 via a cable (not shown). It is applied from inside the body 1.

In the above description, the sample sent through the tube 7 is vaporized by the vaporizer 2, and its particles are ionized while passing through the pores of the ionization electrode 3 and stored inside the main body casing 1. Will be sent to the mass spectrometer. It should be noted that the sample after being vaporized, because the inside of the vacuum extraction duct 5 is drawn to a vacuum,
It is automatically guided to the inside of the main body housing 1 through the ionization electrode 3.

In the above, the ESI interface mechanism of the mass spectrometer according to the prior art has been described.
The I interface mechanism is also configured similarly to the case of FIG. That is, in the mass spectrometer having an APCI interface, the electrostatic lens, the ion guide, the mass spectrometer configured by ion trap particle detection, the vacuum pump, the power supply, the control circuit, etc. are housed in the main body housing 1, and
The PCI interface mechanism is composed of an ionization electrode, a vaporizer, and an atomizer which is not included in the ESI interface mechanism, and is attached to a portion separated from the inside of the main body housing 1 as in the case described above. Has been done. The APCI interface mechanism is attached through a vacuum drawing duct 5 that draws the pores of the EPCI interface mechanism into a vacuum of a medium degree, and is formed into a plurality of discs having pores in the center. And an atomizer for atomizing a sample dissolved in a solvent sent through a tube, and a vaporizer for vaporizing the atomized sample. . The vacuum extraction duct is attached to the main body housing with a fixing screw, and is connected to an internal vacuum pump.

The atomizer is heated to about 150 to 200 ° C., and the sample sent through the tube is atomized in the pores provided at the center and sent to the vaporizer. The vaporizer is heated to about 400 degrees higher than that of the atomizer, vaporizes the atomized sample sent from the atomizer, and directs the vaporized sample to the central pore of the ionization electrode. Blow in. A heater for heating and a sensor for measuring temperature are incorporated in the atomizer and the vaporizer, and wirings for these are drawn inside the main body housing via a cable.

The structure of the ionization electrode is the same as that of the mass spectrometer having the ESI interface mechanism described above. Further, the structure in which the APCI interface mechanism is attached to the main body casing, the APCI of the side plate of the main body casing are used. The structure around the interface mechanism and the configuration of the top plate are the same as in the case of the mass spectrometer having the ESI interface mechanism described above.

In the above description, the sample sent through the tube is vaporized through the atomizer and vaporizer, and its particles are ionized while passing through the pores of the ionization electrode, and stored inside the main body casing. Will be sent to the mass spectrometer.

[0016]

In the mass spectrometer according to the above-mentioned conventional technique, the ionization electrode and the vaporizer constituting the interface mechanism are mounted, or these and the atomizer are aligned with each other and attached by a mounting screw. There is.
Then, these members need to be removed for cleaning or the like after being used for a certain period of time, and the members need to be replaced depending on the sample to be analyzed. Further, each of the above-mentioned members constituting the interface mechanism has a considerable weight, and has a considerable amount of heat immediately after use.

For this reason, the interface mechanism of the above-described conventional mass spectrometer has to be aligned while disassembled for cleaning or the like and then assembled, with the members held in hand. However, since the APCI interface mechanism is heated during use, it cannot perform work immediately after use.

Further, in the interface mechanism of the conventional mass spectrometer described above, the above-mentioned work must be performed from the upper side by removing the lid on the interface mechanism provided on the top plate or opening the door. However, it causes a problem of extremely poor workability. In addition, a device such as a liquid chromatograph is usually used on the top plate for use.
When it is placed on the door, there is a problem that the above-mentioned cleaning work cannot be performed unless these devices are moved.

Since the mass spectrometer according to the prior art described above uses as many as three vacuum pumps, the whole apparatus becomes large and the weight becomes large. Therefore, the mass spectrometer is carried in and installed. In this case, it has to be dismantled to have a transportable weight and assembled at the site, which requires a large amount of work, which increases time and cost. .

An object of the present invention is to solve the above-mentioned problems of the prior art, to enable easy disassembly, cleaning, replacement of parts and the like of the interface mechanism, and to easily carry out alignment when assembling. It is an object of the present invention to provide a mass spectrometer having an interface mechanism for vaporizing and ionizing a sample to be analyzed.

Another object of the present invention is to reduce the size of the apparatus as a whole and to reduce the weight so that the number of disassembly can be reduced so that the weight can be carried when carrying in and installing. And to provide a mass spectrometer that can be easily assembled locally.

[0022]

According to the present invention, the above object is achieved by an ESI comprising a vaporizer for vaporizing a sample to be analyzed and an ionization electrode having pores in its central portion.
In a mass spectrometer configured by an interface mechanism and a mass analyzer for performing mass analysis of ionized sample particles from the interface mechanism, the ionization electrode has a rectangular lower end and a main body housing. It is achieved by using a plurality of pore electrodes having a shape that engages with the groove of the base provided on the flat plate.

[0023] Further, the object is to slidably engage the plurality of pore electrodes in the groove,
Further, in use, it is achieved by combining a plurality of micropore electrodes with a fixing screw or a stopper that engages with the groove of the pedestal to form an ionization electrode.

Further, the above-mentioned object is, in a mass spectrometer having an ESI interface mechanism, the ionization electrode is constituted by a plurality of micropore electrodes attached by support rods on a pedestal portion having a substantially rectangular column shape, and a main body casing By mounting the pedestal portion on the groove portion provided on the flat plate, by mounting the pedestal portion supporting the plurality of pore electrodes, slidably in the groove portion, further, This is achieved by combining the plurality of micropore electrodes with a fixing screw in use to form an ionization electrode.

The object is also an APCI interface composed of an atomizer for atomizing a sample to be analyzed, a vaporizer for vaporizing the atomized sample, and an ionization electrode having a pore in the center thereof. In a mass spectrometer configured by a mechanism and a mass spectrometric unit that performs mass spectrometry of ionized sample particles from the interface mechanism,
The ionization electrode is constituted by a plurality of pore electrodes, and the plurality of pore electrodes, the atomizer, and the vaporizer have a quadrangular lower end portion and a base portion provided on a plane plate of the main body casing. This is achieved by having a shape that engages with the groove portion of.

[0026] Further, the object is to provide the plurality of pore electrodes,
This can be achieved by slidably engaging the atomizer and the vaporizer in the groove and connecting them by a fixing screw or a stopper that engages with the groove of the pedestal in use.

Further, the above object is to provide a mass spectrometer having an APCI interface mechanism, wherein the ionization electrode is composed of a plurality of pore electrodes, and the plurality of pore electrodes, an atomizer, and a vaporizer are formed into a substantially rectangular column shape. It is attached to the pedestal part by a support rod, and the pedestal part is placed on the groove provided on the plane plate of the main body housing to support the plurality of pore electrodes, the atomizer, and the vaporizer. By mounting the pedestal part that is slidable in the groove,
This is achieved by connecting the plurality of pore electrodes, the atomizer, and the vaporizer with fixing screws during use.

[0028] Further, the above-mentioned object is that the plurality of pore electrodes, or the plurality of pore electrodes, the atomizer and the vaporizer are engaged in the groove portion, or the pedestal portion is This is achieved by aligning each other while being placed in the groove.

According to the present invention, the object is to arrange the interface mechanism in a state that it is connected to the main body housing and cover it with a front lid that engages with the main body housing. When the front lid is removed, top and side portions of the interface unit, front portion and the side, or by so that the top and front and side are released, also a micro-switch for detecting that the front cover is removed This is achieved by providing the main body housing and enabling the operation of the device only when the front lid is attached.

The object is to connect the interface mechanism to the main body casing, and to draw a cable for supplying a voltage to the interface mechanism and a power supply for heating into the main body casing through a connector. , the two connector pins of the connector leave short-circuited by a jumper wire, the position of the connector pin to be short-circuited, it is determined the type of the interface mechanism by Ri our <br/> be made to the control device.

[0031]

[0032]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a mass spectrometer according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing the overall configuration of the mass spectrometer according to the present invention, FIG. 2 is a perspective view showing the configuration of the interface mechanism of the mass spectrometer according to the first embodiment of the present invention, and FIG. It is a figure which decomposes | disassembles and shows the interface mechanism of 2. 1 to 3, 8 is a cable, 9 is a connector, 10 and 10 'are doors, 11 is a base, 12 is a stopper, 13 stopper levers, 14 is a groove, 15 is an indicator, 16 is a flat plate, 17 is a top plate, 17 'is a depression of the top plate, 18 is a transparent window, 19 is a microswitch, 20 is a front lid, 20' is a cover, 31 is a liquid chromatograph, 32
Is a personal computer (PC), 33 is a display, 34 is a keyboard, 35 is a mouse, 36 is a desk, and other reference numerals are the same as those in FIG.

The mass spectrometer of the present invention, as shown in FIG. 1 as a whole, is provided with a main body housing 1 in which various devices constituting the mass spectrometer are housed, and a main body housing 1. A liquid chromatograph 31 mounted on the existing top plate 17,
A personal computer 32 that controls a mass spectrometer and a liquid chromatograph 31 provided on a desk 36 arranged side by side in the main body casing 1 and processes data from these, and displays the control status and data processing status. Display 33 to
A keyboard 34 for inputting instructions to the personal computer 32
And a mouse 36.

A door 10 is provided on a side surface and a front surface of the main body housing 1,
10 'and a transparent window 18 are provided. The door 10 provided on the side surface is used as an oil supply port for hydraulic oil of a turbo molecular pump for vacuum exhaust disposed inside the main body housing 1, and the transparent window 18 on the front side is a turbo molecular pump. It is provided so that the amount of hydraulic oil can be seen from the outside. Further, the front door 10 'is provided so that the power switch or the like can be operated by opening the door 10'.

Further, in the upper part of the front surface of the main body casing 1,
Detachable front lid 20 and indicator 15 protruding forward
A cover 20 'provided with is provided. Front lid 20
As will be described later, an interface mechanism is arranged inside the main body 1 so as to be coupled to the main body housing 1. When the front lid 20 is pulled to the right side in the drawing to remove the front lid 20, the main body housing 1
The upper part, the front part, and a part of the right side part in the illustrated example are released to expose the interface mechanism. As a result, the interface mechanism can be inspected and maintained from three directions, and the interface mechanism can be disassembled and assembled with extremely high workability. The front lid 20
Does not need to release three of the interface mechanisms, but may be formed so that any two of them can be released.

As will be described later, the mass spectrometer of the present invention is constructed so that it can operate only when the removable front lid 20 is securely attached to the main body housing 1. There is. As a result, it is possible to ensure safety for the worker when the conservative party works on the interface mechanism to which the high voltage is applied.

Further, the top plate 17 constituting the upper surface of the main body housing 1 is formed by forming a recessed portion 17 'which is recessed from the peripheral portion except the peripheral portion. Then, the liquid chromatograph 31 is formed on the surface of the recess 17 '.
Is placed. As a result, even if the main body housing 1 vibrates or moves due to some cause, the liquid chromatograph 31 which is a device mounted on the main body housing 1 is not attached to the top plate 1.
It is possible to eliminate problems such as sliding down of 7, and it is safe even in the event of an earthquake.

The interface mechanism of the mass spectrometer according to the first embodiment of the present invention shown in FIGS. 2 and 3 is an example in which the present invention is applied to the ESI interface mechanism, and the ionization electrode 3 is not a disc shape but a lower end. The part has a rectangular shape and is shaped to engage with the groove part 14 of the base part 11 provided on the flat plate 16 of the main body housing 1. In addition, on the wall surface of the main body housing 1 in which the interface mechanism is arranged, as shown in FIG.
The micro switch 1 engaging with the front lid 20 described by
9 is provided, and when the front lid 20 is removed, the micro switch 19 stops the equal difference between the devices in the main body housing 1 and stops the supply of the high voltage applied to the interface mechanism. I am letting you.

In the interface mechanism of the mass spectrometer according to the first embodiment of the present invention, each fine pore electrode constituting the ionization electrode 3 is provided on the flat plate 16 of the main body housing 1 having the display 15. The lower end is formed in a square shape so as to be engaged with the groove portion 14 of the base portion 11 and is shaped so as to be engaged with the groove portion 14. As shown in FIG. 3, each of the fine pore electrodes forming the ionization electrode 3 is guided by a groove portion 14 provided in the base portion 11 so as to be slidable, and each fine pore electrode is engaged in the groove portion 14. Positioning of the central pores is possible by being mounted together.

In use, each of the micropore electrodes constituting the ionization electrode 3 is fixed to the surface of the vacuum extraction duct 5 by the fixing screw 4, and the end portion of the base portion 11 to the groove portion 14 are fixed. Stopper lever 13 that engages with
It is pressed and fixed to the surface of the vacuum extraction duct 5 by the stopper 12 having the.

A sample is sent from the liquid chromatograph 31 shown in FIG. 1 through the tube 7 to each of the fine pore electrodes and the vaporizer 2 constituting the ionization electrode 3, and
A predetermined voltage is applied from a power source inside the main body housing 1 via the cable 8 and the connector 9. A power supply for a heater (not shown) provided in the carburetor 2 and a sensor wiring for measuring the temperature thereof are provided in the cable 8 and connected to the inside of the main body housing 1 via the connector 9. It Further, the groove portion 14 provided in the base portion 11 is formed in a substantially trapezoidal shape and is prevented from coming out upward in a state in which each fine pore electrode is engaged with the groove portion 14.

According to the first embodiment of the present invention described above, the disassembling work such as cleaning and replacement of the ionization electrode 3 and the vaporizer 2 which constitute the interface mechanism is performed by the fixing screw 4.
By removing the stopper 12 and the stopper 12, the plurality of fine pore electrodes forming the ionization electrode 3 can be easily slid in the groove 14 individually. Also,
Subsequent assembling work can also be performed by surely aligning each member by sliding each member in the groove portion 14 without paying attention to the alignment.

FIG. 4 is a perspective view showing the structure of the interface mechanism of the mass spectrometer according to the second embodiment of the present invention, and FIG. 5 is an exploded view of the interface mechanism of FIG. 4 and 5, 21 is a groove portion, 22 is a pedestal portion,
Reference numeral 23 is a support rod, and other reference numerals are the same as those in FIGS. 2 and 3.

The interface mechanism of the mass spectrometer according to the second embodiment of the present invention shown in FIGS. 4 and 5 is another example in which the present invention is applied to the ESI interface mechanism. As a structure in which the hole electrode is attached by the support rod 23 on the pedestal portion 22 having a substantially square pole shape, the pedestal portion 22 is placed on the groove portion 21 provided on the flat plate 16 of the main body housing 1.

That is, the ionization electrode 3 of the interface mechanism of the mass spectrometer according to the second embodiment of the present invention is configured such that each fine pore electrode is attached by the support rod 23 on the pedestal portion 22 having a substantially square prism shape. The pedestal portion 22 is placed in the groove portion 21 provided on the plane plate 16 of the main body housing 1. Then, as shown in FIG. 5, each of the micropore electrodes forming the ionization electrode 3 is slidable in the groove portion 21 provided in the flat plate 16 of the main body housing 1 and is removable upward. At the same time, by placing each fine hole electrode in the groove portion 21, the central fine hole can be aligned. Further, in use, each of the micropore electrodes constituting the ionization electrode 3 is fixed to the surface of the vacuum extraction duct 5 by the fixing screw 4, and the vacuum extraction duct is fixed by the stopper 12 engaging with the groove 21. It is pressed against the surface of No. 5 and fixed.

As in the case of the first embodiment, each pore electrode and vaporizer 2 forming the ionization electrode 3 are provided with
A predetermined voltage is applied from the power supply inside the main body housing 1 via the cable 8 and the connector 9, power is supplied to the heater, and the signal of the temperature measuring sensor is also sent via this cable. Further, also in the example shown in FIGS. 4 and 5, the micro switch 19 that engages with the front lid 20 is provided, and the micro switch 19 operates in the same manner as the embodiment described with reference to FIGS. 2 and 3. Further, in the example shown in FIGS. 4 and 5, the fine pore electrodes provided on the vacuum extraction duct 5 side of the fine pore electrodes constituting the ionization electrode 3 are directly attached to the vacuum extraction duct 5. The hole electrode may be detachable by being attached to the pedestal portion by a support rod like other pore electrodes.

The same effects as in the case of the first embodiment can be obtained also by the second embodiment of the present invention described above.

FIG. 6 is a perspective view showing the structure of the interface mechanism of the mass spectrometer according to the third embodiment of the present invention, and FIG. 7 is an exploded view of the interface mechanism of FIG. The reference numerals in FIGS. 6 and 7 are the same as those in FIG.

The interface mechanism of the mass spectrometer according to the third embodiment of the present invention shown in FIGS. 6 and 7 is an example in which the present invention is applied to the APCI interface mechanism, and the first embodiment of the present invention described above is used. In the same manner as in the above case, the ionization electrode 3 is not disk-shaped but has a rectangular lower end, and the groove portion 1 of the pedestal portion 11 provided on the flat plate 16 of the main body housing 1.
4, the carburetor 2 and the atomizer 6 are not columnar but have a rectangular lower end, and a groove portion of the base 11 provided on the plane plate 16 of the main body housing 1. It has a shape that engages with 14.

That is, in the interface mechanism of the mass spectrometer according to the third embodiment of the present invention, each micropore electrode constituting the ionization electrode 3 is on the plane plate 16 of the main body housing 1 having the display 15. Groove portion 1 of the base portion 11 provided in the
4 has a rectangular lower end so that the groove 14
Is configured to engage with. Then, as shown in FIG. 7, each of the micropore electrodes constituting the ionization electrode 3 is slidable while being guided by the groove portion 14 provided in the base 11, and each of the micropore electrodes is engaged in the groove portion 14. Positioning of the central pores is possible by being mounted together.

Further, the vaporizer 2 and the atomizer 6 also have a rectangular lower end so as to engage with the groove portion 14 of the base portion 11 provided on the plane plate 16 of the main body casing 1, and the groove portion. Groove portion 14 formed in the base portion 11 and configured to engage with 14
The carburetor 2 is slidable while being guided by
By placing the atomizer 6 in the groove 14 in an engaging manner, the positions of the central holes can be aligned with each other, and the fine holes of the fine pore electrodes forming the ionization electrode 3 can be aligned with each other. It is also possible to align.

In the state of use, each of the micropore electrodes constituting the ionization electrode 3 is fixed to the surface of the vacuum extraction duct 5 by the fixing screw 4 as a whole.
Further, the vaporizer 2 and the atomizer 6 have a stopper 1 having a stopper lever 13 that engages with the groove 14 from the end of the base 11.
It is pressed and fixed to the ionization electrode 3 by 2.

The main body housing 1 is connected to each of the micropore electrodes constituting the ionization electrode 3 via the cable 8 and the connector 9.
A predetermined voltage is applied from an internal power source, and the vaporizer 2 and the atomizer 6 are supplied with power for heating them to a predetermined temperature from the power source inside the main body casing 1 via a cable 8. However, these are the same as in the case of the first and second embodiments described above, and the microswitch 19 also functions similarly. Further, the groove portion 14 provided in the base portion 11 is
It is formed in a substantially trapezoidal shape so that it does not come out upward when the fine pore electrodes, the vaporizer 2, and the atomizer 6 are engaged with the groove portion 14.

According to the above-described third embodiment of the present invention, the disassembling work for cleaning and replacing the ionization electrode 3, the vaporizer 2 and the atomizer 6 which constitute the interface mechanism,
By removing the fixing screw 4 and removing the stopper 12, it is possible to easily carry out by individually sliding the plurality of pore electrodes constituting the ionization electrode 3, the vaporizer 2, and the atomizer 6 in the groove portion 14. . Further, the subsequent assembling work can be performed by surely aligning each member by sliding each member in the groove portion 14 without paying attention to the alignment.

FIG. 8 is a perspective view showing the structure of the interface mechanism of the mass spectrometer according to the fourth embodiment of the present invention, and FIG. 9 is an exploded view of the interface mechanism of FIG. The reference numerals in FIGS. 8 and 9 are the same as those in FIG.

The interface mechanism of the mass spectrometer according to the fourth embodiment of the present invention shown in FIGS. 8 and 9 is another example in which the present invention is applied to the APCI interface mechanism.
Each of the micropore electrodes constituting the ionization electrode 3 has a structure in which it is attached by a support rod 23 on a pedestal portion 22 having a substantially square pole shape, and the vaporizer 2 and the atomizer 6 also have a support rod on the pedestal portion 22 having a substantially square pole shape. As a structure attached by 23, these are configured by placing a pedestal portion 22 on a groove portion 21 provided on the plane plate 16 of the main body housing 1.

That is, the ionization electrode 3 of the interface mechanism of the mass spectrometer according to the second embodiment of the present invention is configured such that each fine pore electrode is attached by the support rod 23 on the pedestal portion 22 having a substantially square prism shape. The pedestal portion 22 is placed in the groove portion 21 provided on the plane plate 16 of the main body housing 1. Further, the vaporizer 2 and the atomizer 6 are also configured by being attached by a support rod 23 on a pedestal portion 22 having a substantially rectangular prism shape, and the pedestal portion 22 is provided in a groove portion 21 provided on the plane plate 16 of the main body housing 1. Placed.

As shown in FIG. 9, each of the fine pore electrodes, the vaporizer 2, and the atomizer 6 which compose the ionization electrode 3 slides in the groove portion 21 provided in the plane plate 16 of the main body casing 1. Possibly and removable upward, and by placing each pore electrode, vaporizer 2 and atomizer 6 in the groove portion 21, the pores provided at the center of each member are Alignment is possible. Further, in the use state, each micropore electrode constituting the ionization electrode 3 is fixed to the surface of the vacuum extraction duct 5 by the fixing screw 4. Further, the vaporizer 2 and the atomizer 6 may be attached to the ionization electrode 3 with fixing screws not shown. Also, the vaporizer 2 and the atomizer 6 are installed in the groove 21 between the pedestal 22 of the atomizer 6 and the edge of the groove 21 such that fasteners or the like are pressed against the ionization electrode 3 side. You may fix it.

As in the case of the third embodiment, each of the micropore electrodes forming the ionization electrode 3 has a cable 8,
A predetermined voltage is applied from a power source inside the main body casing 1 via the connector 9, and the vaporizer 2 and the atomizer 6 are connected to the cable 8,
Power for heating these to a predetermined temperature is supplied from a power source inside the main body casing 1 via the connector 9. Also, the microswitch 19 functions similarly to the case of the other embodiments. In the examples shown in FIGS. 8 and 9, the fine pore electrodes provided on the vacuum extraction duct 5 side of the fine pore electrodes forming the ionization electrode 3 are directly attached to the vacuum extraction duct 5. The hole electrode is also
It may be detachable by being attached to the pedestal portion by a support rod like other pore electrodes.

The same effects as in the case of the third embodiment can be obtained also by the above-described fourth embodiment of the present invention.

FIG. 10 is a view for explaining the structure of a connector for connecting the interface mechanism described above and the internal equipment of the main body housing 1. In FIG. 10, 91 is a locking claw, 92 is a connector pin, 93 is a jumper wire, and 94, 9
5 is a heater and 96 is a sensor.

As described above, during maintenance such as disassembly and assembly of the interface mechanism 8, the interface mechanism is removed from the main body housing 1. At this time, the heater, the sensor, and the components provided in the interface mechanism are connected. In the cable, the connector 9 is removed from the receiving side provided in the main body housing 1. That is, the interface mechanism, the cable 8 and the connector 9 are in one-to-one correspondence. As shown in FIG. 10A, two heaters 94 and 95 are connected to the connector 9 via a stranded wire, and a temperature sensor 96 such as a thermocouple or a thermistor.
Are connected. Although not shown in FIG. 10, wiring for applying a high voltage to the ionization electrode may be connected.

As shown in FIG. 10B, the connector 9 has a plurality of connector pins 92, 15 connector pins 92 in the illustrated example.
It is provided in a matrix arrangement of × 5, and a pair of connector pins 92 is assigned to each of the two heaters 94 and 95, the temperature sensor 96, and the high voltage wiring (not shown). The remaining pair of connector pins 92 are short-circuited by jumpers. The connector 9 is shown in FIG.
As can be seen from the side view of the connector 9 shown in FIG. 0 (c), a lock claw 91 is provided so as not to come off when connected to the receiving side provided in the main body housing 1.

As described above, there are various types of interface mechanisms of the mass spectrometer, and those interface mechanisms are replaced with the same main body housing 1 to replace the main body housing 1 with each other. The main components of the mass spectrometer configured inside the can be commonly used. The cable 8 and the connector 9 connected to the interface mechanism are associated with the interface mechanism as described above, but the shape of the connector 9 is common to various system interface mechanisms, and the heaters 94 and 9 are used.
5. The positions of the connector pins to which the temperature sensor and the like are connected are also the same.

On the other hand, the position of the connector pin 92 short-circuited by the jumper wire 93 is different depending on the method of the interface mechanism. As a result, the main body housing 1
The main components of the mass spectrometer configured inside the
It is possible to know the type of the interface mechanism attached, supply power to the heater corresponding thereto, control internal equipment, and perform display control on the display 33 of the personal computer 32.

11 to 13 are views showing an example in which, when the interface mechanism is attached, the type of the interface mechanism is determined by the action of the jumper wire described above, and the operating state of the interface mechanism is displayed on the display 33. is there.

Now, assume that an ESI interface mechanism is attached to the main body housing 1 as an interface mechanism. Then, the position of the connector pin 92 in which the jumper wire 92 is short-circuited as described above identifies the attached interface mechanism as the ESI interface mechanism, and as shown in FIG. 11, the mass spectrometer having the ESI interface mechanism is identified. Is displayed, the voltage value of each part is displayed, and the temperature of each part is displayed. As for the display of the temperature, the set temperature and the measured temperature of the member in the actually operating state are displayed for one member.

The attached interface mechanism is A
With the PCI interface mechanism, the display as shown in FIG. 12 is performed as in the case of FIG. Although not described as an embodiment, when an SSI interface mechanism is attached, a display as shown in FIG. 13 is displayed.

In the above description, when the set temperature displayed for one member matches the measured temperature, for example, one of the displays is blinked, the color is changed, black and white are reversed, or the color is changed. It is possible to make the display easier to identify by reversing and blinking the black and white instead, and this can prompt the start of use of the device. Further, when the set temperature and the measured temperature are far apart from each other, for example, both displays can be simultaneously changed to the above-described displays to indicate that the apparatus is not in a usable state.

FIG. 14 is a diagram for explaining an example of using the vacuum pump in the mass spectrometer according to the present invention, and FIG. 15 is a diagram for explaining the arrangement of the two vacuum pumps inside the main body housing 1. 14 and 15, 24 and 25 are vacuum chambers,
26 is a turbo molecular vacuum pump, 27 is a scroll vacuum pump, 28 is an operating unit, and 29 is an indicator.

FIG. 14 is a simplified drawing of a vacuum chamber 25 in which the mass spectrometric section housed in the main body housing 1 is arranged and a vacuum chamber 24 formed in the ionization electrode 3. In the present invention, as shown in FIG. 14, the vacuum chamber 25 constituting the mass spectrometric section is evacuated to a vacuum by a turbo molecular vacuum pump 26, and is formed in the ionization electrode 3. The inside of the vacuum chamber 24 is evacuated by a scroll vacuum pump 27. further,
The scroll vacuum pump 27 is a turbo molecular vacuum pump 2
It is also connected to the exhaust side of the turbo molecular vacuum pump 26 so that the exhaust pressure of 6 can be exhausted.

Generally, another vacuum pump is required for exhausting the exhaust pressure of the turbo molecular vacuum pump, and the mass spectrometer has conventionally required three vacuum pumps. As described above, the scroll vacuum pump 27 provided for the vacuum chamber 24 formed in the ionization electrode 3 is also configured to be used for exhausting the exhaust pressure of the turbo molecular vacuum pump. The number of vacuum pumps required for the above can be reduced to two, and the cost can be reduced due to the reduction of the number of parts of the entire apparatus, and the apparatus can be downsized and lightened.

The above-mentioned two vacuum pumps 26 and 27 are
As shown in FIG. 15, it is housed inside the main body housing 1. That is, the turbo molecular vacuum pump 26 is arranged on the front side of the front face of the main body casing 1, and on the bottom face of the right casing in the illustrated example. The transparent window 18 described with reference to FIG. 1 is provided at the front position of the main body casing 1 of the hydraulic oil amount indicator 29, and the turbo molecular vacuum pump 2 is provided.
An unillustrated fuel filler port 6 is located at the position of the door 10 provided on the side surface of the main body housing 1. The turbo molecular vacuum pump 26 is detachably attached to the main body housing 1. Further, the scroll pump 27 is attached to the ceiling of the main body casing 1 so as to be directly coupled to the vacuum chamber formed in the ionization electrode 3 at approximately the center on the front side of the main body casing 1. ing.

In the above description, the two vacuum pumps are described as the turbo molecular vacuum pump and the scroll vacuum pump, but any type of vacuum pump may be used as the vacuum pump. Further, the operation unit 28 shown in FIG.
Is a power switch and the like, and as described with reference to FIG. 1, it can be operated by opening a door 10 ′ provided on the front surface side of the main body housing 1.

As described above, according to the present invention, since two vacuum pumps are housed inside the main body housing 1, noise generated from the device can be reduced. In addition, since the large turbo molecular vacuum pump 26 is configured to be removable, it can be easily transported by simply removing the turbo molecular vacuum pump 26 when delivering the device, It can be easily assembled.

[0077]

As described above, according to the present invention, the disassembling work for cleaning and exchanging the members such as the ionization electrode, the vaporizer, the atomizer and the like which constitute the interface mechanism of the mass spectrometer can be easily performed. Further, the subsequent assembling work can be surely performed by aligning the positions without paying attention to the alignment.

Further, according to the present invention, a jumper wire for short-circuiting a cable for supplying heating power to the interface mechanism and a connector pin of a connector for connecting the inside of the housing is provided, and the jumper wire is selected according to the type of the interface mechanism. Since the positions of the connector pins that are short-circuited are changed by this, it is possible to know the method of the interface mechanism that is attached, and to supply the corresponding electric power to the heater, control the internal equipment, and control the personal computer 32. Display control on the display 33 can be performed.

Further, according to the present invention, the scroll vacuum pump provided for the vacuum chamber formed in the ionization electrode is a turbo molecular vacuum pump provided for the vacuum chamber in which the mass spectrometric section is arranged. Since it is also configured to be used for exhausting the exhaust pressure, the number of vacuum pumps required for the mass spectrometer can be reduced to two, and the cost can be reduced and the size of the device can be reduced by reducing the number of parts of the entire device. Therefore, the weight can be reduced.

Further, according to the present invention, since two vacuum pumps are housed inside the main body casing, noise generated from the apparatus can be reduced, and a large turbo molecular vacuum chamber can be obtained. Since the pump is configured to be removable, when the device is delivered, it can be easily transported by simply removing the turbo molecular vacuum pump, and it is also possible to easily assemble it on site. .

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of a mass spectrometer according to the present invention.

FIG. 2 is a perspective view showing a configuration of an interface mechanism of the mass spectrometer according to the first embodiment of the present invention.

3 is an exploded view of the interface mechanism of FIG.

FIG. 4 is a perspective view showing a configuration of an interface mechanism of a mass spectrometer according to a second embodiment of the present invention.

5 is an exploded view of the interface mechanism of FIG.

FIG. 6 is a perspective view showing a configuration of an interface mechanism of a mass spectrometer according to a third embodiment of the present invention.

FIG. 7 is an exploded view of the interface mechanism of FIG.

FIG. 8 is a perspective view showing a configuration of an interface mechanism of a mass spectrometer according to a fourth embodiment of the present invention.

9 is an exploded view of the interface mechanism of FIG.

FIG. 10 is a diagram illustrating a configuration of a connector that connects the interface mechanism and an internal device of the main body housing.

FIG. 11: When the interface mechanism is installed,
It is a figure which shows the example in which the operating state of the interface mechanism was displayed on the display.

FIG. 12: When the interface mechanism is installed,
It is a figure which shows the example in which the operating state of the interface mechanism was displayed on the display.

FIG. 13: When the interface mechanism is installed,
It is a figure which shows the example in which the operating state of the interface mechanism was displayed on the display.

FIG. 14 is a diagram illustrating a usage example of a vacuum pump in the mass spectrometer according to the present invention.

FIG. 15 is a view for explaining the arrangement of two vacuum pumps inside the main body casing.

FIG. 16 is a perspective view showing a configuration of an ESI interface mechanism of a mass spectrometer according to a conventional technique.

[Explanation of symbols]

1 Main body case 2 vaporizer 3 Ionization electrode 4, 4'fixing screws 5 Vacuum extraction duct 6 atomizer 7 tubes 8 cables 9 connectors 10, 10 'door 11 stand 12 stopper 13 Stopper lever 14 Groove 15 Indicator 16 flat plate 17 Top plate 17 'Dimple on top plate 18 transparent window 19 micro switch 20 Front lid 20 'cover 21 groove 22 Pedestal 23 Support rod 24, 25 vacuum chamber 26 Turbo molecular vacuum pump 27 Scroll vacuum pump 28 Operation part 29 Indicator 31 Liquid Chromatograph 32 personal computer (PC) 33 display 34 keyboard 35 mice 36 desks 91 Lock claw 92 Connector pin 93 jumper wire 94, 95 heater 96 sensor

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tadao Mimura 882 Ichige, Hitachinaka City, Ibaraki Prefecture Hitachi Ltd. Measuring Instruments Division (56) References JP-A-1-134847 (JP, A) JP-A-4 -2033 (JP, A) Actually opened 54-166390 (JP, U) Actually opened 63-134448 (JP, U) Actually opened 55-118472 (JP, U) JP-B 35-5841 (JP, B1) ) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01J 49/00-49/42

Claims (16)

(57) [Claims] 1. An interface mechanism comprising a vaporizer for vaporizing a sample to be analyzed and an ionization electrode having a pore in its center, and mass analysis of ionized sample particles from the interface mechanism. In the mass spectrometer configured by a mass spectrometer, the ionization electrode has a plurality of shapes having a rectangular lower end and a shape that engages with a groove of a base provided on a plane plate of the main body housing. A mass spectroscope characterized in that it is composed of the fine pore electrode of. 2. The plurality of pore electrodes are slidably engaged in the groove.
The described mass spectrometer. 3. The plurality of micropore electrodes are combined with each other by a fixing screw or a stopper engaging with a groove of the pedestal to form an ionization electrode when used. The mass spectrometer according to claim 1. 4. The mass spectrometer according to claim 1, wherein the plurality of pore electrodes are aligned with each other while being engaged with each other in the groove. 5. An interface mechanism composed of a vaporizer for vaporizing a sample to be analyzed and an ionization electrode having a pore in its center, and mass analysis of ionized sample particles from the interface mechanism. In a mass spectrometer configured with a mass spectrometric section, the ionization electrode is composed of a plurality of micropore electrodes attached by a supporting rod on a pedestal section having a substantially rectangular column shape, and is provided on a flat plate of a main body housing. A mass spectroscope characterized in that the pedestal is placed on a groove formed therein. 6. The mass spectrometer according to claim 5, wherein the pedestal portion supporting the plurality of pore electrodes is slidably mounted in the groove portion. 7. The mass spectrometer according to claim 5, wherein, when the plurality of pore electrodes are used, the plurality of pore electrodes are combined by a fixing screw to form an ionization electrode. 8. The plurality of pore electrodes are aligned with each other in a state where the pedestal portion is placed in the groove portion, and the plurality of pore electrodes are aligned with each other. Mass spectrometer. 9. An interface mechanism comprising an atomizer for atomizing a sample to be analyzed, a vaporizer for vaporizing the atomized sample, and an ionization electrode having a hole in the center thereof, and the interface. In a mass spectrometer configured with a mass analyzer that performs mass analysis of ionized sample particles from a mechanism, the ionization electrode is composed of a plurality of pore electrodes, the plurality of pore electrodes, an atomizer, The carburetor is a mass spectrometer characterized in that the lower end has a rectangular shape and has a shape that engages with a groove portion of a pedestal portion provided on a plane plate of the main body housing. 10. The mass spectrometer according to claim 7, wherein the plurality of pore electrodes, the atomizer, and the vaporizer are slidably engaged in the groove. 11. The plurality of pore electrodes, the atomizer, and the vaporizer are connected to each other by a fixing screw or a stopper that engages with a groove portion of the base during use. 7. The mass spectrometer according to 7. 12. The plurality of pore electrodes, the atomizer, and the vaporizer are aligned with each other while being engaged with each other in the groove portion. 1
1. The mass spectrometer according to 1. 13. An atomizer for atomizing a sample to be analyzed,
A vaporizer for vaporizing an atomized sample, and an interface mechanism composed of an ionization electrode having a pore in the center, and a mass spectrometric section for performing mass analysis of ionized sample particles from the interface mechanism. In the mass spectrometer configured by the above, the ionization electrode is composed of a plurality of pore electrodes, and the plurality of pore electrodes, the atomizer, and the vaporizer are attached by a support rod on a pedestal portion having a substantially rectangular column shape. The mass spectroscope is characterized in that the pedestal is mounted on a groove provided on the plane plate of the main body casing. 14. The mass according to claim 10, wherein a pedestal portion supporting the plurality of pore electrodes, the atomizer, and the vaporizer is slidably mounted in the groove portion. Analysis equipment. 15. The mass spectrometer according to claim 11, wherein the plurality of pore electrodes, the atomizer, and the vaporizer are connected by a fixing screw during use. 16. The plurality of pore electrodes, the atomizer, and the vaporizer are aligned with each other with the pedestal portion placed in the groove portion. 1
The mass spectrometer according to 3, 14, or 15.