JP3490217B2 - Heat-resistant electrode and ion carburizing furnace using the same - Google Patents
Heat-resistant electrode and ion carburizing furnace using the sameInfo
- Publication number
- JP3490217B2 JP3490217B2 JP10320496A JP10320496A JP3490217B2 JP 3490217 B2 JP3490217 B2 JP 3490217B2 JP 10320496 A JP10320496 A JP 10320496A JP 10320496 A JP10320496 A JP 10320496A JP 3490217 B2 JP3490217 B2 JP 3490217B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- heat
- resistant
- electrode portion
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、真空装置に用いら
れる電極とその電極を用いたイオン浸炭炉にかかり、特
に、真空装置内で高温に曝される耐熱電極とその耐熱電
極を用いたイオン浸炭炉に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode used in a vacuum apparatus and an ion carburizing furnace using the electrode, and more particularly to a heat-resistant electrode exposed to high temperature in a vacuum apparatus and an ion using the heat-resistant electrode. Regarding carburizing furnace.
【０００２】[0002]
【従来の技術】近年では、鋼材等の金属材料の表面硬度
を増す方法として、処理対象物を炭化水素系ガス雰囲気
に置き、陽極との間にグロー放電を発生させ、処理対象
物にイオン化した炭素を打ち込んで表面処理を行う技術
が広く用いられている。そのような表面処理方法は一般
にイオン浸炭技術と呼ばれているが、それに用いられる
従来技術のイオン浸炭炉を図３の符号１５０に示して説
明する。2. Description of the Related Art In recent years, as a method of increasing the surface hardness of a metal material such as steel, an object to be treated is placed in a hydrocarbon gas atmosphere, a glow discharge is generated between it and an anode, and the object to be treated is ionized. The technique of implanting carbon and performing surface treatment is widely used. Such a surface treatment method is generally called an ion carburizing technique, and a conventional ion carburizing furnace used therefor is described with reference numeral 150 in FIG.
【０００３】該イオン浸炭炉１５０は、チャンバ１５３
を有しており、該チャンバ１５３内には中空の断熱容器
１５４が設けられている。このチャンバ１５３底面に
は、電極１０１がチャンバ１５３と電気的に絶縁した状
態で気密に固定されており、また、該電極１０１は断熱
容器１５４に非接触の状態で挿通され、断熱容器１５４
内に上端部分が突き出るようにされている。電極１０１
の上端部分にはトレイ１０３が設けられており、該トレ
イ１０３上に、処理対象物を搭載した治具１０２を載置
できるように構成されている。The ion carburizing furnace 150 includes a chamber 153.
A hollow heat insulating container 154 is provided in the chamber 153. On the bottom surface of the chamber 153, the electrode 101 is airtightly fixed in a state of being electrically insulated from the chamber 153, and the electrode 101 is inserted into the heat insulating container 154 in a non-contact state, and the heat insulating container 154 is provided.
The upper end is projected inside. Electrode 101
A tray 103 is provided at the upper end portion of the device, and a jig 102 having a processing object mounted thereon can be placed on the tray 103.
【０００４】断熱容器１５４の内周囲には、ヒーター１
５７が設けられ、該ヒーター１５７と治具１０２との間
に配置されたガス導入パイプ１５５から、ガスボンベ１
５９内に充填された処理ガスを導入できるようにされて
いる。A heater 1 is provided around the inside of the heat insulating container 154.
57 is provided, and the gas cylinder 1 is connected from the gas introduction pipe 155 arranged between the heater 157 and the jig 102.
The processing gas filled in 59 can be introduced.
【０００５】断熱容器１５４は電気導電性物質で構成さ
れており、グラウンド電位に接続されている。このイオ
ン浸炭炉１５０では、断熱容器１５４内を処理ガス雰囲
気にした後、電極１０１に負電圧を印加して処理対象物
にグロー放電を起こさせると処理ガスが分解され、処理
対象物に炭素イオンがイオンボンバードされ、その表面
を熱歪みなく浸炭できるものである。The heat insulating container 154 is made of an electrically conductive material and is connected to the ground potential. In the ion carburizing furnace 150, after the inside of the heat insulating container 154 is set to the processing gas atmosphere, a negative voltage is applied to the electrode 101 to cause glow discharge to the processing object, the processing gas is decomposed, and carbon ions are added to the processing object. Is ion bombarded, and its surface can be carburized without thermal distortion.
【０００６】上記イオン浸炭炉１５０に用いられる電極
１０１は、処理対象物がヒーター１５７で加熱される際
に温度上昇してしまう。そして電極１０１が高温になっ
た場合には、該電極１０１とチャンバ１５３との間に設
けられた真空シール材が劣化し、チャンバ１５３の気密
性や電気的絶縁性が悪化してしまう。The temperature of the electrode 101 used in the ion carburizing furnace 150 rises when the object to be treated is heated by the heater 157. Then, when the temperature of the electrode 101 rises, the vacuum sealing material provided between the electrode 101 and the chamber 153 deteriorates, and the airtightness and electrical insulation of the chamber 153 deteriorate.
【０００７】そのような真空シール材の劣化は、電極１
０１の内部に水路を設け、循環水を流して冷却すれば防
止することが可能である。しかしながらチャンバ１５３
内に循環水が漏れた場合には、イオン浸炭炉１５０の運
転を停止させ、長時間を要する修理を行う必要がある。
更にその後、チャンバ１５３内の雰囲気を元の高真空状
態に復帰させるまでに多大な時間を要してしまう。Such deterioration of the vacuum seal material is caused by the electrode 1
It is possible to prevent this by providing a water channel inside 01 and flowing circulating water to cool it. However, chamber 153
When the circulating water leaks into the interior, it is necessary to stop the operation of the ion carburizing furnace 150 and perform repairs that require a long time.
Furthermore, after that, it takes a lot of time to return the atmosphere in the chamber 153 to the original high vacuum state.
【０００８】また、水冷により電極１０１を冷却すると
電極１０１周囲にスーティング(すす)が生じ、陰極と陽
極(チャンバ)との短絡事故が発生する場合もあった。そ
こで従来技術においても、循環水によらず、パージガス
を流して冷却する電極が提案されていた。Further, when the electrode 101 is cooled by water cooling, sooting occurs around the electrode 101, which may cause a short circuit accident between the cathode and the anode (chamber). Therefore, also in the prior art, there has been proposed an electrode that cools by flowing a purge gas regardless of circulating water.
【０００９】そのような電極を、図４の符号１０１に示
す。この電極１０１は、キャップ１０６と、筒体１０８
と、金属柱１０９と、絶縁物１１０とを有している。該
絶縁物１１０は、フランジ部１１０1と円筒部１１０2と
で構成されており、フランジ部１１０1が大気中に位置
するようにしてチャンバ１５３に開けられた孔にはめ込
まれている。Such an electrode is shown at 101 in FIG. The electrode 101 includes a cap 106 and a cylindrical body 108.
And a metal pillar 109 and an insulator 110. The insulator 110 is composed of a flange portion 110 1 and a cylindrical portion 110 2, and is fitted into a hole formed in the chamber 153 so that the flange portion 110 1 is located in the atmosphere.
【００１０】円筒部１１０2は、断熱容器１５４に開け
られた孔に、環状絶縁物１２３を介してはめ込まれてお
り、その環状絶縁物１２３と円筒部１１０2との間に
は、互いの内部空間が連通するようにして筒体１０８が
はめ込まれている。前記金属柱１０９は、この円筒部１
１０2に気密に挿通されており、その上部が筒体１０８
内部に位置し、下部が大気中に位置し、電源に接続され
ている。The cylindrical portion 110 2 is fitted in a hole formed in the heat insulating container 154 via an annular insulator 123, and between the annular insulator 123 and the cylindrical portion 110 2 the inside of each other. The cylindrical body 108 is fitted so that the spaces communicate with each other. The metal column 109 has the cylindrical portion 1
10 2 is airtightly inserted, and the upper part thereof is the cylindrical body 108.
Located inside, with the lower part in the atmosphere and connected to the power supply.
【００１１】金属柱１０９の上部の先端には、筒体１０
８と隙間を存してキャップ１０６が被せられている。ま
た、円筒部１１０2と金属柱１０９との間は隙間を存す
るように構成されており、フランジ部１１０1に設けら
れたガス導入口１２１から矢印１２０1の方向にパージ
ガスを流すと、そのパージガスは円筒部１１０2と金属
柱１０９との間の隙間を通って筒体１０８内部に導入さ
れ、矢印１２０2の方向に上昇し、キャップ１０６と筒
体１０８との間の隙間から矢印１２０3の方向に流れ出
し、断熱容器１５４内に拡散する。この電極１０１で
は、そのようなパージガスの流れにより、水漏れの心配
なく金属柱１０９が冷却できるとするものである。At the tip of the upper part of the metal column 109, the cylindrical body 10
8 is covered with a cap 106 with a gap. Further, a gap is formed between the cylindrical portion 110 2 and the metal column 109, and when the purge gas is flowed in the direction of arrow 120 1 from the gas inlet 121 provided in the flange portion 110 1 , the purge gas Is introduced into the inside of the cylindrical body 108 through the gap between the cylindrical portion 110 2 and the metal column 109 and rises in the direction of the arrow 120 2 , and from the gap between the cap 106 and the cylindrical body 108 to the arrow 120 3 . And flows into the heat insulating container 154. In this electrode 101, the metal column 109 can be cooled by such a flow of the purge gas without fear of water leakage.
【００１２】[0012]
【発明が解決しようとする課題】しかしながら、パージ
ガスを使用する場合には、絶縁性を維持しながら金属柱
を冷却できるようにガス経路を形成する必要がある。そ
のため、電極の構造が複雑となり、製造コストが高くな
る。また、パージガスの使用量が増えるとランニングコ
ストも上昇してしまう。However, when the purge gas is used, it is necessary to form the gas passage so that the metal column can be cooled while maintaining the insulating property. Therefore, the structure of the electrode is complicated and the manufacturing cost is increased. Further, if the amount of purge gas used increases, the running cost also increases.
【００１３】更に、パージガスは、処理ガスとは別種の
不活性のガス(アルゴンガス等)を用いる必要があるが、
そのようなパージガスが断熱材内部に拡散された場合、
処理対象物周囲の処理ガス濃度が不均一になり、処理対
象物が治具に搭載された位置によって品質に差が生じて
しまうという問題がある。Further, as the purge gas, it is necessary to use an inert gas (argon gas or the like) different from the processing gas,
If such a purge gas diffuses inside the insulation,
There is a problem in that the concentration of the processing gas around the object to be processed becomes non-uniform, and the quality varies depending on the position where the object to be processed is mounted on the jig.
【００１４】本発明は上記従来技術の不都合を解決する
ために創作されたもので、その目的は、冷却水やパージ
ガスを必要としない耐熱電極、及びその耐熱電極を用い
たイオン浸炭炉を提供することにある。The present invention was created to solve the above-mentioned disadvantages of the prior art, and an object thereof is to provide a heat-resistant electrode that does not require cooling water or purge gas, and an ion carburizing furnace using the heat-resistant electrode. Especially.
【００１５】[0015]
【課題を解決するための手段】上記課題を解決するため
に、請求項１記載の発明は、真空槽の内部に置かれる処
理対象物に電圧を印加する耐熱電極であって、前記真空
槽の内部に互いに分離して配置された第１、第２電極部
と、前記真空槽の外部に配置され、前記第２電極部と電
気的に接続された第３電極部と、耐熱性絶縁材料で構成
された絶縁碍子とを有し、前記第１電極部は前記絶縁碍
子を介して前記真空槽に取り付けられ、前記第１、第２
電極部はリード線によって電気的に接続され、前記第３
電極部を電源に接続すると前記第１電極部から処理対象
物に電圧を印加できるように構成されたことを特徴とす
る。In order to solve the above-mentioned problems, the invention according to claim 1 is a heat-resistant electrode for applying a voltage to an object to be treated which is placed inside the vacuum chamber. A first and a second electrode part which are separately arranged inside, a third electrode part which is arranged outside the vacuum chamber and electrically connected to the second electrode part, and a heat resistant insulating material. And a first insulator part attached to the vacuum chamber via the insulator.
The electrode part is electrically connected by a lead wire,
When the electrode unit is connected to a power source, a voltage can be applied to the object to be processed from the first electrode unit.
【００１６】その場合、請求項２記載の発明のように、
前記リード線を絶縁筒で覆い、該リード線と前記第２電
極部とが接続された部分を絶縁ゴムで覆っておくことが
望ましい。In that case, as in the invention described in claim 2,
It is desirable that the lead wire be covered with an insulating tube, and the portion where the lead wire and the second electrode portion are connected be covered with insulating rubber.
【００１７】また、請求項４記載の発明は、請求項１乃
至請求項３のいずれか１項記載の耐熱電極であって、電
気的に絶縁した状態で前記真空槽に取り付けられたフラ
ンジを有し、該フランジに前記第２、第３電極部が電気
的に絶縁した状態で取り付けられ、該フランジに前記絶
縁碍子が設けられたことを特徴とする。The invention according to claim 4 is the heat-resistant electrode according to any one of claims 1 to 3, further comprising a flange attached to the vacuum chamber in an electrically insulated state. The second and third electrode portions are attached to the flange in an electrically insulated state, and the flange is provided with the insulator.
【００１８】更に、請求項５記載の発明は、請求項４記
載の発明であって、前記第２電極部と前記第３電極部と
がそれぞれ両面に設けられた端子台を有し、前記フラン
ジには真空槽外部に突き出る中空の連結手段が設けら
れ、該連結手段に前記端子台が固定されたことを特徴と
する。Further, the invention according to claim 5 is the invention according to claim 4, further comprising a terminal block on each of which the second electrode portion and the third electrode portion are provided, and the flange. Is provided with a hollow connecting means protruding outside the vacuum chamber, and the terminal block is fixed to the connecting means.
【００１９】請求項６記載の発明は、請求項１乃至請求
項５のいずれか１項記載の耐熱電極を有するイオン浸炭
炉であって、真空槽内部に配置された処理対象物を処理
ガス雰囲気に置き、該処理対象物と陽極との間にグロー
放電を発生させ、その表面処理を行うように構成された
ことを特徴とする。According to a sixth aspect of the present invention, there is provided an ion carburizing furnace having the heat-resistant electrode according to any one of the first to fifth aspects, wherein an object to be treated placed inside a vacuum chamber is treated with a processing gas atmosphere. It is characterized in that it is configured so that glow discharge is generated between the object to be treated and the anode and the surface treatment is performed.
【００２０】このような本発明の構成によれば、真空槽
内に配置される第１、第２電極部とを分離し、リード線
で電気的に接続し、第１電極部を耐熱性絶縁材料で構成
された絶縁碍子を介して真空槽に取り付けると共に、第
２電極部と電気的に接続された第３電極部を真空槽の外
部に配置したので、この第３電極部を電源に接続すると
第１電極部から真空槽の内部に配置される処理対象物に
電圧を印加することが可能となる。According to the structure of the present invention as described above, the first and second electrode portions arranged in the vacuum chamber are separated and electrically connected by the lead wire, and the first electrode portion is heat-resistant insulated. Since the third electrode part, which is electrically connected to the second electrode part, is arranged outside the vacuum tank while being attached to the vacuum chamber through the insulator made of material, the third electrode part is connected to the power source. Then, it becomes possible to apply a voltage from the first electrode portion to the processing object arranged inside the vacuum chamber.
【００２１】その際、第１、第２電極部が分離されてい
るので、第１電極部が高温になった場合でも第２電極部
に伝導される熱が少なく、第２電極部や第３電極部が高
温にならず、真空シール材が劣化せず、真空槽の気密性
や絶縁性が低下することがない。その場合、第１電極部
と第２電極部との間に絶縁性断熱材を配しておくと、第
１電極部側からの輻射による熱伝導も少なくすることが
できる。At this time, since the first and second electrode portions are separated, the heat conducted to the second electrode portion is small even when the temperature of the first electrode portion rises, and the second electrode portion and the third electrode portion The electrode portion does not reach a high temperature, the vacuum sealing material does not deteriorate, and the airtightness and insulating property of the vacuum chamber do not deteriorate. In that case, if an insulating heat insulating material is arranged between the first electrode portion and the second electrode portion, heat conduction due to radiation from the first electrode portion side can be reduced.
【００２２】また、このような耐熱電極では、負電位に
置かれる部材と周囲の部材との間で放電が発生しやすい
ので、負電位に置かれる部材を絶縁物で覆っておくか、
周囲の部材との間の距離を離しておく必要がある。上記
構造の耐熱電極では、第１電極部にリード線が接続され
る部分は、絶縁碍子天井付近に位置させ、周囲の部材と
離すことができるので、第１電極部と周囲の部材とは放
電を起こさないが、リード線と周囲の部材とが近接する
ため、リード線全体を絶縁筒で覆っておくとよい。Further, in such a heat-resistant electrode, since discharge easily occurs between a member placed at a negative potential and surrounding members, it is necessary to cover the member placed at a negative potential with an insulator.
It is necessary to keep a distance from surrounding members. In the heat-resistant electrode having the above structure, the portion to which the lead wire is connected to the first electrode portion can be located near the insulator ceiling and can be separated from the surrounding member, so that the first electrode portion and the surrounding member are not discharged. However, since the lead wire and the surrounding members are close to each other, it is preferable to cover the entire lead wire with an insulating tube.
【００２３】また、リード線を第２電極部に接続するた
めに、第２電極部の先端部分は絶縁材料で覆っておくこ
とができないので、リード線を接続した後、その接続部
分の周囲を絶縁ゴムで覆っておくと、放電の発生を防止
できる。Further, since the tip portion of the second electrode portion cannot be covered with an insulating material in order to connect the lead wire to the second electrode portion, after connecting the lead wire, the periphery of the connection portion is closed. If covered with insulating rubber, the occurrence of electric discharge can be prevented.
【００２４】更に、電気的に絶縁した状態で前記真空槽
に取り付けられたフランジに、前記第２、第３電極部を
電気的に絶縁した状態で取り付けると共に、そのフラン
ジに絶縁碍子を設けるようにすると、二重の絶縁性を得
ることができ、信頼性が向上して好ましい。Further, the second and third electrode portions are attached to the flange attached to the vacuum chamber in an electrically insulated state in an electrically insulated state, and the flange is provided with an insulator. Then, double insulation can be obtained, and reliability is improved, which is preferable.
【００２５】そのフランジに真空槽外部に突き出る中空
の連結手段を設けた場合、第２電極部と前記第３電極部
とを両面に設けた端子台を連結手段に固定するようにす
れば、製造が容易となって好ましい。When the flange is provided with a hollow connecting means projecting to the outside of the vacuum chamber, the terminal block having the second electrode portion and the third electrode portion provided on both sides is fixed to the connecting means. Is preferable because it is easy.
【００２６】上記構成の耐熱電極を陰極に用い、処理対
象物を処理ガス雰囲気に置いて負電圧を印加すれば、陽
極との間にグロー放電が発生し、生成した陽イオンが処
理対象物に打ち込まれるので、その表面処理を行うこと
が可能となる。When the heat-resistant electrode having the above structure is used as the cathode and the object to be processed is placed in a processing gas atmosphere and a negative voltage is applied, glow discharge is generated between it and the anode, and the generated cations are applied to the object to be processed. Since it is driven in, the surface treatment can be performed.
【００２７】[0027]
【発明の実施の形態】本発明の実施の形態を図面を用い
て説明する。図１の符号１で示すものは、本発明の耐熱
電極の一例であり、図２の符号５０で示す、本発明のイ
オン浸炭炉の一例の装置に用いられている。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. The reference numeral 1 in FIG. 1 is an example of the heat-resistant electrode of the present invention, and is used in the apparatus of an example of the ion carburizing furnace of the present invention shown by the reference numeral 50 in FIG.
【００２８】このイオン浸炭炉５０は真空槽５３を有し
ており、該真空槽５３内には電気導電性物質で構成され
た断熱容器５４が設けられている。真空槽５３の底面は
開放されており、その端部５２はつば状に成形されてい
る。The ion carburizing furnace 50 has a vacuum tank 53, and in the vacuum tank 53, a heat insulating container 54 made of an electrically conductive substance is provided. The bottom of the vacuum chamber 53 is open, and its end 52 is shaped like a brim.
【００２９】耐熱電極１は、第１電極部９と、第２電極
部４と、第３電極部５と、絶縁碍子１０と、フランジ１
９とを有している。該耐熱電極１は、そのフランジ１９
が絶縁座１４を介して前記端部５２下面に配置され、絶
縁筒１５を介して挿通されたねじ２３によってねじ止め
固定されており、フランジ１９が真空槽５３を電気的に
絶縁した状態で閉塞するように構成されている。The heat-resistant electrode 1 includes a first electrode portion 9, a second electrode portion 4, a third electrode portion 5, an insulator 10, and a flange 1.
9 and 9. The heat-resistant electrode 1 has its flange 19
Is disposed on the lower surface of the end portion 52 via the insulating seat 14 and is fixed by screwing with the screw 23 inserted through the insulating cylinder 15, and the flange 19 closes the vacuum chamber 53 in an electrically insulated state. Is configured to.
【００３０】このフランジ１９裏面には、連結手段２１
が真空槽５３の外側に張り出して設けられており、その
端部２９はつば状に成形され、金属製の端子台２０がね
じ止め固定されている。On the rear surface of the flange 19, a connecting means 21 is provided.
Is provided so as to project to the outside of the vacuum chamber 53, the end 29 of which is formed in a brim shape, and the metal terminal block 20 is fixed by screwing.
【００３１】端子台２０と端部２９の間と、フランジ１
９と端部５２との間にはそれぞれパッキング２２、１３
が設けられており、図示しない真空ポンプを起動して真
空槽５３内を真空排気すれば、該真空槽５３内を高真空
状態にできるように構成されている。また、連結手段２
１が位置するフランジ１９の表面上には、耐熱性絶縁材
料が中空円錐台形状に成形されて成る絶縁碍子１０が配
置されており、その内部空間と連結手段２１の内部空間
とが連通するようにして固定されている。Between the terminal block 20 and the end 29 and the flange 1
Between the 9 and the end 52 are packings 22, 13 respectively.
Is provided, and by activating a vacuum pump (not shown) to evacuate the inside of the vacuum chamber 53, the inside of the vacuum chamber 53 can be brought to a high vacuum state. Also, the connecting means 2
On the surface of the flange 19 where 1 is located, an insulator 10 formed by molding a heat-resistant insulating material into a hollow truncated cone shape is arranged. It has been fixed.
【００３２】絶縁碍子１０の上部には、第１電極部９が
挿通され、その下端部分が絶縁碍子１０内部でフランジ
１９と離間して位置するように固定されている。また、
その上端部分は、絶縁碍子１０上に配置された絶縁性材
料で構成された略円筒形形状の支柱座８に差し込まれて
いる。該支柱座８の上部には中央に孔が開けられた絶縁
板７が設けられており、断熱容器５４の支柱座８の上方
に位置する部分には孔が開けられており、支柱座８内
に、該絶縁板７と断熱容器５４の孔を介して支柱６bが
挿入されている。The first electrode portion 9 is inserted into the upper portion of the insulator 10 and is fixed so that the lower end portion thereof is located inside the insulator 10 so as to be separated from the flange 19. Also,
The upper end portion is inserted into a pillar seat 8 having a substantially cylindrical shape and made of an insulating material and disposed on the insulator 10. An insulating plate 7 having a hole in the center is provided at an upper portion of the support seat 8, and a portion of the heat insulating container 54 located above the support seat 8 is provided with a hole. The column 6b is inserted through the insulating plate 7 and the hole of the heat insulating container 54.
【００３３】その支柱６bの上端部分６aは断熱容器５４
内に位置しており、その上にはトレイ３が設けられ、該
トレイ３上には処理対象物が搭載された治具２が載置さ
れており、他方、支柱６bの下端部分の底面は、第１電
極部９の上端部分の表面と接触し、互いに電気的に接続
されるように構成されている。The upper end portion 6a of the column 6b is a heat insulating container 54.
It is located inside, and a tray 3 is provided on it, and a jig 2 on which an object to be processed is mounted is placed on the tray 3, while the bottom surface of the lower end portion of the column 6b is , Is in contact with the surface of the upper end portion of the first electrode portion 9 and is electrically connected to each other.
【００３４】第１電極部９の下端部分の底面には、リー
ド線１１の一端が固定されており、該リード線１１の他
端は第２電極部４に接続されている。その第２電極部４
は、端子台２０と電気的に絶縁した状態でその表面に固
定されており、端子台２０の裏面には、同様に、端子台
２０と電気的に絶縁した状態で第３電極部５が固定され
ており、該第３電極部５の先端部分と端子台２０との間
は、絶縁筒１２で覆われている。One end of a lead wire 11 is fixed to the bottom surface of the lower end portion of the first electrode portion 9, and the other end of the lead wire 11 is connected to the second electrode portion 4. The second electrode part 4
Is fixed to the surface of the terminal block 20 while being electrically insulated from the terminal block 20, and similarly, the third electrode portion 5 is fixed to the back surface of the terminal block 20 while being electrically insulated from the terminal block 20. A space between the tip of the third electrode portion 5 and the terminal block 20 is covered with an insulating tube 12.
【００３５】この第３電極部５と第２電極部４とは一体
に形成されており、該第３電極部５に負電圧を印加する
と、第２電極部４、リード線１１、第１電極部９、支柱
６b６a、トレイ３とを伝わって治具２に負電圧が印加さ
れ、搭載された処理対象物を負電位に置けるように構成
されている。The third electrode portion 5 and the second electrode portion 4 are integrally formed, and when a negative voltage is applied to the third electrode portion 5, the second electrode portion 4, the lead wire 11 and the first electrode are formed. A negative voltage is applied to the jig 2 via the portion 9, the pillars 6b 6a, and the tray 3 so that the mounted object to be processed can be placed at a negative potential.
【００３６】治具２上には、処理ガス散布パイプ５５が
配置されており、該処理ガス散布パイプ５５は、ガス導
入管５８によってガスボンベ５９に接続されている。こ
の処理ガス散布パイプ５５にはガス導入口５６が設けら
れており、ガスボンベ５９内に充填されたＣ3Ｈ8ガス等
の処理ガスをガス導入口５６から断熱容器５４内に散布
できるように構成されている。A processing gas spray pipe 55 is arranged on the jig 2, and the processing gas spray pipe 55 is connected to a gas cylinder 59 by a gas introduction pipe 58. The processing gas spraying pipe 55 is provided with a gas introduction port 56 so that the processing gas such as C 3 H 8 gas filled in the gas cylinder 59 can be sprayed from the gas introduction port 56 into the heat insulating container 54. Has been done.
【００３７】このように構成されたイオン浸炭炉５０に
よって処理対象物の表面処理を行う場合には、まず、真
空槽５３内を真空排気すると共に、断熱容器５４の天井
と底面とに設けられたヒーター５７に通電し、処理対象
物を所定温度まで加熱する。その後、ガス導入口５６か
ら処理ガスを断熱容器５４内に所定圧力まで導入し、処
理対象物を処理ガス雰囲気に置く。When the surface treatment of the object to be treated is carried out by the ion carburizing furnace 50 thus constructed, first, the inside of the vacuum chamber 53 is evacuated and the heat insulating container 54 is provided on the ceiling and the bottom. The heater 57 is energized to heat the object to be processed to a predetermined temperature. After that, the processing gas is introduced into the heat insulating container 54 through the gas introduction port 56 to a predetermined pressure, and the object to be processed is placed in the processing gas atmosphere.
【００３８】真空槽５３と断熱容器５４とはグラウンド
電位に接続されており、真空槽５３内で負電圧が印加さ
れる部材のうち絶縁性物質で覆われていないものは、治
具３と処理対象物だけであるので、第３電極部５に負電
圧を印加すると処理対象物周囲にグロー放電が発生し、
生成した炭素イオン(Ｃ+)が負電圧で加速されて処理対
象物に注入される。このような陽イオン(炭素イオン)が
処理対象物に入射する際に処理対象物から第３電極部５
へと電流が流れる。The vacuum tank 53 and the heat insulating container 54 are connected to the ground potential, and among the members to which a negative voltage is applied in the vacuum tank 53, those not covered with an insulating substance are treated with the jig 3. Since only the target object, when a negative voltage is applied to the third electrode unit 5, glow discharge is generated around the target object,
The generated carbon ions (C + ) are accelerated by a negative voltage and injected into the object to be processed. When such cations (carbon ions) are incident on the object to be processed, the object to be processed is separated from the third electrode unit 5 by the third electrode unit 5.
Current flows to.
【００３９】そのような表面処理を行うときや打ち込ま
れた炭素を内部に拡散させるときには、ヒーター５７に
よって処理対象物を加熱しておくが、その際、同時に支
柱６a、６bも加熱されてしまうので、支柱６bと接触し
ている第１電極部９は高温になってしまう。その場合で
も第２電極部４は第１電極部９と分離されており、直接
接触していないので温度上昇は少ない。When performing such surface treatment or diffusing the implanted carbon into the interior, the object to be treated is heated by the heater 57, but at the same time, the columns 6a and 6b are also heated. The first electrode portion 9 that is in contact with the support column 6b becomes hot. Even in that case, the second electrode portion 4 is separated from the first electrode portion 9 and is not in direct contact with each other, so that the temperature rise is small.
【００４０】また、この耐熱性電極１では、絶縁碍子１
０内の第１電極部９と第２電極部４との間には、絶縁性
断熱材１７が配されており、第１電極９からの熱輻射が
第２電極４や端子台２０に到達しないようにされている
ので、第２電極側の温度上昇は非常に少ない。In addition, in this heat resistant electrode 1, the insulator 1
An insulating heat insulating material 17 is arranged between the first electrode portion 9 and the second electrode portion 4 in 0, and the heat radiation from the first electrode 9 reaches the second electrode 4 and the terminal block 20. Therefore, the temperature rise on the second electrode side is very small.
【００４１】第２電極部４と第３電極部５とは、端子台
２０と電気的に絶縁した状態で設けられているので、フ
ランジ１９には負電圧は印加されず、また、フランジ１
９と真空槽５３とは電気的に絶縁されているので、フラ
ンジ１９はグラウンド電位にも置かれない。このよう
に、フランジ１９には二重の絶縁が施され、浮遊電位に
置かれているので安全性が高い。Since the second electrode portion 4 and the third electrode portion 5 are provided in an electrically insulated state from the terminal block 20, a negative voltage is not applied to the flange 19 and the flange 1
Since 9 and the vacuum chamber 53 are electrically insulated, the flange 19 is not placed at the ground potential either. In this way, the flange 19 is double-insulated and placed at a floating potential, so that the safety is high.
【００４２】他方、グロー放電を発生させる際には、第
１電極部９と第２電極部５とを結ぶリード線１１も負電
位に置かれるが、その周囲は絶縁筒１６で覆われてい
る。また、第２電極部４周囲は絶縁物質で覆われている
が、リード線１１を接続するためには先端の接続部分が
露出せざるを得ないが、リード線１１を接続した後、そ
の接続部分周囲を絶縁ゴム１８で覆ってある。On the other hand, when the glow discharge is generated, the lead wire 11 connecting the first electrode portion 9 and the second electrode portion 5 is also placed at a negative potential, but the periphery thereof is covered with the insulating cylinder 16. . Further, although the periphery of the second electrode portion 4 is covered with an insulating material, in order to connect the lead wire 11, the connecting portion at the tip must be exposed. The periphery of the part is covered with an insulating rubber 18.
【００４３】このように、絶縁筒１６と絶縁ゴム１８と
により、リード線１１や第２電極部５の絶縁性が高めら
れているので、フランジ１９が地絡した場合でも、その
フランジ１９とリード線１１や第２電極部４との間で放
電が発生することがない。In this way, since the insulation properties of the lead wire 11 and the second electrode portion 5 are enhanced by the insulating cylinder 16 and the insulating rubber 18, even if the flange 19 is ground-faulted, the flange 19 and the lead are also broken. No discharge occurs between the wire 11 and the second electrode portion 4.
【００４４】以上は本発明の耐熱電極をイオン浸炭炉に
用いた場合について説明したが、本発明の耐熱電極はイ
オン浸炭炉への適用に限定されるものではなく、窒化処
理装置やスパッタリング装置等、第１電極部が高温曝さ
れるような真空装置に広く用いることが可能である。The case where the heat-resistant electrode of the present invention is used in an ion carburizing furnace has been described above, but the heat-resistant electrode of the present invention is not limited to application to an ion carburizing furnace, and a nitriding apparatus, a sputtering apparatus, etc. It can be widely used in vacuum devices in which the first electrode portion is exposed to high temperatures.
【００４５】[0045]
【発明の効果】本発明の耐熱電極では、第１電極部が高
温になっても第２、第３電極部が高温にならないので、
電極を冷却する必要がなくなる。従って、冷却水やパー
ジガスを流す機構が不要となるので、電極構造が簡単に
なり、製造コストが低減する。配管設備が不要となるこ
とから装置設置費用も低減する。According to the heat-resistant electrode of the present invention, even if the temperature of the first electrode portion becomes high, the temperature of the second and third electrode portions does not become high.
There is no need to cool the electrodes. Therefore, a mechanism for flowing cooling water or a purge gas is not required, so that the electrode structure is simplified and the manufacturing cost is reduced. Equipment installation costs are also reduced because piping equipment is not required.
【００４６】また、水漏れがないことから装置の信頼性
や操業率が向上し、メンテナンスインターバルを長くす
ることができる。更に、パージガスを真空槽内に流さな
いので、パージガスに要する費用を節約できるばかりで
なく、処理対象物周囲の処理ガス濃度の均一性が向上
し、品質が均一になる。Further, since there is no water leakage, the reliability and operating rate of the apparatus are improved and the maintenance interval can be lengthened. Furthermore, since the purge gas is not flown into the vacuum chamber, not only the cost required for the purge gas can be saved, but also the uniformity of the concentration of the processing gas around the object to be treated is improved and the quality is uniform.
【００４７】特に、請求項２に記載した耐熱電極では、
第１、第２電極部との間に絶縁性断熱材が配されている
ので、第１電極部からの輻射による熱伝導が遮蔽され、
第２電極部側の温度上昇を効果的に防止することができ
る。Particularly, in the heat-resistant electrode according to claim 2,
Since the insulating heat insulating material is arranged between the first and second electrode portions, heat conduction due to radiation from the first electrode portion is blocked,
It is possible to effectively prevent the temperature rise on the second electrode portion side.
【００４８】また、請求項３に記載した耐熱電極では、
絶縁筒と絶縁ゴムにより、負電圧が印加される部材とグ
ラウンド電位に置かれる部材との間の放電が防止される
ので信頼性が向上する。Further, in the heat-resistant electrode according to claim 3,
The insulating cylinder and the insulating rubber prevent discharge between a member to which a negative voltage is applied and a member placed at the ground potential, so that reliability is improved.
【００４９】請求項４に記載した耐熱電極では、耐熱電
極と真空槽との間で二重の絶縁性が得られるので、安全
性や信頼性が更に向上する。In the heat-resistant electrode according to the fourth aspect, since double insulation is obtained between the heat-resistant electrode and the vacuum chamber, safety and reliability are further improved.
【００５０】特に、耐熱電極を請求項５に記載したよう
な構造にすれば、製造が容易になって好ましい。In particular, it is preferable that the heat-resistant electrode has the structure as described in claim 5, because the production is easy.
【００５１】なお、請求項６に記載したイオン浸炭炉で
は、配管設備が不要となるので、装置の設置コストを低
くできる。In the ion carburizing furnace according to the sixth aspect of the present invention, since the piping facility is unnecessary, the installation cost of the device can be reduced.
【図１】 本発明の電極の一例を説明するための図FIG. 1 is a diagram for explaining an example of an electrode of the present invention.
【図２】 それが用いられるイオン浸炭炉を説明するた
めの図FIG. 2 is a diagram for explaining an ion carburizing furnace in which it is used.
【図３】 従来技術のイオン浸炭炉を説明するための図FIG. 3 is a diagram for explaining a conventional ion carburizing furnace.
【図４】 そのイオン浸炭炉に用いられる電極を説明す
るための図FIG. 4 is a diagram for explaining an electrode used in the ion carburizing furnace.
１……耐熱電極 ４……第２電極部 ５……第
３電極部
９……第１電極部 １０……(耐熱性)絶縁碍子
１１……リード線
１７……絶縁性断熱材 １９……フランジ ２０…
…端子台
５０……イオン浸炭炉 ５３……真空槽1 ... Heat-resistant electrode 4 ... Second electrode part 5 ... Third electrode part 9 ... First electrode part 10 ... (Heat resistant) insulator
11 ... Lead wire 17 ... Insulating heat insulating material 19 ... Flange 20 ...
… Terminal block 50 …… Ion carburizing furnace 53 …… Vacuum tank
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C23C 8/36 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) C23C 8/36
Claims (6)
圧を印加する耐熱電極であって、 前記真空槽の内部で互いに分離して配置された第１、第
２電極部と、 前記真空槽の外部に配置され、前記第２電極部と電気的
に接続された第３電極部と、 耐熱性絶縁材料で構成された絶縁碍子とを有し、 前記第１電極部は前記絶縁碍子を介して前記真空槽に取
り付けられ、 前記第１、第２電極部はリード線によって電気的に接続
され、 前記第３電極部を電源に接続すると前記第１電極部から
前記処理対象物に電圧を印加できるように構成されたこ
とを特徴とする耐熱電極。1. A heat-resistant electrode for applying a voltage to an object to be processed placed inside a vacuum chamber, the first and second electrode portions being separated from each other inside the vacuum chamber; A third electrode portion arranged outside the bath and electrically connected to the second electrode portion; and an insulator made of a heat-resistant insulating material, wherein the first electrode portion includes the insulator The first and second electrode parts are electrically connected by a lead wire, and when the third electrode part is connected to a power source, a voltage is applied from the first electrode part to the object to be processed. A heat-resistant electrode characterized by being configured to be applied.
材が配されたことを特徴とする請求項１記載の耐熱電
極。2. The heat-resistant electrode according to claim 1, wherein an insulating heat insulating material is disposed between the first and second electrode portions.
ゴムで覆われていることを特徴とする請求項１又は請求
項２のいずれか１項記載の耐熱電極。3. The lead wire is covered with an insulating cylinder, and the portion where the lead wire and the second electrode portion are connected is covered with an insulating rubber. The heat-resistant electrode according to any one of 1.
載の耐熱電極であって、 電気的に絶縁した状態で前記真空槽に取り付けられたフ
ランジを有し、 該フランジに前記第２、第３電極部が電気的に絶縁した
状態で取り付けられ、 該フランジに前記絶縁碍子が設けられたことを特徴とす
る耐熱電極。4. The heat-resistant electrode according to claim 1, further comprising a flange attached to the vacuum chamber in an electrically insulated state, wherein the flange has the second portion. A heat-resistant electrode, wherein the third electrode portion is attached in an electrically insulated state, and the flange is provided with the insulator.
けられた端子台を有し、 前記フランジには真空槽外部に突き出る中空の連結手段
が設けられ、 該連結手段に前記端子台が固定されたことを特徴とする
耐熱電極。5. The heat-resistant electrode according to claim 4, wherein the second electrode portion and the third electrode portion each have a terminal block provided on each side thereof, and the flange projects to the outside of the vacuum chamber. A heat-resistant electrode, characterized in that hollow connecting means is provided, and the terminal block is fixed to the connecting means.
載の耐熱電極を有し、 真空槽内部に配置された処理対象物を処理ガス雰囲気に
置き、該処理対象物と陽極との間にグロー放電を発生さ
せ、その表面処理を行うように構成されたことを特徴と
するイオン浸炭炉。6. A heat-resistant electrode according to any one of claims 1 to 5, wherein an object to be processed placed inside a vacuum chamber is placed in an atmosphere of a processing gas, and the object to be processed and an anode are treated. An ion carburizing furnace characterized in that a glow discharge is generated in the meantime and the surface treatment is performed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320496A JP3490217B2 (en) | 1996-03-29 | 1996-03-29 | Heat-resistant electrode and ion carburizing furnace using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10320496A JP3490217B2 (en) | 1996-03-29 | 1996-03-29 | Heat-resistant electrode and ion carburizing furnace using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09263930A JPH09263930A (en) | 1997-10-07 |
| JP3490217B2 true JP3490217B2 (en) | 2004-01-26 |
Family
ID=14347997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10320496A Expired - Fee Related JP3490217B2 (en) | 1996-03-29 | 1996-03-29 | Heat-resistant electrode and ion carburizing furnace using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3490217B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4458079B2 (en) * | 2006-09-27 | 2010-04-28 | 株式会社Ｉｈｉ | Vacuum carburizing equipment |
| JP4458107B2 (en) | 2007-03-09 | 2010-04-28 | 株式会社Ｉｈｉ | Vacuum carburizing method and vacuum carburizing apparatus |
-
1996
- 1996-03-29 JP JP10320496A patent/JP3490217B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09263930A (en) | 1997-10-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3423562A (en) | Glow discharge apparatus | |
| US4261762A (en) | Method for conducting heat to or from an article being treated under vacuum | |
| KR101149381B1 (en) | Substrate processing apparatus and method of manufacturing semiconductor device | |
| KR20100067654A (en) | Mounting table structure, and treating apparatus | |
| US4124199A (en) | Process and apparatus for case hardening of ferrous metal work pieces | |
| KR100229247B1 (en) | Plasma treatment device | |
| KR102340272B1 (en) | split slit liner door | |
| JP3490217B2 (en) | Heat-resistant electrode and ion carburizing furnace using the same | |
| HRP20000715A2 (en) | Device and method for treating electroconductive endless material | |
| US10443117B2 (en) | Plasma nitriding apparatus | |
| US3650930A (en) | Glow discharge masking process | |
| KR100548931B1 (en) | Ion source, method of operating the sane, and ion source system | |
| US4540868A (en) | Plasma gun that reduces cathode contamination | |
| US3846574A (en) | Method of heating objects and device for the performance of the method | |
| US4034256A (en) | Electron gun for heating, fusing and vaporizing | |
| US5059757A (en) | Gas shrouded electrode for a plasma carburizing furnace | |
| KR20190050534A (en) | Substrate processing apparatus and substrate processing method using the same | |
| JPH0832955B2 (en) | Ion carburizing furnace | |
| KR100560066B1 (en) | Ion-Nitriding treatment device and method therefor | |
| JP2571421B2 (en) | Plasma carburizing heat treatment furnace | |
| KR100456043B1 (en) | Metal Sputter Ion Beam System | |
| UA151765U (en) | Device for ionic thermochemical treatment of the inner surface of a tubular part | |
| KR0138989Y1 (en) | Plasma low pressure chemical vapor depositing apparatus of single wafer type | |
| KR100264742B1 (en) | Heating device for plasma surface plant | |
| JPH0836983A (en) | Ion source |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121107 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131107 Year of fee payment: 10 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |