JP3486354B2 - Thin cylinder device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin cylinder device. 2. Description of the Related Art Conventionally, as a thin cylinder device having a relatively short stroke applied to a piston body, a peripheral portion of a diaphragm having a piston body integrated in a central portion is sandwiched between a pair of cylinder bodies. There is known a type in which a piston body is given an axial stroke by sending and discharging compressed air to and from a pressure chamber formed between one of the pair of cylinder bodies and the diaphragm. In this device, in order to strictly determine the sliding direction of the piston body, a bearing part which is fitted to each other may be provided between the piston body and the cylinder body. However, when such a thin cylinder device is used for a clean room, there is a problem that ultra-fine wear powder generated in a bearing portion is discharged into the clean room. Further, in the conventional thin cylinder device, since the diaphragm can be deformed, the piston body can not only move in the axial direction but also rotate slightly. However, it was found that the diaphragm was strong against repeated deformation due to axial movement of the piston body, but very weak against deformation along with rotation of the piston body, and the durability of the diaphragm was significantly impaired. SUMMARY OF THE INVENTION The present invention has been made based on the above problem awareness of a conventional thin cylinder device, and when used for a clean room, a thin type of abrasion powder at a bearing portion is prevented from being discharged into the clean room. It is intended to obtain a cylinder device. Another object of the present invention is to provide a thin cylinder device capable of improving the durability of a diaphragm. SUMMARY OF THE INVENTION The present invention relates to a diaphragm having a piston body integrated at the center thereof; a pair of cylinder bodies for clamping and fixing the peripheral edge of the diaphragm; a diaphragm having a piston body; and a pair of cylinder bodies. A pressure chamber formed between one of the pressure chambers and receiving and discharging compressed air; a bottomed bearing insert formed in the piston body or the cylinder body on the side forming the pressure chamber in communication with the pressure chamber; holes; slidably fitted in the sliding bearing inserted fixed to the bearing insertion hole, the guide shaft is formed integrally with the cylinder body or piston body on the side for forming the pressure chamber; and all
Anti-rotation mechanism that regulates the relative rotation between the roller bearing and the guide shaft;
In a thin cylinder device having a
A guide groove formed in the outer peripheral surface of the guide shaft in parallel with the axis;
Ball hole drilled in plain bearing; sliding bearing insertion hole with bottom
A fixing groove formed on the inner peripheral surface of the inner surface and parallel to the axis; and a guide
Two bows inserted across the groove, ball hole and fixed groove
One of the two balls
Into the groove and the ball hole at the same time, and secure the other with the ball hole.
It is characterized by being fitted simultaneously with the constant groove. According to this device, the abrasion powder generated in the bearing portion is discharged into the pressure pipe for supplying and discharging compressed air to and from the pressure chamber, and therefore is not discharged into the clean room. FIG. 1 is a perspective view showing a thin cylinder device for a clean room according to a first embodiment of the present invention. FIG. Is shown. The diaphragm 10 having a substantially rectangular planar shape has a circular piston body fixing hole 11 at the center thereof, a circular front convolution portion 12 having an arc-shaped cross section at the peripheral edge, and fixed at the four outermost corners. It has a hole 13. The piston body 20 fixed to the fixing hole 11 of the diaphragm 10 includes an operating rod 21 at the center, a retainer plate 22 located on the front and back of the diaphragm 10,
23. The operating rod 21 is inserted into the center hole 22a of the retainer plate 22, the fixing hole 11 of the diaphragm 10, and the center hole 23a of the retainer plate 23, and is integrated with the diaphragm 10 by caulking the inserted end. The operating rod 21 has a bottomed bearing insertion hole 24 in its shaft portion, and the sliding bearing 3 is inserted into the bearing insertion hole 24.
0 is inserted or press-fitted. A fixing groove 25 parallel to the axis is formed on the inner surface of the bearing insertion hole 24, and the ball bearing 3 corresponding to the fixing groove 25 is formed in the sliding bearing 30.
1 is drilled. A pair of cylinder bodies 40 and 50 sandwiching the peripheral edge of the diaphragm 10 are each substantially rectangular in a plane, and have fixing holes 41 and 51 corresponding to the fixing holes 13 of the diaphragm 10 at four corners. Cylinder body 40
Defines a pressure chamber 42 together with the diaphragm 10 and the piston body 20, and a guide shaft 4 at the center thereof.
3 are integrally provided. The guide shaft 43 is provided for the piston body 2
The guide shaft 43 is slidably fitted to the sliding bearing 30 inserted and fixed in the bearing insertion hole 24 of the No. 0, and a guide groove 44 parallel to the axis is formed on the outer peripheral surface of the guide shaft 43. The guide groove 44 corresponds to the fixing groove 25 of the bearing insertion hole 24 of the piston body 20 and the ball hole 31 of the slide bearing 30. The guide shaft 43 may be provided integrally with the cylinder body 40 or may be provided separately and fixed. A suction / discharge port 47 communicating with the pressure chamber 42 is formed in the cylinder body 40, and this port is connected to a positive pressure source 46 via a control valve 45. The cylinder body 50 is provided with a hole 52 for projecting the operating rod 21 of the piston body 20 in a non-contact manner, and a suction port 53. The suction port 53 connects a chamber 54 formed by the diaphragm 10, the piston body 20, and the cylinder body 50 to a negative pressure source 56 for sucking a fluid via a control valve 55. The cylinder body 50 and the piston body 2
Between 0 and 0, a compression spring 57 that urges the piston body 20 toward the cylinder body 40, that is, in a direction to minimize the volume of the pressure chamber 42, is inserted. Piston body 20
Is provided on the side that communicates with the pressure chamber 42, and does not communicate with the chamber 54. The fixing groove 25 of the bearing insertion hole 24 of the piston body 20, the ball hole 31 of the slide bearing 30, and the guide groove 44 of the cylinder body 40 (guide shaft 43) are straddled over these without any gap (minimum). ), Two balls (steel balls) 33 and 34 are inserted. The ball 33 is fitted in the fixing groove 25 and the ball hole 31 at the same time, and the ball 34 is fitted in the ball hole 31 and the guide groove 44 at the same time. That is, the ball 33 prevents the relative rotation between the slide bearing 30 and the piston body 20 (the operating rod 21), and the ball 34 serves as the cylinder body 40 (the guide shaft 4).
3) The relative rotation between the slide bearing 30 and the sliding bearing 30 is prevented. As a result, rotation of the piston body 20 with respect to the cylinder body 40 is prevented. The guide groove 44 of the cylinder body 40 (guide shaft 43) allows the relative sliding (rolling) of the ball 33 when the piston body 20 (operating rod 21) advances and retreats in the axial direction. The piston body 20 (actuation rod 21)
Has a positioning recess 29 formed at the center thereof,
Similarly, a positioning recess 49 is formed at the center of the cylinder body 40. In the apparatus having the above structure, after fixing the piston body 20 in the fixing hole 11 of the diaphragm 10, the diaphragm 10 is clamped between the cylinder bodies 40 and 50, and the fixing bolts are fixed in the fixing holes 41, 13 and 51. 56 and tighten it. In this assembled and fixed state, when pressure air of a predetermined pressure is supplied to the pressure chamber 42 through the control valve 45, the positive pressure source 46, and the suction / discharge port 47, the operating rod 21 advances against the force of the compression spring 57, Work is done in a clean room. When retracting the operating rod 21,
When the supply of the pressurized air from the positive pressure source 46 to the pressure chamber 42 is stopped and the air in the pressure chamber 42 is exhausted via the control valve 45, the operating rod 21 returns to the rest position by the force of the compression spring 57. . The chamber 54 on the cylinder body 50 side is
The suction port 53 and the control valve 55 are connected to a negative pressure source 56 for sucking a fluid. Therefore, the constant room 54
By suctioning the air, fine abrasion powder and dust which may be generated in the chamber 54 can be prevented from being discharged into the clean room. Cylinder body 50
And the piston body 20 (the operating rod 21) are not in contact with each other, but fine dust may be generated from the compression spring 57 and the diaphragm 10. As described above, in the thin cylinder device of the present invention, the bottomed bearing insertion hole provided on the piston body side communicates with the pressure chamber. Therefore, abrasion powder generated in the bearing portion is discharged to the pressure chamber side. Therefore, for example, when the piston body is moved into and out of the clean room, the wear powder is not discharged into the clean room. In addition, since the piston body fixed to the center of the diaphragm is supported by the cylinder body while restraining the rotation, the diaphragm can be prevented from being damaged due to the rotation of the piston body, and the durability can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing one embodiment of a thin cylinder device according to the present invention. FIG. 2 is a right side view of FIG. FIG. 3 is a sectional view taken along line III-III in FIG. FIG. 4 is a perspective view showing a relationship among a fixing groove of an operating rod of a piston body, a guide groove of a cylinder body, a slide bearing having a ball hole, and a ball . [Description of Signs] 10 Diaphragm 11 Piston body fixing hole 12 Convolution part 20 Piston body 21 Operating rod 22 23 Retainer plate 24 65 Bottom-mounted sliding bearing insertion hole 25 Fixed groove 30 Slide bearing 31 Ball hole 33 34 Ball 40 50 Cylinder body 42 pressure chamber 43 66 guide shaft 44 64 69 guide groove 45 control valve 46 positive pressure source 47 suction / discharge port 53 suction port 56 negative pressure source 57 compression spring

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) F15B 15/10 F16C 29/00 F16C 31/00

Claims (1)

(57) [Claims 1] A diaphragm in which a piston body is integrated with a central portion; a pair of cylinder bodies for clamping and fixing a peripheral portion of the diaphragm; a diaphragm having the piston body and the pair A pressure chamber formed between one of the cylinder bodies and the other of the cylinder body, the bottom being formed in the cylinder body on the side where the piston body or the pressure chamber is formed in communication with the pressure chamber. A guide shaft integrally formed with the cylinder body or the piston body on which the pressure chamber is formed, which is slidably fitted in a slide bearing inserted and fixed in the bearing insertion hole; and
Non-rotating stopper that regulates the relative rotation between the slide bearing and guide shaft
Because mechanism; has, the detent mechanism is formed parallel to the axis on the outer circumferential surface of the guide shaft guides
A groove; a ball hole formed in the slide bearing; an axis formed on the inner peripheral surface of the bottomed slide bearing insertion hole ;
Parallel fixing grooves; and the above-mentioned guide grooves, ball holes and fixing grooves
Two balls inserted by falling into; equipped with, one of the two balls, simultaneous with the guide groove and the ball hole
And the other fits into the ball hole and the fixing groove at the same time.
A thin cylinder device.