JP3481511B2 - Electrode structure - Google Patents
Electrode structureInfo
- Publication number
- JP3481511B2 JP3481511B2 JP19473899A JP19473899A JP3481511B2 JP 3481511 B2 JP3481511 B2 JP 3481511B2 JP 19473899 A JP19473899 A JP 19473899A JP 19473899 A JP19473899 A JP 19473899A JP 3481511 B2 JP3481511 B2 JP 3481511B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film
- substrate
- zirconia
- electrode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【発明の属する技術分野】 本発明は、アクチュエータ
又はセンサの構成部材等として用いられる電極構造物に
関する。TECHNICAL FIELD The present invention relates to an electrode structure used as a constituent member or the like of an actuator or a sensor.
【０００２】[0002]
【従来の技術】 セラミック基板５に膜状電極１を設け
てなる電極構造物４は、例えば、図１に示すように、膜
状電極１の上部に圧電／電歪素子２及び他の電極３を設
けることにより、アクチュエータ又はセンサの構成部材
として用いられる。アクチュエータの構成部材として用
いる場合には、電極構造物は、ある一定の電場を周期的
にオン、オフさせる事で圧電／電歪素子の変形、復帰を
高精度に制御することができる。一方、センサの構成部
材として用いる場合には、電極構造物は、外部から加え
られる変位を圧電／電歪素子に伝える働きをし、電極構
造物の変形に追随して圧電／電歪素子が変形することに
より、圧電／電歪素子に電場が発生し、これを検知する
ことにより、変位の大きさ等を検出することができる。2. Description of the Related Art An electrode structure 4 in which a film electrode 1 is provided on a ceramic substrate 5 has, for example, a piezoelectric / electrostrictive element 2 and another electrode 3 on the film electrode 1 as shown in FIG. By being provided, it is used as a constituent member of an actuator or a sensor. When used as a component of the actuator, the electrode structure is periodically turned on the constant electric field that is, deformation of the piezoelectric / electrostrictive element by turning off, can you to control the return to high accuracy. On the other hand, when it is used as a constituent member of a sensor, the electrode structure acts to transmit the displacement applied from the outside to the piezoelectric / electrostrictive element, and the piezoelectric / electrostrictive element deforms following the deformation of the electrode structure. by an electric field is generated in the piezoelectric / electrostrictive element, by detecting this, it is possible to detect the displacement of the size and the like.
【０００３】 このような電極構造物において、膜状電
極の材質には従来より高価な白金（Ｐｔ）が用いられて
いるため、厚膜印刷法を用いて形成する場合、電極構造
物の製造コストを低減するためには、膜状電極を従来の
５〜１５μｍから２〜５μｍ程度に薄くすることが望ま
しい。又、膜状電極を薄くすることは、アクチュエータ
及びセンサの感度を上げることにも寄与する。In such an electrode structure, platinum (Pt), which is more expensive than conventional materials, is used as the material of the film-like electrode. Therefore, when the film electrode is formed by the thick film printing method, the manufacturing cost of the electrode structure is high. In order to reduce the above, it is desirable to thin the film electrode from the conventional 5 to 15 μm to about 2 to 5 μm. Further, making the film electrode thin also contributes to increase the sensitivity of the actuator and the sensor.
【０００４】[0004]
【発明が解決しようとする課題】 しかしながら、厚膜
印刷法を用いて形成する場合、膜状電極を薄くすると、
電極膜がポーラスになってしまい膜状電極がセラミック
基板より剥離しやすくなる。膜状電極が剥離すると、電
極構造物をアクチュエータ又はセンサの構成部材として
用いた場合に、感度不良という不都合が生じる。特に、
膜状電極を薄くすると、膜状電極上に圧電／電歪素子の
膜を形成した場合に、膜状電極がセラミック基板より剥
離しやすくなり、電極構造物の形成が困難になるという
問題があった。[Problems to be Solved by the Invention] However, thick film
When forming using a printing method, if the thin film electrode is thin,
The electrode film becomes porous, and the film-like electrode is more easily peeled off from the ceramic substrate. When the film-shaped electrode is peeled off, when the electrode structure is used as a constituent member of an actuator or a sensor, a problem of poor sensitivity occurs. In particular,
When the film electrode is thin, when the film of the piezoelectric / electrostrictive element is formed on the film electrode, the film electrode is more likely to peel off from the ceramic substrate, which makes it difficult to form an electrode structure. It was
【０００５】 本発明は、かかる状況に鑑みてなされた
ものであり、その目的とするところは、厚膜印刷法を用
いて形成した膜状電極の厚さが従来よりも薄いにもかか
わらず、膜状電極がセラミック基板より剥離しにくい電
極構造物を提供することにある。The present invention has been made in view of such circumstances, and an object thereof is to use a thick film printing method.
Despite the thickness is thinner than conventional stomach formed film-like electrodes, in that the film electrode provides not easily separable electrode structure of a ceramic substrate.
【０００６】[0006]
【課題を解決するための手段】 即ち、本発明によれ
ば、ジルコニアから成るセラミック基板（ジルコニア基
板）と、前記ジルコニア基板の表面上に、白金（Ｐｔ）
粉末及びチタニア（ＴｉＯ 2 ）を含む電極用ペーストを
厚膜印刷した後、焼成することにより設けられた膜状電
極とを備えた電極構造物であって、前記膜状電極が、前
記膜状電極における含有率が９６．５〜９９．９８重量
％の白金（Ｐｔ）、及び前記膜状電極における含有率が
０．０２〜３．５重量％のチタニア（ＴｉＯ 2 ）から成
るとともに、その厚さが２〜５μｍであることを特徴と
する電極構造物が提供される。上記の電極構造物はアク
チュエータ又はセンサの構成部材として用いられるもの
であってもよい。また、上記の電極構造物は前記膜状電
極と前記ジルコニア基板との下記に定義される接着強度
が、１．５ｋｇ／（２ｍｍ×２ｍｍ）以上であることが
好ましい。 接着強度：膜状電極とジルコニア基板との密着力を表す
概念であり、２ｍｍ×２ｍｍの膜状電極パターンにφ
０．６ｍｍの錫被覆軟銅線をＬ字形に曲げたリード線を
半田付けし、２０ｍｍ／ｓｅｃ．の引っ張り速度で垂直
に引っ張ったときの引っ張り強度 That is, according to the present invention, a ceramic substrate made of zirconia (zirconia-based material) is used.
Plate) and platinum (Pt) on the surface of the zirconia substrate.
An electrode paste containing powder and titania (TiO 2 )
After thick film printing, an electrode structure and a provided a film electrode by firing, the film-like electrode, before
Platinum content of 96.5 to 99.98 wt% in the serial film electrode (Pt), and content in the membrane electrode together consisting from 0.02 to 3.5 wt% of titania (TiO 2) And its thickness is 2 to 5 μm.
An electrode structure is provided. Electrode structures on SL may be <br/> those used as a component of the actuator or sensor. In addition, the above electrode structure is
Adhesive strength defined below between the electrode and the zirconia substrate
Is 1.5 kg / (2 mm × 2 mm) or more
preferable. Adhesive strength: Indicates the adhesion between the film electrode and the zirconia substrate
It is a concept that φ can be applied to a 2mm x 2mm film electrode pattern.
A lead wire made by bending a 0.6 mm tin-coated annealed copper wire into an L-shape
Solder to 20 mm / sec. Vertical at a pulling speed of
Tensile strength when pulled to
【０００７】[0007]
【発明の実施の形態】 以下、本発明の電極構造物の実
施の形態を具体的に説明する。本発明の電極構造物は、
ジルコニアから成るセラミック基板（ジルコニア基板）
と、ジルコニア基板の表面上に、白金（Ｐｔ）粉末及び
チタニア（ＴｉＯ 2 ）を含む電極用ペーストを厚膜印刷
した後、焼成することにより設けられた膜状電極とを備
えている。本発明に用いられる膜状電極は、膜状電極に
おける含有率が９６．５〜９９．９８重量％の白金（Ｐ
ｔ）、及び膜状電極における含有率が０．０２〜３．５
重量％のチタニア（ＴｉＯ 2 ）から成るとともに、その
厚さが２〜５μｍと薄いものである。BEST MODE FOR CARRYING OUT THE INVENTION The electrode structure of the present invention will be described below.
The embodiment will be specifically described. The electrode structure of the present invention is
Ceramic substrate made of zirconia (zirconia substrate)
On the surface of the zirconia substrate, platinum (Pt) powder and
Thick film printing of electrode paste containing titania (TiO 2 ).
After, Bei and provided the film electrode by firing
I am. The film electrode used in the present invention is a film electrode.
Platinum with a content of 96.5 to 99.98% by weight (P
t), and the content rate in the membrane electrode is 0.02 to 3.5.
Consisting of wt% titania (TiO 2 ) ,
The thickness is as thin as 2 to 5 μm .
【０００８】 膜状電極におけるチタニア（ＴｉＯ 2 ）
の含有率を０．０２〜３．５重量％としたのは、図２及
び表１に示すように、膜状電極に白金（Ｐｔ）及びチタ
ニア（ＴｉＯ 2 ）を上記範囲内で含有させることによ
り、膜状電極とセラミック基板との接着強度を１．５ｋ
ｇ／（２ｍｍ×２ｍｍ）以上とすることができ、膜状電
極をセラミック基板から剥離しにくくすることができる
からである。尚、チタニア（ＴｉＯ 2 ）の含有率が上記
範囲外の場合は、図２に示すように、膜状電極とセラミ
ック基板との接着強度が著しく小さくなるため、膜状電
極が剥離しやすくなるとともに、チタニア（ＴｉＯ 2 ）
は絶縁体であるため、その含有率が３．５重量％を超え
る場合は、膜状電極の抵抗が大きくなりすぎるという不
都合がある。膜状電極におけるチタニア（ＴｉＯ 2 ）の
含有率は０．０５〜２．４重量％であることが好まし
い。この範囲内において、膜状電極とセラミック基板と
の接着強度は２．０ｋｇ／（２ｍｍ×２ｍｍ）以上とな
るため、膜状電極の剥離をより確実に防止することがで
きる。 Titania (TiO 2 ) in the membrane electrode
As shown in FIG. 2 and Table 1, the content rate of platinum is 0.02 to 3.5% by weight. Platinum (Pt) and titania (TiO 2 ) are contained in the above range in the film electrode. By including it inside, the adhesive strength between the membrane electrode and the ceramic substrate is 1.5k.
g / can be a (2 mm × 2 mm) on more than, it is because it is possible to make it difficult to peel the film electrode ceramic substrate. When the content of titania (TiO 2 ) is out of the above range, as shown in FIG. 2, the adhesive strength between the membrane electrode and the ceramic substrate is remarkably reduced, so that the membrane electrode is easily peeled off. , Titania (TiO 2 )
Since is an insulator, if its content exceeds 3.5% by weight, there is a disadvantage that the resistance of the film electrode becomes too large. It is good better <br/> physician content of titania (TiO 2) in the film electrode is 0.05 to 2.4 wt%. Within this range, the adhesion strength between the film electrode and the ceramic substrate because it becomes 2.0kg / (2mm × 2mm) on more than,-out <br/> in is possible to more reliably prevent peeling of the film electrode It
【０００９】[0009]
【表１】 [Table 1]
【００１０】[0010]
【００１１】 本発明の電極構造物においては、セラミ
ック基板の材質として、高強度・高靭性という観点か
ら、ジルコニアを用いている。 [0011] In the electrode structure of the present invention, as the material of the ceramic substrate, or the viewpoint of high strength and high toughness
, Zirconia is used.
【００１２】 本発明の電極構造物において、セラミッ
ク基板の厚さは０．１〜１ｍｍであることが好ましい。In the electrode structure of the present invention, the thickness of the ceramic substrate is preferably 0.1 to 1 mm.
【００１３】 上記のように、本発明の電極構造物にお
いては、厚膜印刷法を用いて形成した膜状電極とセラミ
ック基板との接着強度が大きいため、膜状電極の厚さが
２〜５μｍと薄いものであるにも拘わらず、膜状電極が
剥離しにくく、膜状電極の剥離による感度不良という不
都合の発生を防止することができる。又、膜状電極を剥
離させずに、その上部に圧電／電歪素子の膜を形成した
電極構造物を製造することができる。As described above, in the electrode structure of the present invention, since the adhesive strength between the film-like electrode formed by the thick film printing method and the ceramic substrate is large, the thickness of the film-like electrode is 2 to 5 μm. If despite is thin, hardly peeling film electrode, it is possible to prevent the occurrence of inconvenience that poor sensitivity due to peeling of the film electrode. Further, it is possible to manufacture an electrode structure in which the film of the piezoelectric / electrostrictive element is formed on the film-shaped electrode without peeling off the film-shaped electrode.
【００１４】 本発明の電極構造物は、セラミック基板
に膜状電極を、公知の各種の膜形成法、例えば、スクリ
ーン印刷、スプレー等の厚膜形成方法にて形成し、焼成
を行うことにより製造される。The electrode structure of the present invention is manufactured by forming a film electrode on a ceramic substrate by various known film forming methods, for example, a thick film forming method such as screen printing or spraying, and firing the film. To be done.
【００１５】 以上、本発明の実施の形態について説明
したが、本発明の実施の形態はこれらに限定されるもの
ではなく、本発明の趣旨を逸脱しない限りにおいて、当
業者の知識に基づいて種々の変更、修正、改良等を加え
うるものであることが理解されるべきである。Although the embodiments of the present invention have been described above, the embodiments of the present invention are not limited to these, and various modifications can be made based on the knowledge of those skilled in the art without departing from the spirit of the present invention. It is to be understood that changes, modifications, improvements, etc. can be made.
【００１６】[0016]
【実施例】 以下、本発明を実施例を用いてさらに詳細
に説明するが、本発明はこれらの実施例に制限されるも
のではない。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
【００１７】（実施例１） ジルコニア基板の表面に、
含有率が９６．５重量％の白金（Ｐｔ）、及び含有率が
３．５重量％のチタニア（ＴｉＯ 2 ）から成る、厚さ３
μｍの膜状電極を設けることにより電極構造物を製造
し、膜状電極とジルコニア基板との接着強度及び膜状電
極の比抵抗を調べた。Example 1 On the surface of a zirconia substrate,
Thickness 3 consisting of platinum (Pt) with a content of 96.5% by weight and titania (TiO 2 ) with a content of 3.5% by weight.
An electrode structure was manufactured by providing a film electrode of μm, and the adhesive strength between the film electrode and the zirconia substrate and the specific resistance of the film electrode were examined.
【００１８】 ジルコニア基板は縦５０ｍｍ、横３０ｍ
ｍ、厚さ０．３ｍｍのものを用いた。膜状電極は、電極
用ペーストをジルコニア基板表面に厚膜印刷した後、焼
成することにより設けた。電極用ペーストの組成は、白
金（Ｐｔ）粉末８７重量％、チタニア（ＴｉＯ 2 ）３．
２重量％、有機ビヒクル及び溶剤９．８重量％とした。
又、焼成は、１３３０℃で２時間保持することにより行
った。The zirconia substrate has a length of 50 mm and a width of 30 m
m, thickness 0.3 mm was used. The membranous electrode was provided by thickly printing the electrode paste on the surface of the zirconia substrate and then firing the paste. The composition of the electrode paste was 87% by weight of white gold (Pt) powder and titania (TiO 2 ) .
2% by weight, organic vehicle and solvent 9.8% by weight.
The firing was carried out by holding at 1330 ° C. for 2 hours.
【００１９】 先述の方法にて膜状電極とジルコニア基
板との接着強度を測定した。又、膜状電極の比抵抗を測
定した。表２に結果を示す。The adhesive strength between the film electrode and the zirconia substrate was measured by the method described above. Also, the specific resistance of the film electrode was measured. The results are shown in Table 2 .
【００２０】（実施例２） ジルコニア基板の表面に、
含有率が９７．６重量％の白金（Ｐｔ）、及び含有率が
２．４重量％のチタニア（ＴｉＯ 2 ）から成る、厚さ４
μｍの膜状電極を設けることにより、実施例１と同様に
電極構造物を製造し、膜状電極とジルコニア基板との接
着強度及び膜状電極の比抵抗を調べた。尚、電極用ペー
ストの組成は、白金（Ｐｔ）粉末８３重量％、チタニア
（ＴｉＯ 2 ）２重量％、有機ビヒクル及び溶剤１５重量
％とした。表２に結果を示す。Example 2 On the surface of a zirconia substrate,
Thickness 4 consisting of platinum (Pt) with a content of 97.6% by weight and titania (TiO 2 ) with a content of 2.4% by weight.
An electrode structure was manufactured in the same manner as in Example 1 by providing a film electrode having a thickness of μm, and the adhesive strength between the film electrode and the zirconia substrate and the specific resistance of the film electrode were examined. The composition of the electrode paste was 83% by weight of platinum (Pt) powder and titania.
(TiO 2 ) 2% by weight, organic vehicle and solvent 15% by weight. The results are shown in Table 2 .
【００２１】（比較例１） ジルコニア基板の表面に、
含有率が９６．０重量％の白金（Ｐｔ）、及び含有率が
４．０重量％のチタニア（ＴｉＯ 2 ）から成る、厚さ３
μｍの膜状電極を設けることにより、実施例１と同様に
電極構造物を製造し、膜状電極とジルコニア基板との接
着強度及び膜状電極の比抵抗を調べた。尚、電極用ペー
ストの組成は、白金（Ｐｔ）粉末８６．６重量％、チタ
ニア（ＴｉＯ 2 ）３．６重量％、有機ビヒクル及び溶剤
９．８重量％とした。表２に結果を示す。Comparative Example 1 On the surface of the zirconia substrate,
Thickness 3 consisting of platinum (Pt) with a content of 96.0% by weight and titania (TiO 2 ) with a content of 4.0% by weight.
An electrode structure was manufactured in the same manner as in Example 1 by providing a film electrode having a thickness of μm, and the adhesive strength between the film electrode and the zirconia substrate and the specific resistance of the film electrode were examined. The composition of the electrode paste was platinum (Pt) powder 86.6% by weight, titania (TiO 2 ) 3.6% by weight, organic vehicle and solvent 9.8% by weight. The results are shown in Table 2 .
【００２２】（比較例２） ジルコニア基板の表面に、
白金（Ｐｔ）から成る、厚さ４μｍの膜状電極を設ける
ことにより、実施例１と同様に電極構造物を製造し、膜
状電極とジルコニア基板との接着強度及び膜状電極の比
抵抗を調べた。尚、電極用ペーストの組成は、白金（Ｐ
ｔ）粉末９０．２重量％、有機ビヒクル及び溶剤９．８
重量％とした。表２に結果を示す。Comparative Example 2 On the surface of the zirconia substrate,
By providing a film electrode made of platinum (Pt) and having a thickness of 4 μm, an electrode structure was manufactured in the same manner as in Example 1, and the adhesive strength between the film electrode and the zirconia substrate and the specific resistance of the film electrode were improved. Examined. The composition of the electrode paste is platinum (P
t) 90.2% by weight of powder, organic vehicle and solvent 9.8.
It was set to% by weight. The results are shown in Table 2 .
【００２３】[0023]
【表２】 [Table 2]
【００２４】 実施例と比較例との比較から、膜状電極
における白金（Ｐｔ）とチタニア（ＴｉＯ 2 ）との組成
比（含有率）を所定の値に制限することにより、膜状電
極とジルコニア基板との接着強度を大きくすることがで
き、膜状電極の剥離を防止することができることがわか
る。From the comparison between the example and the comparative example, by limiting the composition ratio (content ratio) of platinum (Pt) and titania (TiO 2 ) in the film electrode to a predetermined value, the film electrode and zirconia It can be seen that the adhesive strength with the substrate can be increased and peeling of the film electrode can be prevented.
【００２５】[0025]
【発明の効果】 本発明の電極構造物においては、厚膜
印刷法を用いて形成した膜状電極の厚さが、２〜５μｍ
と薄いものであるにも拘わらず、膜状電極が剥離しにく
いため、膜状電極の剥離による感度不良という不都合の
発生を防止することができる。又、膜状電極を剥離させ
ずに、電極上部に膜状圧電／電歪素子を形成することが
容易である。In the electrode structure of the present invention, a thick film
The thickness of the formed film electrode using a printing method, 2 to 5 [mu] m
Although it is thin , the membranous electrode is difficult to peel off, so that it is possible to prevent the inconvenience of poor sensitivity due to peeling of the membranous electrode. Further, it is easy to form the film-shaped piezoelectric / electrostrictive element on the electrode without peeling off the film-shaped electrode.
【図１】 電極構造物の一例を示す断面図である。FIG. 1 is a cross-sectional view showing an example of an electrode structure.
【図２】 膜状電極のチタニア（ＴｉＯ 2 ）含有率と接
着強度との関係を示すグラフである。FIG. 2 is a graph showing the relationship between the titania (TiO 2 ) content of the film electrode and the adhesive strength.
１…膜状電極、２…圧電／電歪素子、３…他の電極、４
…電極構造物、５…セラミック基板。1 ... Membrane electrode, 2 ... Piezoelectric / electrostrictive element, 3 ... Other electrode, 4
… Electrode structure, 5… Ceramic substrate.
Claims (3)
ルコニア基板）と、前記ジルコニア基板の表面上に、白
金（Ｐｔ）粉末及びチタニア（ＴｉＯ 2 ）を含む電極用
ペーストを厚膜印刷した後、焼成することにより設けら
れた膜状電極とを備えた電極構造物であって、前記 膜状電極が、前記膜状電極における含有率が９６．
５〜９９．９８重量％の白金（Ｐｔ）、及び前記膜状電
極における含有率が０．０２〜３．５重量％のチタニア
（ＴｉＯ 2 ）から成るとともに、その厚さが２〜５μｍ
であることを特徴とする電極構造物。1. A ceramic substrate made of zirconia (di
(Luconia substrate) and white on the surface of the zirconia substrate
For electrodes containing gold (Pt) powder and titania (TiO 2 ).
It is provided by baking the paste after thick film printing.
An electrode structure and a film-like electrode, said film electrode is content in the film electrode is 96.
5 to 99.98% by weight of platinum (Pt),
Titania with a content of 0.02 to 3.5% by weight
(TiO 2 ) and has a thickness of 2 to 5 μm
Electrode structures, characterized in that it.
して用いられる請求項１に記載の電極構造物。 2. A actuator or sensor component
The electrode structure according to claim 1, which is used as a substrate.
下記に定義される接着強度が、１．５ｋｇ／（２ｍｍ×
２ｍｍ）以上である請求項１又は２に記載の電極構造
物。 接着強度：膜状電極とジルコニア基板との密着力を表す
概念であり、２ｍｍ×２ｍｍの膜状電極パターンにφ
０．６ｍｍの錫被覆軟銅線をＬ字形に曲げたリード線を
半田付けし、２０ｍｍ／ｓｅｃ．の引っ張り速度で垂直
に引っ張ったときの引っ張り強度 3. The film electrode and the zirconia substrate
The adhesive strength defined below is 1.5 kg / (2 mm ×
2 mm) or more, The electrode structure according to claim 1 or 2.
object. Adhesive strength: Indicates the adhesion between the film electrode and the zirconia substrate
It is a concept that φ can be applied to a 2mm x 2mm film electrode pattern.
A lead wire made by bending a 0.6 mm tin-coated annealed copper wire into an L-shape
Solder to 20 mm / sec. Vertical at a pulling speed of
Tensile strength when pulled to
Priority Applications (1)
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|---|---|---|---|
| JP19473899A JP3481511B2 (en) | 1999-07-08 | 1999-07-08 | Electrode structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19473899A JP3481511B2 (en) | 1999-07-08 | 1999-07-08 | Electrode structure |
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| Publication Number | Publication Date |
|---|---|
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| JP3481511B2 true JP3481511B2 (en) | 2003-12-22 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1935083A4 (en) * | 2005-10-09 | 2010-11-17 | System General Corp | Switching control circuit having off-time modulation to improve efficiency of primary-side controlled power supply |
| JP5083496B2 (en) * | 2006-09-21 | 2012-11-28 | セイコーエプソン株式会社 | Actuator device, liquid jet head, and image recording apparatus |
| JP5827866B2 (en) * | 2011-10-20 | 2015-12-02 | 日本碍子株式会社 | Film-type piezoelectric / electrostrictive element and manufacturing method thereof |
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