JP3477516B2 - Apparatus and method for detecting charged particle emission using magnetoresistive element - Google Patents

Apparatus and method for detecting charged particle emission using magnetoresistive element

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Publication number
JP3477516B2
JP3477516B2 JP2001002949A JP2001002949A JP3477516B2 JP 3477516 B2 JP3477516 B2 JP 3477516B2 JP 2001002949 A JP2001002949 A JP 2001002949A JP 2001002949 A JP2001002949 A JP 2001002949A JP 3477516 B2 JP3477516 B2 JP 3477516B2
Authority
JP
Japan
Prior art keywords
charged particle
magnetoresistive element
magnetic
charged
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001002949A
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Japanese (ja)
Other versions
JP2002208101A (en
Inventor
景次 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
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Priority to JP2001002949A priority Critical patent/JP3477516B2/en
Publication of JP2002208101A publication Critical patent/JP2002208101A/en
Application granted granted Critical
Publication of JP3477516B2 publication Critical patent/JP3477516B2/en
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Expired - Lifetime legal-status Critical Current

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  • Magnetic Heads (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、固体と固体との摺動
接触部から放出される荷電粒子の計測技術、特にコンピ
ュータの磁気記録装置の磁気記録ヘッドと磁気ディスク
(ハードディスク)の摩擦接触部より放出される正、負
の荷電粒子の計測に用いる。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for measuring charged particles emitted from a sliding contact portion between solids, particularly a frictional contact portion between a magnetic recording head of a magnetic recording device of a computer and a magnetic disk (hard disk). It is used to measure the positive and negative charged particles emitted.

【0002】[0002]

【従来の技術】固体と固体が摺動接触すると、摩擦帯電
が起こり、接触部の近傍では放電によるマイクロプラズ
マの発生が起こり、電子、負イオン、正イオンが放出さ
れる。これまで、実験室でのピン・ディスク摩擦試験機
において、ピンとディスクの接触部からこれらの荷電粒
子のうち、正イオンは正の荷電粒子として、また電子、
負イオン、および電子と負イオンの混合物は負の荷電粒
子として計測されている。さらに、固体と固体の摩擦に
伴う摩擦による新生面と周囲分子との相互作用により荷
電粒子放出、すなわちケミエミッションが発生すること
が明らかとなっている。
2. Description of the Related Art When a solid and a solid are in sliding contact with each other, frictional electrification occurs, and microplasma is generated due to discharge in the vicinity of the contact portion, and electrons, negative ions, and positive ions are emitted. So far, in the pin-disk friction tester in the laboratory, among these charged particles, positive ions are positively charged particles, electrons,
Negative ions and a mixture of electrons and negative ions are measured as negatively charged particles. Furthermore, it has been clarified that charged particles are released, that is, chemi-emission occurs due to the interaction between the new surface and surrounding molecules due to friction between solids.

【0003】また、磁気記録ヘッドと回転する磁気ディ
スクからなる磁気記録装置において、ヘッドのコーティ
ング材料とハードディスクのコーティング膜とをシミュ
レートしたピン・ディスク摩擦試験において、正、負の
荷電粒子放出が計測されている。このことは、実際の磁
気記録装置の磁気記録ヘッドと磁気ディスクの接触面に
おいても同様の現象が発生していることを示す。これら
の現象は磁気抵抗素子に電気的ノイズを発生させ、ある
いは磁気抵抗素子そのものを破壊し、また潤滑油薄膜を
分解劣化させ、さらには磁気記録エラー等の様々なトラ
ブルを発生させると考えられる。
Further, in a magnetic recording apparatus comprising a magnetic recording head and a rotating magnetic disk, positive and negative charged particle emission is measured in a pin-disk friction test simulating a head coating material and a hard disk coating film. Has been done. This indicates that the same phenomenon occurs at the contact surface between the magnetic recording head and the magnetic disk of the actual magnetic recording device. It is considered that these phenomena cause electrical noise in the magnetoresistive element, destroy the magnetoresistive element itself, decompose and deteriorate the lubricating oil thin film, and cause various troubles such as magnetic recording error.

【0004】現状の磁気記録装置においては、磁気記録
ヘッドは回転する磁気ディスクによるヘッドへの空気の
流体潤滑作用によりディスク上を浮上させているが、コ
ンピュータの起動、停止時には両者は接触を余儀なくさ
れる。さらに、磁気記録密度を向上させるために磁気記
録ヘッドと磁気ディスクの間隔を極限まで狭める技術開
発が行われている。究極には磁気記録ヘッドと磁気ディ
スクが接触する接触型磁気記録装置の開発が急がれてい
る。この接触型の磁気記録装置においては、上記の放電
によるマイクロプラズマやケミエミッションが発生し、
様々なトラブルを発生することは明らかである。次世代
超高密度磁気記録装置を開発するためには、これらの諸
現象によるトラブル防止技術を開発することが不可欠で
ある。
In the current magnetic recording apparatus, the magnetic recording head is floated above the disk by the fluid lubrication action of air to the head by the rotating magnetic disk, but both are forced to contact each other when the computer is started and stopped. It Further, in order to improve the magnetic recording density, technological development has been carried out to reduce the distance between the magnetic recording head and the magnetic disk to the utmost limit. Ultimately, development of a contact type magnetic recording device in which a magnetic recording head and a magnetic disk contact each other is urgently needed. In this contact-type magnetic recording device, microplasma and chemi-emission are generated by the above discharge,
It is obvious that various troubles will occur. In order to develop a next-generation ultra-high density magnetic recording device, it is essential to develop technology for preventing troubles due to these phenomena.

【0005】そのためには、実機の磁気記録ヘッドと磁
気ディスクの接触部で発生する、マイクロプラズマやケ
ミエミッションの発生状態を荷電粒子放出計測により詳
細に調べる必要がある。
For that purpose, it is necessary to investigate in detail the generation state of microplasma and chemi-emission generated at the contact portion between the actual magnetic recording head and the magnetic disk by the charged particle emission measurement.

【0006】しかしながら、これまで、単純なピン・デ
ィスク試験機においては計測されているものの、実機に
おけるヘッド・ディスクの摺動界面で発生する正、負の
荷電粒子を計測する機器は開発されていない。
However, although a simple pin-disk tester has been used for measurement, a device for measuring positive and negative charged particles generated at the sliding interface of the head-disk in an actual machine has not been developed so far. .

【0007】[0007]

【発明が解決しようとする課題】軽加重下での微小な磁
気記録ヘッドと磁気ディスクの摩擦接触部から放出され
る荷電粒子の強度は極めて微弱であり、かつ、発生する
マイクロプラズマは摩擦接触部分の数マイクロメートル
の極めて狭い範囲に発生するため、これを集めるために
は、荷電粒子の検出器は微小、かつヘッドとディスクの
接触部に極めて隣接していなければならないという問題
がある。
The intensity of the charged particles emitted from the frictional contact portion between the minute magnetic recording head and the magnetic disk under a light load is extremely weak, and the generated microplasma is generated in the frictional contact portion. Since it occurs in an extremely narrow range of several micrometers, there is a problem that the detector of the charged particles must be minute and extremely close to the contact portion between the head and the disk in order to collect this.

【0008】そこで、本発明の目的は、磁気記録ヘッド
に備えられていて、磁気記録ヘッドと磁気ディスクの接
触部に極めて近い場所にあり、磁気ディスクのメモリー
信号からの微弱な磁力線を読みとるための磁気抵抗素子
そのものを検出器として利用して、荷電粒子計測回路を
作成し、実機のコンピュータ用磁気ディスクにおける実
際の荷電粒子の放出状態を観察することのできる正、負
の荷電粒子放出検出装置となすことにある。
Therefore, an object of the present invention is to provide a magnetic recording head, which is very close to the contact portion between the magnetic recording head and the magnetic disk, and for reading a weak magnetic line of force from a memory signal of the magnetic disk. Using a magnetoresistive element itself as a detector, a charged particle emission detection device capable of creating a charged particle measurement circuit and observing the actual emission state of charged particles on a computer magnetic disk of an actual machine. There is something to do.

【0009】[0009]

【課題を解決しようとする手段】上記目的を達成するた
め、この発明の磁気抵抗素子用いた荷電粒子計測装置
は、微小な摩擦接触部において被検体に摩擦接触する検
出器ヘッドに取り付けられた荷電粒子捕集素子と、前記
荷電粒子捕集素子と電流リード線を介して接触している
荷電粒子計測装置と、前記荷電粒子計測装置の動作を制
御するトリガー回路とを備え、前記荷電粒子捕集素子は
シールド部材によって遮蔽された状態で前記被検体に向
かって非接触で露出して前記検出器ヘッドに取り付けら
れており、かつ前記荷電粒子捕集素子は磁気抵抗材料で
構成されており、前記荷電粒子計測装置は少なくとも、
前記荷電粒子捕集素子から入力された荷電粒子の電流、
または電荷、またはその電荷が変換された電圧を増幅
し、積算する機能を備えるものであることを特徴として
いる。
In order to achieve the above object, a charged particle measuring apparatus using a magnetoresistive element according to the present invention is a charging device attached to a detector head which makes frictional contact with an object at a minute frictional contact portion. The charged particle collecting device includes: a particle collecting device; a charged particle measuring device that is in contact with the charged particle collecting device through a current lead wire; and a trigger circuit that controls the operation of the charged particle measuring device. The element is attached to the detector head while being exposed to the subject in a non-contact manner in a state of being shielded by a shield member, and the charged particle collecting element is made of a magnetoresistive material, At least the charged particle measuring device,
The current of the charged particles input from the charged particle collecting element,
Alternatively, it is characterized by having a function of amplifying and integrating charges or a voltage obtained by converting the charges.

【0010】またこの発明の磁気抵抗素子を用いた荷電
粒子計測装置は、磁気ヘッドと、これに回転しながら接
触する磁気記録ディスクと、磁気ヘッドの後部に備えら
れた磁気抵抗素子と、磁気抵抗素子の両端に結合されて
いる電流リード線と、荷電粒子計測装置と、パソコン
と、表示装置と、トリガ回路とからなる。さらにまた、
この発明の磁気抵抗素子を用いた荷電粒子計測方法は、
磁気抵抗効果型の磁気記録装置の再生用の磁気ヘッドの
磁気抵抗素子を電流リード線を介して荷電粒子計測装置
に接続し、前記磁気ヘッドと磁気ディスクとの接触部で
発生する荷電粒子を前記磁気抵抗素子で捕集し、荷電粒
子の電流、または電荷、またはその電荷が変換された電
圧を前記荷電粒子計測装置で増幅及び計数することを特
徴としている。
A charged particle measuring apparatus using a magnetoresistive element according to the present invention includes a magnetic head, a magnetic recording disk that comes into contact with the magnetic head while rotating, a magnetoresistive element provided at the rear of the magnetic head, and a magnetoresistive element. It consists of a current lead wire connected to both ends of the device, a charged particle measuring device, a personal computer, a display device, and a trigger circuit. Furthermore,
The charged particle measuring method using the magnetoresistive element of the present invention is
A magnetoresistive element of a reproducing magnetic head of a magnetoresistive effect type magnetic recording device is connected to a charged particle measuring device via a current lead wire, and charged particles generated at a contact portion between the magnetic head and a magnetic disk are described above. The present invention is characterized in that the current of the charged particles, the electric charge, or the voltage obtained by converting the electric charge is collected by the magnetoresistive element and amplified and counted by the charged particle measuring device.

【0011】[0011]

【作用】上記磁気抵抗素子は、上記磁気ディスクと上記
磁気ヘッドの接触部から放出される微弱な正または負の
荷電粒子を集め、荷電粒子計測装置へ伝える。
The magnetoresistive element collects weak positive or negative charged particles emitted from the contact portion between the magnetic disk and the magnetic head, and transmits them to the charged particle measuring device.

【0012】[0012]

【実施例】以下、この発明を図示の実施例により詳細に
説明する。まず、この発明の磁気抵抗素子を利用した荷
電粒子検出方法において使用する荷電粒子検出装置につ
いて説明する。図1及び図2に示すように、この発明の
磁気抵抗素子を利用した荷電粒子検出装置100aは、
微小な摩擦接触部において被検体6aに摩擦接触する検
出器ヘッド2aに取り付けられた荷電粒子捕集素子1a
と、荷電粒子捕集素子1aと電流リード線9を介して接
続している荷電粒子計測装置10と、その荷電粒子計測
装置10の動作を制御するトリガー回路13とを備え、
荷電粒子捕集素子1aは被検体6aに向かって非接触で
露出し被検体6aに対してシールド部材4aによって遮
蔽された状態で検出器ヘッド2aに取り付けられてお
り、かつ荷電粒子捕集素子1aは磁気抵抗材料で構成さ
れており、荷電粒子計測装置1aは少なくとも、前記荷
電粒子捕集素子から入力された荷電粒子の電流、または
電荷、またはその電荷が変換された電圧を増幅し、積算
する機能を備える。
The present invention will be described in detail below with reference to the embodiments shown in the drawings. First, a charged particle detection device used in the charged particle detection method using the magnetoresistive element of the present invention will be described. As shown in FIGS. 1 and 2, a charged particle detection device 100a using the magnetoresistive element of the present invention is
The charged particle trapping element 1a attached to the detector head 2a that makes frictional contact with the subject 6a at the minute frictional contact portion.
A charged particle measuring device 10 connected to the charged particle collecting element 1a via a current lead wire 9 and a trigger circuit 13 for controlling the operation of the charged particle measuring device 10.
The charged particle collecting element 1a is attached to the detector head 2a in a state where it is exposed to the object 6a in a non-contact manner and is shielded from the object 6a by the shield member 4a, and the charged particle collecting element 1a is also attached. Is composed of a magnetoresistive material, and the charged particle measuring apparatus 1a at least amplifies and integrates the current or charge of the charged particles inputted from the charged particle collecting element, or the voltage obtained by converting the charges. It has a function.

【0013】次に以上説明した荷電粒子放出検出装置1
00aを既存のコンピュータ用の磁気ディスク装置の再
生ヘッドを利用して構成した荷電粒子放出検出装置10
0として構成した実施例について説明する。
Next, the charged particle emission detection device 1 described above
Charged particle emission detection device 10 in which 00a is configured by using a reproducing head of an existing magnetic disk device for a computer
An embodiment configured as 0 will be described.

【0014】本装置100の検出器(荷電粒子捕集素
子)として用いる磁気抵抗素子1は記録再生用の磁気ヘ
ッド2の再生部の内部に電流リード線3を介して備え付
けられてある。磁気抵抗素子1の前後はシールド4によ
り挟まれている。これらのシールド4、及び磁気ヘッド
2の底面は一般にダイヤモンドライクカーボン(DL
C)保護膜5でコーティングしてある。回転する磁気デ
ィスク6の磁気記録層7も同じく、DLC保護膜8でコ
ーティングしてある。磁気抵抗素子1の両端には電流リ
ード線3が結合されている。磁気抵抗素子1はシールド
4より短いため、磁気ヘッド2と回転する磁気ディスク
6が接触しても、接触はシールド4にコーティングした
DLC保護膜5とディスクのDLC保護膜8の間でおこ
り、磁気抵抗素子1は磁気ディスク6に接触はしない。
このDLC保護膜同士の接触により、接触部とその近傍
にはマイクロプラズマおよびケミエミッションが発生
し、このプラズマやケミエミション中より生じた正イオ
ン、電子、負イオンが正、負の荷電粒子として放出され
る。
The magnetoresistive element 1 used as a detector (charged particle collecting element) of the apparatus 100 is installed inside the reproducing portion of a magnetic head 2 for recording / reproducing through a current lead wire 3. The front and rear of the magnetoresistive element 1 are sandwiched by shields 4. The shield 4 and the bottom surface of the magnetic head 2 are generally diamond-like carbon (DL).
C) It is coated with a protective film 5. The magnetic recording layer 7 of the rotating magnetic disk 6 is also coated with a DLC protective film 8. A current lead wire 3 is coupled to both ends of the magnetoresistive element 1. Since the magnetoresistive element 1 is shorter than the shield 4, even if the magnetic head 2 and the rotating magnetic disk 6 come into contact with each other, the contact occurs between the DLC protective film 5 coated on the shield 4 and the DLC protective film 8 of the disk. The resistance element 1 does not contact the magnetic disk 6.
Due to the contact between the DLC protective films, microplasma and chemi-emission are generated in the contact part and its vicinity, and positive ions, electrons, and negative ions generated during the plasma and chemi-emission are released as positive and negative charged particles. It

【0015】磁気抵抗素子1は、本来磁気ヘッドの再生
部に設けられて磁気記録層7の内部の記録信号からの磁
力線を検出するもので、そのための回路が存在していた
が、これらは取り外され、図2に示されるように、二つ
の電流リード線3の他端は一つに結合され、この結合さ
れて1本となった電流リード線9は荷電粒子計測装置1
0に結合されている。これにより磁気抵抗素子1は荷電
粒子検出器へと機能変化した状態となっている。磁気ヘ
ッド2と回転する磁気ディスク6の接触部で発生した
正、負の荷電粒子は、磁気抵抗素子1により集められ、
電流リード線3、電流リード線9を経て、荷電粒子計測
装置10により増幅、積算され、パソコン11により信
号処理され、表示装置12により表示される。この際、
計測の開始は荷電粒子計測装置に結合されたトリガ回路
13により行われる。
The magnetoresistive element 1 is originally provided in the reproducing portion of the magnetic head to detect magnetic lines of force from the recording signal inside the magnetic recording layer 7, and there was a circuit therefor, but these were removed. As shown in FIG. 2, the other ends of the two current lead wires 3 are combined into one, and the combined current lead wire 9 forms one charged particle measuring device 1
It is tied to zero. As a result, the magnetoresistive element 1 is in a state in which its function is changed to a charged particle detector. The positive and negative charged particles generated at the contact portion between the magnetic head 2 and the rotating magnetic disk 6 are collected by the magnetoresistive element 1,
After passing through the current lead wire 3 and the current lead wire 9, they are amplified and integrated by the charged particle measuring device 10, processed by the personal computer 11 for signal processing, and displayed by the display device 12. On this occasion,
The measurement is started by the trigger circuit 13 coupled to the charged particle measuring device.

【0016】一般に磁気抵抗素子1はNi、Fe、Coあ
るいはそれらの合金、例えばNi、Feなどの合金の強磁
性体で作られており、本来磁気ディスク6の磁気記録層
7中の微小な記録磁気素子の微弱な磁力線を検知し、そ
の磁界強度変化による磁気抵抗素子の抵抗変化により磁
気素子の信号を検知するためのものである。この場合、
所定の磁場をあらかじめ磁気抵抗素子の両端に加えてお
くことで磁界変化による抵抗変化を最大に引き出すこと
ができる構造となっている。しかし、荷電粒子検出に際
しては、磁気素子による磁界変化の信号を得る必要はな
い。そこで、磁気記録装置として機能するために本来備
えている電気回路から磁気抵抗素子1の電流リード線3
を切り離し、この二つのリード線の端部同士を合体させ
または1本だけ残し、その合体させたまたは残りのリー
ド線を荷電粒子計測装置10につなげることにより荷電
粒子検出器として機能させるものである。
Generally, the magnetoresistive element 1 is made of a ferromagnetic material of Ni, Fe, Co or an alloy thereof, for example, an alloy such as Ni, Fe, etc., and is essentially a minute recording in the magnetic recording layer 7 of the magnetic disk 6. This is for detecting the weak magnetic lines of force of the magnetic element and detecting the signal of the magnetic element by the resistance change of the magnetoresistive element due to the change of the magnetic field strength. in this case,
By applying a predetermined magnetic field to both ends of the magnetoresistive element in advance, the resistance change due to the magnetic field change can be maximized. However, it is not necessary to obtain the signal of the magnetic field change by the magnetic element when detecting the charged particles. Therefore, from the electric circuit originally provided for functioning as the magnetic recording device, the current lead wire 3 of the magnetoresistive element 1 is provided.
Is separated, the ends of the two lead wires are combined or only one is left, and the combined or remaining lead wires are connected to the charged particle measuring device 10 to function as a charged particle detector. .

【0017】[0017]

【発明の効果】以上より明らかなように、この発明の磁
気抵抗素子を用いた荷電粒子放出検出装置は、磁気ヘッ
ド2の再生部の磁気抵抗素子1を荷電粒子検出器とする
ことにより、磁気ヘッド2と磁気ディスク6の接触部で
発生する正、負の荷電粒子を効率よく計測することがで
きる。
As is apparent from the above, in the charged particle emission detection device using the magnetoresistive element of the present invention, the magnetoresistive element 1 in the reproducing portion of the magnetic head 2 is a charged particle detector, so that The positive and negative charged particles generated at the contact portion between the head 2 and the magnetic disk 6 can be efficiently measured.

【0018】特に、荷電粒子検出装置を既存のコンピュ
ータ用の磁気ディスク装置の再生ヘッドを利用して構成
した場合には、実機における荷電粒子の実際の発生状況
を検出することができる。
In particular, when the charged particle detecting device is constructed by utilizing the reproducing head of the existing magnetic disk device for a computer, it is possible to detect the actual generation state of the charged particles in the actual machine.

【0019】[0019]

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の荷電粒子計測装置の構成説明図。FIG. 1 is a structural explanatory view of a charged particle measuring device according to the present invention.

【図2】この発明の荷電粒子計測方法における計測原理
を示す説明図。
FIG. 2 is an explanatory diagram showing a measurement principle in the charged particle measuring method of the present invention.

【符号の説明】[Explanation of symbols]

1 磁気抵抗素子 1a 荷電粒子捕集素子 2 磁気ヘッド 2a 検出器ヘッド 3 電流リード線 4 シールド 4a シールド部材 5 ダイヤモンドライクカーボン(DLC)保護
膜 6 磁気ディスク 6a 被検体 7 磁気記録層 8 ダイヤモンドライクカーボン(DLC)保護
膜 9 電流リード線 10 荷電粒子計測装置 11 パソコン 12 表示装置 13 トリガ回路 100 荷電粒子放出検出装置 100a 荷電粒子放出検出装置
1 Magnetoresistive Element 1a Charged Particle Collection Element 2 Magnetic Head 2a Detector Head 3 Current Lead Wire 4 Shield 4a Shield Member 5 Diamond Like Carbon (DLC) Protective Film 6 Magnetic Disk 6a Subject 7 Magnetic Recording Layer 8 Diamond Like Carbon ( DLC) protective film 9 current lead wire 10 charged particle measurement device 11 personal computer 12 display device 13 trigger circuit 100 charged particle emission detection device 100a charged particle emission detection device

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 磁気抵抗効果型の磁気記録装置の磁気ヘ
ッドの再生部の磁気抵抗素子を電流リード線を介して荷
電粒子計測装置に接続し、前記磁気ヘッドと磁気ディス
クとの接触部で発生する荷電粒子を前記磁気抵抗素子で
捕集し、荷電粒子の電流、または電荷、またはその電荷
が変換された電圧を前記荷電粒子計測装置で増幅及び計
数するように構成したことを特徴とする磁気抵抗素子を
利用した荷電粒子放出検出装置。
1. A magnetoresistive element in a reproducing section of a magnetic head of a magnetoresistive effect type magnetic recording apparatus is connected to a charged particle measuring apparatus via a current lead wire to generate at a contact section between the magnetic head and a magnetic disk. The charged particles to be charged are collected by the magnetoresistive element, and the current or charge of the charged particles or the voltage obtained by converting the charges is amplified and counted by the charged particle measuring device. A charged particle emission detection device using a resistance element.
【請求項2】 磁気抵抗効果型の磁気記録装置の磁気ヘ
ッドの再生部の磁気抵抗素子を電流リード線を介して荷
電粒子計測装置に接続し、前記磁気ヘッドと磁気ディス
クとの接触部で発生する荷電粒子を前記磁気抵抗素子で
捕集し、荷電粒子の電流、または電荷、またはその電荷
が変換された電圧を前記荷電粒子計測装置で増幅及び計
数することを特徴とする荷電粒子放出検出方法。
2. A magnetoresistive element in a reproducing section of a magnetic head of a magnetoresistive effect type magnetic recording apparatus is connected to a charged particle measuring apparatus via a current lead wire, and generated at a contact section between the magnetic head and a magnetic disk. The charged particle emission detection method, characterized in that the charged particles to be collected are collected by the magnetoresistive element, and the current or charge of the charged particles or the voltage obtained by converting the charges is amplified and counted by the charged particle measuring device. .
JP2001002949A 2001-01-10 2001-01-10 Apparatus and method for detecting charged particle emission using magnetoresistive element Expired - Lifetime JP3477516B2 (en)

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