JP3466416B2 - Differential electric mobility meter - Google Patents
Differential electric mobility meterInfo
- Publication number
- JP3466416B2 JP3466416B2 JP09905897A JP9905897A JP3466416B2 JP 3466416 B2 JP3466416 B2 JP 3466416B2 JP 09905897 A JP09905897 A JP 09905897A JP 9905897 A JP9905897 A JP 9905897A JP 3466416 B2 JP3466416 B2 JP 3466416B2
- Authority
- JP
- Japan
- Prior art keywords
- enclosure
- slit
- fine particles
- electric mobility
- differential type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【発明の属する技術分野】本発明はエアロゾルやナノ
（nano）粒子等の微粒子を測定する微分型電気移動度測
定器（ＤＭＡ：differential mobility analyzer）に係
り、とりわけ広範囲に分布した微粒子の粒径を安価かつ
容易に測定することができる微分型電気移動度測定器に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a differential mobility analyzer (DMA) for measuring fine particles such as aerosols and nano particles, and more particularly, to a particle diameter of fine particles distributed over a wide range. The present invention relates to a differential type electric mobility measuring instrument which can be inexpensively and easily measured.
【０００２】[0002]
【従来の技術】近年、半導体製造プロセスにおける粒子
汚染の抑制、大気中における酸性雨やスモッグ等の発生
機構の解明、および量子ナノ材料の開発等に関連して、
大気等の雰囲気中に浮遊するエアロゾルやナノ粒子等の
微粒子が注目を集めている。2. Description of the Related Art In recent years, in connection with the suppression of particle pollution in the semiconductor manufacturing process, the elucidation of the mechanism of acid rain and smog in the atmosphere, and the development of quantum nanomaterials,
Fine particles such as aerosols and nanoparticles that float in the atmosphere such as the atmosphere have been attracting attention.
【０００３】このような微粒子の測定装置としては従来
から微分型電気移動度測定器が知られている。ここで微
分型電気移動度測定器は、帯電した微粒子の電場中での
移動速度（電気移動度）の違いを利用して約１ナノメー
タ（ｎｍ）〜約１０ミクロン（μｍ）の範囲にある微粒
子の粒径を測定するものである（詳細については例えば
文献１（T.Seto,T.nakamoto,K.Okuyama,M.Adachi,Y.Kug
a and K.Takeuchi: “Size distribution measurement
of nanometer-sized aerosol particles usingDMA unde
r low-pressure conditions”,J.Aerosol Sci.,28,pp.1
93-206(1997)）および文献２（E.O.Knutson and K.T.Wh
itby: “Aerosol Classification byElectric Mobilit
y: Apparatus, Theory, and Applications”, J.Aeroso
l Sci.,Vol.6,pp.443-451(1975) ）参照）。As a measuring device for such fine particles, a differential type electric mobility measuring instrument has been conventionally known. Here, the differential type electromobility measuring device utilizes fine particles in the range of about 1 nanometer (nm) to about 10 microns (μm) by utilizing the difference in the moving speed (electromobility) of charged fine particles in an electric field. (For details, see Document 1 (T.Seto, T.nakamoto, K.Okuyama, M.Adachi, Y.Kug).
a and K. Takeuchi: “Size distribution measurement
of nanometer-sized aerosol particles using DMA unde
r low-pressure conditions ”, J. Aerosol Sci., 28, pp.1
93-206 (1997)) and Reference 2 (EOKnutson and KTWh)
itby: “Aerosol Classification by Electric Mobilit
y: Apparatus, Theory, and Applications ”, J. Aeroso
l Sci., Vol.6, pp.443-451 (1975))).
【０００４】ここで、このような微分型電気移動度測定
器の原理について図３により説明する。図３に示すよう
に、微分型電気移動度測定器は、中心ロッド（内筒）２
１と囲み体（外筒）２２とからなる二重円筒構造を有
し、囲み体２２の内周面と中心ロッド２１の外周面との
間には可変電圧源２８により所定電圧が印加されてい
る。また囲み体２２の上部には、囲み体２２の内周面と
中心ロッド２１の外周面との間の空間にシースエアを供
給するための吐出口２３が設けられている。さらに、囲
み体２２の上部には帯電した微粒子を内部に引き込むた
めのスリット２４が設けられ、また中心ロッド２１の下
部にはスリット２４から引き込まれた帯電した微粒子を
外部に取り出すためのスリット２５が設けられている。
なお、囲み体２２の吐出口２３から供給されたシースエ
アは囲み体２２の下部から排出され、ポンプ２６および
フィルタ２７，２７を介して吐出口２３に戻されるよう
になっている。Here, the principle of such a differential type electric mobility measuring instrument will be described with reference to FIG. As shown in FIG. 3, the differential type electric mobility measuring device has a central rod (inner cylinder) 2
1 and an enclosure (outer cylinder) 22 have a double cylindrical structure. A variable voltage source 28 applies a predetermined voltage between the inner peripheral surface of the enclosure 22 and the outer peripheral surface of the center rod 21. There is. A discharge port 23 for supplying sheath air to the space between the inner peripheral surface of the enclosure 22 and the outer peripheral surface of the central rod 21 is provided in the upper portion of the enclosure 22. Further, a slit 24 for drawing the charged fine particles into the inside is provided at the upper part of the enclosure 22, and a slit 25 for taking out the charged fine particles drawn from the slit 24 to the outside is provided at the lower part of the center rod 21. It is provided.
The sheath air supplied from the discharge port 23 of the enclosure 22 is discharged from the lower part of the enclosure 22 and returned to the discharge port 23 via the pump 26 and the filters 27, 27.
【０００５】図３において、帯電した微粒子が囲み体２
２に設けられたスリット２４から引き込まれると、この
引き込まれた微粒子は、囲み体２２の吐出口２３から供
給されるシースエアとともに中心軸方向下方に移動する
とともに、囲み体２２の内周面と中心ロッド２１の外周
面との間に形成される電場の影響を受けて個々の微粒子
の電気移動度に応じた速度で中心軸方向に引き寄せられ
る。そして、所定の軌跡を描いて中心ロッド２１のスリ
ット２５に到達した微粒子のみが外部に取り出される。In FIG. 3, the charged fine particles are surrounded by the enclosure 2.
When drawn in from the slit 24 provided in 2, the drawn-in fine particles move downward in the central axial direction together with the sheath air supplied from the discharge port 23 of the enclosure 22, and at the same time as the inner peripheral surface of the enclosure 22 and the center thereof. Under the influence of an electric field formed between the rod 21 and the outer peripheral surface, the particles are attracted in the central axis direction at a speed corresponding to the electric mobility of the individual particles. Then, only the fine particles that have reached the slit 25 of the central rod 21 along a predetermined locus are taken out to the outside.
【０００６】ここで、中心ロッド２１に設けられたスリ
ット２５に到達する微粒子の電気移動度Ｚp は、次式
（１）により算出される。
Ｚp ＝ｑ・ln（ｒ2 ／ｒ1 ）／（２・π・Ｖ・Ｌ） … （１）
上式（１）において、ｑはシースエアの流量、ｒ1 ，ｒ
2 はそれぞれ中心ロッド２１の外周面の半径，囲み体２
２の内周面の半径である。また、Ｖは囲み体２２の内周
面と中心ロッド２１の外周面との間に印加される電圧、
Ｌはスリット２４およびスリット２５間の距離である。Here, the electric mobility Z p of the fine particles reaching the slit 25 provided in the center rod 21 is calculated by the following equation (1). Z p = q · ln (r 2 / r 1 ) / (2 · π · V · L) (1) In the above formula (1), q is the flow rate of the sheath air and r 1 , r
2 is the radius of the outer peripheral surface of the center rod 21, and the enclosure 2
2 is the radius of the inner peripheral surface. V is a voltage applied between the inner peripheral surface of the enclosure 22 and the outer peripheral surface of the center rod 21,
L is the distance between the slit 24 and the slit 25.
【０００７】また、微粒子の電気移動度Ｚp と粒径Ｄp
との間には次式（２）により表される関係がある。
Ｚp ＝ｎ・ｅ・Ｃm ／（３・π・μ・Ｄp ） … （２）
上式（２）において、ｎは微粒子の電荷量、ｅは電気素
量（１．６×１０-19クーロン）、Ｃm はカニンガムの
補正係数、μは供給されるシースエアの粘性係数であ
る。Further, the electric mobility Z p of the fine particles and the particle size D p
Has a relationship represented by the following equation (2). Z p = neC m / (3πμD p ) ... (2) In the above formula (2), n is the charge amount of the fine particles and e is the elementary charge (1.6 × 10 − 19 Coulomb), C m is the correction coefficient of Cunningham, and μ is the viscosity coefficient of the supplied sheath air.
【０００８】ここで、微分型電気移動度測定器から外部
に取り出される微粒子の粒径Ｄp は上式（１）（２）に
基づいて決定される。なお、このような微分型電気移動
度測定器において、各種の粒径を有する微粒子の測定を
行う場合には、可変電圧源２８により囲み体２２の内周
面と中心ロッド２１の外周面との間に印加される電圧Ｖ
を所定範囲内で変化させ、これにより印加電圧Ｖに対応
する所定粒径Ｄp の微粒子のみを外部に取り出すように
している。Here, the particle diameter D p of the fine particles taken out from the differential type electromobility measuring device is determined based on the above equations (1) and (2). When measuring fine particles having various particle diameters in such a differential type electromobility measuring device, a variable voltage source 28 is used to measure the inner peripheral surface of the enclosure 22 and the outer peripheral surface of the center rod 21. Voltage V applied between
Is changed within a predetermined range so that only fine particles having a predetermined particle diameter D p corresponding to the applied voltage V are taken out to the outside.
【０００９】[0009]
【発明が解決しようとする課題】上述したように、従来
の微分型電気移動度測定器においては、各種の粒径を有
する微粒子の測定を行うために、印加電圧Ｖを所定範囲
内で変化させ、これにより印加電圧Ｖに対応する所定粒
径Ｄp の微粒子のみを外部に取り出すようにしている。
しかしながら、このような微分型電気移動度測定器では
一般に、印加電圧Ｖのダイナミックレンジが一定の狭い
範囲に制限されているので、測定できる微粒子の粒径Ｄ
p の範囲が限定されているという問題がある。As described above, in the conventional differential type electric mobility measuring instrument, in order to measure fine particles having various particle diameters, the applied voltage V is changed within a predetermined range. As a result, only fine particles having a predetermined particle diameter D p corresponding to the applied voltage V are taken out to the outside.
However, in such a differential type electromobility measuring device, the dynamic range of the applied voltage V is generally limited to a certain narrow range, and therefore the measurable particle diameter D
There is a problem that the range of p is limited.
【００１０】なお、このような欠点を解消するための従
来の方法としては、（１）スリット２４，２５間の距離
Ｌの異なる複数の微分型電気移動度測定器を適宜使い分
ける方法か、（２）微分型電気移動度測定器内の所定箇
所にスリット２４，２５間の距離Ｌを調整するためのス
ペーサを挿入する方法がある。As a conventional method for solving such a drawback, (1) a method of properly using a plurality of differential type electromobility measuring devices having different distances L between the slits 24 and 25, or (2) ) There is a method of inserting a spacer for adjusting the distance L between the slits 24 and 25 at a predetermined position in the differential type electric mobility measuring instrument.
【００１１】しかしながら、上述した従来の方法のう
ち、スリット２４，２５間の距離Ｌの異なる複数の微分
型電気移動度測定器を適宜使い分ける方法では、測定の
ために複数の微分型電気移動度測定器を用意しなければ
ならず、コストがかさむという問題がある。However, among the above-mentioned conventional methods, in the method of properly using a plurality of differential type electromobility measuring devices having different distances L between the slits 24 and 25, a plurality of differential type electromobility measuring devices are used for measurement. There is a problem that the cost must be increased because the equipment has to be prepared.
【００１２】また、微分型電気移動度測定器内の所定箇
所にスペーサを挿入する方法では、スリット２４，２５
間の距離Ｌを変更するために微分型電気移動度測定器を
分解した上でスペーサを交換しなければならず、作業が
複雑であるとともに作業時間もかかるという問題があ
る。なお、このような方法では、分解によって微分型電
気移動度測定器の内部を一旦大気中に暴露してしまうの
で、微分型電気移動度測定器内に付着した水分を除去す
るための焼出し等の処理がさらに必要になるという問題
もある。Further, in the method of inserting the spacer at a predetermined position in the differential type electric mobility measuring instrument, the slits 24 and 25 are used.
In order to change the distance L between them, the differential type electric mobility measuring instrument must be disassembled and the spacers must be replaced, which poses a problem that the work is complicated and takes a long time. In such a method, since the inside of the differential type electric mobility measuring instrument is once exposed to the atmosphere by decomposition, baking out for removing the water adhering to the inside of the differential type electric mobility measuring instrument etc. There is also a problem that the above process is further required.
【００１３】なお、上式（１）（２）によれば、理論的
にはシースエアの流量ｑを所定範囲内で適宜変化させる
ことによっても微分型電気移動度測定器から取り出され
る微粒子の粒径Ｄp を変化させることができるが、シー
スエアの流量ｑの変化は微分型電気移動度測定器の測定
条件に大きな影響を与えるので、このような方法では微
粒子の粒径Ｄp を正確に測定することができない。According to the above equations (1) and (2), theoretically, the particle size of the fine particles taken out from the differential electromobility measuring device can also be obtained by appropriately changing the flow rate q of the sheath air within a predetermined range. Although D p can be changed, since the change in the sheath air flow rate q has a great influence on the measurement conditions of the differential electromobility measuring device, such a method accurately measures the particle size D p of the fine particles. I can't.
【００１４】本発明はこのような点を考慮してなされた
ものであり、広範囲に分布した微粒子の粒径を安価かつ
容易に測定することができる微分型電気移動度測定器を
提供することを目的とする。The present invention has been made in consideration of the above points, and it is an object of the present invention to provide a differential type electromobility measuring device capable of inexpensively and easily measuring the particle size of fine particles distributed over a wide range. To aim.
【００１５】[0015]
【課題を解決するための手段】本発明は、基部と、一方
のスリットを有するとともに前記基部に対して移動自在
に連結された囲み体と、前記基部に連結されるとともに
前記囲み体の内部に向かって延びる他方のスリットを有
するロッドとを備え、前記囲み体と前記ロッドとの間に
は所定電圧が印加され、前記囲み体に対して前記基部を
移動させることで前記一方のスリットおよび前記他方の
スリット間の距離を可変としたことを特徴とする微分型
電気移動度測定器を提供する。According to the present invention, there is provided a base, an enclosure having one slit and movably connected to the base, and an enclosure connected to the base and inside the enclosure. A rod having the other slit extending toward, a predetermined voltage is applied between the enclosure and the rod, the one slit and the other by moving the base with respect to the enclosure. There is provided a differential type electric mobility measuring device characterized in that the distance between the slits is variable.
【００１６】また本発明は、上述した微分型電気移動度
測定器において、前記基部と前記囲み体とに連結され前
記囲み体の内部を密封する可動部をさらに備えたことを
特徴とする微分型電気移動度測定器を提供する。Further, the present invention is the differential type electric mobility measuring instrument described above, further comprising a movable part which is connected to the base and the enclosure and seals the inside of the enclosure. An electric mobility measuring instrument is provided.
【００１７】本発明によれば、基部に対して囲み体を移
動自在に連結して一方のスリットおよび他方のスリット
間の距離を可変としているので、一方または他方のスリ
ットから引き込まれた帯電した微粒子が囲み体とロッド
との間に形成された電場内を他方または一方のスリット
まで移動する距離を可変とすることができ、このため広
範囲に分布した微粒子の粒径を安価かつ容易に測定する
ことができる。According to the present invention, since the enclosure is movably connected to the base to make the distance between one slit and the other slit variable, charged fine particles drawn from one or the other slit. It is possible to change the distance traveled in the electric field formed between the enclosure and the rod to the other slit or one of the slits, so that the particle size of the fine particles distributed over a wide range can be measured inexpensively and easily. You can
【００１８】[0018]
【発明の実施の形態】以下、図面を参照して本発明の実
施の形態について説明する。図１および図２は本発明に
よる微分型電気移動度測定器の一実施の形態を示す図で
ある。ここで、図１は微分型電気移動度測定器において
スリット間の距離を最大にした場合を示し、図２は微分
型電気移動度測定器においてスリット間の距離を最小に
した場合を示す。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are views showing an embodiment of a differential type electromobility measuring device according to the present invention. Here, FIG. 1 shows the case where the distance between the slits is maximized in the differential type electric mobility measuring instrument, and FIG. 2 shows the case where the distance between the slits is minimized in the differential type electric mobility measuring instrument.
【００１９】図１および図２に示すように、微分型電気
移動度測定器１は、テフロン材等の絶縁体２と台座３と
からなる基部４と、基部４に対して伸縮体（可動部）５
を介して移動自在に連結された囲み体６と、基部４に連
結されるとともに囲み体６の内部に向かって延びる中心
ロッド７とを備えている。As shown in FIGS. 1 and 2, a differential type electric mobility measuring instrument 1 includes a base 4 composed of an insulator 2 such as a Teflon material and a pedestal 3, and an elastic body (movable part) with respect to the base 4. ) 5
The enclosure 6 is movably connected via the center rod 7 and the center rod 7 is connected to the base 4 and extends toward the inside of the enclosure 6.
【００２０】ここで、囲み体６は帯電した微粒子を内部
に引き込むための一方のスリット８を有し、中心ロッド
７は一方のスリット８から引き込まれた帯電した微粒子
を外部に取り出すための他方のスリット９を有してい
る。なお、一方のスリット８は囲み体６の内周面に沿っ
て環状に設けられ、また他方のスリット９は中心ロッド
７の下部にその外周面に沿って環状に設けられている。Here, the enclosure 6 has one slit 8 for drawing the charged fine particles inside, and the center rod 7 has another slit 8 for taking out the charged fine particles drawn from one slit 8 to the outside. It has a slit 9. It should be noted that one slit 8 is annularly provided along the inner peripheral surface of the enclosure 6, and the other slit 9 is annularly provided under the center rod 7 along the outer peripheral surface thereof.
【００２１】また、囲み体６および中心ロッド７はとも
に導体からなり、中心ロッド７には可変電圧源１２が接
続され、囲み体６は接地されている。The enclosure 6 and the center rod 7 are both made of a conductor, a variable voltage source 12 is connected to the center rod 7, and the enclosure 6 is grounded.
【００２２】さらに、囲み体６の上部には、囲み体６の
内周面と中心ロッド７の外周面との間の空間にシースエ
アを供給するための吐出口１０が設けられるとともに、
シースエアに含まれる不純物を除去するためのフィルタ
１１が取り付けられている。なお、囲み体６の吐出口１
０から供給されたシースエアは囲み体６の下部から排出
され、ポンプ（図示せず）およびフィルタ（図示せず）
を介して吐出口１０に戻されるようになっている。Further, at the upper part of the enclosure 6, a discharge port 10 for supplying sheath air to the space between the inner peripheral surface of the enclosure 6 and the outer peripheral surface of the central rod 7 is provided, and
A filter 11 for removing impurities contained in the sheath air is attached. The outlet 1 of the enclosure 6
The sheath air supplied from 0 is discharged from the lower part of the enclosure 6, and a pump (not shown) and a filter (not shown)
It is designed to be returned to the discharge port 10 via.
【００２３】なお、基部４の台座３と囲み体６とは移動
自在に連結され、図１および図２に示すように、伸縮体
５により囲み体６の内部を密封状態に維持しつつ一方の
スリット８および他方のスリット９間の距離を変化させ
ることができるようになっている。ここで、伸縮体５と
しては例えばベローズ等を用いることができる。The pedestal 3 of the base 4 and the enclosure 6 are movably connected to each other, and as shown in FIGS. 1 and 2, the expandable body 5 maintains the interior of the enclosure 6 in a sealed state. The distance between the slit 8 and the other slit 9 can be changed. Here, for example, a bellows or the like can be used as the elastic body 5.
【００２４】次に、このような構成からなる本実施の形
態の作用について説明する。Next, the operation of this embodiment having such a configuration will be described.
【００２５】図１および図２に示すように、帯電した微
粒子が囲み体６に設けられた一方のスリット８から引き
込まれると、この引き込まれた微粒子は、囲み体６の吐
出口１０から供給される流量ｑのシースエアとともに中
心軸方向下方に移動するとともに、囲み体６の内周面と
中心ロッド７の外周面との間で印加電圧Ｖにより形成さ
れる電場の影響を受けて個々の微粒子の電気移動度Ｚp
に応じた速度で中心軸方向に引き寄せられる。そして、
所定の軌跡を描いて距離Ｌだけ進み、中心ロッド７の他
方のスリット９に到達した所定粒径Ｄp の微粒子のみが
外部に取り出される。As shown in FIGS. 1 and 2, when the charged fine particles are drawn in from one slit 8 provided in the enclosure 6, the drawn-in fine particles are supplied from the ejection port 10 of the enclosure 6. Along with the sheath air having a flow rate q, the particles move downward in the central axis direction, and are affected by the electric field formed by the applied voltage V between the inner peripheral surface of the enclosure 6 and the outer peripheral surface of the central rod 7 to separate individual fine particles. Electric mobility Z p
Is pulled toward the central axis at a speed according to. And
Only a fine particle having a predetermined particle diameter D p , which has reached the other slit 9 of the central rod 7 by advancing a distance L along a predetermined locus, is taken out to the outside.
【００２６】このような微分型電気移動度測定器１にお
いて、広範囲に分布した微粒子の粒径Ｄp を測定する場
合には、まず、囲み体５に対して基部４を移動させて一
方のスリット８および他方のスリット９間の距離Ｌを所
定値に設定する。In measuring the particle diameter D p of fine particles distributed over a wide range in the differential type electric mobility measuring device 1 as described above, first, the base 4 is moved with respect to the enclosure 5 and one of the slits is moved. The distance L between the slit 8 and the other slit 9 is set to a predetermined value.
【００２７】その後、このようにして設定した一方のス
リット８および他方のスリット９間の距離Ｌを一定に保
った状態で、可変電圧源１２により囲み体６の内周面と
中心ロッド７の外周面との間に印加される電圧Ｖを所定
範囲内で変化させる。After that, with the distance L between the one slit 8 and the other slit 9 set in this way being kept constant, the inner peripheral surface of the enclosure 6 and the outer periphery of the center rod 7 are surrounded by the variable voltage source 12. The voltage V applied to the surface is changed within a predetermined range.
【００２８】そして、このようにして印加電圧Ｖを所定
範囲内で変化させて行う測定を、一方のスリット８およ
び他方のスリット９間の距離Ｌを順次変化させながら行
うことにより、一方のスリット８および他方のスリット
９間の距離Ｌおよび印加電圧Ｖに対応して上式（１）
（２）から決定される各種の所定粒径Ｄp を有する微粒
子を外部に取り出す。In this way, the measurement performed by changing the applied voltage V within the predetermined range is performed by sequentially changing the distance L between the one slit 8 and the other slit 9 so that one slit 8 And the above formula (1) corresponding to the distance L between the other slits 9 and the applied voltage V.
Fine particles having various predetermined particle diameters D p determined from (2) are taken out to the outside.
【００２９】なお、図１および図２に示す微分型電気移
動度測定器１において、囲み体６の内周面と中心ロッド
７の外周面との間に印加される電圧Ｖを１〜６０００Ｖ
の範囲で変化させ、また一方のスリット８および他方の
スリット９間の距離Ｌを１〜３０ｃｍの範囲（具体的に
は１，４，７，１０，２０および３０ｃｍ）で変化させ
た場合には、以下の表１および表２に示す範囲に分布し
た微粒子の粒径Ｄp を測定することができる。なお、こ
こでは、中心ロッド７の外周面の半径ｒ1 ，囲み体６の
内周面の半径ｒ2 をそれぞれ２０ｍｍ，２６ｍｍとして
いる。また、表１および表２はそれぞれ、シースエアの
流量ｑを１０，２０（ｌ／ｍｉｎ）とした場合を示して
いる。In the differential type electric mobility measuring instrument 1 shown in FIGS. 1 and 2, the voltage V applied between the inner peripheral surface of the enclosure 6 and the outer peripheral surface of the central rod 7 is 1 to 6000V.
When the distance L between the one slit 8 and the other slit 9 is changed in the range of 1 to 30 cm (specifically 1, 4, 7, 10, 20 and 30 cm), The particle size D p of the fine particles distributed in the ranges shown in Tables 1 and 2 below can be measured. Here, the radius r 1 of the outer peripheral surface of the center rod 7 and the radius r 2 of the inner peripheral surface of the enclosure 6 are set to 20 mm and 26 mm, respectively. Further, Table 1 and Table 2 respectively show cases where the flow rate q of the sheath air is set to 10, 20 (l / min).
【００３０】[0030]
【表１】 [Table 1]
【００３１】[0031]
【表２】 [Table 2]
【００３２】このように本実施の形態によれば、基部４
に対して囲み体６を移動自在に連結して一方のスリット
８および他方のスリット９間の距離を可変としているの
で、一方のスリット８から引き込まれた帯電した微粒子
が囲み体６の内周面と中心ロッド７の外周面との間に形
成された電場内を他方のスリット９まで移動する距離Ｌ
を可変とすることができ、このため広範囲に分布した微
粒子の粒径Ｄp を安価かつ容易に測定することができ
る。Thus, according to this embodiment, the base 4
Since the enclosure 6 is movably connected to the slit 6 so that the distance between the one slit 8 and the other slit 9 is variable, the charged fine particles drawn from the one slit 8 are charged on the inner peripheral surface of the enclosure 6. And the outer peripheral surface of the center rod 7 is moved to the other slit 9 in the electric field formed by the distance L
Can be made variable, so that the particle size D p of the fine particles distributed over a wide range can be measured inexpensively and easily.
【００３３】[0033]
【発明の効果】以上説明したように本発明によれば、帯
電した微粒子が囲み体とロッドとの間に形成された電場
内を移動する距離を可変とすることができ、このため広
範囲に分布した微粒子の粒径を安価かつ容易に測定する
ことができる。As described above, according to the present invention, the distance that charged fine particles move in the electric field formed between the enclosure and the rod can be made variable, and therefore, the distribution can be wide range. The particle size of the formed fine particles can be inexpensively and easily measured.
【図１】本発明による微分型電気移動度測定器の一実施
の形態を示す図。FIG. 1 is a diagram showing an embodiment of a differential type electric mobility measuring device according to the present invention.
【図２】図１に示す微分型電気移動度測定器においてス
リット間の距離を最小にした場合を示す図。FIG. 2 is a diagram showing a case where the distance between slits is minimized in the differential type electric mobility measuring device shown in FIG.
【図３】微分型電気移動度測定器の原理を説明するため
の図。FIG. 3 is a diagram for explaining the principle of a differential type electric mobility measuring instrument.
１ 微分型電気移動度測定器 ４ 基部 ５ 伸縮体（可動部） ６ 囲み体 ７ 中心ロッド ８，９ スリット １２ 可変電圧源 1 Differential type electric mobility measuring instrument 4 base 5 Stretchable body (movable part) 6 Box 7 Center rod 8, 9 slits 12 Variable voltage source
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 15/00 - 15/14 G01N 27/62 - 27/70 Front page continuation (58) Fields surveyed (Int.Cl. 7 , DB name) G01N 15/00-15/14 G01N 27/62-27/70
Claims (2)
自在に連結された囲み体と、 前記基部に連結されるとともに前記囲み体の内部に向か
って延びる他方のスリットを有するロッドとを備え、 前記囲み体と前記ロッドとの間には所定電圧が印加さ
れ、前記囲み体に対して前記基部を移動させることで前
記一方のスリットおよび前記他方のスリット間の距離を
可変としたことを特徴とする微分型電気移動度測定器。1. A base, an enclosure having one slit and movably connected to the base, and another slit connected to the base and extending toward the inside of the enclosure. A rod is provided, and a predetermined voltage is applied between the enclosure and the rod, and the distance between the one slit and the other slit is variable by moving the base portion with respect to the enclosure. The differential type electric mobility measuring instrument characterized by the above.
囲み体の内部を密封する可動部をさらに備えたことを特
徴とする請求項１記載の微分型電気移動度測定器。2. The differential type electric mobility measuring instrument according to claim 1, further comprising a movable portion which is connected to the base portion and the enclosure and seals the inside of the enclosure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09905897A JP3466416B2 (en) | 1997-04-16 | 1997-04-16 | Differential electric mobility meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09905897A JP3466416B2 (en) | 1997-04-16 | 1997-04-16 | Differential electric mobility meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10288600A JPH10288600A (en) | 1998-10-27 |
| JP3466416B2 true JP3466416B2 (en) | 2003-11-10 |
Family
ID=14237105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09905897A Expired - Fee Related JP3466416B2 (en) | 1997-04-16 | 1997-04-16 | Differential electric mobility meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3466416B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003041114A2 (en) * | 2001-11-02 | 2003-05-15 | Yale University | Method and apparatus to increase the resolution and widen the range of differential mobility analyzers (dmas) |
| KR100567788B1 (en) * | 2004-02-13 | 2006-04-05 | 주식회사 현대교정인증기술원 | Apparatus for Measuring Numbers of Particles and Method Thereof |
| JP4604965B2 (en) * | 2005-11-01 | 2011-01-05 | 株式会社島津製作所 | Ion measuring instrument |
| JP5652851B2 (en) | 2010-02-02 | 2015-01-14 | 独立行政法人理化学研究所 | Differential electric mobility classifier, particle measurement system, and particle sorting system |
-
1997
- 1997-04-16 JP JP09905897A patent/JP3466416B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10288600A (en) | 1998-10-27 |
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