JP3450564B2 - Liquid ejection head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
Desired by the generation of air bubbles caused by acting on the body
The present invention relates to a liquid discharge head that discharges a liquid. [0002] The present invention also relates to paper, yarn, fiber, fabric, leather,
For metals, plastics, glass, wood, ceramics, etc.
Printers, copiers,
Facsimile with communication system and printer
Combined with devices such as word processors and various processing devices
An invention that can be applied to industrial recording devices combined
is there. [0004] In the present invention, "record" means a sentence.
Adds meaningful images such as characters and figures to the recording medium
Images that have no meaning, such as patterns
Is also given. [0005] 2. Description of the Related Art Applying energy such as heat to ink
In this condition, there is a steep volume change (bubbles) in the ink
Change, and by the action force based on this state change,
Ink is ejected from the ejection port and adheres to the recording medium
Ink-jet recording method for forming an image by
A loose bubble jet recording method is conventionally known. this
U.S. Pat.
No. 4,723,129, etc.
As described above, the ejection port for ejecting ink and the ejection port
An ink passage communicating with the ink passage and the ink arranged in the ink passage;
Electrothermal transformation as an energy generating means for discharging
Transformants are commonly arranged. According to such a recording method, high quality
Images can be recorded at high speed and with low noise.
The head that performs the recording method of
Since the outlets can be arranged at high density, small devices
To easily obtain high-resolution recorded images and even color images.
It has many excellent points that can be. This
Therefore, this bubble jet recording method has recently been
Printer, copier, facsimile, etc.
Used in industrial systems such as textile printing equipment.
Is being used until now. [0007] As described above, the bubble jet technology is widely used.
As they are being used, various demands have recently been
Is growing. For example, in response to a demand for improved energy efficiency,
Considerations such as adjusting the thickness of the protective film
Optimization of heat bodies is mentioned. This technique has occurred
This is effective in improving the efficiency of heat transfer to the liquid. In order to obtain a high quality image, ink
Discharge speed is fast and good based on stable bubble generation
Drive to provide a liquid ejection method that can perform
Dynamic conditions are suggested, and from the viewpoint of high-speed recording,
The speed of filling (refilling) the discharged liquid into the liquid flow path
With improved flow path shape to obtain a better liquid ejection head
Has also been proposed. [0010] Of the flow path shapes, FIG.
(A) and (b) are disclosed in JP-A-63-199997.
No. 2, for example. Described in these publications
The flow path structure and head manufacturing method
Generated back wave (direction opposite to the direction toward the discharge port)
(Pressure toward liquid chamber 12)
It is the invention which was completed. This back wave is generated in the
Known as lost energy because it is not energy
You. The invention shown in FIGS. 28 (a) and 28 (b)
Separated from the bubble generation region formed by element 2 and generated heat
Valve 10 located on the opposite side of discharge port 11 with respect to element 2
Is disclosed. In FIG. 28B, this valve 10
Affixed to the ceiling of the flow channel 3 by a manufacturing method using a plate material, etc.
Holds the initial position as if sticking, and flows
It is disclosed as hanging into the road 3. This departure
Akira suppresses a part of the above-mentioned back wave by the valve 10.
Is disclosed as suppressing energy loss by
ing. However, in this configuration, the discharge
When air bubbles are generated inside the flow path 3 for holding the liquid to be
As can be seen from the examination, part of the back wave by the valve 10
Is practical for liquid ejection.
It turns out there is no. [0013] Originally, the back wave itself is as described above.
It is not directly related to ejection. This back wave is the flow path
3, at the time of occurrence as shown in FIG.
The pressure of the air bubbles that is directly related to the discharge
The liquid is in a dischargeable state. Therefore, back waves
However, even if some of them are suppressed,
Obviously it has no significant effect. On the other hand, in the bubble jet recording method,
Is to repeat heating with the heating element in contact with the ink.
Deposits on the surface of the heating element due to scorching of the ink
However, depending on the type of ink, this deposit is often generated.
This destabilizes the generation of air bubbles,
In some cases, it was difficult to discharge ink. Also vomit
If the liquid to be discharged is a liquid that is easily
Even if the liquid is difficult to generate bubbles,
It is desirable to have a method to discharge well liquids without deteriorating
Was rare. [0015] From such a viewpoint, bubbles are generated by heat.
Liquid (foaming liquid) to be discharged and liquid to be discharged (discharged liquid)
Is a separate liquid, and the pressure generated by the foaming liquid is transmitted to the discharge liquid
Is disclosed in Japanese Patent Application Laid-Open No. 61-69.
467, JP-A-55-81172, U.S. Pat.
No. 4,480,259. this
In these publications, the ink that is the ejection liquid and the foaming liquid
The liquid is completely separated by a flexible membrane such as rubber
Avoid direct contact, and pressurize the
The force is transmitted to the liquid by deformation of the flexible membrane.
ing. With such a configuration, the deposits on the surface of the heating element
Prevention and improvement of the degree of freedom in selecting the liquid to be ejected.
You. However, as described above, the discharge liquid and the foaming liquid
In a head that is completely separated from the
With a configuration that transmits force to the liquid by elastic deformation of the flexible membrane
The flexible membrane absorbs the pressure of foaming
I will. In addition, the deformation amount of the flexible film is not so large.
To obtain the effect of separating the discharge liquid and the foaming liquid.
Although it is possible, the discharge efficiency and discharge power are reduced
have done. [0017] SUMMARY OF THE INVENTION
Incoming air bubbles (especially air bubbles accompanying film boiling) are formed in the liquid flow path.
The basic ejection characteristics of the liquid ejection method
From an unthinkable perspective
The main background issue is to raise it to the same level. We return to the principle of droplet ejection,
New droplet ejection using bubbles that could not be obtained conventionally
To provide a method and a head used for the method
Researched. At this time, the mechanism of the mechanism of the movable member in the flow path
Starting from the operation of the movable member in the liquid flow path
Technology analysis and the principle of droplet ejection by air bubbles
Second technical analysis starting from, and heat generation for bubble formation
A third analysis starting from the bubble formation region of the body
Was. From these analyses, the fulcrum of the movable member and
The free end is placed on the discharge port side, that is, on the downstream side.
The movable member should be a heating element or
Is placed on the air bubble generation area to actively generate air bubbles.
A completely new technology for controlling has been established. Next, the energy which the bubble itself gives to the discharge amount
Consider the growth component on the downstream side of the bubble when considering
Is the largest factor that can significantly improve the discharge characteristics
Of knowledge. That is, the growth component on the downstream side of the bubble is discharged.
Efficient conversion in the outgoing direction is the discharge efficiency and discharge speed
It also turned out to be an improvement. From this,
The authors actively promoted the growth component on the downstream side of the bubble to the movable member.
Higher than the conventional technology of moving to the free end side
Technology level. Further, an example of a heating area for forming a bubble
For example, when passing through the center of the area of the electrothermal transducer in the liquid flow direction
In the area downstream from the core wire or on the surface that controls foaming
Movable members, liquid flow paths, etc. involved in the growth of bubbles downstream of the core
It is also preferable to consider the structural elements of
won. On the other hand, the arrangement of the movable member and the
Considering the structure, the refill speed can be greatly improved
I found that I can do it. Further, the inventors have analyzed these three technical analyzes.
In addition to the above, as a fourth technical analysis, there is a movable member
In the series of operating principles of the liquid ejection head,
By examining and analyzing the relationship with defoaming,
Invented the invention. That is, below the initial position of the movable member (air
The free end of the movable member is excessively displaced toward the bubble generation area)
Regulations to dramatically improve the durability of movable members.
It turned out that it is possible to raise. The inventors have obtained the knowledge obtained through the research as described above.
And, in particular, from the perspective of the fourth technical analysis,
The present invention has been accomplished with respect to improvement of durability. The main objects of the present invention are as follows. [0027] A first object of the present invention is to remove bubbles and a movable member.
In the method of discharging droplets using
It is to provide a new structure related to the above. [0028] A second object of the present invention is to add to the first object.
It is extremely novel by fundamentally controlling the generated bubbles.
It is to provide a simple liquid ejection principle. A third object of the present invention is to provide a discharge efficiency and a discharge pressure.
Significantly stores heat in the liquid on the heating element while improving power
In addition to reducing the amount of air bubbles remaining on the heating element,
A liquid ejection method and a liquid capable of discharging a good liquid
An object of the present invention is to provide a discharge head and the like. [0030] A fourth object of the present invention is to provide a liquid crystal device using back waves.
At the same time as suppressing the inertial force in the direction opposite to the body feeding direction
In addition, the amount of meniscus retraction is reduced by the valve function of the movable member
To increase the refill frequency, print speed, etc.
It is another object of the present invention to provide a liquid discharge head or the like in which is improved. [0031] In addition, a fifth object of the present invention is to provide a heating element
Reduces the amount of deposits on
Liquid ejection with sufficient ejection efficiency and ejection power
An object of the present invention is to provide a discharge method, a liquid discharge head, and the like. A sixth object of the present invention is to provide a movable member
Movable by regulating the amplitude of excessive vibration within a desired range
Liquid discharging method and liquid discharging method with further improved durability of members
To provide an output head. Further, a seventh object of the present invention is to provide a
Liquid ejection method and liquid ejection method
To provide a storage device or the like. [0034] The above-mentioned object is achieved.
The typical requirements of the present invention are as follows.
is there. [0035]The discharge port that discharges the liquid and the liquid in the flow path
A heating element used to generate air bubbles
The bubble generation region and the bubble generation at a distance from the heating element
Movable member facing the area and having a free end and a fulcrum
And the inner wall surface of the flow path upstream of the heating element
Is connected to the heating element substantially flatly or gently.
Pressure based on the generation of air bubbles in the air bubble generation section.
The movable member is displaced by a force, and the movable member is displaced.
Liquid discharge head for discharging liquid from the discharge port by using
And the side of the movable member facing the bubble generation region.
Is provided with a convex portion, and the convex portion generates bubbles.
When the previous position of the movable member is the first position,
When the free end region of the movable member exceeds the first position,
It is a regulating means to regulate displacement to the bubble generation area.
And a liquid discharge head. [0036] [0037] [0038] [0039] [0040] [0041] [0042] [0043] [0044] [0045] [0046] [0047] [0048] [0049] In the present invention having the above configuration,
The free end of the moving member exceeds the first position and is on the bubble generation region side
(To the side close to the heating element) to prevent excessive displacement.
It is possible to improve the durability of the movable member
did it. As described above, a very novel ejection principle
According to the liquid ejection method, head and the like of the present invention based on
Effect of moving bubble and movable member displaced by this
And efficiently discharge the liquid near the discharge port.
The conventional bubble jet discharge method, head
Discharge efficiency can be improved as compared with a nozzle or the like. For example, the present invention
In the most preferred form of
And improved discharge efficiency. According to a further characteristic configuration of the present invention,
No ejection even when left for long periods at low temperature or low humidity
Pre-ejection even if it becomes non-ejection
Normal with only a small amount of recovery processing such as recovery and suction recovery
There is also an advantage that the state can be returned immediately. Specifically, a conventional bag having 64 discharge ports is used.
Most of the jet type heads will not discharge
Even under long-term storage conditions, the head of the present invention does not exceed about half.
Only the lower discharge port becomes defective in discharge. Also these
If the head is recovered by preliminary discharge,
Conventionally, it was necessary to perform thousands of preliminary discharges with the head,
In the present invention, it is only necessary to perform recovery with about 100 preliminary ejections.
Was enough. This is due to the shorter recovery time and the
Reduces body loss and significantly reduces running costs
Means that it is possible. In particular, the refill characteristics of the present invention are improved.
According to the configuration, response during continuous ejection and stable formation of bubbles
Long, stable droplets and high speed liquid ejection
Recording and high-quality recording were enabled. Regarding the other effects of the present invention,
It will be understood from the description of the examples. Note that the terms "upstream", "down"
"Flow" means the bubble generation area (or movable part)
Material), and the flow direction of the liquid toward the discharge port,
Or expressed in terms of this structural direction.
You. The “downstream side” of the bubble itself is
Ejection of air bubbles mainly acting directly on ejection of droplets
Represents the mouth part. More specifically, to the center of the bubble
The downstream side with respect to the flow direction and the structural direction,
Or, the air generated in the area downstream of the area center of the heating element
Means foam. In the description of the present invention, “substantially dense
"Closed" means when the movable member is displaced when the bubble grows
Air bubbles slip through gaps (slits) around the movable member
It means a state where it cannot be broken. Further, the “separation wall” in the present invention refers to a
In the definition, the bubble generation area and the area directly communicating with the discharge port are defined.
To separate the walls (which may include movable members)
In a narrow sense, the flow path including the bubble generation area is directly connected to the discharge port.
Separate the liquid flow paths that are in contact with each other, and
Means to prevent body mixing. Further, the "free end" of the movable member referred to in the present invention
The `` area '' is the free end, which is the downstream end of the movable member,
Or the free end side end, or the area where the free end and the side end meet
That means. [0061] 【Example】 (Explanation of principle) Hereinafter, the present invention can be applied with reference to the drawings.
The principle of ejection will be described. FIG. 1 shows that the liquid discharge head is cut in the liquid flow direction.
FIG. 2 shows a schematic cross-sectional view of the liquid ejection.
FIG. 2 shows a partially cutaway perspective view of a head. The liquid discharge head shown in FIG. 1 discharges liquid.
Energy to the liquid
2 (40 μm × 1 in FIG. 2)
(A heating resistor having a shape of 05 μm) is provided on the element substrate 1.
And a liquid flow path 1 corresponding to the heating element 2 on the element substrate.
0 is arranged. The liquid flow path 10 communicates with the discharge port 18
For supplying liquid to the plurality of liquid channels 10
The liquid discharged from the discharge port, which communicates with the common liquid chamber 13
An amount of liquid suitable for the body is received from the common liquid chamber 13. On the element substrate of the liquid flow path 10,
It faces the heating element 2 and has elasticity such as metal.
Plate-shaped movable member 31 made of a material
Are provided in a cantilever shape. One end of this movable member is liquid
A photosensitive resin or the like is patterned on the wall of the flow path 10 or on the element substrate.
Fixed to the base (supporting member) 34 formed by
I have. As a result, the movable member is held and the fulcrum is
(Fulcrum portion) 33 is constituted. The movable member 31 is used for discharging the liquid.
From the common liquid chamber 13 through the movable member 31 to the discharge port 18 side
Fulcrum (fulcrum part; fixed)
End) 33, and the free end is located downstream with respect to the fulcrum 33.
(Free end portion) Position facing heating element 2 so as to have 32
About 15 μm from the heating element while covering the heating element 2
It is arranged at a distance of degrees. This heating element and movable member
Is the bubble generation region. In addition, a heating element, a movable member
The type, shape and arrangement of the
Shape that can control bubble growth and pressure propagation as described
And arrangement. The above-described liquid flow path 10
Is a movable member to explain the flow of liquid,
The part directly communicating with the discharge port 18 with the boundary 31
1 liquid flow path 14, the bubble generation area 11 and the liquid supply path 1
2 is divided into two regions of the second liquid flow path 16 having
I do. The movable member 31 is generated by causing the heating element 2 to generate heat.
Acts on the liquid in the bubble generation region 11 between the heating element 2
And the liquid is described in US Pat. No. 4,723,129.
Generate bubbles based on the film boiling phenomenon as shown
You. Pressure due to bubble generation and bubbles have priority over movable members
And the movable member 31 is moved to the position shown in FIG.
As shown in FIG. 2, the size is larger on the ejection port side around the fulcrum 33.
Displace to open. Displacement or deformation of the movable member 31
Pressure propagation and air
The growth of the bubble itself is guided to the discharge port side. Here, the basic ejection applied to the present invention
One of the principles will be described. The most important principle in the present invention
One is that a movable member arranged to face the air bubble
Based on the bubble pressure or the bubble itself, a steady state first
From the position to the second position, which is the position after the displacement.
Pressure caused by the generation of bubbles by the movable member 31 displaced
And the bubbles themselves are guided to the downstream side where the discharge port 18 is arranged.
is there. This principle is based on the conventional liquid flow without using a movable member.
FIG. 3 schematically showing the road structure is compared with FIG. 4 of the present invention.
Will be described in more detail. Here, in the direction of the discharge port
The pressure propagation direction is VA, and the pressure propagation direction to the upstream side is VA.
VB. A conventional head as shown in FIG.
The direction of pressure propagation by the generated bubbles 40
There is no configuration. Therefore, the pressure propagation direction of the bubble 40 is V1
~ V8 and vertical direction of the bubble surface
I was right. Among them, it has the greatest effect on liquid ejection
Those having a component in the pressure propagation direction in the VA direction are V1 to V
4. In other words, the pressure of the part closer to the discharge port than the position of almost half of the bubble
Directional component of force propagation, liquid discharge efficiency, liquid discharge force, discharge
This is an important part that directly contributes to speed and the like. In addition, V1
Works efficiently because it is closest to the direction of the discharge direction VA.
In addition, V4 has a relatively small directional component toward VA. On the other hand, in the case of the present invention shown in FIG.
In this case, the movable member 31 is moved in various directions as in FIG.
The pressure propagation directions V1 to V4 of the bubbles facing
(Discharge port side) and convert to VA pressure propagation direction
Therefore, the pressure of the bubble 40 can be directly and efficiently increased.
This will contribute to ejection. The direction of bubble growth is also the same as the pressure propagation direction.
Are guided in the downstream direction similarly to the directions V1 to V4, and
It grows big in. In this way, the growth direction of the bubble itself
Control by the movable member to control the pressure propagation direction of the bubble
By doing so, the fundamentals such as ejection efficiency, ejection force and ejection speed
Improvement can be achieved. Next, returning to FIG.
The discharge operation of the pad will be described in detail. FIG. 1A shows that the heating element 2 has electric energy or the like.
Is the state before the energy of
This is the state before the occurrence. The important thing here is moving parts
The material 31 generates bubbles due to the heat generated by the heating element.
Provided at a position facing at least the downstream portion of this bubble
It is being done. In other words, the downstream side of the bubble is the movable part
At least heat is generated on the liquid flow path structure so as to affect the material
Downstream from the area center 3 of the body (through the area center 3 of the heating element)
Movable to a position downstream of a line perpendicular to the length direction of the flow path)
A member 31 is provided. FIG. 1B shows that the heating element 2 has electric energy or the like.
Is applied to the heating element 2 to generate heat.
A part of the liquid filling the bubble generation area 11 is heated and generated.
Part of the liquid that fills the bubble generation region 11
This is a state in which bubbles are generated due to heating and film boiling. At this time, the movable member 31
Based on the pressure, the direction of bubble pressure propagation is changed to the discharge port direction.
From the first position to the second position so that here
What is important is that the free end 3 of the movable member 31 is
2 on the downstream side (discharge port side) and the fulcrum 33 on the upstream side
(Common Liquid Chamber)
At least part of it is downstream of the heating element, that is, downstream of the bubble.
It is to face the minute. FIG. 1C shows a state in which bubbles 40 have further grown.
The movable member according to the pressure generated by the bubble 40
31 is further displaced. The generated bubbles are below the upstream
And the first position of the movable member (dotted line)
Position). As described above, according to the growth of the bubble 40, the movable portion
As the material 31 is gradually displaced, the pressure of the bubble 40 is propagated.
Direction, or the direction in which volume movement is easy,
The direction of bubble growth can be directed uniformly to the discharge port.
It is considered that the discharge efficiency can be improved. The movable member is
When guiding bubbles and foaming pressure toward the discharge port,
Becomes almost efficiency depending on the magnitude of the propagating pressure
Can control the direction of pressure propagation and bubble growth
it can. FIG. 1 (d) shows that the bubbles 40 have the above-mentioned film boiling.
After that, it shrinks and disappears due to a decrease in the internal pressure of the bubble.
Is shown. The movable member 31 that has been displaced to the second position
Is due to the negative pressure caused by the contraction of the air bubbles and the spring property of the movable member itself.
Initial position (first position) in FIG.
Return to. In addition, at the time of defoaming,
In order to compensate for the shrinkage volume of the bubbles,
In order to supplement the integration, the upstream side (B),
Like VD1 and VD2, and from the outlet side
The liquid flows in like the flow Vc. As described above, the operation of the movable member accompanying the generation of air bubbles and
The operation of ejecting liquid has been described, but the following is an explanation of the present invention.
Liquid refill in the usable liquid ejection head.
Will be explained. After FIG. 1 (c), the bubble 40 has a maximum volume.
When the process enters the defoaming process, make up the defoamed volume.
Volume of liquid is ejected from the first liquid flow path 14 to the bubble generation area.
The liquid flows from the mouth side and the common liquid chamber 13 side of the second liquid flow path 16.
In the conventional liquid flow path structure having no movable member 31,
The amount of liquid flowing from the discharge port side to the defoaming position and whether it is a common liquid chamber
The amount of liquid flowing in is closer to the discharge port than the bubble generation area
Due to the flow resistance between the part and the part close to the common liquid chamber.
(Based on flow path resistance and liquid inertia). Therefore, the flow resistance on the side close to the discharge port is small.
The liquid flows from the discharge port side to the defoaming position.
The retreat amount of the meniscus included will be large. Special
In addition, the flow resistance on the side close to the discharge port is
The more you try to increase the discharge efficiency by reducing the
The regression of Niscus M increases and the refill time increases
Therefore, high-speed printing is hindered. On the other hand, in this configuration, the movable member 31 is provided.
Therefore, the volume W of the bubble is1Above the position
Is W1 and the bubble generation region 11 side is W2.
The meniscus retreats when the movable member returns to its original position
And the remaining liquid supply for the volume of W2 is mainly
The liquid supply from the flow VD2 of the second flow path 16 is performed.
You. By this, conventionally, it corresponds to about half of the volume of the bubble W
While the amount that was made was the amount of meniscus retreat,
Reduced meniscus retreat to less than half of W1
It became possible to obtain. Further, the liquid supply for the volume of W2 is performed at the time of defoaming.
Along the heating element side surface of the movable member 31 using the pressure
And forcedly operate mainly from the upstream side (VD2) of the second liquid flow path.
As a result, faster refill was realized. The characteristic feature here is that it is erased by the conventional head.
When refilling using the pressure at the time of foaming, meniscus
Vibration increases, leading to deterioration of image quality.
However, in the refill of this embodiment, the movable member
Area of the first liquid flow path 14 on the discharge port side and the bubble generation area
Since the flow of the liquid on the discharge port side with the nozzle 11 is suppressed,
That the vibration of the scass can be extremely reduced.
You. As described above, the above-described structure applied to the present invention is used.
The bubbling area is formed through the liquid supply path 12 of the second liquid flow path 16.
Forced refill to the area and meniscus retreat and vibration described above
Achieving high-speed refill by suppressing
Used for stable and high-speed repetitive ejection and printing
In this case, improvement in image quality and high-speed recording can be realized. In the above configuration of the present invention,
It has the following effective functions. It is a bubble
Suppresses pressure propagation (back wave) due to generation of pressure
It is to be. FeverbodyOf the bubbles generated on 2, common
Most of the pressure due to bubbles on the liquid chamber 13 side (upstream side)
Force to push back the liquid toward the upstream side (back wave)
I was This back wave is caused by the upstream pressure,
This causes the amount of liquid transfer and the inertial force associated with liquid transfer,
These reduce the refill of liquid into the liquid flow path and drive at high speed
Was also an obstacle. In this configuration, first,
By suppressing these effects on the upstream side by the material 31
Also improve refillability. Next, a further characteristic structure and effect of this embodiment will be described.
The result will be described below. In the present embodiment, the second liquid flow path 16
The heating element 2 is connected to the heating element 2 substantially flat upstream (heating element surface
Liquid supply passage 12 having an inner wall
have. In such a case, the bubble generation region 11 and
The supply of the liquid to the surface of the heating element 2
Along the surface on the side close to the bubble generation area 11, as VD2
Done. For this reason, liquid may stagnate on the surface of the heating element 2.
Is suppressed and the gas dissolved in the liquid precipitates and disappears.
So-called residual air bubbles remaining without foaming are easily removed,
Also, the heat storage in the liquid does not become too high. Follow
To generate more stable bubbles at high speed
Can be. In this configuration, the inner wall is substantially flat.
In the above description, the liquid supply path 12 is provided.
And smoothly connect to the surface of the heating element,
As long as it has a liquid supply path, and stagnation of liquid on the heating element
Or a shape that does not cause large turbulence in the liquid supply.
No. Further, the supply of the liquid to the bubble generation area is possible.
From VD1 via the side of the moving member (slit 35)
Some are also However, the pressure at the time of bubble generation
As shown in Fig. 1, the bubble generation area
Large movable member so as to cover the entire surface (cover the heating element surface)
The movable member 31 returns to the first position
Near the bubble generation region 11 and the discharge port of the first liquid flow path 14
In the case where the flow resistance of the liquid with the region becomes large,
The liquid flowing from the aforementioned VD1 toward the bubble generation region 11
Flow is obstructed. However, in the head structure of this configuration,
The flow VD for supplying the liquid to the bubble generation area2
Liquid supply performance becomes extremely high,
To improve the ejection efficiency so that the material 31 covers the bubble generation region 11.
Even with the required structure, the liquid supply performance may be reduced.
Absent. The free end 32 of the movable member 31 and the support
The positions of the points are, for example, as shown in FIG.
On the other hand, it is downstream from the fulcrum. For such a configuration,
During the foaming described above, the pressure propagation direction and growth direction of
Since functions and effects such as guiding to the exit side can be realized efficiently
is there. In addition, this positional relationship is dependent on the function and effect on ejection.
Not only the liquid flowing through the liquid flow path 10 when supplying the liquid
If you can reduce the flow resistance to the body and refill at high speed
The effect has been achieved. This is shown in FIG.
The meniscus M receded due to the outflow is discharged by the capillary force
When returning to 18, or liquid supply for defoaming is performed
In the case, the liquid flow path 10 (the first liquid flow path 14, the second liquid flow path 16
To the flows S1, S2, S3 flowing in
Because the free end and the fulcrum 33 are arranged so that they do not
is there. Supplementally, in the present configuration,
The free end 32 of the movable member 31 moves the heating element 2 to the upstream area.
Area 3 (area of heating element)
Line passing through the center (center) and perpendicular to the length direction of the liquid flow path)
Extending to the heating element 2 so as to face the downstream position
are doing. As a result, the heating element is located below the area center position 3.
Pressure that greatly contributes to the discharge of liquid generated on the flow side, or
The bubble is received by the movable member 31, and this pressure and the bubble are discharged.
It can be guided to the mouth side, fundamentally improving discharge efficiency and discharge force.
Can be up. In addition, the upstream side of the bubble is used.
It has gained many effects. In this configuration,
The free end of the movable member 31 is performing mechanical displacement momentarily.
Are also considered to have contributed effectively to the ejection of liquid.
available. Hereinafter, embodiments of the present invention will be described with reference to the drawings.
Will be described. <referenceExample 1> FIG. 6 shows the present invention.is connected withFirstreferenceHere is an example. In FIG.
A indicates a state where the movable member is displaced upward.
(Bubble is not shown), B is the movable member in the initial position (1st position)
Position), and the state of B indicates that the foamed region 1
1 is substantially sealed with respect to the discharge port 18.
(Here, although not shown, a flow path wall is provided between A and B.
And separates the flow path from the flow path. ) Possible in FIG.
The moving member 31 is provided with two bases 34 on the side, and a liquid supply
A supply path 12 is provided. Thereby, the heating element of the movable member
Along the side surface and also substantially flat with the surface of the heating element
In other words, the liquid
Supply can be made. Here, the initial position of the movable member 31 (first position)
), The movable member 31 is located on the downstream side and the side of the heating element 2.
Close to heating element downstream wall 36 and heating element side wall 37
Or in close contact with the discharge port 18 of the bubble generation area 11
Is substantially sealed. For this reason, bubbles in foaming
Pressure, especially the pressure downstream of the bubble,
It can be concentrated on the end side. Further, at the time of defoaming, the movable member 31 is positioned first.
The liquid is supplied to the heating element when defoaming.
11The discharge port side of the
Various methods described in the principle explanation section above,
The effect can be obtained. Also, effects on refills
To obtain the same functions and effects as described above
Can be. In particular, booksreferenceIn the example, the movable member is
When returning to the first position from the second position, the movable member
The end region further enters the bubble generation region from the first position
Suppresses downward displacement, which makes it closer to the heating element
Control means (heating element downstream wall 36, heating element side wall)
are doing. For this reason, excessive downward displacement of the movable member is restricted.
And the durability of the movable member can be further improved.
You. Here, the bookReference exampleThe characteristics of
This will be described in more detail. FIG. 7 shows the liquid flow path 1 of the liquid discharge head of FIG.
0 is cut at a position passing through the bubble generation area 11 and shown in the operation order.
FIG. FIG. 7A shows a state before the operation, and
The member is in the first position (initial position). At this time the movable member
The free end area of the movable part
The free end of the material is physically restricted from displacing downward.
I have. FIG. 7B shows a state in which the heating element generates heat.
As shown in FIG.
FIG. Then, defoaming starts
Of the movable member itself due to the
The movable member is moved to the first position as shown in FIG.
Return to position. At this time, the free end region of the movable member is
Since the downward displacement is suppressed by the control means,
The downward displacement of the free end region of the member is suppressed. Also regulated
Movable with the heating element downstream wall 36 and the heating element side wall 37 also serving as a means
The bubble generation region 11 is defined by the member 31 and the region on the discharge port side of the liquid flow path.
Area is virtually sealed,
The bubble generation region is caused by the shrinkage of the bleeding bubble (FIG. 7D).
Negative pressure increases and is refilled by volume reduction
Therefore, deformation of the movable member is suppressed. In addition, the bookreferenceIn the example, FIG.
The base 34 for supporting and fixing the movable member 31 is
2 and a smaller distance than the liquid flow path 10.
With the base 34 having a small width, the liquid supply path 1
2 is supplied. The shape of the base 34
Not limited to this, as long as the refill can be performed smoothly
I just need. The bookreferenceIn the example, the movable member 31
The distance between the heating element 2 and the heating element 2 is set to about 15 μm,
As long as the pressure is sufficiently transmitted to the movable member.
No. As described above, the bookreferenceIn the example, the heating element downstream
The movable member is controlled by regulating means such as a wall 36 and a heating element side wall 37.
31, especially the free end region regulates displacement below the first position.
Control to increase the efficiency of liquid refill as described above.
Not only the displacement but also the displacement of the free end area of the movable member.
Thus, only the upward displacement can be performed from the first position. As a result, the distortion due to the bending stress at the fulcrum portion is obtained.
Can be integrated into one-way components, which reduces the durability of the movable member.
It has become possible to dramatically improve. <referenceExample 2> Figure 8 shows the bookreferenceTypical configuration of the flow path of the example liquid ejection head
(A) is the first liquid flow path 14,
The positional relationship between the movable member 31 and the second liquid flow path 16
FIG. 4B is a plan view for explaining, and FIG.
Sectional view along the line, (c) is a sectional view along the line VB-VB1
It is. The second liquid flow path 16 is narrowed upstream of the heating element 2.
The pressure at the time of foaming has the second liquid flow path 4
A chamber (foaming chamber) structure that suppresses escape through
Has become. As before, the liquid ejection without moving members
Pressure generated on the liquid chamber side from the heating element
If a constriction is provided so as not to escape to the
Considering the body refill, the cross section of the flow path at the stenosis
It was necessary to adopt a configuration in which the product did not become too small. However, the bookReference exampleIn the case of
Most of the liquid in the first liquid flow path 14 is
The liquid in the second liquid flow path 16 provided with 2 is not much consumed
The liquid that only contributes to foaming is not
What is necessary is just to fill the bubble generation area of the path 16. Therefore, on
The intervening distance in the stenosis portion 19 described above is very
At the time of bubbling generated in the second liquid flow path 16
Without moving too much to the surroundings
Can be turned to one side. As a result, this pressure is movable
Since the pressure is used as the discharge pressure via the member 31, the pressure is higher.
Discharge efficiency and discharge can be obtained. However, the shape of the second liquid flow path 16 is as described above.
The pressure is not limited to the structure, but is effective due to the bubble generation.
Any shape that can be transmitted to the movable member side is acceptable. In FIG. 8C, the width of the heating element 2 is H
1. The width of the second liquid flow path 16 is H2, and the movable member 31
Is H3, H2> H1> H3 In the position shown in FIG.
There is no restriction on the direction displacement. However, the cantilever-shaped movable part
Part of the second liquid flow path 16 immediately below the free end of the material 31
Is tapered (tapered), so that the movable member 3
1 is returned to the first position by the edge near its free end 32.
When returning, it comes into contact with the second liquid flow path wall 23. The second liquid flow path wall 23 also serving as the regulating means
It is possible to regulate the downward displacement of the free end by
As described above, the durability of the movable member 31 is improved.
While improving discharge efficiency and refillability
Was. <referenceExample 3> FIG. 9A illustrates the first liquid flow path 14 and the movable member 3 described above.
The arrangement relationship between the first and second liquid flow paths 16 was explained.
(B) is along the IV-IV1 line of (a).
It is sectional drawing. Here, the movable member 31 is in a natural state (eg,
In other words, the position where the movable wall is in a non-operating state) is the first position.
And When the movable member 31 is in the first position,
At least a part of the edge portion 31 (in this embodiment, the side portion and
And a part of the free end) constitute each second liquid flow path 16.
It contacts the liquid flow path wall 23. Therefore, the arrow from the initial position
When the movable member displaced in the direction A returns to the initial position again,
Since the road wall 23 becomes an obstacle, it enters the second liquid flow path 16 side.
I have no choice. In this embodiment, the width of the movable member is reduced.
The width is set wider than the width of the heater. Therefore, in the figure
As shown, the width of the heating element 2 is H1, and the width of the second liquid flow path is H1.
Assuming that H2 and the width of the movable member 31 are H3, H3> H2 It has become. In addition, H2> H1
Improves the margin for misalignment in assembly
be able to. BookreferenceAn example is by satisfying the above relationship.
And stabilizing the return of the movable member to the initial position.
In addition, a more stable discharge state compared to the conventional one
Can be achieved, and both discharge efficiency and durability are
Thus, a liquid ejection head that was significantly better than the above was obtained. <referenceExample 4> 10 and 11 show the present invention.is connected withFourthreferenceExplain example
FIG. FIG. 10A shows the movable member 31 and the second liquid flow.
FIG. 3 is a plan view showing an arrangement relationship between a path 16 and a heating element 2. Figure
10B is a cross-sectional view taken along the line AA ′ of FIG.
The movable member 31 is at the initial position. FIG. 11 is a sectional view taken along the line BB ′ in FIG.
FIG. 4 is a cross-sectional view of a portion from a discharge port position to a common liquid chamber.
Is shown. BookreferenceThe example liquid ejection head is
Heating element 2 for providing thermal energy for generating heat
A second liquid flow path 16 for foaming is formed on the element substrate 1 thus formed.
And a first liquid flow for the discharge liquid directly communicated with the discharge port thereon.
A road 14 is provided. The upstream side of the first liquid flow path includes a plurality of first liquid flow paths.
To the first common liquid chamber 15 for supplying the discharge liquid to the
And the upstream side of the second liquid flow path is foamed into a plurality of second liquid flow paths.
It communicates with a second common liquid chamber 17 for supplying liquid. However, when the foaming liquid and the discharge liquid are the same liquid,
In such a case, the common liquid chambers may be integrated into one. [0123] Between the first and second liquid flow paths, there is a bullet of metal or the like.
Separation wall 30 made of a material having
Thus, the first liquid flow path and the second liquid flow path are separated. In addition,
It is better not to mix the foaming liquid and the discharge liquid as much as possible
In the case of liquids, this separation wall makes it as complete as possible
The flow of the liquid in the first liquid flow path 14 and the flow of the liquid in the second liquid flow path 16 are separated.
Is better, but the foaming liquid and the discharge liquid are mixed to some extent
However, if there is no problem, the separation wall should have a complete separation function.
It is not necessary to have it. The projection space (hereinafter referred to as the discharge space)
It is called an output pressure generation area. The region A and the bubble B in FIG.
The separation wall in the portion located in the generation area 11) is a slit 3
5, the discharge port side (downstream side of the liquid flow) is a free end
And a piece where the fulcrum 33 is located on the common liquid chamber (15, 17) side.
It is a beam-shaped movable member 31. This movable member 31
Are arranged facing the bubble generation region 11 (B).
To open toward the first liquid flow path side by foaming of the foaming liquid.
(In the direction of the arrow in the figure). In FIG.
Also, a heating resistor as the heating element 2 and the heating resistor
Wiring electrodes (not shown) for applying electrical signals are provided.
On the element substrate 1, via a space constituting a second liquid flow path.
A separation wall 30 is disposed. The arrangement of the fulcrum 33 and the free end 32 of the movable member 31
For the relationship between the placement and the arrangement of the heating element,referenceExamples and
The same is true. In the above description, the liquid supply path 12 and the heat generation
The structure relationship with the body 2 was explained,referenceFor example
, The structure relationship between the second liquid flow path 16 and the heating element 2 is the same.
Comb. Especially booksreferenceIn the example, both ends of the movable member
The movable member 31 is in the initial position.
When the movable part is in contact with the wall of the second liquid flow path,
When the material is at the initial position, the bubble generation area of the second liquid flow path 16
State in which the region 11 and the first liquid flow path 14 are substantially sealed
It has become. In this configuration, below the movable member 31
Since the displacement is restricted in all areas, the bending stress at the fulcrum
Improves the durability of the movable member because it can be further concentrated in the direction
It became possible to make it. The entire circumference of the movable member forms the second liquid flow path 16.
Because it is in contact with the constituent wall 23, the pressure due to foaming
It is possible to concentrate more without escaping to the first liquid flow path from between
It can act on the moving member. With this, the discharge effect
It is possible to obtain a liquid ejection head with even higher efficiency and ejection power
Noh. Further, the separation wall having the movable member is
Chamber and extend to the two common chambers 15, 17
In a liquid ejection head having a configuration as shown in FIG.
Different liquids in the first liquid flow path 14 and the second liquid flow path 16
To generate mainly liquid to be discharged and bubbles
Liquid and heat that are difficult to foam
This makes it possible to satisfactorily discharge a liquid or the like that is weak to the user. BookreferenceIn the example, the moving part
In the initial position of the material, the liquid between the first liquid flow path 14 and the second liquid flow path
When not operating
It is also possible to prevent the diffusion of the two liquids in the above. BookreferenceExample is foaming pressure due to displacement of movable member
Propagation of force, growth direction of bubble, prevention of back wave, etc.
For the function and effect of the main part,referenceSame as the example
There is a bookreferenceBy adopting a two-channel configuration as in the example,
And it has the following advantages. That is, the abovereferenceAccording to the example configuration,
Discharged liquid and foaming liquid are separated liquids and generated by foaming liquid foaming
The discharge liquid can be discharged by the pressure. For this reason
Conventionally, foaming is not sufficiently performed even when heat is applied
Insufficient high viscosity liquid such as polyethylene glycol
This liquid is supplied to the first liquid flow path 3 even if it is
Liquid that foams well in the foam liquid (ethanol: water =
4: 6 mixture, about 1 to 2 cP) into the second liquid flow path 4.
, It is possible to discharge well. Further, even if heat is received as a foaming liquid,
Select a liquid that does not produce deposits such as kogation on the surface
Thus, foaming can be stabilized, and excellent ejection can be performed. Further, the bookReference exampleIn the structure of the head
Is aheadreferenceThe effect described in the example also occurs,
Discharges liquids such as highly viscous liquids with high discharge efficiency and high discharge force
can do. Further, even in the case of a liquid weak to heating,
This liquid is supplied to the first liquid flow path 3 as a discharge liquid,
Liquid that is less likely to be thermally degraded in the liquid flow path 4 and that favorably foams
Supplying the body can cause thermal harm to liquids that are sensitive to heating.
And with high discharge efficiency and high discharge force as described above.
Can be issued. <referenceExample 5> FIG. 12 shows a bookreferenceSchematic structure of the flow path of the example liquid ejection head
FIG. 3 is a cross-sectional view in the width direction for explaining the structure,
(B) is driven when the movable member is displaced by the
Natural from the position where the movable member is displaced by pulse OFF
It shows the case of returning to the position. As shown in this figure, movable
The cross-sectional shape of the member 31 along the width direction is an inverted trapezoidal shape.
ing. Also, according to the cross-sectional shape of the movable member 31,
The end of the slit 35 formed in the separation wall 30 has a slope.
You. That is, the width 31a on the second liquid flow path 16 side is
Is smaller than the width 31b on the liquid flow path 14 side. one
On the other hand, the width 31b on the first liquid flow path 14 side is the width of the separation wall slit.
35 is smaller than the width 35b on the first liquid flow path 14 side.
The width is larger than the width 35a on the second liquid flow path 16 side.
ing. Therefore, with the relationship of 31b ≧ 35a
I have. When the movable member returns to the initial position, the second flow path
Displaced downward due to negative pressure inside and movable member's own return force
Try to bookreferenceIn the example, the slope on the side of the movable member
And the slope of the separation wall facing it
The downward displacement of the moving member is regulated. BookreferenceIn the example
Is a displacement within the range of the thickness of the movable member 31.
Do not have a stopper at the free end of the movable member to stop
To improve the durability of movable members
Can be. The free end side is also a bookreferenceLike the example, it consists of a slope
In this case, the same effect can be obtained. Also book
referenceIn the example, to the second liquid flow path 16 side of the movable member 31
Can be suppressed by the separation wall 30 itself.
Therefore, the manufacturing process can be simplified. <ImplementationExample> FIG. 13 is a schematic diagram of the flow path of the liquid ejection head of the present embodiment.
FIG. 4A is a cross-sectional view in the width direction for explaining the configuration, and FIG.
A drive pulse ON is applied to the movable member and the movable member
(B), when the drive pulse is OFF,
And the movable member has returned to the first position from the displaced position.
Show the case. The movable member of this embodiment includes a first liquid flow path 1.
The surface on the fourth side is flat, and the surface on the second liquid flow path 16 side has a convex part.
Shape. The height of this projection is
It is formed lower than the height H9 of the wall 30. Therefore, the movable member 31 having the convex portion
Is emitted on the heater 2 by applying a drive pulse.
It is displaced in the direction of the arrow by the generated air bubbles (FIG. 13
(A)). Then, after the drive pulse is turned off,
The bubbles disappear and the movable member 31 returns to the first position and slips.
Forming a gate 35; At that time, the movable member 31 is
Invasion into the second liquid flow path 16 due to negative pressure and return of the movable member itself
However, due to the convex portion formed on the movable member 31,
Therefore, the movable member can be moved without being displaced toward the second liquid flow path 16.
The lower limit is restricted to the first position within the thickness range (FIG. 13).
(B)). <referenceAn example6> FIG. 14 is a schematic diagram of the flow path of the liquid ejection head of the present embodiment.
It is a longitudinal cross-sectional view for explaining a structure. In this figure
Means that the heater 2 generates heat and bubbles are generated in the second liquid,
The state in which the movable member 31 is displaced by the bubble is shown.
I have. ThisreferenceThe basic structure of the example isreferenceSame as Example 4
But the bookreferenceIn the example, the free end 32 of the movable member
Is located forward of the heating element 2 and is movable.
The second liquid flow path in which the vicinity of the free end side edge of the member 31 is in contact
A plurality of channels are formed on the surface of the flow channel wall 23 on the first liquid flow channel 14 side.
Is different in that a projection 24 is provided. These protrusions
24 is movable when the movable member 31 contacts the flow path wall 23.
Also for preventing the member 31 from sticking to the flow path wall 23.
It is. Of course, such a convex part 24 is a movable member.
31 near the free end side edge (free end)
Without limitation, other parts may be used.
May be provided on the movable member 31 side. Also above the free end
The height of the flow path ceiling is higher than the fulcrum, and the displacement of the movable
The structure has been increased to prevent excessive displacement. Note that this
Such a flow path shapereferenceIt is not limited to examples,
The above embodiment andotherreferenceIn the example, similarly,
The effect of improving the durability can be obtained. <referenceAn example7> Figure 15 is a bookreferenceSchematic structure of the flow path of the example liquid ejection head
It is a plane schematic diagram for explaining composition. In the figure, reference symbols
14 is a heating element, 16 is a second liquid flow path, 23 is a flow path wall, 2
4 is a convex part. ThisreferenceIn the example,referenceAn example6Movable, like
A flow in which the vicinity of the free end side edge (free end) of the member 31 abuts
A plurality of protrusions 24 are provided on the surface of the road wall 23 on the first liquid flow path 14 side.
Is provided. The shape of the second liquid flow path 16 is
The constriction 19 is defined by the road wall 23,
Furthermore, a part of the flow path wall 19 is cut out, and each liquid flow path 1 is notched.
A communication port 25 is formed for communicating between the six at the tip.
I have. The flow path wall 23 and the second liquid thus arranged
The front end of the movable member 31 abuts the flow path wall 23 on the flow path 16
The separation wall on which the movable member 31 is formed
(Ni plate) 30 are laminated. <referenceAn example8> FIG. 16 shows a bookreferenceSchematic structure of the flow path of the example liquid ejection head
It is a plane schematic diagram for explaining composition. thisreferenceBy example
IsreferenceAn example7The shape of the communication port 25 of the second flow path is V-shaped.
Lengthens the distance between adjacent flow paths,
Increases effect on Stoke. The above embodimentAnd each reference exampleObvious from
As described above, according to the present invention, the heating element is moved from the first position to the bubble generation region.
Of the free end of the movable member (toward the side closer to
Position) to control the stress at the fulcrum of the movable member.
Can be integrated into one-way components, which reduces the durability of the movable member.
It has improved dramatically. Further, it is necessary to minimize meniscus vibration.
The negative pressure in the bubble generation area during defoaming is used for refilling.
Refill faster
Can be achieved. In addition, the regulating member and the movable member at the first position
Is in contact with or has a slight gap
The air bubbles generated are
It does not escape from the slit before the displacement of the movable member,
It acts on the movable member during ejection, so the ejection efficiency and ejection force are high.
Liquid ejection head and the like can be obtained. Further, in addition to the above effects, the movable member
When in the first position, both sides and the free end of the movable member
By contacting the entire area of the portion with the wall of the second liquid flow path,
In a configuration in which different liquids are supplied to the liquid flow path and the second liquid flow path,
Prevents liquid mixture due to the downward displacement of the movable member, and
It is also possible to prevent diffusion. The sectional shape of the movable portion may be tapered,
The second liquid of the movable member is similarly formed by having a shape having a convex portion.
It is possible to regulate the displacement toward the flow path. Further, the movable member and the channel wall of the second liquid channel are provided.
To provide a plurality of convex parts on the contact surface with
Therefore, it is possible to prevent the movable member and the flow path wall from sticking.
Can be. In the two-channel configuration, different liquids are supplied to each channel.
In the supply mode, the second liquid of the first liquid (discharged ink)
Since it can be prevented from mixing into the liquid (foaming liquid),
Can prevent the occurrence of burns due to the ink
It is possible to provide a stable function separation ejection head
Become. (Other Embodiments) As described above, the essential parts of the liquid ejection head and the liquid ejection method of the present invention
ExampleAnd reference examplesWas explained, but these are described below.
Example ofAnd reference examplesExamples of embodiments that can be preferably applied to
This will be described with reference to the drawings. However, in the following description
Are the two-channel embodiment and the one-channel embodiment described above.
In some cases, the explanation may be made by taking up any
Unless otherwise noted, it is applicable to both embodiments. (Ceiling Shape of Liquid Flow Path) FIG. 17 is suitable for the present invention.
FIG. 3 is a cross-sectional view in the flow channel direction of a used liquid ejection head.
Is the first liquid flow path 14 (or the liquid flow path 1 in FIG. 2).
The grooved member 50 provided with a groove for constituting 0)
It is provided on the separation wall 30. In this embodiment,
The height of the channel ceiling near the position of the free end 32 of the moving member is increased.
And the operating angle θ of the movable member can be increased.
I'm trying. The operating range of the movable member is determined by the structure of the liquid flow path.
If it is determined in consideration of the durability and foaming power of the
Good, but operates up to an angle that includes the axial angle of the outlet
It is considered desirable. Further, as shown in FIG.
By making the displacement of the free end of the movable member higher than the diameter,
A sufficient discharge pressure is transmitted. Also shown in this figure
Of the liquid flow path ceiling at the free end 32 of the movable member.
The height of the liquid flow path ceiling at the fulcrum 33 position of the movable member from the height
Is lower, the upstream side due to the displacement of the movable member
The escape of the pressure wave to the fin can be more effectively prevented. (Arrangement relation between second liquid flow path and movable member) FIG.
18 is an arrangement of the movable member 31 and the second liquid flow path 16 described above.
FIG. 7A is a diagram for explaining the relationship, and FIG.
FIG. 0B is a view of the vicinity of the movable member 31 viewed from above, and FIG.
Is a view of the second liquid flow path 16 from which the separation wall 30 has been removed as viewed from above.
It is. (C) shows the movable member 31 and the second liquid flow path 1
The arrangement relationship with 6 is modeled by overlapping these elements
FIG. In both figures, the lower part of the drawing
This is the front side where the exit is located. The second liquid flow path 16 of this embodiment is as described above.
The upstream side of the heating element 2 (the upstream side here is the second common liquid chamber
From the side through the heating element position, the movable member, the first liquid flow path and the discharge port
It is the upstream side in the large flow toward. ) To narrow
It has a constricted portion 19 and the pressure at the time of foaming is
Chambers (foaming) to prevent easy escape to the upstream side of
Room) structure. It should be noted that, as shown in FIG.
The side of the member 31 covers a part of the wall constituting the second liquid flow path.
This allows the movable member 31 to move to the second liquid flow path.
Prevention of depression. As a result, the liquid
And the foaming liquid can be further separated. Ma
In addition, air bubbles can be prevented from escaping from the slits.
Further, the discharge pressure and the discharge efficiency can be increased. further,
The refill effect from the upstream side due to the pressure during defoaming described above
Can be enhanced. In FIG. 17, the movable member 31
With the displacement to the first liquid flow path 14 side, the second liquid flow path 16
Some of the bubbles generated in the bubble generation region of the first liquid flow path 1
It extends to the 4 side, so that the air bubble extends like this
By setting the height of the second liquid flow path to a suitable value,
As compared with the case, the discharge force can be further improved. this
So that the air bubbles extend into the first liquid flow path 14.
In order to achieve this, the height of the second liquid flow path 16 should be higher than the height of the maximum bubble.
It is also desirable to reduce this height from several μm to 30 μm.
m is desirable. In this embodiment,
This height was 15 μm. FIGS. 19A, 19B and 19C show the same.
FIG. 8 is a plan view showing another shape of the movable member 31;
Figure (a) has a rectangular shape, and (b) has a thinner fulcrum side.
It is a shape that makes it easy for the movable member to move,
In (c), the fulcrum side is wide, and the durability of the movable member is high.
It is an improved shape. Easy operation and good durability
Shape that can be easily operated and has excellent durability
Any shape is acceptable. In the above embodiment, the plate-like movable member 31
And separation wall having this movable member30Is 5μm thick
Made of nickel, but it is not limited to this
Materials and materials forming the separation wall
It has solvent resistance and works well as a movable member.
It has elasticity for forming fine slits.
Just do it. As the material of the movable member, a material having high durability
Silver, nickel, gold, iron, titanium, aluminum, platinum,
Metals such as tantalum, stainless steel, phosphor bronze, and the like
Alloy or acrylonitrile, butadiene, styrene
Resins having nitrile groups such as amides, amides such as polyamides
Carboxyl group such as resin having group, polycarbonate etc.
Having aldehyde groups, such as polyacetal resin
Resins having sulfone groups such as resins and polysulfone
In addition, resins such as liquid crystal polymers and their compounds, ink resistant
Gold, tungsten, tantalum, nickel, stainless steel
Metals such as stainless steel and titanium, their alloys and
In terms of workability, those coated on the surface
Resin such as polyamide or amide group,
Resins with aldehydes such as tar, polyether ether
Resin having a ketone group such as
Has a hydroxyl group such as a resin having a mid group or a phenol resin
Resin, polyethylene resin, etc.
Resin having alkyl group such as propylene, epoxy resin
Resins having epoxy groups such as amino, amino such as melamine resin
Having a methylol group such as a resin having a group or a xylene resin
Resins and their compounds, as well as ceramics such as silicon dioxide
And their compounds are desirable. As the material of the separation wall, polyethylene, polyethylene
Propylene, polyamide, polyethylene terephthalate
G, melamine resin, phenol resin, epoxy resin,
Libutadiene, polyetheretherketone, polyether
Tersulfone, polyarylate, polyimide, polysa
Recent engineers such as Lefon and Liquid Crystal Polymer (LCP)
Heat resistance and solvent resistance represented by alling plastic,
A resin having good moldability and its compound or
Gold such as silicon oxide, silicon nitride, nickel, gold and stainless steel
Metals, alloys and their compounds, or titanium or gold on the surface
Is preferred. Further, the thickness of the separation wall is strong enough as the separation wall.
From the viewpoint that it can achieve the
It may be determined in consideration of the material and shape, etc.
About 10 μm is desirable. Slit 3 for forming movable member 31
The width of 5 was 2 μm in this embodiment, but the foaming liquid and the discharge liquid
Are different liquids and a mixture of both liquids is prevented.
Forms a meniscus between the two liquids with a slit width
It is sufficient to set the interval to about the extent and suppress the flow of each liquid
No. For example, about 2 cP (centipoise) as a foaming liquid
Liquid, and a liquid of 100 cP or more is used as the discharge liquid.
If it does, the mixture can be prevented even with a slit of about 5 μm.
However, it is desirable that the thickness be 3 μm or less. In the present invention, the movable member is μm
Der thickness (tμm), cm order
The thickness of the movable member is not intended. μm order thickness
For a movable member having a slit width of μm order (W
μm), consider the manufacturing variation to some extent.
It is desirable to take into account. There is a free end of the movable member forming the slit
Or / and the thickness of the member facing the side edge is the thickness of the movable member
(E.g., FIGS. 12 and 13), slit width and thickness
The relationship between the following ranges in consideration of manufacturing variations
To stably suppress the mixture of the foaming liquid and the discharge liquid.
Can be. Although this is a limited condition,
From the viewpoint of foaming liquid having a viscosity of 3 cP or more,
When using degrees (5 cP, 10 cP, etc.), W / t ≦ 1
Satisfaction ensures that the mixing of the two
It is possible to suppress the above. [0168] A switch that provides the "substantially closed state" of the present invention.
The lit should be on the order of several μm.
It is sure. As described above, the functional components are separated into the foaming liquid and the discharge liquid.
When separated, the movable member is
Become. When this movable member moves with the generation of air bubbles,
The foaming liquid is slightly mixed with the discharge liquid.
You. The ejection liquid for forming an image is used for inkjet recording.
In general, those with a color material concentration of about 3% to 5%
Considering that
Large change in density even when contained in a range of 20% or less
I don't. Therefore, as such a mixed liquid,
Of the foaming liquid and the discharge liquid to be 20% or less
This is included in the present invention. In the above embodiment, the viscosity is changed.
Even if it is done, it is a mixture of the foaming liquid of 15% at the upper limit, and 5 cps
In the following foaming liquids, this mixing ratio depends on the drive frequency.
However, the upper limit was about 10%. In particular, the viscosity of the discharged liquid is set to 20 cps or less.
The more you do, the more this mixture can be reduced (eg, less than 5%).
You. (Element substrate) To apply heat to the liquid below
The configuration of the element substrate provided with the heating elements will be described.
You. FIGS. 20A and 20B show the book
FIG. 3 is a vertical sectional view of the liquid discharge head of the invention.
(A) is a head having a protective film described later, and (b) is a protective film.
There is no one. On the element substrate 1, the second liquid flow path 16, the separation wall 3
0, the first liquid flow path 14, and grooves forming the first liquid flow path are provided.
A grooved member 50 is provided. On the element substrate 1, a substrate 10 made of silicon or the like is provided.
7. Silicon oxide film for insulation and heat storage or
A silicon nitride film 106 is formed, and a heating element is formed thereon.
Hafnium boride (HfB2), tantalum nitride
(TaN), tantalum aluminum (TaAl), etc.
Anti-layer 105 (0.01-0.2 μm thick) and aluminum
Wiring electrodes (0.2-1.0 μm thick) are patterned
Have been. From these two wiring electrodes 104 to the resistance layer 105
, A current is caused to flow through the resistance layer to generate heat. wiring
Silicon oxide, silicon nitride, etc. on the resistance layer between the electrodes
ofInsulationlayer103With a thickness of 0.1 to 2.0 μm,
Cavitation-resistant layer such as tantalum102
(0.1-0.6 μm thick), and ink
The resistance layer 105 is protected from various liquids. In particular, the pressure generated when bubbles are generated and defoamed
Extremely strong force and shock wave, durable hard and brittle oxide film
Metal, tantalum (Ta)
Cavitation-resistant layer such as102 is a protective layerUsed as
It is. The combination of the liquid, the liquid flow path configuration, and the resistance material
A configuration that does not require the above-mentioned protective layer may be used.
An example is shown in FIG. Such a protective layer
Unnecessary resistance layer material is indium tin
Aluminum alloy and the like. As described above, the heat generation in each of the above embodiments is described.
The structure of the body is the above-mentioned resistance layer (heating part) between the electrodes.
With a protective layer that protects the resistive layer
May be. In this embodiment, an electric signal is used as the heating element.
It has a heating part composed of a resistance layer that generates heat according to the signal
However, the present invention is not limited to this.
To generate enough air bubbles in the foaming liquid
Just do it. For example, light such as a laser is received as a heating unit.
Receiving photothermal converters or high frequencies that generate heat
A heat generating element having a heat generating portion that generates heat at the time may be used. The above-mentioned element substrate 1 has the above-mentioned heat generation.
Layer 105 constituting a portion, and an electric signal is applied to this resistance layer.
Electrothermal conversion composed of wiring electrodes 104 for supplying
In addition to the body, to selectively drive this electrothermal transducer
Transistors, diodes, latches, shift registers
And other functional elements are integrated through the semiconductor manufacturing process
It may be rare. Also, provided on the element substrate 1 as described above.
Drives the heat-generating part of the electro-thermal transducer and discharges the liquid
In order to achieve this, the above-described resistance layer 105 is
To apply a rectangular pulse as shown in FIG.
The resistance layer 105 between the poles is heated rapidly. Each of the above implementations
In the example head, the voltage is 24 V and the pulse width is
Apply 7μsec, current 10mA, electric signal at 6kHz
The heating element is driven by the
Thus, a liquid ink was ejected from the ejection port. However
However, the condition of the drive signal is not limited to this,
If it is a drive signal that can foam the foam liquid properly
Good. (Ejecting Liquid, Foaming Liquid) Explanation in the previous embodiment
As described above, in the present invention, the movable member as described above is used.
Higher than conventional liquid ejection heads
It is possible to discharge liquid at high speed with discharge power and discharge efficiency
it can. In the present embodiment, the same liquid is used for the foaming liquid and the discharge liquid.
When used, deteriorates due to heat applied from heating element
Without heating and hard to form deposits on heating elements
To change the reversible state of vaporization and condensation by heat
And the liquid flow path, movable members, separation walls, etc.
Various liquids can be used as long as they do not
You. Of these liquids, the one used for recording
Conventional liquid jet liquid (recording liquid)
Can be used. On the other hand, a head having a two-flow path structure according to the present invention was used.
If the discharge liquid and the foaming liquid are different liquids,
Then, a liquid having the above-mentioned properties may be used.
Represents methanol, ethanol, n-propanol,
Propanol, n-hexane, n-heptane, n-octane
Tan, toluene, xylene, methylene dichloride, tricle
, Freon TF, Freon BF, ethyl ether, di
Oxane, cyclohexane, methyl acetate, ethyl acetate,
Acetone, methyl ethyl ketone, water, etc.
Compounds. [0185] The liquid to be ejected includes the presence or absence of bubbling property and thermal properties.
A variety of liquids can be used regardless of. In addition,
Liquid with low foamability, which was difficult to discharge
It can be used even for liquids that easily degrade, high-viscosity liquids, etc.
Wear. However, the properties of the discharged liquid are as follows:
Or discharge, foam, or movable member by reaction with foaming liquid
It is desired that the liquid is not a liquid that hinders the operation of the device. As the ejection liquid for recording, a high-viscosity ink is used.
Etc. can also be used. As other discharge liquid
Can also use liquids such as heat-sensitive drugs and perfumes.
Wear. In the present invention, both the ejection liquid and the foaming liquid are used.
The following composition as a recording liquid that can be used for
Recording was performed using the same ink,
Ink ejection speed has increased, resulting in droplet landing accuracy
And a very good recorded image can be obtained. [0189]   Composition of dye ink (viscosity 2cP)     (CI Food Black 2) 3% by weight of dye     Diethylene glycol 10% by weight     Thiodiglycol 5% by weight     Ethanol 5% by weight     77% by weight of water In addition, a liquid having the composition shown below is used for the foaming liquid and the discharge liquid.
Recording was performed by discharging in combination. As a result,
Liquid with a viscosity of more than 10 cP, which was difficult to eject with the head of
Of course, a liquid with a very high viscosity of 150 cP is good
And a high quality recorded matter was obtained. [0190]   Composition of foaming liquid 1     40% by weight of ethanol     Water 60% by weight   Composition of foaming liquid 2     Water 100% by weight   Composition of foaming liquid 3     Isopropyl alcohol 10% by weight     90% by weight of water   Composition of ejection liquid 1 pigment ink (viscosity about 15 cP)     5% by weight of carbon black     Styrene-acrylic acid-ethyl acrylate copolymer 1% by weight       (Acid value 140, weight average molecular weight 8000)     Monoethanolamine 0.25% by weight     Glycerin 69% by weight     Thiodiglycol 5% by weight     3% by weight of ethanol     16.75% by weight of water   Composition of Discharge 2 (viscosity 55 cP)     100% by weight of polyethylene glycol 200   Composition of discharge liquid 3 (viscosity 150 cP)     100% by weight of polyethylene glycol 600 By the way, it is said that it is difficult to discharge conventionally
Liquid, the discharge speed is low,
The variation in the characteristics of the recording paper and the landing accuracy of the dots on the recording paper
Bad, and the discharge amount varies due to discharge instability,
For these reasons, it was difficult to obtain a high-quality image. Only
However, in the configuration of the above embodiment,
The use of a liquid can be performed sufficiently and stably.
Wear. As a result, the droplet landing accuracy is improved and ink is ejected.
Stabilization of the recording image quality, significantly improving the quality of recorded images.
I was able to make it up. (Head Structure with Two Channels) FIG.
Overall structure of a head having two flow paths in the liquid ejection head of the invention
It is the disassembled perspective view which showed the structure. The above-mentioned element substrate is formed on a support 70 made of aluminum or the like.
1 is arranged. On this, the wall 16a of the second liquid flow path 16
And a wall 17a of the second common liquid chamber 17 is provided,
A separation wall 30 having a movable member 31 is provided thereon.
I have. Further, the first liquid flow path 14 is formed on the separation wall 30.
A plurality of grooves, a first common liquid chamber 15, and the first common liquid
A supply path 20 for supplying the first liquid to the chamber 15;
Supply path for supplying a second liquid to the second common liquid chamber 17
A grooved member 50 provided with 21 is provided.
A liquid discharge head having two flow paths is configured by the configuration as described above.
ing. (Liquid Discharge Head Cartridge)
Liquid ejection equipped with the liquid ejection head according to the embodiment
The head cartridge will be briefly described. FIG. 23 includes the above-described liquid discharge head.
FIG. 3 is a schematic exploded perspective view of a liquid ejection head cartridge.
The liquid ejection head cartridge is mainly
Section 200 and liquid container90It is roughly constituted from. The liquid discharge head unit 200 includes the element substrate 1,
Separation wall 30, grooved member 50, holding spring 60, liquid supply
Element80, A support 70 and the like. For element substrate 1
Is a heating resistor for applying heat to the foaming liquid as described above.
Are provided in a row.
A plurality of functional elements for selectively driving antibodies are provided.
ing. This element substrate 1 and the aforementioned separation wall 3 having a movable wall
0, a foaming liquid passage is formed, and the foaming liquid flows. this
The discharge is performed by joining the separation wall 30 and the grooved member 50.
Discharge passage (not shown) through which the discharge liquid flows is formed.
You. The pressing spring 60 is attached to the grooved member 50 by the element base.
A member for applying an urging force in the direction of the plate 1
The element substrate 1, the separation wall 30, the grooved member 50 and the rear
The support 70 described above is satisfactorily integrated. The support 70 supports the element substrate 1 and the like.
An element substrate is further provided on the support 70.
A circuit board 71 for connecting to 1 and supplying an electric signal;
Connects to the device to exchange electrical signals with the device
A contact pad 72 for performing the operation is arranged. The liquid container 90 is supplied to the liquid discharge head.
To generate bubbles and ejected liquid such as ink.
The foam liquid is separately stored inside. Outside of liquid container 90
Has a connection part that connects the liquid ejection head and the liquid container.
Fix the positioning part 94 for arranging the material and the connection part
A fixed shaft 95 is provided. Supply of discharged liquid
Is the supply of the connecting member from the discharge liquid supply passage 92 of the liquid container.
To the discharge liquid supply path 81 of the liquid supply member 80 through the path.
Supplied through the discharge liquid supply passages 83, 61, and 20 of each member.
Then, it is supplied to the first common liquid chamber. Similarly, foaming liquid
The liquid is supplied from the supply passage 93 of the body container through the supply passage of the connection member.
It is supplied to the foaming liquid supply path 82 of the supply member 80, and the
The liquid is supplied to the second liquid chamber via the foaming liquid supply passages 84, 61 and 21.
Be paid. In the above-described liquid ejection head cartridge,
If the foaming liquid and the discharge liquid are different liquids,
Has been described with the supply form and liquid container that can perform
If the liquid and the foaming liquid are the same,
It is not necessary to divide the liquid supply path and the container. It should be noted that this liquid container contains each liquid after consumption.
May be refilled with liquid for use. To do this,
It is desirable to provide a liquid inlet in the body container. Ma
In addition, the liquid ejection head and the liquid container are
And may be separable. (Liquid Discharge Apparatus) FIG.
FIG. 1 shows a schematic configuration of a liquid ejection apparatus equipped with an ejection head.
You. In this embodiment, ink is used as the ejection liquid.
Description will be made using an ink ejection recording apparatus. Of liquid ejection device
The carriage HC is provided with a liquid tank section 90 for storing ink.
And a head car in which the liquid ejection head unit 200 is detachable.
It is equipped with a cartridge and is transported by the recording medium
Reciprocate in the width direction of the recording medium 150 such as recording paper
You. A drive signal supply means (not shown)
When a drive signal is supplied to the above liquid ejection means, this signal
From the liquid ejection head to the recording medium
The body is discharged. Further, in the liquid discharging apparatus of this embodiment,
Is for driving the recording medium transporting means and the carriage.
The motor 111 as a driving source, and the power from the driving source
Gears 112 and 113 for transmitting to the ridge, carriage
It has a shaft 115 and the like. This recording device and this recording
Depending on the liquid ejection method performed by the device, various recording media
Printed matter with good image by ejecting liquid
I was able to. FIG. 25 shows a liquid discharging method and liquid according to the present invention.
Operating the ink ejection device to which the body ejection head is applied.
FIG. 1 is a block diagram of the entire apparatus for the present invention. The recording device is a host computer 300.
Print information as a control signal. Print information is printed
Is temporarily stored in the input interface 301 inside the device.
At the same time, it is converted into data that can be processed in the recording device and
Input to the CPU 302 which also serves as
You. The CPU 302 controls the control stored in the ROM 303.
The data input to the CPU 302 based on the program
Data using a peripheral unit such as the RAM 304,
Convert to print data (image data). The CPU 302 records the image data.
To record at an appropriate position on the recording paper,
A drive module that moves the recording paper and recording head in synchronization
Create driving data to drive the data. Image data
And the motor drive data are stored in the head driver 307, respectively.
And the head 200 and the motor 200 via the motor driver 305.
The tie transmitted to the drive motor 306 and controlled respectively
The image is driven by the image forming. The present invention can be applied to the recording apparatus described above,
Various types of recording media to which liquid is applied, such as
For paper, OHP sheet, compact disc, decorative board, etc.
Plastic materials, fabrics, aluminum and copper
Metal materials, cowhide, pig skin, artificial leather and other leather materials, wood, plywood, etc.
Wood, bamboo, ceramics such as tiles, sponges, etc.
And the like. As the above-mentioned recording device, various types of paper and
Printers and computers that record on OHP sheets, etc.
Plus recording on plastic materials such as Pact Disc
Tick recording device, metal recording device for recording on metal plate
And a recording device for leather that records on leather and records on wood
Wood recording equipment, ceramics recording on ceramic materials
For three-dimensional net-like structures such as recording devices, sponges, etc.
Device for printing by printing, and textile printing device for printing on fabric
And the like. [0209] The discharge liquid used in these liquid discharge devices is
In accordance with each recording medium and recording conditions
A liquid may be used. (Recording system) Next, the liquid ejection of the present invention
Using the head as a recording head,
An example of an inkjet recording system that performs recording
You. FIG. 26 shows the liquid discharge head of the present invention described above.
Configuration of an ink jet recording system using the
It is a schematic diagram for description. Liquid ejection in this embodiment
The output head corresponds to the recordable width of the recording medium 150.
Fuller with multiple outlets arranged at intervals of 360 dpi in length
In-type head, yellow (Y), magenta
Supports four colors (M), cyan (C), and black (Bk)
4 heads specified in X direction by holder 1202
Are fixedly supported in parallel to each other with an interval of. The drive signals for these heads are respectively
A signal is supplied from the head driver 307 constituting the supply means.
And each head is driven based on this signal.
You. Each head has Y, M, C,
Bk inks of four colors Ba to 204d, respectively.
Supplied from the tank. Note that reference numeral 204e indicates
A foaming liquid container that stores foaming liquid.
The foaming liquid is supplied to the pad. Under each head, there is a sponge inside.
Head cap 203 on which an ink absorbing member such as
a to 203d are provided.
By covering the discharge port, maintenance of the head can be performed. [0215] Reference numeral 206 denotes the description of each embodiment.
Transport means for transporting various non-recording media such as
Transport belt. The transport belt 206 is
Motor is routed to the specified path,
It is driven by a driving roller connected to the bar 305. In the ink jet recording system of this embodiment,
Before and after recording, various types of recording media
The pre-processing device 251 and the post-processing device 252 that perform the processing
They are provided upstream and downstream of the recording medium transport path, respectively.
You. Pre-processing and post-processing are performed on a recording medium on which recording is performed.
Processing content varies depending on the type of ink and the type of ink
However, for example, metal, plastic, ceramics, etc.
For recording media, pretreatment of ultraviolet and ozone
Irradiates and activates the surface to attach ink
Performance can be improved. In addition, such as plastic
For recording media that easily generate static electricity,
Garbage easily adheres to the surface,
Good recording may be hindered. Therefore, pre-processing
To remove static electricity from the recording medium using an ionizer device
By doing so, it is preferable to remove dust from the recording medium.
Further, when fabric is used as a recording medium, bleeding prevention is prevented.
From the viewpoint of stopping, improving the first arrival rate, etc.
Water-soluble substances, synthetic polymers, water-soluble metal salts, urea and
The process of adding a substance selected from urea is referred to as pretreatment.
Just do it. The preprocessing is not limited to these,
Processing to set the temperature of the recording medium to an appropriate temperature for recording, etc.
Is also good. On the other hand, in the post-processing, the recording
Determination of ink by heat treatment, UV irradiation, etc. for recording media
Fixing treatment that promotes adhesion
The cleaning process is performed for cleaning the processing agent. In this embodiment, the head is a full
Although the description has been made using the in-head, the present invention is not limited to this.
Such as a small head in the width direction of the recording medium
It may be of a type that performs recording. [Head Kit] The ink of the present invention is described below.
Inkjet head kit with jet head
explain. FIG. 27 shows such an ink jet head.
FIG. 2 is a schematic view showing a kit, and the inkjet head is shown in FIG.
The kit has an ink ejection unit 511 for ejecting ink.
Ink jet head 510 of the present invention
Ink container that is an inseparable or separable liquid container
Device 520 for filling the ink container with ink.
The ink container holding the ink and the ink container
It is put in 1. When the ink has been consumed, the ink
Contact with the air communication port 521 of the container and the inkjet head
In the connection section or the hole made in the wall of the ink container.
Insert a part of insertion part (injection needle etc.) 531 of ink filling means
Then, the ink in the ink filling means is injected through the insertion portion.
What is necessary is just to fill in an ink container. As described above, the ink jet head of the present invention
And the ink container, ink filling means, etc.
By putting it in a container and making it a kit, ink is consumed
If this happens, ink can be quickly and easily removed as described above.
Can be filled in the ink container, and recording can be started quickly.
It can be carried out. Note that the ink jet head of this embodiment is
In the description, the explanation is based on the
However, as an inkjet head kit,
Separable type filled with ink without filling means
The ink container and the head are contained in the kit container 510.
May be used. In FIG. 27, the ink container is
Only the ink filling means for filling ink is shown,
For filling the foaming liquid container with the foaming liquid in addition to the ink container.
The foam liquid filling means is contained in a kit container.
You may. [0225] In the present invention, in particular, the freedom of the movable member
The end region further enters the bubble generation region from the first position
Because it has means to suppress such downward displacement,
Excessive downward displacement of the movable member can be regulated,
The durability of the member can be further improved. Also,
When using the discharge liquid and the foaming liquid as separate liquids, two
Liquid mixture can be more reliably prevented. As described above, a novel method using a movable member
According to the liquid ejection method, head, etc. of the present invention based on the ejection principle
Then, the generated bubble and the movable member displaced by this
The synergistic effect of
Conventional bubble jet discharge because it can discharge well
The ejection efficiency can be improved as compared with the method and the head. According to the characteristic structure of the present invention,
Even if it is left for a long time at a temperature or low humidity, it will not discharge.
Pre-discharge and suction even if non-discharge occurs.
Normal state with only slight recovery processing such as pull recovery
There is also the advantage that it can be returned to immediately. Along with this, recovery time
Liquid loss due to shortening and recovery
Costs can also be significantly reduced. In particular, the refill characteristics of the present invention are improved.
According to the configuration, response during continuous ejection and stable formation of bubbles
Long, stable droplets and high speed liquid ejection
Recording and high-quality recording were enabled. In the head having the two flow paths, the foaming liquid
As a liquid that easily foams or deposits on the heating element
Selection of the liquid to be ejected by using a liquid that does not easily cause
The degree of freedom increases, and high viscous liquids that are unlikely to foam
Liquids that easily form deposits on heat bodies and liquids that are sensitive to heat
It is difficult to discharge using the conventional bubble jet discharge method.
Good ejection of difficult liquids
Was. Further, the liquid discharge head of the present invention is used for recording.
Higher image quality by using as a liquid ejection recording head
Record was achieved. Further, using the liquid discharge head of the present invention,
Liquid ejection device and recording system with further improved body ejection efficiency, etc.
Stem etc. could be provided. The head cartridge and head of the present invention
Easy to use and reuse heads by using a kit
Can be made.

BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1A to 1D are schematic cross-sectional views for explaining a discharge principle using an example of a liquid discharge head applicable to the present invention. FIG. 2 is a partially cutaway perspective view of the liquid ejection head shown in FIGS. 1 (a) to 1 (d). FIG. 3 is a schematic cross-sectional view showing pressure propagation from bubbles in a conventional liquid ejection head. FIG. 4 is a schematic cross-sectional view showing pressure propagation from bubbles in a discharge principle applicable to the present invention. FIG. 5 is a schematic sectional view for explaining a flow of a liquid applicable to the present invention. FIG. 6 is a partially cutaway perspective view showing a first embodiment of the liquid ejection head of the present invention. FIGS. 7A to 7D are schematic cross-sectional views showing a liquid flow path of the liquid discharge head of FIG. 6 at a position passing through a bubble generation region and showing the operation order. FIGS. 8A to 8C are views for explaining a schematic configuration of a flow path in a liquid ejection head according to a second embodiment of the present invention, wherein FIG. 8A is a first liquid flow path; , A movable member, and a plan view for explaining an arrangement relationship with the second liquid flow path,
(B) is a sectional view taken along line VA-VA1 of (a), (c)
FIG. 4A is a cross-sectional view along the line VB-VB1 in FIG. FIGS. 9A and 9B are diagrams of a third embodiment of the liquid ejection head according to the present invention, wherein FIG.
4B is a plan view for explaining an arrangement relationship among a liquid flow path, a movable member, and a second liquid flow path. FIG.
It is sectional drawing which follows the IV1 line. FIGS. 10A and 10B are diagrams of a fourth embodiment of the liquid ejection head according to the present invention, wherein FIG. FIG. 2B is a cross-sectional view taken along line AA ′ of FIG. 11 is a view of a fourth embodiment of the liquid ejection head of the present invention, and is a cross-sectional view taken along the line BB 'in FIG. FIGS. 12A and 12B are cross-sectional views in a width direction for describing a schematic configuration of a flow path in a liquid ejection head according to a fifth embodiment of the present invention. FIG. When the movable member is displaced, (b) shows the drive pulse OF
The case where the movable member returns to the natural position from the displaced position by F is shown. FIGS. 13A and 13B are cross-sectional views in a width direction for explaining a schematic configuration of a flow path in a liquid ejection head according to a sixth embodiment of the present invention. FIG. (B) shows the case where the drive pulse is turned off and the drive pulse is turned off, and the movable member returns to the first position from the displaced position. . FIG. 14 is a longitudinal sectional view for explaining a schematic configuration of a flow path in a seventh embodiment of the liquid ejection head of the present invention. FIG. 15 is a schematic plan view for explaining a schematic configuration of a flow channel in an eighth embodiment of the liquid ejection head of the present invention. FIG. 16 is a schematic plan view for explaining a schematic configuration of a flow path in a ninth embodiment of the liquid ejection head of the present invention. FIG. 17 is a sectional view showing a stopper structure of a second liquid flow path with respect to a movable member in the embodiment of the liquid ejection head of the present invention. FIGS. 18 (a) to (c) are diagrams for explaining an arrangement relationship between a movable member and a second liquid flow path, and FIG. 18 (a) shows the separation wall and the vicinity of the movable member viewed from above. (B) is a view of the second liquid flow path from which the separation wall has been removed, as viewed from above. (C) shows an arrangement relationship between the movable member and the second liquid flow path,
It is the figure which showed typically by overlapping each of these elements. FIGS. 19A to 19C are plan views for explaining other shapes of the movable member. FIGS. 20 (a) and (b) are longitudinal sectional views for explaining main parts of the liquid ejection head of the present invention, respectively. FIG. 21 is a schematic diagram showing a shape of a driving pulse. FIG. 22 is a schematic exploded perspective view for explaining a main configuration of the liquid ejection head of the present invention. FIG. 23 is a schematic exploded perspective view for explaining a head cartridge on which the liquid ejection head of the present invention is mounted. FIG. 24 is a schematic perspective view showing an example of a liquid ejection device on which the liquid ejection head of the present invention can be mounted. FIG. 25 is a block diagram of a device for driving a liquid discharge device on which the liquid discharge head of the present invention can be mounted. FIG. 26 is a schematic perspective view illustrating the configuration of an ink jet recording system using the liquid ejection head of the present invention. FIG. 27 is a schematic view showing a head kit having the liquid ejection head of the present invention. 28A and 28B are views for explaining a liquid flow path structure of a conventional liquid discharge head, wherein FIG. 28A is a perspective view and FIG. 28B is a cross-sectional view. [Description of Signs] 1 Element substrate 2 Heating element 3 Area center 10 Liquid flow path 11 Bubble generation area 12 Supply path 13 Common liquid chamber 14 First liquid flow path 15 First common liquid chamber 16 Second liquid flow path 17 Second Common liquid chamber 18 Discharge port 19 Narrowed portion 20 First supply path 21 Second supply path 22 First liquid flow path wall 23 Second liquid flow path wall 24 Convex part 30 Separation wall 31 Movable member 32 Free end 33 Support point 34 Support member 35 slit 36 bubble generation region side wall 37 bubble generation region front wall 40 bubble 45 droplet 50 grooved member 51 orifice plate 60 spring 70 support 80 supply member

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masami Ikeda 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Toshio Kashino 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon (72) Inventor Takeshi Okazaki 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Fumi Yoshihira 3-30-2, Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. ( 72) Inventor Kiyomitsu Kudo 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (56) References JP-A-6-31918 (JP, A) JP-A-2-113950 (JP, A) JP-A-6-71887 (JP, A) JP-A-6-210872 (JP, A) JP-A-6-246926 (JP, A) JP-A-2-133341 (JP, U) (58) Fields surveyed ( Int.Cl. ⁷ , DB Name) B41J 2/05 B41J 2/01 B41J 2/16 B41J 2/175 B41M 5/00

Claims (1)

(57) [Claims] [Claim 1] A discharge port for discharging a liquid and a liquid in a flow path
Heating element used to generate air bubbles
The bubble generation area is separated from the heating element by a distance.
A movable member facing the raw area and having a free end and a fulcrum
And the inner wall surface of the flow path upstream of the heating element
Is connected to the heating element substantially flatly or gently.
Pressure based on the generation of air bubbles in the air bubble generation section.
The movable member is displaced by a force, and the movable member is displaced.
Liquid discharge head for discharging liquid from the discharge port by using
And a convex portion on a side of the movable member facing the bubble generation region.
The convex portion is provided with the movable portion before the bubble is generated.
When the position of the moving member is the first position,
The free end region extends beyond the first position and the bubble generation region
It is a regulating means that regulates displacement to
Liquid ejection head.