JP3442464B2 - Method of fixing metal member and rubber member - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for forming a valve seat portion (valve seat portion or the like) of a valve or the like installed in a fluid transportation line of a semiconductor manufacturing plant or the like, for example. The present invention relates to a method for fixing a metal member and a rubber member, in which the member is fixed to obtain a valve seat portion.

[0002]

2. Description of the Related Art Generally, a valve seat portion of a valve is known as one in which a rubber member is fixed to a metal member. The valve seat portion is formed by fixing a rubber member (annular rubber valve seat material or the like) to a metal member (valve body or the like).

By the way, in the valve seat portion of the valve for high-purity gas installed in the fluid transportation line of the semiconductor manufacturing plant, a valve seat material made of plastic (PTFE) or rubber (fluorine) having excellent sealing property is used. (Rubber) valve seat materials are widely used to prevent fluid leakage.

However, a plastic or rubber valve seat material has problems such as gas generation, gas adsorption, and gas permeation, and in these respects, a metal valve seat material (for example, a stainless steel diaphragm). Inferior to. In particular, rubber valve seat materials are not desirable for use as valve seat materials for valves for high-purity gas because the above-mentioned drawbacks become prominent, but they are used because they have extremely excellent sealing properties. The reality is that there is no choice but to do it.

In order to use the rubber valve seat material as a valve seat material for a valve used in a semiconductor manufacturing plant, it is necessary to satisfy the following conditions. Use fluorinated rubber with high purity. Do not use impurities such as adhesives for fixing to metal members. When installing, thoroughly remove the generated gas in a drying oven. From the above-mentioned conditions, the rubber valve sheet material cannot be baked or adhered to the metal member, so that it must be attached to the metal member by press fitting, mechanical fixing such as caulking.

Conventionally, as a method of mechanically fixing a rubber valve sheet material (a fluororubber valve sheet material) to a metal member (a valve body or the like), as shown in FIG.
2, a dovetail-shaped annular groove 12a is formed, and the annular groove 12a
A method of press-fitting an annular rubber valve sheet material 13 into the inside is known (for example, Japanese Patent Laid-Open No. 4-210170).

[0007]

However, according to the above method, the valve seat material 13 is largely deformed.
There is a problem that the roundness, parallelism, coaxiality, etc. of the valve sheet material 13 are significantly reduced, and the sealing property is significantly reduced.
Further, there is a problem that the change with time due to creep is unavoidable, and even if the valve seat material 13 is not deformed at the time of mounting, it is deformed by creep. Although not shown, as a method for mechanically fixing the valve seat material,
There is also a method of plastically deforming part of the metal member to caulk and fix the valve seat material to the metal member, but this method also causes the same problem as above because the valve seat material is directly caulked. .

On the other hand, as another fixing method of the rubber valve seat material, there is a method of directly molding rubber into the annular groove formed in the metal member to form the valve seat material.
There is a problem that the rubber largely contracts during firing, and a gap is formed between the annular groove and the valve seat material, which causes rattling of the valve seat material. In particular, fluorine-based rubber has large shrinkage,
The problem will be exacerbated. However, since corrosive gas such as hydrogen fluoride is generated during firing, there is a problem that the metal member is corroded. Further, after the valve sheet material is formed, it is usually necessary to remove burrs, but since the metal member is damaged, barrel finishing or the like is difficult, and deburring is troublesome.

As described above, the conventional method of fixing the metal member and the rubber member has various problems.

The present invention was devised to solve the above problems, and an object thereof is to provide a method of fixing a metal member and a rubber member, which is capable of preventing deformation and rattling of the rubber member. It is in.

[0011]

The invention according to claim 1 is a valve system.
A method for fixing a rubber member 4 to a metal member 3 forming a base portion , wherein a cylindrical protrusion 3c into which the rubber member 4 is fitted is formed on one side surface of the metal member 3, and then the front surface side A thick annular rubber member 4 integrally formed with an annular metal pressing body 11 having an inner diameter substantially equal to the outer diameter of the cylindrical protrusion 3c is provided on the inner peripheral portion of the cylindrical protrusion 3c. The metal pressing body 11 of the metal member 3 by inserting the metal pressing member 11 into the metal member 3 and inserting the metal pressing member 11 into one side surface of the metal member 3 and then plastically deforming the tip end of the cylindrical projection 3c outward .
By applying push on one side, a rubber member 4 nipped between the one side of the back and the metal member 3 of the metal pressing member 11,
Fixing the rubber member 4 to one side surface of the metal member 3 in an airtight manner is a basic configuration of the invention. In addition, claim 2
According to the invention of claim 1, in the invention of claim 1, the metal pressing body 11
Has a flange portion 11a, and the flange portion 11a is embedded in the rubber member 4 and is integrally molded with the rubber member 4 to form a metal pressing body 11.

[0012]

In order to fix the rubber member on the metal member, first, the rubber member engaged with the metal pressing body exposed is placed on the metal member. Next, the protrusion integrally formed on the metal member is plastically deformed to press the metal pressing body onto the metal member, and a part of the rubber member is sandwiched between the metal member and the metal pressing body. Press. As a result, the rubber member is clamped and fixed onto the metal member.

According to the fixing method of the present invention, a metal pressing body is engaged with a rubber member, and the metal pressing body is pressed toward the metal member side by plastic deformation of a protrusion formed on the metal member. Since a part of the rubber member is clamped and fixed between the pressing member made of metal, the deformation of the rubber member is small, and it is possible to prevent the roundness, parallelism, coaxiality and the like from being lowered.
Further, since the metal pressing body is engaged with the rubber member, the strength of the rubber member is increased, and the deformation of the rubber member is small even under high pressure. Further, since the rubber member is pressed and fixed onto the metal member by the protrusion that is plastically deformed via the metal pressing body, the rubber member is securely fixed to the metal member, and the rubber member is aged. It does not fall off due to changes, or a so-called back leakage does not occur due to a gap between the rubber member and the metal member. However, since the rubber member is sandwiched between the metal member and the metal pressing body, deformation due to creep is small.

[0014]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is an enlarged vertical cross-sectional view of a line check valve in which the method for fixing a metal member and a rubber member according to the present invention is used to form a valve seat portion of the line check valve. The main body 1, the downstream main body 2, the stationary seal body 3 (metal member), the seal member 4 (rubber member), the metal diaphragm 5, the movable seal body 6, and the fastener 7. It is installed in the fluid transportation line of the semiconductor manufacturing plant.

The upstream main body 1 is formed of a metal member such as stainless steel into a substantially T-shaped cross section.
A straight inflow passage 8 is provided on the central axis, and an upstream side wall surface W1 having a substantially concave cross-section orthogonal to the inflow passage 8 is provided on the downstream side thereof.
Are formed respectively. An annular protrusion 1a is formed on the outer peripheral edge of the upstream side wall surface W1 to press and hold the outer peripheral edge of the metal diaphragm 5 described later in an airtight manner. Further, a cylindrical portion 1b that protrudes in the downstream direction and is fitted to the upstream outer peripheral surface of the downstream main body 2 described later is integrally formed on the outer side portion of the upstream side wall surface W1.
The upstream end of the downstream main body 2 and the metal diaphragm 5 are inserted inside b. In FIG. 1, 1c is a male screw portion formed on the outer peripheral surface of the upstream main body 1 on the downstream side.

The downstream main body 2 has a substantially T-shaped cross section formed of a metal member such as stainless steel.
The outflow passage 9 located on the same straight line as the inflow passage 8 on the central axis forms the valve chamber 10 between the upstream side wall surface W1 and the upstream side wall surface W1 of the upstream main body 1. The downstream side wall surfaces W2 each having a substantially concave cross-sectional shape are formed.
In addition, a taper surface 2a is formed on the outer peripheral edge of the downstream side wall surface W2 so as to face the protrusion 1a of the upstream main body 1, whereby the metal diaphragm 5 is airtightly held.

The stationary seal body 3 is formed in a substantially cylindrical shape whose downstream side is closed by a metal member such as stainless steel, and the insertion cylinder portion 3a formed on the upstream side is inserted on the downstream side of the inflow passage 8. Then, by caulking and fixing, it is housed and fixed in the hollow portion of the upstream main body 1. Further, on the downstream side surface of the stationary seal body 3, a substantially dovetail-shaped annular groove 3b for inserting a seal member 4 to be described later, and a metal pressing member of the seal member 4 located inside the groove 3b. Cylindrical protrusions 3c for fixing the body are formed respectively. This protrusion 3c
It is formed integrally with the stationary seal body 3, and is in a state of protruding in the downstream direction (upward in FIG. 2) as shown in FIG. 2 before plastic deformation. Further, a plurality of communication passages 3d that communicate the inflow passage 8 and the valve chamber 10 are formed in the peripheral wall portion of the stationary seal body 3 at equal angles.

The sealing member 4 is made of fluororubber (for example, Kalrez (trademark) or Viton (trademark)) having an elasticity of a certain degree or more in an annular shape, and is inserted into the groove 3b of the stationary seal body 3. An annular insertion portion 4a,
An annular ridge 4b is integrally provided on one side of the insertion portion 4b and protrudes outward from the groove 3b of the stationary seal body 3 and abuts against the movable seal body 6 described later. See FIG. 2). Further, an annular metal pressing body 11 made of stainless steel is engaged and fixed to the inner peripheral edge portion of the insertion portion 4a of the seal member 4 and the portion on the side of the ridge 4b in a state where a part thereof is exposed to the outside. There is. That is, the annular metal pressing body 11 is integrated with the seal member 4 so that one side surface and the inner peripheral surface thereof are flush with the one side surface and the inner peripheral surface of the insertion portion 4a, respectively. The press body 11 is integrated when the seal member 4 is vulcanized. Further, the metal pressing body 11 has a large-diameter annular collar portion 11a, and is integrally formed with the seal member 4 so that the collar portion 11a is embedded in the seal member 4.

The diaphragm 5 is formed in an annular shape by a thin metal plate such as stainless steel or Inconel (trademark), and its outer peripheral edge portion is bent toward the downstream side. Further, the outer peripheral edge portion of the diaphragm 5 is engaged with the tapered surface 2a of the downstream main body 2 and is held in a hermetically sealed condition between the tapered surface 2a and the projection 1a of the upstream main body 2.
This allows the diaphragm 5 to be deformed in the axial direction.

The movable seal member 6 is formed of a metal member such as stainless steel into a substantially cylindrical shape, is fixed to the inner peripheral edge of the diaphragm 5 by welding, and the upstream end face of the seal member 4 is a ridge. It is designed to be seated on 4b. Incidentally, in the pressureless state, the movable seal body 6 and the diaphragm 5 are in the intermediate position.

The clamp 7 clamps and fixes both the main bodies 1 and 2 so that the outer peripheral edge of the diaphragm 5 is held by the upstream main body 1 and the downstream main body 2 with a clamping pressure. In this embodiment, a nut made of stainless steel is used for the fastener 7, and the nut 7 is screwed into the male screw portion 1c of the upstream main body 1.

In the line check valve constructed as described above, when the fluid flows into the inflow passage 8, the pressure difference acting on both surfaces of the diaphragm 5 causes the downstream side wall surface W2.
The movable seal body 6 is held in a state in which the movable seal body 6 is separated from the seal member 4 by being pressed in the direction. As a result, the inflow passage 8 and the outflow passage 9 are in communication with each other, and the fluid flows from the inflow passage 8 to the outflow passage 9 through the communication passage 3d and the valve chamber 10.
Further, when the fluid flows backward, the diaphragm 5 is pressed in the direction of the upstream side wall surface W1 due to the pressure difference acting on both surfaces thereof, and the movable seal body 6 strongly abuts the protrusion 4b of the seal member 4. As a result, the communication between the inflow passage 8 and the outflow passage 9 is blocked, and the reverse flow from the outflow passage 9 to the inflow passage 8 is blocked. Even when an excessive fluid pressure is applied to the diaphragm 5, the diaphragm 5 does not deform excessively because it is supported by contacting the upstream side wall surface W1 and the downstream side wall surface W2.

Next, the case where the stationary seal body 3 (metal member) and the seal member 4 (rubber member) are fixed in the line check valve will be described. First, the metal pressing body 1
The seal member 4 in which 1 is integrated is inserted into the groove 3b of the stationary seal body 3 with the ridge 4b thereof facing outward. At this time, the cylindrical protrusion 3c of the stationary seal body 3 is in a straight state. Further, the protrusion 4b of the seal member 4 is in a state of protruding from the groove 3b of the stationary seal body 3. After the seal member 4 is inserted into the groove 3b of the stationary seal body 3, the cylindrical projection 3c of the stationary seal body 3 is bent by an appropriate mechanical device (for example, a press machine) so as to spread outward and plastically deformed. , The metal pressing body 11 is pressed toward the stationary seal body 3 side. Then, a part of the insertion portion 4a of the seal member 4 is pinched and fixed between the stationary seal body 3 and the metal pressing body 11. As a result, the seal member 4 is prevented from coming off from the groove 3b and fixed to the stationary seal body 3. The conditions for plastically deforming the protrusion 3c are that the protrusion 3c itself is not damaged during plastic deformation, that the amount of deformation of the seal member 4 does not become extremely large, and that the plastically deformed protrusion 3c is It suffices to satisfy various conditions such as not protruding outward from the protrusion 4b and being able to securely fix the seal member 4 in the groove 3b.

As described above, the seal member 4 in which the metal pressing body 11 is integrated is inserted into the groove 3b of the stationary seal body 3, and the metal pressing body 11 is formed in the protrusion 3c of the stationary seal body 3. Since the static seal member 3 is pressed against the static seal member 3 side by plastic deformation and a part of the seal member 4 is sandwiched between the static seal member 3 and the metal pressing member 11, the seal member 4 is not deformed. It is extremely small, and it is possible to prevent the circularity, parallelism, coaxiality, and the like of the seal member 4 from decreasing. Further, since the metal pressing body 11 is integrally engaged with the seal member 4, the strength of the seal member 4 is increased, and the deformation of the seal member 4 is small even under high pressure. Further, since the seal member 4 is pressed and fixed to the stationary seal body 3 side by the protrusion 3c which is plastically deformed via the metal pressing body 11, the sealing member 4 can be fixed to the stationary seal body 3. There is no possibility that the seal member 4 will fall off due to aging, or that a gap will be created between the seal member 4 and the stationary seal body 3 to cause so-called back leakage. In particular, the metal pressing body 1
Since the first flange portion 11a is embedded in the seal member 4, the seal member 4 causes the seal member 4 to have the groove 3b.
Even if a high-pressure fluid is pressed firmly and firmly into the inside,
It does not mean that the seal member 4 is lifted from the groove 3b, and thus the lift of the seal member 4 can be reliably prevented. As a result, there is no back leakage. However, since the seal member 4 is sandwiched between the stationary seal body 3 and the metal pressing body 11, deformation due to creep is small. In addition, since the seal member 4 can be previously formed as a single body, defective parts can be selected after molding the rubber, which is convenient.

In the above embodiment, the seal member 4 is formed in an annular shape, the metal pressing body 11 is integrally attached to the inner peripheral edge portion thereof, and the metal pressing body 11 is plastically deformed to form a cylindrical shape. Although the protrusion 3c is used for pressing, in another embodiment, as shown in FIG. 4, the seal member 4 is formed in a disk shape, and an annular shape having a flange 11a on the outer peripheral edge thereof. The metal pressing body 11 is integrally attached, the seal member 4 is inserted into the circular recess 3b formed in the stationary seal body 3, and the protrusion 3 is integrally formed on the peripheral edge of the recess 3b.
c is plastically deformed to make the metal pressing body 11 the stationary seal body 3
Alternatively, a part of the seal member 4 may be pressed and fixed between the stationary seal body 3 and the metal pressing body 11 by pushing the seal member 4 toward the side.

In the above embodiment, an annular groove 3b into which the seal member 4 is inserted is formed on the downstream side surface of the stationary seal body 3, and a cylindrical projection 3c is formed at the inner position of the groove 3b. Although the seal member 4 is plastically deformed to fix the seal member 4 in the groove 3b, in another embodiment, the stationary seal member 3 is used.
Only the cylindrical projection 3c is formed on the downstream side surface of the projection 3 so that the seal member 4 abuts on the downstream side surface of the stationary seal body 3.
c, and the projection 3c is plastically deformed to seal the seal member 4
May be fixed to the downstream side surface of the stationary seal body 3 by sandwiching.

In the above embodiment, the seal member 4 is fixed to the stationary seal body 3, but in other embodiments, a groove and a protrusion are formed on the upstream side surface of the movable seal body 6. However, the seal member 4 may be fixed to the movable seal body 3 side by a pressure, or the seal member 4 may be pressure fixed to the upstream main body 1.

In the above embodiment, the metal pressing body 11 is integrally attached to the seal member 4, but in other embodiments, the seal member 4 and the metal member 11 are separately provided. Alternatively, they may be formed in a body, and these may be inserted into the groove 3b of the stationary seal body 3 in sequence and fixed by pressing with the protrusion 3c.

In the above embodiment, the metal pressing body 11 is used.
Although the one provided with the collar portion 11a is used, the shape and the like of the metal pressing body 11 are not limited to those in the above-mentioned embodiment. For example, the metal pressing body 11 having a rectangular cross section may be used.

In the above embodiment, the method of the present invention was used to form the valve seat portion of a line check valve, but it may also be used to form the valve seat portion of valves of other constructions. good.

[0031]

As described above, in the present invention, the metal pressing body is engaged with the rubber member, and the metal pressing body is pressed toward the metal member side by the plastic deformation of the projection integrally formed on the metal member. Then, a part of the rubber member is pinched and fixed between the metal member and the metal pressing body. As a result, the deformation of the rubber member is small, and it is possible to prevent the roundness, parallelism, coaxiality, and the like from decreasing. Further, since the metal pressing body is engaged with the rubber member, the strength of the rubber member is increased, and the deformation of the rubber member is small even under high pressure. Further, since the rubber member is pressed and fixed to the metal member side by the projection that is plastically deformed via the metal pressing body, the rubber member is securely fixed to the metal member, and the rubber member is aged. It does not fall off due to changes, or a so-called back leakage does not occur due to a gap between the rubber member and the metal member. In particular, when the flange portion is formed on the metal pressing body and the flange portion is embedded in the rubber member, the rubber member can be more reliably pressed to the metal member side by the flange portion, and the seal by the high pressure fluid is provided. It is possible to reliably prevent the members from rising. Of course,
Since the rubber member is sandwiched between the metal member and the metal pressing body, deformation due to creep is small.

[Brief description of drawings]

FIG. 1 is an enlarged vertical sectional view of a line check valve using a method of fixing a metal member and a rubber member of the present invention.

FIG. 2 is an enlarged cross-sectional view of a main part of the line check valve with a rubber member inserted in a stationary seal body.

FIG. 3 is an enlarged cross-sectional view of a main part of the line check valve with a rubber member fixed to a stationary seal body.

FIG. 4 is an enlarged cross-sectional view of a main part of the line check valve in a state where a disk-shaped rubber member is fixed to a stationary seal body.

FIG. 5 is an enlarged vertical cross-sectional view of a main part of a line check valve using a conventional method of fixing a metal member and a rubber member.

[Explanation of symbols]

Reference numeral 3 is a metal member (static seal body), 3b is a protrusion of the metal member, 4 is a rubber member (seal member), 11 is a metal pressing body, and 11a is a flange portion.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Bibliography Sho 62-202571 (JP, U) Rikai flat 4-42963 (JP, U) Rikai 61-45668 (JP, U) Rikai flat 2- 114751 (JP, U) Actual Kaihei 6-23128 (JP, U) (58) Fields investigated (Int.Cl. ⁷ , DB name) F16B 4/00 F16K 1/42

Claims (2)

(57) [Claims] 1. A method for fixing a rubber member (4) to a metal member (3) forming a valve seat portion , the cylinder having a rubber member (4) fitted to one side surface of the metal member (3). A cylindrical protrusion (3c) is formed, and then an annular metal pressing body (11) having an inner diameter substantially equal to the outer diameter of the cylindrical protrusion (3c) is integrally formed on the inner peripheral portion on the front surface side. A thick annular rubber member (4) which is fixed is attached to one side surface of the metal member (3) by inserting the tubular projection (3c) into the tubular projection (3).
By tip outward the metal pressing member by plastically deforming into c) (11) pressure press onto one side of the metal member (3), the back and the metal member of the metal pressing member (11) ( 3) A metal in a valve seat portion , characterized in that a rubber member (4) is sandwiched between the rubber member (4) and one side surface to fix the rubber member (4) to one side surface of the metal member (3) in an airtight manner. Method for fixing member and rubber member. 2. A metal pressing body (11) is provided with a collar portion (11a).
The metal pressing body (11) is formed integrally with the rubber member (4) in a state in which the flange portion (11a) is embedded in the rubber member (4). A method of fixing a metal member and a rubber member on a valve seat or a valve body.