JP3436687B2 - Nozzle processing method - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates to the atomization apparatus, the spray device, or relates to a method of processing Nozzle ink jet head of an ink jet printer, particularly, clogging or liquid of the nozzle by the liquid adhering to the nozzle it relates machining method nozzle capable of eliminating sagging.

[0002]

Conventionally as a processing method of this kind Nozzle, for example, as relating to a processing method of Nozzle such as an ink-jet head of an ink jet printer, a manufacturing method of the "nozzle plate of JP-A-6-99581 JP "and, and" ink jet recording head and a method of manufacturing the same "in JP-a-7-314669 JP, a number of proposals made, also, on the basis of these prior art processing method of various nozzle practical use Has been converted.

As a known method for ejecting liquid or other fluid material such as ink, paint or chemicals as the ejected substance from the nozzle, the ejected substance formed so as to communicate with the nozzle is well known. A bubble jet method in which a heating element such as a thermal head generates bubbles in the flow path of the storage part, and the pressure of the bubbles discharges an appropriate amount of the discharge product, or the discharge filled in the storage part. A pulsating external pressure is applied to the ejected material by a pressurizing means such as a piezoelectric element, and an appropriate amount of the ejected material is ejected from the nozzle by the external pressure, and the ejected material filled in the reservoir is Utilizing the atmospheric pressure of inert gas or air,
A spraying method for spraying a discharge from the nozzle is known.

Further, as the method of processing the nozzle, an injection molding method using a resin as a material, a punch press processing with a punch and a die, an etching method known as a method of processing a nozzle mainly made of a metal material, an additive method, and ,
Ablation processing by irradiation of ultraviolet light such as excimer laser, which is known as a processing method of resins such as polyimide, polycarbonate, polysulfone, polyether sulfone, and polypropylene, is known. Among these processing methods, excimer laser ablation processing optically decomposes the plastic polymer by ultraviolet light with a short pulse width and short wavelength, and processes while gasifying the light-irradiated part. It is characterized in that no dust or cutting chips are generated during processing and the processed surface is mirror-finished. Due to its characteristics, the ablation process using the excimer laser is widely used as a method for processing the nozzles of the inkjet head.

[0005]

However, in the above-mentioned conventional injection molding method and punch press processing method, for example, when the nozzle is processed, burrs or sagging occurs on the edge of the nozzle, or the processed surface becomes rough. To do. Therefore, in these processing methods, for example, in the case of an inkjet head, the breakage of the ink ejected from the nozzle and the water repellency deteriorate,
Ink sticks to the nozzles, and the nozzles are likely to be clogged. In order to eliminate such a problem, these processing methods generally carry out secondary processing such as deburring of the nozzle and mirror-polishing of the nozzle forming surface. However, when secondary processing such as mirror polishing is performed, dust generated during the secondary processing may enter the nozzles having fine holes, and the nozzles may be clogged.

Further, the above-mentioned processing methods such as the etching method and the additive method require many processing steps, and like the above-mentioned processing method, the nozzle forming surface thereof is subjected to mirror polishing or nickel / Teflon composite plating. Since it is necessary to perform the next treatment to increase the water repellency of the nozzle forming surface, there is a drawback that the processing cost becomes high.

On the other hand, in the ablation process using the excimer laser described above, as described above, the dust and cutting chips are not generated during the process, and the machined surface is mirror-finished. It has a great advantage that secondary processing of the forming surface is unnecessary. However,
In the ablation process using the excimer laser, although there is some difference depending on the irradiation intensity and irradiation time of the ultraviolet light on the nozzle formation surface, the edge portion of the processed nozzle on the ejection surface side of the ejected material such as ink is , R-shaped rounded shape. Therefore, also in the processing method using this excimer laser, when the nozzle of the ink jet head is processed, for example, when the nozzle of the inkjet head is processed, the breakage of the ink ejected from the nozzle is deteriorated, There is a problem that the ink that has dripped so as to block the ink ejection port of the nozzle adheres to the ink ejection surface of the above and the nozzle is clogged.

Here, various problems in the conventional nozzle and its processing method have been described mainly by taking the nozzle of the ink jet head as an example. However, the problem of such a nozzle is that other atomizing devices and It can be said that this is a common problem in the nozzles of sprayers. Further, the discharge product discharged from the nozzle is not limited to a liquid, and, for example, even in the case of a liquefied gas or the like, if the liquid is not drained well in the nozzle, the nozzle may gradually dew due to dew condensation caused by the gas ejection. May be contaminated and clogged.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a nozzle capable of forming a nozzle with a good cut of ejected material such as ink by an inexpensive and easy processing method. It is to provide a method of processing a le .

[0010]

In order to achieve the above-mentioned object, the invention of claim 1 communicates with a storage portion for discharged substances.
To form a nozzle with fine holes on the discharge surface.
A method of processing a nozzle for
At least the nozzle forming portion on the discharge surface side of the discharged material,
Made of resin that can be processed by excimer laser,
Of the resin forming the resin forming part on the surface of the processed part.
Formed a film with a thermal shrinkage greater than that
After that, the excimer laser is used to make fine holes and
In the method of processing a nozzle for forming a nozzle,
When making the above-mentioned fine holes in the grown part by an excimer laser,
And it is characterized in the this <br/> for heating an object to be processed portion is processed by the excimer laser.

In this nozzle processing method, the above
On the surface of the processed part of the resin that constitutes the slip forming part,
A film with a heat shrinkage greater than the heat shrinkage is formed
It Then, the excimer laser forms fine holes.
When the nozzle is formed, this excimer laser applies
The processed part to be processed is heated. This allows the excimer
The object formed on the surface of the part to be processed by laser
Film is formed during excimer laser ablation
The heat shrinks more than the resin. This resin
Due to the difference in heat shrinkage between the
By the above action, the edge part on the ejection surface side of the nozzle is
However, it rises greatly in the direction of rising. Also, the excimer
When laser ablation processing is performed, the above resin
The portion to be processed is softened by heating. This makes
The amount of protrusion of the protrusion formed on the edge on the discharge surface side of the
Increased edge of the nozzle on the side of the excimer laser irradiation surface
A sharp ridge protruding in the shape of a protrusion is formed on the
Discharge of the discharged product discharged from the device is further improved.

According to a second aspect of the present invention, in the nozzle processing method according to the first aspect, the nozzle is processed by the excimer laser.
The heating means for heating the processed part is via a wavelength-dependent mirror.
Then, the infrared light is introduced into the irradiation optical path of the excimer laser.
It is characterized by comprising a thermal laser .

In this nozzle processing method, the above
Extruder laser is used to form the fine holes in the sluice formation area.
Processed by the excimer laser when the nozzle is formed
The processed part to be processed is passed through the wavelength-dependent mirror to
Red of a thermal laser that introduces infrared light into the irradiation path of a sima laser
It is heated by outside light. This allows the excimer ray
Only the extremely fine area of the processed part
Accurately heated, and parts other than the processed part are heated by the heating
It will not be affected.

The invention of claim 3 is the same as that of claim 1 or 2.
In the method for processing a cheat, the nozzle forming portion is configured.
Annealing treatment by heating the resin at a specified temperature for a specified time
After that, the excimer is attached to the nozzle forming portion from the discharge surface side.
A fine hole is formed by a laser to form the nozzle .

In this nozzle processing method, the above
The resin that makes up the slag forming part is heated at a specified temperature for a specified time.
And then annealed, and then the nozzle forming part is exposed.
By irradiating with a sima laser, fine holes are formed and
The nozzle is formed. As a result, the annealing process
Since the above resin is appropriately hardened by the reason,
Formed on the edge of the excimer laser irradiation surface side of the
The starting portion is formed into an acute-angled shape with good cutting of the discharged material.

The invention of claim 4 is the invention of claim 1, 2 or 3.
In the method of processing a nozzle, the nozzle forming section is configured.
Adhere the laminate to the surface of the processed part of the resin
The above nozzle is formed by making fine holes with an excimer laser.
After being formed, the laminate is removed .

A method of processing a nozzle according to claim 1, 2 or 3.
In the above, as described above, the nozzle formation made of resin
Nozzle consisting of fine holes is formed in the part by excimer laser
This creates a sharp ridge on the edge of the nozzle.
Can be done. Of the ridge formed at the edge of this nozzle
Although the tip shape is quite sharp,
Due to the effects of heat during the ablation process with the laser
It is formed in a rounded shape with a slight radius.
The roundness of the tip of such a raised portion is
For example, when it is used as the nozzle of the sprayer,
This nozzle is the same as the inkjet head
If the nozzle is formed on the head surface of the nozzle,
Because the nozzle diameter of the nozzle is extremely small, the nozzle
The slight roundness of the raised portion formed on the
Ink discharged from the printer deteriorates. So this
In the nozzle processing method of No. 2, the nozzle forming unit is constructed.
Laminate was adhered to the surface of the processed part of the resin
In this state, fine holes are punched by the excimer laser and the
Form the nozzle. As a result, the ablation
It is formed on the edge of the nozzle due to the influence of heat during construction.
The roundness of the ridges formed is only formed on the laminate.
The nozzle edge on the resin surface is extremely sharp.
Is processed into. Therefore, in this nozzle processing method,
After forming a nozzle on the resin,
By removing the mine, the edge of the nozzle
The tip shape of the raised portion formed on the
It is formed in a very sharp shape. In addition, this processing method
In addition, the laminae adhered to the surface of the processed part of the resin
Ablation by the excimer laser
The adhesion of carbides and the like generated during processing on the surface of the resin
Avoided.

[0018] The invention of claim 5 isCommunicates with the discharge reservoir
Nozzle consisting of fine holes formed on the discharge surface
A method for processing a nozzle for forming a nozzle, comprising:
Nozzle shape at least on the discharge surface side
The forming part is made of resin that can be processed by excimer laser
And the surface of the processed portion of the resin forming the nozzle forming portion.
Of the resin having a heat shrinkage rate higher than that of the resin.
After forming the film, the excimer laser described above is used to form the micropores.
Therefore, when the excimer laser makes fine holes,
Due to the heat of twisting
By greatly contracting,
Forming an edge with a sharp-angled protrusionIt is also characterized by
Of.

In this nozzle processing method, the above
On the surface of the processed part of the resin that constitutes the slip forming part,
Formed a film with a thermal shrinkage greater than that
After that, the excimer laser is used to make fine holes and
Are formed. This allows the excimer laser to add
The coating formed on the surface of the processed part is
The heat generated during the ablation process of the Marazer
It shrinks more than the above resin. Therefore, this processing method
The nozzle formed by the
Due to the difference in heat shrinkage, it works like a well-known bimetal.
Therefore, the ejection surface side of the nozzle when the nozzle is formed
The edge part of the warp rises greatly in the direction in which it rises. this
The edge of the above-mentioned nozzle on the side of the excimer laser irradiation surface
The sharp ridge that is raised like a protrusion is formed on the
Discharge is improved.

[0020]

[0021]

[0022]

[0023]

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a nozzle and a method of processing the same applied to the nozzle of an inkjet head in an inkjet printer will be described below. FIG. 4 is a schematic cross-sectional view showing an example of a bubble jet type inkjet head using a heating element such as a conventional thermal head. In this ink jet head, a heat generating element 4 such as a thermal head is arranged in an ink flow path 3 of an ink reservoir 2 formed so as to communicate with the nozzle 1. When the drive circuit 5 selectively heats the heating element 4 based on predetermined image data, bubbles 6 are generated in the ink flow path 3. Then, when the bubbles 6 grow, the ink storage portion 2 is hermetically closed, so that a predetermined amount of the ink 7 in the ink flow path 3 is formed.
Becomes ink droplets 7a, and the bubbles 1 together with the nozzle 1
Is discharged from. As a result, the ink droplet 7a flies toward the recording paper (not shown) facing the ink ejection surface 8 that is the nozzle forming surface of the inkjet head, as if repelled by the bubbles 6, and the recording paper is ejected. It is landed on a portion forming a predetermined pixel.

FIG. 5 is a schematic sectional view showing an example of a pressure type ink jet head using a conventional piezoelectric element. In this inkjet head, a piezoelectric element 10 is arranged on a vibrating plate 9 that forms an ink flow path 3 of an ink reservoir 2 that is formed so as to communicate with the nozzle 1.
When the piezoelectric element 9 is selectively driven based on predetermined image data, the diaphragm 9 is pressed. This diaphragm 9
By pressing the button, the ink storage portion 2 is hermetically sealed, so that a predetermined amount of the ink 7 in the ink flow path 3 is ejected from the nozzle 1 as an ink droplet 7a. As a result, the ink droplets 7a fly toward the recording paper and land on the portions of the recording paper where predetermined pixels are formed, as in the case of the bubble jet method.

If there is a burr on the edge of the nozzle 1 or if the processing of the ink ejection surface 8 is rough, the ink 7 ejected from the nozzle 1 becomes poor in breakage and water repellency, as shown in FIG. In addition, the ink 7 adheres to the nozzle 1 and the ink ejection surface 8 and the nozzle is clogged. In order to eliminate such a problem, in this type of inkjet head, as described above, secondary processing such as deburring of the nozzle 1 and mirror-polishing of the ink ejection surface 8 is performed. Due to such secondary processing, dust generated during the secondary processing may enter the nozzle 1 formed of the fine holes, and the nozzle 1 may rather be clogged. In addition,
As a method for improving the water repellency of the ink ejection surface 8,
As shown in FIG. 7, there is a method in which the ink ejection surface 8 is subjected to a secondary treatment such as nickel / Teflon composite plating.
This method has a drawback that the processing cost becomes high as described above.

On the other hand, in the ablation process using the excimer laser, there is a feature that no dust or cutting chips are generated during the process and the processed surface is mirror-finished.
There is a great advantage that the secondary processing of the nozzle 1 and the ink ejection surface 8 becomes unnecessary. However, in the ablation process using the excimer laser, as shown in FIG. 8A, the edge portion 1a of the processed nozzle 1 on the ink ejection surface 8 side is formed in a rounded shape in an R shape. It is known.

The phenomenon that the edge portion 1a of the nozzle 1 is rounded by the excimer laser ablation process is caused by the excimer laser irradiation from the ink ejection surface 8 side and the ablation process is performed.
It is considered that this occurs because the edge portion 1a of the nozzle 1 on the ink ejection surface 8 side is irradiated with the excimer laser for the longest time, so that the edge portion 1a is heated and the edge portion 1a is melted.

Therefore, the nozzle machined by using the excimer laser, like the nozzle machined by the other machining described above, has a shortage of ink discharged from the nozzle, and the nozzle shown in FIG. As shown, the ink 7 adheres to the ink ejection surface 8 of the nozzle 1 so as to close the ink ejection port of the nozzle 1, and the nozzle 1 may be clogged due to drying and solidification of the adhered ink 7. It was

Therefore, the nozzle according to the present embodiment is shown in FIG.
As shown in (e), the edge portion 11a of the nozzle 11 including the fine holes on the ink ejection surface 8 side is formed in a projection shape with a sharp tip. In this nozzle 11, since the tip of the edge portion 11a of the nozzle 11 on the ink ejection surface 8 side is formed in the shape of an acute angle protrusion, the ink 7 can be cut off easily, and the nozzle 11 is clogged with the ink 7. Can be resolved. (Hereafter, margin)

The nozzle 11 shown in FIG. 1 (e) is formed as follows. First, prior to the ablation process of the nozzle 11 using the excimer laser, as shown in FIG.
As shown in (a), polyimide, polycarbonate,
A film having a thermal contraction rate higher than that of the nozzle forming member 12 on the surface of the processed portion of the nozzle forming member 12 made of a resin such as polysulfone, polyether sulfone, polypropylene, or polyethylene terephthalate (PET). 12a is formed. Here, PET was used as the nozzle forming member 12, and a polyurethane coating film was used as the coating film 12a. As the coating 12a, it is preferable to select a coating having as high a heat shrinkage ratio and water repellency as possible in order to improve the breakage of ejected substances such as ink ejected from the nozzle 11.

Next, as shown in FIG. 1B, the nozzle forming member 12 coated with the coating 12a as described above is perforated with fine holes from the ink ejection surface 8 side by the ultraviolet light 15a of the excimer laser. To form the nozzle 11. In this way, when fine holes are formed by the ultraviolet light 15a of the excimer laser from the ink ejection surface 8 side of the nozzle forming member 12 in which the coating 12a is coated on the ink ejection surface 8 as the nozzle forming portion, as shown in FIG. As shown in, the edge portion 11 of the nozzle 11 on the ink ejection surface 8 side
The a is formed in the shape of a projection with a sharp tip.

That is, the heat shrinkage rate of the coating 12a is
Since it is higher than the heat shrinkage rate of the nozzle forming member 12,
Due to the heat generated during the ablation process of the excimer laser, the coating 12a is contracted more than the nozzle forming member 12. Therefore, the nozzle 11 discharges the ink of the nozzle 11 when the nozzle 11 is formed by the same action as a well-known bimetal due to the difference in thermal contraction rate between the nozzle forming member 12 and the coating film 12a. The edge portion 11a on the side of the surface 8 largely warps in the rising direction. As a result, an acute-angled ridge protruding like a protrusion is formed at the edge portion 11a of the nozzle 11 on the side of the excimer laser irradiation surface, and the cutting of the discharged material is improved.

Here, the nozzle forming member 12 may be one that has been annealed by heating at a predetermined temperature for a predetermined time (for example, in an atmosphere of 60 ° C. to 70 ° C. for 24 hours). The nozzle forming member 12 to be annealed may be a nozzle plate such as an inkjet head, which has a pre-processed component shape, or a roll shape before being processed into the component shape. .

The nozzle forming member 12 subjected to the annealing treatment is appropriately hardened by the annealing treatment, so that the edge portion 11a of the nozzle 11 formed on the nozzle forming member 12 on the excimer laser irradiation surface side is formed. The raised portion formed is formed in an acute-angled shape with good cutting of the discharged material.

By the way, the tip shape of the raised portion of the edge portion 11a of the nozzle 11 formed as described above has a fairly sharp shape, but it is slightly rounded due to the influence of heat during the ablation processing by the excimer laser. Is formed in a rounded shape having. Such roundness of the tip of the raised portion is not a problem when the nozzle 11 is used as, for example, a nozzle of the spraying device, but this nozzle is a nozzle formed on the head surface of the inkjet head. In this case, since the nozzle diameter of the nozzle is extremely small, the slight roundness of the raised portion formed at the edge portion of the nozzle deteriorates the ink discharged from the nozzle 11.

Therefore, when the nozzle 11 is processed, as shown in FIG. 1D, a laminate 12b made of a resin film is preliminarily adhered to the surface of the nozzle forming member 12 (ink ejection surface 8). The nozzle 11 is formed by making fine holes by the excimer laser. As a result, the roundness of the raised portion formed on the edge portion of the nozzle due to the influence of heat during the ablation process is formed only on the laminate 12b, and the edge portion 11a of the nozzle forming member 12 has an extremely sharp angle. It is processed into a perfect state.

Therefore, in this nozzle processing method, after forming the nozzle 11 on the nozzle forming member 12, the laminate 12b adhered to the surface of the nozzle 11 is removed to form the edge portion 11a of the nozzle 11. The shape of the tip of the raised portion can be formed into an extremely sharp shape with good cutting of the discharged material. Further, in this processing method, the laminate 12b that is in close contact with the surface of the nozzle forming member 12 avoids adhesion of carbides and the like generated during ablation processing by the excimer laser to the surface of the nozzle forming member 12.

The nozzle forming member 12 formed as described above is used, for example, as shown in FIG. 1 (e), the head body 1 in which the ink reservoir 2 of the ink jet head is formed.
By attaching the nozzle 11 to the nozzle 3, the nozzle 7 is formed so that the ink 7 can be easily cut off and clogging is less likely to occur. here,
When the nozzle forming member 12 is formed with the fine holes 11 by the excimer laser, the workpiece to be processed by the excimer laser is heated to discharge the ink from the nozzle 11 as described above. Since the amount of protrusion at the tip of the acute-angled edge portion 11a on the surface 8 side can be formed large, the breakage of the ink 7 in the nozzle 11 can be further improved.

Therefore, as another processing method of the nozzle 11 according to the present embodiment, a heating means for heating the ink ejection surface 8 as the processed portion processed by the excimer laser, for example, a YAG laser or CO _{2 is used.} The ultraviolet light of the excimer laser 15 is composed of a thermal laser that emits infrared light such as a laser, and as shown in FIG. 2, via a wavelength-dependent mirror (dichroic mirror) 14 that is configured to reflect only the ultraviolet light. Infrared light 16a emitted from the thermal laser 16 is introduced into the irradiation optical path of 15a to generate the infrared light 1
The nozzle 11 may be perforated by the ultraviolet light 15a while heating the ink ejection surface 8 with 6a. As a result, only the minute range of the nozzle 11 processed by the excimer laser 15 is the thermal laser 1 described above.
Since it is accurately heated by 6, the nozzle forming member 12
The portion other than the portion in which the nozzle 11 is formed is not adversely affected by being heated and deformed by the infrared light 16a.

In FIG. 1, the nozzle 1 is formed on the nozzle forming member 12 as a nozzle plate by an excimer laser.
An example in which the nozzle forming member 12 is attached to the head main body 13 of the inkjet head after forming No. 1 has been shown. The nozzle 11 is, for example, as shown in FIG. Even if it is formed by directly punching with the ultraviolet light 15a of the excimer laser, the edge portion 11a of the nozzle 11 can be formed in a shape with the tip protruding at an acute angle. Here, the head body 1
When the depth of the nozzle 11 of No. 3, that is, the thickness of the nozzle forming portion is large, the ultraviolet light 15a of the excimer laser is used.
And the nozzle body 13 may be heated and deformed. If there is such a possibility, for example, as shown in FIG. 3B, when forming the head main body 13 by injection molding or the like, the portion on the nozzle forming surface 8 side is previously made into a crater shape. Spare hole 17 with a small hole diameter
Is formed, and the ultraviolet light 15a of the excimer laser is irradiated so as to overhaul the preliminary hole 17 to form the nozzle 11 having a predetermined hole diameter having an acute edge portion 11a. Good. Also, like this,
When the thickness of the nozzle forming portion is large, the head body 13
The inner surface side of the nozzle forming portion may be formed in a concave shape in advance, and the thickness of the nozzle forming portion may be formed so as not to be heated and deformed by the irradiation of the ultraviolet light 15a of the excimer laser.

[0042]

According to the invention of claim 1 , 2, 3 or 4.
For example, due to the difference in heat shrinkage between the resin and the coating,
Edge portion on the ejection surface side of the nozzle when the slur is formed
However, since it rises greatly in the direction in which it is raised, the nozzle
Of the excimer laser irradiation surface of the
Sharp ridges are formed to improve cutting of the discharged product.
There is an excellent effect that

In particular, according to the invention of claim 2, the above-mentioned noz
Of the fine holes formed by the excimer laser on the
When the slur is formed, it is processed by the excimer laser.
The nozzle is formed because the processed portion to be processed is heated.
Ridge at the tip of the sharp edge on the discharge surface side of the nozzle at the time of
There is an excellent effect that the amount becomes large and the breakage of the discharged material can be further improved .

According to the invention of claim 3 , the above-mentioned nose
Of the fine holes formed by the excimer laser on the
When the slur is formed, it is processed by the excimer laser.
The processed part to be processed is transmitted through the wavelength dependent mirror to the exciter.
Infrared of a thermal laser that introduces infrared light into the irradiation path of a Maras laser
Since it is heated by linear light, it is heated by the excimer laser.
Accurately heats only the extremely small area of the processed part
The influence of the heating on the parts other than the processed part
It has an excellent effect of avoiding it.

[0045] According to the fourth aspect of the present invention, the equi
When the nozzle is formed by the sima laser,
The slight roundness of the raised portion formed on the edge portion is
Formed only on the laminate, then the laminate
As it is removed, the ridges formed on the edge of the nozzle are removed.
The shape of the tip of the starting part is extremely sharp with good sharpness of the discharged material.
Can be formed into a shape,
Occurs during ablation processing with excimer laser
There is an excellent effect that it is possible to avoid adhesion of carbides and the like to the surface of the resin .

[0046] According to the invention of 請 Motomeko 5, the resin and the
When the nozzle is formed due to the difference in heat shrinkage with the coating
Direction in which the edge portion of the nozzle on the discharge surface side is raised
The excimer laser irradiation of the nozzle
A sharply raised ridge is formed on the edge of the shooting surface.
Therefore, there is an excellent effect that breakage of the discharged material is improved .

[0047]

[0048]

[Brief description of drawings]

1A, 1B, and 1C are schematic process diagrams for explaining an example of a nozzle processing method according to an embodiment.
(D) Schematic which shows the structural example of the nozzle formation member used for other processing methods. FIG. 6E is an enlarged cross-sectional view of a main part showing the shape of a nozzle formed by the above-described processing method.

FIG. 2 is a schematic configuration diagram for explaining another processing method of the nozzle according to the embodiment.

3A and 3B are enlarged cross-sectional views of a main part for explaining still another processing method of the nozzle according to the embodiment.

FIG. 4 is a schematic cross-sectional view showing an example of a bubble jet type inkjet head using a conventional thermal head.

FIG. 5 is a schematic cross-sectional view showing an example of a pressure type inkjet head using a conventional piezoelectric element.

FIG. 6 is an enlarged cross-sectional view of a main part for explaining a defect of a nozzle formed by conventional injection molding or the like.

FIG. 7 is an enlarged cross-sectional view of a main part for explaining a problem of a conventional plated nozzle.

8A and 8B are enlarged cross-sectional views of a main part for explaining a defect of a nozzle processed by a conventional excimer laser.

[Explanation of symbols]

7 ink 11 nozzles 11a Edge of nozzle 12 Nozzle forming member 12a film 12b laminate 13 head body 14 Wavelength dependent mirror 15 Excimer laser 15a UV light 16 thermal laser 16a infrared light

Claims (5)

(57) [Claims] 1. A discharge surface so as to communicate with a storage portion for discharged materials.
For forming a nozzle consisting of fine holes formed in
A method for processing slurries, comprising :
Resin that can process the nozzle formation part by excimer laser
Of the resin-processed portion forming the nozzle forming portion.
The surface has a higher heat shrinkage than the heat shrinkage of the resin
After forming the coating film,
To form the nozzle , and the fine hole is formed in the nozzle forming portion by an excimer laser.
At this time, add a processed part to be processed by the excimer laser.
A method for processing a nozzle characterized by heating. 2. The method for processing a nozzle according to claim 1, wherein a processed portion processed by the excimer laser is heated.
The heating means is connected to the excimer via a wavelength-dependent mirror.
It consists of a thermal laser that introduces infrared light into the irradiation path of the laser.
A method for processing a nozzle, which is characterized in that 3. The method for processing a nozzle according to claim 1 or 2.
The resin forming the nozzle forming part at a predetermined temperature
After heating for an annealing time, the nozzle forming part
In addition, a fine hole is formed from the discharge surface side by an excimer laser.
Forming method of the nozzle
Law. 4. A method of processing a nozzle according to claim 1, 2 or 3.
In, La on the surface of the processed portion of the resin constituting the nozzle forming part
Adhere the mine to the micro holes by using the excimer laser described above.
After forming the nozzle by drilling, remove the laminate
A method for processing a nozzle, characterized by: 5. A discharge surface so as to communicate with a storage portion of the discharge material.
For forming a nozzle consisting of fine holes formed in
A method for processing slurries, comprising :
The nozzle forming part, which can be processed by the liquid Shimareza tree
A processed portion of resin that is made of grease and that constitutes the nozzle forming portion
The surface of the resin has a thermal contraction rate higher than that of the resin.
After forming the coating,
A hole is made and a fine hole is made by the excimer laser.
The above film is formed by the heat generated when
By contracting more than
It is characterized in that the edge portion on the surface side is formed into a projection with an acute angle.
How to process the nozzle.