JP3435595B2 - Laser scanner - Google Patents
Laser scannerInfo
- Publication number
- JP3435595B2 JP3435595B2 JP26814598A JP26814598A JP3435595B2 JP 3435595 B2 JP3435595 B2 JP 3435595B2 JP 26814598 A JP26814598 A JP 26814598A JP 26814598 A JP26814598 A JP 26814598A JP 3435595 B2 JP3435595 B2 JP 3435595B2
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- diffractive optical
- light source
- laser light
- laser scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は例えばバーコード
の読取りに適用されるのみならず、２次元走査も容易に
可能とするレーザスキャナに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser scanner which is not only applied to, for example, reading a barcode but also enables two-dimensional scanning easily.
【０００２】[0002]
【従来の技術】図３に従来のレーザスキャナを示す。半
導体レーザ１１よりの光ビーム１２は投光レンズ１３に
よりトランスミットミラー（半透明鏡）１４に入射さ
れ、その一部は反射され、その反射光１５はポリゴンミ
ラー１６に入射される。ポリゴンミラー１６は多角形筒
１７の外周の各面にミラーが張り付けられ、その軸心が
モータ１８で回転される。よって反射光１５がポリゴン
ミラー１６の一面の回転方向における端に入射した時の
反射光１９ａに対し、ポリゴンミラー１６の回転につれ
て反射光１９ａが回動し、前記一面の他端に反射光１５
が入射した時は反射光１９ｂとなり、この反射光１９ａ
から１９ｂへの回動により、例えばバーコードラベル２
１が１次元的に走査（スキャン）される。ポリゴンミラ
ー１６の多角形の各１面により前記走査が１回行われ
る。2. Description of the Related Art FIG. 3 shows a conventional laser scanner. The light beam 12 from the semiconductor laser 11 is incident on the transmitting mirror (semitransparent mirror) 14 by the light projecting lens 13, a part of the light is reflected, and the reflected light 15 is incident on the polygon mirror 16. The polygon mirror 16 has mirrors attached to the respective outer peripheral surfaces of a polygonal cylinder 17, and the axis of the mirror is rotated by a motor 18. Therefore, the reflected light 19a when the reflected light 15 is incident on the end of the one surface of the polygon mirror 16 in the rotation direction rotates with the rotation of the polygon mirror 16, and the reflected light 15a is reflected on the other end of the one surface.
Is reflected light 19b, and this reflected light 19a
From 19 to 19b, for example, barcode label 2
1 is one-dimensionally scanned. The above scanning is performed once by each polygonal surface of the polygon mirror 16.
【０００３】バーコードラベル２１に入射した光の反射
光はその入射光と逆向きにその光路を通り、ポリゴンミ
ラー１６で反射され、トランスミットミラー１４を一部
が透過し、受光レンズ２２で集光されて光電変換素子２
３に入射し、電気信号に変換される。この電気信号がバ
ーコードラベル２１を読取った出力となる。The reflected light of the light incident on the bar code label 21 passes through the optical path in the opposite direction to the incident light, is reflected by the polygon mirror 16, partially passes through the transmit mirror 14, and is collected by the light receiving lens 22. Photoelectric conversion element 2 that is illuminated
It is incident on 3 and is converted into an electric signal. This electric signal becomes an output obtained by reading the barcode label 21.
【０００４】[0004]
【発明が解決しようとする課題】従来のレーザスキャナ
は、半導体レーザ１１、投光レンズ１３、ポリゴンミラ
ー１６、モータ１８を必要とし、部品点数が多く、しか
もこれらを光学的に組立てるのは大変な作業であった。
また全体としての小形化、軽量化も困難であり、かつ比
較的大きな電力を必要とする問題もあった。更に２次元
走査とするにはその構成が一層複雑で、かつ光学的組立
てが大変であった。The conventional laser scanner requires the semiconductor laser 11, the light projecting lens 13, the polygon mirror 16, and the motor 18, has a large number of parts, and it is difficult to assemble these optically. It was work.
Further, it is difficult to reduce the size and weight as a whole, and there is also a problem that relatively large electric power is required. Further, in order to perform two-dimensional scanning, the structure is more complicated and the optical assembly is difficult.
【０００５】[0005]
【課題を解決するための手段】この発明によれば、レー
ザ光源と対向してその光軸と垂直な面内で移動自在に、
レンズ機能をもつ回折光学素子が保持され、電気力によ
りその回折光学素子が移動させることを可能とする電圧
印加用駆動電極が設けられる。According to the present invention, the laser light source is opposed to the laser light source and is movable in a plane perpendicular to the optical axis thereof.
A diffractive optical element having a lens function is held, and a voltage application drive electrode that enables the diffractive optical element to move by an electric force is provided.
【０００６】[0006]
【発明の実施の形態】図１にこの発明の実施例を示す。
方形シリコン基板３１上に方形シリコン基板３２が接着
剤３３で貼り合わされる。シリコン基板３２上にＳｉＯ
2 の低温酸化膜３４を介して、例えば数μｍ程度の厚さ
のポリ（多結晶）シリコン層３５が気相成長される。こ
のポリシリコン層３５に対して、例えばホトエッチング
により回折光学素子３６が形成され、回折光学素子３６
はそのポリシリコン層３５の面内で移動自在に保持され
る。FIG. 1 shows an embodiment of the present invention.
A square silicon substrate 32 is attached to the square silicon substrate 31 with an adhesive 33. SiO on the silicon substrate 32
A poly (polycrystalline) silicon layer 35 having a thickness of, for example, about several μm is vapor-phase grown through the second low temperature oxide film 34. A diffractive optical element 36 is formed on the polysilicon layer 35 by, for example, photo-etching.
Are held movably within the plane of the polysilicon layer 35.
【０００７】つまり回折光学素子３６はその本体３７と
して、図２Ａ、図２Ｂに示すように、同心リング状の空
隙による透明部３８が形成され、その各間と中心部とに
より不透明部３９が構成され、これら不透明部３９を互
いに連結固定するために、９０度角間隔で放射の連結部
４１が構成されている。この透明部３８又は不透明部３
９の中心から数えてｎ番目の半径Ｒｎはｎの平方根に比
例するものであって、これは一般にフレネルゾーンプレ
ートと呼ばれている。That is, as shown in FIGS. 2A and 2B, the diffractive optical element 36 has a transparent portion 38 formed of a concentric ring-shaped void as a main body 37, and an opaque portion 39 is formed between the respective portions and the central portion. In order to connect and fix these opaque parts 39 to each other, radiation connecting parts 41 are formed at 90-degree angular intervals. This transparent portion 38 or opaque portion 3
The nth radius Rn counted from the center of 9 is proportional to the square root of n, which is generally called Fresnel zone plate.
【０００８】この本体３７を可動自在に保持するため、
例えば本体３７の４本の連結部４１の延長上にコ字状に
ジグザグに折返された支持ばね４２が一体に設けられ
る。つまりこれら支持ばね４２を中央に位置された方形
状空隙４３と、この４つの方形状空隙４３の互いの内端
を連通し、本体３７の不透明部３９の最外周の外側に沿
ったリング状空隙４４とが形成されている。これら透明
部３８、方形空隙４３、リング状空隙４４の各部におけ
るポリシリコン層３５がエッチング除去され、その際に
これらの部のみが主として除去されるように犠牲層３４
が用いられる。前記ポリシリコン層３５中のエッチング
除去された部分と対向する部分の犠牲層３４も同時にエ
ッチング除去される。このようにして４つの支持ばね４
２により回折光学素子３６の本体３７がその面内で移動
自在に、残りのポリシリコン層３５の部分、つまり固定
部３５ａに支持される。Since the main body 37 is movably held,
For example, a support spring 42 folded back in zigzag in a U shape is integrally provided on an extension of the four connecting portions 41 of the main body 37. That is, the square voids 43 centered on the support springs 42 communicate with the inner ends of the four square voids 43, and the ring-shaped voids along the outermost outer circumference of the opaque portion 39 of the main body 37. 44 are formed. The polysilicon layer 35 in each part of the transparent part 38, the square void 43, and the ring-shaped void 44 is removed by etching, and at that time, only these parts are mainly removed so that the sacrificial layer 34 is removed.
Is used. The portion of the sacrificial layer 34 facing the portion of the polysilicon layer 35 that has been etched away is also etched away. In this way, the four support springs 4
2, the main body 37 of the diffractive optical element 36 is movably supported within the surface thereof and is supported by the remaining portion of the polysilicon layer 35, that is, the fixed portion 35a.
【０００９】回折光学素子３６の本体３７と対向し、こ
の本体３７に達する穴４６がシリコン基板３２のシリコ
ン基板３１側から、基板３１との貼合せ前にエッチング
により形成される。この穴４６に位置し、シリコン基板
３１の中央部にレーザ光源４８が半田又は導電性接着剤
で取付けられ、その後、シリコン基板３１と３２との貼
合わせが行われる。レーザ光源４８としてはＶＣＳＥＬ
のような面発光形のものが好ましい。A hole 46 facing the main body 37 of the diffractive optical element 36 and reaching the main body 37 is formed by etching from the silicon substrate 31 side of the silicon substrate 32 before the bonding with the substrate 31. The laser light source 48 is located in the hole 46 and is attached to the center of the silicon substrate 31 by soldering or a conductive adhesive, and then the silicon substrates 31 and 32 are bonded together. VCSEL as the laser light source 48
The surface emitting type is preferable.
【００１０】回折光学素子３６を電気的に駆動するため
の電極が設けられる。即ち、回折光学素子３６の上面
上、つまり本体３７と各支持ばね４２上に駆動電極５１
が形成され、これら各支持ばね４２の固定側の駆動電極
５１が、ポリシリコン層３５の固定部３５ａ上に延長さ
れ、電圧印加部５１ａと接続されている。更に４つの方
形空隙４３の各隣接するものと挟まれ、リング状空隙４
４と接近してポリシリコン層３５の固定部３５ａ上に駆
動電極５２がそれぞれ形成される。Electrodes are provided for electrically driving the diffractive optical element 36. That is, the drive electrode 51 is provided on the upper surface of the diffractive optical element 36, that is, on the main body 37 and each support spring 42.
The drive electrode 51 on the fixed side of each of the support springs 42 is extended above the fixed portion 35a of the polysilicon layer 35 and connected to the voltage application portion 51a. Further, the ring-shaped voids 4 are sandwiched between adjacent four of the four rectangular voids 43.
4, the drive electrodes 52 are formed on the fixed portions 35a of the polysilicon layer 35, respectively.
【００１１】回折光学素子３６の本体３７は、フレネル
ゾーンプレートであって、これに対し、波長λの平行光
線がレーザ光源４８から垂直に入射されると、ゾーンプ
レートからみて、その軸上ｆ＝±Ｒ1 2／λの位置に点光
像５４が生じる。Ｒ1 は、最外周の透明部３８の半径で
ある。従って、レーザ光源４８よりの光は回折光学素子
３６の本体３７のリング状透明部３８を通過し、相互に
回折して、例えば図中の点５４に焦点を結ぶ、つまり回
折光学素子３６はレンズ機能を有するものである。The main body 37 of the diffractive optical element 36 is a Fresnel zone plate. On the other hand, when a parallel light beam having a wavelength λ is perpendicularly incident from a laser light source 48, on the axis of the zone plate, f = Tenkozo 54 occurs to the position of the ± R 1 2 / λ. R 1 is the radius of the outermost transparent portion 38. Therefore, the light from the laser light source 48 passes through the ring-shaped transparent portion 38 of the main body 37 of the diffractive optical element 36, is diffracted to each other, and is focused on, for example, a point 54 in the drawing, that is, the diffractive optical element 36 is a lens. It has a function.
【００１２】駆動電極５１の電圧印加部５１ａと、これ
に近い駆動電極５２との間に、交流電源５５から交流電
圧を印加すると、その電極５２と本体３７上のリング状
駆動電極５１の近いものとの間で静電吸引力が作用し、
その電圧が印加された電圧印加部５１ａが接続された支
持ばね４２の延長方向とほぼ平行に、本体３７が振動に
伴って、点光像５４が直線５６を往復移動する。回折光
学素子３６の中心に対し、電圧が印加されている電圧印
加部５１ａ及び駆動電極５２と反対側の電圧印加部５１
ａと駆動電極５２間に交流電源５５と逆位相の交流電圧
を印加すると、本体３７の往復移動の幅が倍になる。When an AC voltage is applied from an AC power supply 55 between the voltage application portion 51a of the drive electrode 51 and the drive electrode 52 close to the voltage application portion 51a, the electrode 52 is close to the ring-shaped drive electrode 51 on the main body 37. Electrostatic attraction acts between
As the main body 37 vibrates, the point light image 54 reciprocates along the straight line 56 substantially parallel to the extension direction of the support spring 42 to which the voltage application unit 51a to which the voltage is applied is connected. With respect to the center of the diffractive optical element 36, a voltage applying section 51a to which a voltage is applied and a voltage applying section 51 on the opposite side of the drive electrode 52.
When an AC voltage having a phase opposite to that of the AC power supply 55 is applied between a and the drive electrode 52, the width of the reciprocating movement of the main body 37 is doubled.
【００１３】回折光学素子３６の中心に対し、電圧印加
されている電圧印加部５１ａ及び駆動電極５２と角度的
に９０°離れた電圧印加部５１ａと駆動電極５２間に破
線で示すように交流電源５７で交流電圧を印加すると、
本体３７は前記往復移動に対し、直角方向に往復移動
し、点光像５４は、線５６と直交する線５８上を往復振
動する。従って、交流電源５５と５７の両者を駆動電極
５１，５２間に印加すると、点光像５４は２次元走査す
ることになる。An alternating current power source is provided between the voltage applying portion 51a and the driving electrode 52, which are applied with a voltage with respect to the center of the diffractive optical element 36, as shown by a broken line between the voltage applying portion 51a and the driving electrode 52. When an AC voltage is applied at 57,
The main body 37 reciprocates in a direction perpendicular to the reciprocal movement, and the point light image 54 reciprocates on a line 58 orthogonal to the line 56. Therefore, when both the AC power supplies 55 and 57 are applied between the drive electrodes 51 and 52, the point light image 54 is two-dimensionally scanned.
【００１４】なお例えばレーザ光源４８と回折光学素子
３６との間隔が５０μｍで、振動幅が１０μｍ程度の往
復振動を本体３７に行わせることが可能である。上述で
は回折光学素子３６として、透明部３８と不透明部３９
とからなる振幅形のものを用いたが、図２Ｃに断面を示
すように、リング状に厚さを変更し、その各リングの面
の幅を選定し、隣接リング面を透過する光に位相差を与
えて相互に回折現象が生じ、レンズ機能をもつ位相形の
回折光学素子を用いてもよい。また上述におけるポリシ
リコン層３５の代りに、ＳｉＯ2 層、又はＳｉＯＮ層を
用いてもよい。It should be noted that, for example, it is possible to cause the main body 37 to perform reciprocating vibration with a distance between the laser light source 48 and the diffractive optical element 36 being 50 μm and a vibration width of about 10 μm. In the above, as the diffractive optical element 36, the transparent portion 38 and the opaque portion 39 are used.
Although the amplitude type consisting of and was used, as shown in the cross section of FIG. 2C, the thickness was changed in a ring shape, the width of the surface of each ring was selected, and the light passing through the adjacent ring surface was selected. It is also possible to use a phase-type diffractive optical element having a lens function by giving a phase difference to each other to cause a diffraction phenomenon. Further, instead of the polysilicon layer 35 described above, a SiO 2 layer or a SiON layer may be used.
【００１５】[0015]
【発明の効果】以上説明したように、この発明によれ
ば、レンズ機能をもつ回折光学素子３６を基体と一体に
構成し、かつその回折光学素子３６が電場により振動で
きるようにされ、かつ、レーザ光源４８も内部に配置さ
れているため、部品点数が少なく、組立手数が極く僅か
であり、小形、軽量に作ることができ、また電力消費も
少ない。また大量生産に適している。しかも二次元走査
も容易に行わせることができる。As described above, according to the present invention, the diffractive optical element 36 having a lens function is formed integrally with the substrate, and the diffractive optical element 36 is vibrated by the electric field, and Since the laser light source 48 is also disposed inside, the number of parts is small, the number of assembling steps is extremely small, the size and weight can be reduced, and the power consumption is low. Also suitable for mass production. Moreover, two-dimensional scanning can be easily performed.
【図１】この発明の実施例を一部切断して示す斜視図。FIG. 1 is a perspective view showing a partially cutaway embodiment of the present invention.
【図２】Ａは回折光学素子３６の平面図、Ｂはその断面
図、Ｃはその他の例を示す断面図。2A is a plan view of a diffractive optical element 36, B is a cross-sectional view thereof, and C is a cross-sectional view showing another example.
【図３】従来のレーザスキャナの構成を示す図。FIG. 3 is a diagram showing a configuration of a conventional laser scanner.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G02B 26/10 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G02B 26/10
Claims (3)
する２方向に移動可能に保持され、レンズ機能をもつ回
折光学素子と、 その回折光学素子を電気力で移動させることを可能とす
る電圧印加用駆動電極とを具備し、 上記回折光学素子は、レンズ機能をもつ本体と、その本
体を移動自在に保持するジグザグに折り返された支持ば
ねとが一体に構成されると共に、その支持ばねとその支
持ばねを支持する固定部とが一体に構成され、 上記回折光学素子の上面に一方の上記電圧印加用駆動電
極が形成されていることを特徴とするレーザスキャナ。 1. A laser light source and a laser light source, which face the laser light source and are orthogonal to each other in a plane perpendicular to the optical axis.
Held movably in two directions, a diffractive optical element having a lens function, comprising a voltage application driving electrode that makes it possible to move the diffractive optical element in an electric power, the diffractive optical element, Main body with lens function and its book
Zigzag folded back support to hold your body freely
And the support spring and its support.
A fixing portion for supporting the holding spring is integrally formed, and one of the driving electrodes for voltage application is formed on the upper surface of the diffractive optical element.
A laser scanner characterized in that a pole is formed.
シリコンよりなることを特徴とする請求項１に記載のレ
ーザスキャナ。2. The laser scanner according to claim 1, wherein the diffractive optical element and the fixed portion are made of polysilicon.
徴とする請求項１又は請求項２に記載のレーザスキャ
ナ。3. A laser scanner according to claim 1 or claim 2, wherein said laser light source is a surface emitting type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26814598A JP3435595B2 (en) | 1998-09-22 | 1998-09-22 | Laser scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26814598A JP3435595B2 (en) | 1998-09-22 | 1998-09-22 | Laser scanner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000098281A JP2000098281A (en) | 2000-04-07 |
| JP3435595B2 true JP3435595B2 (en) | 2003-08-11 |
Family
ID=17454528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26814598A Expired - Fee Related JP3435595B2 (en) | 1998-09-22 | 1998-09-22 | Laser scanner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3435595B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4715595B2 (en) * | 2006-03-31 | 2011-07-06 | ブラザー工業株式会社 | Optical scanner and image forming apparatus having the same |
| JP5787084B2 (en) * | 2011-11-16 | 2015-09-30 | 株式会社リコー | Optical scanning device |
-
1998
- 1998-09-22 JP JP26814598A patent/JP3435595B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000098281A (en) | 2000-04-07 |
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