JP3435065B2 - Piezoelectric acceleration sensor - Google Patents

Piezoelectric acceleration sensor

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Publication number
JP3435065B2
JP3435065B2 JP21497498A JP21497498A JP3435065B2 JP 3435065 B2 JP3435065 B2 JP 3435065B2 JP 21497498 A JP21497498 A JP 21497498A JP 21497498 A JP21497498 A JP 21497498A JP 3435065 B2 JP3435065 B2 JP 3435065B2
Authority
JP
Japan
Prior art keywords
case
piezoelectric
inner case
piezoelectric acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21497498A
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Japanese (ja)
Other versions
JP2000046861A (en
Inventor
淳 関
季美男 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
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Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP21497498A priority Critical patent/JP3435065B2/en
Publication of JP2000046861A publication Critical patent/JP2000046861A/en
Application granted granted Critical
Publication of JP3435065B2 publication Critical patent/JP3435065B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、温度変化が激しい
環境に適応する圧電式加速度センサに関する。 【0002】 【従来の技術】従来、屋外に設置される圧電式加速度セ
ンサとして圧電式感震器等がある。この種の圧電式感震
器は、図3に示すように、ケース100内部に圧電式加
速度検出部101、圧電式加速度検出部101の出力信
号を処理する電気回路が形成されたプリント基板102
等を配設してなる。ここで、圧電式加速度検出部101
は、特許第2581901号公報に記載のものと同一の
構成により、3方向の加速度を検出することが可能であ
る。 【0003】 【発明が解決しようとする課題】しかし、図3に示す従
来の圧電式感震器においては、温度変化が激しい環境に
設置された場合、ケース100内部に結露が生じて圧電
式加速度検出部101の圧電素子の絶縁を低下させた
り、電気回路部が形成されているプリント基板102を
腐食させたりするという問題があった。圧電素子の絶縁
が低下すると、圧電式加速度検出部101のS/N比が
低下してしまい、微弱な振動を検出する感震器として好
ましくないからである。 【0004】本発明は、従来の技術が有するこのような
問題点に鑑みてなされたものであり、その目的とすると
ころは、設置される環境の温度変化によって発生する結
露の影響を少なくすることにより、信頼性の高い圧電式
加速度センサを提供しようとするものである。 【0005】 【課題を解決するための手段】上記課題を解決すべく請
求項1に係る発明は、ケース内部に四角柱の4面に圧電
素子と錘を突出させて取り付けてなる3方向圧電式加速
度検出部を有する圧電式加速度センサにおいて、前記ケ
ース内部に中空円筒形状の内ケースを配設すると共に、
この内ケースの内部に前記3方向圧電式加速度検出部を
固定し、前記内ケースと前記3方向圧電式加速度検出部
とで形成される空間を縮小する張り出し部を前記内ケー
スの内面に突出形成したものである。 【0006】 【0007】 【0008】 【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。ここで、図1は本発明に係る
3方向圧電式感震器の部分縦断面図、図2は本発明に係
る3方向圧電式感震器の部分横断面図である。 【0009】本発明に係る3方向圧電式感震器は、図1
又は図2に示すように、ケース1、内ケース2、3方向
圧電式加速度検出部3、電子部品が実装されたプリント
基板4、張り出し部5、コネクタ6等からなる。 【0010】ケース1は、アルミ合金等の金属部材から
なる上ケース部材1aと下ケース部材1bを密着するこ
とで、中空の円柱形状の完全密閉ケースを形成してい
る。 【0011】内ケース2は、アルミ合金等の金属部材か
らなり、ケース1内部において空気と接する表面積を増
大させるためにケース1の底面に絶縁部材2bを介して
固定されている。また、内ケース2の上面にリード線を
通す孔部2aが形成されているので、ケース1の内壁で
形成される空間と内ケース2の内部空間とは孔部2aに
より連通している。 【0012】3方向圧電式加速度検出部3は、四角柱3
aの4面、即ち4方向に圧電素子3bと錘3cを突出さ
せて取り付けてなる。3方向圧電式加速度検出部3は、
内ケースの底面に固定され、特許第2581901号公
報に記載のものと同一の構成であるので、3方向の加速
度を同時検出することが可能である。 【0013】プリント基板4は、内ケース2の張り出し
部5に立設したスペーサ4aにねじ止めされている。3
方向圧電式加速度検出部3とプリント基板4との間はリ
ード線(不図示)によって電気的に接続され、3方向圧
電式加速度検出部3の各方向の出力は、所定の処理回路
に入力される。 【0014】この処理回路は、例えば、3方向圧電式加
速度検出部3が出力する3方向の加速度に応じた電荷信
号を電圧信号に変換するものである。また、処理回路の
アースラインは、内ケース2に接地すると共に地震計本
体(図示せず)のアースラインに接続されている。 【0015】内ケース2に設けた4つの張り出し部5
は、内ケース2と3方向圧電式加速度検出部3で形成さ
れる空間の容積を縮小するためのもので、3方向圧電式
加速度検出部3と接触しないように配設されている。 【0016】以上のように構成した3方向圧電式感震器
の作用について説明する。ケース1内部に内ケース2を
設けたので、ケース1内において空気と接触する表面積
は著しく増大する。また、内ケース2と3方向圧電式加
速度検出部3で形成される空間は、張り出し部5によっ
て著しく減少するので、ケース1内部に封入されている
空気の絶対量も減少することになる。 【0017】このように、ケース1内部に封入される空
気の絶対量が少量となると共に、空気が接触するケース
1内部の表面積が著しく増大するので、ケース1外部の
気温が低下し、ケース1内部に結露が生じたとしても、
ケース1の内部に配置された各部材の単位表面積当たり
の結露する水分の量は減少する。これにより、圧電素子
表面の単位表面積当たりの結露する水分の量も減少する
ことになり、絶縁低下によるノイズの発生頻度を抑制す
ることができる。 【0018】また、3方向圧電式感震器の処理回路のア
ースラインを内ケース2に接地すると共に地震計本体の
アースラインに接続し、最外ケースであるケース1と内
ケース2とを絶縁したことにより、この3方向圧電式感
震器とこの出力を処理する地震計本体とを離れた位置に
設置したとしても、3方向圧電式感震器と地震計本体間
に発生するグランドループノイズを低減できる。 【0019】なお、上述の実施の形態においては、本発
明を3方向圧電式感震器に適用した場合について説明し
た。しかし、本発明は圧電素子を使用したものであれ
ば、その他の加速度検出部を備えるセンサ、例えば、単
軸加速度センサにも適用できる。 【0020】また、上述の実施の形態においては、ケー
ス1内部の表面積を増大させるために内ケース2を設け
たが、内ケース2内に更にケースを設けて三重のケース
構造としてもよい。この場合、最も内側のケース内に、
加速度検出部3、プリント基板4を配設するようにし、
張り出し部5も最も内側のケース内に設けるようにす
る。 【0021】更に、上述の実施の形態においては、ケー
ス1内部の空気と接触する表面積を増大させるために内
ケース2を設け、その形状をほぼ中空円筒形状とした場
合について説明した。しかし、本発明はこれに限らず、
加速度検出部3を包み込むような形状のものであればそ
の他の形状であってもよい。 【0022】 【発明の効果】以上説明したように請求項1に係る発明
によれば、ケース内部に配設した内ケースより内ケース
の外側表面積及び内側表面積によって、ケース内部の空
気と接触する表面積を確実に増やすことができ、内ケー
スの内面に突出形成した張り出し部により中空円筒形状
の内ケースと四角柱の4面に圧電素子と錘を突出させて
取り付けてなる3方向圧電式加速度検出部3で形成され
空間を縮小することができ、ケース内部の単位表面積
当たりに結露する水分の量が減少するので、結露による
絶縁低下を抑制でき、信頼性の向上が図れる。 【0023】 【0024】
Description: BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a piezoelectric acceleration sensor adapted to an environment in which temperature changes drastically. 2. Description of the Related Art Conventionally, there is a piezoelectric vibration sensor or the like as a piezoelectric acceleration sensor installed outdoors. As shown in FIG. 3, a piezoelectric vibration sensor of this type includes a printed circuit board 102 in which a piezoelectric acceleration detection unit 101 and an electric circuit for processing an output signal of the piezoelectric acceleration detection unit 101 are formed inside a case 100.
And so on. Here, the piezoelectric acceleration detector 101
Is capable of detecting acceleration in three directions with the same configuration as that described in Japanese Patent No. 2581901. [0003] However, in the conventional piezoelectric seismic device shown in FIG. 3, when it is installed in an environment where the temperature changes drastically, dew condensation occurs inside the case 100 and the piezoelectric type There are problems that the insulation of the piezoelectric element of the detection unit 101 is reduced, and that the printed circuit board 102 on which the electric circuit unit is formed is corroded. This is because if the insulation of the piezoelectric element is reduced, the S / N ratio of the piezoelectric acceleration detector 101 is reduced, which is not preferable as a seismic sensor for detecting weak vibration. [0004] The present invention has been made in view of such problems of the prior art, and an object of the present invention is to reduce the influence of dew condensation caused by a temperature change in an environment in which the apparatus is installed. Accordingly, it is intended to provide a highly reliable piezoelectric acceleration sensor. [0005] In order to solve the above-mentioned problems, the invention according to claim 1 is to provide a piezoelectric device in which four surfaces of a square prism are provided inside a case.
In a piezoelectric acceleration sensor having a three-direction piezoelectric acceleration detection unit in which an element and a weight are protruded and attached, an inner case having a hollow cylindrical shape is provided inside the case,
The three-way piezoelectric acceleration detector is fixed inside the inner case, and a projecting portion for reducing the space formed by the inner case and the three-direction piezoelectric acceleration detector is formed on the inner surface of the inner case. It was done. [0008] Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, FIG. 1 is a partial longitudinal sectional view of the three-way piezoelectric seismic device according to the present invention, and FIG. 2 is a partial transverse sectional view of the three-way piezoelectric seismic device according to the present invention. A three-way piezoelectric seismic sensor according to the present invention is shown in FIG.
Alternatively, as shown in FIG. 2, the case 1 includes an inner case 2, a three-way piezoelectric acceleration detector 3, a printed circuit board 4 on which electronic components are mounted, a protrusion 5, a connector 6, and the like. The case 1 is formed by closely contacting an upper case member 1a and a lower case member 1b made of a metal member such as an aluminum alloy, thereby forming a completely closed case having a hollow cylindrical shape. The inner case 2 is made of a metal member such as an aluminum alloy, and is fixed to the bottom surface of the case 1 via an insulating member 2b in order to increase the surface area in contact with air inside the case 1. Further, since the hole 2a through which the lead wire passes is formed on the upper surface of the inner case 2, the space formed by the inner wall of the case 1 and the inner space of the inner case 2 communicate with each other by the hole 2a. The three-direction piezoelectric acceleration detecting section 3 has a rectangular prism 3
The piezoelectric element 3b and the weight 3c are mounted so as to protrude in four directions of a, that is, in four directions. The three-direction piezoelectric acceleration detector 3
Since it is fixed to the bottom surface of the inner case and has the same configuration as that described in Japanese Patent No. 2581901, accelerations in three directions can be simultaneously detected. The printed circuit board 4 is screwed to a spacer 4a erected on the projecting portion 5 of the inner case 2. 3
The directional piezoelectric acceleration detector 3 and the printed circuit board 4 are electrically connected by a lead wire (not shown), and outputs of each direction of the three-directional piezoelectric acceleration detector 3 are input to a predetermined processing circuit. You. This processing circuit converts, for example, a charge signal output from the three-directional piezoelectric acceleration detector 3 in accordance with three-directional acceleration into a voltage signal. The ground line of the processing circuit is grounded to the inner case 2 and connected to the ground line of the seismometer main body (not shown). Four overhang portions 5 provided on the inner case 2
Is for reducing the volume of the space formed by the inner case 2 and the three-directional piezoelectric acceleration detector 3, and is disposed so as not to contact the three-directional piezoelectric acceleration detector 3. The operation of the three-way piezoelectric vibrator thus constructed will be described. Since the inner case 2 is provided inside the case 1, the surface area of the case 1 that comes into contact with air is significantly increased. Further, since the space formed by the inner case 2 and the three-direction piezoelectric acceleration detector 3 is significantly reduced by the overhang 5, the absolute amount of air sealed in the case 1 is also reduced. As described above, the absolute amount of the air sealed in the case 1 becomes small, and the surface area inside the case 1 with which the air comes into contact is remarkably increased. Even if condensation forms inside,
The amount of condensed moisture per unit surface area of each member arranged inside the case 1 is reduced. As a result, the amount of water condensed per unit surface area of the piezoelectric element surface is also reduced, and the frequency of occurrence of noise due to a decrease in insulation can be suppressed. The ground line of the processing circuit of the three-way piezoelectric seismic sensor is grounded to the inner case 2 and connected to the ground line of the seismometer main body to insulate the outermost case 1 from the inner case 2. As a result, even if the three-way piezoelectric seismic sensor and the seismometer main body that processes this output are installed at separate positions, the ground loop noise generated between the three-way piezoelectric seismic sensor and the seismometer main body Can be reduced. In the above embodiment, a case has been described in which the present invention is applied to a three-way piezoelectric vibration sensor. However, the present invention can be applied to a sensor including another acceleration detecting unit, for example, a single-axis acceleration sensor as long as the sensor uses a piezoelectric element. In the above-described embodiment, the inner case 2 is provided in order to increase the surface area inside the case 1. However, a case may be further provided in the inner case 2 to form a triple case structure. In this case, in the innermost case,
The acceleration detection unit 3 and the printed circuit board 4 are provided,
The overhang portion 5 is also provided in the innermost case. Further, in the above-described embodiment, a case has been described where the inner case 2 is provided to increase the surface area of the case 1 which comes into contact with air, and the shape thereof is substantially a hollow cylindrical shape. However, the present invention is not limited to this,
Any other shape may be used as long as the shape encloses the acceleration detection unit 3. As described above, according to the first aspect of the present invention, the inner case is disposed within the case from the inner case.
Due to the outer surface area and inner surface area of the
The surface area that comes into contact with air can be reliably increased, and a hollow cylindrical shape is formed by an overhang that protrudes from the inner surface of the inner case.
The piezoelectric element and weight protrude from the inner case and the four surfaces of the square pillar
Formed by the attached three-way piezoelectric acceleration detector 3
Since the amount of water condensed per unit surface area inside the case can be reduced, insulation deterioration due to dew condensation can be suppressed, and reliability can be improved. [0024]

【図面の簡単な説明】 【図1】本発明に係る3方向圧電式感震器の部分縦断面
図 【図2】本発明に係る3方向圧電式感震器の部分横断面
図 【図3】従来の圧電式感震器の部分縦断面図 【符号の説明】 1…ケース、1a…上ケース部材、1b…下ケース部
材、2…内ケース、2a…孔部、2b…絶縁部材、3…
3方向圧電式加速度検出部、3a…四角柱、3b…圧電
素子、3c…錘、4…プリント基板、5…張り出し部。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partial longitudinal sectional view of a three-way piezoelectric seismic device according to the present invention. FIG. 2 is a partial transverse sectional view of a three-way piezoelectric seismic device according to the present invention. DESCRIPTION OF SYMBOLS 1 ... case, 1a ... upper case member, 1b ... lower case member, 2 ... inner case, 2a ... hole, 2b ... insulating member, 3 …
Three-direction piezoelectric acceleration detector, 3a: square pole, 3b: piezoelectric element, 3c: weight, 4: printed circuit board, 5: overhanging part.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平1−195368(JP,A) 特開 平7−280828(JP,A) 特開 平6−231847(JP,A) 特開 平3−105066(JP,A) 特開 平9−211266(JP,A) 実開 平1−61695(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01P 15/08 - 15/09 G01D 11/24 H05K 7/20 ────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-1-195368 (JP, A) JP-A-7-280828 (JP, A) JP-A-6-231847 (JP, A) JP-A-3- 105066 (JP, A) JP-A-9-211266 (JP, A) JP-A-1-61695 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) G01P 15/08-15 / 09 G01D 11/24 H05K 7/20

Claims (1)

(57)【特許請求の範囲】 【請求項1】 ケース内部に四角柱の4面に圧電素子と
錘を突出させて取り付けてなる3方向圧電式加速度検出
部を有する圧電式加速度センサにおいて、前記ケース内
部に中空円筒形状の内ケースを配設すると共に、この内
ケースの内部に前記3方向圧電式加速度検出部を固定
し、前記内ケースと前記3方向圧電式加速度検出部とで
形成される空間を縮小する張り出し部を前記内ケースの
内面に突出形成したことを特徴とする圧電式加速度セン
サ。
(57) [Claims] [Claim 1] A piezoelectric element is provided on four sides of a square pillar inside a case.
In a piezoelectric acceleration sensor having a three-directional piezoelectric acceleration detecting section having a weight protruded and attached , a hollow cylindrical inner case is provided inside the case, and the three-directional piezoelectric sensor is provided inside the inner case. A piezoelectric acceleration sensor, wherein an acceleration detecting portion is fixed, and a projecting portion for reducing a space formed by the inner case and the three-directional piezoelectric acceleration detecting portion is formed on an inner surface of the inner case.
JP21497498A 1998-07-30 1998-07-30 Piezoelectric acceleration sensor Expired - Fee Related JP3435065B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21497498A JP3435065B2 (en) 1998-07-30 1998-07-30 Piezoelectric acceleration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21497498A JP3435065B2 (en) 1998-07-30 1998-07-30 Piezoelectric acceleration sensor

Publications (2)

Publication Number Publication Date
JP2000046861A JP2000046861A (en) 2000-02-18
JP3435065B2 true JP3435065B2 (en) 2003-08-11

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Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108731719A (en) * 2017-04-20 2018-11-02 发那科株式会社 Encoder

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108731719A (en) * 2017-04-20 2018-11-02 发那科株式会社 Encoder
US10267658B2 (en) 2017-04-20 2019-04-23 Fanuc Corporation Encoder

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