JP3430406B2 - A pressure control mechanism and a gap control mechanism in a substrate or sheet or other surface cleaning apparatus, and a substrate or sheet or other surface cleaning apparatus incorporating the pressure control mechanism and the gap control mechanism - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for cleaning a surface of a substrate, a sheet or the like, which removes dust and fine particles adhering to the surface or front and back surfaces of the substrate or sheet.

[0002]

2. Description of the Related Art In recent years, on a substrate or a sheet, a fine pattern of a circuit or the like to be printed on the surface has been advanced, and therefore, dust adhering to the front surface or the back surface of the substrate or the sheet in the manufacturing process. However, problems such as poor connection caused by fine particles have become a problem. Therefore, in order to remove dust and fine particles that may be attached to the front and back surfaces of such a substrate or sheet, the substrate or sheet is manufactured in a clean room, and the substrate or sheet is cleaned with a solvent such as water. Dust removal and the like are performed by ultrasonically cleaning the back surface or the like, or by adhering an adhesive rubber roll that is in contact with an adhesive tape roll for cleaning the surface thereof. In particular, in adsorbing and removing dust and fine particles adhering to the front and back surfaces of a substrate or a sheet by adhering this adhesive rubber roll, for example, with respect to diversified substrates or sheets having different thickness and materials, etc. In order to ensure the adhesion of the adhesive rubber roll to the front and back of the substrate or sheet so that dust and particles can be adsorbed and removed efficiently, upper and lower adhesive rubber rolls are used to remove dust from the front and back of the substrate or sheet. So that when removing only the surface of the substrate or sheet, the distance between the transport mechanism and the adhesive rubber roll can be appropriately changed according to the thickness of the substrate or sheet to be removed. The adhesive tape keeps the surface of the adhesive rubber roll clean by re-adsorbing dust and particles adhering to the front and back surfaces of the substrate or sheet. To the adhesive rubber rolls in close contact with the front and back surfaces of the substrate or sheets or the like through the rolls, such as those that can now be added to a suitable pressure by the air cylinder which utilizes the pressure of the compressed air.

[0003]

However, like the above-mentioned conventional one, when adsorbing and removing dust and fine particles adhering to the front and back surfaces of a substrate or sheet, etc. In order to ensure the adhesion of the adhesive rubber roll to the front and back of the substrate or sheet, etc., in order to efficiently adsorb and remove dust and fine particles, when removing dust from the front and back of the substrate or sheet, etc. The distance between the adhesive rubber rolls, or in the case of removing dust only on the surface of the substrate or sheet, the distance between the transport mechanism and the adhesive rubber roll can be changed according to the thickness of the substrate or sheet to be dust-removed. What makes it possible is to manually adjust the positions of the adhesive rubber roll and the adhesive tape roll according to the thickness of the substrate or sheet on which dust removal work is to be performed. It is necessary to process a large amount of diversified substrates or sheets in the same line. In today's dust removal work of substrates or sheets, it is a very complicated work for the operator. However, the workability of the dust removal work on the substrate, the sheet, etc. is significantly reduced.

Further, the surface is covered with a protective film, such as a substrate on which a fine patterned circuit is printed, a dry film (photosensitive agent) laminated substrate, a new functional film, etc., and the protective film is peeled off. Dust removal work is done to prevent it from happening, and the film itself is extremely thin, and it may be adsorbed by the adhesive rubber roll that adheres to the front and back surfaces of the dust and particles for adsorption and removal. For things, it is necessary to slightly adjust the pressure of the adhesive rubber roll that adheres to the front and back surfaces of the substrate or sheet etc. so as not to damage the substrate or sheet etc. If the pressure of the adhesive rubber roll is changed by an air cylinder that uses the pressure of compressed air, the front and back of the substrate or sheet Since the air cylinder itself is difficult to finely adjust the cylinder position by pressurizing or depressurizing compressed air or stopping it, for example, a substrate or a sheet, etc. Even if it is necessary to delicately set the pressure to the adhesive rubber roll depending on the state, the material, etc., it is difficult to set the pressure quickly and precisely.

[0005] Further, the dust or particles adhering to the front and back surfaces of the substrate or sheet are brought into contact with an adhesive rubber roll for adsorbing and removing the dust, and adhere to the front and back surfaces of the substrate or sheet adsorbed by the adhesive rubber roll. In the adhesive tape roll that re-adsorbs the dust and fine particles that had been used and keeps the surface of the adhesive rubber roll clean at all times, the adhesive tape wound around the adhesive tape roll is contaminated due to long-term use and gradually becomes dirty. When it comes to be cut off, the diameter of the adhesive tape roll becomes smaller, that is, it comes into contact with the surface of the adhesive rubber roll,
The pressure is not sufficiently transmitted to the adhesive tape roll by applying pressure to the substrate or sheet of the adhesive rubber roll, so that the pressure of the adhesive rubber roll to the substrate or sheet becomes small, and There is a possibility that the dust and particles adhered to the surface of the substrate or the sheet by the rubber roll cannot be adsorbed and removed reliably.

When the thickness of the substrate or sheet to be removed is different, even if the pressure of compressed air is used to apply the same pressure to the adhesive rubber roll by the air cylinder, the thickness of the substrate or sheet is reduced. When the thickness is thicker than when the thickness is thin, the degree of adhesion of the substrate or sheet to the adhesive rubber roll increases, and the pressure on the substrate or sheet of the adhesive rubber roll becomes excessive. If the thickness is thin, even if the pressure is suitable for removing dust and fine particles adhering to the front and back surfaces of the substrate or sheet, etc. In addition to damage to the substrate or sheet itself due to excessive pressure from the air cylinder, not only dust and particles adhering to the front and back surfaces of the substrate or sheet, etc. To a circuit or the like printed on the surface is also one in which there is a risk of failure such as peeling.

In addition, in order to prevent problems such as peeling of a circuit or the like printed on the surface of a substrate or a sheet having a different thickness, which may be caused by an excessive pressure by the air cylinder, Or, if you try to finely change the pressure of the air cylinder against the seat etc., the structure of the air cylinder itself becomes complicated,
The amount of compressed air used is enormous and a huge air tank is required, and since it takes time to fill or discharge the compressed air, quick and reliable dust removal cannot be performed.

Therefore, the present invention is dependent on the consumption of the adhesive tape roll for re-adsorbing and removing the dust and fine particles adsorbed on the surface of the adhesive rubber roll, and the material and thickness of the substrate or sheet to be removed. In other words, the dust and fine particles adhering to the front and back surfaces of the substrate or sheet can be removed quickly and reliably without damaging the substrate or sheet.

[0009]

Therefore, in a surface cleaning device for adsorbing and removing dust and fine particles adhering to the surface of a substrate or a sheet, the surface of the substrate or the sheet is abutted against a pressure receiving body integrated with an adhesive tape roll. The drive direction and drive of the DC motor that moves the pressure rod that can be pressed are controlled based on the load current of the DC motor to press or relax the adhesive rubber roll through the adhesive tape roll. The pressure on the substrate, sheet, or the like, which the adhesive rubber roll comes into close contact with while rotating, is controlled to be constant.

Further, in a similar surface cleaning apparatus for substrates, sheets, etc., it is integrally attached to a bearing member of an adhesive rubber roll elastically held with respect to the apparatus main body,
An adhesive that is movable by a DC motor by a detection plate that has a light-shielding portion whose front end is a hypotenuse and an optical sensor that can move forward and backward along the rotation axis of the adhesive rubber roll. The gap between the rubber roll and the transport mechanism is controlled.

Further, the driving direction and the driving of the DC motor which moves the pressure rod which comes into contact with the pressure receiving body which is integral with the pressure-sensitive adhesive tape roll and can be pressed are determined by the load current of the DC motor or the load current of the DC motor. Also, the pressure control or the input signal from the gap control mechanism is performed to pressurize or relax the pressure-sensitive adhesive rubber roll via the pressure-sensitive adhesive tape roll.

Alternatively, in a surface cleaning apparatus for adsorbing and removing dust and fine particles adhering to both front and back surfaces of a substrate or a sheet, a pressure receiving body integrated with an adhesive tape roll is brought into contact with and can be pressed by a pressure receiving body. The driving direction and driving of the DC motor that moves the pressure rod are controlled based on the load current of the DC motor to press or relax the adhesive rubber roll through the adhesive tape roll, and the adhesive rubber roll rotates. The pressure on the substrate or sheet that is in close contact while being controlled is kept constant.

Further, in the same substrate or sheet surface cleaning apparatus, one of the bearing members of the upper and lower opposing adhesive rubber rolls which are elastically held to each other is
Alternatively, one of them is integrally attached to the bearing member on the elastically held side of the opposing upper and lower adhesive rubber rolls elastically held to the apparatus main body,
By a detection plate having a light-shielding portion whose front end is a hypotenuse, and an optical sensor which is provided so as to face the detection plate and which can move forward and backward along the rotation axis of the adhesive rubber roll on the side where it is installed. The configured detection unit controls the movement of the adhesive rubber roll that is movable by the DC motor to control the gap between the adhesive rubber rolls.

Further, the driving direction and driving of the direct current motor, which moves a pressure rod which is brought into contact with a pressure receiving body which is integral with the pressure sensitive adhesive tape roll and can be pressed, are determined by the load current of the direct current motor or the direct current of the direct current motor. Controlled by the load current and the input signal from the gap control mechanism,
The pressure or relaxation of the adhesive rubber roll is performed via the adhesive tape roll.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION In a surface cleaning apparatus for substrates, sheets, etc. using the above pressure control mechanism, gap control mechanism, etc., the adhesiveness in dust removal work is utilized by utilizing the proportional relationship between load current and torque in a DC motor. The pressure on the rubber roll, or the pressure on the front and back surfaces of the substrate or the sheet can be easily set by driving the DC motor while controlling the load current of the DC motor, and dust attached to the surface of the sheet, An adhesive tape roll that adheres to the surface of the adhesive rubber roll that adsorbs and removes the particles, and re-adsorbs the dust and particles adsorbed on the surface of the adhesive rubber roll to keep the surface of the adhesive rubber roll clean. Even if it is consumed by use or the thickness of the substrate or sheet is different, the load current of the DC motor and the adhesive rubber roll Control of the drive direction and drive of the DC motor based on the input signal from the gap control mechanism provided for the adhesive tape roll, and the adhesion of the adhesive tape roll to the adhesive rubber roll and to the front and back surfaces of the substrate or sheet of the adhesive rubber roll. The force can always be controlled to a constant pressure.

Further, even if thick substrates or sheets are mixed on the same production line, the combined control of the gap control mechanism and the pressurization control mechanism causes the adhesive mechanism to adhere to the substrate or sheet conveyance mechanism. The gap with the rubber roll or the gap between the upper and lower adhesive rubber rolls can be easily changed by moving the adhesive rubber rolls in the vertical direction, so that it is possible to efficiently remove dust from the substrate or sheet.

[0017]

The present invention will be further described with reference to the embodiments shown in the drawings. 1 (1) is a substrate or sheet surface cleaning apparatus according to an embodiment of the present invention. This substrate or sheet surface cleaning apparatus (1) is a rotor (21) that constitutes a transport mechanism (22). ) Is movable and locked by a bearing slider (20) which is a bearing member in the vertical direction with respect to the front and back surfaces of the substrate or sheet (6) to be guided by the rotation of Adhesive rubber rolls (3) (3 ′) formed by adhering and removing dust and fine particles (7) adhering to the front and back surfaces of the substrate or sheet (6) by closely sandwiching them,
It is installed on top of this upper adhesive rubber roll (3),
The bearing slider (20) is movable in the vertical direction with respect to the surface, and is in contact with and in close contact with while rotating,
Adhesive rubber roll (3) The upper adhesive that keeps the surface always clean by re-adsorbing and removing the dust and fine particles (7) adhering to the surface of the substrate (6) or the like (6) adsorbed on the surface The tape roll (5) and the lower adhesive rubber roll (3 ') are installed in the lower part of the tape roll (5). Re-adsorb dust and fine particles (7) adhering to the back surface of the substrate (6) or the like (6) adhering to the surface of the adhesive rubber roll (3 ') in close contact with each other.
It is composed of a lower adhesive tape roll (5 ') whose surface is always kept clean by removing it. Incidentally, when the object to be cleaned is a sheet-shaped one stuck to a substrate, or when the object to be cleaned is a sheet-shaped object, it is possible to prevent the sheet-shaped objects from being caught or adsorbed during dust removal work, In order to smoothly perform dust removal work, as shown in FIG. 7, a guide (8) is provided in the apparatus main body (2) in a direction orthogonal to the conveyance direction of the cleaning object. In order to provide the guide (8), the adhesive rubber rolls (3) and (3 ') are each divided into a plurality of rolls, and the guide (8) is provided between the plurality of rolls. Therefore, the upper and lower adhesive rubber rolls (3) and (3 ') cannot remove dust from the front and back surfaces of the substrate or sheet (6) that passes through the guide (8), and thus the upper and lower adhesive rubber rolls (3) and (3') cannot be removed. Two adhesive rubber rolls (3) and (3 ') are arranged in parallel, and in each of the two adhesive rubber rolls (3) and (3') arranged in parallel, a plurality of adhesive rubber rolls (3) and (3 ') are arranged at different positions. Has been divided into rolls.

In the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention, first, in the apparatus body (2), the upper and lower sides of the substrate or sheet etc. Direction, which is movable by driving a direct current motor (4) and is tightly held while rotating, to adsorb and remove dust and fine particles (7) adhering to the front and back surfaces of this substrate or sheet (6). In the upper and lower adhesive rubber rolls (3) and (3 '), the bearing slider (20) of the upper adhesive rubber roll (3) of the lower adhesive rubber roll (3') is integrated with the device body (2). The spring (23) is held by the stopper (9) and is integrally attached to the bearing slider (20) at one end of the upper adhesive rubber roll (3) as shown in FIG. Hypotenuse The detection plate (12) having a light-shielding portion (13) formed outward and downward, and the detection plate (12) held at an angle and in a direction facing the light-shielding portion (13). The upper and lower adhesive rubber rolls (3) are detected by a detection unit (11) including an optical sensor (14) that can move forward and backward (left and right in FIG. 3) along a rotation axis (10) of (3). A gap control mechanism for a substrate, a sheet, or the like formed by controlling the gap (L) of (3 ′) to an arbitrary width is provided. The optical sensor (14) is integrally supported by the optical sensor holding portion (24), and a position adjusting screw (25) penetrating the optical sensor holding portion (24) is rotated by a motor (not shown) to cause an adhesive rubber roll ( It is slidable in the rotation axis direction of 3) (left and right direction in FIG. 3).
Since the optical sensor (14) used in this embodiment radiates a light beam in a strip shape, the light shielding part (1
The optical sensor (14) is installed with a similar inclination angle according to the shape of 3), but if the optical sensor (14) irradiates light to a pinpoint, there is no such restriction when the optical sensor (14) is installed. Absent.

In this gap control mechanism, the adhesive rubber rolls (3) are arranged so as to face each other.
When the (3 ′) is moved in the up-down direction, the adhesive rubber rolls (3) of the adhesive rubber rolls (3) are provided so that an arbitrary gap (L) required between the adhesive rubber rolls (3) and (3 ′) facing each other can be obtained. A light-shielding portion (13) of a detection plate (12) integrally attached to the bearing slider (20) and an optical sensor (14) held at a direction and an angle facing the light-shielding portion (13) of the detection plate (12). Specifically, the angle of 45 ° toward the outside of the adhesive rubber roll (3) is the upper and lower adhesive rubber rolls (3).
When setting the gap of (3 ′), the adhesive rubber roll (3) equipped with the detection plate (12) moves in the vertical direction, while the optical sensor (14) moves the adhesive rubber roll (3). Since it moves in the direction of the rotation axis (10), that is, in the direction orthogonal to the adhesive rubber roll (3), the optical sensor (when setting the gap between the upper and lower adhesive rubber rolls (3) and (3 ′)). To accurately match the amount of movement of the adhesive rubber roll (3) in the vertical direction with the amount of movement of the adhesive rubber roll (3) in the direction of the rotation axis (left and right in FIG. 3) of the adhesive rubber roll (3). Since the detection plate (12) and the optical sensor (14) are arranged in this way, the gap (L) between the adhesive rubber rolls (3) and (3 ′) is set in FIG. The adhesive rubber roll The adhesive tape roll is driven by the DC motor (4) until the optical sensor (14) moves according to the gap (L) between the rulers (3) and (3 ′) and the optical sensor (14) at that position responds. By moving the adhesive rubber roll (3) downward through the lowering of (5), the light shielding part (13) which is the hypotenuse of the detection plate (12) with respect to the optical sensor (14) causes the gap (L). ) Since it reacts accurately according to the amount, the drive of the DC motor (4) is stopped by the signal from the optical sensor (14), and the lowering of the adhesive rubber roll (3) is automatically stopped. The best adhesive rubber roll (3)
It is controlled so that the gap (L) between (3 ′) can be obtained.

In the main body (2) of the apparatus, the tip of the main body (2) is pressed against the pressure receiving body (17) which is integrated with the bearing slider (20) of the adhesive tape roll (5) via the spring (18). The drive direction and drive of the DC motor (4) integrally shaft-attached with the spur gear (19) that meshes with the rack and pinion rod (15) having the freely-pressurizing rod (16) are Load current to the motor (4) (a DC motor load current detection circuit including a differential amplifier circuit and a pressurizing force adjustment including a comparison calculation circuit that compares an input signal from the DC motor load current detection circuit with a set value. From the detection unit (11) configured by the load current to the DC motor (4), the optical sensor (14), and the like. It is controlled by the input signal, pressure or to the pressure-sensitive rubber rolls (3) through the adhesive tape roll (5) performs relaxation, upper and lower adhesive rubber rolls (3)
(3 ') is controlled so that the pressure applied to the substrate or sheet or the like (6) which is tightly clamped while rotating is kept constant.
In this embodiment, the bearing slider (20) of the lower adhesive rubber roll (3 ') is fixed to the apparatus main body (2) except when the adhesive rubber roll (3') is replaced. The bottom adhesive rubber roll (3 ')
The control of the DC motor that vertically moves the lower adhesive tape roll (5 ') that can be brought into close contact with and is pressed is performed only by the load current of the DC motor.

In the embodiment of the present invention, the gap control mechanism and the pressurizing control mechanism for the substrate or sheet (6), which can be operated independently, are used. It can also be operated as a composite control mechanism for the substrate (6) or the like (6) formed by mixing the control mechanisms.

The motor on which the spur gear (19) is pivotally mounted is the DC motor (4) because the motor (4) can be easily switched by changing the polarity from the power source.
This is because it is suitable for frequent pressure control, since it will rotate in the forward or reverse direction, and the DC motor (4)
In the above, since there is a proportional relationship between the torque and the load current, the torque, that is, the pressure can be detected by detecting the load current.

Since the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention is configured as described above, first, the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention is In the manufacturing process of the substrate or sheet (6), dust removal work is performed on the front and back surfaces of the substrate or sheet (6) that has dust and fine particles (7) adhered to the surface of the substrate or sheet (6). When doing so, first, an adhesive rubber roll (3) suitable for the thickness or type of the substrate or sheet (6) that is the object to be cleaned.
The gap (L) between the upper and lower adhesive rubber rolls (3) and (3 ′) was set so as to receive the pressing force from (3 ′), and it was calculated in advance so as to correspond to the set gap (L) amount. The position of the optical sensor (14) is set by the position adjusting screw (25) so that the optical sensor (14) is installed at the position. Further, by operating the DC motor (4), a pressure rod (16) provided at the tip of a rack and pinion rod (15) meshing with a spur gear (19) pivotally mounted on the DC motor (4) causes its tip to move. Springs at (18)
The pressure-sensitive adhesive body (17) integrated with the bearing slider (20) of the adhesive tape rolls (5) and (5 ') is pressed against the pressure-sensitive body (17), thereby the adhesive tape roll (5).
An adhesive rubber roll that directly adheres to the front and back surfaces of the substrate or sheet or the like (6) to be cleaned through (5 ') to remove dust and fine particles (7) attached to the front and back surfaces ( 3) Apply pressure to (3 '). Due to the pressure, first, the upper adhesive rubber roll (3) causes the spring (23) provided on the bearing slider (20).
Of the bearing slider (2
0) integrated with the detection plate (12) is also lowered, and the optical sensor (14) at the preset position detects the light shielding part (13) of the detection plate (12), The driving of the DC motor (4) is stopped by the detection signal.
The lower adhesive rubber roll (3 ') is the device body (2).
Since it is fixed to the adhesive tape roll (5 '), the lower adhesive tape roll (5') is driven up by the drive of the DC motor (4) and comes into close contact with the adhesive rubber roll (3 ') to press it to a predetermined pressure. The circuit operates based on the detected load current of the DC motor (4) to stop driving the DC motor (4). At this time, the upper adhesive tape roll (5)
DC motor (4) for generating a pressure applied to a pressure receiving body (17) which is integrated with a bearing slider (20) which holds a movable body in a vertical direction via a spring (18)
4, the load current detected by the DC motor load current detector provided between the DC motor power source and the DC motor drive electronic circuit is used to drive the DC motor load including a differential amplifier circuit. The current is converted into a voltage by a current detection circuit to generate a predetermined pressure required for the adhesive rubber roll (3) of the adhesive tape roll (5) and the substrate or sheet (6) of the adhesive rubber roll (3). It is controlled by a signal that has passed through a pressurizing force adjustment circuit having a comparison calculation circuit that performs a comparison calculation between the required voltage and the voltage input from the load current detection circuit.

As a result of long-term use of the substrate or sheet surface cleaning apparatus (1) according to the embodiment of the present invention, the substrate or sheet etc. directly adheres to the front and back surfaces of the substrate or sheet (6) and adheres to the front and back surfaces thereof. Dust and fine particles (7) that are adsorbed on the surface of the adhesive rubber rolls (3) and (3 ') by contacting the adhesive rubber rolls (3) and (3') that adsorb and remove the dust and fine particles (7) By re-adsorbing the adhesive tape rolls (3) and (3 '), the adhesive tape rolls (5) and (5') themselves, which keep the surfaces of the adhesive rubber rolls clean, are contaminated. 5) When the diameter of the adhesive tape roll is gradually reduced as a result of needing to cut off the soiled portion of (5 '), this adhesive tape roll (5) (5')
Needs to move toward the adhesive rubber rolls (3) and (3 '), that is, to increase the pressing force of the pressure rod (16) against the pressure receiving body (17). In that case, first, the adhesive tape roll (5) ) (5 ') and adhesive rubber roll (3) (3')
Since the contact with and weakens and further dissociates, the load current of the DC motor (4) that moves the pressure rod (16) is reduced, so that the circuit is loaded with the load. While controlling the direct current motor (4) so as to maintain the pressure on the adhesive rubber rolls (3) (3 ') set at the beginning of the dust removal work for the substrate or sheet (6) in response to the decrease in the current. The pressure rod (16) at the end of the rack and pinion rod (15) that is driven to mesh with the spur gear (19) axially mounted on the DC motor (4) is attached to the adhesive tape rolls (5) (5 ') and the spring. By contacting the pressure receiving body (17) which is integrated via (18) and pressing the spring (18) while compressing it, the pressure is applied to the adhesive rubber rolls (3) (3 ′) set at the beginning of the dust removal operation, Of the adhesive rubber roll (3) While compensating for the decrease in pressure on the plate or sheet (6), between the adhesive tape rolls (5) (5 ') and the adhesive rubber rolls (3) (3') set at the beginning of the dust removal operation, or The pressure applied to the substrate or sheet (6), which is the object to be cleaned, can be controlled so as to be always constant.

In the dust removing operation for the substrate or sheet (6), an adhesive rubber roll (corresponding to the thickness of the substrate or sheet (6) set at the beginning of the dust removing operation for the substrate or sheet (6) ( 3) A substrate or sheet (6), which is thicker (L ′) than the gap (L) between (3 ′),
When it is sent into the substrate or sheet etc. surface cleaning apparatus (1) which is an embodiment of the present invention, first, an adhesive rubber roll (corresponding to the thickness of the sent substrate or sheet etc. (6) is used. 3) In the direction of expanding the gap (L) between (3 ′), that is, while extending the spring (23) holding the bearing slider (20) of the adhesive rubber roll (3), the upper adhesive rubber roll (3) And the upper adhesive tape roll (5) moves upward, and its information is constituted by the detection plate (12) and the optical sensor (14) integrated with the bearing slider (20) of the adhesive rubber roll (3). Is sent as a signal from the detection section (11) to the sequence control section. Moreover, at this time, the adhesive tape roll (5) also moves upward, and the pressure is applied to the pressure rod (16) and further to the DC motor (4) via the pressure receiving body (17) using the spring (18) as a cushioning material. Therefore, the DC motor (4) detects the pressure as a load current and reverses the DC motor (4) to maintain the preset pressure on the substrate or sheet (6) of the adhesive rubber roll (3). Control to drive. As a result, even if the dust removal work is performed on substrates (6) or the like (6) having different thicknesses continuously, the pressure on the substrates (6) or the like (6) can always be controlled to be constant. is there.

Regarding the adhesive tape rolls (5) and (5 '), not only the control based on the load current in the DC motor (4) that moves the adhesive tape rolls (5) and (5') but also the device of the adhesive tape rolls (5) and (5 ') itself is separately provided. It is also possible to provide a sensor for measuring the positional displacement with respect to the main body (2) and use the signal from the sensor for control.

[0027]

As described above, in the surface cleaning apparatus for substrates or sheets, between the adhesive rubber rolls facing each other or between the adhesive rubber rolls and the transport mechanism according to the thickness and material of the substrate or sheet to be cleaned. The pressure of the adhesive rubber roll to the substrate or sheet and the pressure between the adhesive tape roll and the adhesive rubber roll can be accurately and easily set, and dust and fine particles adsorbed on the surface of the adhesive rubber roll Re-adsorption and removal of the adhesive tape to keep it clean at all times Accordingly, the pressure of the adhesive rubber roll that comes into close contact with the substrate or sheet can be automatically maintained constantly at a constant level. The dust removal work to remove dust and fine particles adhering to the front and back surfaces of the printed circuit board etc. can be performed quickly, smoothly and surely, and especially in the case of a circuit board or sheet for printing fine patterned circuits, etc. It has an excellent effect that dust removal work can be performed without damaging the above.

[Brief description of drawings]

FIG. 1 is a front view of a substrate or sheet surface cleaning apparatus that is an embodiment of the present invention.

FIG. 2 is a side view of a substrate or sheet surface cleaning apparatus that is an embodiment of the present invention.

FIG. 3 is a side view of a detection portion of a surface cleaning device for substrates, sheets, etc. according to an embodiment of the present invention.

FIG. 4 is a schematic diagram showing a control system of a substrate or sheet surface cleaning apparatus that is an embodiment of the present invention. The control system for the DC motor for the lower adhesive tape roll is omitted.

FIG. 5 is a schematic diagram showing an operating state of the composite control mechanism in the case of feeding a thick substrate or sheet in the substrate or sheet surface cleaning apparatus according to the embodiment of the present invention.

FIG. 6 is a schematic diagram showing an operating condition of a detection unit.

FIG. 7 is a diagram showing an engagement between an adhesive rubber roll and a guide.

[Explanation of symbols]

1 Substrate or sheet surface cleaning equipment 2 device body 3,3 'Adhesive rubber roll 4 DC motor 5,5 'adhesive tape roll 6 Substrate or sheet 7 Dust, fine particles 8 guides 9 metal fittings 10 rotation axis 11 Detector 12 Detection plate 13 Light-shielding part 14 Optical sensor 15 Rack and pinion rod 16 Pressure rod 17 Pressure receiver 18 spring 19 flat gear 20 bearing slider 21 rotor 22 Transport mechanism 23 spring 24 Optical sensor holder 25 Position adjustment screw

Claims (7)

(57) [Claims] 1. A surface, such as a substrate or a sheet, which is transported by a transport mechanism, is vertically movable and lockable, and adheres to the surface of the substrate or sheet while rotating and in close contact with the surface. Adhesive rubber roll formed by adsorbing and removing dust and fine particles, and movable up and down from the side facing the substrate or sheet with respect to the surface of the adhesive rubber roll, and in contact and contact while rotating. The adhesive tape roll has a stronger adhesiveness than that of the adhesive rubber roll, so that dust and particles adsorbed on the surface of the adhesive rubber roll are re-adsorbed and removed to keep the surface clean at all times. In a surface cleaning device for a substrate or a sheet, the drive direction and drive of a DC motor that moves a pressure rod that comes into contact with a pressure receiving body that is integral with an adhesive tape roll and can be pressed, Controlled based on the load current of the DC motor, to pressurize or relax the adhesive rubber roll through the adhesive tape roll, the pressure on the substrate or sheet or the like that the adhesive rubber roll adheres while rotating,
A pressure control mechanism for a substrate or sheet that is controlled to be constant. 2. A substrate or a sheet or the like which is vertically movable and lockable with respect to both of the front and back surfaces of the substrate or the sheet transported by the transport mechanism, and is in close contact while rotating. Adhesive rubber rolls obtained by adsorbing and removing dust and fine particles adhering to the front and back surfaces of the adhesive rubber rolls, and the surface of each adhesive rubber roll being vertically movable from the side facing the substrate or sheet, and rotating. By contacting and adhering to each other and having a stronger adhesiveness than that of the adhesive rubber roll, dust and particles adsorbed on the surface of the adhesive rubber roll are re-adsorbed and removed to keep the surface clean at all times. In a surface cleaning device for a substrate or a sheet, which comprises an adhesive tape roll formed by the above, a direct current module that moves a pressure rod that comes into contact with a pressure receiving body that is integral with the adhesive tape roll and can be pressed. By controlling the drive direction and drive of the motor based on the load current of the DC motor to pressurize or relieve the adhesive rubber roll through the adhesive tape roll, and the substrate to which the adhesive rubber roll adheres while rotating. A pressurization control mechanism for a substrate or a sheet, which is formed by controlling the pressure on the sheet or the like to be constant. 3. A surface of a substrate, a sheet, or the like, which is transported by a transport mechanism, is vertically movable and lockable, and adheres to the surface of the substrate, the sheet, or the like while rotating and in close contact. Adhesive rubber roll formed by adsorbing and removing dust and fine particles, and movable up and down from the side facing the substrate or sheet with respect to the surface of the adhesive rubber roll, and in contact and contact while rotating. The adhesive tape roll has a stronger adhesiveness than that of the adhesive rubber roll, so that dust and particles adsorbed on the surface of the adhesive rubber roll are re-adsorbed and removed to keep the surface clean at all times. In a surface cleaning device such as a substrate or a sheet, which is integrally attached to a bearing member of an adhesive rubber roll elastically held with respect to the main body of the device, light-shielding with its tip part as a hypotenuse A gap between the adhesive rubber roll and the transport mechanism, which is movable by a DC motor, by a detection unit including a detection plate having a section and an optical sensor that can move forward and backward along the rotation axis of the adhesive rubber roll. A gap control mechanism that controls the 4. At least one of the front and back surfaces of a substrate or a sheet conveyed by a conveying mechanism is movable and engageable in the vertical direction, and is in close contact with the substrate while rotating so that the substrate or the Adhesive rubber rolls that are vertically opposed to each other by adsorbing and removing dust and fine particles adhering to the front and back surfaces of a sheet, and the surface of each adhesive rubber roll that faces the substrate or sheet, respectively. It is more movable up and down, and comes into contact with and close to it while rotating, and has adhesiveness stronger than the adhesiveness of the adhesive rubber roll, so that dust and particles adsorbed on the surface of each adhesive rubber roll are re-adsorbed, In a surface cleaning device such as a substrate or a sheet made of an adhesive tape roll whose surface is always kept clean by removing it, the above-mentioned upper and lower adhesive lathes which are held elastically with respect to each other. One of the bar rolls is integrally attached to one of the bearing members, or one of the bar rolls is integrally attached to the elastically held side bearing members of the opposing upper and lower adhesive rubber rolls elastically held with respect to the apparatus main body. By a detection plate having a light-shielding portion whose front end is a hypotenuse, and an optical sensor which is provided so as to face the detection plate and which can move forward and backward along the rotation axis of the adhesive rubber roll on the side where it is installed. A gap control mechanism that controls the gap between the adhesive rubber rolls by controlling the movement of the adhesive rubber rolls, which can be moved by a DC motor, by means of a detector that is configured. 5. The driving direction and driving of a DC motor that moves a pressure rod that comes into contact with a pressure receiving body that is integral with the pressure-sensitive adhesive tape roll and can be pressed are determined by the load current of the DC motor or the load current of the DC motor. A pressure control for the substrate or sheet according to claim 1, wherein the pressure control of the gap control mechanism according to claim 3 controls the pressure of the adhesive rubber roll via the adhesive tape roll. A composite control mechanism for a substrate, a sheet, or the like, which is a mixture of the mechanism and the gap control mechanism for the substrate, the sheet, or the like described in claim 3. 6. The drive direction and drive of a DC motor that moves a pressure rod that comes into contact with a pressure receiving body that is integral with the pressure-sensitive adhesive tape roll and that can be pressed by the load current of the DC motor or the load current of the DC motor. The pressure control for the substrate, the sheet or the like according to claim 2, which is controlled by an input signal from the gap control mechanism according to claim 4 to pressurize or relax the adhesive rubber roll through the adhesive tape roll. A composite control mechanism for a substrate, a sheet, or the like, which is a mixture of the mechanism and the gap control mechanism for the substrate, the sheet, or the like described in claim 4. 7. A pressure control mechanism for the substrate, sheet, etc. according to claim 1 or 2, a gap control mechanism for the substrate, sheet, etc. according to claim 3 or 4,
Alternatively, a surface cleaning device for a substrate, a sheet, etc., which incorporates any one of the composite control mechanisms according to claim 5 or 6.