JP3410567B2 - Optical deflector - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to information equipment, image equipment,
The present invention relates to an optical deflector used in measuring instruments and the like.

[0002]

2. Description of the Related Art In recent years, optical deflectors used in information equipment, imaging equipment, measuring equipment, etc. are required to have high-speed and highly accurate rotation performance, small size, and low price. Therefore, rolling bearings or dynamic pressure air bearings are used. There are many optical deflectors that rotate a polygon mirror at a high speed by a radial gap type motor and an axial gap type motor, but none of them satisfies the above requirements.

An optical deflector for rotating a polygon mirror at a high speed by a conventional axial gap type motor will be described with reference to FIGS. 6 to 7.

In FIGS. 6 to 7, reference numeral 29 denotes an electric circuit board, which is fixed to the base 1 so as to be positioned on a plane perpendicular to the rotation center axis of the rotor 23, and has a coil 28 and a hole on the upper surface. A mounting portion for an element such as the element 20 and an electric circuit pattern (not shown) are formed, and a stator yoke 25 is fixed to the lower surface. The coil 28 and the stator yoke 25 form a stator portion 26. The coil 28 wound so as to have a central hole is formed of a self-bonding coil or the like, and is arranged on the electric circuit board 29 substantially on the circumference with respect to the central axis of rotation and electrically connected to the electric circuit pattern. It is connected to the. A hub 5 rotatably held on the outer periphery of a fixed shaft 2 fixed to a base 1 via a bearing 3 such as a rolling bearing.
A required number of rotor magnetic poles (not shown) are formed by the permanent magnets 31 on the inner lower portion of the cup-shaped rotor yoke 30 fixed to the permanent magnet 31. The rotor magnetic poles are disposed so as to face the coil 28 closely. Magnet 31 and rotor yoke 3
With 0, the rotor 23 is configured. A ring-shaped FG magnet 27 is provided below the outer periphery of the rotor yoke 30.
Is stuck. A rotary polygon mirror 6 is attached to the hub 5, and rotates the outer circumference of the fixed shaft 2 at high speed via the bearing 3 as the rotor 23 rotates. In the optical deflector configured as described above, when an exciting current is passed through the electric circuit pattern formed on the electric circuit board 29 by a predetermined driving method, the coil 28 electrically connected to the electric circuit pattern is excited. Then, the rotor 23 is rotationally driven by the electromagnetic force generated between the coil 28 and the rotor magnetic pole of the permanent magnet 31 facing the coil 28. However, since the magnetic air gap becomes the same as the axial direction, this electromagnetic force causes an attractive force or a repulsive force in the axial direction between the rotor magnetic pole and the coil 28 in addition to the driving force for rotating the rotor 23. The attractive force or the repulsive force changes with the exciting current, and thus causes vibration or rotational runout of the rotor 23. For this reason, the rotational axis of the rotary polygon mirror 6 becomes unstable during optical scanning, and surface tilt or the like occurs, which causes a problem that accurate optical scanning cannot be performed. Further, in the axial gap type motor, since the diameter of the rotor 23 needs to be increased in order to obtain a large rotational force, the rotor 23 becomes heavy and the inertia also increases. Therefore, there are problems that the startup time is delayed, it is difficult to obtain dynamic balance, and it becomes difficult to rotate at high speed.

Next, an optical deflector for rotating a polygon mirror at a high speed by a conventional radial gap type motor will be described with reference to FIGS.
It will be described based on 1. The radial gap type motor is
There are inner rotor type motors as shown in FIGS. 8 to 9 and outer rotor type motors as shown in FIGS. 10 to 11. First, regarding the optical deflector for rotating the polygon mirror by the inner rotor type motor. explain.

In FIGS. 8 to 9, reference numeral 35 denotes a rotor fixed to a hub 5 rotatably held on the outer periphery of a fixed shaft 2 fixed to a base 1a via a bearing 3 such as a rolling bearing. A cylindrical permanent magnet 34 is fixed to the outer periphery of the cylindrical rotor yoke 33, and a required number of rotor magnetic poles (not shown) are formed. A rotary polygon mirror 6 is attached to the hub 5 and rotates at high speed as the rotor 35 rotates. On the outer circumference of the rotor 35, a stator 36 is fixed inside the base 1a with a magnetic gap in the radial direction. The stator 36 has a stator pole 39 and a stator yoke 37 so as to face the rotor pole closely. It is integrally formed, and the coil 38 is wound around the stator magnetic pole 39. An electric circuit board 40 has an electric circuit pattern (not shown) for exciting the coil 38 formed by a method such as printing, and the terminals of the coil 38 are electrically connected to the electric circuit pattern. . In the optical deflector configured as described above, when an exciting current is applied to the electric circuit pattern by a predetermined driving method, the coil 38 electrically connected to the electric circuit pattern is excited and the coil 38 is excited.
The rotor 35 is rotationally driven by the electromagnetic force generated between the stator magnetic pole 39 around which the coil is wound and the opposing rotor magnetic pole. Similar to the axial gap type motor, this electromagnetic force generates an attractive force or a repulsive force between the rotor magnetic pole and the stator magnetic pole 39 in addition to the driving force for rotating the rotor 35, but unlike the axial gap type motor,
As shown in FIG. 9, a pair of stator magnetic poles 39a and 39b, which are simultaneously excited in the stator magnetic pole 39, are arranged at positions symmetrical to each other with respect to the center axis of rotation. Are offset by each other and do not cause vibration or rotational runout of the rotor 35. However, the winding operation of the coil 38 around the stator magnetic pole 39 must be performed inside the stator 36, that is, from a minute gap between the adjacent stator magnetic poles 39.
The workability is extremely poor, and in order to miniaturize the stator 36, the gap between the adjacent stator magnetic poles 39 must be narrowed, which further deteriorates the workability and requires a dedicated winding machine. However, there is a problem that the cost becomes high.

Next, an optical deflector for rotating a polygon mirror at a high speed by an outer rotor type motor will be described.

In FIG. 10, reference numeral 48 is a rotor, which is a base 1
On the outer circumference of the fixed shaft 2 fixed to the bearing 3, a bearing 3 such as a rolling bearing is provided.
A cylindrical permanent magnet 49 is fixed on the inner circumference of the side surface of the cup-shaped rotor yoke 46 fixed to the hub 5 rotatably held by the rotor magnetic poles (not shown) in the inner circumference direction. Has been formed. A rotary polygon mirror 6 is attached to the hub 5 and rotates at high speed as the rotor 48 rotates. A stator 41 is fixed to the base 1 on the inner circumference of the rotor 48, and the stator 41 has a stator yoke 4 on the inner circumference.
2 is formed, and a required number of stator magnetic poles 43 are integrally formed with the stator yoke 42 toward the outer peripheral direction of the stator yoke 42 so as to closely face each other with a magnetic gap in the radial direction therebetween. A coil 44 is wound around the stator magnetic pole 43. 45 is an electric circuit board,
An electric circuit pattern (not shown) for exciting the coil 44 is formed by a method such as printing.
Terminals are electrically connected to this electric circuit pattern. In the optical deflector configured as described above, when an exciting current is applied to the electric circuit pattern by a predetermined driving method, the coil 44 electrically connected to the electric circuit pattern is excited and the coil 44 is wound. Stator pole 4
The rotor 48 is rotationally driven by the electromagnetic force generated between the rotor magnetic pole 3 and the facing rotor magnetic pole. In this outer rotor type motor, the electromagnetic force generated in the magnetic gap in the radial direction is the same as the inner rotor type motor, in addition to the driving force for rotating the rotor 48, the attraction force or the attraction force between the rotor magnetic pole and the stator magnetic pole 43. Although a repulsive force is generated, as shown in FIG. 11, for example, a pair of stator magnetic poles 43a and 43b that are simultaneously excited in the stator magnetic pole 43 are arranged at positions symmetrical to each other with respect to the rotation center axis. The attracting forces or the repulsive forces cancel each other out, and do not cause the vibration or the rotational shake of the rotor 48. However, since the outer diameter of the rotor 48 is larger than that of the inner rotor type motor, the rotor 48 becomes heavier and the inertia becomes larger. Therefore, there are problems that the startup time is delayed, it is difficult to obtain dynamic balance, and it becomes difficult to rotate at high speed.

[0009]

A conventional optical deflector for rotating a rotary polygon mirror at high speed by a radial gap type (inner rotor type) motor, which is suitable for high speed rotation and has a short starting time, is shown in FIGS. In addition, it is a so-called inner slot, and the winding of the coil 38 around the slot 32 must be performed from a slight gap between the adjacent stator magnetic poles 39, and workability is extremely poor. Further, when attempting to miniaturize the motor, the gap between the adjacent stator magnetic poles 39 must be further reduced, so that there is a drawback that a dedicated winding machine is required and the manufacturing cost is increased. there were.

In view of the above-mentioned conventional drawbacks, the present invention can be miniaturized without the need for a dedicated winding machine, is easy to assemble and is inexpensive, and has little vibration or rotational runout. An object of the present invention is to provide an optical deflector capable of stably rotating a rotary polygon mirror at high speed by mounting the rotary polygon mirror on a motor having a short rise time.

[0011]

In order to achieve the above object, the present invention is an optical deflector for rotating a rotary polygon mirror by a radial gap motor having a rotor and a stator, and the rotor has a permanent magnet on the outer circumference. , Rotatably held by bearings, the stator is composed of a magnetic conductive substrate, a coil, a coil magnetic core, and a stator magnetic pole. The coil magnetic core has one end fixed to the fixing portion of the magnetically conductive substrate and the other end fixed to the stator magnetic pole, and the coil is wound around the outer periphery of the coil magnetic core. The magnetic pole surface of the stator pole is connected to the rotor magnetic pole by being disposed on a substantially circular circumference with respect to the rotation center axis, being fixed to the magnetic conducting board or the electric circuit board, the coil terminals being electrically connected to the electric circuit pattern. A rotary polygon mirror is mounted on a motor having a radial magnetic gap facing the stator, and the stator poles are made of a magnetic material sintered material. It is mounted and constitutes an optical deflector. Further, the magnetic conducting substrate and the coil magnetic core, or the stator magnetic pole and the coil magnetic core are integrally formed of a sintered material of a magnetic material to form an optical deflector. The stator magnetic poles are partially or wholly connected in the axial direction through a thin connecting portion formed between adjacent magnetic poles on the magnetic pole surface portion, thereby increasing the rigidity of the stator magnetic pole inner diameter and improving the dimensional accuracy. You can keep it unchanged.

[0012]

In the optical deflector constructed as described above, the coil is wound around the outer circumference of the coil magnetic core provided parallel to the direction of the rotation center axis, and the stator yoke is made of the magnetically conductive substrate. The diameter can be reduced, the motor outer diameter can be reduced, and when the coil is energized, the magnetic flux generated in the coil magnetic core, which is parallel to the direction of the rotation center axis, is guided to the stator magnetic pole, and the rotor magnetic pole is generated in the radial magnetic gap. The electromagnetic force is generated by the action of the electromagnetic wave, and the torque in the rotation direction is generated by canceling the attraction force or the repulsive force to the rotor magnetic pole by the stator magnetic pole, and the rotor rotation without electromagnetic vibration can be obtained. In addition, since the magnetic pole surface of the integrally formed stator pole is smooth without the magnetic pole slots unlike conventional products, the change in the magnetic flux density in the magnetic gap in the rotating direction becomes gentle, and the air flow near the stator magnetic pole is reduced. Also becomes relatively smooth, which is advantageous for noise and vibration at high speed rotation. Further, since the required number of stator magnetic poles are integrally formed, the rigidity of the stator magnetic pole inner diameter is increased, and the dimensional accuracy related to the stator magnetic pole during operation can be maintained unchanged. Furthermore, a bobbinless coil such as a self-bonding coil can be used without the need for a dedicated coil winding machine, the space factor is improved, and the assembly is easy and the manufacturing cost is low. Radial gap smaller than the above motor. An inner rotor type motor can be obtained, which facilitates miniaturization.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in the drawings.

In the first embodiment of the present invention shown in FIGS. 1 and 2, the rotor 7, the magnetic conductive board 17, the required number of coils 14, the same number of coil magnetic cores 16 and the same number of stator magnetic poles 12 are provided. Radial gap that constitutes a magnetic circuit with. The inner rotor type motor is configured to rotate the rotary polygon mirror 6 at a high speed by a predetermined driving method.

1 and 2, reference numeral 7 is a rotor,
A cylindrical permanent magnet 10 is fixed to the outer circumference of a fixed shaft 2 fixed to the base 1, and a cylindrical rotor yoke 9 fixed to a hub 5 rotatably held via a bearing 3 on the outer circumference thereof. , A required number of rotor magnetic poles (not shown) are formed. The rotating polygon mirror 6 is attached to the hub 5 and rotates at high speed as the rotor 7 rotates. The stator 11 includes a magnetically conductive substrate 17, a coil 14, a coil magnetic core 16, and a stator magnetic pole 12. Magnetically conductive substrate 17
Is a magnetically conductive material or the like (for example, silicon steel, pure iron, low carbon steel,
Made of a magnetically conductive sintered material or the like) and fixed to the base 1 so as to be positioned on a plane perpendicular to the rotation center axis of the rotor 7,
It has a function as a stator yoke. Coil 14
Is a bobbin-less coil such as a bobbin wound coil or a self-fusion coil wound so as to have a central hole,
A required number of them are arranged on the circumference of the rotor rotation center axis, and an electric circuit pattern (not shown) formed on the electric circuit board 19 by a method such as printing is attached to the electric circuit pattern by a method such as soldering. The respective coil terminals are electrically connected and fixed to the electric circuit board 19 or the magnetic conductive board 17. The required number of coil magnetic cores 16 are inserted into the center holes of the predetermined coils 14, one end is fixed to the predetermined fixing portion 18 of the magnetically conductive substrate 17, and the other end is fixed to the predetermined stator magnetic pole 12. The magnetic pole surface of the stator magnetic pole 12 faces the rotor magnetic pole to form a magnetic gap in the radial direction. In FIG. 2, the required number of stator magnetic poles 12 are integrally formed of the magnetic material in the connecting portion 21, but it goes without saying that each of the stator magnetic poles 12 may be independently configured. Further, it is possible to provide the connecting portion at a portion of the stator pole face in the axial direction of the rotation center axis or at another desired place. Further, although the magnetically conductive substrate 17, the coil magnetic core 16, and the stator magnetic pole 12 are separate components, the magnetically conductive substrate 17 and the coil magnetic core 16 or the stator magnetic pole 12 and the coil are made of a sintered material such as a magnetic material. The magnetic core 16 may be integrally formed. As the magnetic material, for example, the following high resistance magnetic material can be adopted. (1) iron-phosphorus type, (2) iron-silicon type, (3) iron-nickel type, (4) iron-chrome silicon type, (5) magnetic material in which an organic binder is attached to iron, and the like.

In the optical deflector thus constructed, an electric circuit pattern (not shown) formed on the electric circuit board 19 is formed.
When an exciting current is passed (energized) by a predetermined method, the coil 14 electrically connected to the electric circuit pattern is excited, and a magnetic flux parallel to the rotation center axis direction of the rotor 7 is applied to the coil magnetic core 16. Occur. The generated magnetic flux passes from the coil magnetic core 16 through the stator magnetic pole 12 to generate a magnetic field in the gap formed in the radial direction between the stator magnetic pole 12 and the rotor magnetic pole closely facing each other. In this air gap magnetic field, an electromagnetic force acts between the stator magnetic pole 12 and the rotor magnetic pole, and a rotational force is generated in the rotor 7. Further, by a well-known method using a position sensor such as the Hall element 20, the energization of the coil 14 is switched in a predetermined order to keep the rotor 7 and the rotary polygon mirror 6 rotating. Further, when the electric circuit pattern is formed on the magnetically conductive substrate 17 and the Hall element 20 and the FG are provided, the electric circuit substrate 19 has the function, and the electric circuit substrate 19 is unnecessary. be able to.

Therefore, the radial gap .. of the conventional example shown in FIGS. Unlike the inner rotor type motor, it is not necessary to wind the coil 38 from a slight gap between the adjacent stator magnetic poles 39, and the coil 14 can be separately and easily provided.
Can be created, and the process of winding the coil 14 is greatly simplified. As shown in FIGS. 1 and 2, the stator 11
Of the yoke of FIG.
By arranging 7, the coil magnetic core 16, the coil 14, and the stator magnetic pole 12 so as to overlap with each other in the direction of the rotation center axis, it is easy to reduce the outer diameter of the stator 11. In the case of further miniaturization, the workability of the coil winding process is reduced due to the narrower gap between the adjacent stator magnetic poles 12 as in the conventional example, and the cost is reduced by introducing a dedicated winding machine. It is possible to prevent rising. Further, since the stator 11 can reduce the rotor 7 in the radial direction, the inertia (inertia moment) of the rotor 7 can be suppressed to a low level, dynamic balance can be easily taken, start time (rise time) can be shortened, and speed can be reduced. Controllability is improved and high-speed rotation becomes easy. Furthermore, the required number of stator poles 12
However, since it is integrally formed via the connecting portion 21, the assembling work of the stator 11 is simplified, and the dimensional accuracy of the stator magnetic pole 12 is improved, and the related dimensional accuracy during operation is maintained unchanged. You can Further, since there is no gap between the stator magnetic poles 12, the inner peripheral surface is smooth, wind loss can be prevented when the rotor 7 rotates, and the magnetic flux density of the stator magnetic poles 12 changes smoothly, so that the rotor 7 rotates smoothly. It has the effect of becoming. In addition, the magnetic conductive substrate 1
Since 7 and the coil magnetic core 16 or the stator magnetic pole 12 and the coil magnetic core 16 are integrally formed, the assembling work of the stator 11 becomes easier.

Next, another embodiment of the present invention shown in FIGS. 3 to 5 will be described. In the description of these other embodiments of the present invention, the same components as those of the first embodiment of the present invention will be assigned the same reference numerals and overlapping description will be omitted.

5 illustrates another embodiment of the invention of FIGS. 3-4. The main difference from the first embodiment of the present invention is the rotor 7a. This rotor 7a has two rotor magnetic pole plates 8a, which are arranged in the vertical direction of a washer type permanent magnet 10a magnetized in the axial direction. 8b, and rotor pole plates 8a and 8b
A required number of rotor magnetic poles are formed on the outer periphery of
A fixed shaft 2 fixed to the base 1 is fixed to a hub 5 rotatably held on the outer periphery of a fixed shaft 2 via a bearing 3 such as a rolling bearing. The rotary polygon mirror 6 is mounted on the hub 5 as in the first embodiment of the previous basic invention, and rotates at high speed as the rotor 7a rotates. By configuring in this way,
The rotor can be miniaturized in the axial direction, and in addition to the same effects as those of the first embodiment of the present invention, the inertia can be kept low, the start-up time (rise time) can be shortened, and the speed can be reduced. Controllability is improved and high-speed rotation becomes easy.

A third embodiment of the present invention will be described with reference to FIG. The main difference from the first embodiment of the present invention is a magnetic conductive substrate 47, and an electric circuit pattern 24 is formed on the upper surface of the magnetic conductive substrate 47 by a method such as printing. Further, the dynamic pressure air bearing 3a is used as the radial bearing, and the thrust magnetic bearing 4 is used as the thrust bearing. By configuring in this way,
The magnetic conductive board 47 is the electric circuit board 1 in the first embodiment.
Since it also has the function of 9, the space required for mounting can be reduced. Further, since the dynamic pressure air bearing 3a and the thrust magnetic bearing 4 are both non-contact, it is possible to reduce the contact resistance when the rotor 7 rotates, and it is suitable for high speed rotation.

[0021]

As is apparent from the above description, the following effects can be obtained in the present invention.

In an optical deflector for rotating a rotary polygon mirror by a rotor and a stator and a radial gap motor driven by a well-known driving method, a rotor having a rotary polygon mirror rotatably mounted has a rotor magnetic pole on the outer circumference of a permanent magnet. Is formed and is rotatably held by a bearing, and the stator is composed of a magnetically conductive substrate, a coil, a coil magnetic core, and a stator magnetic pole, and the magnetically conductive substrate has a function as a yoke and rotates the rotor. Arranged so as to be positioned on a plane perpendicular to the central axis, the coil is wound around the outer periphery of the coil magnetic core, and its coil terminal is electrically connected to the electric circuit pattern,
Arranged in a substantially circular shape with respect to the central axis of rotation, and fixed to the magnetic conducting board or electric circuit board, the coil magnetic core penetrates into the center hole of the predetermined coil and is fixed to the predetermined fixing portion of the magnetic conducting board. One end is fixed and the other end is fixed to a predetermined stator magnetic pole, and the magnetic pole surface of the stator magnetic pole forms a magnetic gap in the radial direction with the rotor magnetic pole.
Further, the stator magnetic poles are made of a magnetic steel plate, a steel material, or a sintered material so as to integrally form the respective stator magnetic poles. Furthermore, since the magnetically conductive substrate and the coil magnetic core or the stator magnetic pole and the coil magnetic core are integrally formed of a magnetic material such as a steel plate, a steel material or a sintered material, (1) a slight gap between the stator magnetic poles Since it is not necessary to wind the coil through the gap, it is possible to easily create a coil such as a bobbin winding coil or a bobbinless coil such as a self-bonding coil, and the winding process of the coil is greatly simplified. In addition, the cost can be reduced, the space factor is improved, and the outer diameter of the stator can be easily reduced. (2) By reducing the outer diameter of the stator and further reducing the outer diameter of the rotor, the inertia of the rotor can be suppressed to a low level, which facilitates dynamic balance, shortens the startup time (rise time), and reduces the speed. Since controllability can be improved, high-speed rotation becomes easy. (3) Since the stator magnetic poles are integrally formed via the thin connecting portion, the stator assembling work can be simplified, and the dimensional accuracy of the stator magnetic poles is improved, and the dimensional accuracy does not change during operation. Can be maintained. Furthermore, since the inner peripheral surface of the stator is smooth, it is possible to prevent air drooling when the rotor rotates, and the magnetic flux density of the stator poles changes gently, which is effective against noise and allows the rotor to rotate smoothly. Become. (4) Since the magnetically conductive substrate and the coil magnetic core or the stator magnetic pole and the coil magnetic core are integrally formed, the assembling work of the stator can be simplified and the assembling accuracy is improved. (5) Since the electric circuit pattern is formed on the magnetically conductive substrate, the number of parts can be reduced and the mounting space can be effectively used.

[Brief description of drawings]

FIG. 1 is a sectional view of a first embodiment of an optical deflector according to the present invention.

FIG. 2 is a cross-sectional view of the optical deflector seen in the direction of the arrow along the line II-II in FIG.

FIG. 3 is a sectional view of a second embodiment of the optical deflector of the present invention.

4 is a cross-sectional view of the optical deflector seen in the direction of the arrow along the line IV-IV in FIG.

FIG. 5 is a sectional view of a third embodiment of the optical deflector of the present invention.

FIG. 6 is a sectional view of an optical deflector using a conventional axial gap type motor.

7 is a cross-sectional view of the optical deflector seen in the direction of the arrow along the line VII-VII in FIG.

FIG. 8 is a cross-sectional view of an optical deflector using a conventional radial gap inner rotor type motor.

9 is a cross-sectional view of the optical deflector seen in the direction of the arrow along the line IX-IX in FIG.

FIG. 10 is a sectional view of an optical deflector using a conventional radial gap outer rotor type motor.

11 is a cross-sectional view of the optical deflector seen in the direction of the arrow along the line XI-XI in FIG.

[Explanation of symbols]

1 base 2 fixed axis 3 bearings 3a Dynamic pressure air bearing 4 Thrust magnetic bearing 5 hubs 6 rotating polygon mirror 7 rotor 7a rotor 8a, 8b rotor pole plate 9 rotor yoke 10 permanent magnet 10a permanent magnet 11 Stator 12 Stator magnetic pole 13 Stator yoke 14 coils 16 coil core 17 Magnetically conductive substrate 18 Fixed part 19 Electric circuit board 20 Hall element 21 Connection 24 electric circuit pattern 47 Magnetic Conductive Substrate

Claims (8)

(57) [Claims] 1. An optical deflector for rotating a rotary polygon mirror by a radial gap motor including a rotor and a stator, wherein the rotor has a permanent magnet on the outer circumference and is rotatably held by a bearing, and the stator is a magnetically conductive substrate. And a coil, and a coil magnetic core and a stator magnetic pole. The magnetically conductive substrate has a function as a yoke and is arranged so as to be positioned on a plane perpendicular to the rotation center axis of the rotor. The one end is fixed to the fixing portion of the magnetically conductive substrate, the other end is fixed to the stator magnetic pole, the coil is wound around the outer circumference of the coil magnetic core, and is arranged substantially on the circumference with respect to the rotation center axis. A motor that is fixed to a magnetically conductive substrate or an electric circuit substrate, has coil terminals electrically connected to an electric circuit pattern, and has a magnetic pole surface of a stator pole that faces a rotor pole and forms a magnetic gap in the radial direction. Optical deflector equipped with rotating polygon mirror. 2. The rotor comprises a washer type permanent magnet axially magnetized, which is sandwiched between rotor magnetic pole plates to form a rotor magnetic pole on the outer periphery of the rotor, and is rotatably formed by a bearing. 1. The optical deflector according to 1. 3. The magnetically conductive substrate, or coil magnetic core,
3. The optical deflector according to claim 1, wherein a part or all of the stator magnetic poles are formed of a sintered material of magnetic material. 4. The optical deflector according to claim 1, wherein the coil magnetic core and the stator magnetic pole are integrally formed of a sintered material of a magnetic material. 5. The optical deflector according to claim 1, wherein the coil magnetic core and the magnetic conductive substrate are integrally formed of a sintered material of a magnetic material. 6. The optical deflector according to claim 1, wherein the coil is formed of a bobbinless coil such as a self-bonding coil. 7. The stator magnetic poles are characterized in that the respective stator magnetic poles are integrally formed of a sintered material of a magnetic material or can be separated at the time of assembly after being integrally formed. The optical deflector according to claim 6. 8. The optical deflector according to claim 1, wherein the magnetically conductive substrate is formed with an electric circuit pattern for disposing a control element such as an FG or a Hall element. vessel.