JP3382600B2 - Polarizing beam splitter - Google Patents
Polarizing beam splitterInfo
- Publication number
- JP3382600B2 JP3382600B2 JP2000280280A JP2000280280A JP3382600B2 JP 3382600 B2 JP3382600 B2 JP 3382600B2 JP 2000280280 A JP2000280280 A JP 2000280280A JP 2000280280 A JP2000280280 A JP 2000280280A JP 3382600 B2 JP3382600 B2 JP 3382600B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- grating
- beam splitter
- polarization
- quarter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Optical Head (AREA)
- Optical Elements Other Than Lenses (AREA)
- Polarising Elements (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、偏光ビームスプリッタ
と1/4波長板を組み合わせて構成される光記録装置の
ピックアップ部を、微細加工技術により形成される回折
格子により、1枚構成の光学系として提供するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single-piece optical pickup unit for a pickup section of an optical recording apparatus which is formed by combining a polarization beam splitter and a quarter-wave plate with a diffraction grating formed by a fine processing technique. It is provided as a system.
【0002】[0002]
【従来の技術】光を利用して記録及び読み出しを行う光
記録装置のピックアップ部Aは、一般に、図3に示すよ
うに構成されている。図において、1はレーザー光源、
2はコリメートレンズ、3は偏光ビームスプリッタ、4
は1/4波長板、5は対物レンズ、6はDVD等の光記
録媒体、7は集光レンズ、8はフォトディテクタであ
る。2. Description of the Related Art A pickup section A of an optical recording apparatus for recording and reading using light is generally constructed as shown in FIG. In the figure, 1 is a laser light source,
2 is a collimating lens, 3 is a polarization beam splitter, 4
Is a quarter wavelength plate, 5 is an objective lens, 6 is an optical recording medium such as a DVD, 7 is a condenser lens, and 8 is a photodetector.
【0003】この構成は、レーザー光源1の発生した光
をコリメータレンズ3で平行化し、偏光ビームスプリッ
タ3及び1/4波長板4を通し、対物レンズ5でスポッ
ト光にして光記録媒体6に当て、その反射光を、1/4
波長板4、偏光ビームスプリッタ3及び集光レンズ7を
通して、フォトディテクタ8に受けるものである。In this structure, the light generated by the laser light source 1 is collimated by the collimator lens 3, passes through the polarization beam splitter 3 and the quarter wavelength plate 4, and is converted into spot light by the objective lens 5 and applied to the optical recording medium 6. , 1/4 of the reflected light
It is received by the photodetector 8 through the wave plate 4, the polarization beam splitter 3, and the condenser lens 7.
【0004】レーザー光源1の発生する光はp偏光され
たもので、偏光ビームスプリッタ3を直進して透過す
る。1/4波長板4は、これを円偏光に変換する。この
光が光記録媒体6で反射して、1/4波長板4を逆方向
に透過するとs偏光された光となる。偏光ビームスプリ
ッタ3は、このs偏光された光を反射し、集光レンズ7
を通してフォトディテクタ8に入射する。フォトディテ
クタ8の出力信号は、トラッキング調整信号又は読出し
データとして使用される。The light generated by the laser light source 1 is p-polarized light, which goes straight through the polarization beam splitter 3 and is transmitted therethrough. The quarter-wave plate 4 converts this into circularly polarized light. When this light is reflected by the optical recording medium 6 and transmitted through the quarter-wave plate 4 in the opposite direction, it becomes s-polarized light. The polarization beam splitter 3 reflects the s-polarized light, and the condenser lens 7
It is incident on the photodetector 8 through. The output signal of the photo detector 8 is used as a tracking adjustment signal or read data.
【0005】上記偏光ビームスプリッタ3は、2つのガ
ラスプリズムを張り合わせて直方体としたもので、その
斜面に多層の光学薄膜3aを形成することにより、p偏
光を透過しs偏光を反射する構成としている。The polarization beam splitter 3 is formed by bonding two glass prisms to each other to form a rectangular parallelepiped, and a multilayer optical thin film 3a is formed on an inclined surface thereof to transmit p-polarized light and reflect s-polarized light. .
【0006】1/4波長板4は、水晶等を所定の厚さに
研摩加工することによって製作される。The quarter-wave plate 4 is manufactured by polishing quartz or the like to a predetermined thickness.
【0007】[0007]
【発明が解決しようとする課題】上記偏光ビームスプリ
ッタ3は、ガラスプリズムの上に30層を超える多層の
光学薄膜3aを蒸着により形成したものであるため、ガ
ラス材の成形工数及び蒸着の工数が多くなり高価になる
問題がある。なお、プラスチックのプリズムに薄膜層を
形成することも考えられるが、この場合は多層の薄膜層
に線膨張計数の違いによるマイクロクラックが発生し、
面荒れ或いは剥れの原因となり、採用は不適当である。Since the polarizing beam splitter 3 is formed by vapor-depositing a multilayer optical thin film 3a having more than 30 layers on a glass prism, the number of molding steps of glass material and the number of vapor-deposition steps are increased. There is a problem that it becomes more expensive. It is also possible to form a thin film layer on a plastic prism, but in this case, microcracks are generated in the multilayer thin film layers due to the difference in linear expansion coefficient,
It causes surface roughening or peeling and is inappropriate for use.
【0008】また、1/4波長板は光学結晶である水晶
等を使用し、その加工を精密に行う必要があるため、低
価格化が困難な問題がある。Further, since the quarter-wave plate is made of quartz, which is an optical crystal, and must be processed precisely, there is a problem that it is difficult to reduce the cost.
【0009】さらに、1/4波長板は、その結晶の主軸
を偏光ビームスプリッタ3に対して一定の方向を保って
取付ける必要があり、この工数も必要になる問題もあ
る。Further, the quarter-wave plate needs to be attached with its principal axis of the crystal kept in a fixed direction with respect to the polarization beam splitter 3, which also requires a lot of man-hours.
【0010】そこで、本発明は、光透過性板の表面と裏
面に、偏光ビームスプリッタの機能と1/4波長板の機
能を有する回折格子を、夫々形成した1枚構成の光学素
子を提供することにより、コストダウンを図ることを目
的とする。Therefore, the present invention provides an optical element having a single sheet structure in which a diffraction grating having a function of a polarization beam splitter and a diffraction grating having a function of a quarter-wave plate are formed on the front surface and the back surface of a light transmitting plate, respectively. By doing so, the purpose is to reduce costs.
【0011】[0011]
【課題を解決するための手段】本発明の請求項1にかか
る偏光ビームスプリッタは、光透過性板材の一方の面
に、s−偏光成分とp−偏光成分の一方を直進させ他方
を屈折させる偏光格子を形成し、他方の面に1/4波長
板の機能を有する格子を形成して構成され、直線偏光さ
れた照射光を偏光格子が形成された面から入射すること
により1/4波長板の機能を有する格子が形成された面
を通して検知対象物に照射し、この反射光を1/4波長
板の機能を有する格子が形成された面を通して前記偏光
格子に戻し、ここで入射方向と異なる方向に屈折させて
取り出すことを特徴とする。According to a first aspect of the present invention, there is provided a polarization beam splitter, wherein one of the s-polarization component and the p-polarization component is linearly moved and the other is refracted on one surface of the light transmitting plate material. A polarization grating is formed, and a grating having the function of a quarter-wave plate is formed on the other surface. Linearly polarized irradiation light is incident from the surface on which the polarization grating is formed, thereby producing a quarter-wavelength. The object to be detected is irradiated through the surface on which the grating having the function of the plate is formed, and the reflected light is returned to the polarization grating through the surface on which the grating having the function of the quarter-wave plate is formed. It is characterized in that it is refracted in different directions and is taken out.
【0012】本発明の請求項2にかかる発明は、請求項
1記載の偏光ビームスプリッタにおいて、光透過性板材
の素材として合成樹脂を用い、偏光格子と1/4波長板
の機能を有する格子が、金型の微細加工面からの転写に
よって形成されていることを特徴とする。According to a second aspect of the present invention, in the polarization beam splitter according to the first aspect, a synthetic resin is used as a material of the light transmitting plate material, and a grating having a function of a polarization grating and a quarter wavelength plate is provided. It is characterized in that it is formed by transfer from the finely processed surface of the die.
【0013】本発明の請求項3にかかる発明は、請求項
1又は2に記載した偏光ビームスプリッタにおいて、光
透過性素材が、直線偏光された照射光の光軸に対して傾
斜配置されていることを特徴とする。According to a third aspect of the present invention, in the polarizing beam splitter according to the first or second aspect, the light transmissive material is arranged obliquely with respect to the optical axis of the linearly polarized irradiation light. It is characterized by
【0014】本発明の請求項4にかかる発明は、請求項
1又は2に記載した偏光ビームスプリッタにおいて、光
透過性素材が、直線偏光された照射光の光軸に対して垂
直に配置されていることを特徴とする。According to a fourth aspect of the present invention, in the polarizing beam splitter according to the first or second aspect, the light transmissive material is arranged perpendicularly to the optical axis of the linearly polarized irradiation light. It is characterized by being
【0015】本発明の請求項5にかかる発明は、請求項
1又〜4のいずれか1項に記載した偏光ビームスプリッ
タにおいて、検知対象物が光記録媒体であることを特徴
とする。The invention according to claim 5 of the present invention is characterized in that, in the polarization beam splitter according to any one of claims 1 to 4, the object to be detected is an optical recording medium.
【0016】[0016]
【実施形態】図1に示す本発明の一実施形態である光記
録装置のピックアップ部Bを示す。この構成は、図3の
ピックアップ部Aの構成において、偏光ビームスプリッ
タ3及び1/4波長板4に代え、格子構造による偏光ビ
ームスプリッタ9を照射光の光軸に対して傾斜配置した
ものである。図1において、他の構成要素であるレーザ
ー光源1、コリメートレンズ2、対物レンズ5、光記録
媒体6、集光レンズ7、フォトディテクタ8は図3と同
等である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A pickup section B of an optical recording apparatus according to an embodiment of the present invention shown in FIG. 1 is shown. In this configuration, the polarization beam splitter 3 and the quarter-wave plate 4 in the configuration of the pickup unit A of FIG. . In FIG. 1, other components such as a laser light source 1, a collimator lens 2, an objective lens 5, an optical recording medium 6, a condenser lens 7, and a photodetector 8 are the same as those in FIG.
【0017】図1の偏光ビームスプリッタ9は、光透過
性板の一方の面9aに、s−偏光成分とp−偏光成分の
一方を直進させ他方を屈折させる偏光格子10を形成
し、他方の面9bに1/4波長板と同等の機能を持つ回
折格子11を形成している。The polarization beam splitter 9 shown in FIG. 1 forms a polarization grating 10 on one surface 9a of a light-transmissive plate for linearly advancing one of the s-polarization component and the p-polarization component and refracting the other, and the other. A diffraction grating 11 having a function equivalent to that of a quarter wave plate is formed on the surface 9b.
【0018】上記偏光格子10は、入射する偏光の方向
に合せて、光の波長の2倍程度のピッチ、1.22λ程
度の深さの微細構造として格子を作ると、人工的に屈折
率や光学異方性を配置することができ、p偏光とs偏光
に対して、一方を透過させ、他方を反射する構造を作成
できることを利用している。入射方向に対する反射の方
向は、バイナリー又はブレーズドといった回折格子の山
と谷の形状によって決められる。図1の構成は光透過性
板を傾斜配置しているので、斜めから入射した光を斜め
方向に屈折させる構造に設計される。When the polarization grating 10 is formed as a fine structure having a pitch of about twice the wavelength of light and a depth of about 1.22λ according to the direction of incident polarized light, the refractive index or Utilizing the fact that optical anisotropy can be arranged, and a structure can be created in which one of p-polarized light and s-polarized light is transmitted and the other is reflected. The direction of reflection with respect to the incident direction is determined by the shape of peaks and valleys of the diffraction grating such as binary or blazed. In the configuration of FIG. 1, since the light transmissive plates are arranged in an inclined manner, it is designed to have a structure for refracting light incident from an oblique direction in an oblique direction.
【0019】1/4波長板の機能を持つ回折格子11
は、格子のピッチを透過光の波長の半分程度に、深さは
λ程度にし、かつ透過光の偏光方向に対して45°の角
度を持たせることによって得られる。したがって、この
回折格子11の形成方向は、偏光格子10の形成方向に
対して45°の傾きを持つことになる。Diffraction grating 11 having the function of a quarter wave plate
Can be obtained by setting the grating pitch to about half the wavelength of the transmitted light, the depth to about λ, and having an angle of 45 ° with respect to the polarization direction of the transmitted light. Therefore, the formation direction of the diffraction grating 11 has an inclination of 45 ° with respect to the formation direction of the polarization grating 10.
【0020】上記偏光格子10及び回折格子11は、例
えば石英板等の上にTiO2膜やSiO2膜を蒸着し、電
子線レジスト層を塗布形成して、電子ビーム描画装置に
よって露光描画した後、現像を行い格子を作成すること
もできるが、これは加工に長時間を要しコスト的に引き
合わない。For the polarization grating 10 and the diffraction grating 11, for example, a TiO2 film or a SiO2 film is vapor-deposited on a quartz plate or the like, an electron beam resist layer is formed by coating, and exposure and drawing are performed by an electron beam drawing device, and then development is performed. It is also possible to make a grid by doing the above, but this requires a long time for processing and does not come at a cost.
【0021】このため、光透過性板を樹脂成形すると
き、その格子パターンを、樹脂成形金型に形成した微細
形状を転写することで作成する。なお、樹脂成形金型に
形成しておく微細形状はレーザビーム加工装置により作
成する。このように格子パターンが転写された、光透過
性板には、その格子パターンの上に、高屈折率層として
のTiO2膜又はSiO2膜を蒸着する。Therefore, when the light-transmitting plate is resin-molded, its lattice pattern is created by transferring the fine shape formed on the resin-molding die. The fine shape to be formed on the resin molding die is created by a laser beam processing device. On the light transmissive plate to which the lattice pattern is transferred in this manner, a TiO2 film or a SiO2 film as a high refractive index layer is vapor-deposited on the lattice pattern.
【0022】図2は本発明の他の実施形態を示すもので
ある。この光記録装置のピックアップ部Cは、格子構造
による偏光ビームスプリッタ12を照射光の光軸に対し
て直交配置したもので、他の部分は、図1と同様であ
る。この実施形態は入射方向と屈折方向が、図1のもの
と異なるので、偏光格子の形状を図1のものと異ならせ
ている。FIG. 2 shows another embodiment of the present invention. A pickup unit C of this optical recording device is one in which a polarization beam splitter 12 having a lattice structure is arranged orthogonal to the optical axis of irradiation light, and the other portions are the same as in FIG. In this embodiment, since the incident direction and the refraction direction are different from those in FIG. 1, the shape of the polarization grating is different from that in FIG.
【0023】上記図1、図2の実施形態は、格子構造に
よる偏光ビームスプリッタ9を平行光(無限光学系)内
に配置しているが、非平行光(有限光学系)内に配置し
てもよい。In the embodiments shown in FIGS. 1 and 2, the polarization beam splitter 9 having a lattice structure is arranged in parallel light (infinite optical system), but it is arranged in non-parallel light (finite optical system). Good.
【0024】[0024]
【発明の効果】本発明の請求項1にかかる発明は、1枚
の光透過性板の表面と裏面に、偏光格子と1/4波長板
の機能を有する回折格子を形成した、偏光ビームスプリ
ッターと1/4波長板の複合素子を提供する。この構造
では、1つの部品が従来の2部品の機能を有するので、
低コスト化及び小型化が図れる。The invention according to claim 1 of the present invention is a polarization beam splitter in which a diffraction grating having the functions of a polarization grating and a quarter-wave plate is formed on the front surface and the back surface of one light transmitting plate. And a quarter wave plate composite element. In this structure, one component has the function of two conventional components,
Cost reduction and miniaturization can be achieved.
【0025】本発明の請求項2にかかる発明は、光透過
性板材の素材として合成樹脂を用い、回折格子を金型の
微細加工面からの転写によって形成するので、製造コス
トを大幅に低減することができる。According to the second aspect of the present invention, since the synthetic resin is used as the material of the light transmitting plate material and the diffraction grating is formed by transfer from the finely processed surface of the die, the manufacturing cost is greatly reduced. be able to.
【0026】本発明の請求項3にかかる発明は、光透過
性素材を照射光の光軸に対して傾斜配置する構造を提供
する。The invention according to claim 3 of the present invention provides a structure in which a light-transmissive material is arranged to be inclined with respect to the optical axis of irradiation light.
【0027】本発明の請求項4にかかる発明は、光透過
性素材を照射光の光軸に対して垂直に配置する構造を提
供する。The invention according to claim 4 of the present invention provides a structure in which a light-transmissive material is arranged perpendicularly to the optical axis of irradiation light.
【0028】本発明の請求項5にかかる発明は、DVD
やCD等の光記録装置の光ピックアップ部品の超小型ヘ
ッドに好適した部品を提供できる。The invention according to claim 5 of the present invention is a DVD
It is possible to provide a component suitable for a micro head of an optical pickup component of an optical recording device such as a CD or a CD.
【図1】本発明の偏光ビームスプリッタを用いた光記録
装置の光ピックアップ部の構成を示す図。FIG. 1 is a diagram showing a configuration of an optical pickup section of an optical recording device using a polarization beam splitter of the present invention.
【図2】本発明の偏光ビームスプリッタを用いた光記録
装置の光ピックアップ部の他の構成を示す図。FIG. 2 is a diagram showing another configuration of the optical pickup section of the optical recording device using the polarization beam splitter of the present invention.
【図3】従来の光記録装置の光ピックアップ部の構成を
示す図。FIG. 3 is a diagram showing a configuration of an optical pickup section of a conventional optical recording device.
1 レーザー光源
2 コリメートレンズ
5 対物レンズ
6 光記録媒体
7 集光レンズ
8 フォトディテクタ
9 偏光ビームスプリッタ
9a 光透過性板の一方の面(偏光格子の形成面)
9b 光透過性板の他方の面(1/4波長板と同等の機
能を持つ回折格子の形成面)
10 偏光格子
11 回折格子DESCRIPTION OF SYMBOLS 1 laser light source 2 collimator lens 5 objective lens 6 optical recording medium 7 condenser lens 8 photodetector 9 polarization beam splitter 9a one surface of a light transmissive plate (polarization grating formation surface) 9b the other surface of a light transmissive plate (1 / 4 surface of a diffraction grating having the same function as a wavelength plate) 10 Polarization grating 11 Diffraction grating
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI G11B 7/22 G11B 7/22 (72)発明者 久保 淳一 大阪府三島郡島本町山崎2−1−7 ナ ルックス株式会社内 (56)参考文献 特開 平9−50642(JP,A) 特開 平11−2710(JP,A) 特開 平9−145922(JP,A) 特開 平2−25803(JP,A) 特開 平11−64850(JP,A) (58)調査した分野(Int.Cl.7,DB名) G02B 5/30 G02B 5/00 G02B 5/18 G11B 7/135 G11B 7/22 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI G11B 7/22 G11B 7/22 (72) Inventor Junichi Kubo 2-1-7 Yamazaki, Shimamoto-cho, Mishima-gun, Osaka Prefecture Nalux Co., Ltd. (56) References JP-A-9-50642 (JP, A) JP-A-11-2710 (JP, A) JP-A-9-145922 (JP, A) JP-A-2-25803 (JP, A) Kaihei 11-64850 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) G02B 5/30 G02B 5/00 G02B 5/18 G11B 7/135 G11B 7/22
Claims (5)
分とp−偏光成分の一方を直進させ他方を屈折させる偏
光格子を形成し、他方の面に1/4波長板の機能を有す
る格子を形成して構成され、直線偏光された照射光を偏
光格子が形成された面から入射することにより1/4波
長板の機能を有する格子が形成された面を通して検知対
象物に照射し、この反射光を1/4波長板の機能を有す
る格子が形成された面を通して前記偏光格子に戻し、こ
こで入射方向と異なる方向に屈折させて取り出すことを
特徴とする偏光ビームスプリッタ。1. A polarizing grating for linearly advancing one of the s-polarization component and the p-polarization component and refracting the other is formed on one surface of the light transmissive plate material, and the function of the quarter-wave plate on the other surface. When the linearly polarized irradiation light is incident on the surface on which the polarization grating is formed, the detection target is irradiated through the surface on which the grating having the function of the quarter wave plate is formed. Then, the reflected light is returned to the polarization grating through the surface on which the grating having the function of the quarter wavelength plate is formed, and refracted in a direction different from the incident direction to be extracted.
い、偏光格子と1/4波長板の機能を有する格子が、金
型の微細加工面からの転写によって形成されていること
を特徴とする請求項1記載の偏光ビームスプリッタ。2. A synthetic resin is used as a material of the light-transmissive plate material, and a polarization grating and a grating having a function of a quarter-wave plate are formed by transfer from a finely processed surface of a die. The polarization beam splitter according to claim 1.
の光軸に対して傾斜配置されていることを特徴とする請
求項1又は2に記載した偏光ビームスプリッタ。3. The polarization beam splitter according to claim 1, wherein the light-transmissive material is arranged so as to be inclined with respect to the optical axis of the linearly polarized irradiation light.
の光軸に対して垂直に配置されていることを特徴とする
請求項1又は2に記載した偏光ビームスプリッタ。4. The polarization beam splitter according to claim 1, wherein the light transmissive material is arranged perpendicular to the optical axis of the linearly polarized irradiation light.
徴とする請求項1又〜4のいずれか1項に記載した偏光
ビームスプリッタ。5. The polarization beam splitter according to claim 1, wherein the object to be detected is an optical recording medium.
Priority Applications (1)
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JP2000280280A JP3382600B2 (en) | 2000-09-14 | 2000-09-14 | Polarizing beam splitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2000280280A JP3382600B2 (en) | 2000-09-14 | 2000-09-14 | Polarizing beam splitter |
Publications (2)
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JP2002090534A JP2002090534A (en) | 2002-03-27 |
JP3382600B2 true JP3382600B2 (en) | 2003-03-04 |
Family
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JP2000280280A Expired - Fee Related JP3382600B2 (en) | 2000-09-14 | 2000-09-14 | Polarizing beam splitter |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7697395B2 (en) | 2004-03-04 | 2010-04-13 | Ricoh Company, Ltd. | Optical device, method of producing the same, optical pickup, and optical information processing device |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2465085A1 (en) * | 2002-09-19 | 2004-04-01 | Sumitomo Electric Industries, Ltd. | Diffractive optical device and method for producing same |
KR100480638B1 (en) * | 2002-12-10 | 2005-03-31 | 삼성전자주식회사 | Optical pickup apparatus |
EP1672395B1 (en) | 2003-10-07 | 2010-12-15 | Nalux Co. Ltd. | Polarizing element and optical system including polarizing element |
JP4869656B2 (en) * | 2005-08-08 | 2012-02-08 | 株式会社ミツトヨ | Interferometer |
WO2007055245A1 (en) * | 2005-11-09 | 2007-05-18 | Nippon Sheet Glass Company, Limited | Polarization split element and production method thereof, and optical pickup, optical device, optical isolator and polarizing hologram provided with the polarization split element |
WO2011074442A1 (en) * | 2009-12-17 | 2011-06-23 | コニカミノルタオプト株式会社 | Intermediate |
WO2018012523A1 (en) * | 2016-07-13 | 2018-01-18 | Scivax株式会社 | Optical element, light emitting element, optical device using said light emitting element, and method for producing said optical element |
JPWO2019009151A1 (en) * | 2017-07-03 | 2020-06-18 | Scivax株式会社 | Optical member and optical system device using the same |
CN114236971B (en) * | 2021-11-30 | 2023-11-21 | 歌尔股份有限公司 | Exposure system and exposure method for polarization holographic grating |
-
2000
- 2000-09-14 JP JP2000280280A patent/JP3382600B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7697395B2 (en) | 2004-03-04 | 2010-04-13 | Ricoh Company, Ltd. | Optical device, method of producing the same, optical pickup, and optical information processing device |
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