JP3373922B2 - Nitrogen gas supply apparatus, operation method thereof, and nitrogen gas atmosphere heating apparatus using the same - Google Patents
Nitrogen gas supply apparatus, operation method thereof, and nitrogen gas atmosphere heating apparatus using the sameInfo
- Publication number
- JP3373922B2 JP3373922B2 JP34025493A JP34025493A JP3373922B2 JP 3373922 B2 JP3373922 B2 JP 3373922B2 JP 34025493 A JP34025493 A JP 34025493A JP 34025493 A JP34025493 A JP 34025493A JP 3373922 B2 JP3373922 B2 JP 3373922B2
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen gas
- heater
- gas supply
- heating
- gas generator
- Prior art date
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、窒素ガス供給装置並び
にその運転方法及びその窒素ガス供給装置を用いた窒素
ガス雰囲気加熱装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nitrogen gas supply device, a method of operating the same, and a nitrogen gas atmosphere heating device using the nitrogen gas supply device.
【０００２】[0002]
【従来の技術】例えばプリント配線板に電子部品を実装
する場合には、プリント配線板のパッド上にクリーム半
田を塗布し、その上に電子部品を搭載したものを、加熱
炉内に通し、炉内の熱でクリーム半田を溶融させてパッ
ドと部品リードを半田付けしている。このとき、加熱炉
内には窒素ガスを充満させて、プリント配線板や電子部
品の酸化を防止する必要がある。2. Description of the Related Art For example, when mounting an electronic component on a printed wiring board, cream solder is applied to the pad of the printed wiring board, and the electronic component mounted on the pad is passed through a heating furnace. The heat inside melts the cream solder and solders the pads to the component leads. At this time, it is necessary to fill the heating furnace with nitrogen gas to prevent oxidation of the printed wiring board and electronic parts.
【０００３】加熱炉内に窒素ガスを充満させるには従
来、シャッターで炉内外を遮断する方式が一般的であっ
たが、この方式はトラブルが発生しやすいため、最近、
図３に示すような非接触シール方式の加熱炉が提案され
ている。この加熱炉は、内部に面状ヒーター11、棒状ヒ
ーター13およびファン15などが設置された加熱室17と、
入口通路19と、出口通路21とを備えており、その中を電
子部品を搭載したプリント配線板23が両側縁をチェーン
コンベア25により支持された状態で走行するようになっ
ている。Conventionally, in order to fill the heating furnace with nitrogen gas, a method of shutting off the inside and outside of the furnace with a shutter has been generally used. However, since this method easily causes troubles, recently,
A non-contact seal type heating furnace as shown in FIG. 3 has been proposed. This heating furnace has a heating chamber 17 in which a sheet heater 11, a rod heater 13 and a fan 15 are installed,
An inlet passage 19 and an outlet passage 21 are provided, and a printed wiring board 23 on which electronic components are mounted runs therein, with both side edges thereof being supported by a chain conveyor 25.
【０００４】加熱室17内には電子部品を搭載したプリン
ト配線板23の酸化防止のため窒素ガスを充満させる。窒
素ガスは窒素ガス噴出管27から供給される。窒素ガスの
供給量は、外部から炉内に空気が侵入するのを防止する
ため、入口通路19および出口通路21から常時窒素ガスが
炉外に流出するように調節される。窒素ガスが外部に流
出する量をできるだけ少なくするため、入口通路19およ
び出口通路21内には、コンベア25の走行方向に所定の間
隔をおいて多数のシール板29が設置されている。これに
より入口通路19、出口通路21を通って流れ出す窒素ガス
に抵抗を与え、窒素ガスの使用量を少なくしている。The heating chamber 17 is filled with nitrogen gas in order to prevent oxidation of the printed wiring board 23 having electronic components mounted thereon. Nitrogen gas is supplied from the nitrogen gas ejection pipe 27. The supply amount of nitrogen gas is adjusted so that the nitrogen gas always flows out of the furnace from the inlet passage 19 and the outlet passage 21 in order to prevent air from entering the furnace from the outside. In order to reduce the amount of nitrogen gas flowing to the outside as much as possible, a large number of sealing plates 29 are installed in the inlet passage 19 and the outlet passage 21 at predetermined intervals in the traveling direction of the conveyor 25. As a result, resistance is given to the nitrogen gas flowing out through the inlet passage 19 and the outlet passage 21, and the amount of nitrogen gas used is reduced.
【０００５】なお図３の例では、窒素ガス噴出管27を出
口通路21内に設置したが、窒素ガス噴出管27は加熱室17
内に設置される場合もある。In the example shown in FIG. 3, the nitrogen gas jet pipe 27 is installed in the outlet passage 21, but the nitrogen gas jet pipe 27 is provided in the heating chamber 17.
It may be installed inside.
【０００６】加熱炉へ窒素ガスを供給するには従来、液
体窒素タンク、窒素ガスＰＳＡ(Pressure Swing Adsorp
tion) 装置などが用いられていたが、これらの供給手段
はタンク交換が不便であるとか大型である等の難点があ
るため、最近、空気から窒素ガスを分離する分離膜を用
いた窒素ガス発生器で窒素ガスを発生させ、それを加熱
炉に供給することが検討されている。Liquid nitrogen tanks and nitrogen gas PSA (Pressure Swing Adsorp) have conventionally been used to supply nitrogen gas to a heating furnace.
devices have been used, but these supply means have drawbacks such as inconvenient tank replacement and large size, so recently nitrogen gas generation using a separation membrane that separates nitrogen gas from air It is considered to generate nitrogen gas in a furnace and supply it to a heating furnace.
【０００７】従来の分離膜を用いた窒素ガス供給装置
は、図４に示すように、空気を取り入れて圧縮するコン
プレッサー35と、圧縮された空気を加熱する空気加熱器
37と、加熱された圧縮空気から分離膜により窒素ガスを
分離する窒素ガス発生器39とから構成されている。As shown in FIG. 4, a conventional nitrogen gas supply apparatus using a separation membrane includes a compressor 35 for taking in and compressing air, and an air heater for heating the compressed air.
37 and a nitrogen gas generator 39 for separating nitrogen gas from heated compressed air by a separation membrane.
【０００８】窒素ガス発生器39は、金属筒内に中空糸状
の分離膜（高分子膜）を多数本束ねて収納した構成であ
る。この窒素ガス発生器39に一端側から圧縮空気を送り
込むと、分離膜を透過しやすい（透過速度が高い）酸素
等のガスが途中で中空糸外に通り抜け、分離膜を透過し
にくい窒素ガスが他端側に到達する。このため窒素ガス
発生器39の他端側で窒素ガスが得られる。途中で分離膜
を透過した酸素リッチガスは金属筒の中間から外部に排
出される。The nitrogen gas generator 39 has a structure in which a large number of hollow fiber separation membranes (polymer membranes) are bundled and housed in a metal cylinder. When compressed air is sent to this nitrogen gas generator 39 from one end side, a gas such as oxygen that easily permeates the separation membrane (high permeation rate) passes through the outside of the hollow fiber on the way, and nitrogen gas that hardly permeates the separation membrane is generated. Reach the other end. Therefore, nitrogen gas is obtained at the other end of the nitrogen gas generator 39. The oxygen-rich gas that has permeated the separation membrane on the way is discharged from the middle of the metal cylinder to the outside.
【０００９】空気加熱器37は、窒素ガス発生器39に供給
する圧縮空気を電気ヒーター61により40℃程度に加熱す
ることにより、分離膜による窒素ガスの分離効率を高め
るためのものである。ヒーター61の発熱量は温度制御装
置により制御される。温度制御装置は、空気加熱器37の
出口の圧縮空気の温度を温度センサー63により検出し、
温度調節計65でその検出温度と設定温度を比較し、その
差が零となるように通電制御装置67によりヒーター61へ
の通電率を制御する。The air heater 37 is for heating the compressed air supplied to the nitrogen gas generator 39 to about 40 ° C. by the electric heater 61 so as to enhance the separation efficiency of nitrogen gas by the separation membrane. The heat generation amount of the heater 61 is controlled by the temperature control device. The temperature control device detects the temperature of the compressed air at the outlet of the air heater 37 by the temperature sensor 63,
The temperature controller 65 compares the detected temperature with the set temperature, and the energization controller 67 controls the energization rate to the heater 61 so that the difference becomes zero.
【００１０】[0010]
【発明が解決しようとする課題】しかし分離膜を用いた
従来の窒素ガス供給装置は、得られる窒素ガス中に僅か
ながら酸素が残り、窒素ガス中の酸素濃度をある限度以
下に低下させることは困難であった。このため従来の分
離膜式の窒素ガス供給装置は、加熱炉内を窒素ガス雰囲
気に保って被加熱物品を酸化させずに加熱する装置のた
めの窒素ガス供給源としては酸素濃度の点で不十分であ
った。However, in the conventional nitrogen gas supply device using the separation membrane, a small amount of oxygen remains in the obtained nitrogen gas, and the oxygen concentration in the nitrogen gas cannot be lowered below a certain limit. It was difficult. Therefore, the conventional separation membrane type nitrogen gas supply device is unsatisfactory in terms of oxygen concentration as a nitrogen gas supply source for a device for heating the article to be heated without oxidizing it by keeping the inside of the heating furnace in a nitrogen gas atmosphere. Was enough.
【００１１】また従来の分離膜式の窒素ガス供給装置
は、運転開始時に、窒素ガス発生器の分離膜の温度が低
いため、加熱された圧縮空気を供給しても窒素ガスの分
離効率が低く、純度の高い窒素ガスが得られるようにな
る（定常運転状態になる）までに時間がかかる（約２時
間を要する）という問題がある。Further, in the conventional separation membrane type nitrogen gas supply device, since the temperature of the separation membrane of the nitrogen gas generator is low at the start of the operation, the nitrogen gas separation efficiency is low even if heated compressed air is supplied. However, there is a problem that it takes time (it takes about 2 hours) until a highly pure nitrogen gas can be obtained (in a steady operation state).
【００１２】本発明の目的は、上記のような従来技術の
問題点に鑑み、分離膜を用いた窒素ガス供給装置から供
給される窒素ガスの酸素濃度を従来よりさらに低くする
ことと、運転開始から定常運転状態にするまでの時間を
短縮することにある。In view of the above problems of the prior art, an object of the present invention is to further lower the oxygen concentration of nitrogen gas supplied from a nitrogen gas supply device using a separation membrane, and to start operation. The purpose is to shorten the time from when to the steady operation state.
【００１３】[0013]
【課題を解決するための手段とその作用】この目的を達
成するため本発明は、圧縮空気供給源から供給される圧
縮空気をを加熱する空気加熱器と、加熱された圧縮空気
から窒素ガスを分離する分離膜を用いた窒素ガス発生器
とを備えた窒素ガス供給装置において、前記窒素ガス発
生器を加熱するヒーターと、このヒーターの発熱量を制
御して窒素ガス発生器を所定の温度に保つ温度制御装置
とを設けたことを特徴とする。In order to achieve this object, the present invention provides an air heater for heating compressed air supplied from a compressed air supply source, and nitrogen gas from the heated compressed air. In a nitrogen gas supply device equipped with a nitrogen gas generator using a separation membrane to be separated, a heater for heating the nitrogen gas generator and a heating value of the heater are controlled to bring the nitrogen gas generator to a predetermined temperature. A temperature control device for maintaining the temperature is provided.
【００１４】このように窒素ガス発生器にヒーターと温
度制御装置を設けて、窒素ガス発生器を所定の温度に加
熱すると、得られる窒素ガスの酸素濃度が従来より低下
することが実験的に確かめられた。これは、窒素ガス発
生器の分離膜を、加熱圧縮空気の熱だけで加熱する場合
より、分離膜全体を最適温度に保つことが可能になるた
めと考えられる。また上記のようなヒーターを設けてお
くと、運転開始時に、空気加熱器から窒素ガス発生器へ
加熱圧縮空気を供給する前に予め、窒素ガス発生器を予
熱することができるので、短時間で定常運転状態にもっ
ていくことが可能となる。It has been experimentally confirmed that when the nitrogen gas generator is provided with the heater and the temperature control device and the nitrogen gas generator is heated to a predetermined temperature, the oxygen concentration of the obtained nitrogen gas is lower than the conventional one. Was given. It is considered that this is because the whole separation membrane can be maintained at the optimum temperature as compared with the case where the separation membrane of the nitrogen gas generator is heated only by the heat of the heated compressed air. If the heater as described above is provided, the nitrogen gas generator can be preheated before the compressed air is supplied from the air heater to the nitrogen gas generator at the start of operation. It becomes possible to return to a steady operation state.
【００１５】本発明の窒素ガス供給装置において、さら
に窒素ガス中の酸素濃度を低下させるためには、上記の
ヒーターと温度制御装置を設けた上でさらに、水素ガス
供給源と、前記窒素ガス発生器で発生した窒素ガスに水
素ガス供給源から供給された水素ガスを混合する混合部
と、混合されたガス中の酸素と水素を燃焼反応させて窒
素ガスの純度を高める精製器とを設けることが好まし
い。In the nitrogen gas supply device of the present invention, in order to further reduce the oxygen concentration in the nitrogen gas, the above heater and temperature control device are provided, and further the hydrogen gas supply source and the nitrogen gas generation device are provided. A mixing section for mixing the hydrogen gas supplied from the hydrogen gas supply source with the nitrogen gas generated in the reactor and a purifier for increasing the purity of the nitrogen gas by burning and reacting oxygen and hydrogen in the mixed gas are provided. Is preferred.
【００１６】分離膜による窒素ガス発生器で得た窒素ガ
スにはどうしても微量の酸素が残る。この酸素の濃度を
低下させるには、窒素ガスに水素ガスを混合して、Ｐｄ
またはＰｔ等の貴金属を触媒として酸素と水素を燃焼反
応させ、酸素を除去することが有効である。窒素ガスの
供給量をほぼ一定とすれば、窒素ガス中の酸素濃度を低
下させるためには水素ガスの供給量を増加させればよ
い。水素ガスの供給量は、窒素ガスの純度により異なる
が、例えば窒素ガス発生器で10ｍ3 ／hr、純度99.9％の
窒素ガスを発生させた場合、その純度を99.999％にする
には、水素ガスを約20リットル／hr供給すればよい。A trace amount of oxygen inevitably remains in the nitrogen gas obtained by the nitrogen gas generator using the separation membrane. To reduce the oxygen concentration, hydrogen gas is mixed with nitrogen gas, and Pd is added.
Alternatively, it is effective to burn oxygen and hydrogen with a precious metal such as Pt as a catalyst to remove oxygen. If the supply amount of nitrogen gas is kept substantially constant, the supply amount of hydrogen gas may be increased in order to reduce the oxygen concentration in the nitrogen gas. The amount of hydrogen gas supplied varies depending on the purity of the nitrogen gas. For example, when a nitrogen gas generator produces 10 m 3 / hr of nitrogen gas with a purity of 99.9%, the purity of the hydrogen gas must be 99.999%. About 20 liters / hr may be supplied.
【００１７】本発明の窒素ガス供給装置を、加熱炉内を
窒素ガス雰囲気に保って被加熱物品を酸化させずに加熱
する装置の窒素ガス供給源として使用する場合は、上記
の水素ガス供給源、混合部および精製器を備えたものと
することが望ましい。When the nitrogen gas supply device of the present invention is used as a nitrogen gas supply source for a device for heating a heated article without oxidizing it by keeping the inside of the heating furnace in a nitrogen gas atmosphere, the above hydrogen gas supply source is used. It is desirable to have a mixing section and a purifier.
【００１８】[0018]
【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。図１は本発明に係る窒素ガス供給装置の一
実施例を示す。この装置は従来同様、コンプレッサー35
と、空気加熱器37と、分離膜を用いた窒素ガス発生器39
とを備えている。空気加熱器37が、ヒーター61と、温度
センサー63と、温度調節計65と、通電制御装置67とを備
えていることも従来と同じである。Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 shows an embodiment of the nitrogen gas supply device according to the present invention. This device is the same as the compressor 35
, An air heater 37, and a nitrogen gas generator 39 using a separation membrane
It has and. The air heater 37 includes the heater 61, the temperature sensor 63, the temperature controller 65, and the energization control device 67 as in the conventional case.
【００１９】この装置の第一の特徴は、窒素ガス発生器
39を加熱するヒーター69と、このヒーター69の発熱量を
制御して窒素ガス発生器39を所定の温度に保つ温度制御
装置とを設けたことである。ヒーター69はシート状また
はリボン状の電気ヒーターからなり、窒素ガス発生器39
の分離膜を収納する金属筒の外周に巻き付けられてい
る。図示してないが、ヒーター69の外側は断熱材で覆わ
れている。温度制御装置は、窒素ガス発生器39の金属筒
の外面の温度を温度センサー71で検出し、温度調節計73
でその検出温度と設定温度を比較し、その差が零となる
ように通電制御装置75によりヒーター69への通電率を制
御するものである。The first feature of this apparatus is the nitrogen gas generator.
A heater 69 for heating 39 and a temperature control device for controlling the amount of heat generated by the heater 69 to keep the nitrogen gas generator 39 at a predetermined temperature are provided. The heater 69 consists of a sheet-shaped or ribbon-shaped electric heater, and the nitrogen gas generator 39
It is wrapped around the outer circumference of a metal cylinder that houses the separation membrane. Although not shown, the outside of the heater 69 is covered with a heat insulating material. The temperature control device detects the temperature of the outer surface of the metal cylinder of the nitrogen gas generator 39 with the temperature sensor 71, and the temperature controller 73
Then, the detected temperature is compared with the set temperature, and the energization control device 75 controls the energization rate to the heater 69 so that the difference becomes zero.
【００２０】上記の装置の試験結果を説明する。まずヒ
ーター69をオフにして、空気加熱器37から46℃に加熱さ
れた圧縮空気を窒素ガス発生器39に供給した（従来と同
じ条件）。その結果、８時間を経過しても窒素ガス発生
器39の金属筒表面の温度は33℃までしか上昇せず、その
状態で窒素ガス発生器39の出口から得られる窒素ガスの
酸素濃度は3100ppm であった。The test results of the above device will be described. First, the heater 69 was turned off, and the compressed air heated to 46 ° C. was supplied from the air heater 37 to the nitrogen gas generator 39 (same conditions as the conventional one). As a result, the temperature of the metal cylinder surface of the nitrogen gas generator 39 rises only to 33 ° C. even after 8 hours, and the oxygen concentration of the nitrogen gas obtained from the outlet of the nitrogen gas generator 39 in that state is 3100 ppm. Met.
【００２１】次にヒーター69をオンにし、窒素ガス発生
器39の金属筒の表面温度が46℃（供給される圧縮空気の
温度と同じ）でほぼ一定となるように温度制御した。こ
の運転条件下では、窒素ガス発生器39の出口から得られ
る窒素ガスの酸素濃度は2500ppm となり、窒素ガス発生
器39を加熱しない場合より大幅に低下した。Next, the heater 69 was turned on, and the temperature was controlled so that the surface temperature of the metal cylinder of the nitrogen gas generator 39 was almost constant at 46 ° C. (the same as the temperature of the compressed air supplied). Under this operating condition, the oxygen concentration of the nitrogen gas obtained from the outlet of the nitrogen gas generator 39 was 2500 ppm, which was much lower than that when the nitrogen gas generator 39 was not heated.
【００２２】次に設定温度を変更し、窒素ガス発生器39
の金属筒の表面温度が55℃でほぼ一定となるように温度
制御した。この運転条件下では、窒素ガス発生器39の出
口から得られる窒素ガスの酸素濃度は2100ppm となり、
さらに低下した。Next, the set temperature is changed and the nitrogen gas generator 39
The temperature was controlled so that the surface temperature of the metal cylinder was constant at 55 ° C. Under this operating condition, the oxygen concentration of the nitrogen gas obtained from the outlet of the nitrogen gas generator 39 is 2100 ppm,
It dropped further.
【００２３】このような実験により、窒素ガス発生器39
をヒーター69で加熱することが、窒素ガス中の酸素濃度
を低下させるのに極めて有効であることが確認された。Through such an experiment, the nitrogen gas generator 39
It was confirmed that the heating of the above with the heater 69 is extremely effective in reducing the oxygen concentration in the nitrogen gas.
【００２４】この装置の第二の特徴は、窒素ガス発生器
39で得られた窒素ガスの純度をさらに高める精製ユニッ
トを設けたことである。この精製ユニットは、水素ガス
ボンベ等の水素ガス供給源41と、この水素ガス供給源41
から流量制御弁43を経て供給される水素ガスを前記窒素
ガス発生器39で発生した窒素ガスに混合する混合部45
と、混合されたガス中の酸素と水素を燃焼反応させて窒
素ガスの純度を高める精製器47とを備えている。The second feature of this apparatus is that it is a nitrogen gas generator.
That is, a refining unit for further improving the purity of the nitrogen gas obtained in 39 is provided. This purification unit includes a hydrogen gas supply source 41 such as a hydrogen gas cylinder and the hydrogen gas supply source 41.
A mixing section 45 for mixing the hydrogen gas supplied from the above through the flow rate control valve 43 with the nitrogen gas generated in the nitrogen gas generator 39.
And a purifier 47 for increasing the purity of nitrogen gas by burning and reacting oxygen and hydrogen in the mixed gas.
【００２５】水素ガスの供給量は、窒素ガス発生器39で
発生する窒素ガス中の酸素濃度が高いときは多く、低い
ときは少なくなるように制御される。この制御を行うた
め、精製器47を出た窒素ガスの酸素濃度を検出する酸素
濃度検出器51と、検出した酸素濃度に応じて流量制御弁
43の開度を制御する制御器53が設けられている。The amount of hydrogen gas supplied is controlled so that it is high when the oxygen concentration in the nitrogen gas generated by the nitrogen gas generator 39 is high, and is low when the oxygen concentration is low. In order to perform this control, an oxygen concentration detector 51 that detects the oxygen concentration of the nitrogen gas that has flowed out of the purifier 47, and a flow control valve that corresponds to the detected oxygen concentration.
A controller 53 for controlling the opening degree of 43 is provided.
【００２６】このような精製ユニットを設けることによ
り窒素ガス発生器39で得られた窒素ガスの純度をさらに
高めることが可能となる。なおこの精製ユニットは、要
求される窒素ガスの純度に応じて設けられるものであ
る。要求される窒素ガスの純度が、窒素ガス発生器39で
発生する窒素ガスの純度で間に合う場合は精製ユニット
を設ける必要はない。By providing such a refining unit, the purity of the nitrogen gas obtained in the nitrogen gas generator 39 can be further increased. The refining unit is provided according to the required purity of nitrogen gas. If the required purity of the nitrogen gas is sufficient for the purity of the nitrogen gas generated by the nitrogen gas generator 39, it is not necessary to provide a refining unit.
【００２７】次に図１の窒素ガス供給装置を用いた窒素
ガス雰囲気加熱装置を図２を参照して説明する。この窒
素ガス雰囲気加熱装置は、加熱炉31に窒素ガス供給装置
33から窒素ガスを供給し、加熱炉31内を窒素ガス雰囲気
に保つものである。加熱炉31の構造は図３に示した従来
の加熱炉と同様であるので、同一部分には同一符号を付
して説明を省略する。Next, a nitrogen gas atmosphere heating device using the nitrogen gas supply device of FIG. 1 will be described with reference to FIG. This nitrogen gas atmosphere heating device is a nitrogen gas supply device for the heating furnace 31.
Nitrogen gas is supplied from 33 to maintain the inside of the heating furnace 31 in a nitrogen gas atmosphere. Since the structure of the heating furnace 31 is the same as that of the conventional heating furnace shown in FIG. 3, the same parts are designated by the same reference numerals and the description thereof will be omitted.
【００２８】窒素ガス供給装置33は、空気を取り入れて
圧縮するコンプレッサー35と、圧縮空気を加熱する空気
加熱器37と、加熱された圧縮空気から分離膜により窒素
ガスを分離する窒素ガス発生器39と、分離された窒素ガ
スに、水素ガス供給源41から流量制御弁43を経て供給さ
れる水素ガスを混合する混合器45と、触媒により酸素と
水素を燃焼反応させて純度の高い窒素ガスを得る精製器
47とから構成されている。精製器47で精製された高純度
の窒素ガスは配管49により窒素ガス噴出管27に送られ、
加熱炉31内に供給される。一方、水素ガスの供給量を調
整する流量制御弁43の開度は加熱炉31内の酸素濃度を検
出する酸素濃度検出器51の出力により制御される。The nitrogen gas supply device 33 includes a compressor 35 for taking in and compressing air, an air heater 37 for heating the compressed air, and a nitrogen gas generator 39 for separating nitrogen gas from the heated compressed air by a separation membrane. And the separated nitrogen gas, a mixer 45 for mixing the hydrogen gas supplied from the hydrogen gas supply source 41 through the flow rate control valve 43, and a highly pure nitrogen gas by burning and reacting oxygen and hydrogen with a catalyst. Get refiner
It consists of 47 and. The high-purity nitrogen gas purified by the purifier 47 is sent to the nitrogen gas ejection pipe 27 by the pipe 49,
It is supplied into the heating furnace 31. On the other hand, the opening of the flow rate control valve 43 that adjusts the supply amount of hydrogen gas is controlled by the output of the oxygen concentration detector 51 that detects the oxygen concentration in the heating furnace 31.
【００２９】窒素ガス発生器39からはほぼ一定流量の窒
素ガスを供給する。窒素ガスの供給量を一定とすれば、
窒素ガス発生器39で発生する窒素ガス中の酸素濃度もほ
ぼ一定となり、また加熱炉31の空気の吸い込み量もほぼ
一定となり、加熱炉31内の酸素濃度は何らかの外乱がな
いかぎり一定に保たれる。From the nitrogen gas generator 39, a substantially constant flow rate of nitrogen gas is supplied. If the supply of nitrogen gas is constant,
The oxygen concentration in the nitrogen gas generated by the nitrogen gas generator 39 is also substantially constant, the air intake amount of the heating furnace 31 is also substantially constant, and the oxygen concentration in the heating furnace 31 is kept constant as long as there is no disturbance. Be done.
【００３０】酸素濃度検出器51は常時、加熱炉31内の酸
素濃度を検出し、その検出信号を制御器53に送る。制御
器53は検出した酸素濃度に応じて流量制御弁43の開度を
制御する。すなわち酸素濃度が高いときは、その程度に
応じて流量制御弁43の開度を大きくし、水素ガスの供給
量を多くする。すると窒素ガス中の酸素がより多く除去
され、精製器47からは酸素濃度の低い窒素ガスが加熱炉
31に供給されるため、加熱炉31内の酸素濃度を低下させ
ることができる。また加熱炉31内の酸素濃度が低いとき
は上記と逆の操作を行う。The oxygen concentration detector 51 always detects the oxygen concentration in the heating furnace 31, and sends the detection signal to the controller 53. The controller 53 controls the opening degree of the flow control valve 43 according to the detected oxygen concentration. That is, when the oxygen concentration is high, the opening degree of the flow rate control valve 43 is increased and the hydrogen gas supply amount is increased according to the degree. Then, more oxygen in the nitrogen gas is removed, and the nitrogen gas having a low oxygen concentration is supplied from the purifier 47 to the heating furnace.
Since it is supplied to the heating furnace 31, the oxygen concentration in the heating furnace 31 can be lowered. When the oxygen concentration in the heating furnace 31 is low, the reverse operation is performed.
【００３１】例えば窒素ガス発生器39から酸素濃度1000
ppm の窒素ガスを９ｍ3 ／hrの流量で供給する場合、水
素ガスを約20リットル／hrの流量で供給すれば、加熱炉
31内の酸素濃度を100ppmに保つことができる。精製器47
はＰｄまたはＰｔ系の触媒を用いると、ＳＶ（空筒速
度）＝30,000までは窒素ガス中の酸素と注入した水素ガ
スが十分反応する。For example, from the nitrogen gas generator 39, the oxygen concentration is 1000
When nitrogen gas of ppm is supplied at a flow rate of 9 m 3 / hr, hydrogen gas is supplied at a flow rate of about 20 liters / hr.
The oxygen concentration in 31 can be maintained at 100 ppm. Purifier 47
When a Pd or Pt-based catalyst is used, oxygen in nitrogen gas and injected hydrogen gas sufficiently react until SV (blank speed) = 30,000.
【００３２】以上は定常運転状態の場合であるが、次に
窒素ガス雰囲気加熱装置の運転を開始する場合について
説明する。窒素ガス雰囲気加熱装置の運転を開始し、定
常運転状態にするためには、加熱炉31内の温度を所定の
温度まで立ち上げると共に、窒素ガス供給装置33から所
定の純度の窒素ガスを所定の流量だけ供給できるように
しなければならない。加熱炉31の立上げは約１時間程度
であるが、窒素ガス発生器39がヒーターを装備していな
い場合、純度99.999％の窒素ガスを加熱炉31に供給して
炉内酸素濃度を100ppmに安定させるまでに約２時間を要
する。このため加熱炉31を起動する前に窒素ガス供給装
置33を起動する必要があり、運転開始の操作が面倒であ
るばかりでなく、時間的、エネルギー的な無駄も大き
い。The above is the case of the steady operation state. Next, the case of starting the operation of the nitrogen gas atmosphere heating device will be described. In order to start the operation of the nitrogen gas atmosphere heating device and bring it to a steady operation state, the temperature in the heating furnace 31 is raised to a predetermined temperature, and a predetermined purity of nitrogen gas is supplied from the nitrogen gas supply device 33. It must be possible to supply only the flow rate. The heating furnace 31 is started up for about 1 hour, but if the nitrogen gas generator 39 is not equipped with a heater, nitrogen gas having a purity of 99.999% is supplied to the heating furnace 31 to increase the oxygen concentration in the furnace to 100 ppm. It takes about 2 hours to stabilize. Therefore, it is necessary to start the nitrogen gas supply device 33 before starting the heating furnace 31, which is not only troublesome to start the operation, but also wastes time and energy.
【００３３】これに対し運転開始時に窒素ガス発生器39
をヒーター55で予熱すると、分離膜の温度を約30分で約
40℃まで立ち上げることが可能となり、純度99.999％の
窒素ガスを加熱炉31に供給して炉内酸素濃度を100ppmに
安定させるまでの時間は約１時間で済むようになる。し
たがって運転開始時の準備時間を短くできると共に、窒
素ガス供給装置33を加熱炉31とほぼ同時に起動すること
が可能となり、操作が簡単になる。On the other hand, at the start of operation, the nitrogen gas generator 39
When the heater is preheated with the heater 55, the temperature of the separation membrane will be about 30 minutes.
It becomes possible to start up to 40 ° C., and it takes about 1 hour to supply nitrogen gas having a purity of 99.999% to the heating furnace 31 and stabilize the oxygen concentration in the furnace at 100 ppm. Therefore, the preparation time at the start of the operation can be shortened, and the nitrogen gas supply device 33 can be started almost at the same time as the heating furnace 31, which simplifies the operation.
【００３４】[0034]
【発明の効果】以上説明したように本発明によれば、分
離膜を用いた窒素ガス発生器をヒーターで加熱すること
により、窒素ガス供給装置から供給する窒素ガスの酸素
濃度を低下させることができる。また運転開始時に窒素
ガス発生器をヒーターで予熱することにより運転開始か
ら定常運転状態にもっていくまでの時間を短縮すること
ができる。As described above, according to the present invention, it is possible to reduce the oxygen concentration of nitrogen gas supplied from the nitrogen gas supply device by heating the nitrogen gas generator using the separation membrane with the heater. it can. Further, by preheating the nitrogen gas generator with the heater at the start of operation, the time from the start of operation to the steady operation state can be shortened.
【図１】 本発明に係る窒素ガス供給装置の一実施例を
示す説明図。FIG. 1 is an explanatory view showing an embodiment of a nitrogen gas supply device according to the present invention.
【図２】 本発明に係る窒素ガス雰囲気加熱装置の一実
施例を示す説明図。FIG. 2 is an explanatory view showing an embodiment of a nitrogen gas atmosphere heating device according to the present invention.
【図３】 従来の窒素ガス雰囲気加熱炉を示す断面図。FIG. 3 is a sectional view showing a conventional nitrogen gas atmosphere heating furnace.
【図４】 従来の窒素ガス供給装置を示す説明図。FIG. 4 is an explanatory view showing a conventional nitrogen gas supply device.
17：加熱室 19：入口通路
21：出口通路 25：コンベア
27：窒素ガス噴出管 29：シール板
31：加熱炉 33：窒素ガス
供給装置
35：コンプレッサー 37：空気加熱
器
39：分離膜による窒素ガス発生器 41：水素ガス
供給源
43：流量制御弁 45：混合器
47：精製器 51：酸素濃度
検出器
53：制御器 55：ヒーター
61：ヒーター 63：温度セン
サー
65：温度調節計 67：通電制御
装置
69：ヒーター 71：温度セン
サー
73：温度調節計 75：通電制御
装置17: Heating chamber 19: Inlet passage 21: Outlet passage 25: Conveyor 27: Nitrogen gas jet pipe 29: Seal plate 31: Heating furnace 33: Nitrogen gas supply device 35: Compressor 37: Air heater 39: Nitrogen gas by separation membrane Generator 41: Hydrogen gas supply source 43: Flow control valve 45: Mixer 47: Purifier 51: Oxygen concentration detector 53: Controller 55: Heater 61: Heater 63: Temperature sensor 65: Temperature controller 67: Energization control Device 69: Heater 71: Temperature sensor 73: Temperature controller 75: Energization control device
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｆ２７Ｂ 9/04 Ｆ２７Ｂ 9/04 Ｈ０５Ｋ 3/34 ５０７ Ｈ０５Ｋ 3/34 ５０７Ｊ (56)参考文献 特開 平３−275321（ＪＰ，Ａ) 特開 平１−301503（ＪＰ，Ａ) 特開 平６−323758（ＪＰ，Ａ) 特開 平６−323757（ＪＰ，Ａ) 特開 平６−323756（ＪＰ，Ａ) 特開 平６−323755（ＪＰ，Ａ) 特開 平６−323754（ＪＰ，Ａ) 実開 平７−7725（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) B01D 53/22 F27D 7/06 B01J 7/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 7 Identification code FI F27B 9/04 F27B 9/04 H05K 3/34 507 H05K 3/34 507J (56) Reference JP-A-3-275321 (JP, A) JP-A-1-301503 (JP, A) JP-A-6-323758 (JP, A) JP-A-6-323757 (JP, A) JP-A-6-323756 (JP, A) JP-A-6 -323755 (JP, A) JP-A-6-323754 (JP, A) Actual development 7-7725 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) B01D 53/22 F27D 7/06 B01J 7/00
Claims (6)
加熱する空気加熱器と、加熱された圧縮空気から窒素ガ
スを分離する分離膜を用いた窒素ガス発生器とを備えた
窒素ガス供給装置において、前記窒素ガス発生器を加熱
するヒーターと、このヒーターの発熱量を制御して窒素
ガス発生器を所定の温度に保つ温度制御装置とを設けた
ことを特徴とする窒素ガス供給装置。1. A nitrogen gas supply provided with an air heater for heating compressed air supplied from a compressed air supply source, and a nitrogen gas generator using a separation membrane for separating nitrogen gas from the heated compressed air. In the apparatus, a heater for heating the nitrogen gas generator and a temperature control device for controlling the amount of heat generated by the heater to keep the nitrogen gas generator at a predetermined temperature are provided.
加熱する空気加熱器と、加熱された圧縮空気から窒素ガ
スを分離する分離膜を用いた窒素ガス発生器とを備えた
窒素ガス供給装置において、前記窒素ガス発生器を加熱
するヒーターと、このヒーターの発熱量を制御して窒素
ガス発生器を所定の温度に保つ温度制御装置とを設け、
さらに、水素ガス供給源と、前記窒素ガス発生器で発生
した窒素ガスに水素ガス供給源から供給された水素ガス
を混合する混合部と、混合されたガス中の酸素と水素を
燃焼反応させて窒素ガスの純度を高める精製器とを設け
たことを特徴とする窒素ガス供給装置。2. A nitrogen gas supply provided with an air heater for heating compressed air supplied from a compressed air supply source, and a nitrogen gas generator using a separation membrane for separating nitrogen gas from the heated compressed air. In the apparatus, a heater for heating the nitrogen gas generator, and a temperature control device for controlling the heat generation amount of the heater to keep the nitrogen gas generator at a predetermined temperature are provided.
Further, a hydrogen gas supply source, a mixing portion for mixing the nitrogen gas generated by the nitrogen gas generator with the hydrogen gas supplied from the hydrogen gas supply source, and burning reaction of oxygen and hydrogen in the mixed gas. A nitrogen gas supply device provided with a purifier for increasing the purity of nitrogen gas.
であって、ヒーターは窒素ガス発生器の分離膜を収納す
る金属筒の外周に配置されているもの。3. The nitrogen gas supply device according to claim 1 or 2, wherein the heater is arranged on the outer periphery of a metal cylinder that houses the separation membrane of the nitrogen gas generator.
を運転する方法であって、運転中継続して、ヒーターと
温度制御装置により窒素ガス発生器を所定の温度に保つ
ことを特徴とする窒素ガス供給装置の運転方法。4. A method of operating the nitrogen gas supply device according to claim 1 or 2, characterized in that the nitrogen gas generator is kept at a predetermined temperature by a heater and a temperature control device during the operation. Operating method of nitrogen gas supply device.
法であって、運転を開始する時に、空気加熱器から窒素
ガス発生器へ加熱圧縮空気を供給する前に予め、窒素ガ
ス発生器をヒーターで予熱することを特徴とするもの。5. The method for operating a nitrogen gas supply device according to claim 4, wherein the nitrogen gas generator is previously supplied from the air heater to the heated compressed air when starting the operation. It is characterized by preheating with a heater.
供給して加熱炉内を窒素ガス雰囲気に保つ窒素ガス雰囲
気加熱装置において、前記窒素ガス供給装置として、請
求項２記載の窒素ガス供給装置を用いたことを特徴とす
る窒素ガス雰囲気加熱装置。6. A nitrogen gas atmosphere heating device for supplying a nitrogen gas from a nitrogen gas supply device to a heating furnace to maintain the inside of the heating furnace in a nitrogen gas atmosphere, wherein the nitrogen gas supply device is the nitrogen gas supply device according to claim 2. A nitrogen gas atmosphere heating device characterized by using an apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34025493A JP3373922B2 (en) | 1993-01-13 | 1993-12-08 | Nitrogen gas supply apparatus, operation method thereof, and nitrogen gas atmosphere heating apparatus using the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1943293 | 1993-01-13 | ||
| JP5-19432 | 1993-01-13 | ||
| JP34025493A JP3373922B2 (en) | 1993-01-13 | 1993-12-08 | Nitrogen gas supply apparatus, operation method thereof, and nitrogen gas atmosphere heating apparatus using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07185253A JPH07185253A (en) | 1995-07-25 |
| JP3373922B2 true JP3373922B2 (en) | 2003-02-04 |
Family
ID=26356264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34025493A Expired - Fee Related JP3373922B2 (en) | 1993-01-13 | 1993-12-08 | Nitrogen gas supply apparatus, operation method thereof, and nitrogen gas atmosphere heating apparatus using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3373922B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007075852A (en) * | 2005-09-14 | 2007-03-29 | Apollo Seiko Ltd | Soldering device |
| US8110027B2 (en) * | 2009-04-17 | 2012-02-07 | Hamilton Sundstrand Corporation | Heated blanket for air separation module |
| KR101714017B1 (en) * | 2016-01-07 | 2017-03-09 | 주식회사 하이원시스 | Heater for nitrogen gas |
| JP6191003B1 (en) * | 2017-02-21 | 2017-09-06 | 株式会社フクハラ | High purity nitrogen gas generation system |
| WO2022176969A1 (en) * | 2021-02-19 | 2022-08-25 | 三菱重工サーマルシステムズ株式会社 | Bleeding device |
-
1993
- 1993-12-08 JP JP34025493A patent/JP3373922B2/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JPH07185253A (en) | 1995-07-25 |
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