JP3373234B2 - Filtration vessel with pipe fitting - Google Patents
Filtration vessel with pipe fittingInfo
- Publication number
- JP3373234B2 JP3373234B2 JP32900792A JP32900792A JP3373234B2 JP 3373234 B2 JP3373234 B2 JP 3373234B2 JP 32900792 A JP32900792 A JP 32900792A JP 32900792 A JP32900792 A JP 32900792A JP 3373234 B2 JP3373234 B2 JP 3373234B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- pipe
- bush
- filtration
- pipe joint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【0001】[0001]
【産業上の利用分野】本発明は、半導体製造工程等で使
用される濾過装置及びそれに使用する容器と配管継手に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filtering device used in a semiconductor manufacturing process and the like, and a container and a pipe joint used therein.
【0002】[0002]
【従来の技術】本発明の濾過装置は特に半導体製造工程
で好適に用いられるものであるが、半導体製造に於いて
は、歩留まり向上のため、濾過装置自体のゴミ発生に対
しても厳しい条件が課せられている。そのため、濾過装
置を構成する配管継手、容器、フィルターカートリッジ
等の材質、加工精度の改善が望まれているが、構造上、
継手には種々の問題が残されている。2. Description of the Related Art The filtering device of the present invention is preferably used particularly in a semiconductor manufacturing process. However, in semiconductor manufacturing, in order to improve the yield, there are severe conditions against dust generation of the filtering device itself. Is imposed. Therefore, it is desired to improve the pipe joint, the container, the material of the filter cartridge, etc., which constitutes the filtration device, and the processing accuracy.
Various problems remain with the joints.
【0003】すなわち、継合部の多い継手にはわずかな
隙間、すなわち流体の滞留部ができやすく、薬品類を含
有する流体を流すと、そこに液が溜まり、変質してゴミ
が発生し、そのゴミが製品に付着して、歩留まりを低下
させるという問題が発生するのである。That is, a small gap, that is, a fluid retention portion is likely to be formed in a joint having many joints, and when a fluid containing chemicals is flowed, the liquid accumulates in the fluid and deteriorates to generate dust. There is a problem in that the dust adheres to the product and reduces the yield.
【0004】そこで、従来より配管継手の改善、改良が
種々されてきたが、いずれも半導体工業で要求されてい
る前記の条件を充分満たすことはできなかった。例え
ば、従来最も一般的に使われているフッ素樹脂製のシー
ルテープを巻いて、容器の接続口と継手本体のシールを
完全にしたり、フェルールを用いて継手本体と配管の密
着度を上げる方法は、上記のようにそれらのシール部に
できる隙間に液が浸透し変質してゴミになって、半導体
製造に有害な作用をするという問題点があった。Therefore, various improvements and improvements have been made to the pipe joints from the past, but none of them could sufficiently satisfy the above-mentioned conditions required in the semiconductor industry. For example, the most commonly used conventional method is to wrap fluorocarbon resin sealing tape to completely seal the connection port of the container and the fitting body, or to use a ferrule to increase the adhesion between the fitting body and the pipe. As described above, there has been a problem that the liquid permeates into the gaps formed in the seal portions and deteriorates to become dust, which has a harmful effect on semiconductor manufacturing.
【0005】又、シールを完全にするために継手と容器
の結合部にOリングを使う方法も多用されているが、や
はり該Oリングの周辺にできる隙間に液が浸透し、上記
と同じ問題が生じてしまう。さらに、継合部を少なくし
て隙間を少なくするため、容器に配管を溶接等で直接結
合する方法もあるが、配管の変更ができず、工程に合わ
せて多種多数の容器を必要とするためコストがかかりす
ぎるという問題点がある。Also, a method of using an O-ring at the joint between the joint and the container to complete the seal is often used. However, the liquid still penetrates into the gap formed around the O-ring, which causes the same problem as described above. Will occur. Furthermore, there is also a method of directly connecting the pipes to the container by welding etc. to reduce the joints and the gaps, but it is not possible to change the pipes and various types of containers are required according to the process. There is a problem that it costs too much.
【0006】その他、一体成形又は加工で容器と継手本
体を一体化したり、継手本体だけ溶接して配管の着脱を
自在にしたり、或いはシール部分を2箇所以上にする等
の工夫をしたものもあるが、いづれもコストのかかる方
法であり、強度の点及び液の滞留についても満足のいく
方法ではなかった。[0006] In addition, there have been devised such that the container and the joint body are integrated by integral molding or processing, the joint body alone is welded to allow the pipes to be freely attached and detached, or the seal portions are provided at two or more places. However, all of them are costly methods, and they are not satisfactory in terms of strength and liquid retention.
【0007】[0007]
【発明が解決しようとする課題】本発明は半導体製造等
に用いられる濾過装置において、それ自体がゴミ発生源
となる危険性を有する従来の配管継手を改良し、それを
組み込んだ濾過用容器を開発することにより、半導体製
造の歩留まり向上に貢献する濾過装置を提供することを
課題とするものである。DISCLOSURE OF THE INVENTION The present invention relates to a filtration device used in semiconductor manufacturing or the like, in which a conventional pipe joint having a risk of itself becoming a source of dust is improved, and a filtration container incorporating the same is provided. It is an object of the present invention to provide a filtration device that contributes to the improvement of the semiconductor manufacturing yield by the development.
【0008】[0008]
【課題を解決するための手段】そこで本発明者は、容器
の配管結合部と継手の構造について研究を重ねた結果、
結合部をできるだけ少なくして、簡単な構造にするた
め、継手構造を容器構造中に組み込み、且つ管路内の液
体流からシール閉鎖曲線までの距離を短くするとともに
シール箇所を減らして一次シールのみにして液溜りを最
小にせしめ、さらにその他構造上の工夫を加えることに
より、上記課題を解決できることを確認し、本発明を完
成した。Therefore, the present inventor has conducted research on the structures of the pipe joint and the joint of the container, and as a result,
In order to make the structure as simple as possible with as few joints as possible, the joint structure is incorporated into the container structure, and the distance from the liquid flow in the pipeline to the seal closing curve is shortened and the number of sealing points is reduced to only the primary seal. It was confirmed that the above-mentioned problems could be solved by minimizing the liquid pool and further devising the structure, and completed the present invention.
【0009】すなわち本発明は、フィルター収納用容器
と配管と締付ナットとブッシュとからなる濾過装置用の
配管継手組み込み容器であって、フィルター収納用容
器は、その蓋体もしくは底面に、側面の略上半部に締付
ナットと螺合するネジ山が刻まれ、且つその下部にブッ
シュ端面と面シールを行うための段状平面が設けられて
いる流体の流入口及び流出口並びに必要により排気口が
設けられていること、配管は、フレア付ブッシュが圧
入され拡径した端部を有すること、締付ナットは、そ
の外面の略上半分が四面体形状を有し、且つその下部に
は上記容器の流入出口及び排気口と螺合するネジ山が刻
まれており、その内面には配管を貫装する円筒部とその
下方に拡径配管端部を貫装する円筒部が段状に設けられ
ていること、上記容器と配管の結合はの締付ナット
を の容器のネジ穴に螺合することにより行われ、シー
ルは該締付ナット内面の段差部にあるエッジが配管の端
部にある拡径部に食い込み、その力が配管とブッシュの
接面及びブッシュ端面と容器の接面に伝達することによ
って行われること、を特徴とする配管継手付濾過容器及
びそれを用いた濾過装置並びにそれに用いられる配管継
手を提供するものである。That is, the present invention is a container for storing a filter.
For a filtration device that consists of
This is a container with a built-in pipe joint,
Tighten the container to the lid or bottom, and to the upper half of the side.
The screw thread that engages with the nut is engraved, and the bottom part
A stepped flat surface is provided for face sealing
The fluid inlet and outlet and the exhaust outlet if necessary
Be sure that the piping with flare is
Have a widened end and the tightening nut is
The upper half of the outer surface of has a tetrahedral shape, and
Is engraved with threads that are screwed into the inlet and outlet and outlet of the container.
It has a cylindrical part that penetrates the pipe and its inner surface.
A cylindrical part that penetrates the end of the expanded pipe
The above-mentioned container and piping are connected with the tightening nut.
To It is done by screwing it into the screw hole of the container of
The edge of the step inside the tightening nut is the end of the pipe.
Bites into the expanded portion of the pipe, and the force is
By transmitting to the contact surface and the contact surface of the bush and the container.
The filtration container with pipe joint and the
And a filtration device using the same and a pipe joint used therefor
It is something that provides a hand.
【0010】本発明の濾過装置はフィルターカートリッ
ジ、容器、配管、締付けナット及び配管に挿入するブッ
シュを主たる構成要素としている。このうちフィルター
カートリッジはプラスチックス、例えばフッ素系樹脂の
メンブレンフィルターとプラスチック製支持部材からな
るフィルターカートリッジが好ましく、たとえば日本ミ
リポア・リミテッドが市販しているもの等が使用され
る。The filter device of the present invention mainly comprises a filter cartridge, a container, a pipe, a tightening nut, and a bush to be inserted into the pipe. Of these, the filter cartridge is preferably a plastic, for example, a filter cartridge composed of a fluororesin membrane filter and a plastic support member. For example, those commercially available from Japan Millipore Limited are used.
【0011】容器は、濾過される流体の入口と濾過され
た流体の出口と必要によりベント用の排気口が設けられ
た蓋とそれに嵌合するフィルターカートリッジを収納す
るポットと両者を密封固定するための閉蓋部材とからな
る。この容器のポツト、蓋外用部、閉蓋部材はステンレ
ススチール等の金属製がよく、ポット内面と蓋の内部は
フッ素系樹脂、スチレン系樹脂、オレフィン系樹脂等の
プラスチック製のものが好ましく、ポリテトラフルオロ
エチレン(PTFE)、又はテトラフルオロエチレンと
パーフルオロアルキルビニルエーテルの共重合体(PF
A)が特に好ましい。なお、容器の構造については継手
とともに後記する実施例で図面に基づき詳しく説明す
る。The container is for sealing and fixing both the inlet of the fluid to be filtered, the outlet of the filtered fluid, a lid provided with an exhaust port for venting if necessary, a pot for accommodating the filter cartridge fitted therein and a pot. And a lid member. The pot, the external lid portion, and the lid member of this container are preferably made of metal such as stainless steel, and the inner surface of the pot and the interior of the lid are preferably made of plastic such as fluorine resin, styrene resin, and olefin resin. Tetrafluoroethylene (PTFE), or a copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether (PF
A) is particularly preferred. In addition, the structure of the container will be described in detail with reference to the drawings in an embodiment described later together with the joint.
【0012】配管継手は、末端部にフレアー付きブッシ
ュを圧入され端部が拡径した配管と締付けナットからな
っており、フッ素樹脂、ポリオレフィン系樹脂、ポリス
チレン系樹脂等のプラスチック製のものが使用されてい
る。その構造の詳細も実施例で詳しく説明する。The pipe joint is composed of a pipe having a flared bush press-fitted at the end and a diameter enlarged at the end, and a tightening nut, and is made of a plastic such as a fluororesin, a polyolefin resin, or a polystyrene resin. ing. The details of the structure will be described in detail in Examples.
【0013】本発明の濾過装置を用いて濾過される流体
は特に制限されないが、好適な対象液としては半導体製
造工程で用いられる純水、薬品類を溶解した溶液、有機
溶剤等が挙げられる。The fluid to be filtered using the filter of the present invention is not particularly limited, but suitable target liquids include pure water used in the semiconductor manufacturing process, solutions in which chemicals are dissolved, organic solvents and the like.
【0014】[0014]
【作用】本発明の目的を達成するためには、フィルター
収納用容器と配管の良好な接続を実現する特別な継手が
必要である。すなわち、強度があり、且つシールが完全
で種々の温度条件、圧力条件に於て漏れが生じず、結合
・分離が容易で繰り返し使用が可能であって、しかもゴ
ミの原因となる液溜りがない継手(構造)が必要なので
ある。In order to achieve the object of the present invention, a special joint which realizes a good connection between the filter container and the pipe is required. That is, it is strong, has a perfect seal, does not leak under various temperature and pressure conditions, is easy to combine and separate, can be used repeatedly, and has no liquid pool that causes dust. A joint (structure) is necessary.
【0015】そこで、本発明においては、結合部分をで
きるだけ少なくして強度、結合分離の容易性及び易加工
性を高めるため、容器の蓋部に継手構造の一部を組み込
んだ構造の継手を採用した。すなわち、容器蓋体の流体
の入、出口及び排気口に直接ネジ穴を設け、これに締付
ナットを螺合することにより配管を固定する構造を採用
したのである。このため継手の容器外側への突出部分が
小さくなり破損の危険性が減少し、強度も向上した。
又、容器蓋体の該穴にはブッシュの端部が挿入される平
行円筒部分が設けられており、ブツシュと容器蓋体の接
触面の垂直を維持し、力の偏りを防ぐとともに、締付け
ナットのネジ部と容器蓋体ネジ部の締付けの際の誤動作
を防止している。さらに、通常の結合時には、締付けナ
ット下端方向に若干の隙間が生じるようにしてあり、増
し締めができるようにしてある。Therefore, in the present invention, a joint having a structure in which a part of the joint structure is incorporated in the lid portion of the container is adopted in order to reduce the joint portion as much as possible to enhance the strength, the ease of joint separation and the easy workability. did. That is, a structure in which a pipe is fixed by directly providing a screw hole in the fluid inlet / outlet and the exhaust port of the container lid and screwing a tightening nut into the screw hole is adopted. For this reason, the protruding portion of the joint to the outside of the container is reduced, the risk of breakage is reduced, and the strength is also improved.
In addition, a parallel cylindrical portion into which the end of the bush is inserted is provided in the hole of the container lid, and the contact surface between the bush and the container lid is kept vertical to prevent bias of force and tightening nut. Prevents malfunctions when tightening the screw part of and the screw part of the container lid. Further, at the time of normal connection, a slight gap is formed in the lower end direction of the tightening nut so that the tightening nut can be further tightened.
【0016】次に、漏れ及び液溜発生の防止のためのシ
ール機構であるが、本発明のシールは液溜りを極力なく
すため一次シールのみとし、二次、三次の高次シールは
設けないようにした。その具体的なシールはブッシュと
容器蓋体の流体出入口の結合部に設けられた突合せ部分
での面シール(図1のB)、及び配管とブッシュの接触
部分でのエッジシール(図1のA)である。これらのシ
ールは、締付けナットを容器の該結合部にねじ込むこと
により、ナット内面にあるエッジ部分が配管の外面に食
い込み(図1のA)、さらに、その力が配管とブッシュ
の接触面及び前記のブッシュ端面と容器結合部突合せ部
分の接面に伝達し、両面の密着シールがなされる。Next, regarding the seal mechanism for preventing leakage and liquid pool generation, the seal of the present invention uses only the primary seal in order to minimize the liquid pool, and the secondary and tertiary high order seals are not provided. I chose The specific seal is a face seal (B in FIG. 1) at the abutting portion provided at the joint between the bush and the fluid inlet / outlet of the container lid, and an edge seal (A in FIG. 1) at the contact portion between the pipe and the bush. ). In these seals, when a tightening nut is screwed into the connecting portion of the container, the edge portion on the inner surface of the nut bites into the outer surface of the pipe (A in FIG. 1), and the force is applied to the contact surface between the pipe and the bush and Is transmitted to the contact surface of the bush end surface of the container and the abutting portion of the container coupling portion, and both surfaces are tightly sealed.
【0017】なお、上記のエッジシールは配管端部がフ
レア付ブッシュ(図5)を圧入されてそこの管径が拡大
しているので、そこへ締付ナットの内面にあるエッジが
食い込み、強く押圧されてシールが完成するのである。
同時に配管の抜けも防止している。又、本発明の面シー
ルに於いては、接液部分と非接液部分の境界であるシー
ル閉曲線から配管内の流体までの距離が最短となるの
で、液溜りが防止される。In the above-mentioned edge seal, since the pipe end has a flared bush (Fig. 5 ) press-fitted to expand the pipe diameter, the edge on the inner surface of the tightening nut bites into it and becomes strong. It is pressed to complete the seal.
At the same time, the pipe is prevented from coming off. Further, in the face seal of the present invention, the distance from the seal closed curve, which is the boundary between the liquid-contacting portion and the non-liquid-contacting portion, to the fluid in the pipe is the shortest, so that liquid pooling is prevented.
【0018】次いで本発明の濾過装置における流体の流
れについて説明する。流体は容器蓋体に設けられた流入
口から継手で結合された配管を通して容器内に流入す
る。容器内を満たした流体は容器内壁とフィルターカー
トリッジの間隙を満たし、次に、フィルターカートリッ
ジ内に浸入し、フィルター膜によって濾過される。濾過
された流体はフィルターカートリッジ中央に設けられた
チャンネルに集まり、継手で結合された出口配管から外
部配管へと流出する。流体に同伴したガス類が容器内に
蓄積された場合には、排気口から外部へベントする。Next, the flow of fluid in the filtration device of the present invention will be described. The fluid flows into the container from an inflow port provided in the container lid through a pipe connected by a joint. The fluid that has filled the container fills the gap between the inner wall of the container and the filter cartridge, then enters the filter cartridge, and is filtered by the filter membrane. The filtered fluid collects in the channel provided in the center of the filter cartridge and flows out from the outlet pipe connected by the joint to the external pipe. When the gases entrained in the fluid are accumulated in the container, they vent from the exhaust port to the outside.
【0019】[0019]
【実施例】次に濾過装置、それに用いられる容器、配管
継手の構造を実施例により図面を用いて説明する。図1
は本発明で用いる配管継手の構造を示す断面図である。
図中1は該継手が結合され、フィルターカートリッジが
収納されている容器であり、1−1はその内面、1−2
は外面を示す。2は配管であるが、その端部にはブッシ
ュ4が別に開発されている冶具を用いて圧入されてい
る。このブッシュの挿入により該端部は径が拡大されて
いる。その形態は図6に示す通りである。又、ブッシュ
は図5に示す通りの形状を有している。Embodiments Next, the structures of a filtering device, a container used therein, and a pipe joint will be described with reference to the drawings. Figure 1
FIG. 3 is a cross-sectional view showing the structure of a pipe joint used in the present invention.
In the figure, 1 is a container in which the joint is connected and a filter cartridge is housed, 1-1 is its inner surface, 1-2
Indicates the outer surface. Reference numeral 2 is a pipe, and a bush 4 is press-fitted into the end of the pipe 4 by using a jig that has been developed separately. By inserting this bush, the diameter of the end portion is enlarged. Its form is as shown in FIG. Further, the bushing has the shape of as shown in FIG.
【0020】3は締付ナットであり、図7はその斜視図
である。該ナットの外面の約下半分には容器結合部と螺
合自在なネジ山が設けられている。又、その約上半分は
増し締めを容易に行えるように略四面体形状にしてあ
る。ナット内面は配管が遊貫しうる円筒部とその下にブ
ッシュを挿入されて拡大された配管部が遊貫しうる円筒
部の二段になった円筒状に形成されている。そして、そ
の段差部が図1のAのエッジシールに作用しているので
ある。Reference numeral 3 is a tightening nut, and FIG. 7 is a perspective view thereof. A screw thread is provided on the lower half of the outer surface of the nut so that the nut can be screwed into the container connecting portion. Further, about the upper half thereof is formed into a substantially tetrahedral shape so that the additional tightening can be easily performed. The inner surface of the nut is formed in a cylindrical shape having two stages, that is, a cylindrical portion through which the pipe can freely pass and a cylindrical portion through which a bush is inserted and which is enlarged can loosely penetrate. The stepped portion acts on the edge seal A in FIG.
【0021】次に上記の容器と配管の継手の結合態様を
説明する。容器の流体出入口及び排気口に設けられた結
合部は、図1に示す通り外周が締付ナットと螺合しうる
ように螺刻されている容器ネジ部1−3(その下端に増
し締め可能な余裕部が設けられている)、及び拡大され
た配管末端と嵌合するテーパー状の配管嵌合部1−4、
及びブッシュと嵌合する平行円筒状のブッシュ嵌合部1
−5とから構成されている。Next, the manner of connecting the above-mentioned container and pipe joints will be described. As shown in FIG. 1, the joint portions provided at the fluid inlet and outlet of the container are threaded so that the outer periphery can be screwed with the tightening nut. And a tapered pipe fitting portion 1-4 that fits with the enlarged pipe end,
And a parallel cylindrical bush fitting portion 1 that fits with the bush
-5 and.
【0022】この容器結合部に端部にブッシュを圧入さ
れた配管を挿通した締付ナットを螺合する。該ナットを
締付けることによりナット内面の段差部のエッジが、拡
大された配管の外面に食い込み(A)、その力が配管と
ブッシュの接面、さらにはブッシュ端面と容器の接触面
(B)に伝えられて強固に容器と配管は結合され、且つ
シールがなされる。すなわち、シールは図1のAの締付
ナットの内面段差部のエッジと拡大配管部とのエッジシ
ール及びBの容器とブッシュ端面との面シールで完全に
なされるのである。A tightening nut, which is inserted through a pipe having a bush press-fitted at its end, is screwed into the container connecting portion. By tightening the nut, the edge of the stepped portion on the inner surface of the nut bites into the outer surface of the enlarged pipe (A), and its force is applied to the contact surface between the pipe and the bush, and further to the contact surface between the bush end surface and the container (B). The container and the pipe are firmly connected to each other by being transmitted, and a seal is made. That is, the seal is completely completed by the edge seal between the edge of the stepped portion on the inner surface of the tightening nut of FIG. 1A and the enlarged piping portion and the surface seal between the container of B and the end surface of the bush.
【0023】図2は容器の1例を示す断面図である。図
中1−6は容器蓋体部、1−7は容器ポット部、5−1
はディスクフィルターカートリッジ、1−8は流入口、
1−9は流出口、1−10は排気口である。なお、図2
の容器では蓋体とポットはフランジ部のボルトにより固
着されているが、例えば図3に示すように両者の固着方
法としては着脱自在な金属製バンド状の締付具を用いた
方法等の方法をとることができる。なお、図3中の1−
6〜1−10は図2と同じ意味を有し、1−11はクラ
ンクバンド(閉蓋具)である。FIG. 2 is a sectional view showing an example of the container. In the figure, 1-6 is a container lid part, 1-7 is a container pot part, 5-1.
Is a disk filter cartridge, 1-8 is an inlet,
1-9 is an outflow port and 1-10 is an exhaust port. Note that FIG.
In the container, the lid and the pot are fixed to each other by the bolts on the flange portion. For example, as shown in FIG. 3, a method using a detachable metal band-shaped fastener is used as a method for fixing the two. Can be taken. Note that 1- in FIG.
Reference numerals 6 to 1-10 have the same meanings as in FIG. 2, and reference numeral 1-11 is a crank band (closing device).
【0024】フィルターカートリッジはフッ素樹脂のメ
ンブレンフィルターをプラスチック製支持部材で支持し
たディスクを10〜20枚程度重ね中央に流出孔を設け
たディスクフィルターカートリッジ(5−1)や図3に
示すようなプリーツフィルターカートリッジ(5−2)
又はホローファイバーカートリッジ等が使用される。The filter cartridge is a disc filter cartridge (5-1) in which 10 to 20 discs each having a fluororesin membrane filter supported by a plastic support member are stacked and an outflow hole is provided in the center, or a pleat as shown in FIG. Filter cartridge (5-2)
Alternatively, a hollow fiber cartridge or the like is used.
【0025】[0025]
【発明の効果】本発明の濾過装置はその要部である容器
に組み込まれた配管継手が従来の継手に比べ接合部が少
ない簡単な構造であって、液溜りがほとんどできず、し
かもシールが完全になされるという効果がある。又、配
管結合操作も締付ナットを締め込み、必要により増し締
めするだけでよいという簡便さがあり、誤操作も少な
く、繰り返し使用も可能という効果がある他、加工も容
易で経済的であり、継手部分がコンパクトで外力に対す
る強度も大きいという効果もある。EFFECTS OF THE INVENTION The filtration device of the present invention has a simple structure in which the pipe joint incorporated in the container, which is the main part, has fewer joints than the conventional joints, and almost no liquid pool can be formed, and a seal is provided. It has the effect of being completely done. In addition, the pipe connection operation is convenient because it is only necessary to tighten the tightening nut and retighten it if necessary, and there are few mistaken operations and the effect that it can be used repeatedly, and it is easy and economical to process. There is also an effect that the joint portion is compact and has high strength against external force.
【図1】本発明で用いる容器に組み込まれた配管継手の
構造を示す断面図。FIG. 1 is a sectional view showing the structure of a pipe joint incorporated in a container used in the present invention.
【図2】本発明のフィルターカートリッジを収納した容
器の1例を示す断面図。FIG. 2 is a sectional view showing an example of a container accommodating the filter cartridge of the present invention.
【図3】容器の他の例を示す断面図。FIG. 3 is a cross-sectional view showing another example of the container.
【図4】クランプバンドの1例を示す平面図。FIG. 4 is a plan view showing an example of a clamp band.
【図5】ブッシュの斜視図。FIG. 5 is a perspective view of a bush.
【図6】端部にフレア付きブッシュを圧入された配管の
部分平面図。FIG. 6 is a partial plan view of a pipe in which a flared bush is press-fitted into an end portion.
【図7】締付ナットの斜視図。FIG. 7 is a perspective view of a tightening nut.
1 容器 1−1 容器内面 1−2 容器外面 1−3 容器ネジ部 1−4 容器のテーパー状拡大配管嵌合部 1−5 容器のブッシュ嵌合部(平行円筒部分) 1−6 容器蓋体部 1−7 容器ポット部 1−8 流入口 1−9 流出口 1−10 排気口 1−11 クランプバンド(閉蓋具) 2 配管 3 締付ナット 3−1 締付ナットネジ部 4 ブッシュ 5−1 ディスクフイルターカートリッジ 5−2 プリーツフイルターカートリッジ A エッジシール B 面シール 1 container 1-1 Inner surface of container 1-2 Container outer surface 1-3 Container screw part 1-4 Tapered expansion pipe fitting part of container 1-5 Container bushing fitting part (parallel cylindrical part) 1-6 Container lid part 1-7 Container pot part 1-8 Inlet 1-9 Outlet 1-10 Exhaust port 1-11 Clamp band (closure tool) 2 piping 3 Tightening nut 3-1 Tightening nut screw part 4 bush 5-1 Disc filter cartridge 5-2 Pleated filter cartridge A Edge seal B side seal
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B01D 27/08 B01D 35/00 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) B01D 27/08 B01D 35/00
Claims (7)
トとブッシュとからなる濾過装置用の配管継手組み込み
容器であって、 フィルター収納用容器は、その蓋体もしくは底面に、
側面の略上半部に締付ナットと螺合するネジ山が刻ま
れ、且つその下部にはブッシュ端面と面シールを行うた
めの段状平面が設けられている流体の流入口及び流出口
並びに必要により排気口が設けられていること、 配管は、フレア付ブッシュが圧入され、拡径した端部
を有すること、 締付ナットは、その外面の略上半分が四面体形状を有
し、且つその下部には上記容器の流入出口及び排気口と
螺合するネジ山が刻まれており、その内面には配管を貫
装する円筒部とその下方に拡径配管端部を貫装する円筒
部が段状に設けられていること、 上記容器と配管の結合はの締付ナットを の容器の
ネジ穴に螺合することにより行われ、シールは該締付ナ
ット内面の段差部にあるエッジが配管の端部にある拡径
部に食い込み、その力が配管とブッシュの接面及びブッ
シュ端面と容器の接面に伝達することによって行われる
こと、 を特徴とする配管継手付濾過容器。1. A container for storing a filter, a pipe, and a tightening nut.
Built-in pipe joint for filtration equipment consisting of
A container, The filter storage container has a lid or bottom
A screw thread that engages with the tightening nut is engraved on the upper half of the side surface.
And the bottom surface of the bush is face-sealed.
Fluid inlets and outlets with stepped planes for
And that an exhaust port is provided if necessary, The pipe has a flared bush press-fitted to expand the diameter of the end.
Having The upper half of the outer surface of the tightening nut has a tetrahedral shape.
In addition, the lower part of the container has an inflow port and an exhaust port of the container.
Threads to be screwed are engraved, and the inner surface of the thread penetrates the pipe.
Cylinder to be installed and a cylinder to penetrate the end of the expanded pipe under it
That the parts are provided in steps, To connect the above-mentioned container and piping, use the tightening nut In a container
It is made by screwing it into the screw hole, and sealing is done by the tightening nut.
Expansion on the edge of the inner surface of the pipe where the stepped edge is at the end of the pipe
Bites into the pipe, and the force is applied to the contact surface between the pipe and bush and the bush.
It is done by transmitting to the contact surface of the container
thing, A filtration container with a pipe joint characterized by:
請求項1記載の配管継手付濾過容器。2. The filtration container with a pipe joint according to claim 1, wherein the material of the portion in contact with the fluid is resin.
の配管継手付濾過容器。3. The filtration container with a pipe joint according to claim 2, wherein the resin is a fluororesin.
ィルターカートリッジを収納した半導体製造用濾過装
置。4. A filtration device for semiconductor manufacturing, wherein a filter cartridge is housed in the filtration container with a pipe joint according to claim 1.
レンフィルターをプラスチック支持体で支持したディス
クフィルターを積み重ねたもの又はプリーツフィルター
もしくはホローファイバーフィルターのカートリッジで
ある請求項4記載の濾過装置。5. The filtration device according to claim 4, wherein the filter cartridge is a stack of disk filters in which a resin membrane filter is supported by a plastic support, or a pleated filter or hollow fiber filter cartridge.
略下半分に設け、その上に締付用の四面体形状を形成
し、内面にエッジを有する段状円筒形を設けた締付ナッ
トとフレア付ブッシュを圧入され拡径した端部を有する
配管とからなる濾過装置用容器に組み込まれる配管継
手。6. A tightening method wherein a screw thread for directly screwing into a container is provided on a substantially lower half of an outer surface, and a tetrahedron shape for tightening is formed on the screw thread, and a stepped cylindrical shape having an edge on an inner surface is provided. A pipe joint to be incorporated in a container for a filtering device, which comprises a nut with a flare and a pipe having a diameter-increased end portion into which a bush with a flare is pressed.
の配管継手。7. The pipe joint according to claim 6, wherein the material is a fluororesin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32900792A JP3373234B2 (en) | 1992-11-16 | 1992-11-16 | Filtration vessel with pipe fitting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32900792A JP3373234B2 (en) | 1992-11-16 | 1992-11-16 | Filtration vessel with pipe fitting |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06154519A JPH06154519A (en) | 1994-06-03 |
JP3373234B2 true JP3373234B2 (en) | 2003-02-04 |
Family
ID=18216565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32900792A Expired - Fee Related JP3373234B2 (en) | 1992-11-16 | 1992-11-16 | Filtration vessel with pipe fitting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3373234B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60140910D1 (en) | 2000-05-12 | 2010-02-04 | Pall Corp | filtration systems |
KR100826622B1 (en) | 2000-05-12 | 2008-05-02 | 폴 코포레이션 | Filters |
JP5086233B2 (en) * | 2008-12-17 | 2012-11-28 | 東洋濾紙株式会社 | Connection structure for capsule cartridge |
-
1992
- 1992-11-16 JP JP32900792A patent/JP3373234B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH06154519A (en) | 1994-06-03 |
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