JP3371562B2 - Surface acoustic wave filter - Google Patents

Surface acoustic wave filter

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Publication number
JP3371562B2
JP3371562B2 JP20183794A JP20183794A JP3371562B2 JP 3371562 B2 JP3371562 B2 JP 3371562B2 JP 20183794 A JP20183794 A JP 20183794A JP 20183794 A JP20183794 A JP 20183794A JP 3371562 B2 JP3371562 B2 JP 3371562B2
Authority
JP
Japan
Prior art keywords
electrode
electrodes
surface acoustic
positive
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP20183794A
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Japanese (ja)
Other versions
JPH0865087A (en
Inventor
憲明 松本
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Daishinku Corp
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Daishinku Corp
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Priority to JP20183794A priority Critical patent/JP3371562B2/en
Publication of JPH0865087A publication Critical patent/JPH0865087A/en
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Publication of JP3371562B2 publication Critical patent/JP3371562B2/en
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Expired - Fee Related legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は弾性表面波を利用したフ
ィルタに関し、更に詳しくは、トランスバーサル型の弾
性表面波フィルタに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave filter, and more particularly to a transversal surface acoustic wave filter.

【0002】[0002]

【従来の技術】トランスバーサル型の弾性表面波フィル
タにおいては、一般に、圧電性基板の表面に、正・負の
すだれ状電極が互いにかみあった弾性表面波変換器(I
DT)を2つ設け、一方を入力用、他方を出力用とし
て、入力用の変換器に入力した電圧信号によって励起さ
れた弾性表面波を、出力用の変換器によって電圧信号に
変換して外部に出力するようになっている。
2. Description of the Related Art In a transversal type surface acoustic wave filter, generally, a surface acoustic wave converter (I) in which positive and negative interdigital electrodes are interdigitated with each other on a surface of a piezoelectric substrate.
DT) provided two, one for input and the other for output, the surface acoustic wave excited by the voltage signal input to the input converter is converted into a voltage signal by the output converter and externally It is designed to output to.

【0003】ところで、この種の弾性表面波フィルタに
おいては、従来、各変換器の双方向性損失のために挿入
損失が大きく、各変換器において100%の変換が行わ
れたとしても6dbの損失はやむを得ないものとされて
いたが、近年、変換器として一方向性のものを用いるこ
とによって損失を低減することが図られている。
By the way, in this type of surface acoustic wave filter, conventionally, the insertion loss is large due to the bidirectional loss of each converter, and even if 100% conversion is performed in each converter, a loss of 6 db is achieved. Although it has been unavoidable, loss has been recently reduced by using a unidirectional converter.

【0004】弾性表面波変換器に一方向性を持たせる方
法としては各種のものが知られているが、なかでも、励
起した弾性表面波の電極内での反射を積極的に利用し
た、浮き電極を用いた一方向性の変換器は、外部に移相
器等を要することなく、比較的簡単な構成のもとに一方
向性が得られる点において、他の方法に基づく一方向性
変換器に対して優れている。
Various methods are known for imparting unidirectionality to the surface acoustic wave converter. Among them, the floating method which positively utilizes the reflection of the excited surface acoustic wave in the electrode is known. A unidirectional converter using electrodes is a unidirectional converter based on another method in that unidirectionality can be obtained with a relatively simple structure without the need for an external phase shifter. Excellent for vessels.

【0005】浮き電極を利用した一方向性の弾性表面波
変換器では、それぞれ中心周波数に対応した間隔λ0
複数の電極指が配列された正・負のすだれ状電極の各電
極指間に、これらの間の中心位置からずれた位置に浮き
電極を設けた構造が採られるが、その浮き電極として
は、個々の浮き電極が他と短絡されない開放型のもの
と、例えば隣接する2個の浮き電極どうしを連結電極に
よって短絡させた短絡型のもの、あるいはこれらを組み
合わせたものもが提案されている(特開昭61−691
6号)。
In a unidirectional surface acoustic wave converter using a floating electrode, a plurality of electrode fingers are arrayed at intervals λ 0 corresponding to the center frequency, respectively, between positive and negative interdigital electrodes. , A structure in which floating electrodes are provided at positions deviated from the center position between them is used. As the floating electrodes, there are an open type in which each floating electrode is not short-circuited with other floating electrodes and, for example, two adjacent floating electrodes. A short-circuit type in which floating electrodes are short-circuited with a connecting electrode or a combination of these has been proposed (Japanese Patent Laid-Open No. 61-691).
No. 6).

【0006】[0006]

【発明が解決しようとする課題】ところで、トランスバ
ーサル型弾性表面波フィルタにおいて、帯域特性を所望
の特性となるようにするためには、入力用変換器に重み
付けをする必要がある。すなわち、この種のフィルタに
おいては、周波数帯域の仕様によっては、図9に示すよ
うに、入力用変換器1の正と負のすだれ状電極11と1
2の各電極指の重なり幅を、各電極指の配列方向に順次
変化させる必要が生じるとともに、必要に応じて変換器
1内において弾性波の位相を反転させるべく、一方の極
性の電極指を、定常的な間隔λ0 の1/2の間隔を開け
て連続的に2本形成し、その2本の電極指を挟んで他方
の極性の電極指をλ0 の3/2の間隔で形成した、いわ
ゆる位相反転部Tを設ける必要がある。
By the way, in the transversal type surface acoustic wave filter, in order to obtain a desired band characteristic, it is necessary to weight the input transducer. That is, in this type of filter, depending on the specifications of the frequency band, as shown in FIG. 9, the positive and negative interdigital transducers 11 and 1 of the input converter 1 are provided.
It is necessary to sequentially change the overlapping width of the electrode fingers of No. 2 in the arrangement direction of the electrode fingers, and in order to invert the phase of the elastic wave in the transducer 1 if necessary, one electrode finger of one polarity is used. , Two electrodes are continuously formed at an interval of 1/2 of the regular interval λ 0 , and the electrode fingers of the other polarity are formed at an interval of 3/2 of λ 0 with the two electrode fingers sandwiched therebetween. It is necessary to provide the so-called phase inversion unit T.

【0007】従来、浮き電極を配置して一方向性を持た
せ、しかも上記のような重み付けを施した変換器を用い
た弾性表面波フィルタは実用化されておらず、重み付け
された変換器における浮き電極の配置の仕方、あるいは
位相反転部の存在下における浮き電極の取扱い等の具体
的な事例については、特に詳細な報告はなされていな
い。
Conventionally, a surface acoustic wave filter using a transducer in which floating electrodes are arranged so as to have unidirectionality and which is weighted as described above has not been put into practical use. No detailed reports have been made on specific examples of how to arrange the floating electrode or how to handle the floating electrode in the presence of the phase inversion part.

【0008】従って本発明の目的は、浮き電極を用いた
方向性の付与と重み付けにより、総合的に低挿入損失で
良好な周波数特性を持つ弾性表面波フィルタを提供する
ことにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a surface acoustic wave filter having a low insertion loss and a good frequency characteristic by imparting directionality and weighting using a floating electrode.

【0009】[0009]

【課題を解決するための手段】上記の目的を達成するた
め、本発明(第1発明)の弾性表面波フィルタは、実施
例図面である図1に例示するように、圧電性基板上に入
力用および出力用の2つの弾性表面波変換器1および2
が配設された弾性表面波フィルタにおいて、入力用変換
器1として、その正・負のすだれ状電極11,12の各
電極指どうしの重なり幅を電極指の配列方向に順次変化
させて重み付けを施すとともに、その正・負のすだれ状
電極11,12の各電極指間に、当該入力用変換器1へ
の入力信号により励起される弾性波が出力用変換器2に
向かうよう、その電極指間の中心位置をずらした位置に
浮き電極3を形成した一方向性変換器を採用したことに
よって特徴づけられる。
In order to achieve the above object, the surface acoustic wave filter of the present invention (first invention) is input on a piezoelectric substrate as illustrated in FIG. 1 which is an embodiment drawing. Surface acoustic wave converters 1 and 2 for output and output
In the surface acoustic wave filter provided with, the input transducer 1 is weighted by sequentially changing the overlapping width of the positive and negative interdigital electrodes 11 and 12 in the arrangement direction of the electrode fingers. While applying, the electrode fingers of the positive and negative interdigital electrodes 11 and 12 are arranged so that the elastic wave excited by the input signal to the input transducer 1 is directed to the output transducer 2. It is characterized by adopting a unidirectional converter in which the floating electrode 3 is formed at a position where the center position between them is displaced.

【0010】図3に例示するように、入力用変換器1の
正・負のすだれ状電極11,12の各電極指の重なり幅
を、電極指の配列方向Aに複数のピーク部Pを持って順
次変化するように重み付けするとき、正・負の各電極指
の先端を結ぶ包絡線の内側の領域(ハッチング部)と、
各ピーク部Pにおけるそれぞれのピーク点Paから出力
用変換器2側に向けて各電極指と直交する方向に引いた
線L内の領域(クロスハッチング部)とからなる領域A
i では、当該入力用変換器への信号入力により励起され
る弾性波が出力用変換器2に向かうような位置関係で浮
き電極3bを形成する一方、その領域Ai 以外の領域A
o では、入力用変換器1への信号入力により励起される
弾性波が出力用変換器2とは逆側に向かうような位置関
係で浮き電極3cを形成することが望ましい。
As illustrated in FIG. 3, the overlapping width of each electrode finger of the positive / negative interdigital transducers 11 and 12 of the input converter 1 has a plurality of peak portions P in the arrangement direction A of the electrode fingers. When weighted so as to change sequentially, the area inside the envelope connecting the tips of the positive and negative electrode fingers (hatched portion),
An area A formed by an area (cross hatching area) within a line L drawn from each peak point Pa in each peak portion P toward the output transducer 2 side in a direction orthogonal to each electrode finger.
At i, the floating electrode 3b is formed in such a positional relationship that the elastic wave excited by the signal input to the input transducer is directed to the output transducer 2, while the area A other than the area Ai is formed.
At o, it is desirable to form the floating electrode 3c in such a positional relationship that the elastic wave excited by the signal input to the input transducer 1 goes to the side opposite to the output transducer 2.

【0011】ここで、浮き電極3は、図1のように隣接
する電極指の長さと略同等の長さとするほか、正・負の
すだれ状電極11,12の各電極指の重なり部分のみに
おいて一方向性を持たせるべく、各重なり幅と等しい長
さを持つ浮き電極3aとしてもよい(図2参照)。
Here, the floating electrode 3 has a length substantially equal to the length of the adjacent electrode fingers as shown in FIG. 1, and only in the overlapping portion of the positive and negative interdigital electrodes 11 and 12. The floating electrode 3a may have a length equal to each overlapping width so as to have unidirectionality (see FIG. 2).

【0012】そしてこの場合、入力側変換器1の正およ
び負のすだれ状電極11,12の各電極指のうち、互い
の重なり幅が最大となる最長の電極指11a,12aを
除く各電極指の延長上に、これらの各電極指の先端に生
じる空隙を埋めるよう、それぞれ逆極の電極に接続され
たダミー電極13を形成することがより好ましい(図4
参照)。
In this case, among the electrode fingers of the positive and negative interdigital transducers 11 and 12 of the input side converter 1, the electrode fingers except the longest electrode finger 11a and 12a having the maximum overlapping width. It is more preferable to form the dummy electrodes 13 connected to the electrodes of opposite polarities so as to fill the voids generated at the tips of the respective electrode fingers on the extension of (FIG. 4).
reference).

【0013】また、前記の目的を達成するため本発明の
他の構成(第2発明)として、図5に例示するように、
圧電性基板上に、それぞれ一定の間隔λ0 を開けて複数
の電極指が形成された正・負のすだれ状電極11,12
(21,22)が各電極指の配列方向に互いに重なり合
うように対向配置された弾性表面波変換器からなる、入
力用および出力用の2つの変換器1および2が配設され
た弾性表面波フィルタにおいて、入力用変換器1の正・
負のすだれ状電極11,12の各電極指どうしの重なり
幅を、電極指の配列方向に順次変化するように重み付け
するとともに、その重なり幅が最も短くなる箇所におい
ては、正・負のすだれ状電極のいずれか一方側を上記間
隔λ0 の1/2の間隔を開けて2本形成し、かつ、他方
側をその2本の電極指を挟んで上記間隔λ0 の3/2の
間隔で2本形成した位相反転部Tを設けるとともに、そ
の入力用変換器1の各電極指間には、各電極間の中心位
置からずらした位置にそれぞれ浮き電極3fを形成し、
その浮き電極3fを、互いに隣接する2本ずつをそれぞ
れの一端部において連結電極4によって相互に接続した
短絡型の浮き電極とし、かつ、その連結電極4による各
2本の浮き電極の接続位置を、位相反転部Tを挟んで一
端側から他端側へと逆転させていることによって特徴づ
けられる。
Further, as another configuration (second invention) of the present invention for achieving the above object, as illustrated in FIG.
Positive and negative interdigital electrodes 11 and 12 each having a plurality of electrode fingers formed on a piezoelectric substrate with a constant space λ 0 therebetween.
A surface acoustic wave in which two transducers 1 and 2 for input and output are arranged, which are surface acoustic wave transducers (21, 22) facing each other so as to overlap each other in the arrangement direction of the electrode fingers. In the filter, the input converter 1
The overlapping widths of the electrode fingers of the negative interdigital electrodes 11 and 12 are weighted so as to sequentially change in the arrangement direction of the electrode fingers, and the positive / negative interdigital shape is formed at the position where the overlapping width is the shortest. Two electrodes are formed on either side of the electrode at a distance of 1/2 of the distance λ 0 , and the other side is sandwiched between the two electrode fingers at an interval of 3/2 of the distance λ 0. Two phase inversion parts T are formed, and floating electrodes 3f are formed between the electrode fingers of the input converter 1 at positions displaced from the center position between the electrodes.
The floating electrode 3f is a short-circuit type floating electrode in which two adjacent electrodes are connected to each other at each one end by a connecting electrode 4, and the connecting position of each two floating electrodes by the connecting electrode 4 is set. , And is reversed by sandwiching the phase inversion part T from one end side to the other end side.

【0014】ここで、上記の構成に加えて、入力用変換
1器の各電極指間には、短絡型の浮き電極3fのほか
に、これらとは接続されていない開放型の浮き電極5を
形成してもよい(図6参照)。
Here, in addition to the above-mentioned configuration, between the electrode fingers of the input converter 1, in addition to the short-circuit type floating electrode 3f, an open type floating electrode 5 not connected thereto is provided. It may be formed (see FIG. 6).

【0015】また、入力用変換器1の正・負電極11,
12の各電極指の互いの重なり幅が最大となる最長の電
極指11a,12aを除く各電極指の先端部近傍には、
これらの先端部において生じる空隙を埋めるよう、これ
ら各電極指の延長上に、逆極の電極または浮き電極に接
続されたダミー電極13もしくは6を設けることが望ま
しい(図7,図8参照)。
In addition, the positive and negative electrodes 11 of the input converter 1,
In the vicinity of the tip of each electrode finger except the longest electrode fingers 11a and 12a in which the mutual overlapping width of the 12 electrode fingers is maximum,
It is desirable to provide a dummy electrode 13 or 6 connected to the electrode of the opposite pole or the floating electrode on the extension of each electrode finger so as to fill the void generated at these tip portions (see FIGS. 7 and 8).

【0016】そして、以上の本発明の各構成に加えて、
出力用変換器2として、入力用変換器1と逆向きの方向
性を持つような位置関係のもとに、その正・負のすだれ
状電極21,22の各電極指間に、その電極間の中心位
置をずらした位置に浮き電極7を形成した一方向性変換
器を採用することが望ましい。
In addition to each of the above-mentioned constitutions of the present invention,
As the output converter 2, the positive and negative interdigital transducers 21 and 22 are arranged between the electrode fingers and between the electrodes based on a positional relationship having a directionality opposite to that of the input converter 1. It is desirable to employ a unidirectional converter in which the floating electrode 7 is formed at a position displaced from the center position of.

【0017】[0017]

【作用】入力用変換器1の正・負のすだれ状電極11,
12の各電極指の重なり幅を電極指の配列方向に複数の
ピーク部Pをもって順次変化させることで重み付けが施
され、これらの各電極指の先端を結んだ包絡線を適宜の
形とすることによって所望のフィルタ特性を得ることが
できる。このような入力用変換器1を、浮き電極3を用
いた一方向性変換器とすることにより、電極指対によっ
て励起された弾性表面波を専ら出力用変換器2側へと伝
播させることができ、所望の帯域特性の付与と、挿入損
失の低下並びに帯域内リップルの抑制等の特性の向上を
同時に達成することができる。
[Function] The positive / negative interdigital transducers 11 of the input converter 1,
Weighting is performed by sequentially changing the overlapping width of each electrode finger of 12 with a plurality of peak portions P in the arrangement direction of the electrode fingers, and the envelope connecting the tips of these electrode fingers is formed into an appropriate shape. A desired filter characteristic can be obtained by. By using such an input transducer 1 as a unidirectional transducer using the floating electrode 3, the surface acoustic wave excited by the pair of electrode fingers can be exclusively propagated to the output transducer 2 side. Therefore, it is possible to achieve desired band characteristics and simultaneously improve characteristics such as reduction of insertion loss and suppression of in-band ripple.

【0018】さらに、入力用変換器1の正・負のすだれ
状電極11,12の各電極指どうしの重なり幅を電極指
の配列方向に複数のピーク部Pをもって順次変化させる
ときには、正・負の電極指の先端を結ぶ包絡線の内側の
領域と、各ピーク部Pにおけるそれぞれのピーク点Pa
から出力用変換器2側に向けて各電極指と直交する方向
に引いた線L内の領域とを併せた領域Ai においての
み、当該入力変換器1により励起される弾性波が出力用
変換器に向かうような位置関係で浮き電極3bを形成
し、その領域Ai 以外の領域Ao では、逆向きの方向性
を持たせる位置関係で浮き電極3cを形成すると、入力
用変換器1内における各電極指の重なり部分において発
生する主信号は、その全てが出力用変換器2へと向かう
伝播経路において伝播を阻害されることがないととも
に、不要振動については可能な限り反対側に伝播させる
ことができ、不要振動の相対減衰量がより大きくなる。
Further, when the overlapping width of the positive and negative interdigital electrodes 11 and 12 of the input converter 1 is changed sequentially with a plurality of peak portions P in the arrangement direction of the electrode fingers, the positive and negative Area inside the envelope connecting the tips of the electrode fingers and the respective peak points Pa at the respective peak portions P.
From the input transducer 1 to the output transducer 2 side, the elastic wave excited by the input transducer 1 is generated only in the area Ai including the area within the line L drawn in the direction orthogonal to the electrode fingers. When the floating electrode 3b is formed in such a positional relationship that it is directed toward, and in the area Ao other than the area Ai, the floating electrode 3c is formed in such a positional relationship that it has the opposite directionality, each electrode in the input converter 1 is formed. The main signal generated in the overlapping portion of the fingers is not blocked in the propagation path toward the output converter 2, and unnecessary vibration can be propagated to the opposite side as much as possible. , The relative attenuation of unnecessary vibration becomes larger.

【0019】また、各浮き電極の長さを、正・負の電極
指が重なり合っている部分のみとすることにより、つま
り各電極指の先端を結ぶ包絡線で囲まれた部分のみに浮
き電極3aを設けることにより、各電極指が重なり合っ
ている部分において発生した主信号に強調的に方向性を
持たせることが可能となり、結果として不要振動の相対
減衰量を大きくすることができる。
Further, by making the length of each floating electrode only at the portion where the positive and negative electrode fingers overlap, that is, only at the portion surrounded by the envelope connecting the tips of the respective electrode fingers, the floating electrode 3a. By providing, it becomes possible to give directionality to the main signal generated in the portion where the electrode fingers overlap each other, and as a result, it is possible to increase the relative attenuation amount of unnecessary vibration.

【0020】そして、このような構成において、各電極
指の先端には、最長のものを除いて全く電極が存在しな
い空隙様の領域が形成されることになるが、このような
電極指先端に形成される空隙を、それぞれ逆極の電極に
接続されたダミー電極13で埋めることにより、変換器
1内の規則性が崩れず、変換器1内での信号の反射の乱
れを防止することができ、しかも主信号の方向性を持た
せることができる。
In such a structure, a void-like region where no electrodes exist at all is formed at the tip of each electrode finger except the longest one. By filling the formed voids with the dummy electrodes 13 connected to the electrodes of opposite polarities, the regularity in the converter 1 is not disturbed, and the disturbance of the reflection of signals in the converter 1 can be prevented. In addition, the directivity of the main signal can be provided.

【0021】ところで、入力用変換器1内の浮き電極と
して、短絡型のものを用いることにより、浮き電極の質
量効果のみならず電界効果も相まって、伝播する弾性表
面波の方向性がより顕著になることが知られているが、
このような短絡型の浮き電極の持つ優位性をそのまま生
かして、位相反転部Tを持つ変換器に適用したのが図5
に例示する本発明の他の構成(第2発明)である。
By using a short-circuit type floating electrode in the input converter 1, not only the mass effect of the floating electrode but also the electric field effect are combined, so that the directionality of the propagating surface acoustic wave becomes more remarkable. Is known to be
FIG. 5 shows that the short circuit type floating electrode is applied to a converter having a phase inversion part T by taking advantage of the superiority of the floating electrode.
2 is another configuration (second invention) of the present invention illustrated in FIG.

【0022】位相反転部Tは、定常的に中心波長λ0
間隔を開けて複数の電極指が形成された正・負のすだれ
状電極11,12からなる変換器1において、一方の極
側の電極指の間隔をλ0 /2で2本連続的に形成し、他
方の極側の電極指はその2本の連続する電極指挟んで3
λ0 /2の間隔で形成することによって得られるが、こ
のような位相反転部Tにおいては、正規型の変換器に適
用されるような、各電極指間の浮き電極を2本ずつ一方
側の端部において連結する通常の短絡型の浮き電極を単
純に設けることはできない。そこで、このような電極指
構成において、各電極指間に浮き電極3fを配置し、か
つ、これらを2本ずつ端部において連結電極4によって
連結して短絡型の浮き電極を設けるに当たり、位相反転
部Tを挟んでその両側では、連結電極4による各浮き電
極3fの連結端を一端側から他端側へと反転させる。こ
れにより、位相反転部Tにおいて、短絡型の浮き電極の
空間的な位相整合を達成できる。
The phase inversion part T is one pole side in the converter 1 which is composed of positive and negative interdigital electrodes 11 and 12 in which a plurality of electrode fingers are formed at regular intervals of the central wavelength λ 0. the spacing of the electrode fingers lambda 0/2 by forming the two continuous of the electrode fingers of the other pole sides of the electrode fingers of consecutive two Part 3
lambda 0/2 of it is obtained by forming at intervals, in such a phase inversion unit T, as applied to the normal type transducer, two each on one side of the floating electrode between the electrode fingers It is not possible to simply provide a conventional short-circuit type floating electrode that is connected at the end of the. Therefore, in such an electrode finger configuration, when the floating electrodes 3f are arranged between the respective electrode fingers, and two of them are connected at the end portions by the connecting electrodes 4 to provide a short-circuit type floating electrode, phase inversion is performed. On both sides of the section T, the connection ends of the floating electrodes 3f by the connection electrodes 4 are inverted from one end side to the other end side. Thereby, in the phase inversion part T, the spatial phase matching of the short-circuit type floating electrode can be achieved.

【0023】このような位相反転部Tと短絡型の浮き電
極の組み合わせにおいて、各電極指の間に短絡型の浮き
電極3fとは別に開放型の浮き電極5を設けると、弾性
表面波の方向性はより顕著化される。
In such a combination of the phase inversion part T and the short circuit type floating electrode, if the open type floating electrode 5 is provided between the electrode fingers in addition to the short circuit type floating electrode 3f, the direction of the surface acoustic wave is generated. The sex becomes more prominent.

【0024】また、このような重み付けが施され、か
つ、短絡型の浮き電極によって方向性が付与された変換
器1においても、電極指の重なり幅が狭い箇所では、正
・負の電極指の先端部に電極が存在しない空隙部分が生
じるが、この電極指先端部の空隙部分をダミー電極13
ないしは6によって埋めることにより、変換器1内の規
則性が崩れず、変換器1内での信号の反射の乱れを防止
することができる。ただし、この場合、連結電極4が存
在している部分に形成されるダミー電極6は逆極性の電
極と接続することはできないので、浮き電極としてその
質量効果のみを利用する。
Further, even in the converter 1 which is weighted as described above and is provided with the directivity by the short-circuit type floating electrode, the positive and negative electrode fingers are not overlapped at a portion where the overlapping width of the electrode fingers is narrow. There is a void in the tip where no electrode exists.
Or by filling with 6 or 6, the regularity in the converter 1 is not broken, and the disturbance of the reflection of the signal in the converter 1 can be prevented. However, in this case, since the dummy electrode 6 formed in the portion where the connecting electrode 4 is present cannot be connected to the electrode having the opposite polarity, only the mass effect is used as the floating electrode.

【0025】以上の各構成において、出力用変換器2の
各電極指間に、入力用変換器1とは逆向きの方向性を持
たせるような位置関係のもとに浮き電極7を配置するこ
とで一方向性を付与すると、入力用変換器1により励起
された弾性表面波の通過損を少なくでき、挿入損失はよ
り低減する。
In each of the above-mentioned configurations, the floating electrode 7 is arranged between the electrode fingers of the output converter 2 in such a positional relationship that it has a directionality opposite to that of the input converter 1. Thus, if unidirectionality is given, the passage loss of the surface acoustic wave excited by the input converter 1 can be reduced, and the insertion loss can be further reduced.

【0026】[0026]

【実施例】図1は本発明の第1実施例の電極構成を示す
模式図である。圧電性基板の表面に入力用変換器1と出
力用変換器2が形成されている。これらの入力用変換器
1および出力用変換器2はともに、それぞれが複数の電
極指からなる正・負のすだれ状電極11,12、あるい
は21,22を、各電極指が互いに重なり合うように配
置してなる、いわゆるインターデジタルトランスジュー
サ(IDT)である。そして、フィルタへの入力信号は
入力用変換器1の正のすだれ状電極11に供給され、出
力信号は出力用変換器2の正のすだれ状電極21から外
部に取り出される。
FIG. 1 is a schematic diagram showing the electrode structure of the first embodiment of the present invention. An input transducer 1 and an output transducer 2 are formed on the surface of a piezoelectric substrate. Both the input converter 1 and the output converter 2 are arranged so that the positive and negative interdigital electrodes 11, 12 or 21, 22 each consisting of a plurality of electrode fingers are overlapped with each other. It is a so-called interdigital transducer (IDT). Then, the input signal to the filter is supplied to the positive interdigital transducer 11 of the input converter 1, and the output signal is taken out from the positive interdigital transducer 21 of the output converter 2.

【0027】入力用変換器1には、正・負のすだれ状電
極11および12の各電極指の重なり幅が電極指の配列
方向に順次変化する、いわゆるアポダイズ法に基づく重
み付けが施されており、位相反転部Tを有している。す
なわち、正・負の各すだれ状電極11および12は、基
本的には、それぞれフィルタの通過帯域の中心周波数に
対応する波長(中心波長)λ0 と等しい間隔のもとに電
極指が形成されているとともに、互いの重なり幅が最小
となる部分では、一方の電極側の電極指がλ0/2の間
隔で2本連続しており、その2本の電極指を挟んで、他
方の電極側の電極指が3λ0 /2の間隔で設けられてい
る。
The input converter 1 is weighted according to the so-called apodization method, in which the overlapping width of each electrode finger of the positive and negative interdigital transducers 11 and 12 sequentially changes in the arrangement direction of the electrode fingers. , And a phase inversion unit T. That is, the positive and negative comb-shaped electrodes 11 and 12 basically have electrode fingers formed at intervals equal to the wavelength (center wavelength) λ 0 corresponding to the center frequency of the pass band of the filter. and with which, in the portion where the overlapping width of each other is minimized, the electrode fingers of one electrode side are contiguous two at intervals of lambda 0/2, across the two electrode fingers, the other electrode side of the electrode fingers are provided at intervals of 3 [lambda] 0/2.

【0028】また、この入力用変換器1の正・負の各電
極指間には、各電極の中心位置から出力用変換器2側に
偏った位置に、それぞれの電極指と同等の長さを持つ浮
き電極3が設けられており、正・負のすだれ状電極1
1,12によって励振された弾性表面波の位相と、その
弾性表面波の浮き電極3による反射波の位相とが、出力
用変換器2側に向く方向に同位相に、その逆向きには逆
位相となるような位置関係で浮き電極3が配置されてい
る。このような浮き電極3の存在によって、この入力用
変換器1は、その励振波が出力用変換器2側に向く一方
向性変換器となっている。
Further, between the positive and negative electrode fingers of the input transducer 1, a length equivalent to that of each electrode finger is provided at a position deviated from the center position of each electrode to the output transducer 2 side. Is provided with a floating electrode 3 having positive and negative interdigital electrodes 1
The phases of the surface acoustic waves excited by 1 and 12 and the phase of the surface acoustic waves reflected by the floating electrode 3 are in the same phase in the direction toward the output converter 2 side and opposite in the opposite direction. The floating electrodes 3 are arranged in such a positional relationship that they are in phase. Due to the presence of the floating electrode 3, the input converter 1 is a unidirectional converter whose excitation wave is directed to the output converter 2 side.

【0029】一方、出力用変換器2は正規型のIDTで
あるが、その各電極指間には、上記した入力用変換器1
とは逆向きの方向性を持たせるべく浮き電極7が設けら
れている。すなわち、出力用変換器2の浮き電極7は、
正・負のすだれ状電極21,22の各電極指間の中心位
置から、入力用変換器1側にずれた位置に配置されてお
り、入力用変換器1から到来する弾性表面波を主として
電圧信号に変換することができる。
On the other hand, the output converter 2 is a normal type IDT, and the above-mentioned input converter 1 is provided between the respective electrode fingers.
The floating electrode 7 is provided so as to have a directionality opposite to that of. That is, the floating electrode 7 of the output converter 2 is
The positive and negative interdigital transducers 21 and 22 are arranged at positions displaced from the center position between the electrode fingers to the input transducer 1 side, and the surface acoustic waves coming from the input transducer 1 are mainly subjected to voltage. It can be converted into a signal.

【0030】以上の実施例によると、入力用変換器1の
重み付けにより所望の周波数帯域特性に調整された弾性
表面波は、浮き電極3の存在によってその殆どが出力用
変換器2側へと向かい、出力用変換器2では、同じく浮
き電極7の存在によって入力用変換器1から伝播してく
る主信号のみを電圧信号に変換するとともに、基板の端
部等において反射した不要振動を電圧信号に変換するこ
とがなく、低挿入損失でなおかつ帯域特性の優れた弾性
表面波フィルタとなる。
According to the above-described embodiments, most of the surface acoustic waves adjusted to have a desired frequency band characteristic by weighting the input transducer 1 are directed to the output transducer 2 side due to the presence of the floating electrode 3. In the output converter 2, only the main signal propagating from the input converter 1 is converted into a voltage signal by the presence of the floating electrode 7, and unnecessary vibration reflected at the end portion of the substrate is converted into a voltage signal. A surface acoustic wave filter that does not undergo conversion, has a low insertion loss, and has excellent band characteristics.

【0031】図2は本発明の第2実施例の要部電極構成
を示す模式図であり、入力用変換器1のみを抽出して示
している。この第2実施例の特徴は、入力用変換器1内
に設けられる浮き電極3aの長さにあり、正・負のすだ
れ状電極11,12そのもののパターン、その各電極指
に対する浮き電極3aの電極指配列方向への位置関係、
並びに出力用変換器2(図2において図示せず)の構成
は、図1のものと全く同様である。
FIG. 2 is a schematic diagram showing the essential electrode structure of the second embodiment of the present invention, in which only the input converter 1 is extracted and shown. The feature of the second embodiment lies in the length of the floating electrode 3a provided in the input converter 1, the pattern of the positive / negative interdigital electrodes 11, 12 itself, and the floating electrode 3a for each electrode finger. Positional relationship in the electrode finger array direction,
The configuration of the output converter 2 (not shown in FIG. 2) is exactly the same as that of FIG.

【0032】この第2実施例では、入力用変換器1内の
浮き電極3aは、正・負のすだれ状電極11,12の重
なり幅と略同じ長さになっており、正・負のすだれ状電
極11,12の各電極指の先端を結ぶ包絡線で囲まれた
領域内においてのみ、浮き電極3aによる方向性が付与
されている。
In the second embodiment, the floating electrode 3a in the input converter 1 has substantially the same width as the overlapping width of the positive / negative interdigital transducers 11 and 12, and the positive / negative interdigital transducers. The directionality of the floating electrode 3a is given only in the region surrounded by the envelope connecting the tips of the electrode fingers of the strip electrodes 11, 12.

【0033】この種の重み付けが付与された変換器にお
いては、各電極指が重なり合っている部分、換言すれば
各電極指の先端を結ぶ包絡線の内側において主信号とな
る弾性表面波が励起されることから、上記のような浮き
電極3aによれば、主信号の方向性のみが強調され、不
要振動成分波(不要信号)の主信号に対する相対減衰量
を大きくすることができ、図1の構成に比してスプリア
スを低く抑えることができるという利点がある。
In this type of weighted transducer, a surface acoustic wave serving as a main signal is excited inside a portion where the electrode fingers overlap each other, in other words, inside an envelope connecting the tips of the electrode fingers. Therefore, according to the floating electrode 3a as described above, only the directivity of the main signal is emphasized, and the relative attenuation amount of the unwanted vibration component wave (unwanted signal) with respect to the main signal can be increased. Compared with the configuration, there is an advantage that spurious can be suppressed low.

【0034】図3は本発明の第3実施例の説明図で、
(A)はその電極構成を示す模式図であり、(B)はそ
の入力用変換器1の概念図と作用説明図とを併記して示
す図である。
FIG. 3 is an explanatory view of the third embodiment of the present invention.
(A) is a schematic diagram showing the electrode configuration, and (B) is a diagram showing a conceptual diagram and an operation explanatory diagram of the input converter 1 together.

【0035】この第3実施例において入力用変換器1の
正・負のすだれ状電極11,12そのもののパターン、
出力用変換器2の構成は先の各例と同様であるが、入力
用変換器1内の浮き電極は、その変換器1内の2つの領
域Ai とAo において互いに逆向きの方向性を付与すべ
く、各電極指に対して互いに異なる位置関係を持つ2種
の浮き電極3bと3cが設けられている。
In the third embodiment, the pattern of the positive / negative interdigital transducers 11 and 12 themselves of the input converter 1,
The structure of the output converter 2 is the same as that of the previous examples, but the floating electrode in the input converter 1 is provided with directivity opposite to each other in the two regions Ai and Ao in the converter 1. Therefore, two types of floating electrodes 3b and 3c having different positional relationships from each other are provided for each electrode finger.

【0036】すなわち、入力用変換器1の重なり幅は電
極指の配列方向に複数のピーク部Pを持ちつつ順次変化
しており、正・負の各電極指の先端を結ぶ包絡線の内側
の領域(ハッチング部)と、各ピーク部Pにおける上下
のピーク点Paから、出力用変換器2側に向けて各電極
指と直交する方向に引いた線Lの内側の領域(クロスハ
ッチング部)とを併せた領域Ai 内には、信号入力によ
り励起された弾性表面波が出力用変換器2側に向く方向
性を持たせるための浮き電極3bが、他の領域Ao 内に
は、これとは逆向きの方向性を持たせるための浮き電極
3cが設けられている。具体的には、領域Ai 内の浮き
電極3bは、各電極指に対してその配列方向に図1,図
2の浮き電極3または3aと同等の位置関係で、領域A
o 内の浮き電極3cは、各電極指の中心位置から上記と
は逆向きに偏った位置に配置されている。
That is, the overlapping width of the input transducer 1 changes sequentially while having a plurality of peak portions P in the arrangement direction of the electrode fingers, and the overlap width of the inside of the envelope connecting the tips of the positive and negative electrode fingers is increased. A region (hatched portion) and a region (cross hatched portion) inside a line L drawn from the upper and lower peak points Pa in each peak portion P toward the output converter 2 in a direction orthogonal to each electrode finger. The floating electrode 3b for directing the surface acoustic wave excited by the signal input to the output transducer 2 side is provided in the area Ai combined with the area Ai, and the floating electrode 3b is provided in the other area Ao. A floating electrode 3c is provided to have a reverse directionality. Specifically, the floating electrode 3b in the area Ai has the same positional relationship as the floating electrode 3 or 3a in FIGS.
The floating electrode 3c inside is placed at a position deviated from the center position of each electrode finger in the opposite direction to the above.

【0037】この第3実施例の構成によると、各電極指
の先端を結ぶ包絡線の内側である主信号波の励起領域に
おいて、図2の例と同様に出力用変換器2側へと向く方
向性が付与されるとともに、上記包絡線の外側であって
もその主信号波が伝播する領域、(B)図においてクロ
スハッチングで示すような領域、においても同じ向きへ
の方向性が付与される結果、弾性表面波の全伝播路上で
反射等が生じない。また、以上のような主信号波の励起
領域とその伝播領域とを合わせた領域Ai を除く領域A
o においては、浮き電極3cによってこれとは逆向きの
方向性が与えられるから、発生した不要信号波のうち、
主信号波の伝播領域を除く領域で発生した不要信号波が
出力用変換器2とは逆向きに伝播することになり、図2
の例に比して不要信号の相対減衰量を更に大きくするこ
とができ、スプリアスの低減効果はより大きなものとな
る。
According to the configuration of the third embodiment, in the excitation region of the main signal wave, which is inside the envelope connecting the tips of the electrode fingers, it faces the output converter 2 side as in the example of FIG. The directionality is imparted, and the directionality in the same direction is imparted even in a region where the main signal wave propagates even outside the envelope, in a region shown by cross hatching in FIG. As a result, reflection or the like does not occur on the entire propagation path of the surface acoustic wave. In addition, the area A excluding the area Ai that combines the main signal wave excitation area and its propagation area as described above.
At o, the floating electrode 3c gives a direction opposite to that of the floating electrode 3c.
The unnecessary signal wave generated in the area other than the propagation area of the main signal wave propagates in the direction opposite to that of the output converter 2.
The relative attenuation amount of the unnecessary signal can be further increased as compared with the above example, and the spurious reduction effect is further enhanced.

【0038】図4は本発明の第4実施例の入力用変換器
1のみを抽出して示す要部電極構成の模式図である。こ
の第4実施例における特徴は、第3実施例の構成に加え
て、入力用変換器1の正・負のすだれ状電極11,12
の各電極指の先端部に生じる電極の不存在部分である空
隙部分を埋めるように、逆極性の電極に接続されたダミ
ー電極13(図中黒色で示す)を形成した点にある。
FIG. 4 is a schematic view of the essential electrode structure showing only the input converter 1 of the fourth embodiment of the present invention. The feature of the fourth embodiment is that, in addition to the structure of the third embodiment, positive / negative interdigital transducers 11 and 12 of the input converter 1 are provided.
The dummy electrode 13 (shown in black in the figure) connected to the electrode of the opposite polarity is formed so as to fill the void portion which is the nonexistent portion of the electrode generated at the tip of each electrode finger.

【0039】入力用変換器3に例えばアポダイズ法に基
づく重み付けを与えると、先の例の図3からも明らかな
ように、電極指の重なり幅が最大となる最長の正・負の
電極指(図3において最大のピーク部Pにおけるピーク
点Paに相当する電極指)を除く電極指の先端部には、
いずれの電極も存在しない空隙部分が生じる。そこで、
第4実施例では、正・負の各電極指のうち、最長の電極
指11aおよび12aを除く各電極指の延長上に、その
電極指とは逆極性の電極に接続されたダミー電極13が
設けられている。
When the input transducer 3 is weighted based on, for example, the apodization method, as is clear from FIG. 3 of the above example, the longest positive / negative electrode finger ( In the tip parts of the electrode fingers excluding the electrode finger corresponding to the peak point Pa in the maximum peak part P in FIG.
A void portion is formed in which neither electrode exists. Therefore,
In the fourth embodiment, among the positive and negative electrode fingers, a dummy electrode 13 connected to an electrode having a polarity opposite to that of the electrode finger is formed on the extension of each electrode finger except the longest electrode fingers 11a and 12a. It is provided.

【0040】正・負のすだれ状電極11,12の各電極
指間には、図3の例と同様に、その図3(B)において
定義付けられた領域Ai 内には出力用変換器2側に向く
方向性を付与するための浮き電極3bが、また同じく他
の領域Ao 内にはこれとは逆向きの方向性を付与するた
めの浮き電極3cが配置されているとともに、各ダミー
電極13にも、領域Ai 内においては浮き電極3bと同
等の位置関係のもとに、従って出力用変換器2に向く方
向性を持たせるための浮き電極3dが、また、領域Ao
内においては浮き電極3cと同等の位置関係のもとに、
従って出力用変換器2とは逆向きへの方向性を持たせる
ための浮き電極3eが隣接配置されている。
Between the electrode fingers of the positive / negative interdigital transducers 11 and 12, as in the example of FIG. 3, the output converter 2 is provided in the area Ai defined in FIG. 3 (B). The floating electrode 3b for giving the directionality toward the side and the floating electrode 3c for giving the directionality opposite to this are arranged in the other area Ao, and each dummy electrode 13 also has a floating electrode 3d in the area Ai, which has the same positional relationship as that of the floating electrode 3b, and therefore has a directionality toward the output converter 2.
Inside, in the same positional relationship as the floating electrode 3c,
Therefore, the floating electrode 3e for providing the direction opposite to the output converter 2 is arranged adjacently.

【0041】このような構成によると、入力用変換器1
内の電極パターンの規則性が崩れることがなく、前記し
た第3実施例における作用効果に加えて、領域Ai 内に
おける主信号の伝播路上の電極配置の周期性が保たれ、
信号の内部反射の乱れが抑制されるとともに、領域Ao
内における不要信号の伝播路上の電極配置の周期性が保
たれて、不要信号の変換器1内での回折や多重反射等が
生じにくく、出力用変換器2には主信号のみが強調的に
伝播することになり、第3実施例よりも更に帯域特性、
不要信号の減衰特性が改善される。
According to such a configuration, the input converter 1
The regularity of the electrode pattern in the inside is not broken, and the periodicity of the electrode arrangement on the propagation path of the main signal in the region Ai is maintained in addition to the effect of the third embodiment described above.
The disturbance of the internal reflection of the signal is suppressed and the area Ao
Since the periodicity of the electrode arrangement on the propagation path of the unnecessary signal in the inside is maintained, the unnecessary signal is less likely to be diffracted or multiply reflected in the converter 1, and only the main signal is emphasized in the output converter 2. Therefore, the band characteristic is further propagated than in the third embodiment,
The attenuation characteristic of the unnecessary signal is improved.

【0042】図5は本発明の第5実施例の要部電極構成
を示す模式図で、入力用変換器1のみを抽出して示して
いる。なお、この第5実施例以下は第2発明に対応する
ものである。
FIG. 5 is a schematic diagram showing the essential electrode structure of the fifth embodiment of the present invention, in which only the input converter 1 is extracted and shown. The fifth and subsequent embodiments correspond to the second invention.

【0043】この第5実施例においては、入力用変換器
1の正・負のすだれ状電極11,12そのもののパター
ン、並びに出力用変換器2(図4において図示せず)の
構成は第1〜第3実施例と同様であるが、入力用変換器
1に方向性を付与すべき浮き電極として、いわゆる短絡
型の浮き電極を用いるとともに、以下に示すように、そ
の短絡型の浮き電極を形成するための連結電極4の配置
に特徴がある。
In the fifth embodiment, the pattern of the positive / negative interdigital transducers 11 and 12 of the input converter 1 and the configuration of the output converter 2 (not shown in FIG. 4) are the first. As in the third embodiment, a so-called short-circuit type floating electrode is used as the floating electrode to be provided with directivity to the input converter 1, and the short-circuiting type floating electrode is used as described below. The arrangement of the connecting electrodes 4 for forming is characteristic.

【0044】すなわち、入力用変換器1の正・負のすだ
れ状電極11,12の各電極指の間に、この変換器1に
より励起された弾性表面波が出力用変換器2側へと向く
ような位置関係で配置された浮き電極3fは、互いに隣
合う2本ずつが連結電極4を介して接続され、短絡型の
浮き電極を構成している。そして、その連結電極4によ
る各浮き電極3fの連結箇所が、入力用変換器1の位相
反転部Tを挟んで上下に逆転している。
That is, the surface acoustic wave excited by the converter 1 is directed to the output converter 2 side between the electrode fingers of the positive and negative interdigital transducers 11 and 12 of the input converter 1. The floating electrodes 3f arranged in such a positional relationship are connected to each other by two electrodes adjacent to each other via the connecting electrode 4 to form a short-circuit type floating electrode. Then, the connecting portion of each floating electrode 3f by the connecting electrode 4 is vertically inverted with the phase inversion portion T of the input converter 1 interposed therebetween.

【0045】この第5実施例によると、位相反転部Tを
含む重み付けにより、所望の帯域特性のフィルタが得ら
れると同時に、位相反転部Tを含めて短絡型の浮き電極
により入力用変換器1に方向性を持たせることができる
ため、個々の浮き電極3fの質量効果のみならず電界効
果によっても方向性が付与されて、入力用変換器1の方
向性がより顕著なものとなる。
According to the fifth embodiment, a filter having a desired band characteristic can be obtained by weighting including the phase inversion section T, and at the same time, the input converter 1 is constituted by the short-circuit type floating electrode including the phase inversion section T. Since the directivity can be given to the input electrodes 1, the directivity is given not only by the mass effect of the individual floating electrodes 3f but also by the electric field effect, and the directivity of the input converter 1 becomes more remarkable.

【0046】図6は本発明の第6実施例の入力用変換器
1を抽出して示す要部電極構成の模式図である。この第
6実施例の特徴は、連結電極4によって浮き電極3fを
2本ずつ接続してなる短絡型の浮き電極に加えて、短絡
型の浮き電極と正・負の電極指との間に開放型の浮き電
極5を設けた点にあり、この短絡型と開放型の浮き電極
の組み合わせにより、電極配置の周期性が改善されて回
折や多重反射の影響を少なくできると同時に、方向性は
より顕著なものとなる。
FIG. 6 is a schematic view of the essential electrode construction showing an input converter 1 according to a sixth embodiment of the present invention. The feature of the sixth embodiment is that, in addition to the short circuit type floating electrode in which two floating electrodes 3f are connected by the connecting electrode 4, the short circuit type floating electrode is opened between the positive and negative electrode fingers. This is because the floating electrode 5 of the mold is provided. The combination of the floating electrode of the short circuit type and the floating electrode of the open type improves the periodicity of the electrode arrangement to reduce the influence of diffraction and multiple reflection, and at the same time, the directionality is improved. It will be remarkable.

【0047】図7は本発明の第7実施例の説明図で、
(A)はその入力用変換器1のみを抽出して示す要部電
極構成の模式図であり、(B)その部分拡大図である。
この第7実施例の特徴は、第6実施例と同様に、浮き電
極3fを連結電極4によって接続してなる短絡型の浮き
電極と、開放型の浮き電極5を併用しているとともに、
入力用変換器1に重み付けを与えることによって生じた
正・負の電極指の先端部に生じる空隙を、逆極の電極ま
たは浮き電極に接続したダミー電極13または6(これ
らは図7(A)において黒色で示している)によって埋
めている点にある。
FIG. 7 is an explanatory view of the seventh embodiment of the present invention.
(A) is a schematic diagram of a main part electrode structure which extracts and shows only the input converter 1, and (B) is a partially enlarged view thereof.
Like the sixth embodiment, the seventh embodiment is characterized in that a short-circuit type floating electrode formed by connecting the floating electrodes 3f by the connecting electrode 4 and an open type floating electrode 5 are used together.
The dummy electrode 13 or 6 connected to the electrode of the opposite polarity or the floating electrode is provided with the void generated at the tip of the positive / negative electrode finger caused by weighting the input converter 1 (these are shown in FIG. 7A). In black).

【0048】この図7の例では、(B)に示すようにダ
ミー電極6は短絡型の浮き電極の一部である連結電極4
に接続されているが、図8に示すように、開放型の浮き
電極5に接続してもよい。
In the example of FIG. 7, the dummy electrode 6 is a part of the short-circuit type floating electrode as shown in FIG.
However, as shown in FIG. 8, it may be connected to the open floating electrode 5.

【0049】図7および図8の構成によると、いずれ
も、重み付けにより生じる正・負のすだれ状電極11,
12の各電極指の先端部に生じる空隙が、ダミー電極1
3または6によって埋められることにより、変換器1内
における電極配置の周期性が保たれ、先の図4に示した
例と同様に、変換器1内における弾性表面波の多重反射
や回折現象の抑制効果が向上する。なお、この図7また
は図8の例では、連結電極4の存在している部分におけ
るダミー電極6は、図4に例示したダミー電極13のよ
うに極性が付与されない関係上、電界効果を伴わない
が、質量効果のみによっても十分に多重反射並びに回折
現象の抑制効果を期待できる。
According to the configurations shown in FIGS. 7 and 8, both positive and negative interdigital electrodes 11, which are generated by weighting,
The voids formed at the tips of the electrode fingers of 12 are the dummy electrodes 1
By being filled with 3 or 6, the periodicity of the electrode arrangement in the transducer 1 is maintained, and as in the example shown in FIG. 4, the multiple reflection of surface acoustic waves and the diffraction phenomenon of the surface acoustic wave in the transducer 1 are maintained. The suppression effect is improved. Note that, in the example of FIG. 7 or FIG. 8, the dummy electrode 6 in the portion where the connecting electrode 4 is present has no electric field effect because the polarity is not given unlike the dummy electrode 13 illustrated in FIG. However, the effect of suppressing the multiple reflection and diffraction phenomenon can be expected sufficiently by the mass effect alone.

【0050】なお、以上の各実施例では、入力用変換器
1に重み付けを施す手法としてそれぞれアポダイズ法に
基づく手法を採用したが、本発明はこれに限定されるこ
となく、例えば傾斜(チルト)型の重み付け手法等、電
極指の重なり幅を順次変化させることにより重み付けを
施す手法であればどのような手法でも採用可能なことは
勿論である。
In each of the above embodiments, a method based on the apodization method is adopted as a method for weighting the input converter 1, but the present invention is not limited to this and, for example, tilts can be used. It goes without saying that any method can be adopted as long as it is a method of performing weighting by sequentially changing the overlapping width of the electrode fingers, such as a type weighting method.

【0051】[0051]

【発明の効果】本発明によれば、入力用変換器の電極指
の重なり幅を順次変化させることによって重み付けを与
え、なおかつその入力用変換器内に浮き電極を設けるこ
とによって、重み付けにより所望の周波数帯域特性が付
与された状態で励起された弾性表面波を、専ら出力用変
換器に向かわせることができ、周波数帯域の改善と挿入
損失の低減を同時に達成することができる。
According to the present invention, the weight is given by sequentially changing the overlapping width of the electrode fingers of the input transducer, and by providing the floating electrode in the input transducer, the desired weight is obtained. The surface acoustic wave excited in the state where the frequency band characteristic is given can be directed exclusively to the output converter, and the improvement of the frequency band and the reduction of the insertion loss can be achieved at the same time.

【0052】また、入力用変換器内に設けられる浮き電
極の長さを、各電極指の重なり幅に合わせて、その重な
り幅内においてのみ方向性が得られるように構成した場
合には、主信号成分のみを強調的に方向性を持たせるこ
とが可能となり、不要信号成分の相対減衰量を増大させ
ることができる。更に、主信号の弾性表面波の伝播路で
ある領域Ai 内では出力用変換器側へと向かう方向性
を、その他の領域Ao ではこれとは逆向きの方向性を付
与するような位置関係のもとに、各領域Ai およびAo
内での各浮き電極の位置を考慮することにより、不要信
号の相対減衰量は更に大きくなる。そして、このような
2つの領域における浮き電極による方向性を逆転させた
構成において、重み付けにより正・負のすだれ状電極の
各電極指の先端部に生じる、電極が存在しない空隙部分
を、逆極性の電極に連結されたダミー電極によって埋め
るとともに、そのダミー電極にも、各領域に応じて上記
と同様の方向性を持たせるべく浮き電極を隣接配置する
と、変換器内の電極配置の規則性が保たれ、多重反射や
回折等による不要な弾性波が生じにくく、スプリアスの
改善、並びに不要信号成分の減衰効果は向上する。
Further, when the length of the floating electrode provided in the input transducer is adapted to the overlapping width of each electrode finger so that the directivity is obtained only within the overlapping width, It is possible to give directionality to only the signal component in an emphasized manner, and it is possible to increase the relative attenuation amount of the unnecessary signal component. Further, in the area Ai which is the propagation path of the surface acoustic wave of the main signal, the directionality toward the output transducer side is provided, and in the other areas Ao, the directionality opposite to this is provided. Based on each area Ai and Ao
By taking into account the position of each floating electrode within, the relative attenuation of the unwanted signal is further increased. Then, in the configuration in which the directions of the floating electrodes in the two regions are reversed, the void portions which do not exist in the electrodes, which are generated at the tips of the electrode fingers of the positive and negative interdigital electrodes by weighting, have opposite polarities. If a floating electrode is arranged adjacent to the dummy electrode so as to have the same directionality as the above according to each area, it will be filled with a dummy electrode connected to the electrode of Therefore, unnecessary elastic waves due to multiple reflection, diffraction, etc. are less likely to be generated, spurious is improved, and unnecessary signal component attenuation effect is improved.

【0053】入力用変換器に位相反転部Tを含む重み付
けを施す場合において、その位相反転部Tを挟んで一方
側と他方側で、各電極指間に配置された浮き電極の連結
電極による接続端を逆転させることにより、位相反転部
Tを持つ変換器と短絡型の浮き電極との組み合わせが可
能となり、所望の帯域特性を持ち、しかも顕著な方向性
を持つフィルタが実現する。
When the input converter is weighted including the phase inversion part T, the floating electrodes arranged between the electrode fingers on one side and the other side across the phase inversion part T are connected by connecting electrodes. By reversing the ends, it is possible to combine the converter having the phase inversion section T and the short-circuit type floating electrode, and a filter having desired band characteristics and having remarkable directivity is realized.

【0054】また、この場合にも、重み付けにより正・
負の電極指の先端部に生じる空隙部分を、浮き電極に接
続されたダミー電極によって埋めることにより、多重反
射や回折等の抑制によるスプリアスの改善や不要信号成
分の減衰効果が見込まれる。
Also in this case, the weighting is positive or
By filling the void portion generated at the tip of the negative electrode finger with the dummy electrode connected to the floating electrode, it is expected that spurious emission will be improved and unnecessary signal components will be attenuated by suppressing multiple reflection and diffraction.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例の電極構成を示す模式図FIG. 1 is a schematic diagram showing an electrode configuration of a first embodiment of the present invention.

【図2】本発明の第2実施例の入力用変換器1を抽出し
て示す要部電極構成の模式図
FIG. 2 is a schematic diagram of an essential electrode configuration showing an input converter 1 extracted from a second embodiment of the present invention.

【図3】本発明の第3実施例の説明図で、(A)はその
電極構成を示す模式図、(B)はその入力用変換器1の
全体構成の概念図と作用説明図とを併記して示す図
3A and 3B are explanatory diagrams of a third embodiment of the present invention, in which FIG. 3A is a schematic diagram showing the electrode configuration, and FIG. 3B is a conceptual diagram of the overall configuration of the input converter 1 and an operation explanatory diagram. Diagram shown together

【図4】本発明の第4実施例の入力用変換器1のみを抽
出して示す要部電極構成の模式図
FIG. 4 is a schematic diagram of an essential electrode configuration showing only an input converter 1 according to a fourth embodiment of the present invention.

【図5】本発明の第5実施例の入力用変換器1のみを抽
出して示す要部電極構成の模式図
FIG. 5 is a schematic diagram of a main part electrode configuration showing only an input converter 1 of a fifth embodiment of the present invention.

【図6】本発明の第6実施例の入力用変換器1のみを抽
出して示す要部電極構成の模式図
FIG. 6 is a schematic diagram of an essential electrode configuration showing only an input converter 1 of a sixth embodiment of the present invention.

【図7】本発明の第7実施例の説明図で、(A)はその
入力用変換器1のみを抽出して示す要部電極構成の模式
図、(B)その部分拡大図
7A and 7B are explanatory views of a seventh embodiment of the present invention, in which FIG. 7A is a schematic view of the essential electrode configuration showing only the input converter 1 and FIG. 7B is a partially enlarged view thereof.

【図8】第7実施例の変形例の説明図FIG. 8 is an explanatory diagram of a modified example of the seventh embodiment.

【図9】重み付けを付した従来の弾性表面波フィルタの
入力用変換器の電極構成例を示す模式図
FIG. 9 is a schematic diagram showing an example of electrode configuration of an input transducer of a conventional surface acoustic wave filter with weighting.

【符号の説明】[Explanation of symbols]

1 入力用変換器 11 正のすだれ状電極 12 負のすだれ状電極 13 ダミー電極 2 出力用変換器 21 正のすだれ状電極 22 負のすだれ状電極 3,3a,3b,3c,3d,3e,3f,5 浮き電
極 4 連結電極 6 ダミー電極 P 重なり幅のピーク部 Pa ピーク点 T 位相反転部
1 Input converter 11 Positive interdigital transducer 12 Negative interdigital transducer 13 Dummy electrode 2 Output converter 21 Positive interdigital transducer 22 Negative interdigital transducer 3, 3a, 3b, 3c, 3d, 3e, 3f , 5 Floating electrode 4 Connection electrode 6 Dummy electrode P Overlap width peak part Pa Peak point T Phase inversion part

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平5−63488(JP,A) 特開 平6−237139(JP,A) 特開 昭52−149459(JP,A) 特開 昭60−123123(JP,A) 欧州特許出願公開533431(EP,A 1) (58)調査した分野(Int.Cl.7,DB名) H03H 9/145 ─────────────────────────────────────────────────── --Continued from the front page (56) References JP-A-5-63488 (JP, A) JP-A-6-237139 (JP, A) JP-A 52-149459 (JP, A) JP-A 60- 123123 (JP, A) European Patent Application Publication 533431 (EP, A 1) (58) Fields searched (Int.Cl. 7 , DB name) H03H 9/145

Claims (8)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】圧電性基板上に、それぞれ一定の間隔を開
けて複数の電極指が形成された正・負のすだれ状電極が
各電極指の配列方向に互いに重なり合うように対向配置
された弾性表面波変換器からなる、入力用および出力用
の2つの変換器が配設された弾性表面波フィルタにおい
て、 上記入力用変換器は、その正・負のすだれ状電極の各電
極指どうしの重なり幅が、当該電極指の配列方向に複数
のピーク部をもって順次変化するように重み付けされて
いるとともに、その正・負のすだれ状電極の各電極指間
には、各電極間の中心位置をずらした位置に浮き電極が
形成された一方向性変換器であり、当該浮き電極は、各
電極指の先端を結ぶ包絡線の内側の領域と、各ピーク部
におけるそれぞれのピーク点から上記出力用変換器側に
向けて各電極指と直交する方向に引いた線内の領域とで
は、当該入力用変換器への信号入力により励起される弾
性波が上記出力用変換器に向かうような位置関係で形成
され、かつ、その領域以外の領域では、当該入力用変換
器への信号入力により励起される弾性波が上記出力用変
換器とは逆側に向かうような位置関係で形成されている
ことを特徴とする弾性表面波フィルタ。
1. Elasticity in which positive and negative interdigital electrodes having a plurality of electrode fingers formed at regular intervals on a piezoelectric substrate are arranged to face each other so as to overlap each other in the arrangement direction of each electrode finger. In a surface acoustic wave filter including two transducers for input and output, which are surface acoustic wave transducers, in the transducer for input, the electrode fingers of the positive and negative interdigital transducers overlap each other. There are multiple widths in the array direction of the electrode fingers.
Is weighted so that it changes sequentially with the peak part of, and between the electrode fingers of the positive and negative interdigital electrodes, a floating electrode is formed at a position where the center position between the electrodes is shifted. Is a sex converter, and the floating electrode is
The area inside the envelope connecting the tips of the electrode fingers and each peak
From each peak point in
With the area inside the line drawn in the direction orthogonal to each electrode finger toward
Is the bullet excited by the signal input to the input transducer.
Formed in a positional relationship such that the sex wave is directed to the output converter
And the area other than that area is converted for the input.
The elastic wave excited by the signal input to
A surface acoustic wave filter characterized in that the surface acoustic wave filter is formed so as to face the opposite side of the converter .
【請求項2】上記入力用変換器の正・負のすだれ状電極
の各電極指間に形成される浮き電極は、それぞれに隣接
する電極指と略同等の長さを有していることを特徴とす
る、請求項1に記載の弾性表面波フィルタ。
2. The floating electrodes formed between the electrode fingers of the positive and negative interdigital transducers of the input converter have a length substantially equal to that of the electrode fingers adjacent to each other. The surface acoustic wave filter according to claim 1, which is characterized in that.
【請求項3】上記入力用変換器の正・負のすだれ状電極
の各電極指間に形成される浮き電極は、当該正・負のす
だれ状電極の各電極指の重なり部分のみにおいて一方向
性を持たせるべく、各重なり幅と等しい長さを有してい
ることを特徴とする、請求項1に記載の弾性表面波フィ
ルタ。
3. A floating electrode formed between the electrode fingers of the positive and negative interdigital transducers of the input converter is unidirectional only at the overlapping portion of the electrode fingers of the positive and negative interdigital transducers. The surface acoustic wave filter according to claim 1, wherein the surface acoustic wave filter has a length equal to each overlapping width so as to have a property.
【請求項4】上記入力用変換器の正および負電極の各電
極指のうち、互いの重なり幅が最大となる最長の電極指
を除く各電極指の延長上に、これらの各電極指の先端に
生じる空隙を埋めるよう、逆極の電極に接続されたダミ
ー電極が形成されていることを特徴とする、請求項1、
2または3に記載の弾性表面波フィルタ。
4. An extension of each electrode finger of the positive and negative electrodes of the input transducer except for the longest electrode finger having the maximum overlapping width with each other. 2. A dummy electrode connected to an electrode of opposite polarity is formed so as to fill the void formed at the tip, 2.
The surface acoustic wave filter according to 2 or 3 .
【請求項5】圧電性基板上に、それぞれ一定の間隔λ0
を開けて複数の電極指が形成された正・負のすだれ状電
極が各電極指の配列方向に互いに重なり合うように対向
配置された弾性表面波変換器からなる、入力用および出
力用の2つの変換器が配設された弾性表面波フィルタに
おいて、 上記入力用変換器の正・負のすだれ状電極の各電極指ど
うしの重なり幅が、当該電極指の配列方向に順次変化す
るように重み付けされているとともに、その重なり幅が
最も短くなる箇所においては、正・負のすだれ状電極の
いずれか一方側が上記間隔λ0 の1/2の間隔を開けて
2本形成され、かつ、他方側がその2本の電極指を挟ん
で上記間隔λ0 の3/2の間隔で2本形成されてなる位
相反転部が設けられているとともに、その入力用変換器
の各電極指間には、各電極間の中心位置からずらした位
置にそれぞれ浮き電極が形成され、その浮き電極は、互
いに隣接する2本ずつがそれぞれの一端部において連結
電極によって相互に接続された短絡型の浮き電極であ
り、かつ、その連結電極による各2本の浮き電極の接続
位置が、上記位相反転部を挟んで一端側から他端側へと
逆転していることを特徴とする、弾性表面波フィルタ。
5. A piezoelectric substrate having a constant spacing λ 0.
Open and open to form a plurality of electrode fingers. Positive and negative interdigital electrodes are arranged opposite to each other so that they overlap each other in the arrangement direction of each electrode finger. In the surface acoustic wave filter provided with the transducer, the overlapping width of each electrode finger of the positive / negative interdigital transducers of the input transducer is weighted so as to sequentially change in the arrangement direction of the electrode fingers. In addition, at the location where the overlapping width is the shortest, one of the positive and negative interdigital electrodes is formed with a half interval of the above interval λ 0 , and the other side is formed. Two phase inversion parts are provided with an interval of 3/2 of the above-mentioned interval λ 0 sandwiching two electrode fingers, and each electrode finger is provided between the electrode fingers of the input converter. To the position shifted from the center position between Floating electrodes are formed, and each of the two floating electrodes is a short-circuit type floating electrode in which two adjacent electrodes are connected to each other by a connecting electrode at each one end, and two floating electrodes are formed by the connecting electrodes. The surface acoustic wave filter, wherein the connection positions of the electrodes are reversed from one end side to the other end side across the phase inversion part.
【請求項6】上記入力用変換器の各電極指間には、上記
連結電極によって2本ずつ接続された短絡型の浮き電極
のほかに、これらとは接続されていない開放型の浮き電
極が形成されていることを特徴とする、請求項に記載
の表面弾性波フィルタ。
6. Between the electrode fingers of the input converter, in addition to the short-circuit type floating electrodes connected by two by the connecting electrode, there are open type floating electrodes not connected to these. It is formed, The surface acoustic wave filter of Claim 5 characterized by the above-mentioned.
【請求項7】上記入力用変換器の正および負電極の各電
極指のうち、互いの重なり幅が最大となる最長の電極指
を除く各電極指の延長上に、これらの各電極の先端に生
じる空隙を埋めるよう、逆極の電極もしくは浮き電極の
いずれかに接続されたダミー電極が形成されていること
を特徴とする、請求項5または6に記載の弾性表面波フ
ィルタ。
7. The tip of each of the electrode fingers of the positive and negative electrodes of the input transducer is extended on the electrode fingers except the longest electrode finger having the maximum overlapping width. 7. The surface acoustic wave filter according to claim 5 , wherein a dummy electrode connected to either the electrode of the opposite polarity or the floating electrode is formed so as to fill the void generated in the above.
【請求項8】上記出力用変換器は、上記入力用変換器と
逆向きの方向性を持つよう、その正・負のすだれ状電極
の各電極指間に、その電極間の中心位置をずらした位置
に浮き電極が形成された一方向性変換器であることを特
徴とする、請求項1、2、3、4、5、6または7に記
載の弾性表面波フィルタ。
8. The output converter shifts a center position between the electrode fingers of the positive and negative interdigital transducers so as to have a directionality opposite to that of the input converter. characterized in that the unidirectional transducer floating electrode is formed at a position, the surface acoustic wave filter according to claim 3, 4, 5, 6 or 7.
JP20183794A 1994-08-26 1994-08-26 Surface acoustic wave filter Expired - Fee Related JP3371562B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20183794A JP3371562B2 (en) 1994-08-26 1994-08-26 Surface acoustic wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20183794A JP3371562B2 (en) 1994-08-26 1994-08-26 Surface acoustic wave filter

Publications (2)

Publication Number Publication Date
JPH0865087A JPH0865087A (en) 1996-03-08
JP3371562B2 true JP3371562B2 (en) 2003-01-27

Family

ID=16447720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20183794A Expired - Fee Related JP3371562B2 (en) 1994-08-26 1994-08-26 Surface acoustic wave filter

Country Status (1)

Country Link
JP (1) JP3371562B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084953A (en) * 2010-10-07 2012-04-26 Panasonic Corp Acoustic wave element, and branching filter
CN112653413A (en) * 2020-12-16 2021-04-13 武汉大学 System and method for adjusting effective electromechanical coupling coefficient of ultrahigh frequency bulk acoustic wave resonator

Also Published As

Publication number Publication date
JPH0865087A (en) 1996-03-08

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