JP3367205B2 - Gas box for ion implanter - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas box containing a gas supply device for supplying a gas for ionization to an ion source of an ion implantation device, and more specifically to a device constituting the gas supply device. Regarding improvement for improving workability such as replacement and maintenance inspection.

[0002]

2. Description of the Related Art A conventional example of this type of gas box is shown in FIG. The gas box 10 has a rectangular box shape, and a gas supply device 2 for supplying an ionization gas (for example, BF ₃ , PH ₃ , AsH ₃ etc.) to the ion source of the ion implantation device is housed therein. Has been done.

The gas supply device 2 includes, for example, a gas cylinder as a gas source, a pressure adjusting valve for adjusting the pressure of the gas from the gas cylinder, an opening / closing valve for connecting and disconnecting the gas, a flow rate adjusting valve for adjusting the flow rate of the gas, and between It is composed of one or more systems, each including a pipe connecting them (see FIG. 1).

The gas box 10 has columns 12 at four corners inside, and has three columns for the work such as the replacement of the equipment constituting the internal gas supply device 2 (for example, the replacement of a gas cylinder) and the maintenance and inspection. Doors 14 to 16 are provided on the side surface.

[0005]

Most of the gas for ionization supplied from the gas box 10 to the ion source is a toxic gas (for example, BF ₃ , PH ₃ , AsH).
_(3rd grade is that), and it must be handled carefully. For that purpose, it is important that the workability at the time of replacement of gas cylinders, pipes, various valves, etc. constituting the gas supply device 2, maintenance and inspection is good, and for that purpose the opening area must be made as large as possible. .

However, in the conventional gas box 10 as described above, when the doors 14 to 16 are opened, an opening corresponding to the width thereof is formed.
Although it is necessary to increase the width of the gas chamber 16, the doors 14 to 16 have a flat plate shape. Therefore, in order to open the doors 14 to 16, a large space having a radius of those widths is provided in the gas box 10. It is necessary to secure the space around it, and it becomes difficult to make effective use of the space.

Further, there are pillars 12 at four corners, and doors 14 to 1
Even if 6 is opened, the support 12 is an obstacle and the workability is poor.

Further, since no door is provided on the back side, workability is poor in this sense as well, and even if a door is provided there, the above-mentioned large space for opening the door must be secured, and The problem remains that the support 12 is an obstacle and the workability is poor.

Therefore, it is a primary object of the present invention to provide a gas box having a large opening and a small number of columns for good workability and a small space required for opening a door.

[0010]

In order to achieve the above object, the gas box of the present invention is provided with first and second columns only at two diagonally opposite positions, each of which folds two plates. First and second doors, which are coupled to each other as possible, are attached to both sides of the first support pillar so as to be openable and closable, and by closing the first door, two adjacent side surfaces between the first support pillar and the second support pillar Is formed and the second door is closed to form the remaining two adjacent side faces between the first strut and the second strut.

[0011]

According to the above construction, by opening the first and second doors, only the two pillars diagonally opposite to each other are left, and the other side surfaces are all openings. Therefore, the opening is very large, and since there are only two columns, workability is greatly improved.

Moreover, since the first and second doors each have a structure in which two plates are foldably connected, they can be folded when they are opened, and therefore it is necessary to open both doors. Space is small.

[0013]

1 is a cross-sectional view showing a gas box according to an embodiment of the present invention. FIG. 2 is a side view seen in the direction of arrow P in FIG. FIG. 3 is a side view seen in the direction of arrow Q in FIG.

In the gas box 20 of this embodiment, columns are not provided at four corners as in the conventional case, but first and second columns 22 and 24 are provided only at two diagonally opposite positions. In this example, the first support column 22 has a tubular shape with its outer corners rounded, and the second support column 24 has
In this example, is a plate-like member that is bent into a quarter circle.

On one side of the column 22, two plates 3 are provided.
A first door 30 which is formed by foldably connecting 2 and 34 with a hinge 36 as shown by an arrow B is attached with a hinge 38 so as to be openable and closable as shown by an arrow A. In this example, the two hinges 36 and 38 are provided on the upper and lower sides, respectively, as shown in FIG. By closing the door 30, two adjacent side faces (two orthogonal side faces) between the support column 22 and the support column 24 can be formed.

Further, on the other side portion of the column 22, a second door 40, which is formed by connecting two plates 42 and 44 so as to be foldable by a hinge 46 as shown by an arrow D, is provided with a hinge 48.
Is attached so that it can be opened and closed as indicated by arrow C. In this example, the two hinges 46 and 48 are provided on the upper and lower sides, respectively, as shown in FIG. By closing the door 40, the remaining two adjacent side faces (two orthogonal side faces) between the support column 22 and the support column 24 can be formed.

The gas supply device 2 housed in the gas box 20 is, in this embodiment, a gas cylinder 4 as a gas source and a pressure adjusting valve (not shown in the figure) for adjusting the pressure of the gas from the gas cylinder 4. ), An open / close valve 6 for connecting and disconnecting the gas, a flow rate adjusting valve 8 for adjusting the flow rate of the gas, and a pipe connecting them, and the like.

In this gas box 20, by opening the two doors 30 and 40, only the two columns 22 and 24 diagonally opposed to each other are left, and the other side surfaces are all openings. Therefore, the opening is very large, and since there are only two columns, workability is greatly improved. As a result, it becomes possible to easily and carefully carry out operations such as replacement of equipment constituting the gas supply device 2 and maintenance and inspection.

Moreover, since the doors 30 and 40 each have a structure in which two plates are foldably connected to each other, when they are opened, as shown by arrows B and D, the doors 30 and 40 are close to half in this embodiment. It is foldable and therefore requires less space to open both doors 30 and 40. As a result, it is possible to effectively utilize the space around the gas box 20.

The second support column 24 does not necessarily have to be in the form of a plate bent into a quarter circle as in this embodiment, but if it is made as in this embodiment, this When it is necessary to arrange the gas box 20 in the vicinity of the rounded corner portion, the gas box 20 can be arranged closer to the corner portion by arranging the support columns 24 so as to face the corner portion. It is possible to reduce the wasted space.

A specific example of this will be described with reference to FIG. 4. The gas box 20 as described above is usually housed and used in a high voltage box 50 of an ion implantation apparatus.

The high voltage box 50 includes an ion source 62 for generating an ion beam, an analyzing electromagnet 64 for mass-analyzing the ion beam extracted from the ion source 62, a power source (not shown) for supplying power to these, and an ion source 62. It is a box-shaped one that houses the ion beam generator 60 including the gas box 20 as described above that supplies the ionization gas to the high voltage (for example, several tens KV to several hundreds of KV) insulated from the ground potential part. KV) is applied.

The high voltage box 50 as described above is provided with the corner portion 5 in order to reduce the electric field at the corner portion 52 and shorten the space insulation distance between the high voltage box 50 and the surrounding ground potential portion.
2 tends to be rounded with a large radius of curvature, in which case
As shown in FIG. 1, the columns 24 of the gas box 20 are
If bent so as to be substantially along the corner portion 52, the gas box 20 can be arranged closer to the corner portion 52 so that the support 24 of the gas box 20 faces the corner portion 52, whereby the inside of the high voltage box 50 can be arranged. It is possible to reduce the wasted space, downsize the high voltage box 50, and further downsize the shield cabinet (not shown) surrounding it, and further downsize the ion implantation apparatus.

[0024]

Since the present invention is configured as described above, it has the following effects.

According to the gas box of the first aspect, by opening the first and second doors, only the two columns diagonally opposite to each other are left, and the other side portions are all openings. Therefore, the opening is very large, and since there are only two columns, workability is greatly improved. As a result, it becomes possible to easily and carefully perform work such as replacement of equipment constituting the internal gas supply device, maintenance and inspection.

Moreover, since the first and second doors each have a structure in which two plates are foldably connected, they can be folded when they are opened, and thus it is necessary to open both doors. Space is small. As a result, it is possible to effectively use the space around the gas box.

According to the gas box of the second aspect, when it is necessary to dispose the gas box in the vicinity of the round corner portion, the gas box can be arranged closer to the corner portion, thereby reducing wasteful space. can do.

According to the gas box of claim 3, it can be arranged closer to the corner portion of the high-voltage box, whereby the wasteful space in the high-voltage box can be reduced, and the high-voltage box can be reduced. The size of the ion implantation apparatus can be reduced, and the size of the shield cabinet surrounding it can be reduced, and the size of the ion implantation apparatus can be reduced.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a gas box according to an embodiment of the present invention.

FIG. 2 is a side view as seen in the direction of arrow P in FIG.

FIG. 3 is a side view seen in the direction of arrow Q in FIG.

FIG. 4 is a schematic cross-sectional view showing an example of a high voltage box.

FIG. 5 is a top view showing an example of a conventional gas box.

[Explanation of symbols]

2 gas supply device 20 gas box 22 First pillar 24 Second post 30 first door 32, 34 plates 40 Second Door 42,44 plates 50 high voltage box 52 Corner

Claims (3)

(57) [Claims] 1. A square box-shaped gas box containing a gas supply device for supplying a gas for ionization to an ion source of an ion implantation device, wherein first and second support columns are provided only at two diagonally opposite positions. First and second doors, each of which is provided with two plates that are foldably connected to each other, are openably and closably attached to both sides of the first support, and the first support is closed by closing the first door. Two adjacent side faces between the second support columns are formed, and the second door is closed to form the remaining two adjacent side faces between the first support column and the second support column. A gas box for an ion implanter. 2. The gas box for an ion implantation apparatus according to claim 1, wherein the second support column is a plate-shaped member that is bent in a quarter circle shape. 3. The gas box is housed in a high voltage box having a rounded corner portion of an ion implanter, and the second support column is bent so as to extend substantially along the corner portion. 2. A gas box for the ion implanter according to 2.