JP3358471B2 - Mounting device for conductive balls - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive ball mounting apparatus for mounting a conductive ball on a work.

[0002]

2. Description of the Related Art As a method for manufacturing a bumped work such as a flip chip, a method using conductive balls is known. In this method, a plurality of conductive balls are held on a mounting head, and the conductive balls are mounted on pads of a work such as a chip or a substrate. Have the advantage that they can be mounted on a work at once.

[0003] The conductive ball needs to be accurately mounted on the pad of the work without displacement. For this reason, in the conventional conductive ball mounting apparatus, the position of the conductive ball held on the work pad or the mounting head is recognized using a recognition device such as a camera, and the conductive ball and the pad are recognized in accordance with the position recognition result. The conductive ball was mounted on the pad after the above-mentioned alignment was performed.

[0004]

However, in the conventional method, since the above-described recognition operation, positioning operation, mounting operation, and the like are performed for each work, the tact time becomes long and the production efficiency is extremely low. There was a problem.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a conductive ball mounting apparatus which can collectively mount conductive balls on a plurality of workpieces with high positional accuracy and at high speed.

[0006]

According to the present invention, there is provided an apparatus for mounting a conductive ball, comprising: a carrier having a plurality of holes for holding workpieces; and a plurality of workpieces held in the holes. Lifting means for supporting and lifting, and moving means for positioning the work by pressing the side surface of the work against the inner surface of the hole by moving the work lifted by the lifting means relative to the carrier. ,
A plurality of suction parts corresponding to the work are provided, and a plurality of conductive balls are vacuum-sucked to these suction parts, and a mounting head for collectively mounting the conductive balls on the plurality of work pieces positioned. Transport for transporting said carrier
The front of the carrier that has been transported hits the road
A stopper for stopping the carrier is provided.
Camera for observing the characteristic part of the work conveyed by
And the camera recognizes the characteristic portion and
The position of the work is detected, and the work is
The carrier relative to the carrier.
The conductive ball held by the suction portion is
Aligned to the pad .

[0007]

According to the present invention having the above-described structure, a plurality of workpieces held by a carrier are simultaneously pressed against the inner side surface of a hole to accurately and collectively position a plurality of workpieces. In addition, the conductive ball can be mounted on the work pad with high positional accuracy.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a side view of a conductive ball mounting apparatus according to an embodiment of the present invention, and FIG. 2 is a partial plan view of the carrier.

1 and 2, reference numeral 1 denotes a work, 2
Is a carrier. The carrier 2 is plate-shaped,
A plurality of rectangular holes 3 in a plan view are formed in a matrix, and the work 1 is housed in the holes 3. FIG.
As shown in FIG. 1, a large number of circuit pattern pads 4 are formed on the upper surface of the work 1.

In FIG. 1, a carrier 2 is transported by a conveyor 5. The conveyor 5 is a belt conveyor and is tuned to pulleys 6 and 7. 8 is a conveyor 5
Is a motor for driving the motor. Each work 1 is supported from below by a table-shaped support portion 10. The support part 10 is supported by the upper end of the support 11. Prop 11
Is erected on the movable plate 12. The movable plate 12 is supported by a rod 14 of a cylinder 13 serving as a vertical movement means. Therefore, when the rod 14 of the cylinder 13 protrudes and retracts, the movable plate 12 moves up and down, and the work 1
Also move up and down. That is, the elements denoted by reference numerals 10 to 14 are the lifting means of the work 1.

The cylinder 13 is mounted on a bracket 15. A horizontal X-direction feed screw 16 is screwed into the bracket 15. The motor 17 is driven and the feed screw 1
When the bracket 6 rotates, the bracket 15 horizontally moves in the X direction along the feed screw 15, whereby the movable plate 12, the table 10 on the movable plate 12, and the work 1 also horizontally move in the X direction.

The guide rail 1 is provided on the lower surface of the bracket 15.
8 are provided. Slider 1 is mounted on guide rail 18
9 is slidably fitted. This guide rail 1
The slider 8 and the slider 19 guide the movement of the bracket 15 in the X direction. The slider 19 is supported by a nut 20, into which a feed screw 21 in the Y direction is screwed. When the motor 22 is driven to rotate the feed screw 21, the nut 20 moves horizontally in the Y direction along the feed screw 21, whereby the bracket 15 and the bracket 15 are moved.
Various elements such as the upper movable plate 12 move horizontally in the Y direction.
As described above, the elements denoted by reference numerals 15 and 22 constitute moving means for horizontally moving the work 1 in the X direction and the Y direction.

In FIG. 1, a cylinder 23 is provided in a conveying path of the carrier 2 by the conveyor 5. With the rod 24 of the cylinder 23 protruding above the conveyor 5 (see the rod 24 shown by a chain line), the front surface of the carrier 2 conveyed rightward by the conveyor 5 is the rod 2
At 4, the carrier 2 stops. That is, cylinder 2
3 is a stopper for the carrier 2. With the carrier 2 stopped in this way, the rod 2 of the cylinder 25 as a clamping means provided on both sides of the carrier 2
Numeral 6 projects as shown in FIG. 2, and clamps the carrier 2 to fix it at a predetermined position.

In FIG. 1, reference numeral 30 denotes a mounting head.
A suction section 31 is provided below the mounting head 30. The suction part 31 vacuum-adsorbs the conductive ball 32 to a suction hole (not shown) formed on the lower surface thereof. Suction unit 31
Are provided corresponding to the work 1 held by the carrier 2. The suction unit 31 vacuum-suctions a plurality of conductive balls 32 corresponding to the pads 4 of the work 1. The mounting head 30 horizontally moves in the X and Y directions and moves up and down by means (not shown). Mounting head 30
A recognition camera 33 is attached to the side of the camera.

This conductive ball mounting apparatus has the above-described configuration, and the entire operation will be described next. In FIG. 1, a carrier 2 on which a work 1 is placed is conveyed rightward by a conveyor 5 and stops on a rod 24 of a cylinder 23, and is clamped and fixed by a rod 26 of a cylinder 25 (FIG. 2). Is done. At this time, the support portion 10 has retreated below the conveyor 2.

Next, the rod 14 of the cylinder 13 protrudes, and the support portion 10 rises to lift the work 1 from below (see the work 1 shown by a chain line in FIG. 1). In this state, the motor 17 is driven to move the support portion 10 in the X direction, thereby, as shown in FIG.
Is brought into contact with the inner surface a of the hole 3. Next, the motor 22 is driven to move the support portion 10 in the Y direction, thereby bringing the side surface B of the work 1 into contact with the inner side surface b of the hole 3 (see the work 1 shown by a chain line in FIG. 2). . As mentioned above,
By pressing two orthogonal side surfaces A and B of the work 1 against two orthogonal inner side surfaces a and b of the hole 3, the work 1 is positioned in the X and Y directions. According to this method, if the machining accuracy of the two inner surfaces a and b of the hole 3 of the carrier 2 is ensured, the positioning of a large number of works 1 held on the carrier 2 in the X and Y directions can be performed at once. And can be performed with high accuracy. In addition, by setting the arrangement of the inner side surfaces a and b of each hole 3 to be the same as the arrangement pitch of the suction portions 31, each work 1 can be positioned in accordance with the arrangement of the suction portions 31. Thereby, the conductive balls 32 can be mounted on the plurality of works 1 at a time.

Next, the position of the work 1 is detected by moving the camera 33 above any of the works 1 and recognizing a characteristic portion (for example, the pad 4) of the work 1. Then, according to the recognition result, the mounting head 30 is moved in the X direction or Y direction.
The conductive ball 32 held by the suction unit 31 is aligned with the pad 4 of the work 1 by moving the suction ball 31 in the direction. Next, the suction part 31 is lowered to land the conductive ball 32 on the pad 4. Then, the vacuum suction state of the conductive ball 32 is released, and then the suction part 31 is raised. 4 mounted. The recognition operation may be performed on a plurality of works 1.

After the conductive balls 32 are mounted on the work 1 as described above, the rods 14 of the cylinders 13 are retracted and the support portions 10 are retreated below the carrier 2 to move the work 1 into the holes 3. And cylinder 2
5, the carrier 2 is released from the clamp state, and the rod 24 of the cylinder 23 is retracted downward to convey the carrier 2 to the next step.

[0019]

According to the present invention, a plurality of workpieces held by a carrier are simultaneously pressed against the inner side surface of the hole, whereby the plurality of workpieces are collectively and accurately positioned.
The conductive ball can be mounted on the work pad with high positional accuracy.

[Brief description of the drawings]

FIG. 1 is a side view of a conductive ball mounting apparatus according to an embodiment of the present invention.

FIG. 2 is a partial plan view of a carrier of the conductive ball mounting apparatus according to one embodiment of the present invention.

[Explanation of symbols]

 1 Work 2 Carrier 3 Hole 4 Pad 5 Conveyor 10 Support 12 Movable Plate 13 Cylinder 16, 21 Feed Screw 17, 22 Motor 23 Cylinder 30 Mounting Head 31 Suction Part 32 Conductive Ball

Claims (2)

(57) [Claims] 1. A carrier having a plurality of holes for holding a workpiece, lifting means for supporting and lifting a plurality of workpieces held in the holes from below, and lifting means for lifting the workpiece. Moving means for positioning the work by pressing the side surface of the work against the inner surface of the hole by moving the work relative to the carrier;
A plurality of suction parts corresponding to the work are provided, and a plurality of conductive balls are vacuum-sucked to these suction parts, and a mounting head for collectively mounting the conductive balls on the plurality of work pieces positioned. Transport for transporting said carrier
The front of the carrier that has been transported hits the road
A stopper for stopping the carrier is provided.
Camera for observing the characteristic part of the work conveyed by
And the camera recognizes the characteristic portion and
The position of the work is detected, and the work is
The carrier relative to the carrier.
The conductive ball held by the suction portion is
A conductive ball mounting device, wherein the conductive ball is mounted on a pad . Wherein the sequence of said inner surface of said plurality of respective holes, mounting apparatus of the conductive ball according to claim 1, characterized in that the same as the sequence of the suction unit.