JP3337571B2 - Structure of wire clamp mechanism in wire bonding apparatus and method of fixing clamp piece - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a transistor or I
The present invention relates to a structure of a wire clamp mechanism for clamping a wire when the wire is cut or the like in a wire bonding apparatus for performing wire bonding when manufacturing C, and a method for fixing a clamp piece in the wire clamp mechanism.

[0002]

2. Description of the Related Art In general, wire bonding by a wire bonding apparatus forms a ball portion at the lower end of a wire inserted into a capillary tool, which is one of bonding tools, as is well known in the art.
The ball portion is moved first by the downward movement of the capillary tool.
The capillary tool is moved to the second bonding point, and the wire is joined to the second bonding point, and the capillary tool is clamped while the wire is clamped by the wire clamping mechanism. This is done in such a way that the wire is cut by raising the device together.

In this case, in the conventional wire bonding apparatus, the wire clamp mechanism is a scissors type in which a pair of left and right clampers are pivotally opened and closed so as to be freely rotatable. The piece is configured to sandwich the wire, but the wire is
In order to ensure that this extremely fine wire can be reliably pinched without any damage on the tip end surfaces of the contact pieces of both clampers, it is necessary to use both clampers. When the body closes,
The clamping surfaces of the respective contact pieces must be configured to contact in parallel with each other.

[0004]

Therefore, in the conventional wire clamp mechanism, a contact piece attached to the tip of both clampers is configured so that its clamp surfaces can be adjusted, and a state where both clampers are attached is provided. In the above, since the clamp surface of each contacting piece when closed is finely adjusted to be in a posture parallel to each other, it requires a lot of trouble and high skill. In addition to this, there has been a problem that the above-described adjustment state frequently collapses during the wire bonding operation.

An object of the present invention is to provide a wire clamp mechanism that solves these problems.

[0006]

SUMMARY OF THE INVENTION In order to achieve this technical object, the present invention provides a pair of clampers which are pivotally connected to each other so as to open and close, and an operating mechanism for opening and closing the clampers. A wire clamp mechanism in which a clamp piece for a wire is fixed to a tip portion of each of the clamper bodies. In the wire clamp mechanism, a reference plane is provided on each of the clamper bodies so as to contact each other when closed. Then, the clamp pieces of the two clamper bodies are fixed to the tip portions of the two clamper bodies with an adhesive so that the clamp surfaces of the clamp pieces are flush with the reference plane. " .

Further, the fixing method according to the present invention comprises the steps of: "providing a pair of right and left clampers in a wire clamp mechanism for a wire bonding apparatus with reference planes which are brought into contact with each other when both clampers are closed, On the surface plate having an upper surface formed as a flat surface, the both clampers are placed so that the reference plane of the clamper comes into contact with the surface of the surface plate, and a clamp piece fixed to the both clampers is provided. Placed so that the clamp surface of the clamp piece contacts the flat surface of the surface plate,
In this state, the back side of the clamp piece is adhered to the tip of the clamper body with an adhesive, and then the adhesive is dried and cured. Is the thing.

[0008]

According to the present invention, as described above, the clamp piece is bonded to the tip of the clamper body such that the clamp surface of the clamp piece is flush with the reference plane provided on the clamper body. In the state before the two clampers are pivotally connected to each other, a clamp piece is provided at each of the distal ends thereof when the two clampers are closed. It is possible to securely adhere to each other in a state where they can be in close contact with each other in a state parallel to each other.

Therefore, according to the present invention, it is possible to dispense with adjusting the clamp pieces at the distal ends of the two clamper bodies in an assembled state, and to change the posture of the clamp pieces in the two clamper bodies during the wire bonding operation. It can be surely prevented from changing. Further, according to the fixing method of the present invention, as described above, the clamp piece to the tip of the clamper body,
A series of operations of fixing with an adhesive so that the clamp surface of the clamp piece is flush with the reference plane provided on the clamper body can be performed on the upper surface of the surface plate, greatly improving the workability. It can be improved.

Further, in the above-mentioned fixing method,
As described in “Claim 3”, by supporting the back surface side of the clamp piece against the clamper body until the adhesive is dried and cured, the adhesive is dried and cured. As a result, the clamp piece of the clamp piece can be prevented from being lower than the reference plane of the clamper body due to the contraction of the volume. The work of fixing with an adhesive so that the surface is flush with the reference plane provided on the clamper body can be performed more accurately.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In this figure, reference numeral 1 denotes a main body of the wire bonding apparatus.
A horn body 2 is supported via its support member 3 so as to be able to vibrate, and a cabillary tool 4 which is one of bonding tools is attached to the tip of the horn body 2. A wire 5 is inserted through 4.

Reference numeral 6 denotes a wire clamp mechanism for the wire 5. The wire clamp mechanism 6 is attached to the upper surface of the support member 3 with screws 7 on one clamper body 8 and on the other clamper 8. The other clamper body 9 pivotally connected to the other clamper body 8 is positioned between the other ends of the two clamper bodies 8 and 9 to open and close the other clamper body 9 with respect to the one clamper 8. And an opening / closing operation mechanism 10 such as an electromagnet for clamping.
With 18, the wire 5 inserted into the cabillary tool 4 is clamped.

When the other clamper body 9 is pivotally connected to the one clamper 8 so that the other clamper body 9 can be freely opened and closed, protrusions 8 are provided on the upper and lower surfaces of the two clamper bodies 8 and 9.
a, 8b, 9a, 9b are integrally protruded, and thin leaf spring bodies 11, 12 are provided between the projections 8a, 9a on the upper surfaces of the clamper bodies 8, 9 and between the projections 8b, 9b on the lower surface. And the both ends of the leaf spring bodies 11 and 12 are screwed into the respective protruding portions 8a, 8b, 9a and 9b with the screws 15 and 16 with the washer plates 13 and 14, respectively. The other clamper body 9 is the two leaf spring bodies 1
It is fixed so that it can be opened and closed by the bending of the first and second bends.

On the other hand, each of the inner surfaces of the clampers 8, 9 is provided with the projections 8a, 8b, 9a, 9b.
The reference planes 19a, 19b, 20a, and 20b are provided on both the part near the tip and the part near the tip so that the clampers 8 and 9 come into contact with each other when the clampers are closed.
The recesses 21 and 22 are provided at the tip end, and the recesses 21 and 22 are provided.
The clamp pieces 17 and 18 are placed inside the clamp piece 1.
Adhesives 23 and 24 are used to fix the clamp surfaces 17a and 18a on the reference numerals 7 and 18 so as to be flush with the reference planes 19a, 19b, 20a and 20b.

With such a configuration, the other of the two clamper bodies 8, 9 is closed and rotated toward one of the clampers 8 by the opening / closing operation mechanism 10, whereby the two clamper bodies 8 are formed. , 9, the reference planes 19a, 19b, 20a, 20b abut against each other, and at the same time, the clamp surfaces 17a, 18a of the clamp pieces 17, 18 affixed to the tips come into contact with each other in a parallel state. Therefore, the wire 5 having an extremely small wire diameter can be reliably clamped without damaging the wire 5 in the meantime.

When the clamp pieces 17, 18 are fixed to the tips of the clampers 8, 9 with adhesives 23, 24, the following method is employed. First, as shown in FIGS. 5 and 6, a surface plate A having an upper surface formed on a plane A1 is used. On the upper surface of the surface plate A, the one clamper body 8 is attached. The clamp pieces 17 are mounted such that the reference planes 19a and 19b are in contact with the plane A1 of the surface plate A, and are fixed in the recesses 21 at the distal end of the clamper body 8.
Is placed so that the clamp surface 17a of the clamp piece 17 contacts the plane A1 of the surface plate A. In this state, the back surface of the clamp piece 17 is bonded to the tip of the clamper body 8 with an adhesive. After bonding at 23, the adhesive 23 is dried and cured.

Further, the other clamper body 9 is placed on the upper surface of the surface plate A such that the reference planes 20a and 20b of the clamper body 9 contact the plane A1 of the surface plate A, The clamp piece 18 fixed in the recess 22 at the tip end of the clamper body 9 is placed so that the clamp surface 18a of the clamp piece 18 contacts the plane A1 of the surface plate A. After the back surface of the clamp piece 18 is bonded to the tip of the clamper body 9 with an adhesive 24, the adhesive 24 is dried and cured.

As a result, the clamp pieces 17, 18 are attached to the tip portions of the two clamper bodies 8, 9, respectively.
The clamp surfaces 17a, 18a of the reference numerals 19, 19b, 20
a, 23b in such a position as to be flush with 20b.
A series of operations of fixing at 24 can be performed on the upper surface of the platen A.

By the way, as described above, the clamp pieces 17,
The adhesives 23 and 24 used for fixing the adhesive 18 are dried and dried.
Since the volume is reduced by curing, the clamp piece 1
The clamping surfaces 17a, 18a of the clampers 7, 18 are respectively connected to the reference planes 19a, 19b, 20 of the clamper bodies 8, 9.
a, 20b. Then, as shown in FIGS. 5 and 6, screws 25 and 26 are screwed to the distal ends of the two clampers 8 and 9, and the distal ends of the screws 25 and 26 are previously fixed to the clamp pieces 17 and 18. By contacting the back surfaces, the back surfaces of the clamp pieces 17 and 18 are supported, and in this state, the adhesives 23 and 24 are dried and dried.
By curing, the shrinkage of the adhesives 23 and 24 due to drying and curing causes the clamp pieces 17 and 18 to harden.
Are fixed to the reference planes 19a, 19b, 20a, 2 in the clamper bodies 8, 9, respectively.
0b can be reliably prevented from becoming lower than 0b.

The screws 25 and 26 used here are:
The adhesives 23 and 24 may be removed after being dried and hardened. Alternatively, one or both of the screws 25 and 26 may be used to attach the guide member of the wire 5.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of the present invention.

FIG. 2 is an enlarged sectional view taken along line II-II of FIG.

FIG. 3 is an enlarged plan view of FIG. 1;

FIG. 4 is a plan view showing a state where a wire clamp mechanism is disassembled.

FIG. 5 is a view showing a state in which a clamp piece is fixed to one clamper body.

FIG. 6 is a diagram showing a state in which a clamp piece is fixed to the other clamper body.

[Description of Signs] 1 Main body of wire bonding apparatus 2 Horn body 3 Support member 4 Capillary tool 5 Wire 6 Wire clamp mechanism 8 One clamper body 9 The other clamper body 10 Opening / closing operation mechanism 11,12 Leaf spring body 17,18 Clamp Pieces 17a, 18a Clamp surfaces 19a, 19b, 20a, 20b Reference planes 21, 22 Recesses 23, 24 Adhesive

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21/60

Claims (3)

(57) [Claims] A pair of clampers which are pivotally connected to each other so as to be openable and closable, and an actuating mechanism for opening and closing the clampers. In a wire clamp mechanism in which pieces are fixed, a reference plane is provided on each of the clampers so as to contact each other when the clampers are closed, and a clamp piece of each of the clampers is attached to a tip portion of each of the clampers. On the other hand, the structure of the wire clamp mechanism in the wire bonding apparatus, wherein the clamp piece is fixed with an adhesive so that the clamp surface of the clamp piece is flush with the reference plane. 2. A platen in which a pair of left and right clampers in a wire clamp mechanism for a wire bonding apparatus are provided with reference planes which are brought into contact with each other when the two clampers are closed, and the upper surface is formed as a plane. In addition, while placing the two clampers, so that the reference plane of the clamper body is in contact with the plane of the surface plate,
The clamp pieces to be fixed to the two clampers are placed such that the clamp surface of the clamp piece is in contact with the flat surface of the surface plate, and in this state, the back side of the clamp piece is positioned with respect to the tip of the clamper body. A method for fixing a clamp piece of a wire clamp mechanism in a wire bonding apparatus, wherein the adhesive is dried and hardened after bonding with an adhesive. 3. The wire clamp according to claim 2, wherein the back side of the clamp piece is supported on a clamper until the adhesive is dried and hardened. How to fix the clamp piece of the mechanism.