JP3327539B2 - Structure including organic molecular film and use thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a structure containing an organic molecular film and its use. More specifically, the present invention relates to an organic molecular film formed on at least one of two substrates that are closely adjacent to each other, and the surface of the organic molecular film and the surface of the opposing substrate or the surface of the organic molecular film on the substrate surface. Is small, usually less than 100 μm, preferably 1 μm.
Structures that are less than μm and their use. The present invention further relates to an intermolecular repulsion motor or the like using the above structure.

[0002]

2. Description of the Related Art Conventionally, there has been almost no research on a structure maintaining a small gap, usually smaller than 100 μm, and preferably smaller than 1 μm, by positively utilizing a repulsive force that can occur when two opposing surfaces come close to each other. In fact, no equipment including such a structure has been developed at all.

[0003]

Accordingly, the first aspect of the present invention is as follows.
The object of the invention is that an organic molecular film is formed covalently on at least one of two adjacent surfaces, and the organic molecule formed covalently on the substrate surface or the substrate surface opposite to the organic molecular film surface It is an object of the present invention to provide a structure having a small gap with the surface of the film, usually less than 100 μm, preferably less than 1 μm. Further, a second object of the present invention is to provide a motor, a bearing, a guide, an actuator, an anti-vibration table, and the like including the above structure.

[0004]

SUMMARY OF THE INVENTION The present inventors have maintained a gap between two opposing surfaces with a small gap, typically less than 100 μm, and preferably less than 1 μm, to maintain the gap between both surfaces. As a result of diligent research on a method for preventing contact, as a result of forming an organic molecular film on at least one of the two surfaces, the organic molecules formed on the organic molecular film surface and the other substrate surface or the other substrate surface are formed. By effectively utilizing various repulsive forces acting between the film surfaces,
Discovered that the original purpose can be achieved. The present invention has been completed by further research based on this discovery.

One of two surfaces facing each other with a minute gap, usually less than 100 μm, preferably less than 1 μm, is the surface of an organic molecular film such as a polymer formed on the surface of the substrate, and the other is the surface of the organic molecule film. In the case of the surface of the organic molecular film formed on the surface of itself or the surface of the substrate, various repulsive forces work when both surfaces come closer,
A phenomenon occurs that prevents further access of both surfaces. Positively utilizing such repulsion generated between both surfaces to maintain such a small gap or maintain lubrication between both surfaces,
At present, no attempt has been made to reduce the friction generated when sliding between the two surfaces. However, such structures have many potential uses.

For example, in one embodiment of the present invention,
In the case of two substrates opposed to each other with a small gap therebetween and an organic molecular film formed on at least one surface thereof, the small gap locally fluctuates according to the vibration of the structure, A vibration isolation table is provided in which the gap interval as an average value is kept constant.

In another aspect of the present invention, there is provided a precision miniature motor including the structure of the present invention. In this area,
Its production scale exceeds 2 billion units annually, and it is expected that its use in audio equipment and office information equipment will be further expanded, especially as a small finger size motor. In particular, fluid bearings include VTR motors, polygon mirror motors, and MPUs.
Applications for cooling fan motors for optical disks, spindle motors for optical disks, and motors for magneto-optical recording and hard disk drives have been greatly expanding. From such a market, further miniaturization of the motor is required.
By the year, the diameter of the motor is reduced to about 2 millimeters, and the gap between the stator and the slider is considered to be extremely small. In the case of a motor having such a small gap, an organic molecular film is formed on at least one of the two opposing surfaces, and the surface of the organic molecular film is opposed to the surface of the substrate or the surface of the organic molecular film on the substrate surface. It is believed that the benefit of utilizing the structure of the present invention, where the gap is very small, usually less than 100 μm, preferably less than 1 μm, is very high.

Further, according to another aspect of the present invention, there is provided a cylindrical actuator (driving device) which can be used for artificial muscles and the like. For example, a lightweight actuator, such as a muscle of a living organism, whose driving range smoothly extends and contracts from millimeters to meters is provided by utilizing the structure of the present invention. In order to make an actuator similar to a muscle, an actuator that expands and contracts is required. In order to create an actuator that expands and contracts using an electromagnetic motor, a conversion gear or the like that changes the rotational movement of the motor into an expansion and contraction movement is required. Therefore, the structure of the actuator using the electromagnetic motor is complicated, and the weight of the actuator is larger than that of the muscle having the same movement characteristics. Although an actuator using a piezoelectric element has been proposed, it is suitable for a small movement but cannot perform a large movement.
There are many problems in using an actuator using a conductive polymer or gel or an actuator using a shape memory alloy. In this respect, artificial muscles based on the structure of the present invention and using an electrostatic motor have a large dynamic range and are lightweight. In the artificial muscle of the present invention, a large number of pores penetrate into a thick cylinder in which disk electrodes are embedded at regular intervals. Capillary tubes provided alternately are inserted, and the distance between the inner wall of the pores and the organic molecular film of the capillaries is very small.
The structure of the present invention is maintained at less than μm, preferably less than 1 μm, and the thin tube in the pore moves and expands and contracts by applying an alternating current to the cylindrical disk electrode.

In still another aspect of the present invention, there is provided a laminated film actuator. It has a structure in which two types of films that move relative to each other by applying a voltage are laminated. On one side of one film, two comb-shaped electrodes are formed, and on the other side, rectangular areas of organic molecular films having positive or negative charges are alternately arranged. Are laminated so that the surface on which the film is patterned faces each other, and a liquid is filled between the two films. The distance between the surface of one film and the surface of the other organic molecular film is minute, and is usually
m, preferably less than 1 μm.

That is, the gist of the present invention is as follows: (1) An organic molecular film is formed by covalent bonding on all or a part of both opposing surfaces of two substrates that are closely adjacent to each other, and the distance between the organic molecular films is (2) an organic molecular film is formed by a covalent bond on all or a part of both opposing surfaces of two substrates that are closely adjacent to each other, and (3) The structure according to (1) or (2), wherein all or at least a part of the surfaces of the two substrates are opposed to each other. The structure according to any one of (1) to (3), wherein a minute gap between both surfaces is maintained by steric repulsion acting between both surfaces of the organic molecular film; Due to elasticity, moisture between both substrate (6) The structure according to any one of (1) to (4), wherein the base is cylindrical, disk-shaped, or spherical. (7) The structure according to any one of the above (1) to (5), wherein a dielectric layer is provided on the surface of the base, and an organic molecular film is formed thereon. The structure according to any one of (1) to (6), wherein a wear-resistant layer is provided on the surface, and an organic molecular film is formed thereon. (9) A wear-resistant layer and a dielectric layer on the surface of the substrate. Wherein the organic molecular film is formed thereon.
(6) The structure according to any one of (10), wherein the wear-resistant layer is a diamond-like carbon film, an ion-implanted film or a nitride film, and the dielectric is barium titanate (BaTiO3) or barium strontium tantalate ( (11) The structure according to (9) above, wherein the base is selected from the group consisting of ceramic, quartz, glass, plastic, metal, metal oxide, silicon, nitride, and semiconductor. (1)-
(10) The structure according to any one of (1) to (11), wherein the periphery of the organic molecular film is filled with water. (13) The organic molecule. The structure according to any one of the above (1) to (11), wherein the periphery of the film is filled with an aqueous solution, (14) the periphery of the organic molecular film is filled with a lower alcohol having 1 to 6 carbon atoms. (1) to (1)
(15) The structure according to any one of (1) to (11), wherein the periphery of the organic molecular film is filled with a fluoropolymer compound. The structure according to any one of the above (1) to (11), wherein the periphery of the organic molecular film is filled with an oily material, (17) a structure in which a solid electrolyte is in contact with the surface of the organic molecular film. (18) The structure according to any one of (1) to (11), wherein an electrode is provided on one of the substrates and an electrostatic repulsion is generated between the opposing surfaces by applying an electric field. (19) The structure according to (18), wherein the electric field is a direct current and / or an alternating current, (20) the electric field is greater than about 5 times the alternating current. wherein it further contains a radio-frequency (19) structure according Body, (21) the organic molecular film is anchored portion, said is made of a middle portion and a surface portion (1) to (20)
(22) The structure according to (21), wherein the organic molecular film is covalently bonded to the substrate surface by the anchor portion. (24) The structure according to (21), wherein the surface portion has a charge; (24) the structure according to (21), wherein the surface portion of the organic molecular film has no charge; The structure according to the above (21), wherein the surface portion comprises a portion having a charge and a portion having no charge, (26) the surface portion having a charge is polylysine, polyglutamine, polyasparagine or polylysine having a positive charge. The structure according to the above (22) or (25), which is constituted by polyarginine and / or polyglutamic acid or polyaspartic acid having a negative charge, 27) The charged surface portion is a quaternary ammonium group or diazonium salt having a positive charge, and a sulfonic acid group, a sulfinic acid group, a sulfenic acid group, a carboxylic acid group, a phosphoric acid group and a phosphorous acid group having a negative charge. (28) The structure according to the above (23) or (25), comprising a polymer containing one or more groups selected from the group consisting of an acid group; (28) the polymer is polystyrene, polyacetylene, polyvinyl ester, Polyvinyl alcohol, polyvinyl ether, polyethylene terephthalate, polyethylene glycol, poly p-phenylene ether, polyacetal, polycarbonate, polyethylene imine,
At least one selected from the group consisting of polyamide, polyurethane, polyurea, polyimide, polyimidazole, polyoxazole, polypyrrole, polyaniline, polysulfide, polysulfone, polyphosphoric acid, polyphosphate, polyphosphazene, polysiloxane and polysilane. (29) The non-charged portion of the surface portion is a vinyl chloride-vinyl acetate copolymer, a vinyl chloride-vinylidene chloride copolymer, an ethylene-propylene copolymer, an ethylene- Vinyl acetate copolymer, acrylonitrile-styrene copolymer, styrene-butadiene copolymer, tetrafluoroethylene-hexafluoroethylene copolymer, acrylonitrile-butadiene-styrene copolymer, styrene-maleic anhydride copolymer and the like. (30) The structure according to the above (23) or (25), which is at least one polymer selected from the group consisting of ethylene glycol copolymer and ethylene-vinyl alcohol copolymer, (30) the surface portion having no charge is polyglycine (31) the structure according to (24) or (25), wherein the structure is selected from the group consisting of polyphenylalanine, polyalanine, polyleucine, polyisoleucine, polyvaline, polyproline, polyserine, polythreonine and polytyrosine; (32) A motor including the structure according to any one of (1) to (17), (32) comprising a slider and a stator that are closely adjacent to each other, and organically bonded to one or all of the opposing surfaces by covalent bonding. A motor in which a molecular film is formed and a gap between the organic molecular film and the other surface is less than 100 μm; A motor comprising a slider and a stator which are closely adjacent to each other, an organic molecular film is formed by covalent bonding on all or a part of one of the opposed surfaces, and a gap between the organic molecular film and the other surface is less than 1 μm. (34) The motor according to (31) to (31), wherein the motor is a DC motor, an induction motor, a synchronous motor, or an AC commutator motor.
(33) The motor according to any one of (31) to (33), wherein the motor is driven by electrostatic force. (36) The motor slider or stator is minute. Arranged close to the interval, of these surfaces, at least one surface is formed with a charged organic molecular film in a repeated pattern, and the other substrate is formed with electrodes in a repeated pattern. (37) A motor characterized in that an alternating voltage is applied to the electrodes to generate a propulsive force between the slider and the stator. (37) The slider or the stator of the motor is arranged close to a minute interval, and at least An organic molecular film having a charge is formed on one surface, and the organic molecular film is formed in a pattern in which positive charges and negative charges are alternately repeated, A motor in which electrodes are formed in a repetitive pattern and alternating voltages having different phases are applied to the electrodes of the repetitive pattern to generate a propulsive force between a slider and a stator; (39) The motor according to the above (36) or (37), wherein a minute gap between the two or a gap between the surface of the one organic molecular film and the surface of the other substrate is less than 100 μm. (3) wherein the minute gap between the molecular film surfaces or the minute gap between the one organic molecular film surface and the other substrate surface is less than 1 μm.
(40) The motor according to any one of (35) to (39), wherein a slider and a stator of the motor are cylindrical. One of the two substrates arranged close to each other is a disk, and an organic molecular film having a charge is radially formed with a predetermined line width on the disk surface repeatedly, and an electrode is formed on the other substrate with the predetermined line width. A motor which is formed radially and repeatedly to generate an impulse on the disk by applying an AC voltage to the electrodes of the repeated pattern; (42) a magnetic recording medium is formed on the other surface of the disk (43) The motor according to (41), wherein one of the two substrates disposed in close proximity to each other is a disk, and has an arc shape having a predetermined line width and a predetermined radius on the surface of the disk. Charge An electrode having the predetermined line width and radius is formed in an arc shape on the other substrate, a DC voltage is applied to the electrode, and a centripetal force is generated with respect to the center of the disk. (44) The surface of the two substrates disposed close to each other at a minute interval is a spherical surface, and an organic molecular film having electric charge along the spherical surface with a predetermined line width is formed on the inner spherical surface. A motor formed by repeatedly forming an electrode on the surface of the other sphere along the spherical surface with the predetermined line width, and applying an AC voltage to the electrode of the repetitive pattern to generate a propulsive force on the disk. (45) The surfaces of the two substrates disposed close to each other at a minute interval are spherical, and an organic molecular film having a predetermined line width and having charges in the latitude direction along the spherical surface is repeatedly formed on the inner spherical surface. And the electrode on the other sphere surface with the predetermined wire (46) A motor characterized by repeatedly forming in a latitude direction along a spherical surface and applying an AC voltage to the electrodes of the repeating pattern to generate a propulsive force on the disk. The surface of one substrate is a spherical surface, an organic molecular film having charges in the latitude direction along the spherical surface with a predetermined line width is repeatedly formed on the inner spherical surface, and an electrode is formed on the other spherical surface with the predetermined line width. (47) a motor repeatedly formed in the latitude direction along the spherical surface and divided in the longitude direction by applying an AC voltage to the electrodes of the repeating pattern to generate a propulsive force on the disk; The surface of the two substrates close to the minute interval is a spherical surface, and an organic molecular film having a predetermined line width and a charge in the longitudinal direction along the spherical surface is repeatedly formed on the inner spherical surface, and an electrode is formed on the other spherical surface. The said predetermined line width (48) two motors arranged in close proximity to a minute interval, wherein the motor is formed repeatedly in the longitudinal direction along the spherical surface, and applies an AC voltage to the electrodes of the repeating pattern to generate a propulsive force on the disk. The surface of the substrate is a spherical surface, an organic molecular film having a charge in the longitudinal direction on the equator along the spherical surface with a predetermined line width is repeatedly formed on the inner spherical surface, and an electrode is formed on the other spherical surface with the electrode. It is repeatedly formed in the longitude direction on the equator along the spherical surface with line width,
Repeated formation of organic molecular film with charge in the latitudinal direction,
An electrode is repeatedly formed in the latitude direction along the spherical surface at the predetermined line width on the other spherical surface, and is divided in the longitudinal direction. (49) a small gap between the surfaces of the organic molecular films on the surfaces of the two substrates disposed in close proximity to the minute space, or the surface of one of the organic molecular films on the two substrates; The motor according to any one of (41) to (48), wherein a small gap between the motor and the other substrate surface is less than 100 μm. (41) to (41), wherein the minute gap between the organic molecular film surfaces on the substrate surface or the minute gap between one organic molecular film surface of the two substrates and the other substrate surface is less than 1 μm. 4 (51) The motor according to any one of (51), wherein the pattern of the organic molecular film formed on the substrate is a combination of an organic ultra-thin film manufacturing method and a printing method, an inkjet method, an electron beam drawing method, or a photolithography method on the surface of the substrate. (52) The motor according to any one of (36) to (50), wherein (52) the lubrication between the slider and the stator is secured by the elasticity of the organic molecular film formed on the surface of both the slider and the stator. (53) The motor according to any one of (30) to (47), wherein (53) the slider and the stator by the elasticity of the organic molecular film formed on the surface of both the slider and the stator and the repulsive force acting between the organic molecular films. (54) The motor according to any one of (31) to (52), wherein lubrication between the motor and the motor is ensured. A plate (first substrate) and a fixed substrate (second substrate) are arranged close to each other at a minute interval, and a circular shape having a predetermined line width and a predetermined radius is formed on the adjacent surface of the first substrate. A charged organic molecular film is formed on the surface of the support, and the convex support is formed at a predetermined line width and a predetermined radius on the opposite surface of the second substrate. Forming an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate on the surface of the support; applying an electrolyte liquid to the surface of the first substrate; Is characterized in that the electric double layer repulsion acting between the surfaces of the organic molecular film and the gravity of the first substrate are balanced by immersing the convex support in the electrolyte liquid to maintain a minute gap between both surfaces. (55) a rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) A circular convex support having a predetermined line width and a predetermined radius is provided on a surface adjacent to the first substrate at a small distance, and organic molecules having charges on the surface of the support are provided. A film is formed, and a convex support is provided at a position with a predetermined line width and a predetermined radius on the opposite surface of the second substrate, and the charge of the organic molecular film on the first substrate is provided on the surface of the support. An organic molecular film having the same kind of charge as the above, an electrolyte liquid is applied to the surface of the first substrate, and the convex support of the second substrate is immersed in the electrolyte liquid to form an organic molecular film between the surfaces of the organic molecular film. (56) a bearing characterized in that the electric double layer repulsion acting on the surface and the meniscus attraction of the liquid formed between both surfaces are balanced to maintain a small gap between the two surfaces; (A first substrate) and a fixed substrate (a second substrate) are disposed in close proximity to each other at a minute interval, A circular convex support having a predetermined line width and a predetermined radius is provided on an adjacent surface of the substrate, and an organic molecular film having a charge is formed on the surface of the support. A convex support is provided at a predetermined line width and a predetermined radius on the surface to be formed, and an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate is formed on the support surface. Then, an electrolyte liquid is applied to the surface of the first substrate, and the convex support of the second substrate is immersed in the electrolyte liquid to maintain a small gap by electric double layer repulsion acting between the organic molecular film surfaces. Further, an organic molecular film having a circular charge pattern with a predetermined line width is formed at a position of a predetermined radius on the surface of the first substrate, and the charge on the first substrate is formed on the surface of the second substrate. Forming electrodes on the outside and inside so as to sandwich the pattern, and applying a DC voltage between the electrodes (57) a minute gap between the organic molecular film surfaces of the two substrate surfaces arranged in close proximity to each other or the two substrates; The bearing according to any one of (54) to (56), wherein a minute gap between one organic molecular film surface and the other substrate surface is less than 100 μm. A minute gap between the organic molecular film surfaces on the two substrate surfaces or the minute gap between one organic molecular film surface of the two substrates and the other substrate surface is less than 1 μm. (59) The bearing according to any one of the above (54) to (56), (59) a pattern of the organic molecular film formed on a substrate, a method for producing an organic ultra-thin film, a printing method, and an ink jet method The bearing according to any one of (54) to (58), which is formed by a combination of a method, an electron beam drawing method, or a photolithography method. (60) Two substrates (a first substrate and a second substrate). Substrates) are disposed in close proximity to a minute interval, a linear convex support having a predetermined line width is provided on the surface of the first substrate, and an organic molecular film having a charge is provided on the surface of the support. It is formed in a linear shape, an electrode having a predetermined line width and an interval is linearly formed on the surface of the second substrate, an electrolyte liquid is applied to the surface of the first substrate, and a DC voltage is applied to the electrode. A guide that moves along the line by an external force; (61) two substrates (a first substrate and a second substrate) are arranged in close proximity to each other, and A linear convex support having a predetermined line width is provided on the surface of the And second
Forming an organic molecular film having a charge on the surface of the linear convex support, and providing third and fourth linear convex supports on the surface of the second substrate; A charged organic molecular film is formed on the surface of the substrate, an electrolyte liquid is applied to the surface of the first substrate, and a minute gap between both surfaces is maintained by electric double layer repulsion acting between the organic molecular film surfaces. And the fourth
An electrode having a predetermined line width and an interval is linearly formed on the convex support, a DC voltage is applied to the electrode, and the guide is moved along the line by an external force. (62) The minute gap between the organic molecular film surfaces of the two substrates arranged close to the minute space or the minute gap between one organic molecular film surface of the two substrates and the other substrate surface is increased. (63) The guide according to (60) or (61), wherein the gap is between the surfaces of the organic molecular films on the surfaces of the two substrates arranged in close proximity to each other. The guide according to the above (60) or (61), wherein a minute gap between one organic molecular film surface of one substrate and the other substrate surface is less than 1 μm. The organic component The method according to any one of (60) to (63), wherein the pattern of the daughter film is formed on the substrate surface by a combination of an organic ultra-thin film manufacturing method and a printing method, an inkjet method, an electron beam drawing method, or a photolithography method. (65) An actuator comprising a cylindrical structure, wherein a disk-shaped electrode is embedded in the cylindrical structure at a predetermined interval in parallel with the bottom surface of the cylinder. A thin tube penetrates through a large number of pores penetrating through, a liquid exists between the pores and the thin tube, and a band-like pattern of a positively charged organic molecular film and a negative charge are formed on the surface of the thin tube. The band-shaped patterns of the organic molecular film having the same are alternately arranged, the interval between the bands is the same as the interval between the disc-shaped electrodes, and the disc-shaped electrodes have a structure to which an AC voltage can be applied. of An actuator characterized in that the distance between the surface of the organic molecular film of the thin tube entering the hole and the inner wall of the pore is maintained at a small distance, (66) the diameter of the through hole is 1 mm to 100 mm (67) The actuator according to (65), wherein the minute interval is less than 100 μm, (68) The actuator according to (65) or (66), wherein the minute interval is less than 1 μm. (69) The actuator according to (65) or (66), wherein: (69) an actuator having a structure in which two types of films that move relative to each other by applying a voltage are alternately stacked. A pair of comb-shaped electrodes is formed on one side of the first film, and a rectangular area of a positively charged organic molecular film is formed on one side of the second film. And rectangular regions of organic molecular film with negative charge are alternately arranged,
The width of the adjacent rectangular region coincides with the width of the comb-shaped electrode, and a large number of the films are stacked so that the surface of the comb-shaped electrode and the surface of the organic molecular film face each other while being maintained at a small interval, Liquid is filled between the films,
(70) The actuator according to (69), wherein the minute interval is less than 100 μm; 71) The actuator according to (69), wherein the minute interval is less than 1 μm. (72) A rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) A magnetic recording medium is formed on the surface of the first substrate, that is, a rotating disk-shaped substrate, and an organic molecular film is further formed on the surface of the first substrate, that is, the second substrate That is, a magnetic recording / reproducing element was provided on the surface of a fixed substrate, a convex support having substantially the same height as the surface of the element was provided, and an organic molecular film was formed on the surface of the support. Features (73) a magnetic recording medium is formed on the surface of the first substrate, that is, a rotating disk-shaped substrate, and an organic molecular film is further formed on the surface; That is, a magnetic recording / reproducing element is provided on the surface of a fixed substrate, and a convex support having substantially the same height as the surface of the element is provided.
An organic molecular film is formed on the surface of the support, an electrolyte liquid is applied to the surface of the first substrate, and the convex support of the second substrate is immersed in the electrolyte liquid. (74) The magnetic recording / reproducing apparatus according to (72) or (73), wherein the gap between the surfaces of the organic molecular films on the two substrates arranged close to each other is less than 100 μm. (75) The magnetic recording / reproducing apparatus according to (64) or (65), wherein the gap between the surfaces of the organic molecular films on the two substrates arranged in proximity is less than 1 μm. (76) A micropump including the structure according to any one of (1) to (6), (77) the pump has a structure in which a liquid is sandwiched around an inner cylinder by an outer cylinder. One of the outer cylinders (78) The micropump according to the above (76), which further includes an operating portion of a pump. (78) The structure of the pump is a cylinder, and an organic molecular film is formed on a part of the cylinder. (79) The micropump according to the above (76) or (77), which performs a pump operation by peristaltic motion; (79) A vibration isolation table including the structure according to any one of the above (1) to (29); 80) Two flat plates opposed to each other, and an organic molecular film having the same kind of charge is formed on both surfaces, and when vibration propagates to one of the flat plates, the organic molecules on the disk are accordingly Wherein the membrane vibrates, which induces a stretching motion of the organic molecular film on the other flat plate, thereby removing the vibration by converting the vibration into energy of the vibration of the organic molecular film. 79) Described (81) a micro nozzle including the structure according to any one of (1) to (29), (82) two conical surfaces forming a nozzle core portion and a nozzle outlet portion, and The organic molecular film comprises an anchor portion covalently bonded to each conical surface, an intermediate portion acting as a mechanical elastic body, and a charged surface portion. (81) wherein the nozzle outlet conical surface is provided opposite to the nozzle core conical surface, and between which the nozzle outlet conical surface is filled with a jetting fluid as a medium. (83) An organic molecular film is formed on one of the opposing surfaces thereof, and a charge generating means is provided on the other substrate, and a charge generating means is provided between the surface of the organic molecular film and the surface of the other substrate. Gap is 1 0
(84) a structure having a size of less than μm, comprising: two substrates which are closely adjacent to each other, an organic molecular film is formed on one of the surfaces facing each other, and the other substrate is provided with a charge generating means; The gap between the surface of the organic molecular film and the surface of the other substrate is 1 μm
(85) The structure according to (83) or (84), wherein the charge generation means is a means for applying an electric field to a dielectric, (86) the charge generation means is an electrode. (87) The structure according to (83) or (84), wherein (87) the charge generating means is thermal polarization by laser irradiation.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail. The material constituting the substrate or the substrate (hereinafter sometimes collectively referred to as the substrate) used for the structure of the present invention is not particularly limited as long as it is a solid capable of forming an organic molecular film on its surface. Examples include metals such as iron, copper, nickel, and aluminum, ceramics, plastics, glass, particularly metal oxides such as quartz, sapphire, and MgO; semiconductors such as silicon; and nitrides such as Si ₃ N ₄ and BN. In particular, a material such as quartz or zerodur having a small coefficient of thermal expansion due to a narrow gap is preferable in achieving high precision, high rotation speed, long life, and the like.

In the structure of the present invention, the organic molecular film formed on the substrate is an organic molecule covalently bonded to the substrate, preferably a polymer compound directly or indirectly covalently bonded to the substrate. It means a film to be formed (including, for example, an organic ultrathin film and an organic monomolecular film).

In general, organic ultra-thin films are described in, for example, Akira Yabe, “Introduction to Organic Ultra-thin Films”, published by Baifukan, page 123, 1
It can be prepared by various methods described in 988. For example, the Langmuir-Blodgett method, in which a monomolecular film formed on a water surface is scooped on a substrate, a substrate is placed on a rotating table, a film-forming solution is dropped on the substrate, the table is rotated to dry, and a thin film is formed. A spin coating method, a casting method in which the solution is applied to the entire surface of the substrate and the solution is naturally dried to form a thin film, a water spreading method in which the solution is dried on the water surface to form a thin film,
An electrolytic polymerization method of forming a polymerized film on the surface of a conductive substrate using an electrolytic method, an anodizing method of depositing an oxide film by an electrolytic method, a vacuum deposition method of heating and evaporating a film component in a vacuum to deposit the film on a substrate, MBE method to form a film by molecular beam in ultra-high vacuum, cluster ion beam method to form a film by ionized molecular mass, ion beam vapor deposition method using both inert gas ion irradiation and vapor deposition, film by accelerated ions High-frequency ion plating method for forming, sputtering method in which particles for film formation are beaten out by ionized atoms and deposited on a substrate, chemical vapor deposition method (CVD method) for forming a film by chemically reacting in a gas phase, chemical The thermal CVD method or photo CVD method in which the reaction is performed by heat or light, the plasma polymerization method in which a film is formed by utilizing the reaction of ions or radicals generated by high frequency. There is. Among them, the CVD method and the plasma polymerization method are called chemical film forming methods.

Since the organic molecular film used in the structure of the present invention is formed by covalent bonding on the surface of the substrate, among the above methods, the chemical film forming method such as CVD, plasma polymerization, or plasma The CVD method and the like are preferable for manufacturing the structure of the present invention. In addition to the above methods, the chemical adsorption method (K.
Ogawa et al., Langmuir, 6, 851 (1990)) are also known.
However, although this method is preferable for forming a monomolecular film, it has a problem that it can be used only partially for forming an organic molecular film used in the present invention, which is not limited to a monomolecular film. The most preferable method for forming an organic molecular film used in the structure of the present invention is the method for producing an organic ultra-thin film described in JP-A-10-175267.

According to JP-A-10-175267, there are roughly three methods for producing an organic ultra-thin film. The first method comprises a functional group represented by the formula (1) or (2),

[0016]

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(However, A is Si, Ge, Ti, Sn or Zr. X is a halogen atom, an alkoxy group or an isocyanate group.)

[0018]

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(Where X is a halogen atom) or a polymer having only one of the functional groups capable of coordinating to a metal is brought into contact with a substrate, and the polymer is fixed on the surface of the substrate. This is a method of forming an organic ultra-thin film. In a second method, a polymer having two or more functional groups represented by the formula (1) or (2) or a functional group capable of coordinating to metal is brought into contact with a substrate, and the polymer is brought into contact with the substrate. This is a method of forming an organic ultra-thin film by a step of fixing the organic ultra-thin film on a surface. Further, the third method includes a step of forming a molecule having at least one functional group represented by the formula (1) or the formula (2) or a metal-coordinable functional group in the molecule and having a polymerizable functional group. An organic ultra-thin film by a first step of contacting the substrate and fixing the molecules on the surface of the substrate and a second step of growing a polymer on the substrate by polymerizing another monomer on the polymerizable functional group Is a method of forming As a modification of the third method, the polymer has at least one functional group represented by the formula (1) or (2) or a functional group capable of coordinating to a metal and a polymerizable reactive group at a terminal. A method of forming an organic ultrathin film by a first step of contacting a molecule with a substrate and fixing the molecule on the surface of the substrate and a second step of bonding a suitable polymer to the polymerizable reactive group is also conveniently used. it can.

The above-mentioned polymerizable functional groups include, for example, C
ＣC (including a vinyl group and a cyclic olefin group), a carbon-carbon triple bond, CＣC—C ＝ C (including a cyclic diolefin),
P = N, phenyl group, 2,4-disubstituted benzene skeleton group,
1,3-disubstituted benzene skeleton group, epoxy group, four-membered ring ether group, five-membered ring ether group, 2,6-disubstituted phenol skeleton group, 2,4,6-trisubstituted phenol skeleton group, five-membered ring Acetal skeleton group, 6-membered acetal skeleton group, 7-membered acetal skeleton group, 8-membered acetal skeleton group, 4-membered lactone skeleton group, 5-membered lactone skeleton group, 6-membered lactone skeleton group, hydroxyl group, thiol group , Carboxyl group, acyl halide group, acid anhydride group, halogen, carboxylate,
A primary amino group, a secondary amino group (including a three-membered, four-membered, five-membered, six-membered amino group, and a bicyclic six-membered amino group), a six-membered iminoether skeleton group, an isocyanate group, A pyrrole skeleton group, a thiophene skeleton group, a sulfide group, a cyclic sulfide group and the like are suitable.

A polymer can be grown by bonding a monomer to the polymerizable reactive group and polymerizing the monomer. Suitable polymerization reactions for growing the polymer include radical polymerization, anionic polymerization, cationic polymerization, and coordination polymerization. As a polymerization method, a method using light, heat, a catalyst or the like is preferable. A solvent may be used in some cases.

The polymerizable reactive group may be a polymer such as a protein, a polypeptide, a vinyl chloride-vinyl acetate copolymer, a vinyl chloride-vinylidene chloride copolymer, an ethylene-propylene copolymer, and an ethylene-vinyl acetate. Copolymer, acrylonitrile-styrene copolymer, styrene-butadiene copolymer, tetrafluoroethylene-hexafluoroethylene copolymer, acrylonitrile-butadiene-styrene copolymer, styrene-maleic anhydride copolymer, ethylene-vinyl The second polymerization step can be omitted by bonding an alcohol copolymer or the like. ^-COO the end of a polymer forming these second blocks _{^{-, -SO 3 -, -SO 2}} -, -SO
^-, -NH ₃ ^+, can have a positive or negative charge by introducing a group of -NR ₃ ⁺ and the like.

The unsaturated bond may be appropriately distributed in the molecular chain of the polymer having the functional group capable of coordinating to the above formula (1) or (2) or metal, and the molecular chains may be cross-linked by light irradiation. It is possible. In the third method, it is also possible to carry out polymerization using a block molecule having an unsaturated bond at an appropriate ratio in the second step, and to crosslink molecular chains by irradiation with energy.

Furthermore, in order to control the distance between molecules bound to the substrate, the mixing ratio of a polymer which participates in the formation of an organic molecular film and a spacer molecule which reacts with the substrate but does not participate in the formation of the organic molecular film. Can be achieved by controlling Alternatively, in a variation of the above third method, the molecular spacing of the organic molecular film is controlled by reducing the concentration of the polymer used in the second step at an arbitrary ratio from the concentration of the polymer used in the first step. It is possible.
In the third method, the terminal group of the molecular film of the first layer is an unsaturated bond group, and polymerizable groups are provided at appropriate intervals by direct drawing or irradiation of energy through a mask to thereby provide a molecular gap. Is achieved.

In forming any of the first to third (including the third modification) organic ultrathin films, the functional group capable of coordinating to a metal used generally has the formula (3) or a chelating ability. It is preferably a functional group represented by the formula (4). -S-M ₁ (3) (where S is sulfur and M ₁ is a hydrogen atom or a metal atom.)

[0026]

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(However, B _{1 to} B ₆ represent (CH ₂ ) _n CO
OM (n is 0 to 3, M is a hydrogen atom or a metal atom) or (CH ₂ ) _m NXY (m is 0 to 2, X and Y are each independently a hydrogen atom, alkyl having 1 to 8 carbon atoms) A phenyl group or a hydrocarbon group having 8 or less carbon atoms). The double bond in the formula (4) may be a part of a benzene ring or another aromatic ring. When the polymer to be bonded to the substrate contains a functional group represented by the formula (1) or the formula (2), the polymer is fixed to the substrate by the bonding represented by the formula (5). When the polymer to be bonded to the substrate contains a functional group represented by the formula (3) or (4), the polymer is fixed to the substrate by the bond represented by the formula (6). Each of the bonds represented by the formula (5) or (6) is a strong bond. M ₂ -OA- (5) (where A is an atom in the polymer, and Si, Ge,
Indicates Ti, Sn or Zr. M ₂ represents an atom of the substrate. )

[0028]

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(Where, M ₃ represents a transition metal of the substrate, and S represents sulfur contained in the polymer.) Further, the polymer to be bonded to the substrate is represented by the formula (1) to (4)
Including a functional group as shown in any of the above is advantageous when polymers are to be bonded to each other. In any case, after fixing the polymer to the substrate, it may be appropriate to add a step of removing unreacted functional groups.

The substrate on which the polymer having the functional group represented by the formula (1) or (2) is immobilized preferably has a functional group containing active hydrogen on its surface. Examples of the functional group containing active hydrogen include a functional group such as a hydroxyl group, a carboxyl group, a sulfinic acid group, a sulfonic acid group, a phosphoric acid group, a phosphorous acid group, a thiol group, and an amino group. Are preferred in which the active hydrogens of the above are each substituted with an alkali metal or an alkaline earth metal. These functional groups are preferably present on the surface of the substrate or the surface of the chemisorption film previously fixed on the substrate having the functional group. In addition, when the above-mentioned functional group does not exist or is small on the surface of the substrate, the surface of the substrate is modified by UV / ozone treatment, oxygen plasma treatment, treatment with a compound oxidizing agent such as potassium permanganate solution, and the like. It is preferred to create or increase functional groups.

The substrate on which the polymer having a functional group capable of coordinating to a metal is immobilized must have a transition metal exposed on its surface, that is, be free of a metal oxide film or the like. Examples of the substrate that can be used for forming the organic molecular film include those already exemplified as the substrate, such as glass, ceramic, metal, and resin.

The organic molecular film formed on the substrate comprises a first layer comprising a monomolecular polymer fixed to the substrate by any one of the bonds represented by the formulas (5) and (6), Particularly preferred is an organic ultra-thin film comprising a second layer of a polymer bonded to a polymer. In this first layer, the monomolecular polymer is bonded to the substrate by a coordinate bond or a bond represented by the formula (7). A ₁ -OA ₁ ^' -(7) (where A ₁ and A ₁ ^' are Si, Ge, Ti, Sn, Z
r or sulfur. The second layer is a polymer layer bonded to the first layer of a single molecule immobilized on the substrate by either of the bonds represented by formula (5) or (6). The second layer is formed by first forming a monolayer that is firmly bonded to the substrate, then condensation polymerizing the monolayer and a polymer, and adding a polymerizable functional group to the monomolecule. There is a method in which a polymer is grown by addition-polymerizing the functional group and a monomer, and further polymerizing the monomer. In any method, the thickness of the organic molecular film obtained can be controlled by changing the length of the polymer that polymerizes with the single molecule. When this film thickness is in the range of 5 to 100 nm,
An organic molecular film can be efficiently formed by the above method.

The physical property of the protein or polypeptide used in the second step is a problem.
Since bioactivity is not particularly required, commonly used methods such as those described below (see, for example, Molecular Cloning, A Laboratory Manual, 2nd Edition, Cold Edition, by Sambrook, Flitch and Maniatis).
Spring Harbor Press (1989)).

The gene or DNA chain encoding the protein or polypeptide to be prepared is, for example,
A known gene of a known protein in which the gene encoding it has been cloned is obtained and used, or a DNA chain corresponding to a desired polypeptide is prepared by a DNA synthesizer according to a conventional method, for example, by a phosphoramidite method. It is synthesized and used as a double strand using a DNA polymerase. Double-stranded DN with higher molecular weight
If A is required, double-stranded DNA synthesized by a conventional method
By using a ligase to obtain a double-stranded DNA having a desired length.

Next, the obtained gene or DNA chain is incorporated into an expression vector having an appropriate promoter and origin of replication, preferably an appropriate marker, according to a conventional method. Usually, the most suitable expression vector is selected according to the host used. When Escherichia coli is used as a host, for example, λgt, pSC101,
pBR322, cosmid and the like can be conveniently used. When Bacillus subtilis is used as a host, for example,
pUB110 or the like can be used. When actinomycetes are used as a host, for example, pIJ101 can be used.
In addition, yeast and the like can also be used as a host, and suitable vectors have been developed, but as in the case of the present invention,
It does not matter the physiological activity, its molecular weight, its uniformity,
When the type and amount of charge, ease of preparation and low cost are important, E. coli is most preferably used.

A method for incorporating the above-described gene or DNA chain into an expression vector, for example, a mix-and-match method using a linker has been established (Sambrook et al., Supra), and a kit therefor is commercially available. be able to. The prepared recombinant vector is introduced into a host cell such as Escherichia coli for transformation, transduction and the like. This method has also been established and can be performed according to the method described in the book by Sambrook et al.

A host expressing the desired protein is selected from the obtained transformants, cultured in a conventional manner, and the introduced gene is expressed to prepare the desired protein or polypeptide. . The protein or polypeptide thus obtained has extremely high homogeneity as a polymer, and can be advantageously used for forming the organic molecular film of the present invention.

To prepare a charged protein or polypeptide used in the present invention, the following method may be used. First, when it is desired to prepare a protein or polypeptide having a positive charge, polylysine (the ε-amino group of a lysine residue may have a positive charge), polyglutamine or polyasparagine (the acid amide group at the terminal of the residue has a positive charge). Respectively) or AAA corresponding to polyarginine (the guanidino group may have a positive charge),
DN consisting of CAA or AAT or CGT repeats
The A-strand is synthesized by a DNA synthesizer, and then converted into double-stranded DNA using a DNA polymerase. If necessary, the double-stranded DNA is ligated using a ligase, and the resulting double-stranded DNA is used. By carrying out the above protein or peptide preparation method, polylysine, polyglutamine, polyasparagine, or polyarginine can be prepared. Although there are other genetic codes encoding the above amino acids, a DNA chain corresponding to any of them may be used. The molecular weight of the polyamino acid, ie, the length of the peptide chain, can be precisely controlled by controlling the number of base pairs in the DNA chain consisting of AAA, CAA or AAT or CGT repeats. Note that DN
Since the synthesis of the A chain becomes difficult as the number of bases increases, it is most preferable to use polylysine which is easily synthesized.

Next, when preparing a protein or polypeptide having a negative charge, first, GA, which is a DNA chain corresponding to polyglutamic acid or polyaspartic acid, is prepared.
A DNA chain consisting of A or GAT repeats is synthesized by a DNA synthesizer. The obtained DNA strand is double-stranded by a DNA polymerase. If necessary, this double-stranded DNA is ligated with a ligase, and then the obtained double-stranded DNA can be used to prepare polyglutamic acid or polyaspartic acid according to the above-described peptide preparation method. The genetic codes of the above amino acids are known outside, and a DNA chain corresponding to any of them may be used. The length of those peptide chains can be controlled by controlling the length of the corresponding DNA strand.

When preparing an uncharged polypeptide, it is first necessary to determine what polypeptide to use. This is because the range of usable polypeptides is wider than that of charged polypeptides. Usually, it is convenient to select from polyglycine, polyphenylalanine, polyalanine, polyleucine, polyisoleucine, polyvaline, polyproline, polyserine, polythreonine or polytyrosine according to the purpose. The reason is that these polypeptides are
This is because the A sequence is well known, and it is much easier to synthesize a DNA strand with the genetic information of each polypeptide than with other polypeptides. Moreover, the above-mentioned polypeptides include those having a small side chain (for example, polyglycine has a hydrogen atom in the side chain) to those having a bulky side chain (for example, polyphenylalanine has a benzyl group in the side chain). ) And those having hydrophobic residues (for example, polyphenylalanine, polyleucine, polyisoleucine, etc.) to those having hydrophilic residues (for example, polyserine, polythreonine, etc.). There is an advantage that an appropriate one can be selected from these depending on required physical properties.

Glycine, phenylalanine, alanine,
Leucine, isoleucine, valine, proline, serine,
There are a plurality of genetic codes each encoding threonine and tyrosine. One example is GG
G, UUU, GCC, CUU, AUU, GUU, CC
C, UCC, ACC or UAU. Therefore, DNA chains corresponding to these polymers, poly-GGG, poly-T
TT, poly GCC, poly CTT, poly ATT, poly GT
T, poly CCC, poly TCC, poly ACC or poly T
AT was synthesized with a DNA synthesizer to make it double-stranded, and the obtained double-stranded DNA was ligated as necessary with ligase to increase the number of polymerizations. By carrying out the peptide preparation method, polyglycine, polyphenylalanine, polyalanine, polyleucine, polyisoleucine, polyvaline, polyproline, polyserine, polythreonine or polytyrosine can be prepared, respectively. The same result can be obtained by synthesizing a polypeptide by synthesizing a DNA chain corresponding to another genetic code for these amino acids. As described above, the length of these peptide chains can be easily controlled by the length of the DNA chain used.

When an organic molecular film comprising a polypeptide is formed on the surface of a substrate, for example, first, aminosilane having an amino group at a terminal is bonded to the surface of the substrate, and then the polypeptide is bonded to the amino group according to a conventional method. There is a way to make it happen. In the case of a polypeptide that does not have a reactive functional group in the side chain, the terminal amino group of the polypeptide and the amino group of the aminosilane are directly bonded using a cross-linking agent such as glutaraldehyde, or a carboxyl group of the polypeptide. For example, between amino group of aminosilane and 1
The carboxyl group can be activated and bonded using -ethyl-3- (3-dimethylaminopropyl) carbodiimide (EDC) or the like. However, in the case of a polypeptide having a functional group in the side chain, protection is generally required, and it is necessary to protect the aminosilane before coupling it to aminosilane and deprotect it after coupling. This complication can be avoided by selecting an appropriate polypeptide. For example, in the case of polylysine in which the functional group of the side chain is only an amino group, protecting the amino group of the side chain by using, for example, 1-ethyl-3- (3-dimethylaminopropyl) carbodiimide (EDC). Instead, the carboxyl group of polylysine can be activated and bound to the terminal amino group of aminosilane. However, the efficiency is significantly increased by protecting and deprotecting the ε-amino group of lysine before and after the reaction. On the other hand, when polyglutamic acid is bonded, first, aminosilane is bonded to the substrate as described above, and then, for example, using glutaraldehyde, without protecting the carboxyl group of the side chain, the amino group of aminosilane and polyglutamic acid are not bonded. An amino group can be bonded.

Further, as a method of adjusting the effective charge density, a method of controlling the effective charge by mixing a charged polypeptide and a non-charged polypeptide, adjusting the mixing ratio, and binding the mixture to a substrate. And a method in which a polypeptide having both a group that generates a positive charge upon dissociation and a group that generates a negative charge such as an ordinary protein is used, and the pH for dissociation is adjusted to adjust the effective charge. Those usually called acidic proteins such as pepsin have a strong negative charge near neutral, and those called basic proteins such as protamine and histone have a strong positive charge near neutral.

Patterning the surface of the substrate of the structure of the present invention
A method of forming an organic molecular film having a defined charge distribution. There are several methods for forming a fine structure pattern of an organic molecular film having a charge distribution on the surface of the substrate of the structure of the present invention. First, there is a printing method. For example, a flat plate or a cylinder having irregularities formed on the surface so that the convex portions have a desired pattern is produced (hereinafter referred to as a master plate), and the material of the organic supramolecular film is placed on the flat plate, and the master plate is placed thereon. The organic supramolecular film material is placed on the protruding portion by making close contact. Subsequently, the master plate is brought into close contact with a flat plate on which a desired patterned organic molecular film is formed, thereby disposing a desired patterned monomolecular film material. Thereafter, it can be immobilized by a usual method. In the case where a monomolecular film having different characteristics is to be formed in a portion that has not been further processed, a material is arranged so that printing misalignment does not occur, and the same process is performed again. If a printing type master plate is made of a rubber-like soft material, a smaller pattern can be produced by deformation by compression. For example, if a porous material is used, the deformation can be reduced to about 1/2, and the traces of the remaining holes can be covered by the wettability of the material of the organic supramolecular film.

As a printing method, an ink jet method can also be used. This is a method in which a material for an organic supramolecular film from which a predetermined monomolecular film is formed is arranged on a flat plate on which a desired patterned organic molecular film is formed through ultra-small holes. By using current microdroplets, a pattern of about several tens of μm can be formed by this method. In this method, the material of a monomolecular film having various kinds of characteristics can be patterned and applied at once by increasing the number of nozzles.

A method of preparing an organic molecular film on the entire surface of a flat plate in advance and processing it can also be used for patterning.
One example is drawing by an electron beam when an extremely fine pattern is required. The substrate on which a molecular film has been formed in advance on the entire surface is introduced into an electron beam lithography apparatus, and a portion where the molecular film is unnecessary is irradiated with an electron beam. The chemical bond forming the organic molecular film is broken by the energy of the electron beam, and the monomolecular film is removed in a vacuum. With this method, extremely fine patterns can be drawn.

Further, patterning can be performed using photolithography used in a normal semiconductor process. An organic molecular film is formed on the entire surface of the flat plate in advance, and a resist pattern is formed on the organic molecular film using photolithography. After that, the organic molecular film on which the resist film is not formed is removed by an oxygen plasma device or an ashing device used in the semiconductor process, and then the resist is removed to obtain an arbitrary pattern. Furthermore, an arbitrary pattern of the organic molecular film can be obtained by forming a resist pattern on the substrate, forming an organic molecular film, and then removing the resist pattern. Note that these patterning methods are representative examples, and it is needless to say that the present invention is not limited to these.

In the above method, it is easy to form a positive charge or a negative charge on the surface of a monomolecular film formed on a substrate. The monolayer having a positive charge on the surface formed in this way contains, for example, an acidic protein having a negative charge at a neutral pH, and the monolayer having a negative charge, for example, at a neutral pH. Basic proteins with a positive charge readily adsorb. After adsorption, the protein can be bound to the substrate by using a cross-linking agent such as glutaraldehyde between a functional group such as an amino group and a hydroxyl group of a molecule constituting the monolayer and a functional group of the protein.

Next, a method for forming a positive charge and a negative charge on a monomolecular film will be described. A monomolecular film is formed on a predetermined substrate using 10- (carbomethoxy) ethyltrichlorosilane as a material for forming a monomolecular film. Thereafter, the monomolecular film is subjected to a hydrolysis treatment to convert the ester group of the monomolecular film into a carboxyl group, and the pH is adjusted to convert the carboxyl group of the monomolecular film into an anion. Thus, the surface of the monomolecular film can be made anionic.
Further, a monomolecular film is formed on a predetermined substrate using N-trimethoxysilylpropyl-N, N, N-trimethylammonium chloride as a material for forming the monomolecular film. This membrane material is in the form of ammonium chloride and has a cationic ammonium group. Therefore, the surface of the monomolecular film becomes cationic. As another material, a monomolecular film is formed using 3-aminopropyltrimethoxysilane, and the surface of the completed monomolecular film is brought into contact with an aqueous solution of hydrogen chloride, whereby the surface of the monomolecular film is converted into the same ammonium chloride as described above. Can be converted. It is also possible to form nitrate ions and sulfate ions in addition to the exemplified acetate ions and ammonium ions. Note that the above method is only a small part of the methods that can be used, and it goes without saying that the method differs depending on the material used, and in that case, it can be dealt with by a general chemical method.

Structure of the Present Invention The structure of the present invention is shown in FIG. 1 as a cross-sectional view of some examples thereof. It is composed of two surfaces of two substrates 1 and 2 which are in close proximity to each other. The condition that the gap 3 between the surface of the molecular film 4 and the surface of the other substrate (when no organic molecular film is formed) or the surface of the other organic molecular film 5 is small, usually less than 100 μm, preferably less than 1 μm. It is a structure that fills. In the structure of the present invention, an electrode 6 is provided on one of the substrates, and an electrostatic repulsion can be generated between the electrode 6 and the surface of the other substrate by applying an electric field. The substrate of the structure of the present invention may be provided with a dielectric layer 7 and / or a wear-resistant layer 8 on the surface thereof, and an organic molecular film may be formed thereon. As such a wear-resistant layer,
Examples thereof include a diamond-like carbon film, an ion-implanted film and a nitride film, and examples of the dielectric layer include barium titanate (BaTiO ₃ ) and barium strontium tantalate (BST).

The organic molecular film, which is an important component of the structure of the present invention, can be formed on the surface of a substrate, for example, by the method described in detail above. The periphery of the organic molecular film is
For example, water, an aqueous solution, a lower alcohol having 1 to 6 carbon atoms,
It may be filled with a fluoropolymer compound such as hydroperfluoropolyethylene or perfluoropolyethylene, an oily material such as lubricating oil, a surfactant, or the like.

Further, a solid electrolyte may be in contact with or laminated on the surface of the organic molecular film. Here, the solid electrolyte refers to a solid in which ions can move around. When the organic molecular film dissociates in the liquid, the ions dissociated from the organic molecular film diffuse toward the solid electrolyte surface. When the ions originally present in the solid electrolyte hardly move, the charge distribution in the solid electrolyte is determined by the ion concentration distribution dissociated from the organic molecular film. As a result, charges appear on the surface of the solid electrolyte due to ions dissociated from the organic molecular film.

The solid electrolyte used is silver iodide, Naβ-
Inorganic solid electrolytes such as alumina, lithium nitride, zirconium dioxide, etc.
(1999, Uchida Rokaku) Co., Ltd., polyethylene oxide, polypropylene oxide, and a polymer solid electrolyte (D) represented by, for example, 2- (2-methoxyethoxy) ethyl glycidyl ether as a derivative thereof.
ENKI KAGAKU, No4, 1994, 304
Page). Among them, a solid electrolyte having good adhesion to an organic molecular film is suitable for the present invention.

In these structures, a minute gap between both surfaces is maintained by various repulsive forces acting between the surface of the organic molecular film and the surface of the substrate facing the organic molecular film or the surface of the organic molecular film on the surface of the substrate. Further, the lubricity of the surfaces of both substrates of the structure of the present invention is maintained by the elasticity of the organic molecular film.

The shape of the structure of the present invention is not particularly limited. The surfaces of the two substrates of this structure are close to each other, and an organic molecular film is formed on at least one surface by a covalent bond. The organic molecular film and the surface of the other substrate or the surface of the other substrate The gap with the organic molecular film covalently bonded to is very small (usually less than 100 μm),
Any structure may be used as long as the structure preferably satisfies the condition of less than 1 μm. For example, even if both substrates are flat, both substrates are cylindrical, both substrates are disc-shaped, both substrates are spherical, or both substrates have other shapes. Good. Further, both surfaces of the two substrates may be entirely opposed to each other, or may be a structure in which a part thereof is opposed.

Motor Including the Structure of the Present Invention One embodiment of the present invention is a motor including the structure of the present invention. The motor including the structure of the present invention is a motor having a slider 11 as shown in a sectional view of FIG.
And the stator 12 is a motor comprising two bases of the structure of the present invention, and the organic molecular film 14 is formed on the surface of at least one of the slider and the stator (for example, the slider). A motor whose gap 13 with the surface of the other (for example, a stator) or the organic molecular film 15 formed on the surface is usually less than 100 μm, preferably less than 1 μm. In the case of such a motor, when the distance between the slider and the surface of the organic molecular film of the stator is on the order of 100 nm, a steric repulsion acts between the surfaces (see “Intermolecular force and surface Power "2nd edition, 277-2
87, 1996), which has the effect of dramatically reducing friction due to sliding of both surfaces. A conventionally used device can be used for such a motor driving device. When the diameter of the motor becomes small, for example, the inner diameter 19 of the slider becomes less than 2 mm, and the driving device using the coil is difficult to use due to insufficient torque, it is preferable to use the driving device based on the following electrostatic interaction.

Electrostatic drive motor including the structure of the present invention The electrodes of the electrostatic motor including the structure of the present invention have a comb shape and form a pattern along a cylindrical slider. An AC power supply is applied to the electrodes. An insulating layer is provided on the stator surface, and an organic molecular film is formed thereon. The pattern of the organic molecular film is formed such that the positive and negative are reversed at certain minute intervals. A DC bias voltage may be applied between the slider and the stator to form a repulsive force between the slider and the stator. An electrode is formed on the slider surface using a material such as ITO. An insulating layer is formed on the electrode and the surface is polished to ensure surface smoothness. The electrodes are formed intermittently at intervals of one pitch in the positive and negative patterns of the organic molecular film. When the phase of the voltage applied to the electrode changes, the attractive or repulsive force of the organic molecular film changes according to the change, and a rotating tangential force is applied to the organic molecular film.

The operation of the electrostatic motor of the present invention is as follows, for example. That is, it is assumed that at a certain moment, the electric charge of the organic molecular film on the stator side in a portion corresponding to the electrode provided on the slider is negative, and the voltage applied to the electrode becomes negative. At this time, a repulsive force is generated between the organic molecular film and the electrode, and the slider starts rotating. At the next moment, the electrode will face the second organic molecular film on the stator side. At this time, a positive voltage is applied to the electrodes,
If the electric charge of the second organic molecular film on the stator side facing the electrode is positive, a repulsive force as a driving force is generated between the organic molecular film and the electrode, and the slider further rotates. In this manner, a rotational force in the same direction is continuously generated between the slider and the stator, and the slider rotates.

A second example of an electrostatic drive motor including the structure of the present invention is a motor having two electrodes connected to two AC power supplies 180 ° out of phase. Here, the electrode 1 and the electrode 2 are interdigitated in a comb shape and are formed in a pattern. An organic molecular film is directly covalently bonded to the stator. The pattern of the organic molecular film is formed such that the positive and negative are alternately reversed at a fixed minute interval in the rotation direction of the slider. An AC bias voltage may be applied between the slider and the stator to cause a repulsion between the slider and the stator. The AC bias is set to a frequency sufficiently higher than the frequency of the driving voltage by 5 times or more so as not to affect the driving. This high frequency vibration is mainly used to vibrate the organic molecular film from the outside. The friction of the organic molecular film vibrating due to this vibration becomes dynamic friction, and lubrication lower than static friction can be obtained.

More specifically, the electrode 1 is placed on the surface of the slider.
Is formed using a material such as ITO. A wear-resistant layer is formed on the electrode, and the surface is polished to ensure surface smoothness.
The electrodes are formed intermittently at a constant minute interval with an interval of one pitch of the positive / negative pattern of the organic molecular film,
Connect to one AC power supply. Similarly, the electrode 2 is also formed intermittently at intervals of one pitch of the positive and negative patterns of the organic molecular film 1 and connected to an AC power supply having a phase shifted from the power supply of the electrode 1 by 180 °. When the phase of the voltage applied to the electrode changes, the attractive or repulsive force applied to the organic molecular film changes according to the change, and a rotating tangential force is applied to the organic molecular film, and the slider rotates around the stator.

The operation is as follows. At a certain moment, the electric charge of the organic molecular film on the portion of the stator side opposite to the electrode 1 provided on the slider is negative, and the organic molecule on the portion of the stator side opposite to the electrode 2 is negative. It is assumed that the charge of the film is positive and the voltage applied to the electrode 1 is positive. At this time, a repulsive force is generated between the organic molecular film and the electrode 1, and the slider moves in the direction of the arrow. At the next moment, a positive voltage is applied to the electrode 1 and a negative voltage is applied to the electrode 2. When the slider rotates and the charge of the organic molecular film facing the electrode 1 of the slider becomes positive, and the charge of the organic molecular film facing the electrode 2 becomes negative, a repulsive force is again applied between the organic molecular film and the electrode. Working, the slider moves in the direction of the arrow. In this way, a driving force is continuously generated in the same direction between the slider and the stator, and the slider rotates. As compared with the case where only one electrode is provided, twice the driving force can be obtained.

As a third example of the electrostatic motor of the present invention,
A disk-shaped electrostatic motor including the structure of the present invention is exemplified.
In this motor, two substrates, a slider and a stator, are arranged close to each other, and the gap is very small (usually 100 μm).
) Is preferably maintained at less than 1 μm, and one of the substrates (slider) is a disk, and an organic molecular film having a predetermined line width and having a radial charge is repeatedly formed on the surface of the disk, Electrodes are repeatedly formed radially on the other substrate with the predetermined line width, and an alternating current is applied to the electrodes in the repetitive pattern to generate a propulsive force on the disk. This disk-shaped electrostatic motor may be provided with a magnetic recording medium on the surface of the rotating disk and a magnetic recording / reproducing element on the stator.

As a fourth example of the electrostatic motor of the present invention,
An example is a spherical electrostatic motor including the structure of the present invention.
In this motor, two substrates (slider and stator) are arranged close to each other, and the gap is very small (usually 100 μm).
), Preferably less than 1 μm, the opposing surfaces of the two substrates (slider and stator) are spherical, and an organic molecular film having a charge with a predetermined line width on the inner sphere (slider) surface Are repeatedly formed, and electrodes are repeatedly formed on the inner surface of the outer hemisphere along the spherical surface at the predetermined line width, and an alternating voltage is applied to the electrodes of this repetitive pattern to generate a propulsive force on the inner sphere. The repeating pattern of the organic molecular film and the electrode may be in the latitude direction or the longitude direction, and for the electrode, the repeating pattern in the latitude direction may be divided in the longitude direction.

Another aspect of the present invention is a bearing without a mechanical bearing used with an electrostatic motor. This is because, for example, a rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) are arranged close to each other, and a predetermined line width is set on an adjacent surface of the first substrate. A circular convex support having a predetermined radius is provided, an organic molecular film having a charge is formed on the surface of the support, and a predetermined line width and a predetermined line width are formed on the opposite surface of the second substrate. A convex support is provided at a position of a radius, and an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate is formed on the surface of the support,
An electrolyte liquid is applied to the surface of the first substrate, and the convex support of the second substrate is immersed in the electrolyte liquid to form an electric double layer repulsion acting between the surfaces of the organic molecular film and to be formed between both surfaces. Due to the meniscus attractive force of the liquid surface and the balance with gravity, a minute gap between the two surfaces, usually less than 100 μm, preferably 1 μm
A bearing characterized in that a gap of less than μm is maintained. On the bearing, an organic molecular film having a thin line width and a circular charge pattern is formed on the surface of the first substrate, and the charge pattern on the first substrate is formed on the surface of the second substrate. It is also possible to form an electrode so as to give the same kind of charge on the outside and a different kind of charge on the inside so as to sandwich it, and to generate a centripetal force on the center of the disk by applying a DC voltage between the electrodes, Such a bearing is also included in one embodiment of the present invention.

As a further aspect of the present invention, a guide is provided. The guide referred to here is, for example, to dispose two substrates (a first substrate and a second substrate) in close proximity, and form a charged organic molecular film on the surface of the first substrate. Forming an electrode having a predetermined line width and an interval on the surface of the second substrate in a linear shape, applying an electrolyte liquid on the surface of the first substrate, and applying a DC voltage to the electrode. And a guide that moves along the line by an external force. In another example, two substrates (a first substrate and a second substrate) are arranged close to each other,
First and second linear support members having a predetermined line width are provided on the surface of the first substrate, and the first and second linear support members have electric charges. Forming an organic molecular film,
Providing a third and fourth linear convex supports on the surface of the substrate, forming an organic molecular film having a charge on the surface of the third convex support, and forming the organic molecular film on the surface of the first substrate; An electrolyte liquid is applied, a minute gap between both surfaces is maintained by electric double layer repulsion acting between the surfaces of the organic molecular film, and an electrode having a predetermined line width and interval is linearly formed on the fourth convex support. The guide is formed by applying a DC voltage to the electrode and moving along the line by an external force. The minute spacing between the surface of the organic molecular film and the electrode on the two substrates arranged in close proximity or the minute spacing between the organic molecular film and the organic molecular film is usually less than 100 μm, and may be less than 1 μm. More preferred.

Actuator Having Structure of the Present Invention (1) Cylindrical Actuator As another aspect of the present invention, an actuator that functions as an artificial muscle is provided. Specifically, for example, it is an actuator having a cylindrical structure. In this cylindrical structure, disk-shaped electrodes are embedded at regular intervals in parallel with the bottom surface of the cylinder, and a large number of pores vertically penetrating the cylinder are provided. A thin tube penetrates the pore. On the surface of the thin tube, a band-like pattern of an organic molecular film having a positive charge and a band-like pattern of an organic molecular film having a negative charge are alternately arranged, and the interval between the bands is the same as the interval between the disc-shaped electrodes. And a structure in which an AC voltage can be applied to the disc-shaped electrode. A liquid is interposed between the fine pores and the fine tubes, and the distance between the surface of the organic molecular film of the fine tubes and the inner wall of the fine pores in each of the fine pores is small, preferably less than 1 μm. It is like being maintained in.

The material of the cylindrical actuator may be any material as long as it is insulative and can be processed into a cylindrical shape, and suitable materials include thermoplastic resin, thermosetting resin, resin such as silicon rubber, glass, ceramic and the like. In particular, if an elastic resin or silicone rubber is used, an artificial muscle having a flexible structure can be formed. The material of the disk-shaped electrode may be any material as long as it has conductivity, and aluminum, iron, copper, platinum, gold, chromium and the like can be used. Among them, low cost aluminum and chemically stable platinum are preferable. The method of making the cylindrical structure is, for example, to prepare a large number of cylindrically shaped resin and disk-shaped electrodes, alternately stack them, and then apply heat to thermally adhere the resin and the electrodes. Can be integrated. The through hole to the cylindrical structure can be formed in an integrated cylinder by electric discharge machining, etching, punching, or the like.
Alternatively, a large number of columnar resins and electrodes having through holes formed in advance may be prepared, and these may be alternately stacked and then integrated by thermocompression bonding. Further, an insulating material is desirable for the thin tube, and for example, a glass or resin thin wire used for an optical fiber can be used. The patterning of the electric charge to the fine wire may be performed by, for example, fixing an organic molecular film having an electric charge at a molecular terminal in a pattern using a photolithography technique. The shape of the actuator is not particularly limited. In addition to the cylindrical shape and the film shape,
Oval shapes, square poles, and other shapes are also possible.

(2) Film Actuator Another aspect of the present invention is a film actuator. Specifically, it is an actuator having a structure in which two types of films that move relative to each other by applying a voltage are alternately stacked. A pair of comb-shaped electrodes is formed on one side of the first film, and a rectangular area of a positively charged organic molecular film and a rectangular area of a negatively charged organic molecular film are formed on one side of the second film. Are alternately arranged, and the width of the adjacent rectangular area is equal to the width of the comb-shaped electrode. A large number of the films are stacked so that the surface of the comb-shaped electrode and the surface of the organic molecular film are usually opposed to each other at an interval of less than 100 μm, preferably less than 1 μm, and the liquid is filled between the films, An AC voltage, for example, 18
This is a film-shaped actuator having a structure capable of applying an AC voltage having a phase shift of 0 degrees. Further, if an organic molecular film is formed on the surface of the film on which the electrodes are formed, the repulsion due to the intermolecular force between the films is further increased, and the mutual movement becomes smoother. In this case, a tin oxide electrode on which an organic molecular film is easily formed is preferably used as the electrode.

The film used in the present invention may be any film as long as it has insulating properties. Examples of the film include thermoplastic and thermosetting resins, resins such as silicone rubber, and glass ceramics.
Further, the material of the comb-shaped electrode may be any material as long as it is conductive, and aluminum, iron, copper, platinum, gold, chromium and the like can be used. Among them, low cost aluminum and chemically stable platinum are preferable. The electrodes can be formed on the film by using a vacuum deposition method such as electron beam evaporation, sputter evaporation, or thermal evaporation, an electrodeposition method, or a print printing method. In addition, comb-shaped patterning is also possible by attaching a comb-shaped pattern mask to the film when an electrode is formed on the film by each method. Alternatively, after forming electrodes on the entire surface of the film, a comb-shaped electrode pattern can be formed by photolithography. The charge pattern in the form of a film may be formed by, for example, fixing an organic molecular film having a charge at a molecular end in a pattern.

Micropump including the structure of the present invention The micropump of the present invention comprises a diaphragm of a silicon film, an organic molecular film formed thereon, and electrodes. That is, it has a structure in which the outer cylinder surrounds the liquid around the inner cylinder. A part of the outer cylinder is provided with a room containing the working part of the pump. A diaphragm is provided between the room and the inner cylinder. The liquid to be transported is transported, for example, in the gap between the diaphragm of the silicon membrane and the inner cylindrical surface. An electrode is provided at a portion facing the diaphragm, and a voltage is applied between the diaphragm and the electrode. The width of the electrodes is constant, the chamber is formed by anisotropic etching using KOH, for example. Is formed. An organic molecular film is formed on the surface of the diaphragm, and the surface of the organic molecular film is charged. For example, an organic molecular film layer having alternating positive or negative charges is arranged corresponding to the electrode portion on the circumference having a diameter of about 2 mm. The diaphragm and the anisotropically etched chamber are filled with a medium, for example a liquid such as water, alcohol, HPE.

When a negative or positive voltage is applied to the electrode, an attractive or repulsive force is generated between the electrode and the organic molecular film having the opposite positive charge, and that portion of the silicon diaphragm moves in the outer circumferential direction or the inner circumferential direction. Then, a pump region is formed between adjacent charge regions. That is, when a negative voltage is applied to the electrode, the diaphragm portion of the organic molecular film having a negative charge is pressed against the inner cylinder by electrostatic repulsion, and the diaphragm portion of the organic molecular film having a positive charge is generated by electrostatic attraction. The state is drawn toward the outer periphery. Next, when the voltage is changed and the electrode is applied with a positive voltage, the diaphragm portion of the organic molecular film, which has been pressed against the inner cylinder, is now drawn in the outer circumferential direction and receives the liquid, while the outer circumferential portion receives the liquid. The diaphragm portion of the organic molecular film that has been drawn in the direction is now pressed against the inner cylinder to push out the liquid.
In this way, the diaphragm moves according to the change in the voltage, and the liquid can be transported in a certain direction.

[0072] anti-vibration table, including a structure of the vibration isolation table present invention comprising a structure of the present invention is composed of the two organic molecular film formed thereon with two plates. These organic molecular films include an anchor portion bonded to a flat plate, an intermediate portion acting as a dynamic elastic body, and a charged surface portion. The charges of the organic molecular films on both plates have the same sign,
A medium is filled between the two. The two flat plates oppose each other to generate an electrostatic repulsion. The distance between the two flat plates is usually less than 100 μm, preferably less than 1 μm. The thickness of the organic molecular film formed on each flat plate is about 0.15 μm. The lower flat plate is floating due to the intermolecular repulsion between the two organic molecular films in the medium.

When vibration is applied to the surface of the lower flat plate of the anti-vibration table of the present invention, the surface of the lower flat plate 2 is wavy when viewed microscopically.
A portion where the charge approaches the charge of the organic molecular film 1 of the upper flat plate and a portion where the charge moves away from the charge occur. Due to the movement of the organic molecular film 2 of the lower flat plate, a portion where the charge of the organic molecular film 1 approaches and separates from the lower organic molecular film 2 is formed. The elastic portion of the organic molecular film 2 is shrunk to store energy. On the other hand, in the part that goes away, the elastic part of the organic molecular film 2 expands and the energy becomes small. On average, the total energy stored in the elastic body of the organic molecular film 2 is zero. Since the vibration of the lower flat plate propagates, the energy of the propagating wave is converted into the vibration energy of the organic molecular film formed on the upper flat plate and the lower flat plate according to the propagation. As described above, the vibration transmitted to the lower flat plate is absorbed, and the vibration of the upper flat plate is attenuated.

Micro Nozzle Containing the Structure of the Present Invention The micro nozzle including the structure of the present invention comprises two conical surfaces and an organic molecular film formed thereon. An organic molecular film is formed on the surface of the nozzle core, and a similar organic molecular film is formed at one nozzle outlet. Both organic molecular films include an anchor portion for covalently bonding to the surface of the nozzle core portion or the nozzle outlet portion, an intermediate portion acting as a dynamic elastic body, and a charged surface portion. A second conical surface is provided so as to face the first conical surface, and a space between the first and second conical surfaces is filled with an ejection liquid as a medium. The jetting liquid is usually water, alcohol, an organic solvent, or the like.

When the injection is stopped, the nozzle core advances to the nozzle outlet, and the mutual molecular repulsion causes the nozzle to reduce the flow rate of the injection liquid so that the injection cannot be performed. When two flat plates face each other due to the organic molecular films formed on the respective surfaces of the first nozzle core and the second nozzle outlet, electrostatic repulsion acts. The injection liquid is stopped between the two flat plates until the organic molecular films 1 and 2 come into contact with each other, and the jetting liquid is stopped. When the organic molecular films 1 and 2 are not formed on the contact surface, the tip portion of the nozzle wears immediately, and the life of the nozzle is shortened. According to the present invention, damage due to contact of the wear-resistant layer can be reduced.

[0076]

The present invention will be described in more detail with reference to the following Examples and Reference Examples, but the present invention is not limited to these Examples and the like.

Reference Example 1 Formation of an organic molecular film on the surface of a metal substrate A solution A was prepared by mixing 18 ml of isopropanol and 0.2 ml of 4-vinylanthranilic acid. Next, a copper base was immersed in the solution A, and left as it was for 1 hour. Thereafter, the substrate was rinsed with about 100 ml of benzene, allowed to stand naturally, and dried to form a thin film. The formation of the thin film was confirmed by confirming characteristic signals by Fourier transform infrared spectroscopy. Next, 20 ml of styrene monomer and 40 mg of azobisisobutyronitrile were added to 50 ml of distilled and purified toluene, and the substrate on which the above-described thin film was formed was immersed therein. Then, nitrogen bubbling was performed for 30 minutes to remove dissolved oxygen, followed by heating at 100 ° C. for 1 hour. Thereafter, the substrate was rinsed with toluene, allowed to stand naturally and dried to form a thin film. The obtained thin film was analyzed by Fourier transform infrared spectroscopy and ultraviolet-visible spectroscopy, and a nitrogen atom derived from an amino group and an oxygen atom derived from a carboxyl group were coordinated to the copper atom of the substrate. Formed a monomolecular layer derived from 4-vinylanthranilic acid, and it was clarified that polystyrene was bonded to this monomolecular layer.

Reference Example 2 Formation of Organic Molecular Film on Surface of Glass Substrate 14 ml of distilled and purified hexadecane, 2 ml of distilled and purified tetrahydrofuran, 2 ml of 10- (thienyl) decyltrichlorosilane, and 10.8% of dry FeCl ₃ were added.
The mixture was stirred for 30 minutes to prepare a solution B. Next, the glass substrate was immersed in this solution B and left as it was for 1 hour. Thereafter, the substrate was rinsed with about 100 ml of tetrahydrofuran and air-dried to form a thin film. The thin film was analyzed by Fourier transform infrared spectroscopy and ultraviolet-visible spectroscopy, and a layer composed of 3-decylthiophene was fixed to a glass substrate by a siloxane bond, and 10- (thienyl) decyltrichlorosilane was polymerized on the layer. The layer is fixed, and 10- (thienyl) decyltrichlorosilane is bonded to each other at the 2-position of the thiophene ring to form a polymer. The same applies to the layer composed of 3-decylthiophene and this polymer. And the trichlorosilane group of 10- (thienyl) decyltrichlorosilane forms a siloxane bond with a neighboring trichlorosilane group under an atmosphere containing moisture. Formed and the polymers were found to be bonded to each other. As a result of deflection analysis of the organic molecular film obtained above, the film thickness was 12 nm (refractive index 1.
49).

REFERENCE EXAMPLE 3 Preparation of Polypeptide Used for Organic Molecular Film The polypeptide used for the organic molecular film of the structure of the present invention is not particularly required when the organic molecular film is not required to have a charge. It can be selected from polyglycine, polyphenylalanine, polyalanine, polyleucine, polyisoleucine, polyvaline, polyproline, polyserine, polythreonine or polytyrosine according to the purpose. Taking polyphenylalanine as an example, poly-T is synthesized using a DNA synthesizer, a double strand is formed using DNA polymerase, and a plurality of double-stranded DNAs obtained using ligase are ligated. A double-stranded DNA corresponding to the required polypeptide molecular weight is synthesized. Next, after binding an appropriate linker thereto, the resultant is digested with an appropriate restriction enzyme, and inserted into an expression vector to prepare a recombinant vector. The resulting recombinant vector is introduced into Escherichia coli, and D
E. coli into which the NA chain has been introduced is selected, and this is cultured to obtain D.
The NA chain is expressed, and the produced polyphenylalanine is separated and purified.

REFERENCE EXAMPLE 4 A patterned electrode on the surface of a slider or a stator
Formation of Organic Molecular Film Having Load Distribution There are several methods for forming an organic molecular film having a fine patterned charge distribution on the surface of the slider or stator of the motor of the present invention, as described above. But,
Here, a method using an electron beam is adopted. An organic molecular film is prepared in advance on the entire surface of the slider or the stator, introduced into an electron beam lithography apparatus, and a portion where the molecular film is unnecessary is irradiated with an electron beam. Thus, unnecessary portions are removed. Very fine patterns can be drawn using this method.

The charge on the organic molecular film is produced as follows. First, a trichlorosilane derivative having an amino group at the end is bonded to the entire surface of the slider or stator of the motor as described above, and then an unnecessary portion (a portion to impart a negative charge) of aminosilane is removed by an electron beam according to a pattern. Remove. Then, polylysine is bonded to the portion to which a positive charge is to be applied using 1-ethyl-3- (3-dimethylaminopropyl) carbodiimide (EDC). Then, the aminosilane is bonded again to the surface portion of the substrate removed first, and then the amino group of the aminosilane is bonded to the terminal amino group of polyglutamic acid using glutaraldehyde. In this way, positive and negative charges can be distributed on the surface of the slider or the stator of the motor according to the pattern.

Hereinafter, in the present invention, the gap is 1
Example including structures smaller than μm and gap of 100 μm
The description will be made with reference to the drawings by dividing the embodiment into examples including the following structures.

The structure of the present invention having a gap of less than 1 μm
Example

Embodiment 1 FIG. 1 shows an example of the structure of the present invention. In the structure of the present invention, the organic molecular film 4 is formed on at least one of the surfaces of the two substrates 1 and 2 (for example, the surface of the substrate 1) which are closely adjacent to each other. This is a structure in which the gap 3 between the surface of (for example, the substrate 2) or the surface of the organic molecular film 5 on the substrate 2 is less than 1 μm.
The organic molecular films 4 and 5, which are important constituents of the structure of the present invention, are formed on the surface of the base by, for example, the methods described in Reference Examples 1 to 4. In this structure,
A minute gap between both surfaces is maintained by the steric repulsion acting between the organic molecular film surface and the surface of the substrate facing the organic molecular film or the surface of the organic molecular film on the substrate surface. Further, the lubricity of the surfaces of both substrates of the structure of the present invention is maintained by the elasticity of the organic molecular film.

The shape of the structure of the present invention is not particularly limited.
The surfaces of the two substrates are close to each other, and an organic molecular film is formed by covalent bonding on at least one surface thereof, and the organic molecular film is covalently bonded to the surface of the other substrate or the surface of the other substrate. Any structure may be used as long as the structure satisfies the condition that the gap with the organic molecular film is less than 1 μm. For example, both substrates may be planar, both substrates may be cylindrical, or both substrates may have other shapes. Further, a structure may be used in which a part of the surfaces of both bases, but not all of them, is closely adjacent to each other. In the second structure (FIG. 1A) of the present invention, an electrode 6 is provided on one of the substrates, and an electrostatic repulsion is generated between the surfaces of the other substrates by applying an electric field. The third structure of the present invention further comprises a dielectric layer 7 (FIG. 1-b) or an abrasion-resistant layer 8 (FIG. 1-c) or both of the dielectric layer 7 and the abrasion-resistant layer 8 on the surface of the substrate. (FIG. 1-d) is provided and an organic molecular film is formed thereon. Examples of the wear-resistant layer include a diamond-like carbon film, an ion-implanted film and a nitride film, and examples of the dielectric layer include barium titanate (BaTiO ₃ ) and barium strontium tantalate (BST). it can. The periphery of the organic molecular film is, for example, water, an aqueous solution, a lower alcohol having 1 to 6 carbon atoms, a fluoropolymer compound such as hydroperfluoropolyethylene or perfluoropolyethylene, an oily material such as lubricating oil, a surfactant, and the like. May be filled.

Embodiment 2 FIG. 2 is a sectional view showing a structure of a slider / stator of a micro motor according to the present invention. In this figure, 11 is a slider, 12 is a stator, 13 is a gap, 14 is an organic molecular film formed on the slider surface, 15 is an organic molecular film formed on the stator surface, and 16 is an electrode. In FIG. 2, 11 may be a stator and 12 may be a slider. An organic molecular film 14 is formed on the slider 11 and an organic molecular film 15 is formed on the stator 12. There is a gap 13 between the surfaces of these organic molecular films, and the distance is about 0.2 μm. The inner diameter of the stator 12 is 2 m
m. The slider 11 is ground and polished with alumina ceramics, and has a processing accuracy of 10 nm or less.
An electrode 16 is embedded in the slider 11. As the electrode 16 embedded in the slider 11, for example, an electrode whose surface is formed of an n-type silicon semiconductor and whose inside is formed of a p-type diffused silicon semiconductor having a different conductive mechanism is used. When a positive voltage is applied to the internal p-type semiconductor, electrons concentrate on the pn junction, and a depletion layer spreads on the surface of the n-type silicon semiconductor,
It behaves like an insulator and can be used as an insulated electrode.

The organic molecular film is a so-called polymer assembly covalently bonded to the surface of the substrate. When the polymer is bonded to the surface of the substrate alone, as shown in FIGS. The length of the coil is about 50 nm, and the volume occupancy is about 1%. The volume occupancy increases and the thickness of the organic molecular film layer becomes about 70 nm. Molecular weight 1400 on mica substrate surface in toluene
FIG. 3c shows the steric repulsion acting between the substrates when the polystyrene of No. 0 is grafted, the grafted polymer is arranged so as to face each other, and is brought close to 150 nm or less (JN.
"Intermolecular Force and Surface Force", 2nd Edition
Kondo / Oshima translation, p. 285). The steric repulsion between the grafted polymers increases from around 150 nm where the polymers contact, and sharply increases below 100 nm. The intermolecular steric repulsion potential W is obtained by the following equation. W = BkTEXT (−πD / L) where B is a constant, k is Boltzmann's constant, T is temperature, D
Is the distance between the substrate surfaces, and L is the thickness of the organic molecular film. Due to this three-dimensional repulsion, the slider and the stator repel each other, and there is no sticking between the slider and the stator,
The rotation of the slider becomes smooth.

Further, the repulsion between the slider and the stator can be increased by the following structure and method. That is, on the surface of the stator 12 in FIG. 2, an organic molecular film 15 into which a functional group having a charge or capable of dissociating and having a charge, for example, a carboxylic acid group or a sulfonic acid group, or an amino group or a quaternary ammonium group is introduced. Let it form. In a suitable solvent, these functional groups have a negative or positive charge. The surface charge amount σ is 5 mC / m ² per unit area.
The electric field strength E in this case is about E = σ / 2εo ≒ 2 × 10 ⁸ (V / m). Here, εo (dielectric constant under vacuum) = 8.85 × 10
^-12 (F / m) Force received by opposing area of slider and stator (F)
And pressure (P) are r = 3 mm and l = 10 mm,
Since S = πrl, the magnitudes of F and P are approximately as follows: F = qEＮ100N P = F / S 610 ⁶ Pa

Further, the force by the electric field generated by the organic molecular film 15 formed on the surface of the stator 12 and the electrode 16 embedded in the slider 11 in FIG. 2 can be used. The electric field intensity E when a voltage of 10 V is applied to the gap d of 0.1 μm to the electrode 16 inside the slider 11 is E = V / d = 1 × 10 ⁸ (V / m). The surface charge amount σ was measured as 1 mC / m ² per unit area. The force (F) and the pressure (P) received by the opposing area of the slider and the stator are as follows: r = 3 mm, l = 10 mm, q = 5 × 10 ⁻⁷ C F = qE = 50N P = F / S ≒ 5 × 10 ⁵ Pa. As described above, the gap between the slider and the stator is maintained by utilizing the three-dimensional repulsion and electrostatic force generated between the slider and the stator, and the friction between the two is reduced.
Provided is a motor in which a slider and a stator do not directly contact each other even when stopped, and do not slide and contact even when starting rotation or rotating.

In FIG. 4A, the organic molecular film 14 on the surface of the slider 11 and the organic molecular film 1 on the surface of the stator 12 are shown.
The functions of 5 are (1) to generate a strong pressure between the organic molecular film 4 and the organic molecular film 5 when the distance between the slider surface and the stator surface is short, and (2) to generate a strong pressure between the slider 11 surface and the stator 12 surface. (3) When the organic molecular film 14 and the organic molecular film 15 are likely to come into contact with each other, a steric repulsion acts to generate a large repulsive force between the slider surface and the stator surface. The organic molecular films 14 and 15 are worn when the slider comes closer and the slider comes into contact with the stator. That is, the organic molecular film 14 and the organic molecular film 15 generate repulsive force mutually, further generate an electrostatic repulsion when both have the same kind of electric charge, and when the slider 11 and the stator 12 contact and slide, Works as a wear-resistant layer.

The surface of the stator 12 is coated with the organic molecular film 1.
5 and a dielectric layer 17 (see FIG. 4).
2). In this case, the dielectric layer 17 has the effect of supplementing the charge of the organic molecular film 15 and increasing the repulsive force between the organic molecular film 14 and the organic molecular film 15. The dielectric layer is usually provided under the organic molecular film. Barium titanate (B
aTiO ₃ ) or barium strontium tantalate (BST) is used. Further, the surface of the stator 12 can be constituted by the organic molecular film 15 and the wear-resistant layer 18 (FIG. 4C). In this case, the abrasion resistance when the slider and the stator slide in contact with each other is improved. Materials used for the wear-resistant layer include, for example, diamond-like
Examples include a carbon film, an ion-implanted film, and a nitride film. Further, a dielectric layer 17 and a wear-resistant layer 18 can be provided as a base of the organic molecular film (FIG. 4-4). In this case, the repulsion and abrasion resistance when the slider and the stator are slid in contact with each other are improved.

Further, as shown in FIG.
When an AC electric field is applied to the electrode 16 embedded in the slider 11 and the slider 11, a voltage is applied between the insulating medium filled between the slider and the stator and the organic molecular film 15 having high insulation. When an alternating current is applied to the insulating material, the insulating substance has charges as shown in FIG. 6 due to a difference in mobility between holes and electrons. Initially, the AC applied voltage is applied equally in plus and minus, but the charge is accumulated in minus over time, the voltage gradually changes in the minus direction, and the self-bias voltage except for the backflow where electrons relax is applied. You. A positive electric field is applied to the negatively charged slider from the electrode, and a repulsive force is generated between the electric charge and the electric field of the organic molecular film adhered to the stator surface. When the medium is a conductive substance, an insulating film is formed on the surface of the organic molecular film 14 and the organic molecular film 15 so that the entire medium is apparently insulative so that an electric field can be applied. As described above, a structure in which an electrostatic repulsion is further added to the structure of the present invention is also included in the structure of the present invention.

Means for driving the above motor include:
A coil coupled to a drive shaft used in a normal DC motor, induction motor, synchronous motor or AC commutator motor can be used as the driving means. Further, when the diameter of the motor becomes small, it becomes difficult to put the motor into practical use because the torque becomes small in a driving device using a normal coil. In the case of such a minute motor, a strong torque can be generated by using an electrostatic interaction.

Embodiment 3 Electrostatic Drive Motor Including Structure of the Present Invention FIG. 7 is a plan view of an example of an electrode of a motor including a structure of the present invention. The electrodes shown in this figure are comb-shaped and form a pattern along a cylindrical slider. Electrode 1
AC power (COSwt). FIG. 8 shows a cross-sectional view of the gap including the electrode structure. The gap 13 is filled with a conductive medium. In some cases, the medium may not be filled. Approximately 10
An insulating layer 19 having a thickness of about 100 nm is formed, and a thickness of about 100
The organic molecular film 15 of nm is formed thereon. The pattern of the charge distribution 25 of the organic molecular film 15 is formed such that the sign is reversed every 1 μm. A DC bias voltage is applied between the slider 11 and the stator 12, and a repulsive force acts between the slider and the stator. On the surface of the slider 11, an electrode 16 is formed of a material such as ITO with a thickness of about 25 nm. About 5 on the electrode
An insulating layer 19 having a thickness of 0 nm is formed, the surface is polished, and the surface smoothness is finished to about 10 nm.
The electrodes 16 have a line width of about 1 μm and are formed at intervals of one pitch (about 2 μm) of the positive and negative patterns of the organic molecular film 15. When the phase of the voltage applied to the electrode 16 changes, the attractive force or the repulsive force with the organic molecular film 15 changes according to the change, and a rotating tangential force is applied to the slider 11.

FIG. 9 shows the operation of the electrostatic motor shown in FIG. At the moment shown in FIG. 9A, the organic molecular film 15 on the stator side opposed to the electrode 16 placed on the slider 11
Is assumed to be negative, and the voltage applied to the electrode 16 becomes negative. At this time, a repulsive force is generated between the negatively charged organic molecular film region and the electrode 16, the slider moves in the direction of the arrow, and at the next moment, the electrode 16 faces the positively charged region of the organic molecular film on the stator side. Will be.
At this time, if a positive voltage is applied to the electrode 16 as shown in FIG. 9B, a repulsive force as a driving force is generated again between the positively charged organic molecular film and the electrode 16, and the slider moves in the direction of the arrow. I do. In this way, a driving force is continuously generated in the same direction between the slider and the stator, and the slider rotates.

FIG. 10 shows a plan view of the second electrode structure. As shown in FIG. 10, an AC power supply (COSwt) is connected to one electrode 16 and an AC power supply (COS (wt + π)) whose phase is delayed by 180 ° is connected to the other electrode 26. Electrode 16 and electrode 26
Are formed so as to penetrate into each other in a comb shape. FIG. 11 is a sectional view of a gap including the second electrode structure.
The gap is filled with an insulating medium 28. An organic molecular film 15 having a thickness of about 100 nm is directly covalently bonded to the stator. The pattern of the organic molecular film 15 is formed such that the sign is reversed about every 1 μm in the rotation direction of the slider. An AC bias voltage is applied between the slider and the stator to exert a repulsive force between the slider and the stator. The AC bias is set to a frequency sufficiently higher than the frequency of the driving voltage by 5 times or more so as not to affect the driving.

The electrode 1 is formed on the slider surface with a thickness of about 25 nm using a material such as ITO. A wear-resistant layer 18 having a thickness of about 50 nm is formed on the electrode, the surface is polished, and the surface smoothness is finished to about 10 nm. The electrode 16 has a line width of about 0.7 μm and the organic molecular film 15
Are formed at intervals of one pitch of the positive and negative patterns (about 2 μm), and are connected to a power supply having a phase of COSwt. The electrode 26 is also formed with a line width of about 0.7 μm and an interval (about 2 μm) of one pitch of the positive and negative patterns of the organic molecular film 15, and COS (wt + π)
Connected to a power supply with a phase of When the phase of the voltage applied to the electrode changes, the attractive or repulsive force applied to the organic molecular film 15 changes according to the change, and the organic molecular film 15
A tangential force is applied between the slider and the slider to rotate around the stator.

FIG. 12 shows the operation of the electrostatic motor shown in FIG. At a certain moment shown in FIG. 12A, the charge of the portion of the organic molecular film 15 of the stator 12 facing the electrode 16 is negative, and the charge of the portion of the organic molecular film 15 facing the electrode 26 is positive. Is negative.
At this time, a repulsive force is generated between the organic molecular film 15 and the electrodes 16 and 26, and the slider moves in the direction of the arrow.
At the next moment, a positive voltage is applied to the electrode 16 and a negative voltage is applied to the electrode 26 as shown in FIG. When the slider rotates and the electric charge of the organic molecular film 15 on the stator side facing the electrode 16 of the slider becomes positive, and the electric charge of the organic molecular film 15 on the stator side facing the electrode 26 becomes negative, the organic molecular film 15 A repulsive force acts again between the and the two electrodes, and the slider moves in the direction of the arrow.
In this way, a driving force is continuously generated in the same direction between the slider and the stator, and the slider rotates. FIG.
As compared with the case of the above, twice the driving force can be obtained.

Embodiment 4 Disk-shaped electrostatic motor including the structure of the present invention FIG. 13 is a sectional view of a hard disk having the structure of the present invention, a sectional view along the circumference of the disk, and a plan view of the disk. 1 shows a diagram and a plan view of a motor stator. One of the two adjacent substrates is a disk and constitutes a slider for the motor, which is also a substrate of the media. The substrate material is, for example, a glass material, and the surface of the disk is polished with a flatness of 10 nm. In a cross-sectional view along the circumference of the disk, a magnetic medium is formed on at least one surface of the medium. A magnetic head is provided in the vicinity of the surface of the magnetic medium via a gap, and performs recording and reproduction between the recording medium and the magnetic head. An organic molecular film having a predetermined line width and having a charge radially is repeatedly formed on the disk surface.

FIG. 14 shows a mask pattern for transferring a charge pattern onto a glass substrate. The charge pattern is formed by transferring a mask pattern using photolithography. In the drawing, as an example, a pattern in which the diameter of the substrate on which the medium is formed is 17 mm, the center radius of the charge is 5 mm, the length of the charge is 1 mm, the width of the charge is 20 μm, and the charge interval is 20 μm is formed as an inverted pattern on the resist. Have been. The resist applied to the substrate is developed in the colorless portion exposed, and the substrate surface is exposed. When an organic molecular film with charge is formed on the surface of the substrate on which this pattern is formed,
An organic molecular film having a charge is formed only in a portion where the surface of the substrate is exposed. Since the resist is removed with an organic solvent,
A radial pattern of a charged organic molecular film can be formed. For example, when the media diameter is 17 mm, the charge center radius is 5 mm, the charge length is 1 mm, the charge width is 20 μm, and the charge interval is 20 μm, the surface charge density σ = 40 m
An organic molecular film having C / m ² was formed.

FIG. 15 shows a plan view and a sectional view of the electrode. Electrodes are repeatedly formed on the surface of the stator radially with a predetermined line width. As shown in the cross-sectional view, the center radius of the electrode is 5 mm, and the length of the electrode is 1 at the position corresponding to the organic molecular film.
The electrode is formed with a width of 5 mm, an electrode width of 5 μm, and an electrode interval of 35 μm.

FIG. 16 shows an electrode forming process. A metal thin film is formed to a thickness of 0.2 μm on the surface of the substrate, and the electrode pattern is transferred to a resist pattern using a photomask,
Transfer the pattern to the metal film. An insulating film having a thickness of 0.2 μm is formed on the surface of the metal film. Since the space between the stator and the medium is filled with an electrolyte, electrical insulation is provided so that a voltage is applied between electrodes formed on the surface of the stator. In addition, a gap spacer is formed between the stator and the medium as needed to prevent direct contact between the electrode on the stator surface and the charge pattern on the medium surface. The thickness of the gap spacer was 0.5 μm. Electrode A of this repeating pattern
And a voltage between the electrodes B. When a voltage of ± 10 V was applied between the electrodes, an electric field of E = 0.5 MV / m was generated, and a thrust F = qE = 3N and a torque T = rF = 15 mNm were obtained.

Embodiment 5 Electrostatic motor having a centripetal force at the center of the disc The disc-shaped electrostatic motor having the structure of the present invention includes one having a centripetal force at the center of the disc. As shown in FIG. 13, an organic molecular film having a circular charge pattern with a line width of 0.1 mm was formed at a position of a radius of 1 mm. Positive and negative charge patterns were formed on the stator so as to sandwich the charge pattern. A DC voltage of 10 V was applied between the electrodes. The charge pattern of the medium generates a centripetal force with respect to the center of the disk serving as the medium under the influence of the DC electric field.

Embodiment 6 A structure according to the present invention, wherein the surfaces of two substrates arranged so that the spherical electrostatic motor gap including the structure according to the present invention is close to less than 1 μm are spherical, An organic molecular film having charges is repeatedly formed along the spherical surface with a predetermined line width on the inner spherical surface, and an electrode is repeatedly formed on the outer spherical surface with the predetermined line width. An embodiment of the present invention also includes an electrostatic motor characterized in that a voltage is applied to generate a propulsion force in the inner sphere. In the present invention, an electrostatic motor in which the electrodes formed on the other spherical surface are repeatedly formed in the latitude direction is preferable.

More specifically, FIG. 17 shows a side view when a charge pattern is formed on a spherical surface, a cross-sectional view showing a relative position between the charge pattern and the electrode pattern, and a perspective view of the electrode pattern. Two substrates disposed close to each other so that the gap is less than 1 μm are spheres, and the slider of the motor is a sphere substrate included therein. The substrate material is, for example, a glass material and is polished into a spherical shape. An organic molecular film having a predetermined line width and having a charge along the equator is repeatedly formed on the surface of the sphere. This charge pattern is provided for performing motor rotation along the equator. Further, an organic molecular film having a charge of a charge pattern along the latitude with a predetermined line width is repeatedly formed on the surface of the sphere.

The charge pattern was formed by transferring a mask pattern using photolithography. A pattern having a spherical substrate having a diameter of 2 mm, a charge length of 0.2 mm, a charge width of 20 μm, and a charge interval of 20 μm was formed as an inverted pattern on the resist. The resist applied to the substrate was exposed and developed, and a charge pattern was formed on the exposed substrate surface. When a charged organic molecular film was formed on the surface of the substrate on which this pattern was formed, a charged organic molecular film was formed only on the exposed portion of the substrate surface. Since the resist was removed with an organic solvent, a spherical pattern of a charged organic molecular film could be formed. The diameter of the sphere is 2 mm, the length of the charge is 0.2 mm, and the width of the charge is 2
When the charge interval was 20 μm, the surface charge density σ of the organic molecular film was 40 mC / m ² .

An electrode pattern was formed on the surface of the stator. In this electrode pattern, positive and negative electrodes were alternately formed on the equator corresponding to the charge pattern. At a position corresponding to the organic molecular film, the electrode diameter is 2 mm and the electrode length is 0.
Electrodes were formed with a width of 2 mm, an electrode width of 5 μm, and an electrode interval of 35 μm. The electrode formation process is similar to the case of the disk,
A metal thin film having a thickness of 0.2 μm was formed on the surface of the substrate, the electrode pattern was transferred to a resist pattern using a photomask, and the pattern was transferred to the metal film. An insulating film having a thickness of 0.2 μm was formed on the surface of the metal film. Since the space between the stator and the slider was filled with an electrolyte, electrical insulation was provided so that a voltage was applied between the electrodes formed on the surface of the stator. In addition, a gap spacer is provided between the stator and the slider as necessary so that the electrode on the stator surface does not directly contact the charge pattern on the slider surface. The thickness of the gap spacer was set to 0.5 μm. When a voltage is applied between the electrodes of this repeating pattern, the voltage between the electrodes becomes ± 10
In the case of V, an electric field of E = 0.5 MV / m was generated, and a propulsive force F = qE = 3N and a torque = rF = 15 mNm were obtained.

Further, in the above-mentioned spherical electrostatic motor of the present invention, the surface of the two substrates having a gap close to less than 1 μm has a spherical surface on the inner spherical surface of the structure of the present invention. Also includes an electrostatic motor in which an organic molecular film having charges in the latitude direction is repeatedly formed, electrodes on the other spherical surface are repeatedly formed in the latitude direction with the predetermined line width, and further divided in the longitude direction. . For this motor,
Repeated formation of organic molecular film with charge in the latitudinal direction,
Electrodes are repeatedly formed on the surface of the other sphere in the latitude direction with the predetermined line width, and the electrodes are divided at every 90 degrees in the longitude direction, so the electric field is inverted in the plus or minus direction according to the divided latitude charge pattern. Then, it is possible to simultaneously rotate in the latitude direction by the electrode pattern in the latitude direction.

Further, in the spherical electrostatic motor of the present invention, an organic molecular film having a predetermined line width and having a charge in the longitudinal direction is repeatedly formed on the inner spherical surface, and an electrode is formed on the other spherical surface. An electrostatic motor configured to be repeatedly formed in the longitude direction with the predetermined line width is also included. When a pattern that rotates in the equatorial direction only on the equator is formed, the rotational force in the equatorial direction decreases when rotation is applied in the latitude direction. Since the film is repeatedly formed and the electrode is repeatedly formed in the longitudinal direction at the predetermined line width on the surface of the other sphere, the electrode can be rotated in the latitudinal direction without weakening the rotational force in the equatorial direction.

Further, in the spherical electrostatic motor of the present invention, an organic molecular film having electric charges in a longitudinal direction on the equator with a predetermined line width is repeatedly formed on the inner spherical surface, and the other spherical surface is formed. An electrode is repeatedly formed in the longitudinal direction on the equator with the predetermined line width, and an organic molecular film having a charge in the latitude direction is repeatedly formed on the inner spherical surface, and the other spherical surface electrode is formed in the predetermined spherical shape. Repeatedly formed in the latitude direction with a line width of
The longitude direction includes the divided electrostatic motor. In the case of this motor, an AC voltage can be applied to the electrodes of the repetitive pattern to generate a triaxial thrust on the spherical surface.

Embodiment 7 Bearing without bearing having the structure of the present invention As one embodiment of the present invention, a bearing having no mechanical bearing is provided. That is, a rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) are arranged close to each other, and a predetermined line width and a predetermined line width are arranged on adjacent surfaces of the first substrate. A circular convex support having a radius is provided, an organic molecular film having a charge is formed on the surface of the support, and a position having a predetermined line width and a predetermined radius is formed on the opposite surface of the second substrate. An organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate is formed on the surface of the support, and an electrolyte liquid is applied to the surface of the first substrate. The convex support of the second substrate is immersed in this electrolyte liquid, and the electric double layer repulsion acting between the surfaces of the organic molecular film and the meniscus attraction of the liquid surface formed between the two surfaces cause 1 μm between the two surfaces.
An organic molecular film having a circular charge pattern with a line width of 0.1 mm is formed at a position of a radius of 1 mm on the surface of the first substrate while maintaining a small gap of less than The electrodes are formed so as to give the same kind of electric charge on the outside and different kinds of electric charges on the inside so as to sandwich the charge pattern on the first substrate, and a DC voltage is applied between the electrodes so that the center of the disk is A bearing having no mechanical shaft characterized by generating a centripetal force.

This bearing was constructed as follows. First, a circular convex support having a predetermined line width and a predetermined radius is provided on the surface of a rotatable disk substrate (first substrate), and an organic molecular film having a charge is provided on the surface of the support. Formed. Next, a convex support was provided at a fixed line width and a predetermined radius on the fixed substrate (second substrate), and an organic molecular film having the same kind of charge was formed on the surface of the support. The two substrates were arranged close to each other. Electrolyte liquid is applied to the surface of a disc substrate (first substrate), and a convex support of a fixed substrate (second substrate) is immersed in this electrolyte liquid, and an electric double layer repulsion acting between organic molecular film surfaces; A minute gap of less than 1 μm between both surfaces is maintained by a meniscus force or the like formed by the electrolyte solution. As shown in FIG.
An organic molecular film having a circular charge pattern with a line width of mm was formed. Positive and negative electrode patterns were formed on the second substrate so as to sandwich the charge pattern. A DC voltage of 10 V was applied between the electrodes. In the charge pattern of the first substrate, a centripetal force is generated with respect to the center of the disk under the influence of the DC electric field, and the shaft rotates with high accuracy. Can be used as a bearing without mechanical bearing.

In the above bearing of the present invention, a magnetic recording medium is formed on the surface of the first substrate, that is, a rotating disk-shaped substrate, and an organic molecular film is further formed on the surface thereof. That is, a recording / reproducing element is provided on the surface of a fixed substrate, a convex support having substantially the same height as the surface of the element is provided, and an organic molecular film is formed on the surface of the support. Included in the bearings.

Further, in the above-mentioned bearing of the present invention, a magnetic recording medium is formed on the surface of the first substrate, ie, a rotating disk-shaped substrate, and an organic molecular film is formed on the surface thereof. The substrate, that is, a magnetic recording / reproducing element is provided on the surface of the fixed substrate, a convex support having substantially the same height as the surface of the element is provided, and an organic molecular film is formed on the support surface. Applying an electrolyte liquid to the surface of the substrate 1
A bearing obtained by immersing the convex support of the second substrate in the electrolyte liquid is also included in the bearing of the present invention.

Example 8 Guide Having the Structure of the Present Invention As another embodiment utilizing the structure of the present invention, a guide is provided. That is, two substrates (a first substrate and a second substrate) are arranged close to each other, and a linear convex support having a predetermined line width is provided on the surface of the first substrate. A charged organic molecular film was formed on the surface of the. On the surface of the second substrate, electrodes having predetermined line widths and intervals were linearly formed. An electrolyte liquid was applied to the surface of the first substrate.
By applying a DC voltage to the electrode, it is possible to move along the line by an external force.

As another example of the guide of the present invention, two substrates (a first substrate and a second substrate) are arranged close to each other,
An organic molecular film having electric charges on the surfaces of the first and second linear convex supports, provided with two linear convex supports having a predetermined line width on the surface of the first substrate; Forming the second
Providing third and fourth linear convex supports on the surface of the substrate, forming an organic molecular film having a charge on the surface of the third convex support, and forming the organic molecular film on the surface of the first substrate. Electrode having an electrolyte liquid applied thereto, an electrode having a small gap of less than 1 μm between both surfaces is maintained by electric double layer repulsion acting between the surfaces of the organic molecular film, and a predetermined line width and interval are provided on the fourth convex support. Is formed in a linear shape, a DC voltage is applied to the electrode, and the electrode moves along the line by an external force.

Example 9 A cylinder having a diameter of 10 mm and a length of 60 mm was formed from a cylindrical actuator polyethylene terephthalate resin having the structure of the present invention . On this cylinder, aluminum electrodes having a diameter of 10 mm and a thickness of 0.2 mm were arranged at 5 mm intervals in parallel with the bottom surface of the cylinder. In addition, a through hole having a diameter of 2 mm is formed in the column, and a glass thin tube having a diameter such that a gap of less than 1 μm is contained therein. Pure water having a resistivity of 16 MΩ is contained between the pores and the thin tubes. One surface of the cylinder is in contact with pure water. The liquid inside is never lost. COOH (CH ₂ ) ₈ Si is sequentially formed on the thin tube in a 5 mm-wide band.
Organic molecular films of —O— and NH ₂ (CH ₂ ) ₈ Si—O— are formed by photolithography.

Example 10 One side of a polyimide film having a structure of the present invention having a thickness of 0.5 mm and a size of 100 mm × 30 mm was irradiated with UV light or RF plasma treatment in an oxygen partial pressure of 0.1 Torr. , A COOH (CH ₂ ) ₈ Si—O— having a negative charge and a positive charge in a liquid in order in a 5 mm × 25 mm area such that the longitudinal direction is parallel to the 30 mm side of the film. An NH ₂ (CH ₂ ) ₈ Si—O— organic molecular film having the following formula was formed by photolithography. The adjacent width of these regions was 1 mm. On one surface of the other film, platinum was vacuum-deposited using a metal mask, and a pair of platinum comb electrodes was formed so as to face each other. The interval between adjacent comb electrodes was 5.5 mm. One hundred of these films were laminated so that the electrode surface and the surface on which the organic molecular film was formed faced each other. Pure water was filled between the films. It is not necessary to insert a spacer between the films, and if the films are at a distance of less than 1 μm, they do not adhere due to repulsion due to intermolecular force. At this time, if the film on which the electrodes are formed, or the film on which the organic molecular film is formed is fixed, applying an AC voltage 180 degrees out of phase to a pair of comb-shaped electrodes, the film on which the organic molecular film is formed or The film on which the electrodes are formed moves.

Embodiment 11 Micropump Containing the Structure of the Present Invention The micropump of the present invention is a pump comprising a silicon film diaphragm, an organic molecular film formed thereon and electrodes (FIG. 19). That is, the micropump of the present invention is a cylinder, and has a structure in which a liquid is sandwiched around an inner cylinder 31 and an outer cylinder 32 surrounds the liquid. A part of the outer cylinder is provided with a chamber 33 containing the working part of the pump. A silicon film diaphragm 34 is provided between the chamber and a liquid to be transported having a thickness of about 0.2 μm. An electrode 35 having a thickness of about 25 nm is provided at a portion of the silicon film facing the diaphragm, and a voltage 36 is applied between the silicon film and the electrode. The width of the electrode 35 is about 200 μm.
The chamber is formed by anisotropic etching using KOH. A silicon diaphragm is formed by etching a p-type semiconductor substrate, leaving an n-type portion having a thickness of 1 μm, thereby forming a diaphragm. An organic molecular film 37 having a thickness of about 100 nm is formed on the surface of the diaphragm 34, and the surface of the organic molecular film 37 has a charge 38. An organic molecular film layer having alternating positive or negative charges is arranged corresponding to the electrode portion on the circumference of about 2 mm in diameter. The diaphragm and the anisotropically etched chamber are medium, for example,
Filled with liquids such as water, alcohol, and HPE.

In FIG. 19, when a negative voltage is applied to the electrode 35, the organic molecular film having a positive charge is attracted to extend the silicon diaphragm in the outer peripheral direction.
The organic molecular film with negative charge receives repulsion, stretches the diaphragm in the inner circumferential direction, and contacts the diaphragm with the inner cylinder, thereby expanding and contracting the space between the diaphragm and the inner cylinder. Occurs. The space defined by the diaphragm and the inner cylinder thus forms a pump area. If there is a water storage tank on the right side in the figure, the liquid that was initially in the negatively charged diaphragm portion is moved to the left, positively charged diaphragm portion. At the next moment, when the voltage switches and becomes positive, the positive charge is pressed against the inner cylinder, causing the liquid to move further to the left. In this manner, a pump region is formed between the diaphragm and the inner peripheral portion by the action of the electrode 35, and new liquid is sequentially introduced into the pump section from the liquid supply source on the right side and transferred to the left. 1KHz voltage drive frequency
Then, it becomes possible to supply a very small amount of liquid of about 0.02 ml / min.

[0121] composed of an organic molecular film anti-vibration table is formed thereon with two plates containing structure of the vibration isolation table present invention comprising a structure of Example 12 the present invention (FIG. 20). FIG.
FIG. 0 shows a sectional view of the vibration isolation table of the present invention. FIG. 1 is a schematic diagram of a vibration isolation table when there is no vibration. In the figure, organic molecular films 43 and 44 are provided on the surfaces of flat plates 41 and 42, respectively.
Is formed. The organic molecular film includes an anchor portion bonded to a flat plate, an intermediate portion acting as a dynamic elastic body, and a charged surface portion. The charge 45 of the organic molecular film of the flat plate 41 and the charge 45 of the organic molecular film of the flat plate 42 have the same sign, and a medium 46 is filled between them. The two flat plates oppose each other to generate an electrostatic repulsion. The distance between the two flat plates is about 0.35 μm, and the thickness of the organic molecular film formed on each flat plate is about 0.15 μm. The flat plate 41 floats due to electrostatic repulsion and intermolecular repulsion between the organic molecular films 43 and 44 in the medium.

FIG. 2 is a cross-sectional view showing a vibration damping table when surface wave vibration is applied. When vibration is applied to the flat plate 42,
Although the surface of the flat plate 42 is wavy when viewed microscopically, the waviness causes a portion where the charge of the organic molecular film 44 approaches the charge of the organic molecular film 43 on the flat plate 41 and a portion which moves away from the charge. In the approaching portion, the elastic portion of the organic molecular film 44 is contracted and energy is stored in order to maintain the weight of the flat plate 41. On the other hand, in the part that goes away, the elastic part of the organic molecular film 44 expands and the energy becomes small. On average, the sum of the energy stored in the elastic body becomes zero. Since the vibration of the flat plate 42 propagates, the energy of the propagating wave is converted into the vibration energy of the organic molecular film formed on the flat plate 42 and the flat plate 41 according to the propagation. As described above, the vibration transmitted to the flat plate 42 is absorbed by the structure shown in the sectional view 14 and the vibration of the flat plate 41 can be attenuated.

Example 13 Micro-nozzle including the structure of the present invention A micro-nozzle including the structure of the present invention is composed of two conical surfaces and an organic molecular film formed thereon (FIG. 2).
1). 1 is a cross-sectional view of a nozzle core portion and a nozzle outlet portion when a liquid is jetted. An organic molecular film 53 is formed on the surface of the nozzle core 51, and a similar organic molecular film 54 is formed on one nozzle outlet 52. The organic molecular films 53 and 54 include an anchor portion for covalently bonding to the surface of the nozzle core portion 51 or the nozzle outlet portion 52, an intermediate portion serving as a dynamic elastic body, and a charged surface portion. A conical surface of the nozzle outlet is provided opposite to the conical surface of the nozzle core, and a space between the two conical surfaces is filled with an ejection fluid 55 as a medium. Examples of the ejection fluid include water, alcohol, organic solvent, argon gas, nitrogen gas, air, oxygen gas, carbon dioxide gas, and the like.

FIG. 2 shows a state in which the nozzle core advances to the nozzle outlet, and the nozzle reduces the flow rate of the jetting liquid due to mutual repulsion between molecules so that jetting cannot be performed.
When two conical surfaces face each other due to the organic molecular films 53 and 54 formed on the surfaces of the nozzle core 51 and the nozzle outlet 52, an electrostatic repulsion acts. The injection liquid is stopped between the two conical surfaces until the organic molecular films 53 and 54 come close to contact with each other. When the organic molecular films 53 and 54 are not formed on the contact surface, the tip portion of the nozzle is quickly worn, and the life of the nozzle is shortened. According to the present invention, damage due to contact of the wear-resistant layer can be reduced.

The structure of the present invention having a gap of less than 100 μm
Example of body

Embodiment 14 FIG. 1 shows an example of the structure of the present invention having a gap of less than 100 μm. The structure of the present invention includes at least one of the surfaces of two substrates 1 and 2 which are closely adjacent to each other (for example, the substrate 1
The organic molecular film 4 is formed on the surface of the organic molecular film 4 and the surface of the other substrate (for example, the substrate 2) or the substrate 2
The gap 3 between the surface of the organic molecular film 5 and the surface of the organic molecular film 5 is 100
The structure is less than μm.

The shape of the structure of the present invention is not particularly limited.
The surfaces of the two substrates are close to each other, and an organic molecular film is formed by covalent bonding on at least one of the surfaces. Any structure may be used as long as the structure satisfies the condition that the gap with the organic molecular film is less than 100 μm. For example, both substrates may be planar, both substrates may be cylindrical, or both substrates may have other shapes. Further, a structure may be used in which a part of the surfaces of both bases, but not all of them, is closely adjacent to each other.

In the second structure (FIG. 1-a) of the present invention, an electrode 6 is provided on one of the substrates, and an electric field is applied to generate an electrostatic repulsion between the surfaces of the other substrate. Around the organic molecular film, for example, a polymer solid electrolyte is 1 μm
Formed, the charge of the organic molecular film diffuses into the solid electrolyte,
An electric charge is induced on the surface of the solid polymer electrolyte. An electric field is applied to the induced charge by the electrode 6 to generate an electrostatic repulsion on the surface of the base on which the organic molecular film is formed.

Using the organic molecular film 15 formed on the surface of the stator 12 of FIG. 2, the surface of the polymer solid electrolyte further formed on the surface, and the electric field generated by the electrode 16 embedded in the slider 11. Can also. The electric field strength E when a voltage of 100 V is applied to the gap d of 10 μm to the electrode 16 inside the slider 11 is E = V / d = 1 × 10 ⁷ (V / m). The surface charge amount σ is 10 mC / m ² per unit area.
It was measured. Assuming that r = 3 mm and l = 10 mm, the force (F) received by the opposing area of the slider and the stator is q = 5 × 10 ⁻⁶ C and F = qE = 50N.

Embodiment 15 Electrostatic Motor Including Structure of the Present Invention FIG. 7 is a plan view of an example of an electrode of a motor including the structure of the present invention. The electrodes shown in this figure are comb-shaped and form a pattern along a cylindrical slider. Electrode 1
AC power (COSwt). FIG. 8 shows a cross-sectional view of the gap including the electrode structure. The gap 13 is filled with a conductive medium. In some cases, the medium may not be filled. Approximately 10
An insulating layer 19 having a thickness of about 100 nm is formed, and a thickness of about 100
The organic molecular film 15 of nm is formed thereon. The pattern of the charge distribution 25 of the organic molecular film 15 is formed such that the polarity is reversed every about 100 μm. Slider 1
A DC bias voltage is applied between 1 and the stator 12, so that a repulsive force acts between the slider and the stator. On the surface of the slider 11, an electrode 16 is formed of a material such as ITO with a thickness of about 25 nm. An insulating layer 19 having a thickness of about 1 μm is formed on the electrode, the surface is polished, and the surface smoothness is finished to about 100 nm. The electrode 16 has a line width of about 100 μm, and has an organic molecular film 15.
1 pitch interval of the positive and negative patterns (approx. 200 μm)
Formed. When the phase of the voltage applied to the electrode 16 changes, the attractive force or the repulsive force with the organic molecular film 15 changes according to the change, and a rotating tangential force is applied to the slider 11.

FIG. 10 shows a plan view of the second electrode structure. As shown in FIG. 10, an AC power supply (COSwt) is connected to one electrode 16 and an AC power supply (COS (wt + π)) whose phase is delayed by 180 ° is connected to the other electrode 26. Electrode 16 and electrode 26
Are formed so as to penetrate into each other in a comb shape. FIG. 11 is a sectional view of a gap including the second electrode structure.
The gap is filled with an insulating medium 28. An organic molecular film 15 having a thickness of about 100 nm is directly covalently bonded to the stator. The pattern of the organic molecular film 15 is formed such that the sign is reversed every about 100 μm in the rotation direction of the slider. An AC bias voltage is applied between the slider and the stator to exert a repulsive force between the slider and the stator. The AC bias is 5 times higher than the driving voltage frequency.
The frequency is set to a sufficiently high frequency twice or more so as not to affect the driving.

The electrode 1 is formed on the slider surface with a thickness of about 25 nm using a material such as ITO. A wear-resistant layer 18 having a thickness of about 50 nm is formed on the electrode, the surface is polished, and the surface smoothness is finished to about 10 nm. The electrode 16 has a line width of about 100 μm, and has an organic molecular film 15.
1 pitch interval of the positive and negative patterns (approx. 200 μm)
And is connected to a power supply having the phase of COSwt. The electrodes 26 are also formed with a line width of about 100 μm and an interval (about 200 μm) for one pitch of the positive and negative patterns of the organic molecular film 15.
+ Π). When the phase of the voltage applied to the electrode changes, the attractive or repulsive force applied to the organic molecular film 15 changes according to the change, and a tangential force rotating between the organic molecular film 15 and the organic molecular film 15 is applied. Rotate around.

Embodiment 16 Disk-shaped Electrostatic Motor Containing the Structure of the Present Invention FIG. 13 is a sectional view of a hard disk having the structure of the present invention, a sectional view along the circumference of the disk, and a plan view of the disk. 1 shows a diagram and a plan view of a motor stator. One of the two adjacent substrates is a disk and constitutes a slider for the motor, which is also a substrate of the media. The substrate material is, for example, a glass material, and the surface of the disk is polished with a flatness of 10 nm. In a cross-sectional view along the circumference of the disk, a magnetic medium is formed on at least one surface of the medium. A magnetic head is provided in the vicinity of the surface of the magnetic medium via a gap, and performs recording and reproduction between the recording medium and the magnetic head. An organic molecular film having a predetermined line width and having a charge radially is repeatedly formed on the disk surface.

FIG. 14 shows a mask pattern for transferring a charge pattern onto a glass substrate. The charge pattern is formed by transferring a mask pattern using photolithography. In the drawing, as an example, a pattern in which the diameter of the substrate on which the medium is formed is 17 mm, the center radius of the charge is 5 mm, the length of the charge is 1 mm, the width of the charge is 20 μm, and the charge interval is 20 μm is formed as an inverted pattern on the resist. Have been. The resist applied to the substrate is developed in the colorless portion exposed, and the substrate surface is exposed. When an organic molecular film with charge is formed on the surface of the substrate on which this pattern is formed,
An organic molecular film having a charge is formed only in a portion where the surface of the substrate is exposed. Since the resist is removed with an organic solvent,
A radial pattern of a charged organic molecular film can be formed. For example, when the media diameter is 17 mm, the charge center radius is 5 mm, the charge length is 1 mm, the charge width is 20 μm, and the charge interval is 20 μm, the surface charge density σ = 200
An organic molecular film having mC / m ² was formed.

FIG. 15 shows a plan view and a sectional view of the electrode. Electrodes are repeatedly formed on the surface of the stator radially with a predetermined line width. As shown in the cross-sectional view, the center radius of the electrode is 5 mm, and the length of the electrode is 1 at the position corresponding to the organic molecular film.
The electrode is formed with a width of 5 mm, an electrode width of 5 μm, and an electrode interval of 35 μm.

FIG. 16 shows an electrode forming process. A metal thin film is formed to a thickness of 0.2 μm on the surface of the substrate, and the electrode pattern is transferred to a resist pattern using a photomask,
Transfer the pattern to the metal film. An insulating film having a thickness of 0.2 μm is formed on the surface of the metal film. Since the space between the stator and the medium is filled with an electrolyte, electrical insulation is provided so that a voltage is applied between electrodes formed on the surface of the stator. In addition, a gap spacer is formed between the stator and the medium as needed to prevent direct contact between the electrode on the stator surface and the charge pattern on the medium surface. The thickness of the gap spacer was 5 μm. A voltage is applied between the electrode A and the electrode B in the repeating pattern. When a voltage of ± 10 V is applied between the electrodes, an electric field of E = 0.5 MV / m is generated, and the thrust F =
qE = 15N and torque T = rF = 75mNm were obtained.

Example 17 Guide Having the Structure of the Present Invention As another embodiment utilizing the structure of the present invention, a guide is provided. That is, two substrates (a first substrate and a second substrate) are arranged close to each other until the gap becomes less than 100 μm, and a linear convex support having a predetermined line width is provided on the surface of the first substrate. An organic molecular film having a charge was formed on the surface of the support. On the surface of the second substrate, electrodes having predetermined line widths and intervals were linearly formed. The first
An electrolyte liquid was applied to the surface of the substrate. In this structure,
A minute gap between the two surfaces is maintained by the electric double layer repulsion acting between the two surfaces, and a direct voltage is applied to the electrode to apply a vertical force to the linear convex support. Works, and when a force is applied from the outside along the line, movement along the line is enabled.

Example 18 A cylindrical cylinder having a diameter of 10 mm and a length of 60 mm was made of a cylindrical actuator polyethylene terephthalate resin having the structure of the present invention . On this cylinder, aluminum electrodes having a diameter of 10 mm and a thickness of 0.2 mm were arranged at 5 mm intervals in parallel with the bottom surface of the cylinder. In addition, a through hole having a diameter of 2 mm was formed in the cylinder, and 100 μm was formed there.
It contains a glass capillary with a diameter that produces a gap of less than m. Pure water having a resistivity of 16 MΩ is contained between the pores and the thin tubes. One surface of the cylinder is in contact with pure water. The liquid inside is never lost. In addition, COOH (CH ₂ ) ₈ is sequentially placed on the narrow tube in a 5 mm wide band.
Organic molecular films of Si—O— and NH ₂ (CH ₂ ) ₈ Si—O— are formed using photolithography.

Example 19 One side of a polyimide film having a structure of the present invention having a thickness of 0.5 mm and a size of 100 mm × 30 mm was subjected to UV irradiation treatment or RF plasma treatment in an oxygen partial pressure of 0.1 Torr. , A COOH (CH ₂ ) ₈ Si—O— having a negative charge and a positive charge in a liquid in order in a 5 mm × 25 mm area such that the longitudinal direction is parallel to the 30 mm side of the film. An organic molecular film of NH ₂ (CH ₂ ) ₈ Si—O— having the following formula was formed by photolithography. The adjacent width of these regions was 1 mm. On one surface of the other film, platinum was vacuum-deposited using a metal mask, and a pair of platinum comb electrodes was formed so as to face each other. The interval between adjacent comb electrodes was 5.5 mm. One hundred of these films were laminated so that the electrode surface and the surface on which the organic molecular film was formed faced each other. Pure water was filled between the films. It is not necessary to insert a spacer between the films, and when the distance between the films is less than 100 μm, adhesion is hindered by repulsion due to intermolecular force. At this time, if the film on which the electrode is formed, or the film on which the organic molecular film is formed is fixed, when an AC voltage 180 degrees out of phase is applied to a pair of comb-shaped electrodes, the film on which the organic molecular film is formed or The film on which the electrodes are formed moves.

[0140]

According to the present invention, an organic molecular film is formed by a covalent bond on at least one surface of two adjacent substrate surfaces, and the surface of the organic molecular film and the surface of the other substrate or the other surface are formed. A novel structure is provided in which the gap with the surface of the organic molecular film formed by covalent bonding on the substrate surface is less than 100 μm, more preferably less than 1 μm. In this structure, the gap between the two surfaces is lubricated by the elasticity of the organic molecular film and the intermolecular repulsion caused by the steric repulsion between the two surfaces, and has an effect of reducing the friction caused by sliding between the two surfaces. The present invention further provides a motor, an actuator, a vibration isolation table, and the like including the structure of the present invention.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a structure of the present invention.

FIG. 2 is a sectional view showing the structure of a slider / stator of the micro motor according to the present invention.

FIG. 3 is a diagram showing a repulsive force acting between organic molecular films. FIG. 3-a is a schematic diagram when one polymer is covalently bonded to the substrate surface. FIG. 3B is a diagram showing the distribution of the length of the polymer coil in the liquid when one polymer is covalently bonded to the substrate surface. FIG. 3C is a schematic diagram of an organic molecular film obtained by covalently bonding a large number of polymers to the substrate surface. FIG. 3D is a diagram in which the distance between the substrates and the repulsive force generated between the organic molecular films are plotted. The repulsion increases dramatically as the distance between the substrate surfaces decreases.

FIG. 4 is a schematic diagram showing a cross-sectional view of a slider and a stator having an organic molecular film formed on a surface thereof. FIG. 4-1 shows a structure in which an organic molecular film is formed on the surfaces of the slider and the stator, and electrodes are embedded inside the slider. FIG. 4-2 shows that a dielectric layer and an organic molecular film are formed on the surface of the stator. FIG. 4-3 shows that a wear-resistant layer and an organic molecular film are formed on the surface of the stator. FIG. 4-4 shows that a dielectric layer, a wear-resistant layer, and an organic molecular film are formed on the surface of the stator.

FIG. 5 is a sectional view of the slider / stator when an AC voltage is applied to the stator.

FIG. 6 is a diagram showing a change over time of a self-bias voltage generated on a stator surface due to an applied AC voltage.

FIG. 7 is a schematic diagram showing an electrode structure of the electrostatic drive motor.

FIG. 8 is a sectional view of a gap including an electrode structure of the electrostatic drive motor.

FIG. 9 is an explanatory diagram of a motor operation of the electrode structure shown in FIG. 8;

FIG. 10 is a schematic diagram showing a two-electrode structure for applying an AC voltage having a phase difference of 180 °.

FIG. 11 is a schematic diagram showing a cross-sectional view of a gap including an electrode structure having two electrodes.

FIG. 12 is an explanatory diagram of a motor operation of the electrode structure having two electrodes shown in FIG. 11;

FIG. 13 shows a sectional view of a hard disk having a structure of a disk-shaped electrostatic motor of the present invention, a sectional view along a disk circumference, a plan view of a disk, a plan view of a motor / stator, and a centripetal force generating mechanism. .

FIG. 14 shows a mask pattern for transferring a charge pattern of the disk-shaped electrostatic motor of the present invention onto a glass substrate.

FIG. 15 shows a plan view and a sectional view of an electrode of the disk-shaped electrostatic motor of the present invention. FIG.

FIG. 16 shows an electrode forming process of the disk-shaped electrostatic motor of the present invention.

FIG. 17 shows a side view when a charge pattern is formed on a spherical surface, a cross-sectional view showing a relative position between the charge pattern and the electrode pattern, and a perspective view of the electrode pattern.

FIG. 18 is a schematic view showing a plan view and a sectional view of a bearing without a mechanical bearing of the present invention.

FIG. 19 is a schematic view showing a sectional view of a micropump according to the present invention.

FIG. 20 is a schematic view showing a cross-sectional view of the vibration isolation table of the present invention.

FIG. 21 is a schematic view showing a cross-sectional view of the nozzle of the present invention.

[Explanation of symbols]

 1: Base 1 2: Base 2 3: Gap 4: Organic molecular film formed on the surface of base 1 5: Organic molecular film formed on the surface of base 2 6: Electrode 7: Dielectric layer 8: Wear-resistant layer 11: Motor slider 12: Motor stator 13: Gap between motor slider and stator 14: Organic molecular film formed on slider surface 15: Organic molecular film formed on stator surface 16: Embedded in motor slider Electrode 17: Dielectric layer 18: Wear layer 19: Insulating layer 20: Inner diameter of stator 21: Base 22: Polymer coil 23: Anchor portion of polymer coil 24: Length of polymer coil 25: Organic molecule Membrane charge 26: Electrode 180 ° out of phase 27: Driving force 28: Insulating medium 31: Inner cylinder of micropump of the present invention 32: Micropon of the present invention Outside: 33: room containing pump operating part 34: diaphragm of silicon film 35: electrode 36: voltage 37: organic molecular film 38: electric charge 41: flat plate 42: flat plate 43: organic molecular film 44: organic molecular film 45 : Electric charge of organic molecular film 46: Medium 51: Nozzle core 52: Nozzle outlet 53: Organic molecular film 54: Organic molecular film 55: Injection fluid

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI H02N 1/10 H02N 1/10 10/00 10/00 // B32B 7/02 B32B 7/02 (72) Inventor Toru Nakagawa Osaka No. 1006 Kadoma, Kamon, Fumonma-shi Matsushita Electric Industrial Co., Ltd. (56) References JP-A-6-47859 (JP, A) JP-A-4-364380 (JP, A) JP-A-64-72313 (JP, A) A) JP-A-7-57248 (JP, A) JP-A-1-296429 (JP, A) JP-A-64-40717 (JP, A) JP-A-4-46219 (JP, A) JP-A-8 -303531 (JP, A) JP-A-5-122919 (JP, A) JP-B-54-36172 (JP, B2) (58) Fields investigated (Int. Cl. ⁷ , DB name) B81B 5/00 F04B 43/02 F04B 43/12 H02N 1/00 H02N 1/08 H02N 1/10 H02N 10/00 B32B 7/02

Claims (66)

(57) [Claims] An organic molecular film is formed by covalent bonding on all or a part of two opposing surfaces of two substrates that are closely adjacent to each other, and all or a part of the organic molecular film is an anionic film.
Anionic and / or cationic;
Cationic organic molecular membrane region is organic in near neutral liquid
The surface portion of the molecular film is charged,
Small gap between the opposing surfaces of two substrates
A structure that is filled with a liquid . 2. The method according to claim 1, wherein the near neutral liquid contains an electrolyte.
Aqueous solution near neutrality, carbon number 1 near neutral including electrolyte
Up to 6 aqueous alcohols, near neutral aqueous containing electrolytes
The structure according to claim 1, which is selected from an organic solvent . 3. The method according to claim 1, wherein the two substrates are closely adjacent to each other.
Organic molecules by covalent bonding to all or part of both surfaces
A film is formed, and all or a part of the organic molecular film is anion
Anionic and / or cationic;
Cationic organic molecular membrane regions are organic molecules in solid electrolyte
The surface of the membrane is charged, and the two opposite
The minute gap between the opposing surfaces of the substrate is filled with solid electrolyte.
The structure that is being filled . 4. The organic molecular film according to claim 1, wherein said organic molecular film comprises an anchor portion, an intermediate portion and a surface portion.
3. The structure according to any one of 3 . 5. The surface portion having a charge in the near neutral liquid is a group consisting of a positively charged polylysine, polyglutamine, polyasparagine , polyarginine , negatively charged polyglutamic acid and polyaspartic acid .
The structure according to any one of claims 1 to 4 , wherein the structure is constituted by at least one selected polypeptide . The surface portion 6. A having a charge in the liquid in the vicinity of the neutral, quaternary ammonium groups with a positive charge, a diazonium salt, a sulfonic acid group with a negative charge, a sulfinic acid group, a sulfenic acid group, carboxylic acid, according to claim 1 to claim 4 is formed using a polymer comprising one or more groups selected from the group consisting of phosphoric acid and phosphorous acid group
A structure according to any one of the preceding claims. 7. The polymer according to claim 1, wherein the polymer is polystyrene, polyacetylene, polyvinyl ester, polyvinyl alcohol,
Polyvinyl ether, polyethylene terephthalate, polyethylene glycol, poly p-phenylene ether,
Polyacetal, Porikaru Bo diisocyanate, polyethylene imine, polyamide, polyurethane, polyurea, polyimide, polyimidazole, polyoxazole, polypyrrole, polyaniline, polysulfide, polysulfone,
It is composed of one or more polymers selected from the group consisting of polyphosphoric acid, polyphosphate ester, polyphosphazene, polysiloxane and polysilane.
Structure according to claim 6, wherein that. 8. The liquid having no charge in the liquid near neutrality.
The surface portion is vinyl chloride-vinyl acetate copolymer, vinyl chloride-vinylidene chloride copolymer, ethylene-propylene copolymer, ethylene-vinyl acetate copolymer, acrylonitrile-styrene copolymer, styrene-butadiene copolymer A tetrafluoroethylene-hexafluoroethylene copolymer, acrylonitrile-butadiene-styrene copolymer, styrene-maleic anhydride copolymer and ethylene-vinyl alcohol copolymer selected from one or more polymers selected from the group consisting of Certain claims 1 to 7
A structure according to any one of the preceding claims. 9. The liquid having no charge in the liquid near neutrality.
The surface portion is polyglycine, polyphenylalanine,
Is selected from the group consisting of polyalanine, polyleucine, polyisoleucine, polyvaline, polyproline, polyserine, polythreonine and polytyrosine
The structure according to any one of claims 1 to 7 . 10. An electrostatic force acting between both surfaces of the organic molecular film.
Claim by force or electric double layer repulsion or steric repulsion in which small gap between the two surfaces is maintained 1 to claim 9
A structure according to any one of the preceding claims. Wherein said substrate is cylindrical, structure according to claims 1 to 10 any one is a disk-shaped or spherical. 12. The wear-resistant layer provided on the surface of the substrate, according to claim 1 wherein is to form an organic molecular film thereon
Item 12. The structure according to any one of items 11 . Wherein said providing a wear-resistant layer and the dielectric layer on the surface of the substrate, the structure according to any one claims 1 to 11 is intended to form an organic molecular film thereon. 14. abrasion layer is diamond-like carbon film, an ion implantation layer or a nitride film, according to claim 12 also barium dielectric titanate (BaTiO ₃₎ and barium strontium tantalate (BST)
The structure according to claim 13 . 15. An electrostatic repulsive force is generated between an organic molecular film having a charge and an electrode by placing an electrode on one of the substrates and applying an electric field. Item 14
A structure according to any one of the preceding claims. 16. An electrode is provided on one side of a base,
Claim is intended to apply a direct current and / or alternating current
16. The structure according to 15 . 17. The structure of claim 15, wherein an alternating current is applied to said electrodes and said electric field includes a frequency greater than about 5 times the frequency of said alternating current . 18. close to consist opposite slider and stator, an organic molecular film is formed by covalent bonds to all or part of one or both of its opposing surfaces, wherein
All or part of the organic molecular film is anionic and / or clickable.
Anionic and cationic organic components.
In the submembrane region, the surface of the organic molecular film is
Having an electric charge, the opposing two substrates
Small gaps between surfaces are filled with near neutral liquid
It shall be a motor. 19. A slider or a stator of a motor is arranged close to a minute interval, and an organic molecular film having a charge is repeatedly formed on at least one of the surfaces thereof in a pattern, and is formed on the other substrate. A motor wherein electrodes are formed in a repetitive pattern, and an alternating voltage is applied to the electrodes in the repetitive pattern to generate a propulsive force between the slider and the stator. 20. A slider or a stator of a motor is disposed in close proximity to a minute interval, and an organic molecular film having a charge is formed on at least one of the surfaces thereof , and the organic molecular film has a positive charge. And negative charges are alternately formed in a pattern that repeats alternately, electrodes are formed in a repetitive pattern on the other side, and alternating voltages having different phases are applied to the electrodes of the repetitive pattern to generate a propulsive force between the slider and the stator. Features motor. 21. claim 19 or claim micro gap is equal to or less than 100μm between minute gap or the one of the organic molecular film surface and the other substrate surface between the organic molecular film surface 20 Motor as described. 22. claim 19 or claim micro gap is equal to or less than 1μm between minute gap or the one of the organic molecular film surface and the other substrate surface between the organic molecular film surface 20 Motor as described. 23. The method of claim, wherein the slider and the stator of the motor is cylindrical 18 ~ claim 2
2. The motor according to any one of 2 . 24. One of two substrates arranged close to each other at a minute interval is a disk, and an organic molecular film having charges radially with a predetermined line width is repeatedly formed on the surface of the disk, and is formed on the other substrate. motor, characterized in that repeatedly forming the electrode radially at the predetermined line width, thereby generating a propulsion force an AC voltage to the electrodes of the repeated pattern to mark pressure into a disc. 25. The motor according to claim 24, wherein a magnetic recording medium is formed on the other surface of the disk. 26. One of two substrates disposed in close proximity to a minute interval is a disk, and an organic molecular film having an electric charge in an arc shape having a predetermined line width and a predetermined radius is formed on the surface of the disk. a motor electrodes on the other substrate having a predetermined line width and radius formed in the shape of a circular arc, a DC voltage was marked addition to the electrode, characterized in that to generate a centripetal force against the center of the disc. 27. The surface of two substrates arranged close to a minute interval is a spherical surface, and an organic molecular film having a predetermined line width and having a charge along the spherical surface is repeatedly formed on the inner spherical surface,
Motor, characterized in that the electrodes on the other spherical surface repeatedly formed along the spherical surface at the predetermined line width, thereby generating a propulsion force said electrode into an AC voltage of a repeating pattern to mark pressure into a disc. 28. The surface of two substrates arranged in close proximity to a minute space is a spherical surface, and an organic molecular film having a predetermined line width and having a charge in the latitude direction along the spherical surface is repeatedly formed on the inner spherical surface. and repeatedly formed in the latitudinal direction of the electrode on the other spherical surface along the spherical surface at the predetermined line width, and characterized by generating a propulsion force to the disk by marks pressurizing the AC voltage to the electrodes of the repeated pattern Motor to do. 29. The surfaces of two substrates disposed in close proximity to a minute space are spherical, and an organic molecular film having a predetermined line width and having a charge in the latitude direction along the spherical surface is repeatedly formed on the inner spherical surface. and the other electrode of the spherical surface along the spherical surface at the predetermined line width repeatedly formed in the latitudinal direction, Ri Contact is divided in the longitudinal direction, <br/> sign an AC voltage to the electrodes of the repeated pattern motor, characterized in that pressure to generate a driving force to the disc. 30. The surface of two substrates close to a minute interval is a spherical surface, and an organic molecular film having a predetermined line width and having a charge in the longitudinal direction along the spherical surface is repeatedly formed on the inner spherical surface. motor, characterized in that the electrodes on the spherical surface repeatedly formed in the longitudinal direction along the spherical surface at the predetermined line width, thereby generating a propulsion force an AC voltage to the electrodes of the repeated pattern to mark pressure into a disc. 31. An organic molecular film in which the surfaces of two substrates disposed close to a minute interval are spherical, and the surface of the inner spherical surface has a predetermined line width and has a charge in the longitudinal direction on the equator along the spherical surface. Are repeatedly formed, and the electrode is repeatedly formed on the other spherical surface in the longitude direction on the equator along the spherical surface with the predetermined line width,
Further, an organic molecular film having a charge in the latitude direction is repeatedly formed, and an electrode is repeatedly formed in the latitude direction along the spherical surface with the predetermined line width on the surface of the other sphere, and divided in the longitude direction.
Te Contact is, the motor, characterized in that to generate a propulsion force of the repeated electrode into an AC voltage of a pattern to mark pressurized <br/> in three-axis directions spherical. 32. A minute gap between the organic molecular film surfaces of two substrate surfaces disposed close to the minute gap or a minute gap between one organic molecular film surface of the two substrates and the other substrate surface. 32. The motor according to any one of claims 24 to 31 , wherein is less than 100 m. 33. A minute gap between the organic molecular film surfaces of two substrate surfaces arranged close to the minute gap or a minute gap between one organic molecular film surface of the two substrates and the other substrate surface. The motor according to any one of claims 24 to 31 , wherein is less than 1 µm. 34. A method for producing an organic ultra-thin film and a printing method, wherein the pattern of the organic molecular film formed on the substrate is formed on the surface of the substrate.
The motor according to any one of claims 19 to 33 , wherein the motor is formed by a combination of an inkjet method, an electron beam drawing method, or a photolithography method. 35. in which lubrication between the slider and the slider and the stator due to the elasticity of the organic molecular film formed on the stator both surfaces is secured claims 18 to claim
30. The motor according to any one of 30 . 36. A claim lubrication between the slider and repulsion by the slider and stator acting between the elastic and the organic molecular film of an organic molecular film formed on the stator both surface is intended to be secured 18 to claim 35 A motor according to any one of the preceding claims. 37. A rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) are arranged close to each other at a small interval, and a predetermined surface is provided on a surface of the first substrate adjacent to each other. A circular convex support having a predetermined radius and a predetermined line width is provided, an organic molecular film having a charge is formed on the surface of the support, and a predetermined line width is formed on the opposite surface of the second substrate. Forming a convex support at a position of a predetermined radius on the surface of the support, forming an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate on the surface of the support, An electrolyte liquid is applied to the substrate, and the convex support of the second substrate is immersed in the electrolyte liquid, and the electric double layer repulsion acting between the organic molecular film surfaces and the gravity of the first substrate are balanced. A bearing characterized by maintaining a small gap. 38. A rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) are arranged close to each other at a minute interval, and a predetermined surface is provided on an adjacent surface of the first substrate. A circular convex support having a predetermined radius and a predetermined line width is provided, an organic molecular film having a charge is formed on the surface of the support, and a predetermined line width is formed on the opposite surface of the second substrate. Forming a convex support at a position of a predetermined radius on the surface of the support, forming an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate on the surface of the support, An electrolyte liquid is applied to the substrate, the convex support of the second substrate is immersed in the electrolyte liquid, and the electric double layer repulsion acting between the surfaces of the organic molecular film and the meniscus attraction of the liquid formed between both surfaces are obtained. A bearing characterized by balancing and maintaining a small gap between both surfaces. 39. A rotatable disk-shaped substrate (first substrate) and a fixed substrate (second substrate) are arranged close to each other at a small interval, and a predetermined surface is provided on the mutually adjacent surfaces of the first substrate. A circular convex support having a predetermined radius and a predetermined line width is provided, an organic molecular film having a charge is formed on the surface of the support, and a predetermined line width is formed on the opposite surface of the second substrate. Forming a convex support at a position of a predetermined radius on the surface of the support, forming an organic molecular film having the same kind of charge as that of the organic molecular film on the first substrate on the surface of the support, An electrolyte liquid is applied to the substrate, and the convex support of the second substrate is immersed in the electrolyte liquid to maintain a small gap by electric double layer repulsion acting between the organic molecular film surfaces. An organic molecular film having a circular charge pattern with a predetermined line width is formed at a position of a predetermined radius, and a second substrate is formed. On the surface of the plate, electrodes are formed outside and inside so as to sandwich the charge pattern on the first substrate,
A bearing, wherein a centrifugal force is generated with respect to the center of the disk by applying a DC voltage between the electrodes. 40. A minute gap between the surfaces of the organic molecular films on the surfaces of the two substrates arranged in close proximity to each other or a minute gap between the surface of one organic molecular film of the two substrates and the surface of the other substrate. The bearing according to any one of claims 37 to 39 , wherein the gap is less than 100 µm. 41. A minute gap between the surfaces of the organic molecular films on the surfaces of the two substrates arranged in close proximity to each other or a minute gap between the surface of the organic molecular film of one of the two substrates and the surface of the other substrate. The bearing according to any one of claims 37 to 39 , wherein the gap is less than 1 µm. 42. A method of manufacturing an ultra-thin organic film, a method of printing, comprising:
The bearing according to any one of claims 37 to 41, which is formed by a combination of an inkjet method, an electron beam drawing method, or a photolithography method. 43. A linear convex support having a predetermined line width on a surface of the first substrate, wherein two substrates (a first substrate and a second substrate) are arranged close to each other at a minute interval. Provided, a linear organic molecular film having a charge on the surface of the support,
An electrode having a predetermined line width and an interval is linearly formed on the surface of the second substrate, an electrolyte liquid is applied to the surface of the first substrate, a DC voltage is applied to the electrode, and an external force is applied. A guide moving along the line. 44. A linear convex support having a predetermined line width on a surface of the first substrate, wherein two substrates (a first substrate and a second substrate) are arranged in close proximity to each other at a minute interval. And forming an organic molecular film having a charge on the surfaces of the first and second linear convex supports, and forming the third and fourth linear convex supports on the surface of the second substrate. Forming an organic molecular film having a charge on the surface of the third convex support, applying an electrolyte liquid to the surface of the first substrate, and applying an electric double layer repulsion acting between the organic molecular film surfaces. minute gap between both surfaces is maintained, and, an electrode having a predetermined line width and spacing to the fourth convex support is formed in a linear shape, a DC voltage was marked addition to the electrodes, an external force A guide that moves along said line. 45. A minute gap between the surfaces of the organic molecular films on the surfaces of the two substrates arranged in close proximity to each other or a minute gap between the surface of the organic molecular film of one of the two substrates and the surface of the other substrate. The guide according to claim 43 or claim 44, wherein the gap is less than 100 μm. 46. A minute gap between the surfaces of the organic molecular films on the surfaces of the two substrates arranged in close proximity to each other or a minute gap between the surface of the organic molecular film of one of the two substrates and the surface of the other substrate. The guide according to claim 43 or claim 44, wherein the gap is less than 1 μm. 47. A method for producing an organic ultra-thin film, a printing method, wherein a pattern of the organic molecular film formed on a substrate is formed on a substrate surface.
The guide according to any one of claims 43 to 46 , wherein the guide is formed by a combination of an inkjet method, an electron beam drawing method, or a photolithography method. 48. An actuator comprising a cylindrical structure, wherein a disk-shaped electrode is embedded in the cylindrical structure at a predetermined interval in parallel with a bottom surface of the cylinder. Narrow tubes penetrate the many pores that penetrate,
A liquid exists between the pores and the capillary, and a strip-like pattern of an organic molecular film having a positive charge and a belt-like pattern of an organic molecular film having a negative charge are alternately arranged on the surface of the capillary. The interval between the strips is the same as the interval between the disc-shaped electrodes, and the disc-shaped electrode has a structure to which an AC voltage can be applied. An actuator, wherein a distance between an inner wall of a pore and an inner wall is maintained at a minute distance. 49. The diameter of the through hole is 1 mm to 100 m
49. The actuator of claim 48, wherein m. 50. A claim 48 or claim 49 actuator, wherein said small distance is less than 100 [mu] m. 51. Claim 48 or claim 49 actuator, wherein said small distance is less than 1 [mu] m. 52. An actuator having a structure in which two types of films that move relative to each other by applying a voltage are alternately laminated, and a pair of comb electrodes is provided on one surface of the first film. The rectangular region of the organic molecular film having a positive charge and the rectangular region of the organic molecular film having a negative charge are alternately arranged on one side of the second film, and the width of the adjacent rectangular region is A large number of the films are stacked so as to match the width of the comb-shaped electrode, and the surface of the comb-shaped electrode and the surface of the organic molecular film face each other while being maintained at a minute interval, and the space between the films is filled with liquid. Wherein the pair of comb-shaped electrodes has a structure to which an AC voltage can be applied. 53. The actuator according to claim 52, wherein the minute interval is less than 100 μm. 54. The actuator according to claim 52, wherein the minute interval is less than 1 μm. 55. A micropump including the structure according to any one of claims 1 to 17 . 56. The micro pump according to claim 55 , wherein the pump has a structure in which an outer cylinder surrounds an inner cylinder with a liquid therebetween, and a part of the outer cylinder includes a pump operating part. pump. 57. The pump according to claim 55 , wherein the structure of the pump is a cylinder, an organic molecular film is formed on a part of the cylinder, and the pump operation is performed by peristaltic motion of the organic molecular film. 57. The micropump of claim 56 . 58. A vibration isolation table including the structure according to any one of claims 1 to 17 . 59. An organic molecular film having the same kind of electric charge is formed on both surfaces of two flat plates opposed to each other in close proximity to each other. The organic molecular film vibrates, which induces the stretching motion of the organic molecular film on the other flat plate, and as a result, the vibration is converted into the energy of the vibration of the organic molecular film, thereby removing the vibration. The anti-vibration table according to claim 58 . 60. A micro nozzle comprising the structure according to any one of claims 1 to 17 . 61. Two conical surfaces forming a nozzle core portion and a nozzle outlet portion and two organic molecular films formed so as to face each other, wherein the organic molecular films are covalently bonded to each conical surface. It consists of an anchor part, an intermediate part that acts as a mechanical elastic body, and a surface part that has a charge.A nozzle outlet conical surface is provided opposite to the nozzle core conical surface, and a medium for injection 61. The micronozzle according to claim 60 , wherein the micronozzle is filled with a fluid. 62. An organic molecular film comprising two substrates which are closely adjacent to each other, and an organic molecular film is formed on one of the opposite surfaces.
A structure in which charge generation means is provided on the other substrate, and a gap between the surface of the organic molecular film and the surface of the other substrate is less than 100 μm. 63. An organic molecular film is formed on one of the opposing surfaces, comprising two substrates that are closely adjacent to each other,
A structure in which a charge generating means is provided on the other substrate, and a gap between the surface of the organic molecular film and the surface of the other substrate is less than 1 μm. 64. The electric charge generator means is a means for applying an electric field to the dielectric claim 62 or claim 63 structure according. 65. The electric charge generator means is by electrodes claim 62 or claim 63 structure according. 66. The structure according to claim 62 or 63, wherein the charge generation means is thermal polarization by laser irradiation.