JP3326751B2 - Test head moving method and apparatus, and probe apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test head moving method and apparatus, and a probe apparatus.

[0002]

2. Description of the Related Art As shown in FIG. 5, a conventional probe device A has a test head D electrically connected to a probing card C mounted on a device body B, and rotatably supports the test head D. And a rotation drive mechanism F for rotating the connection terminal of the test head D through the support E in a direction to contact or separate from the connection terminal of the probing card C. The test head D is electrically connected to the probing card C by using the mechanism F so as to perform an electrical inspection of an object to be inspected, for example, a semiconductor wafer W.

That is, a head plate (not shown) forming the top surface is attached to the probe device main body via, for example, a hinge, and this head plate can be opened to the rear side of the device main body. An opening is formed substantially at the center of the head plate, and an insert ring (not shown) is attached to the opening, and a probing card C is detachably attached to the insert ring via a card holder. ing. Further, a test head D electrically connected to the probing card C is provided above the probing card C. The test head D is attached to one side surface of the apparatus main body B via, for example, a rotating shaft G, and is used to replace the probing card C or to inspect the inside of the apparatus main body. As shown in the figure, the test head D is rotated to one side and retracted to a position where it does not interfere with the head plate when it is opened.

Further, the test head D and the probing card C can be electrically connected to each other via a performance board H, a connection ring I and the like. Inside the test head D, pin electronics (not shown) including a sample power supply for applying a voltage to an IC chip formed on a semiconductor wafer and an input unit for taking an output from the IC chip into a measuring unit. The pin electronics are electrically connected to a plurality of electronic component circuits mounted on the performance board H. The connection terminals of these electronic component circuits are concentrically arranged on the lower surface of the performance board H, and are pressed against the pogo pins (not shown) arranged on the upper surface of the connection ring I to connect the probing card C to the probing card C. It is electrically conductive.

[0005]

However, in the case of the conventional probe device A, the test head D is rotated to the probing card C side as described above, and the connection terminal on the test head D side is connected to the probing card C side. The test head D and the probing card C are electrically connected to each other by pressure contact with the pogo pins arranged concentrically. However, when the test head D is rotated and the connection terminals on the test head D are pressed against all the pogo pins on the probing card C, the connection terminals on the test head D are not pressed against all the pogo pins at the same time. First, since the connection terminal on the short turning radius presses against the corresponding pogo pin, and then successively presses on the pogo pin with the long turning radius, the pogo pin on the short turning radius has a more oblique force, i.e., in the direction of bending the pogo pin. Pogo pins are easily damaged by the force, and as a result, there has been a problem that the operator must constantly monitor the degree of damage of the pogo pins and perform maintenance such as replacing the pogo pins as necessary.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. For example, a pogo pin capable of uniformly applying or releasing a force at the time of contact or separation between a pogo pin and a probe card and achieving conduction with a probing card is provided. It is an object of the present invention to provide a method and apparatus for moving a test head, and a probe apparatus, which can prevent damage to the connection terminals, improve the maintainability, and thereby improve the operation rate of the inspection apparatus.

[0007]

According to a first aspect of the present invention, there is provided a method of moving a test head, the method comprising the steps of: providing electrical connection between a test head and a probing card of a probe device; In the method of moving the probe head, when the test head is brought into conduction with the probing card , one side of the probe device body is
Place the test head above the probe around the axis of rotation along the surface.
From the outside of the probe device body to above the probe device body.
After turning over and facing the probing card in parallel, the test head is lowered to bring the connection terminal on the test head side into contact with the connection terminal on the probing card side, and the test head and the probing card when releasing the conduction of, the test head was raised once <br/> from the probe card side to the upper side of the probe device body, the test head about said rotation axis from the upper side of the probe device body Above probe device
It is to be turned reversibly to the outside of the main body .

According to a second aspect of the present invention, there is provided an apparatus for moving a test head for electrically connecting or disconnecting a test head and a probing card of a probe device. In the above, the test head is placed on one side of the probe device main body.
A support for rotatably supporting the rotation axis along the axis, and a connection terminal on the test head side to be moved in a direction in which the connection terminal on the test head side comes into contact with or apart from the connection terminal on the probing card side via the support. The above test head
The outside of the probe device body and the probe device body
A rotation driving mechanism for reversibly rotating the test head through the rotation shaft between the upper and lower sides of the probing card, and moving the test head up and down on the probing card via the rotation driving mechanism. it is obtained by a lifting drive mechanism for.

[0009] The probe apparatus of claim 3 of the present invention, the electrically conductive manner test head and probing card of the probe system, the flop the test head
A support that rotatably supports a rotation axis along one side surface of the lobe device main body, and separates or separates the connection terminal on the test head side and the connection terminal on the probing card side via the support. Move in the direction
The test head outside the probe device body
And the upper part of the probe device main body via the rotation shaft.
A rotation driving mechanism for reversible normally and reversely rotate, the rotating
Bei an elevating drive mechanism for elevating the test head in the upper side of the probing card via a rotation drive mechanism
It is a thing.

According to a fourth aspect of the present invention, there is provided a probe device according to the third aspect, wherein the rotation drive mechanism includes a motor and a transmission mechanism for transmitting rotation of the motor. It is.

According to a fifth aspect of the present invention, in the probe device according to the third or fourth aspect, the lifting drive mechanism includes a motor and a transmission mechanism for transmitting rotation of the motor. And a conversion mechanism for converting the rotational movement of the transmission mechanism into a vertical movement.

[0012]

According to the first and second aspects of the present invention, when the test head is brought into conduction with the probing card, the rotary drive mechanism is driven to drive the test head.
Probe device centering on the rotation axis along one side of the probe device body
Rotates to the position of the probe device body upward parallel to the body outside of the test head retracted position or Lapu roving card. After that, the elevating drive mechanism drives to rotate the rotation drive mechanism.
The test head is lowered via the test head, and the connection terminals on the test head side are pressed against the connection terminals on the probing card side, for example, all pogo pins. At this time, all the connection terminals on the test head side are lowered from the vertical direction and pressed simultaneously with all the pogo pins on the corresponding probing card side, so that
An equal force can be applied to all pogo pins. Conversely, when the conduction between the test head and the probing card is released, the lifting drive mechanism is driven to raise the test head once, and the connection terminals on the test head side rise vertically upward from the pogo pins on the probing card side. Separate and push
To reach the upper side of the lobe apparatus main body. After that, the rotation drive mechanism is driven and the test head is moved around the rotation axis to the probe device.
It can be turned over from the top of the main body to the outside of the probe
Turn over. At this time, since the connection terminals on the test head move vertically upward from the pogo pins on the probing card and are simultaneously separated from all the pogo pins on the probing card, release the pressing force without applying bending stress to the pogo pins. Can be.

According to the third aspect of the present invention,
In performing the inspection of the inspection object using the probe device,
When the test head of the probe device is brought into conduction with the probing card, the rotation drive mechanism drives and the test head
Probing around the rotation axis along one side of the probe device body
Rotates to the probe apparatus main body above the position parallel to the blanking apparatus main body outside of the test head retracted position or Lapu Robi <br/> ring card. Then, the lifting drive mechanism is driven to rotate
The test head is lowered via the mechanism, and the connection terminals on the test head side are pressed against the connection terminals on the probing card side, for example, all pogo pins. At this time, all the connection terminals on the test head side are lowered from the vertical direction and are simultaneously pressed against all the corresponding pogo pins on the probing card side, so that an even force can be applied to all the pogo pins. Conversely, at the end of the inspection of the device under test, when the conduction between the test head and the probing card is released, the lifting / lowering drive mechanism is driven to raise the test head once, and the connection terminal on the test head side becomes the probing card side. Rise vertically upward and away from the pogo pin of
To reach upward. Then, the rotation drive mechanism is driven to rotate
Probe device body from above the probe device body
Rotates reversibly to the outside of . At this time, since the connection terminals on the test head move vertically upward from the pogo pins on the probing card and are simultaneously separated from all the pogo pins on the probing card, release the pressing force without applying bending stress to the pogo pins. Can be.

According to a fourth aspect of the present invention, in the third aspect of the invention, the rotation drive mechanism includes a motor and a transmission mechanism for transmitting rotation of the motor. Therefore, when the motor of the rotation drive mechanism is driven to rotate, this rotation is transmitted to the support via the transmission mechanism, whereby the test head can be rotated.

According to a fifth aspect of the present invention, in the third or fourth aspect, the lifting drive mechanism includes a motor and a transmission mechanism for transmitting rotation of the motor. A conversion mechanism for converting the rotational movement of the transmission mechanism into a vertical movement. When the motor of the lifting drive mechanism is driven to rotate, the rotational movement is transmitted to the conversion mechanism via the transmission mechanism, and then the conversion mechanism is rotated. Then, when the rotational motion is converted up and down, the test head is moved up and down.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in FIGS. Before describing the test head moving method of the present invention, first, a test head moving device of the present embodiment and a probe device using the same will be described. As shown in FIG. 1, the probe device 1 of the present embodiment includes a probing card 3 mounted on a central opening of a head plate 2A forming a top surface of an apparatus main body 2, and a contact terminal 3A of the probing card 3. Test head having connection terminals (not shown) that are electrically conductive (indicated by a two-dot chain line)
4, a movable support 5 rotatably supporting the test head 4 to the left, and a rotational drive for rotating the test head 4 through the movable support 5 in a direction to contact with or away from the probing card 3. A mechanism 6 is provided. Further, the probe device 1 is provided with an elevating drive mechanism 7 (see FIGS. 2 and 3) for integrally moving the test head 4 together with the movable support 5 and the rotary drive mechanism 6.

The movable support 5, the rotary drive mechanism 6, and the elevation drive mechanism 7 are configured as a test head moving device 8 for moving the test head 4 with respect to the probing card 3, and the test head moving device 8 is used. Is used when the test head moving method of the present invention is performed. As shown in FIG. 1, the test head moving device 8 is disposed adjacent to the front left side of the apparatus main body 2 and is configured to be separable from the apparatus main body 2 as described later.
That is, a fixed frame 9 is disposed below the movable support 5, and the movable support 5 is supported by the fixed frame 9.
These supports 5 and 9 are formed as rectangular frames as a whole. A plurality of wheels 10 are attached to the lower peripheral edge of the fixed frame 9, and the test head moving device 8 can be moved separately from the device main body 2 by these wheels 10.

The movable support 5 is, for example, shown in FIGS.
(A), a pair of arms 5A connected to the housing 4A of the test head 4, and a hollow arm to which these arms 5A are attached and arranged along the entire side surface of the apparatus body 2. It includes a rotating shaft 5B, a pair of pillow-type bearings 5C rotatably supporting the rotating shaft 5B at both ends, and a frame 5D to which these bearings 5C are fixed on the upper surface. As described above, the frame 5C and the fixed frame 9 are formed as rectangular frames as a whole, and are formed to have a size that can be accommodated in the side surface of the apparatus main body 2 as shown in FIG.
The movable support 5 can be raised and lowered above the fixed frame 9 by a lifting drive mechanism 7. A fixing leg 11 is attached to the lower surface of the fixed frame 9.
1, the moving device 8 of the test head is fixed.

The rear end of the movable support 5 (FIG. 2A)
(A left end) is provided with a rotary drive mechanism 6, which can be moved up and down together with the movable support 5 as described later. As shown in FIG. 2A, for example, the rotary drive mechanism 6 includes a gear motor 6A with a brake disposed forward, a gear 6B fixed to a rotating shaft of the motor 6A, and a mesh with the gear 6B. And a gear 6C fixed to the rear end of the rotating shaft 5B. The rotary drive mechanism 6 drives a gear 6B by driving a motor 6A.
The rotating shaft 5B is rotated via 6C, so that the test head 4 is rotated. The rotation drive mechanism 6 is, for example, a test head 4 having a maximum weight of 260 kg.
3 is moved from the position of the arm 5A indicated by a solid line in FIG. 3 to the position of the arm 5A indicated by a two-dot chain line rotated 90 ° or 180 ° clockwise. is there. The rotation drive mechanism 6 enables the test head 4 to rotate, for example, at 90 ° for 11 seconds and at 180 ° for 22 seconds. Of course, the rotation range and the rotation speed by the rotation drive mechanism 6 are not limited to the above numerical values.

A rotating shaft 5 is provided at the rear end of the upper surface of the frame 5D.
An air cylinder 12 for positioning the test head 4 located on the upper left end of B is provided, and a plurality of, for example, three, cylinder rods 12A of the air cylinder 12 are fitted into a gear 6C fixed to the rotating shaft 5B. Hole 6D is circumferential 90
° formed at intervals. Therefore, the cylinder rod 12
A moves toward the gear 6C by driving the air cylinder 12 and fits into the hole 6D of the gear 6C to position the test head 4, and retreats from the gear 6C to escape from the hole 6D to open the gear 6C. Thus, the test head 4 can be rotated. For example, when the test head 4 is parallel to the apparatus main body 2, the cylinder rod 12A of the air cylinder 12 is fitted into the hole 6D of the gear 6C to position the test head 4 in a horizontal state, and the test head 4 is moved to the apparatus main body. When the cylinder rod 12A is rotated away from the cylinder rod 12, the cylinder rod 12A is retracted. The air cylinder 12 is horizontally supported by a support member 13 attached to the rear end of the frame 5D.

A lifting drive mechanism 7 is provided on the fixed frame 9. The lifting drive mechanism 7 includes, for example, a gear motor 7A with a brake disposed downward, a gear 7B fixed to a rotating shaft of the motor 7A, and a gear 7B
And a ball screw 7D having the lower end of the gear 7C, a bearing 7E rotatably supporting the ball screw 7D, and a ball screw 7D above the bearing 7E.
And a nut 7F to be screwed together. The nut 7F is bolted to the lower surface of the intermediate frame of the frame 5D of the movable support 5 via a cylindrical frame 7G, and the movable support 5 is moved up and down by the rotation of the ball screw 7D. is there. The ball screw 7D, the nut F, and the frame 7G are configured as a conversion mechanism that converts the rotational motion of the gear trains 7B, 7C into a vertical motion. This lifting drive mechanism 7
For example, the test head 4 can be raised or lowered to a height of 120 mm at a rising thrust of 800 kg and a speed of 5 mm / sec from a state where the test head 4 and the probing card 3 are electrically connected. Of course, the lifting range and the lifting speed by the lifting drive mechanism 7 are not limited to the above values.

Also, before and after the motor 7A and the ball screw 7D (right and left in FIG. 2A), FIG.
As shown in the figure, a pair of guide rails 7H are arranged in the vertical direction, and an engaging member 7I is engaged with these guide rails 7H. The guide rail 7H is vertically fixed to the vertical column 9A of the fixed frame 9, and the engagement member 7I
Is fixed to the frame 5D of the movable support 5. Thereby, when the rotation drive mechanism 7 transmits the rotational motion to the ball screw 7D via the gear trains 7B and 7C by the drive of the motor 7A, the ball screw 7D converts the rotational motion into a vertical motion via the nut 7F and is movable. The body 5 is moved up and down integrally with the rotation drive mechanism 6 above the fixed frame 9. Therefore, the guide rail 7H and the engaging member 7I
Is configured as a guide mechanism when the movable support 5 moves up and down while maintaining the horizontal state.

Next, an embodiment of the test head moving method of the present invention in which the test head is moved by using the probe device will be described. First, a case where the conduction state between the probing card 3 and the test head 4 is released will be described. To release the conduction state, first, the elevation drive mechanism 7 is driven to raise the test head 4 once from the probe card 3 side, and lift the test head 4 above the probing card 3. In this case, when the motor 7A of the lifting drive mechanism 7 starts, the ball screw 7D rotates via the gear trains 7B and 7C. As a result, the movable support 5 moves up with the test head 46 via the nut 7F screwed to the ball screw 7D. When the test head 4 reaches a predetermined height, the motor 7A stops. In these operations, when the test head 4 separates from the probing card 3 side, the connection terminals of the test head 4 move vertically upward from the pogo pins (not shown) on the probing card 3 side and simultaneously separate from all the pogo pins. The test head 4 can be separated smoothly without applying excessive force to the pogo pins.

Thereafter, the positioning air cylinder 12 is driven, and the cylinder rod 12A comes out of the hole 6D of the gear 6C of the rotary drive mechanism 6 to make the gear 6C rotatable. After that, the motor 6A of the rotary drive mechanism 6 starts.
As a result, the rotating shaft 5B of the movable support 5 rotates via the gear trains 6B and 6C, and the test head 4 connected to the arm 5A further rotates in a direction away from the probing card 3. And, for example, when the test head 4 is 90 °,
Alternatively, the rotation drive mechanism 6 stops at the time when the test head 4 is rotated by 180 °, and stops when the test head 4 is vertically or 180 ° inverted. Also at this time, the air cylinder 12 is driven to insert the cylinder rod 12A into the hole 6D of the gear 6C. As a result, the test head 4 is retracted from above the apparatus main body 2, so that the probing card 3 can be replaced,
When inspecting the inside of the apparatus main body 2, the head plate 2A
Can be freely opened.

Next, after replacement of the probing card or maintenance of the apparatus main body 2 is completed, the test head 4 is electrically connected to the probing card 3. In this case, first, the air cylinder 12 is driven to release the gear 6C, and then the motor 6A of the rotary drive mechanism 6 starts in the opposite direction to the above case. As a result, the movable support 5 can be moved through the gear trains 6B and 6C.
Is rotated, and the test head 4 connected to the arm 5A is rotationally moved from the reversing position or the vertical position toward the probing card 3. And
When the test head 4 rotates by 180 ° or 90 ° and faces in parallel above the apparatus main body 2, the rotation drive mechanism 6 stops, and the air cylinder 12 drives to move the cylinder rod 12 </ b> A to the gear of the rotation drive mechanism 6. The test head 4 is inserted into the hole 6 </ b> D of 7 </ b> C, and the test head 4 is held in a state of facing the apparatus main body 2 in parallel.

Thereafter, the motor 7A of the lifting drive mechanism 7 is driven in the opposite direction to that described above, and the ball screw 7D is rotated via the gear trains 7B and 7C. Thereby, the ball screw 7
The movable support 5 that supports the test head 4 via the nut 7F screwed to D moves down together with the rotary drive mechanism 6. Then, when the connection terminal on the test head 4 side is pressed against the pogo pin on the probing card 3 and the test head 4 and the probing card 3 are brought into conduction, the motor 7A stops. In these operations, when the test head 4 approaches the probing card 3 and the connection terminal presses against the pogo pin, the connection terminal on the test head 4 moves vertically downward toward the pogo pin on the probing card 3. Since each connection terminal is pressed against the corresponding pogo pin at the same time, there is no fear that an excessive force in the oblique direction is applied to the pogo pin, and each connection terminal can be pressed against each pogo pin smoothly. .

As described above, according to the present embodiment, when the test head 4 is connected to the probing card 3 side, the rotational drive mechanism 6 is driven to move the test head 4 away from the retracted position from the apparatus main body 2. After the test head 4 is once rotated in parallel with the probing card 3, the elevation drive mechanism 7 is driven to lower the test head 4 while keeping the test head 4 parallel to the probing card 3. Since all the connection terminals on the head 4 side are pressed against all the pogo pins on the probing card 3 at the same time, an excessive force in the oblique direction does not act on each of the pogo pins. Pogo pins can be prevented from being damaged by applying uneven pressing force, and maintainers such as partially replacing pogo pins can be prevented. It is not necessary to scan, reduces maintenance, have been able to improve the operating efficiency of the inspection apparatus. When the probing card 3 is replaced or the inside of the apparatus main body 2 is inspected, if the test head 4 needs to be turned over from the apparatus main body 2 and retracted, the test head 4 is moved by the elevation drive mechanism 7. After being lifted once from the apparatus main body 2, the test head 4 is turned over by the rotation drive mechanism 6.
Since the connection terminal on the side is simultaneously separated from the pogo pin, it is possible to prevent the pogo pin from being damaged for the above-described reason.

Further, according to the present embodiment, the rotary drive mechanism 6
Has a motor 6A and gear trains 6B and 6C for transmitting the rotational force of the motor 6A, so that the test head 4 can be rotationally moved to an arbitrary angular position at a constant speed. Further, the lifting drive mechanism 7 includes a motor 7A, gear trains 7B and 7C for transmitting the rotational force of the motor 7A, ball screws 7D and nuts 7F for converting the rotational force from the gear trains 7B and 7C into a vertical motion. Therefore, the elevation distance of the test head 4 can be accurately controlled, and the test head 4 can be raised to an arbitrary position, so that the internal inspection can be performed without rotating the test head and retreating from the apparatus main body.

It should be noted that the present invention is not limited to the above-described embodiment, and is included in the present invention unless it is contrary to the gist of the present invention. That is, when the test head is brought into conduction with the probing card, the test head is rotated and moved by the rotation drive mechanism so as to face the probing card in parallel, and then the test head is lowered by the elevation drive mechanism to probe the connection terminals of the test head. When the test head is brought into contact with the card side and the conduction between the test head and the probing card is released, the test head is once raised from the probe card side by the lifting drive mechanism, and then the test head is moved away from the probing card by the rotary drive mechanism. In the case of a test head moving method, a test head moving device, and a probe device that are rotated and moved in the directions, such a test head moving method, a test head moving device, and a probe device are included in the present invention. You.

[0030]

According to the first and second aspects of the present invention, when the test head is electrically connected to the probing card, the test head is rotated by using the rotary drive mechanism.
Probing around the rotation axis along one side of the probe device body
From the outside of the probe unit to the position above the probe unit.
After turning the test head in parallel with the probing card, the test head is lowered using the lifting / lowering drive mechanism to bring the connection terminal on the test head into contact with the connection terminal on the probing card. when releasing the conduction of, after a test head with a lifting drive mechanism is once raised from the probe card side, probe about an axis of rotation of the test head with a rotary drive mechanism
Reversible outside the probe unit from above the probe unit
Function, so that the force when the pogo pin and the probe card come into contact with or separate from the probe card can be uniformly applied or released, preventing damage to the connection terminals such as the pogo pin that establishes conduction with the probing card, can improve the maintainability, have made improved operating rate of the inspection apparatus, and the maintenance of the probe device body Te
Storing head on probe body without manual operation
For safe and secure evacuation from outside
It is possible to provide a mobile device in a mobile way, and the test head of the test head that can be performed easily work.

According to the third aspect of the present invention,
When the test head is connected to the probing card, the test head is connected to the probe device using a rotary drive mechanism.
Outside the probe unit centering on the rotation axis along one side of the main unit
After the side to the position of the probe device body upward by rotating by faces parallel to the probing card, it lowers the test head with the lifting drive mechanism contacting the connection terminals of the test head side connection terminals of the probing card side When the test head and the probing card are disconnected from each other, the test head is first lifted from the probe card side using the lifting drive mechanism, and then the test head is rotated around the rotation axis using the rotation drive mechanism. Of the probe unit
From above to the reversible position outside the probe unit
Rotation enables uniform application or release of force when contacting or separating the pogo pin from the probe card, preventing damage to the connection terminals such as the pogo pin that establishes conduction with the probing card and improving maintainability. And increase the operating rate of the inspection equipment , and
When performing maintenance inside the lobe unit,
Outside from the probe unit body without manual operation
Evacuate safely and reliably to maintenance work easily
It can be to provide a can be Ru probe apparatus for performing.

According to a fourth aspect of the present invention, in the third aspect of the invention, the rotation drive mechanism includes a motor and a transmission mechanism for transmitting the rotation of the motor. Therefore, it is possible to provide a probe device that can rotate and move the test head 4 to an arbitrary angular position at a constant speed and stop the test head at an arbitrary position.

According to the fifth aspect of the present invention, in the third or fourth aspect,
Since the lifting drive mechanism includes a motor, a transmission mechanism for transmitting the rotation of the motor, and a conversion mechanism for converting the rotational movement of the transmission mechanism into a vertical movement, the vertical movement distance of the test head 4 can be accurately determined. It is possible to provide a probe device which can be controlled and raised to an arbitrary position, thereby performing an internal inspection without rotating the test head and retreating from the device main body.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of a probe device of the present invention.

2 (a) is a front view of the moving device of the test head of the probe device shown in FIG. 1 as viewed from the left side, and FIG. 2 (b) is a cross-sectional view as viewed from the BB direction of FIG. .

3 is a front view of a test head moving device of the probe device shown in FIG. 2 as viewed from the rear.

FIG. 4 is a plan view of a test head moving device of the probe device shown in FIG. 2;

FIG. 5 is a front view showing an example of a conventional probe device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 probe device 2 device main body 3 probing card 4 test head 5 movable support (support) 6 rotation drive mechanism 6A motor 6B gear (transmission mechanism) 6C gear (transmission mechanism) 7 elevating drive mechanism 7A motor 7B gear (transmission mechanism) 7C Gear (transmission mechanism) 7D Ball screw (conversion mechanism) 7F Nut (conversion mechanism) 8 Test head moving device

────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-8-148534 (JP, A) JP-A-7-147305 (JP, A) JP-A-5-175290 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) H01L 21/66 G01R 1/06 G01R 31/26

Claims (5)

(57) [Claims] 1. A method for moving a test head to electrically connect or disconnect a test head and a probing card of a probe device, the method comprising:
When the test head is brought into conduction with the probing card, a rotating shaft along one side of the probe device body
With the test head out of the probe device body
After rotating from above to the upper side of the probe device main body so as to face the probing card in parallel, the test head is lowered to bring the connection terminal on the test head side into contact with the connection terminal on the probing card side, and When the conduction between the test head and the probing card is released, the test head is connected to the probe card.
From the side to the top of the probe device main body, and then move the test head around the rotation axis to the probe head.
From above the probe device body to the outside of the probe device body.
A test head moving method, characterized in that the test head is rotatably rotated . 2. An apparatus for moving said test head for electrically connecting or disconnecting a test head and a probing card of a probe device, comprising:
Place the test head along one side of the probe
A support that rotatably supports the rotation axis, and a connection terminal on the test head side that moves through the support in a direction to contact or separate from the connection terminal on the probing card side . Above test head
Outside of the probe unit and above the probe unit
And a rotation drive mechanism for reversibly rotating the test head through the rotation shaft , and raising and lowering the test head above the probing card via the rotation drive mechanism. moving device of the test head, characterized in that a lifting drive mechanism for. 3. A test head electrically connectable to a probing card of a probe device, and the test head is
A support rotatably supporting a rotation axis along one side surface of the probe device main body, and a connection terminal on the test head side and a connection terminal on the probing card side via the support. Move in the direction of contact or separation
The test head to the probe device main body.
Rotation between the outside of the probe device and above the probe device body
A rotation drive mechanism for reversibly rotating forward and backward through a shaft ,
An elevating drive mechanism that raises and lowers the test head above the probing card via the rotary drive mechanism
Probe apparatus comprising the and. 4. The probe device according to claim 3, wherein the rotation drive mechanism includes a motor and a transmission mechanism for transmitting rotation of the motor. 5. The lifting drive mechanism according to claim 1, further comprising a motor, a transmission mechanism for transmitting the rotation of the motor, and a conversion mechanism for converting a rotational motion of the transmission mechanism into a vertical motion. The probe device according to claim 3 or 4.