JP3316320B2 - Room temperature bonding equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room-temperature bonding apparatus applied to precise and high-precision bonding such as assembly of sensor parts and micromachines.

[0002]

2. Description of the Related Art Conventionally, TIG welding,
MIG welding and recently laser welding and the like are used.

[0003] On the other hand, in recent years, studies on vacuum brazing and diffusion bonding techniques as a method for bonding ceramics, composite materials, or dissimilar metal materials have become active, and some of them have been put into practical use.

[0004]

However, the above-mentioned conventional methods are all joining methods utilizing heat at a high temperature, and the object to be joined is heated to a high temperature of 1/2 or more of the melting point. You.

[0005] Therefore, there is a problem that it cannot be applied to the joining of products that require high precision and high precision in which the temperature rise and deformation of the article to be joined are not allowed, such as assembling of sensor parts and micromachines.

An object of the present invention is to provide a new room temperature bonding apparatus which solves the above problems.

[0007]

As a configuration for achieving the above object, a room temperature bonding apparatus of the present invention is a room temperature bonding apparatus for bonding metal or non-metal materials at room temperature in a vacuum vessel. A mechanism that supports both ends of the holder holding the workpiece and rotates it about the horizontal axis, a mechanism in which the above mechanisms are arranged vertically and in parallel, and a mutual interval is held by a compression spring, and furthermore, these mechanisms are arranged in the vertical direction. A flexible shaft for transmitting rotational power independently to each of the rotating mechanisms; a driving mechanism for simultaneously rotating the flexible shaft in the form of a plurality of gears by an electric motor; A photoelectric switch for detecting the position when rotating and positioning the surface from the horizontal direction to the vertical direction, and a hydraulic system that presses and presses the objects to be welded in the vertical direction during joining A press mechanism, further characterized by comprising by irradiating argon ion beam on the bonding surface of the article to be welded, and an ion gun arranged horizontally to cleaning treatment.

[0008]

When joining metal or non-metal materials with the room temperature bonding apparatus of the present invention configured as described above, they are remotely controlled at room temperature (room temperature) in a vacuum vessel.

The cleaning of the bonding surface necessary for directly bonding the objects to be bonded at room temperature is performed by irradiation with an argon ion beam.

[0010] For this reason, the degree of vacuum of 10 ^-4 in the vacuum vessel is determined with respect to the bonding surface of the workpiece which has been polished in the atmosphere in advance.
Irradiation with an argon ion beam for 30 to 300 seconds in an atmosphere of -10 ^-6 Torr removes impure atoms on the surface by bombardment of argon ions, thereby cleaning the surface and enabling direct bonding at room temperature.

After the object is irradiated with an argon ion beam from a horizontal direction in a horizontal posture, the object is immediately brought into a vertical posture.
The objects are pressed against each other by a press from the vertical direction.

The rotation of the object is transmitted through a flexible shaft which can be rotated and transmitted in a bent or eccentric state.

[0013] From the drive unit by the electric motor fixed by using a flexible shaft for the rotation transmission to the workpiece, from the drive unit to the rotation mechanism unit that changes the attitude from horizontal to vertical during the irradiation of the ion beam and the press bonding by the press The transmission and the change in the amount of eccentricity with the rotation mechanism caused by the vertical sliding can be absorbed and connected.

By employing the above mechanism, the size of the apparatus can be reduced and the mechanism can be simplified.

Further, the entire apparatus can be installed in a vacuum vessel having a press mechanism, which facilitates connection with the outside of the vessel and enables remote control.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a front view of a room temperature bonding apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of the apparatus, and FIG.
FIG. 4 is a sectional view taken along line BB in FIG. 1.

In these figures, a pair of articles 1 to be joined are held and held by a ball plunger 28 in a holder A2 and a holder B16 which are vertically opposed to each other in a vacuum vessel. And the holder A
The two ends of the holder 2 and the holder B16 are rotatably supported by bearings 3 built into the bearing case 4 at both ends.

At this time, the holder A2 and the holder B16
2 has a fitting structure so as to be detachable from the bearing 3 as shown in FIG. 2, and is held down by a ball plunger 28 shown in FIG.

The bearing case 4 is arranged via guide rails 5 arranged in parallel so that each can slide in the vertical direction.
It is attached to a pair of opposed brackets 7 fixed on the base A6.

In the bearing case 4, in the initial state, the distance between the workpieces 1 is equal to the distance between the holder A2 and the holder B16.
A compression spring A13 and a compression spring B14 having a force equal to or higher than their own gravity are provided between them so as to provide a gap that does not interfere even when the bearing 3 rotates about the bearing 3 as an axis.

The electric motor 8 is mounted on the same base A6.
And a drive mechanism including a gear A9, a gear B10, and a gear C31 which are meshed and arranged to transmit rotational power.

Further, the bearing 3 on the holder A2 side and the gear B
10, the bearing 3 on the holder B16 side and the gear C31 are connected by an eccentric and bendable flexible shaft 11, respectively.

When the electric motor 8 is driven, the gear A
Rotationally transmitted to the upper and lower bearings 3 via the gear 9, the gear B10, the gear C31, and the respective flexible shafts 11, and simultaneously independently rotate in opposite directions.

The above mechanism is mounted on a base B21, and the holder C19 is mounted on the same base B21 in the direction of a right angle as shown in FIG. Is fixed in a horizontal position via Reference numeral 30 denotes an ion beam irradiated from the argon ion gun 18.

Base B21, base C22, base D2
Reference numeral 3 denotes a press rod 1 of a pressure press provided immediately above, which is configured to be vertically overlapped with each other and positioned by keys 25, 25 'and horizontally slid forward, backward, left and right by bolts 26.
5 and the receiving surface of the holder A2 can be adjusted and centered.

Then, these are combined with a base E24 in a vacuum vessel.
Mounted on top, all built in a vacuum vessel.

An appropriate space is provided below the holder B16, a receiving block 17 is disposed on the base A6 as a seat for pressurization, and a portion other than the workpiece 1 is irradiated when the argon ion beam 30 is irradiated. A shield plate 20 is provided on the side of the holder to protect it from hitting.

Next, the operation of the present apparatus will be described.
For example, in a vacuum vessel at room temperature (room temperature) with a degree of vacuum of 10 ⁻⁴ to 10 ⁻⁶ Torr, first, as shown in FIG.
, The holder A2 and the holder B16 are rotated about the horizontal axis so that the article 1 is placed in a horizontal posture, and the joining surface of the article 1 is directed toward the irradiation port of the argon ion gun 18.

Then, an ion beam 30 is irradiated to the bonding surface by the argon ion gun 18 for, for example, 30 to 300 seconds.

Immediately after the irradiation, as shown in FIG. 4, the electric motor 8 is driven to rotate the respective holders for holding the objects to be joined, so that the objects to be joined 1 are set in the vertical position, and the joining surfaces of the two objects 1 are joined. Face to face.

A photoelectric switch 12 is provided at a rotating end of the gear A9 as a rotation end of the rotation operation and direction detection.

Further, as shown in FIG. 2, it is fixed by pins of an index plunger 27 for accurate positioning. The setting of the index plunger 27 serves as a mechanical stopper for the rotation operation, and the electric motor 8 is stopped as overload current detection by utilizing an increase in the current flowing through the electric motor 8 due to a change in load at this time.

Next, when the pressurizing press is operated and the press rod 15 is lowered, the tip of the press rod hits the holder A2 and pushes down the holder A2.

The compression spring A13 and the compression spring B1
4 shrinks by losing the pressing force.

When the opposing joint surface of the article 1 hits and is further depressed, the back surface of the holder B16 hits the fixed receiving block 17, and a pressing force (for example, 10
kgf / mm ² ). Holding in this state for several minutes completes the joining.

When the press rod 15 is lifted up to no load after the joining operation is completed, the holder B16 is raised by the restoring force of the compression spring B14, and returns to the original state.

Similarly, the compression spring A13 is restored, and the holder A2 is raised to the original state.

To remove the article 1, the ball plunger 28 is loosened after opening the vacuum vessel to the atmosphere, and the article 1 is removed.
The holding force of the holder A2 and the holder B16 is loosened, and the holder is pushed out by the rotation of the push screw 29 shown in FIG.

Although one embodiment of the present invention has been described in detail above, the present invention is not limited to the above embodiment, and various design changes are possible within the scope of the technical idea of the present invention. It belongs to the technical scope of the present invention.

[0040]

As described above, according to the room temperature bonding apparatus of the present invention, the assembly of sensor parts and micromachines such as micromachines and the temperature rise and deformation of objects to be bonded such as ceramics, composite materials, superconducting wires and the like are prevented. Unacceptable precision and high-precision joining becomes possible.

[Brief description of the drawings]

FIG. 1 is a front view of a room temperature bonding apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of the apparatus of FIG.

FIG. 3 is a view as viewed in the direction of arrow A in FIG. 1;

FIG. 4 is a sectional view taken along line BB of FIG. 1;

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 workpiece 2 holder A 3 bearing 4 bearing case 5 guide rail 6 base A 7 bracket 8 electric motor 9 gear A 10 gear B 11 flexible shaft 12 photoelectric switch 13 compression spring A 14 compression spring B 15 press rod 16 holder B 17 Receiving block 18 Argon ion gun 19 Holder C 20 Shielding plate 21 Base B 22 Base C 23 Base D 24 Base E 25, 25 'Key 26 Bolt 27 Index plunger 28 Ball plunger 29 Push screw 30 Ion beam 31 Gear C

──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Yasuyuki Fujitani 2-1-1, Shinhama, Arai-machi, Takasago-shi, Hyogo Inside the Mitsubishi Heavy Industries, Ltd. Takasago Research Institute (72) Inventor Masahiko Toyoda 2-5-1 Marunouchi, Chiyoda-ku, Tokyo No. Mitsubishi Heavy Industries, Ltd. (56) References JP-A-62-282788 (JP, A) JP-A-3-81077 (JP, A) JP-A-63-101085 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) B23K 20/00-20/14

Claims (1)

(57) [Claims] 1. A room temperature joining apparatus for joining metallic or non-metallic materials at room temperature in a vacuum vessel, wherein the apparatus supports both ends of a holder holding an object to be joined and rotates about a horizontal axis. And a mechanism for arranging the above-mentioned mechanisms vertically in parallel and holding a mutual interval by a compression spring, a mechanism for vertically sliding these mechanisms, and transmitting rotational power independently to the respective rotation mechanisms. A flexible shaft, a drive mechanism for simultaneously rotating the flexible shaft in the form of a plurality of gears by an electric motor, and a photoelectric switch for position detection when rotationally positioning the joining surface of the workpiece from horizontal to vertical. When joining,
It is equipped with a press mechanism such as a hydraulic system that presses and presses objects to be joined in the vertical direction, and a horizontally arranged ion gun that irradiates the joint surface of the objects with an argon ion beam and performs a cleaning process. A room-temperature bonding apparatus characterized in that: