JP3312991B2 - Interference surface correction jig for light wave interference measurement of block gauge size - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for correcting an interference surface of a block gauge, which is used when determining the size of the block gauge by light wave interference measurement.

[0002]

BACKGROUND ART It is stipulated in JISB7506 that the dimension measurement of a block gauge is basically determined by light wave interference measurement. According to this JISB7506, both the measurement surface of the block gauge and a reference block having a reference plane to which the block gauge is closely attached (ringed) are irradiated with light,
The distance between the measurement surface and the reference plane is measured as the block gauge size using the light reflected from the measurement surface and the reference plane of these block gauges. Here, the measurement surface and the reference plane act as interference surfaces during measurement.
The material of the block gauge is generally steel or ceramic, but JISB7506 stipulates that the block gauge and the reference block are the same material. However, since the quality of the close contact between the block gauge and the reference plane affects the dimension measurement result, it is necessary to check whether the block gauge is securely adhered to the reference plane. Therefore, in practice, the reference block is made of synthetic quartz or the like so as to be substantially transparent so that the adherence between the block gauge and the reference plane can be visually confirmed from the back surface.

[0003]

The close contact between the block gauge and the reference plane is performed manually by an operator. During this operation, the temperature of the block gauge and the reference block rises due to the influence of the worker's body temperature, and the state is increased. The two are brought into close contact. However, since the temperature rise of the block gauge and the reference block is not preferable, the measurement is performed after the temperature is brought close to room temperature (about 20 ° C.) for a certain period of time. Since the block gauge and the reference block are made of different materials and have different coefficients of linear expansion, when performing light wave interference measurement, thermal stress distortion occurs in the block gauge and the reference block, and the flatness of the measurement surface and the reference plane is measured. However, there is a problem that the precision measurement of the block gauge dimension is not sufficiently performed due to deterioration of the gauge.

The present invention has been made in view of such circumstances, and an object of the present invention is to accurately measure the dimensions of a block gauge by recovering the deterioration of the flatness between the measurement surface of the block gauge and the reference plane of the reference block. An object of the present invention is to provide an interference plane correction jig for light wave interference measurement having a block gauge size that can be performed. Another object of the present invention is to provide an interference surface correction jig for light wave interference measurement of a block gauge dimension in which the close contact between the reference plane and the block gauge does not come off.

[0005]

An object of the present invention is to achieve the above object by making a reference block and a block gauge relatively movable within a reference plane while maintaining a close contact state. Specifically, the interference surface correction jig for light wave interference measurement of the block gauge dimensions of the present invention uses a block gauge and a reference block formed of different materials, respectively, and is in close contact with a reference plane of the reference block. An interference surface correction jig used for light wave interference measurement for determining the size of a block gauge, a reference block holding means for holding the reference block, a block gauge holding means for holding the block gauge, and these blocks A moving mechanism is provided on at least one of the gauge holding unit and the reference block holding unit, and moves the block gauge and the reference block relatively in the reference plane while maintaining the close contact state.

Here, the moving mechanism may be a micrometer head. In this case, the micrometer head may have a structure provided in the reference block holding means.
The reference block holding means includes a stopper mechanism for restricting movement of the reference block in the block gauge pressing direction. The stopper mechanism is disposed between the stopper block and the stopper block and the reference block. A structure including a reference block holding member that is orthogonal to the axial direction of the spindle of the micrometer head and that is movable in the same plane as the reference plane may be used. Further, a guide may be formed on the reference block holding member so as to coincide with a side surface of the reference block. Also,
The spindle of the micrometer head may have a structure in which a short side surface of a block gauge formed in a rectangular parallelepiped is pressed via block gauge holding means. The block gauge holding means may have a tapered portion having a tapered portion, and an operating plate whose leading end presses the block gauge in the vicinity of the reference plane. Further, at least one of the reference block holding means and the block gauge holding means may be provided with a reference block movement restricting member for restricting the movement of the reference block on the block gauge side.

[0007]

In order to measure the light wave interference of a block gauge, first, an operator manually brings the block gauge into close contact with the reference plane of the reference block. The close contact between the block gauge and the reference plane is confirmed by visual observation from the back surface of the reference block. Since the body temperature of the worker is transmitted to these members as the block gauge and the reference plane of the reference block are brought into close contact with each other, the temperature is brought close to room temperature (around 20 ° C.) for a certain period of time. After a lapse of a predetermined time after the end of the temperature break-in, the block size is measured. Before the measurement, an interference surface correction jig is used. That is, a temperature change occurs due to temperature break-in or the like, and thermal stress distortion occurs in the block gauge and the reference block. Although the flatness of the measurement plane and the reference plane is deteriorated due to the thermal stress distortion, a moving mechanism including a micrometer head or the like is operated to recover the deterioration.

Accordingly, the block gauge and the reference block are relatively displaced via the block gauge holding means and the reference block holding means while maintaining a close contact state in the reference plane. The generated thermal stress strain is released and corrected to an appropriate flatness. Here, the distance by which the block gauge and the reference block are relatively moved by the moving mechanism is 0.05 to 0.1 m.
m. If it exceeds 0.1 mm, the contact between the two may come off, making it impossible to measure the appropriate block gauge dimensions. When the flatness between the reference plane and the measurement surface of the block gauge is corrected by the interference surface correction jig, irradiate light to both the measurement surface of the block gauge and the reference plane to which the block gauge adheres according to JISB7506. Then, the distance between the measurement surface and the reference plane is measured as a block gauge dimension using the light reflected from the measurement surface and the reference plane.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an interference surface correcting jig for measuring light wave interference with a block gauge according to the present invention will be described below.
This will be described in detail with reference to the accompanying drawings. FIG. 1 is a front view showing an interference surface correcting jig according to an embodiment, FIG. 2 is a plan view thereof, and FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1 and 2, an interference surface correction jig includes a reference block holding means 2 for holding a cylindrical reference block 1, and a block gauge holding means for holding a block gauge 3 disposed on the reference block 1. 4 and
A micrometer head 5 as a moving mechanism provided in the reference block holding means 2 is provided.
The micrometer head 5 includes a main body 5A on which graduations are formed and a spindle 5B, and has a structure in which the block gauge 3 is pressed to the left in FIG. The reference block 1 is formed of a substantially transparent material such as synthetic quartz,
The upper end surface is a reference plane 1A having high flatness.
The block gauge 3 is in close contact (ringing) with the reference plane 1A. The block gauge 3 is formed in a rectangular parallelepiped from a material different from the reference block 1, such as steel or ceramic. The surface of the block gauge 3 facing the reference plane 1A and the surface opposite to this surface are defined as measurement surfaces 3A, and the distance between the measurement surfaces 3A is defined as the block gauge size. Also, when measuring the light wave interference of the block gauge dimensions specified in JISB7506,
The reference plane 1A and the measurement plane 3A function as an interference plane.

The reference block holding means 2 includes a flat base block 6, a base plate substrate 7 provided on the base block 6 and supporting a lower end surface of the reference block 1, and a block of the reference block 1. A stopper mechanism 8 for regulating movement in the gauge pressing direction,
A micrometer head holding block 9 fixed to one end of the base block 6 and having the micrometer head 5 attached thereto. The base plate substrate 7 has a hole 7A formed in the center thereof, and the inner diameter of the hole 7A is smaller than the outer diameter of the reference block 1 (see FIG. 3). The stopper mechanism 8 includes a stopper block 10 fixed to the other end of the base block 6, and a reference block holding member 11 disposed between the stopper block 10 and the reference block 1. The block holding member 11 is movable in a direction perpendicular to the axial direction of the spindle 5B of the micrometer head 5 in the same plane as the reference plane 1A. An arcuate guide 11A is formed on the upper part of the reference block holding member 11 so as to coincide with the circumferential side surface of the reference block 1.

The block gauge holding means 4 includes a substantially flat operating plate 12 for pressing the block gauge 3, an operating plate guide 14 attached to lower surfaces on both sides of the operating plate 12 by bolts 13, A handle 16 attached by bolts 15 to the upper surface of the central part of the
And an anvil 18 that is attached to a side portion of the micrometer head 5 via an anvil fixing plate 17 and is in contact with a tip end of the spindle 5B of the micrometer head 5.
It can move forward and backward along the axis of the spindle 5B. As shown in FIG. 3, a gate-shaped shape that straddles the reference block 1 is formed from the two operation plate guides 14 and the operation plate 12, and the lower end surface of the operation plate guide 14 contacts the upper surface of the base block 6. The lower surface of the operation plate 12 is in contact with the reference plane 1A of the reference block 1.
The handle 16 is formed in a ladder shape from a heat-insulating material, for example, Duracon (trade name), and has a structure that does not easily transmit the body temperature of the worker to the reference block 1 and the block gauge 3. The handle 16 also functions as a weight for urging the operation plate 12 toward the reference block. Here, a reference block movement restricting member 19 for restricting the movement of the reference block 1 on the block gauge side from the operation plate 12, the operation plate guide 14 and the handle 16, in other words, preventing the reference block 1 from floating is provided. It is configured.

As shown in FIG. 2, a window 12A is formed at the center of the operation plate 12 to avoid interference with the block gauge 3 on the reference block 1. Inside the window 12A, Is formed with a tapered portion 12B having substantially the same width as the short side direction of the block gauge 3.
The width direction of the tapered portion 12B is orthogonal to the axis direction of the spindle 5B of the micrometer head 5, and the center in the width direction coincides with the axis line of the spindle 5B.
FIG. 4 shows a sectional structure of the operation plate 12. FIG.
In the above, the tapered portion 12B has a tapered shape, and the tip thereof is configured to press the short side surface of the block gauge 3 near the reference plane 1A. The height of the micrometer head 5 is adjusted so that the axial direction of the spindle 5B is located above the reference plane 1A.

Next, a method for performing light wave interference measurement of a block gauge size will be described. First, an operator manually brings one measurement surface 3A of the block gauge 3 into close contact with the reference plane 1A of the reference block 1. The state of adhesion between the measurement surface 3A of the block gauge 3 and the reference plane 1A is confirmed by visual observation from the back surface of the reference block 1. These measurement surfaces 3
Block gauge 3 due to the close contact work between A and reference plane 1A
Since the body temperature of the worker is transmitted to the reference block 1, the temperature is brought close to room temperature (around 20 ° C.) for a certain period of time. When a predetermined time elapses after the temperature break-in, the block size is measured. Before the measurement, the measurement surface 3A and the reference plane 1A, which are interference surfaces, are corrected by an interference surface correction jig.

A temperature change occurs due to temperature break-in or the like, and thermal stress distortion occurs in the block gauge 3 and the reference block 1. Although the flatness of the measurement surface 3A and the reference plane 1A deteriorates due to the thermal stress distortion, an interference surface correction jig is used to recover the deterioration. First, the micrometer head 5
Is operated to retract the spindle 5B sufficiently, and the reference block 1 in a state where the block gauge 3 is in close contact with the reference plane 1A is arranged on the base plate substrate 7 of the reference block holding means 2. After that, the reference block 1 is covered with the block gauge holding means 4.
The block gauge 3 is located in the window 12A of the operation plate 12 of FIG. At this time, the block gauge 3 is arranged such that the tip of the tapered portion 12B of the operation plate 12 abuts on the short side surface thereof.

In this state, the micrometer head 5 is operated to move the spindle 5B forward. Then, after the spindle 5B contacts the anvil 18, the operating plate 12 is advanced. By the advance of the operation plate 12, the tapered portion 1
The tip of 2 </ b> B presses the short side surface of the block gauge 3.
When the block gauge 3 is pressed, the reference block 1 also attempts to move in the same direction. However, since the side surface of the reference block 1 is held by the stopper mechanism 8 of the reference block holding means 2, The movement of the reference block 1 in the block gauge pressing direction is restricted. here,
As shown in FIG. 5, when the center P of the reference block 1 is displaced from the axis L of the spindle 5B, the reference block holding member 11 of the stopper mechanism 8 is moved in a direction perpendicular to the axis of the spindle 5B. Guide 11A
To the reference block 1.

As the spindle 5B advances, the block gauge 3 and the reference block 1 are relatively displaced from each other while maintaining the close contact state in the reference plane 1A. The distortion is released, and the reference plane 1A and the measurement plane 3A which are the interference planes
Is corrected. Here, the distance by which the block gauge 3 and the reference block 1 are relatively moved by the micrometer head 5 is 0.05 to 0.1 mm. If it exceeds 0.1 mm, the close contact between the two may be released and proper measurement of the block gauge dimensions may not be performed. The advance of the spindle 5B of the micrometer head 5 is performed while reading the scale of the main body 5A.

When the flatness between the reference plane 1A and the measurement surface 3A of the block gauge 3 is corrected by the interference surface correction jig, the micrometer head 5 is operated to operate the spindle 5B.
Retreat. Further, the block gauge holding means 4 is removed, and the reference block 1 on which the block gauge 3 is in close contact is taken out from the reference block holding means 2. The close contact state between the block gauge 3 taken out from the reference block holding means 2 and the reference plane 1A of the reference block 1 is confirmed. afterwards,
According to JISB7506, measurement surface 3A of block gauge 3
Light is applied to both the reference plane 1A to which the block gauge 3 is in close contact, and the measurement plane 3A and the reference plane 1A
The distance between the measurement surface 3A and the reference plane 1A is measured as the block gauge size using the light reflected from the light source.

Therefore, according to this embodiment, the reference block holding means 2 for holding the reference block 1, the block gauge holding means 4 for holding the block gauge 3, and the block gauge provided on the reference block holding means 2. 3 and the moving mechanism 5 for relatively moving the reference block 1 within the reference plane 1A while maintaining the close contact state, the interference surface correcting jig is configured. Even if a crack occurs, the block gauge 3 and the reference block 1 are relatively moved to release the thermal stress distortion, and the deterioration of the flatness can be recovered to precisely measure the block gauge dimensions. Further, in this embodiment, since the moving mechanism is the micrometer head 5, the block gauge 3 and the reference block 1A can be reliably moved in close contact with each other. That is, the block gauge 3
In order to perform relative movement between the actuator and the reference block 1 while maintaining a close contact state, the movement distance must be 0.05 to 0.1 mm. However, if the micrometer head 5 is used, a minute movement of 0.05 to 0.1 mm is required. The distance can be reliably moved.

Furthermore, since the short side surface of the block gauge 3 is pressed by the micrometer head 5 via the block gauge holding means 4, the block gauge 3 and the reference plane 1A are in close contact with each other when the thermal strain is released. Will not come off. The block gauge holding means 4 has a tapered portion 12B which is tapered.
2B is the reference plane 1A of the block gauge 3
The structure provided with the operating plate 12 that presses the vicinity of
A force for relatively moving the block gauge 3 and the reference block 1 can be applied to the vicinity of the reference plane 1A, and from this point, the close contact between the block gauge 3 and the reference plane 1A can be prevented. Further, the micrometer head 5 is provided on the reference block holding means 2 and the stopper mechanism 8 of the reference block holding means 2 restricts the movement of the reference block 1 larger than the block gauge 3 in the block gauge pressing direction. Also from this point, the force for relatively moving the block gauge 3 and the reference block 1 is set near the reference plane 1A so that the block gauge 3 and the reference plane 1A are moved.
Can be prevented from coming off tightly.

The stopper mechanism 8 is provided with a stopper block 10 and the micrometer head 5 disposed between the stopper block 10 and the reference block 1.
And a reference block holding member 11 which is orthogonal to the axial direction of the spindle 5B and is movable in the same plane as the reference plane 1A. Is formed, the center P of the reference block 1 is displaced from above the axis L of the spindle 5B.
By moving the reference block holding member 11 of the stopper mechanism 8 in a direction orthogonal to the axis direction of the spindle 5B and aligning the guide 11A with the reference block 1, the longitudinal center line of the block gauge 3 is aligned with the axis of the spindle 5B. In addition, it is possible to prevent the close contact between the block gauge 3 and the reference plane 1A.

Further, the block gauge holding means 4
Is configured to include the reference block movement restricting member 19 for restricting the movement of the reference block 1 on the block gauge side. Therefore, even if the micrometer head 5 is operated to press the side surface of the block gauge 3, the block Since the pressing direction of the gauge 3 does not change, the close contact between the block gauge 3 and the reference plane 1A can be prevented from this point as well. The handle 1 of the block gauge holding means 4
6 is made of a heat insulating member, so that the body temperature of the
6 to the block gauge 3 and the reference block 1.

Although the present invention has been described with reference to preferred embodiments, the present invention is not limited to these embodiments, and various improvements and design changes may be made without departing from the spirit of the present invention. Of course, it is possible. For example, in the above embodiment, the moving mechanism is the micrometer head 5
However, in the present invention, a screw, a ball screw, or the like may be used as long as the structure can relatively move the reference plane 1A and the block gauge 3 while maintaining the close contact state. Further, the micrometer head 5 is provided on the reference block holding means 2,
Although the movement of the reference block 1 in the block gauge pressing direction is restricted by the stopper mechanism 8 of the reference block holding means 2, in the present invention, the block gauge 3 is fixed,
A configuration in which a moving mechanism is provided in the reference block holding means 2 to move the reference block 1, or a moving mechanism is provided in both the reference block holding means 2 and the block gauge holding means 4 so that the block gauge 3 and the reference block 1 It may be configured to move in the opposite direction.

Further, the stopper mechanism 8 is constituted by the stopper block 10 and the reference block holding member 11, but in the present invention, the stopper mechanism 8 may be constituted only by the stopper block 10. Although the short side surface of the block gauge 3 is pressed by the spindle 5B of the micrometer head 5 via the block gauge holding mechanism 4, the long side surface of the block gauge 3 may be pressed. The operating plate 12 has a tapered portion 12 which is tapered.
B, and the tip of the tapered portion 12B presses the vicinity of the reference plane 1A of the block gauge 3. However, the portion that presses the block gauge 3 does not necessarily need to be the tip of the tapered portion 12B. . For example, the operating plate 12 may be formed from a flat plate, and the block gauge 3 may be pressed by the vertical end face of the flat plate.

Further, in the above embodiment, the reference block movement restricting member 19 includes the operating plate 12, the operating plate guide 14 and the handle 1, which are constituent members of the block gauge holding means 4.
6, the reference block movement restricting member is not limited to this configuration. For example, the reference block movement restricting member is configured to include a hook that locks the reference plane 1A of the reference block 1, and the hook is a reference block holding unit 2.
May be fixed to the base block 6. Further, the handle 16 of the block gauge holding means 4 does not necessarily need to be formed from a heat insulating material. Further, the reference block 1 may have a shape other than a cylinder such as a prism.

[0025]

As described above, according to the present invention,
A reference block holding unit for holding a reference block, a block gauge holding unit for holding a block gauge, and a block gauge provided on at least one of the block gauge holding unit and the reference block holding unit, wherein the block gauge and the reference block are brought into close contact with each other. Since the interference surface correction jig is configured with a moving mechanism that relatively moves within the reference plane while maintaining the above, even if thermal stress distortion occurs in the block gauge and the reference block, the block gauge and the reference block are Relative movement releases thermal stress strain, recovers these deteriorations in flatness, and enables precise measurement of block gauge dimensions. In addition, if the moving mechanism is a micrometer head, the block gauge and the reference block can be reliably moved in close contact with each other. Furthermore, if the short side surface of the block gauge is pressed by the spindle of the micrometer head via the block gauge holding means, the close contact between the block gauge and the reference plane does not come off when the thermal strain is released. Further, if the block gauge holding means has a tapered tapered portion and a structure in which the tip of the tapered portion is provided with an operating plate that presses the vicinity of the reference plane of the block gauge, the block gauge and the reference block are formed. The force of the relative movement can be applied to the vicinity of the reference plane, and the close contact between the block gauge and the reference plane can be prevented. Further, if the micrometer head is provided on the reference block holding means, and the stopper mechanism of the reference block holding means is configured to restrict the movement of the reference block larger than the block gauge in the block gauge pressing direction, the block is also considered from this point. By making the force for relatively moving the gauge and the reference block close to the reference plane, the close contact between the block gauge and the reference plane can be prevented. Further, the stopper mechanism is disposed between the stopper block and the stopper block and the reference block, and a reference perpendicular to the axial direction of the spindle of the micrometer head and movable in the same plane as the reference plane. If a guide is formed on the reference block holding member so as to coincide with the side surface of the reference block, even if the center of the reference block is displaced from the axis of the spindle, the reference By moving the block holding member in a direction orthogonal to the axis direction of the spindle and aligning the guide with the reference block, the center line in the longitudinal direction of the block gauge is aligned with the axis of the spindle, and the close contact between the block gauge and the reference plane is established. Detachment can be prevented. Furthermore, if the block gauge holding means is configured to include a reference block movement restricting member that restricts the movement of the reference block on the block gauge side, the pressing direction of the block gauge does not change. The contact between the block gauge and the reference plane can be prevented from coming off.

[Brief description of the drawings]

FIG. 1 is a front view showing an interference surface correction jig according to an embodiment of the present invention.

FIG. 2 is a plan view of FIG. 1;

FIG. 3 is a sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a longitudinal sectional view of an operation plate.

FIG. 5 is a view similar to FIG. 2, showing the operation of the block mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Reference block 1A Reference plane 2 Reference block holding means 3 Block gauge 3A Measurement surface 4 Block gauge holding means 5 Micrometer head as a moving mechanism 5B Spindle 8 Stopper mechanism 10 Stopper block 11 Reference block holding member 11A Guide 12 Operating plate 12B Taper Part 19 Reference block movement restricting member

Continuing from the front page (72) Inventor Hu Naoya 1-20-1 Sakado, Takatsu-ku, Kawasaki, Kanagawa Prefecture Mitutoyo Co., Ltd. (56) References JP-A-5-93611 (JP, A) JP-A-6-341809 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01B 9/00-11 / 30 102 G01B 3/00-5/30 G01B 21/00-21/32

Claims (7)

(57) [Claims] An interference surface correction jig used for light wave interference measurement for determining the dimensions of a block gauge which is in close contact with a reference plane of the reference block, using a block gauge and a reference block formed of different materials. A reference block holding means for holding the reference block, a block gauge holding means for holding the block gauge, and the block gauge provided on at least one of the block gauge holding means and the reference block holding means. A moving mechanism for relatively moving the reference block in the reference plane while maintaining the close contact with the reference block. 2. The interference surface correcting jig according to claim 1, wherein said moving mechanism is a micrometer head. Correction jig. 3. The interference surface correcting jig for measuring light wave interference having a block gauge size according to claim 2, wherein the micrometer head is provided on the reference block holding means, and the reference block holding means is provided on the reference block. An interference surface correcting jig for light wave interference measurement having a block gauge dimension, comprising a stopper mechanism for restricting movement in a block gauge pressing direction. 4. The jig for correcting an interference surface for measuring light wave interference having a block gauge size according to claim 3, wherein the stopper mechanism is disposed between the stopper block and the stopper block and the reference block. A reference block holding member that is orthogonal to the axial direction of the spindle of the micrometer head and that is movable in the same plane as the reference plane, and a guide that matches a side surface of the reference block is provided on the reference block holding member. An interference surface correction jig for light wave interference measurement having a block gauge dimension, the jig being formed. 5. The jig for correcting an interference surface for measuring light wave interference having a block gauge size according to claim 3 or 4, wherein the block gauge is formed in a rectangular parallelepiped, and a spindle of the micrometer head is provided via the block gauge holding means. An interference surface correcting jig for light wave interference measurement of a block gauge dimension, wherein a short side surface of the block gauge can be pressed. 6. The jig according to claim 3, wherein the block gauge holding means has a tapered portion and a tip of the tapered portion. An interference surface correction jig for measuring light wave interference having a block gauge size, comprising an operation plate for pressing the block gauge in the vicinity of the reference plane. 7. The interference surface correction jig for lightwave interference measurement having a block gauge size according to claim 1, wherein at least one of the reference block holding unit and the block gauge holding unit is provided with a reference block. An interference surface correction jig for light wave interference measurement having a block gauge dimension, comprising a reference block movement restricting member for restricting movement on the block gauge side.