JP3310592B2 - Connecting cylindrical member and electronic lens constituted by connecting cylindrical member - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a method of connecting cylindrical members such that each cylindrical surface of two cylindrical members and circular holes formed in the two cylindrical members are concentric. The present invention relates to a connecting cylindrical member having a structure capable of being separated and an electron lens formed by the connecting cylindrical member. INDUSTRIAL APPLICABILITY The present invention can be applied to a case where two cylindrical members which can be connected and separated and each have a cylindrical surface or a circular hole need to be connected such that the cylindrical surfaces or the circular holes are concentric. . For example, the present invention relates to an upper yoke (upper magnetic pole member) in which an upper magnetic pole of an electron lens is integrally formed.
And the lower yoke (lower magnetic pole member) integrally connecting the lower magnetic pole
Can be applied to an electronic lens or the like in which is detachably connected.

[0002]

2. Description of the Related Art In an electron beam optical system, a plurality of electron lenses having an electron beam passage hole acting as a lens for an electron beam are used in a state of being stacked in multiple stages. The center of each of the electron lenses (the center of the electron beam passage hole) is desirably arranged on one straight line.
However, the center of each of the electronic lenses is decentered from the straight line due to a manufacturing error, an assembly error, or the like. In the current electron beam optical system, a very small value is required for the eccentricity. In particular, in a drawing apparatus that draws a fine pattern with an electron beam converged by an electron lens, the eccentricity of the center position of the electron lens also affects the accuracy of the finished pattern. As a method of arranging the center position of the electron beam passage hole of each electron lens coaxially, the following technique (J01) is conventionally known.

(J01) (Technology shown in FIG. 4) FIG. 4 is an explanatory view of an electron lens to which the present invention can be applied and which has a yoke integrally formed with a magnetic pole. FIG. 4A is a plan view, and FIG. FIG. 4B is a sectional view taken along line IVB-IVB of FIG. 4A.
In FIG. 4, an electron lens 01 used in an electron beam drawing apparatus or the like is divided into parts of a lower yoke 03 and an upper yoke 04 so that a coil 02 can be incorporated therein, and a ring-shaped first joint surface provided on the lower yoke 03 The structure is such that a plurality of bolts 06 are used to fasten the joints 03a and the ring-shaped second joining surface 04a provided on the upper yoke 04 in a joined state. In order to obtain an electron beam having a well-shaped cross section, an electron lens 01 is required.
The center axes of the upper yoke 04 and the lower yoke 03 need to coincide with high accuracy.

For this reason, the lower yoke 03 is provided with a taper pin insertion member 07 having a taper pin insertion hole 07a corresponding to two circumferentially separated positions of the ring-shaped first and second joining surfaces. The upper yoke 04 has a taper pin 0
8 is attached. Then, the lower yoke 03 and the upper yoke 04 are positioned by inserting the taper pin 08 attached to the upper yoke 04 into the taper pin insertion hole 07a. The lower yoke 03 and the upper yoke 04
Is fastened by the bolt 06, and in this state, the lower yoke 0
Finishing is performed so that the central axes of the electron beam passage holes 03b and 04b of the upper yoke 04 and 3 are accurately aligned. Thereafter, the lower yoke 03 and the upper yoke 04
Is disassembled and the coil 02 is assembled therein, or the assembled coil is taken out and reassembled, and the taper pin insertion hole 07a and the taper pin 08 are assembled.
If the accuracy is good, the lower yoke 03 and the upper yoke 04
The center axes of は coincide with each other with high precision.

[0005]

[Problems to be solved by the invention]

(Problem of (J01)) In the conventional technique (J01), if the shapes of the taper pin 08 and the taper pin insertion hole 07a are slightly different from each other, the taper pin insertion hole 07
A gap is generated between a and the taper pin 08, or a gap is generated between the upper yoke 04 and the lower yoke 03, and the center axes of the upper yoke 04 and the lower yoke 03 do not accurately coincide. Therefore, the processing of the taper pin 08 and the taper pin insertion hole 07a requires extremely high precision processing. And its processing is very difficult. The present invention has been made in view of the above circumstances, and has the following content as an object. (O01) In a connecting cylindrical member in which two cylindrical members are connected or an electron lens constituted by the connecting cylindrical member, when the two cylindrical members are disassembled and connected, each of the two members before and after disassembly is different. The central axis of the cylindrical member must be concentric.

[0006]

Means for Solving the Problems Next, the present invention which has solved the above-mentioned problems will be described. Elements of the present invention include elements of the embodiments to facilitate correspondence with the elements of the embodiments described later. The sign of parentheses is added in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(1st invention) In order to solve the aforementioned problem,
The connecting cylindrical member according to the first invention of the present application has the following requirements. (A01) A ring-shaped first joining surface (2) is formed at one end, and the first joining surface (2) is formed. ), A first cylindrical member (L1) having a cylindrical positioning inner peripheral surface (3) formed thereon, (A02) a second bonding surface (11) abutting on the first bonding surface (2), and Fitting outer peripheral surface (12) that fits loosely with a small gap on the positioning inner peripheral surface (3)
A second cylindrical member (L2) having a shaft insertion hole (13a) formed at two positions separated along the fitting outer peripheral surface (12), (A03) the second cylindrical member (L2); )
A shaft portion (16a) and an eccentric cam portion (16b) fitted into each of the shaft insertion holes (13a). The shaft portion (16a) is inserted into the shaft insertion hole (13a) and rotated. An eccentric shaft (16) in which a cam surface which is an outer peripheral surface of the eccentric cam portion (16b) abuts on the positioning inner peripheral surface (3) of the first cylindrical member (L1);
(A04) The cam surface of each eccentric shaft (16) is in contact with the positioning inner peripheral surface (3), and the first joint surface (2) and the second joint surface (11) are joined in a state where the cam surfaces are joined. A connection fixing member (7) for connecting and fixing the first cylindrical member (L1) and the second cylindrical member (L2).

(Operation of the First Invention) In the connecting cylindrical member according to the first invention of the present application having the above configuration, the first cylindrical member (L
1) has a ring-shaped first joining surface (2) at one end in the axial direction.
Is formed, and a cylindrical positioning inner peripheral surface (3) is formed around the first joint surface (2). The second cylindrical member (L
2) The second joint surface (11) abuts on the first joint surface (2), and the fitting outer peripheral surface (12) of the second cylindrical member (L2) is positioned within the positioning of the first cylindrical member (L1). Loosely fit the peripheral surface (3) with a small gap. The second cylindrical member (L
2), shaft insertion holes (13a) are formed at two positions separated along the fitting outer peripheral surface (12).

The shaft portion (16a) of the eccentric shaft (16) is fitted into each shaft insertion hole (13a) of the second cylindrical member (L2). The shaft insertion hole (13)
When the shaft portion (16a) is inserted into the shaft portion (16a) and rotated, the cam surface that is the outer peripheral surface of the eccentric cam portion (16b) of the eccentric shaft (16) is positioned within the positioning of the first cylindrical member (L1). It comes into contact with the peripheral surface (3). At this time, the eccentric shaft (16) and the second cylindrical member (L2) supporting the eccentric shaft (16)
Moves on the first joining surface (2) by receiving a force that moves the cam surface and the positioning inner peripheral surface (3) in a direction opposite to a contact position. At this time, the second cylindrical member (L
The portion of the outer peripheral surface (12) of the fitting 2) opposite to the contact position has a positioning inner peripheral surface (3) of the first cylindrical member (L1).
Is pressed. In this state, the first cylindrical member (L1)
And the relative position of the second cylindrical member (L2) is fixed. In this state, that is, each of the eccentric shafts (16)
With the cam surface of the first contact surface abutting on the positioning inner peripheral surface (3) and the first joint surface (2) and the second joint surface (11) joined together, the connection fixing member (7) is connected to the first fixing surface (7). The cylindrical member (L1) and the second cylindrical member (L2) are connected and fixed. The amount of movement of the second cylindrical member (L2) on the first joint surface (2) is determined by the shaft rotation torque when rotating the eccentric shaft (16). Therefore, the first cylindrical member (L1) and the second cylindrical member (L
When 2) is separated and then connected again in the same positional relationship, the shaft rotation torque needs to be the same.

In a state where the first cylindrical member (L1) and the second cylindrical member (L2) are connected and fixed, a mark for confirming their relative rotational position is marked with the first cylindrical member (L1).
1) and the second cylindrical member (L2). Then, the first cylindrical member (L1) and the second cylindrical member (L1)
When 2) is separated and then connected and fixed again, it is possible to connect and fix in the same positional relationship as before the separation. Therefore, after the first cylindrical member (L1) and the second cylindrical member (L2) are connected and fixed and subjected to processing such as forming concentric holes, the first cylindrical member (L1) and the second cylindrical member (L2) are processed.
When separating the cylindrical member (L2), a mark (M) for confirming the relative rotational position is provided. Then, the eccentric shaft (16) is rotated to rotate the eccentric cam portion (16).
The first cylindrical member (L1) and the second cylindrical member (L2) are separated in a state where b) is separated from the positioning inner peripheral surface (3). When reconnecting the eccentric shaft (16), the first cylindrical member (L1) and the second cylindrical member (L2) are aligned in the circumferential direction (rotational position) by the mark (M). Is rotated to bring the eccentric cam portion (16b) into contact with the positioning inner peripheral surface (3). The shaft rotation torque at this time is the same as the size when the shaft is first connected and fixed. Then, the first and second cylindrical members (L1) and (L2) are connected and fixed again by the connection and fixing member (7). In this case, it is possible to connect and fix in the same positional relationship as before the separation (the relationship in which the central axes of the concentric holes match).

(Second Invention) In order to solve the above-mentioned problems, an electron lens according to a second invention of the present application has the following requirements, and is characterized by (B01) a ring-shaped first junction. Surface (2), a cylindrical positioning inner peripheral surface (3) formed around the first joint surface (2), and a beam passage hole provided in a center portion perpendicular to the axis and for passing an electron beam. A first magnetic material having a first annular portion (4) on which (4a) is formed
Yokes (L1), (B02) a second joint surface (11) that contacts the first joint surface (2), and the positioning inner peripheral surface (3)
A cylindrical fitting outer peripheral surface (12) that fits loosely with a small gap in the shaft, and a shaft insertion hole (13a) formed at two positions separated along the fitting outer peripheral surface (12).
And a beam passage hole (4) in the first annular portion (4) at the center.
Beam passage hole (14a) for electron beam passage concentric with a)
A second yoke (L2), (B03) made of a magnetic material having a second annular portion (14) on which the second yoke (L2) is formed.
A shaft portion (16a) and an eccentric cam portion (16b) fitted into each of the shaft insertion holes (13a). The shaft portion (16a) is inserted into the shaft insertion hole (13a) and rotated. An eccentric shaft (16) in which a cam surface which is an outer peripheral surface of the eccentric cam portion (16b) abuts on the positioning inner peripheral surface (3) of the first yoke (L1);
(B04) The cam surface of each eccentric shaft (16) is in contact with the positioning inner peripheral surface (3), and the first joint surface (2) and the second joint surface (11) are joined in a state where the cam surface is joined. A connection fixing member (7) for connecting and fixing the first yoke (L1) and the second yoke (L2), (B05) a beam passage hole (4a) between the first annular portion (4) and the second annular portion (14); , 14a), the electromagnetic coils (1
9).

(Operation of the Second Invention) In the electron lens of the second invention of the present application having the above-described configuration, the first yoke (L1) made of a magnetic material includes a ring-shaped first joint surface (2), A cylindrical positioning inner peripheral surface (3) formed around the first joint surface (2), and a beam passage hole (4a) provided perpendicular to the axis and passing the electron beam in the center. A first annular portion (4). The second joining surface (11) of the second yoke (L2) made of a magnetic material abuts on the first joining surface (2),
The cylindrical outer peripheral surface (12) of the second yoke (L2) is loosely fitted to the positioning inner peripheral surface (3) with a small gap. Outer peripheral surface (12) for fitting the second yoke (L2)
The shaft portion (16a) of the eccentric shaft (16) having the shaft portion (16a) and the eccentric cam portion (16b) fits in the shaft insertion holes (13a) formed at two positions separated along the axis. Combine. The eccentric shaft (1)
6) Insert the shaft portion (16a) into the shaft insertion hole (13a).
When the eccentric cam portion (1) is rotated while being inserted into the
The cam surface which is the outer peripheral surface of 6b) is in contact with the positioning inner peripheral surface (3) of the first yoke (L1). At this time, the eccentric shaft (16) and the second yoke (L
2) is moved on the first joining surface (2) by receiving a force that moves the cam surface and the positioning inner peripheral surface (3) to a side opposite to a contact position. At this time, the second yoke (L
The portion of the fitting outer peripheral surface (12) opposite to the contact position in 2) is pressed against the positioning inner peripheral surface (3) of the first yoke (L1).

In this state, the relative positions of the first yoke (L1) and the second yoke (L2) are fixed. In this state, that is, in a state where the cam surface of each of the eccentric shafts (16) is in contact with the positioning inner peripheral surface (3) and the first joint surface (2) and the second joint surface (11) are joined. The connecting and fixing member (7) connects and fixes the first yoke (L1) and the second yoke (L2). The amount of movement of the second yoke (L2) on the first joint surface (2) is determined by the shaft rotation torque when rotating the eccentric shaft (16). Therefore, the fixedly connected first
When the yoke (L1) and the second yoke (L2) are separated and then connected in the same positional relationship, the shaft rotation torque needs to be the same.

In a state where the first yoke (L1) and the second yoke (L2) are connected and fixed, a mark (M) for confirming their relative rotational positions is marked with the first yoke (L).
1) and the second yoke (L2). Then, when the first yoke (L1) and the second yoke (L2) are separated and then connected and fixed again, it is possible to connect and fix them in the same positional relationship as before the separation. Therefore, the first yoke (L1) and the second yoke (L2) are connected and fixed to form the first annular portion (4) of the first yoke (L1) and the second annular portion (2) of the second yoke (L2). 14)
In order to confirm the relative rotational position when separating the first yoke (L1) and the second yoke (L2) after finishing the beam passing holes (4a, 14a) formed concentrically, respectively. Mark (M). And
The eccentric shaft (16) is rotated to rotate the eccentric cam portion (1).
The first yoke (L1) and the second yoke (L2) are separated in a state where 6b) is separated from the positioning inner peripheral surface (3). Thereafter, an electromagnetic coil (19) is disposed and fixed outside the beam passage holes (4a, 14a) between the first annular portion (4) and the second annular portion (14), and then the first annular portion is again formed.
When connecting the yoke (L1) and the second yoke (L2), the circumferential position (rotational position) of the first cylindrical member (L1) and the second cylindrical member (L2) is determined by the mark (M). Then, the eccentric shaft (16) is rotated in a state in which the eccentric cam portion (16b) is brought into contact with the positioning inner peripheral surface (3). The shaft rotation torque at this time is the same as the size when the shaft is first connected and fixed.
Then, the first yoke (L1) and the second yoke (L2) are connected and fixed again by the connection fixing member (7). In this case, the first yoke (L1) and the second yoke (L2) can be connected in a state where the center axes of the beam passage holes (4a, 14a) are aligned.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1 of the first invention) Embodiment 1 of the connecting cylindrical member of the first invention of the present application is characterized in that the first invention has the following requirements: (A05) The fitting The shaft insertion holes (13a) formed at two positions separated by 90 degrees along the outer peripheral surface (12).

(Operation of the First Embodiment of the First Invention) In the first embodiment of the connecting cylindrical member of the first invention of the present application, the shaft insertion hole (13a) is provided in the fitting outer peripheral surface (12). It is formed at two positions separated by 90 degrees along the distance. When the shaft portion (16a) of the eccentric shaft (16) is rotated with the shaft portion (16a) inserted into the shaft insertion hole (13a), the cam surface which is the outer peripheral surface of the eccentric cam portion (16b) is the first cylindrical member ( L1) The positioning inner peripheral surface (3)
Abut. At this time, the eccentric shaft (16) and the second cylindrical member (L2) supporting the eccentric shaft (16) are located on the first joint surface (2) of the first cylindrical member (L1) and the two cam surfaces and the positioning. The inner peripheral surface (3) moves under the force of moving to the opposite side of the contact position. The directions of the forces that the second cylindrical member (L2) receives from the two cam surfaces on the first joining surface (2) are orthogonal to each other. That is, the second cylindrical member (L2) moves on the first joint surface (2) of the first cylindrical member (L1) by receiving forces in directions orthogonal to each other from the two contact positions. .

(First Embodiment of the Second Invention) The second embodiment of the present application
Embodiment 1 of the electronic lens according to the invention is characterized in that the second invention has the following requirements. (B06) Two positions separated by 90 degrees along the fitting outer peripheral surface (12). The shaft insertion hole (13a) formed in the shaft. (Effect of Embodiment 1 of Second Invention) In Embodiment 1 of the electronic lens of the second invention of the present application, the eccentric shaft (16)
And a second yoke (L2) for supporting the first yoke (L2)
On the first joint surface (2) of the yoke (L1), the yoke (L1) is moved by receiving a force that moves the two cam surfaces and the positioning inner peripheral surface (3) in a direction opposite to the contact position. The directions of the forces that the second yoke (L2) receives from the two cam surfaces on the first joint surface (2) are orthogonal to each other. That is, the second yoke (L2) moves on the first joint surface (2) of the first yoke (L1) by receiving forces in directions orthogonal to each other from the two contact positions.

[0018]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a connecting cylindrical member according to an embodiment of the present invention; However, the present invention is not limited to this.

(Embodiment 1) FIG. 1 is an explanatory view of an electron lens according to Embodiment 1 of the present invention. FIG. 1A is a plan view, and FIG. 1B is a sectional view taken along the line IB-IB of FIG. 1A. FIG. 2 is an explanatory view of a main part of the first embodiment, and is a partially enlarged view of a part indicated by an arrow II in FIG. 1B. FIG. 3 is an operation explanatory view of the first embodiment. An electron lens L of Example 1 of the present invention shown in FIG. 1 has a lower yoke (first yoke) L1 composed of a magnetic first cylindrical member and an upper yoke (second yoke) composed of a magnetic second cylindrical member. ) L2. FIG.
In B, the path of the electron beam B is in the optical axis direction of the electron lens L (vertical direction). The lower yoke L1 includes a cylindrical portion 1, a ring-shaped first joint surface 2 provided at an upper end of the cylindrical portion 1, a cylindrical positioning inner peripheral surface 3 formed around the first joint surface, It has a first annular portion 4 provided at a lower end of the cylindrical portion 1 and a coil mounting portion 5 formed on an inner surface of the cylindrical portion 1. A beam passage hole 4a through which the electron beam B passes is formed at the center of the first annular portion 4.
Are formed, and the lower magnetic pole 4b is formed around the beam passing hole 4a.
Is configured as A screw hole 2 into which a plurality of connection screws (connection fixing members) 7 are screwed, respectively, in the first joint surface 2.
a is formed. Further, a screw hole 5a into which the plurality of mounting screws 8 are screwed is formed in the coil mounting portion 5.

The upper yoke L2 has a second joint surface 11 which abuts on the first joint surface 2, a cylindrical outer peripheral surface 12 which fits the positioning inner peripheral surface 3 with a small gap, and A shaft accommodating portion 13 formed at two positions separated along the fitting outer peripheral surface 12 and a beam passage hole 14a for passing the electron beam B concentric with the beam passage hole 4a is formed at the center. And two annular portions 14. Each of the two shaft receiving portions 13 has a shaft insertion hole 13a.
Are formed. The two shaft insertion holes 13a are arranged 90 degrees apart along the fitting outer peripheral surface 12. The meaning of “90 degrees apart” means that an angle θ (see FIG. 1A) formed by a line segment connecting the two shaft insertion holes 13a and 13a and the center of the fitting outer peripheral surface 12 is 90 degrees. It is. The beam passage hole 1 of the second annular portion 14
The periphery of 4a is configured as an upper magnetic pole 14b. Further, a screw through hole 11a (see FIG. 1B) through which the connection screw 7 passes is formed in the second joint surface 11.

The eccentric shaft 16 has a shaft portion 16a and an eccentric cam portion 16b rotatably fitted in the shaft insertion holes 13a of the upper yoke L2, and the shaft portion 16a is inserted into the shaft insertion holes 13a. When rotated, the cam surface, which is the outer peripheral surface of the eccentric cam portion 16b, comes into contact with the positioning inner peripheral surface 3. In FIG. 2, a ring-shaped coil support member 18 made of a nonmagnetic material is attached to the coil attachment portion 5 of the lower yoke L1 via an insulating spacer 17 made of a plastic with an attachment screw 8. The coil support member 18 supports an electromagnetic coil 19.

(Operation of Embodiment) In the electron lens of this embodiment, the second joint surface 11 of the upper yoke (second yoke) L2 made of a magnetic material is the first joint surface of the lower yoke (first yoke) L1. 2 and a cylindrical fitting outer peripheral surface 12 of the upper yoke L2.
Are fitted to the positioning inner peripheral surface 3 with a small gap. Shaft insertion holes 13a formed at two positions separated along the fitting outer peripheral surface 12 of the upper yoke L2 include:
The shaft portion 16a of the eccentric shaft 16 having the shaft portion 16a (see FIG. 2) and the eccentric cam portion 16b is fitted. When the shaft portion 16a of the eccentric shaft 16 is rotated while being inserted into the shaft insertion hole 13a,
The cam surface which is the outer peripheral surface of the eccentric cam portion 16b is the first surface.
It comes into contact with the positioning inner peripheral surface 3 of the yoke L1. At this time, the eccentric shaft 16 and the upper yoke L
The second member 2 moves on the first joint surface 2 by receiving a force that moves the cam surface and the positioning inner peripheral surface 3 to a side opposite to a contact position. At this time, the portion of the outer peripheral surface of the upper yoke L2 opposite to the contact position is the lower yoke L1.
Is pressed against the inner peripheral surface 3 of the positioning.

In this state, the relative positions of the lower yoke L1 and the upper yoke L2 are fixed. In this state, that is, in a state where the cam surface of each of the eccentric shafts 16 is in contact with the positioning inner peripheral surface 3 and the first joint surface 2 and the second joint surface 11 are joined, the connection fixing member 7 The lower yoke L1 and the upper yoke L2 are connected and fixed. The amount of movement of the upper yoke L2 on the first joint surface 2 is determined by the shaft rotation torque when rotating the eccentric shaft 16. Therefore, when the fixedly connected lower yoke L1 and upper yoke L2 are separated and then connected again in the same positional relationship, the shaft rotation torque needs to be the same.

In a state where the lower yoke L1 and the upper yoke L2 are connected and fixed, a mark M (see FIG. 1A) for confirming their relative rotational position is attached to the lower yoke L1 and the upper yoke L2. When the lower yoke L1 and the upper yoke L2 are separated and then connected and fixed again, the mark M enables the connection and fixing in the same positional relationship as before the separation. Therefore, the lower yoke L1 and the upper yoke L2 are connected and fixed, and the beam passage holes 4a, 14a formed in the first annular portion 4 of the lower yoke L1 and the second annular portion 14 of the upper yoke L2 are concentric. A mark M for confirming the relative rotational position when the lower yoke L1 and the upper yoke L2 are separated after finishing.
Is attached. Then, the eccentric shaft 16 is rotated to separate the lower yoke L1 and the upper yoke L2 with the eccentric cam portion 16b separated from the positioning inner peripheral surface 3.

After that, an electromagnetic coil 19 is arranged and fixed between the first annular portion 4 and the second annular portion 14 outside the beam passage holes 4a, 14a, and then the lower yoke L1 and the upper yoke L2 are connected again. In this case, the eccentric shaft 16 is rotated in a state where the positions (rotational positions) of the lower yoke L1 and the upper yoke L2 in the circumferential direction are aligned with the mark M, and the eccentric cam portion 16b is positioned on the inner peripheral surface for positioning. 3
Contact. The shaft rotation torque at this time is the same as the size when the shaft is first connected and fixed. Then, the lower yoke L1 and the upper yoke L2 are connected and fixed again by the connection fixing member 7. In this case, the lower yoke L1 and the upper yoke L2 can be connected in a state where the central axes of the beam passage holes 4a and 14a coincide.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) In the embodiment of the present invention, the case of the electronic lens constituted by the connecting cylindrical member has been exemplified. However, the present invention is applicable to two cylindrical members other than the electronic lens. In this case, it is possible to connect or separate the cylindrical members so that the respective cylindrical surfaces of the two cylindrical members and the circular holes formed in the two cylindrical members are concentric. It is.

[0027]

The connecting cylindrical member of the present invention and the electron lens constituted by the connecting cylindrical member of the present invention can provide the following effects. (E01) In a connecting cylindrical member in which two cylindrical members are connected and an electron lens constituted by the connecting cylindrical member, each cylindrical surface of the two cylindrical members is disassembled and connected even if the two cylindrical members are disassembled and connected. In addition, the circular holes and the like respectively formed in the two cylindrical members can be made concentric with high precision.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an electron lens according to a first embodiment of the present invention. FIG. 1A is a plan view, and FIG. 1B is an IB-I of FIG. 1A.
It is a B sectional view.

FIG. 2 is an explanatory view of a main part of the first embodiment, and is a partially enlarged view of a portion indicated by an arrow II in FIG. 1B.

FIG. 3 is an operation explanatory view of the first embodiment.

FIG. 4 is an explanatory view of an electronic lens having a yoke integrally formed with a magnetic pole to which the present invention can be applied.
4A is a plan view, and FIG. 4B is a sectional view taken along the line IVB-IVB in FIG. 4A.

[Explanation of symbols]

L1: first cylindrical member (first yoke, lower yoke); L2: second cylindrical member (second yoke, upper yoke) 2: first joining surface; 3: positioning inner peripheral surface; 4: first annular portion; 4a: beam passage hole, 11: second joining surface, 12: fitting outer peripheral surface, 13a: shaft insertion hole, 14: second annular portion, 14a: beam passage hole, 16: eccentric shaft, 16a
... shaft part, 16b ... eccentric cam part, 19 ... electromagnetic coil.

Claims (2)

(57) [Claims] A connecting cylindrical member having the following requirements: (A
01) A ring-shaped first joining surface is formed at one end, and
(A02) a first cylindrical member having a cylindrical positioning inner peripheral surface formed around a bonding surface, and (A02) a second bonding surface that comes into contact with the first bonding surface and a small clearance between the positioning inner peripheral surface and the second bonding surface. A second cylindrical member having a fitting outer peripheral surface to be fitted and shaft insertion holes formed at two positions separated along the fitting outer peripheral surface; (A03) the shafts of the second cylindrical member; A first cylindrical member having a shaft portion and an eccentric cam portion fitted into the insertion hole, wherein a cam surface which is an outer peripheral surface of the eccentric cam portion when the shaft portion is inserted into the shaft insertion hole and rotated; (A04) the eccentric shaft abutting on the positioning inner peripheral surface, and (A04) the cam surface of each of the eccentric shafts abutting on the positioning inner peripheral surface, and the first and second bonding surfaces being bonded to each other. 1st cylindrical member and 2nd
A connection fixing member for connecting and fixing the cylindrical member. 2. An electron lens composed of a connecting cylindrical member having the following requirements: (B01) a ring-shaped first joining surface; and a cylindrical positioning inner periphery formed around the first joining surface. A first yoke made of a magnetic material having a first annular portion provided perpendicularly to the surface and having a beam passage hole for passing an electron beam in the center at a central portion, and (B02) abutting on the first joint surface; A second joint surface, a cylindrical fitting outer peripheral surface loosely fitted with a small gap to the positioning inner peripheral surface, and a shaft insertion formed at two positions separated along the fitting outer peripheral surface. A second yoke made of a magnetic material having a hole and a second annular portion having a central portion formed with a beam passage hole for passing an electron beam concentric with the beam passage hole of the first annular portion, (B0
3) a shaft portion and an eccentric cam portion fitted into each of the shaft insertion holes of the second magnetic pole, and the outer peripheral surface of the eccentric cam portion when the shaft portion is inserted into the shaft insertion hole and rotated. (B04) the cam surface of each of the eccentric shafts abuts on the positioning inner peripheral surface, and the cam surface of the eccentric shaft contacts the positioning inner peripheral surface of the first cylindrical member; (B05) a connection fixing member for connecting and fixing the first cylindrical member and the second cylindrical member in a state where the two joining surfaces are joined, (B05) a beam passing hole and a beam passing hole between the first annular portion and the second annular portion; Electromagnetic coil placed outside.