JP3298300B2 - Position coordinate measuring method and position coordinate measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to mechanical parts, such as Vide
The present invention relates to a method and apparatus for two- or three-dimensionally measuring the positional accuracy of a tape recorder (hereinafter referred to as a VTR), such as a drum and a post, after assembling a mechanism thereof.

[0002]

2. Description of the Related Art In recent years, in a VTR, the accuracy of a mechanism has been improved in order to perform high-density recording. Also,
In order to achieve system interchangeability, a technique for measuring the position between components after assembly with high accuracy is important in order to eliminate variations between decks.

A conventional method for measuring the positional accuracy of a component after assembly will be described with reference to FIGS. FIG.
FIG. 24 is an enlarged view of a main part of a conventional contact-type position coordinate measuring device.
Is an explanatory view showing the principle of measurement, and FIG. 25 is an explanatory view showing the relative positional relationship between the posts.

[0004] First, referring to FIG.
The TR mechanism will be described. The rotating drum 1
Recording / reproducing magnetic tape 13 supplied from a cassette
The recording / reproduction is performed by the magnetic head 2 mounted at the lower end in a state in which (the traveling is not performed at the time of measurement). The fixed drum 3 has a lead 4 for regulating the lower end of the magnetic tape 13. Further, a drum unit 5 is constituted by the rotating drum 1 and the fixed drum 3. The roller post 6 on the tape entry side (hereinafter, abbreviated as the entry side) stands vertically, regulates the upper end of the running magnetic tape 13, and the inclined post 7 changes the running direction of the magnetic tape 13. The inclined post 8 on the tape output side (hereinafter, abbreviated as the output side) returns the running direction of the magnetic tape 13 to the original position, and the roller post 9
Stands vertically and regulates the upper end of the magnetic tape 13. The roller post 6 and the inclined post 7 are held on the entry side base 10. Also, the inclined post 8 and the roller post 9
Are held by the outlet side base 11. 12 is a chassis. Reference numeral 60 denotes a tension applying device that applies a constant tension, and includes a tension post 61 that contacts the magnetic tape 13 and a base 6 that holds the tension post 61.
2. It is composed of a spring 63. 65 is a magnetic tape 13
, And includes a post 66 and a pinch roller 67. As described above, the measurement target 70 in this example is a main part of the mechanism of the VTR.
9 and 61.

Next, a conventional contact type position coordinate measuring device will be described. Reference numeral 41 denotes a measurement table on which the measurement target 70 is placed on the reference surface 39. The probe 42 attached to the contact type position coordinate measuring device is movable in three axes of X, Y, and Z directions. The X, Y, and Z coordinates are detected by the position coordinate detection device 43. The arithmetic unit 44 calculates X,
The position coordinates in the Y and Z directions are calculated, and the inclination angle (φ), the inclination direction (θ), and the center-to-center distance between the posts of the measuring object 70 are calculated.
Calculate (L).

The measuring method of the conventional contact-type position coordinate measuring device configured as described above will be described below.

Referring to FIG. 24, a method for measuring the entry-side inclined post 7 will first be described as an example. Reference direction X, Y
And the center of the running magnetic tape 13 is set as the reference height of the mechanism. Next, the probe 42 is brought into contact with at least three points (7a1 to 7c1) on the outer periphery of the inclined post 7 at an arbitrary height Z1, X and Y coordinates are obtained, and the center Oz1 of the circle is obtained from the values. Similarly, three points at Z2 (7a2-
7c2), the center Oz2 and Oz3 of the circle are obtained from three points (7a3 to 7c3) at Z3. That is, by measuring at least two or more arbitrary heights Z, the inclined post 7 can be measured.
A center line R7 connecting the coordinates of the center is obtained. Similarly, the center line R6 of the roller post 6 on the entry side can be obtained. From this, as shown in FIG.
(φ), the inclination direction (θ), the x and y coordinates at an arbitrary height, and the center-to-center distance (L) between the posts at the reference height Z = 0 can also be calculated by the calculation processing device 44. it can.

[0008]

However, such a conventional configuration has the following problems. (1) Since the rotating drum is a rotating body, it is difficult to bring the probe into contact with the rotating drum, and measurement cannot be performed during rotation. Therefore, the most important relative position between the drum unit and other posts cannot be measured. (2) Since the inclined post is inclined, the probe can be brought into contact with only a limited portion when determining the center of the post. For example, the probe cannot be brought into contact from the direction A in FIG. Therefore, an error is likely to occur when finding the center of the circle. Moreover, the larger the tilt angle, the greater this tendency. In addition, the distance between the inclined post and the roller post is very small, and it is considered that the distance between the inclined post and the roller post will be further reduced due to the further miniaturization of the mechanism. (3) A post having a small diameter and a low rigidity is deformed by the load when the probe is brought into contact with the post, and cannot be measured accurately. (4) Since it is a contact type, measurement cannot be performed if the magnetic tape is wound. However, when recording and reproducing are actually performed, a force is also applied to the measurement object because the magnetic tape to which a certain tension is applied is wound around the measurement object. Therefore, there is a slight difference in the assembly accuracy of the mechanism depending on the presence or absence of the magnetic tape. (5) The device is large.

Therefore, the conventional method is not a method capable of accurately measuring the positions of parts of the mechanism after assembly.

[0010]

[0011]

[0012]

[0013]

[0014]

[0015]

According to the first aspect of the present invention,
A plurality of measurement steps of irradiating a measurement target while moving a laser beam scanning in a height direction with a predetermined beam diameter from a plurality of different directions and parallel to one plane; and a plurality of different measurement steps Calculating a plurality of projection position coordinates different from a cross section generated when the laser beam is cut by a laser beam; and calculating a plurality of different projection position coordinates and an angle difference in a plurality of directions different from the cross section obtained in the calculation step and a height in a plurality of measurement steps. Calculating a three-dimensional position coordinate of the object to be measured based on the movement amount.

According to a second aspect of the present invention, there is provided a light projecting side optical system for irradiating a laser beam having a predetermined beam diameter and scanning in parallel with one plane, and a light receiving side optical system having a light receiving element for receiving the laser beam. A vertical driving means for relatively moving the object to be measured, or one of the light emitting side optical system and the light receiving side optical system so that the laser light can be irradiated at a plurality of heights of the object to be measured; Movement amount detecting means for detecting the amount of vertical movement, and relatively rotating the object to be measured or one of the optical system on the light emitting side and the optical system on the light receiving side to change the irradiation angle of the laser beam to the object to be measured Rotating drive means for causing
Rotation angle detection means for detecting the rotation angle of the rotation drive means; calculating means for obtaining different projection position coordinates of the object to be measured by laser light irradiation from different directions from the output of the light receiving element; and different projection position coordinates And a calculation processing means for obtaining three-dimensional position coordinates of the object to be measured based on the rotation angle and the amount of vertical movement.

According to a third aspect of the present invention, in the second aspect of the present invention, a tension applying means for applying a tension to a tape which transmits a laser beam and comes into contact with an object to be measured is provided. The three-dimensional position coordinates of the object to be measured contacted with the tape to which is added are obtained.

According to a fourth aspect of the present invention, in the third aspect of the present invention, a tape driving means for moving the tape relative to the object to be measured is further provided, and the calculation processing means comprises a third part of the object to be measured while the tape is running. It is characterized in that dimensional position coordinates are obtained.

According to a fifth aspect of the present invention, there is provided a light emitting side optical system for irradiating a laser beam having a predetermined beam diameter and scanning in parallel with one plane, and a light receiving side optical system having a light receiving element for receiving the laser beam. A vertical driving means for relatively moving the object to be measured, or one of the light emitting side optical system and the light receiving side optical system so that the laser light can be irradiated at a plurality of heights of the object to be measured; A plurality of moving amount detecting means for detecting the amount of vertical movement, and a plurality of laser optical systems composed of a light emitting side optical system and a light receiving side optical system are installed at positions separated by a certain angle around the object to be measured, and are different from each other. A calculating means for calculating a plurality of different projection position coordinates of the measurement object by the laser light irradiation from a plurality of directions from the outputs of the plurality of light receiving elements; a plurality of different projection position coordinates and an installation angle difference between the plurality of laser optical systems; Depending on the amount of movement It is characterized in that it has a calculation processing means for calculating a three-dimensional position coordinates of the measurement object.

[0020]

[0021]

[0022]

[0023]

[0024]

According to the first and second aspects of the present invention, the three-dimensional position coordinates of the assembled parts can be measured in a non-contact, high-accuracy, high-speed manner regardless of the posture, size, and presence or absence of rotation. .

Further, according to the structure of the invention of claim 3 of the present application,
The three-dimensional position coordinates can be measured with the tape tension applied to the component.

According to the invention of claim 4 of the present application, it is possible to measure the three-dimensional position coordinates of the assembled parts while the tape is running, that is, in a state as close as possible to the actual recording / reproducing mode, and at the same time, to measure the tape width. Since the running state such as the direction change can be checked, it can play a large role in studying the mechanism for stably running the tape.

According to the fifth aspect of the present invention, even if the rotation driving means and the rotation angle detecting means of the second aspect of the present invention are not provided,
The three-dimensional position coordinates of the assembled parts can be measured in a non-contact, high-accuracy, high-speed manner irrespective of the posture, size, and presence or absence of rotation.

[0028]

(Embodiment 1) Embodiment 1 will be described with reference to FIGS. Figure 1 is a diagram showing an outline of a position coordinate measurement device in the actual Example 1, FIG. 2 showing the system configuration in the actual Example 1, FIG. 3 is a fragmentary enlarged view of the measurement in the actual Example 1,
Figure 4 is an explanatory view showing a measurement principle in the actual Example 1, FIG. 5 is an explanatory view when changing the angle of irradiation of the laser from FIG. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 1, a measuring object 70 is set on a measuring table 38 having a setting surface 39 and a built-in rotary stage 33. The light projecting side optical system 15 scans the laser 14 with a scanning mirror 17 such as a polygon mirror.
Converges the laser beam 14 scanned by the scanning mirror 17 to a predetermined beam diameter and scans the laser beam 14 in parallel with the installation surface 39.
It is composed of a θ lens 18 and a cover 19. The light receiving side optical system 21 includes a condensing lens 22 that condenses the laser light 14 that is not interrupted by the measuring object 70 among the laser light 14 irradiated from the light projecting side optical system 15, High and Low depending on light intensity
, And a cover 24. The rotation stage 33 rotates the measurement object 70 about the Z axis, and the rotation angle detection device 34,
For example, the rotation angle (γ) is detected by a photoelectric rotary encoder.

In FIG. 2, in the arithmetic unit 49, the light receiving element 23 repeats the high and low signals alternately for a time t (t1, t).
, 2) and a pulse signal generated in synchronization with the rotation of the scanning mirror 17 such as a polygon mirror, and converted into X projection position coordinates (x1, x2, x3,...). . In the calculation processing device 50, the center-to-center distance (L) of the measurement object 70 shown in FIG. 25 based on the rotation angle (γ) and the X projection position coordinates (x1, x2, x3,...)
Is calculated.

Next, the measuring object 70 will be described with reference to FIG. The rotating drum 1 has a magnetic head 2 mounted at the lower end for recording / reproducing with a magnetic tape 13 for recording / reproducing supplied from a cassette (not shown) (not running during actual measurement) wound diagonally. Do. The fixed drum 3 has a lead 4 for regulating the lower end of the magnetic tape 13. Further, a drum unit 5 is constituted by the rotating drum 1 and the fixed drum 3. A vertically extending roller post 6 provided on the tape entry side (hereinafter abbreviated as entry side) regulates the upper end of the running magnetic tape 13, and the inclined post 7 changes the running direction of the magnetic tape 13. Fulfill. The inclined post 8 provided on the exit side of the tape (hereinafter, abbreviated as the exit side) restores the running direction of the magnetic tape 13, and the vertically extending roller post 9 serves to regulate the upper end of the magnetic tape 13. Fulfill. As described above, the measurement object 70 in the present embodiment is constituted by 1 to 9 which are main parts of the mechanism of the VTR. Roller post 6,
The inclined post 7 is held on the entrance side base 10, the roller post 8 and the inclined post 9 are held on the exit side base 11,
It is mounted on the chassis 12 together with the drum unit 5.

The two-dimensional position coordinate measuring device configured as described above will be described by way of an example of a method of measuring the entrance roller post 6, the inclined post 7, and the drum unit 5.

In FIG. 3, the measuring stage 38 is rotated by the rotating stage 33 so that the entrance roller post 6, the inclined post 7, and the drum unit 5 can be measured. At that time, on the light receiving side, the portion where the laser beam 14 is blocked by the measurement target 70 is dark, and the portion where the laser beam 14 is not blocked is bright, so that light boundaries (1) to (8) occur in the X-axis direction, The boundaries of roller post 6 and inclined post 7 are (2), (3) and
(4) and (5). Specifically, the reference height (Z =
In (0), the entrance roller post 6 and the inclined post 7 are irradiated with the laser beam 14. Regarding the inclined post 7, both contact points P0,
The first X projection position coordinates (S0, T0), which are the boundaries (4) and (5) of the light in the X-axis direction described above, are obtained by the arithmetic unit 49 from Q0. Next, in FIG. 5 in which the measuring table 38 is rotated by (γ) degrees by the rotating stage 33 from the state of FIG. 4, the laser beam 14 is applied to the inclined post 7 and the roller post 6 by (γ).
Irradiate from different directions. Then, the two contact points P of the cross-section circle DD0 generated when the inclined post 7 is cut by the laser beam 14
From P0 and QQ0, the second X projection position coordinates (SS0, TT0)
Is calculated by the arithmetic unit 49. And the first X projection position coordinates
From the (S0, T0) and the second X projection position coordinates (SS0, TT0), the X projection position coordinates (U0, UU0) of the center of the inclined post 7 viewed from one direction are approximated by the calculation processing device 50. Desired. Similarly, the X projection position coordinates (W0, WW0) of the center of each of the roller posts 6 as viewed from one direction can be obtained. Therefore, in FIG. 25, the center-to-center distance (L) at the reference height (Z = 0) between the entry-side inclined post 7 and the roller post 6 is a distance (Lx) in the X direction and a distance in the Y direction.
(Ly) and the rotation angle difference (γ) can be obtained by the following (Equation 1).

[0034]

(Equation 1)

Similarly, the center distance (L) between the roller post 6 and the drum unit 5 or between the inclined post 7 and the drum unit 5 can be obtained. Also, the drum unit 5, the outgoing-side inclined post 8 and the roller post 9 can be measured by rotating the drum unit 5 until the contour line can be detected by the light receiving side optical system.

As described above, according to this embodiment, the entrance roller post 6, the inclined post 7, the drum unit 5,
It is possible to measure all center-to-center distances (L) at arbitrary heights of the exit-side inclined post 8 and the roller post 9 without contact.

In this embodiment, the method and apparatus for obtaining two-dimensional position coordinates from two different X-projection position coordinates obtained by rotating the object to be measured have been described. The same measurement can be performed by rotating the light receiving side optical system relative to the object to be measured. Further, in this embodiment, the case where laser irradiation is performed from two different directions has been described. However, if at least two types of different X projection position coordinates can be obtained, a two-dimensional position coordinate can be obtained. Measurement may be performed, in which case the measurement accuracy is further improved.

[0038] (Embodiment 2) Next, FIGS. 1 and 2 for the real施例2, 6 to 8, FIG. 2
This will be described with reference to FIG. Shows a schematic of FIG. 1 is a position coordinate measurement device in the real施例2, shows the configuration of the system in FIG. 2 is a real施例2, FIG. 6 is a fragmentary enlarged view of the measurement in real施例2, FIG. 7 is an explanatory view showing a measurement principle in the real施例2, FIG. 8 is an explanatory view when changing the angle of irradiation of the laser from FIG. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 6, the tension applying device 60
Is for applying a certain tension to the tape 73, and is constituted by a tension post 61 that comes into contact with the tape 73, a base 62 that holds the tension post 61, and a spring 63. As described above, the measurement object 7 in this embodiment is
0 is the main part of the VTR mechanism, 1-9 and 6
0. Further, the tape 73 wound around the measurement object 70 at a fixed angle is, for example, a laser beam 14 such as a base film on which a magnetic substance is not applied.
This is a transparent tape that transmits light, and has substantially the same properties as the magnetic tape 13 for recording original signals in terms of thickness, rigidity, and the like.

The two-dimensional position coordinate measuring device configured as described above will be described with reference to an example of a method for measuring the entrance roller post 6, the inclined post 7, and the drum unit 5.

The tape 73 is wound around each of the measurement objects 70, and a predetermined tension is applied to the tape 73 by the tension applying device 60. Next, the rotation stage 33
Then, the measuring table 38 is rotated so that the entry roller post 6, the inclined post 7, and the drum unit 5 can be measured. At that time, on the light receiving side, the portion where the laser beam 14 is blocked by the measurement target 70 is dark, and the portion where the laser beam 14 is not blocked is bright, so that light boundaries (1) to (12) occur in the X-axis direction,
The boundaries of roller post 6 and inclined post 7 are (6),
(7) and (8), (9). Since the tape 73 transmits the laser beam 14, no boundary between light and dark appears on the light receiving side. More specifically, the entrance roller post 6 and the inclined post 7 are irradiated with the laser beam 14 at the reference height (Z = 0) shown in FIG. Regarding the inclined post 6, the X point explained above is compared with the two contact points P 0 and Q 0 of the cross-section circle D 0 generated when the post is cut by the laser beam 14.
First X projection position coordinates which are the boundaries (8) and (9) of the axial light
(S0, T0) is obtained by the arithmetic unit 49.

Next, in FIG. 8 in which the measuring table 38 is rotated by (γ) degrees by the rotating stage 33 from the state of FIG.
The laser beam 14 is applied to the inclined post 7 and the roller post 6. Then, the second X projection position coordinates (SS0, TT0) are calculated from the two contact points PP0, QQ0 of the sectional circle DD0 generated when the inclined post 7 is cut by the laser beam 14.
Find at 9. Then, the first X projection position coordinates (S0, T0)
And the second X projection position coordinates (SS0, TT0), the X projection position coordinates of the center of the inclined post 7 as viewed from one direction, respectively.
(U0, UU0) is approximated by the calculation processing device 50. Similarly, the X projection position coordinates (W0, WW0) of the center of each of the roller posts 6 as viewed from one direction can be obtained. Therefore, in FIG. 25, the center-to-center distance (L) at the reference height (Z = 0) between the entry-side inclined post 7 and the roller post 6 is the distance in the X direction (Lx), the distance in the Y direction (Ly), and the rotation. From the angle difference (γ), it can be obtained by (Equation 1).

Similarly, the center distance (L) between the roller post 6 and the drum unit 5 or between the tension post 61 and the drum unit 5 can be determined. Also,
The drum unit 5, the outgoing-side inclined post 8 and the roller post 9 can also be measured by rotating them until the contour line can be detected by the light-receiving side optical system.

As described above, according to the present embodiment, any one of the roller post 6, the inclined post 7, the drum unit 5, the inclined post 8, the roller post 9, and the tension post 61 on the tape entrance side can be used. All the center-to-center distances (L) at the height can be measured in a state where the force of the tape 73 to which a non-contact and constant tension is applied is applied.

In this embodiment, the method and apparatus for obtaining two-dimensional position coordinates from two different X-projection position coordinates obtained by rotating the object to be measured have been described. The same measurement can be performed by rotating the light receiving side optical system relative to the object to be measured. Further, in this embodiment, the case where laser irradiation is performed from two different directions has been described. However, if at least two types of different X projection position coordinates can be obtained, a two-dimensional position coordinate can be obtained. Measurement may be performed, in which case the measurement accuracy is further improved.

[0046] (Embodiment 3) Next, the actual施例3 FIGS. 1-2, 7-9, FIG. 2
This will be described with reference to FIG. Figure 1 is a diagram showing an outline of a position coordinate measurement device in the real施例3, shows the configuration of the system in FIG. 2 is a real施例3, FIG. 7 is an explanatory view showing a measurement principle in the real施例3, 8 the illustration of when changing the angle of irradiation of the laser from FIG. 7, FIG. 9 is an enlarged view of an essential part of the measurement in real施例3. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 9, a tape drive 65 drives the tape 73 in the direction of arrow B, and comprises a post 66 and a pinch roller 67. The tape 73 travels in the direction of arrow B in contact with the measurement object 70, so that the tape tension increases toward the downstream side in the traveling direction, and the force applied to the measurement object 70 also increases. As described above, the measurement target 70 in the present embodiment is
Are the main parts of the VTR mechanism, 1-9,60
And 65.

[0048] The two-dimensional position coordinate measurement device in the actual施例 3 configured as described above will be described the measurement methods.

A tape 73 is wrapped around the object 70 to be measured,
A certain tension is applied to the tape 73 by the tension applying device 60. Further, the tape 7 is driven by the driving device 65.
3 is driven in the direction of arrow B. Since the running tape 73 transmits the laser beam 14, no boundary between light and dark appears on the light receiving side. A method for measuring the same as those described in real施例2, the following description thereof will be omitted.

As described above, according to the present embodiment, the roller post 6, the inclined post 7, the drum unit 5,
It is possible to measure all center-to-center distances (L) at arbitrary heights of the outgoing-side inclined post 8, the roller post 9, and the tension post 61 without contact. Measurement object 7
It can be measured in a state in which a force that takes into account the increase in the tension of the running tape 73 due to contact with zero is also applied, that is, in a state as close as possible to the actual recording / reproducing mode.

[0051] (Example 4) will be described with reference to FIG. 10 for real施例4.
Figure 10 is a diagram showing an outline coordinates measuring apparatus in real施例4. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 10, an object 70 to be measured is provided between a light projecting side optical system 151 and a light receiving side optical system 211 as a first optical system. Further, for the first optical system,
A light projecting side optical system 152 and a light receiving side optical system 212 as a second optical system are installed at a position rotated by (γ) degrees, and the light projecting side optical systems 151 and 152 irradiate laser alternately. .
Further, in the calculation processing device 50 in FIG. 2, instead of the rotation angle (γ) detected by the rotation angle detection device 34, the difference (γ) between the installation angles of the already installed first and second optical systems and the second 25 based on the X projection position coordinates (x1, x2, x3,...) Obtained by the first and second optical systems, respectively.
The center distance (L) of 0 is calculated.

The measuring method of the two-dimensional position coordinate measuring device configured as described above will be described.

The object to be measured 70 is irradiated with a laser from the light projecting side optical system 151 of the first optical system to obtain the first X projection position coordinates. Next, the projection-side optical system 1 of the second optical system
A second X projection position coordinate is obtained by irradiating a laser from 52. Hereinafter, regarding the method of obtaining the two-dimensional position coordinates ,
Omitted are the same as those described in the actual Example 1.

As described above, according to the present embodiment, the center-to-center distances (L) of all posts at an arbitrary height can be measured without contact.

In this embodiment, the method and the apparatus for obtaining the two-dimensional position coordinates from the two different X projection position coordinates obtained by installing two optical systems have been described. If the projection position coordinates can be obtained, the two-dimensional position coordinates can be obtained. Therefore, three or more units may be installed for measurement, in which case the measurement accuracy is further improved.

[0057] (Embodiment 5) Next, with reference to FIGS. 11 to 17, the following explains actual施例5. Figure 11 is a diagram showing an outline of a position coordinate measuring apparatus in the real施例5, FIG. 12 shows a system configuration in the real施例FIG. 5, FIG. 13 is a fragmentary enlarged view of the measurement in real施例5, FIG. 14 is an explanatory view showing a measurement principle in the real施例5, FIG. 15 illustrates when changing the angle of irradiation of the laser from FIG. 14, FIG. 16 is an explanatory view showing a relative positional relation of the post, Figure 17 is a reference It is a figure explaining a reference post used for setting of height. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 11, Z-axis stages 30, 31
Are the light projecting side optical system 15 and the light receiving side optical system 21 respectively.
Is always reciprocated by the same amount in the Z-axis direction perpendicular to the installation surface 39, and the movement amount (h) is detected by the Z-axis scale 32. In the calculation processing device 50 shown in FIG. 12, the movement amount (h),
Based on the rotation angle (γ) and the X projection position coordinates (x1, x2, x3,...), The tilt angle (φ), tilt direction (θ), and arbitrary height of the measurement object 70 shown in FIG. Is calculated (L '). Reference posts 68 and 69 shown in FIG. 17 are for setting the light projecting side optical system 15 and the light receiving side optical system 21 to the reference height (Z = 0) of the mechanism, and the reference height (Z = 0). Is a known center-to-center distance (E). Here, the reference post 68 is installed perpendicular to the installation surface 39, and the reference post 69 is installed slightly obliquely.
8 and the roller posts 6 and 9 are larger than the roller posts 6 and 9 and are arranged at a larger interval, so that a conventional contact-type position coordinate measuring device can sufficiently measure the position. Further, the measurement object 70 in the present embodiment includes 1 to 9 which are main parts of the mechanism of the VTR and reference posts 68 and 69.

In the three-dimensional position coordinate measuring device configured as described above, the roller post 6 on the tape entry side is used.
The measurement method of the inclined post 7 and the drum unit 5 will be described as an example.

In FIG. 13, the measurement stage 38 is rotated by the rotation stage 33 so that the entrance roller post 6, the inclined post 7, and the drum unit 5 can be measured. At this time, on the light receiving side, the laser light 14
Is dark in the shaded area and bright in the unshaded area. Light boundaries (1) to (12) occur in the X-axis direction, and the boundaries between the roller post 6 and the inclined post 7 are (2) , (3) and (4), (5). More specifically, a laser beam 14 is applied to the entrance roller post 6 and the inclined post 7 shown in FIG. 14 at a height of (Z1). Regarding the inclined post 7, the two contact points P1, Q1 of the cross-section circle D1 generated when the post 7 is cut by the laser beam 14.
Thus, the first X projection position coordinates (S1, T1), which are the boundaries (4) and (5) of the light in the X-axis direction described above, are obtained. And Z
The axis stages 30, 31 are simultaneously moved sequentially in the Z direction from (Z1) to (Z3), and the X projection position coordinates (S1
To S3, T1 to T3) are obtained by the arithmetic unit 49.

Next, in FIG. 15 in which the measuring table 38 is rotated by (γ) degrees by the rotating stage 33 from the state of FIG. 14, the laser beam 1 is applied to the inclined post 7 and the roller post 6.
4 is irradiated from directions different by (γ) degrees. By irradiating the laser beam 14 while simultaneously moving the Z stages 30 and 31 sequentially from (Z3) to (Z1) below the Z axis, the X projection position coordinates (SS3) of the second contour of the inclined post 7 are obtained. ~ S
S1, TT3 to TT1) are obtained by the arithmetic unit 49. Finally, the X projection position coordinates (S1 to S3, T1 to T3) of the first contour and the X projection position coordinates (SS1 to SS3, TT1 to
TT3), the X projected position coordinates ｛U (U1 to U3) and UU (UU1 to U3) of the center line of the inclined post 7 viewed from one direction, respectively.
UU3)｝ is approximated by the calculation processing device 50. Therefore, in FIG. 16, the inclination angle of the entry-side inclination post 7 is shown.
(φ7) and the inclination direction (θ7) can be obtained by the following equation (Equation 2).

[0062]

(Equation 2)

Similarly, the inclination angle (φ) and the inclination direction (θ) of the roller post 6 and the drum unit 5 can be obtained at the same time. Further, the center-to-center distance (L ') at the height (Z1) between the roller post 6 and the inclined post 7 can be obtained by the following equation (Equation 3).

[0064]

(Equation 3)

Further, the center-to-center distance (Lα) at an arbitrary height (α) can be obtained by the following equation (Equation 4).

[0066]

(Equation 4)

Next, in order to obtain the center-to-center distance (L) at the reference height (Z = 0) which is the design center, the reference posts 68 and 69 measured simultaneously with the roller post 6, the inclined post 7 and the drum unit 5 are used. With reference height (Z = 0)
The difference (H) from (Z1) is obtained. It is known that the distance between the centers of the reference posts 68 and 69 at the reference height (Z = 0) is (E). The distance between the centers at (Z1) is (E ') based on the measurement of the laser beam 14. That is, since the inclination angle (φ) and the inclination direction (θ) of the reference posts 68 and 69 have already been calculated by the calculation processing device 50, conversely, the center-to-center distance becomes (E).
And the difference (H) between (H1) and (Z1).
Therefore, the height (α = Z1 +
By substituting the numerical value of (H) into (Equation 4) and calculating,
Reference height of entrance roller post 6 and inclined post 7
The center-to-center distance (L) at (Z = 0) is found. Also, the drum unit 5, the outgoing side inclined post 8 and the roller post 9
It can be measured by rotating it until the contour can be detected.

As described above, according to the present embodiment, all the inclination angles (φ) of the roller post 6, the inclined post 7, the drum unit 5, the inclined post 8, and the roller post 9 on the tape entrance side of the tape. , The inclination direction (θ) and the center-to-center distance (L) at the reference height (Z = 0) as the design center can be measured three-dimensionally without contact.

In this embodiment, the method and apparatus for obtaining three-dimensional position coordinates from two different X-projection position coordinates obtained by rotating the object to be measured have been described. The same measurement can be performed by rotating the light receiving side optical system relative to the object to be measured. Further, in this embodiment, the case where laser irradiation is performed from two different directions has been described. However, if at least two types of different X projection position coordinates can be obtained, three-dimensional position coordinates can be obtained. Measurement may be performed, in which case the measurement accuracy is further improved.

[0070] (Embodiment 6) Next, FIGS. 11-12 for real施例6, 16 to 2
This will be described with reference to FIG. Figure 11 is a diagram showing an outline of a position coordinate measuring apparatus in the real施例6, FIG. 12 shows the configuration of a system in the real施例6, FIG. 18 is a fragmentary enlarged view of the measurement in real施例6, FIG. 19 is an explanatory view showing a measurement principle in the real施例6, FIG. 20 is an explanatory view when changing the angle of irradiation of the laser from FIG. 19. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 18, the tension applying device 60
Is for applying a certain tension to the tape 73, and includes a tension post 61 that comes into contact with the tape 73, a base 62 that holds the tension post 61, and a spring 63.
It consists of. As described above, the measurement target 70 in the present embodiment is constituted by 1 to 9 and 60 which are the main parts of the mechanism of the VTR. The tape 73 wound around the measurement object 70 at a fixed angle is a transparent tape that transmits the laser light 14 such as a base film to which no magnetic material is applied, and has a thickness greater than that of a magnetic tape that records an original signal. They have almost the same properties in terms of rigidity, etc.

In the three-dimensional position coordinate measuring device configured as described above, the roller post 6 on the tape entry side is used.
The measurement method of the inclined post 7 and the drum unit 5 will be described as an example.

The tape 73 is wound around each of the measurement objects 70, and a predetermined tension is applied to the tape 73 by the tension applying device 60. Next, the rotation stage 33
Then, the measuring table 38 is rotated so that the roller post 6, the inclined post 7, and the drum unit 5 on the tape entry side (hereinafter, abbreviated as the entry side) can be measured. At that time, on the light receiving side, the portion where the laser beam 14 is blocked by the measurement target 70 is dark, and the portion where the laser beam 14 is not blocked is bright.
Light boundaries (1) to (16) occur in the axial direction, and the boundaries between the roller post 6 and the inclined post 7 are (6), (7) and (8), (9), respectively.
Becomes Since the tape 73 transmits the laser beam 14, no boundary between light and dark appears on the light receiving side.

Specifically, the laser beam 1 is applied to the entrance roller post 6 and the inclined post 7 shown in FIG.
Irradiate 4. Regarding the roller post 6, the two contact points P1 and Q1 of the cross section circle D1 generated when the roller post 6 is cut by the laser beam 14.
Thus, the first X projection position coordinates (S1, T1), which are the boundaries (8) and (9) of the light in the X-axis direction described above, are obtained. further,
Simultaneously move the Z-axis stages 30, 31 in the Z direction (Z2) to (Z3)
, And the X projection position coordinates {(S2, S3), (T2, T3)} of the first contour are obtained by the arithmetic unit 49.

Next, from the state shown in FIG.
In FIG. 20 in which the measuring table 38 is rotated by (γ) degrees, the laser beam 1 is applied to the inclined post 7 and the roller post 6.
Irradiate 4. Then, simultaneously move the Z stages 30 and 31 to Z
By irradiating the laser beam 14 while sequentially moving the laser beam 14 downward from the axis (Z3) to (Z1), the X-projection position coordinates ｛(SS3 to SS1) and (TT3 to T1) of the second contour of the inclined post 7 are obtained.
T1)｝ is obtained by the arithmetic unit 49. Finally, the X projection position coordinates {(S1 to S3), (T1 to T3)} of the first contour and the second
X projection position coordinates 輪 郭 (SS1 to SS3), (TT1 to
TT3)}, the X projection position coordinates {U (U1 to U3), UU (UU1 to
UU3)｝ is approximated by the calculation processing device 50. Therefore, in FIG. 16, the inclination angle of the entry-side inclination post 7 is shown.
(φ7) and the inclination direction (θ7) can be obtained by (Equation 2).

Similarly, the inclination angle (φ) and the inclination direction (θ) of the roller post 6, the drum unit 5, the tension post 61 and the like can be obtained. The center distance (L ') between the roller post 6 and the inclined post 7 at the height (Z1).
Can be obtained by (Equation 3).

Further, the center-to-center distance (Lα) of the post at an arbitrary height (α) can be obtained by (Equation 4).

[0078] Further, the distance between the centers of the reference height is a design center (Z = 0) (L) can be obtained in a similar manner to that shown in real施例4,5. Also, the drum unit 5, the inclined post 8 and the roller post 9 on the tape output side (hereinafter, abbreviated as the output side) can be measured by rotating until the contour line can be detected.

Therefore, the roller post 6 on the entry side
The inclination post 7, the drum unit 5, the exit-side inclination post 8, the roller post 9, and the tension post 61 at all inclination angles (φ), inclination directions (θ), and reference heights (Z = 0) which are design centers. The center-to-center distance (L) can be measured in a state where a force is applied by the tape 73 to which a three-dimensional non-contact and constant tension is applied.

In this embodiment, the method and the apparatus for obtaining the three-dimensional position coordinates from two different X-projection position coordinates obtained by rotating the object to be measured have been described. The same measurement can be performed by rotating the light receiving side optical system relative to the object to be measured. Further, in this embodiment, the case where laser irradiation is performed from two different directions has been described. However, if at least two types of different X projection position coordinates can be obtained, three-dimensional position coordinates can be obtained. Measurement may be performed, in which case the measurement accuracy is further improved.

[0081] (Embodiment 7) Next, FIGS. 11-12 for real施例7, 16 to 1
7, and will be described with reference to FIGS. Figure 11 is a diagram showing an outline of a position coordinate measuring apparatus in the real <br/>施例7, FIG. 1
2 shows a system configuration in the real施例FIG. 7, FIG. 19
Are charts showing the measurement principle in real施例7, FIG. 20 is an explanatory view when changing the angle of irradiation of the laser from FIG. 19, FIG. 21 is an enlarged view of the measurement in real施例7. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 21, the tape driving device 65 is
The tape 73 is driven in the direction of arrow B, and includes a post 66 and a pinch roller 67. The tape 73 travels in the direction of arrow B in contact with the measurement object 70, so that the tape tension increases toward the downstream side in the traveling direction, and the force applied to the measurement object 70 also increases. As described above, the measurement object 7 in this embodiment is
0 is the main part of the mechanism of the VTR, 1-9,6
0, 65 and reference posts 68, 69.

The measuring method of the three-dimensional position coordinate measuring device configured as described above will be described.

A tape 73 is wrapped around the measuring object 70,
A certain tension is applied to the tape 73 by the tension applying device 60. Further, the tape 7 is driven by the driving device 65.
3 is driven in the direction of arrow B. Since the running tape 73 transmits the laser beam 14, no boundary between light and dark appears on the light receiving side. A method for measuring the same as those described in the real施例6, the following description thereof will be omitted.

As described above, according to this embodiment, the inclination angle of the roller post 6, the inclined post 7, the drum unit 5, the inclined post 8, the roller post 9, and the tension post 61 on the tape entry side (the tape entry side). φ), tilt direction
(θ) and the center-to-center distance (L) at the reference height (Z = 0), which is the design center, can be measured three-dimensionally without contact. Further, a state in which a force that takes into account the increase in the tension of the tape 73 during running due to contact with the measurement target 70 is applied,
That is, it is possible to perform measurement in a state as close as possible to the actual recording / reproduction mode.

[0086] (Example 8) will be described below with reference to FIG. 22 for real施例8.
Figure 22 is a diagram showing an outline of a position coordinate measuring apparatus in the real施例8. Note that the same reference numerals are given to those already described, and detailed description thereof will be omitted.

In FIG. 22, an object 70 to be measured is provided between a light projecting side optical system 151 and a light receiving side optical system 211 as a first optical system. Also, the Z-axis stage 301,
Reference numeral 311 reciprocates the light emitting side optical system 151 and the light receiving side optical system 211 up and down by the same amount at all times, and detects the movement amount (h) by the Z-axis scale 321. Further, a light projecting side optical system 152 and a light receiving side optical system 212 as a second optical system are installed at a position rotated by (γ) degrees with respect to the first optical system. Also, the Z-axis stages 302 and 312
Are the light emitting side optical system 152 and the light receiving side optical system 2 respectively.
12 is always reciprocated up and down by the same amount, and the movement amount (h) is detected by the Z-axis scale 322. Projection side optical system 1
51 and 152 irradiate the laser alternately. Also, in the calculation processing device 50 in FIG. 12, instead of the rotation angle (γ) detected by the rotation angle detection device 34, the difference (γ) between the installation angles of the already installed first and second optical systems and the second 1st, 2nd
X projection position coordinates (x1, x2, x
3,...), The inclination angle (φ), the inclination direction (θ), and the center-to-center distance at an arbitrary height of the measurement object 70 shown in FIG.
(L ') is calculated.

The measuring method of the three-dimensional position coordinate measuring device configured as described above will be described.

The object to be measured 70 is irradiated with a laser from the light projecting side optical system 151 of the first optical system to obtain the first X projection position coordinates. Next, the projection-side optical system 1 of the second optical system
A second X projection position coordinate is obtained by irradiating a laser from 52. Hereinafter, regarding the method of obtaining the three-dimensional position coordinates ,
Omitted are the same as those described in the real施例5.

As described above, according to the present embodiment, the inclination angles (φ) and inclination directions (θ) of all the posts and the center-to-center distance (L) at the reference height (Z = 0), which is the design center, are set. Can be measured three-dimensionally in a non-contact manner.

In this embodiment, the method and apparatus for obtaining three-dimensional position coordinates from two different X-projection position coordinates obtained by installing two optical systems have been described. If the projection position coordinates are obtained, the three-dimensional position coordinates can be obtained. Therefore, three or more units may be installed for measurement, in which case the measurement accuracy is further improved.

Although the number of posts is limited in this embodiment, it goes without saying that other posts can be measured in the same manner. In addition, since the measurement can be performed without depending on the inclination angle of the post, the measurement accuracy does not deteriorate if the inclination angle is increased as in the conventional contact type position coordinate measuring device. In addition, even a post having a small diameter and which bends when a load is applied thereto can be measured accurately because it is a non-contact type.

Since the present embodiment is smaller in size than a conventional contact type position coordinate measuring device, it can be used for inspection of assembly accuracy performed on an assembly adjustment line of a VTR mechanism.

In this embodiment, the object to be measured is a VTR.
Although the measurement in the case of the mechanism component described above has been described, it is needless to say that the measurement is not limited to this and can be performed on other objects.

Although two reference posts are used for setting the reference height, other methods such as measuring a magnetic head and setting the height may be used.

[0096]

[0097]

[0098]

[0099]

[0100]

[0101]

As described above, the first aspect of the present invention provides
A plurality of measurement steps of irradiating a measurement target while moving a laser beam scanning in a height direction with a predetermined beam diameter from a plurality of different directions and parallel to one plane; and a plurality of different measurement steps Calculating a plurality of projection position coordinates different from a cross section generated when the laser beam is cut by a laser beam; and calculating a plurality of different projection position coordinates and an angle difference in a plurality of directions different from the cross section obtained in the calculation step and a height in a plurality of measurement steps. A calculation processing step for obtaining the three-dimensional position coordinates of the measuring object based on the movement amount, so that the three-dimensional position coordinates of the assembled parts are non-contact and highly accurate irrespective of the posture, size, presence or absence of rotation, etc. , Can be measured at high speed.

[0102] The invention of claim 2, wherein the light receiving side optical system having a light projecting side optical system for irradiating a laser beam in parallel to scanning a predetermined beam diameter and a plane, a light receiving element for receiving the laser beam And vertical drive means for relatively moving the object to be measured or any of the light-emitting side optical system and the light-receiving side optical system so that the laser light can be irradiated at a plurality of heights of the object to be measured; Moving amount detecting means for detecting the vertical moving amount of the object, and relatively changing one of the measuring object or the light projecting side optical system and the light receiving side optical system in order to change the irradiation angle of the laser beam to the measuring object. Rotation drive means for rotating, rotation angle detection means for detecting the rotation angle of the rotation drive means, and calculation means for calculating the different projection position coordinates of the measurement target by laser light irradiation from a plurality of different directions from the output of the light receiving element; and ,different Calculation means for calculating the three-dimensional position coordinates of the object to be measured based on the projected position coordinates of the number, the rotation angle, and the vertical movement amount, so that the assembled parts can be assembled regardless of the posture, size, and presence or absence of rotation. Non-contact, high-accuracy, high-speed measurement of three-dimensional position coordinates is possible.

According to a third aspect of the present invention, there is provided the component according to the second aspect of the present invention, further comprising a tension applying means for applying a tension to the tape that transmits the laser beam and contacts the object to be measured. The three-dimensional position coordinates can be measured in a state where the tape tension is applied to the.

Further, according to a fourth aspect of the present invention, in the third aspect of the present invention, a tape driving means for moving the tape relative to the object to be measured is further provided, so that the tape is running, that is, in the actual recording / reproducing mode. It is possible to measure the three-dimensional position coordinates of the assembled parts in a state that is as close as possible, and at the same time, it is possible to check the running state such as fluctuation in the tape width direction, so study the mechanism to run the tape stably. Can play a big role.

According to a fifth aspect of the present invention, there is provided a light emitting side optical system for irradiating a laser beam having a predetermined beam diameter and scanning in parallel with one plane, and a light receiving side optical system having a light receiving element for receiving the laser beam. A vertical driving means for relatively moving the object to be measured, or one of the light emitting side optical system and the light receiving side optical system so that the laser light can be irradiated at a plurality of heights of the object to be measured; A plurality of moving amount detecting means for detecting the amount of vertical movement, and a plurality of laser optical systems composed of a light emitting side optical system and a light receiving side optical system are installed at positions separated by a certain angle around the object to be measured, and are different from each other. A calculating means for calculating a plurality of different projection position coordinates of the measurement object by the laser light irradiation from a plurality of directions from the outputs of the plurality of light receiving elements; a plurality of different projection position coordinates and an installation angle difference between the plurality of laser optical systems; Depending on the amount of movement By having a calculation processing means for calculating a three-dimensional position coordinates of the measurement object, without providing a rotation angle detecting means and the rotation driving means of the invention of claim 2, wherein,
The three-dimensional position coordinates of the assembled parts can be measured in a non-contact, high-accuracy, high-speed manner irrespective of the posture, size, and presence or absence of rotation.

[Brief description of the drawings]

Shows a schematic of a position coordinate measurement device of FIG. 1 the actual Example 1 from 3

Figure 2 illustrates a configuration of a system 3 from the actual Example 1

Enlarged view at the time of measurement in FIG. 3 is a real Example 1

Explanatory view showing a measurement principle in Figure 4 Real Example 1

FIG. 5 is an explanatory diagram when the laser irradiation angle is changed from FIG. 4;

[6] enlarged view at the time of measurement in the real施例2

Figure 7 is an explanatory view showing a measurement principle in the real施例2,3

FIG. 8 is an explanatory diagram when the laser irradiation angle is changed from FIG. 7;

[9] enlarged view at the time of measurement in the real施例3

Figure 10 shows a schematic of a position coordinate measurement device in the real施例4

11 is a diagram showing an outline of a position coordinate measurement device in the real施例5 7

12 is a diagram showing a configuration of a system from the real施例5 7

[13] enlarged view at the time of measurement in the real施例5

Figure 14 is an explanatory view showing a measurement principle in the real施例5

15 is an explanatory diagram when the laser irradiation angle is changed from FIG.

FIG. 16 is an explanatory diagram showing a relative positional relationship between posts.

FIG. 17 is a diagram illustrating a reference post used for setting a reference height.

FIG. 18 is a main part enlarged view at the time of measurement in the real施例6

Figure 19 is an explanatory view showing a measurement principle in the real施例6,7

20 is an explanatory diagram when the laser irradiation angle is changed from FIG. 19;

FIG. 21 is a main part enlarged view at the time of measurement in the real施例7

FIG. 22 shows a schematic of a position coordinate measurement device in the real施例8

FIG. 23 is an enlarged view of a main part of a conventional contact type position coordinate measuring device.

FIG. 24 is an explanatory diagram showing a measurement principle.

FIG. 25 is an explanatory diagram showing a relative positional relationship between posts.

[Explanation of symbols]

Reference Signs List 5 Drum unit 6 Inlet-side roller post 7 Inlet-side inclined post 8 Outlet-side inclined post 9 Outlet-side roller post 13 Magnetic tape 14 Laser beam 15, 151, 152 Projecting side optical system 21, 211, 212 Receiving side optical System 30, 31, 301, 302, 311, 312 Z axis stage 32 Z axis scale 33 Rotation stage 34 Rotation angle detection device 42 Probe 49 Arithmetic device 50 Calculation processing device 60 Tension applying device 65 Tape drive device 68, 69 Reference post 70 Measurement object 73 Transparent tape

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01B 11/00-11/30 102 G11B 15/61

Claims (5)

(57) [Claims] 1. A plurality of measurement steps of irradiating a measurement object with a laser beam that scans in a predetermined beam diameter and parallel to one plane from a plurality of different directions while moving in a height direction.
An operation step of obtaining a plurality of projection position coordinates different from a cross section generated when the measurement target is cut by the laser light in the plurality of different measurement steps; and the different plurality of projection position coordinates obtained in the operation step. A position coordinate measurement method, comprising: a calculation processing step of obtaining three-dimensional position coordinates of the measurement object based on the angle differences in the plurality of different directions and the height movement amounts in the plurality of measurement steps. 2. A light projecting side optical system for irradiating a laser beam having a predetermined beam diameter and scanning in parallel with a plane, a light receiving side optical system having a light receiving element for receiving the laser beam, Vertical drive means for relatively moving any one of the measurement object or the light projecting side optical system and the light receiving side optical system so as to be able to irradiate the object at a plurality of heights, and the vertical drive means Movement amount detection means for detecting the amount of vertical movement, and any one of the measurement object, or the light projecting side optical system and the light receiving side optical system in order to change the irradiation angle of the laser beam to the measurement object Rotation driving means for relatively rotating the rotation driving means, rotation angle detection means for detecting the rotation angle of the rotation driving means, and receiving the different projection position coordinates of the measurement object by the laser light irradiation from a plurality of different directions. element Position coordinates, comprising: calculation means for obtaining from the output; and calculation processing means for obtaining three-dimensional position coordinates of the measurement object from the plurality of different projection position coordinates, the rotation angle, and the vertical movement amount. measuring device. 3. A tension applying means for applying a tension to a tape which transmits a laser beam and which comes into contact with an object to be measured, wherein the calculation processing means comprises a three-dimensional position of the object to which the tape to which the tension is applied comes into contact. The position coordinate measuring device according to claim 2 , wherein coordinates are obtained. 4. The apparatus according to claim 1, further comprising a tape driving means for moving the tape relatively to the object to be measured, wherein the calculation processing means obtains three-dimensional position coordinates of the object to be measured while the tape is running. 3. The position coordinate measuring device according to 3 . 5. A light projecting side optical system for irradiating a laser beam having a predetermined beam diameter and scanning in parallel with one plane, a light receiving side optical system having a light receiving element for receiving the laser beam, Vertical drive means for relatively moving any one of the measurement object or the light projecting side optical system and the light receiving side optical system so as to be able to irradiate the object at a plurality of heights, and the vertical drive means A plurality of moving amount detecting means for detecting a vertical moving amount, and a plurality of laser optical systems including the light projecting side optical system and the light receiving side optical system are provided at positions separated by a predetermined angle around the object to be measured. Calculating means for obtaining, from outputs of the plurality of light receiving elements, a plurality of different projection position coordinates of the measurement object by irradiating the laser light from a plurality of different directions; and the different plurality of projection position coordinates and the plurality of lasers. light System position coordinate measuring apparatus characterized by comprising a calculation processing means for calculating a three-dimensional position coordinates of the measurement target installation angle difference between the said vertical movement of.