JP3290470B2 - Tilt adjustment device for rotating object holder - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called tilt adjustment for adjusting the direction of an axis of a held rotating object holder in a predetermined direction in a rotating object holder such as a chuck or a collet.

[0002]

2. Description of the Related Art Conventionally, a device for holding a rotating object holder such as a chuck or a collet has been mainly composed of a base attached to an air spindle or the like and a holder for holding the rotating object holder.

[0003]

In the holding device for the rotating object holder, in order to secure the inclination of the axis of the holder with respect to the base in a predetermined direction, the components, in particular, the contact engagement surface between the base and the holder are precisely formed. The finish was extremely high and the assembly was performed with high accuracy. For this reason, there was a problem that processing and assembly became complicated. Similarly, when the inclination of the axis of the holder with respect to the base side deviates from a predetermined direction due to use, the inclination of the axis of the holder with respect to the base is adjusted in a predetermined direction by disassembling, reworking, and reassembling the constituent members. To secure again. However, these are very complicated and time-consuming operations, resulting in a problem that the cost is increased.

In addition, in assembling and reassembling, there is a problem that much time and labor are required to bring the holder into a predetermined inclined state with respect to the base side. The present invention has been made in view of the above circumstances. One of the reasons is that, while obtaining an arbitrary inclination of the holder with respect to the base side, the processing and assembly of the constituent members are simple and the cost is consequently low. Inexpensively, the second object of the present invention is to provide an apparatus for adjusting the inclination of a rotating object holder which can easily and quickly bring a holder to a predetermined inclination state with respect to a base side during assembly and reassembly.

[0005]

[MEANS FOR SOLVING THE PROBLEMS] To achieve the above object
In addition, the device for adjusting the inclination of the rotating object holder according to the present invention is
Rotating object holder including a tool, a holder, and a spacer
The holder and / or the base.
The engagement surface with the spacer is recessed around the holder axis.
Formed on a surface or a convex surface, wherein the spacer comprises the holder and
And / or the holder and / or the base are provided on an engagement surface with the base.
A convex or concave surface corresponding to the concave or convex surface of
The space between the engagement portion of the base with the spacer and the space of the holder
Between the corresponding engagement portions of the spacer,
They are separated from each other in direct contact with each other,
Several spaces sliding radially with respect to the axis of the holder
And each of the spacers is a holder
And slide in the radial direction with respect to the axis of
By adjusting the feed position in the radial direction,
The feature is to adjust the inclination of the axis of the holder in a predetermined direction
And Here, the holder is opposed to the base.
And holds the rotating object holder. In addition,
The spacer is interposed between the base and the holder, and
Keep the distance between the base and holder constant. Means for feeding the spacer in the radial direction with respect to the axial direction include a method using a feed screw, a method using a piezoelectric element, and the like. What
In the present invention, the detecting means, the output means, the control
It is preferable to provide an arithmetic unit. Where
The detecting means is substantially fixed to the base, and
The inclination of the axis of the holder with respect to the axis is detected. In addition,
The output means independently connects each of the spacers to the half.
Send in the radial direction. The arithmetic control unit is configured to detect
Holder with respect to the base
The output means such that the inclination of the axis of
Is calculated and controlled.

[0006]

In one aspect of the invention, when the spacer is fed in the radial direction of the base, the spacer moves according to the concave or convex surface of the base and / or the holder, and the distance between the base and the holder changes. In the second aspect, the plurality of spacers are automatically fed in a radial direction with respect to the axis of the holder so that the axis of the holder has a predetermined inclination with respect to the base side.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in FIGS. However, the present invention is not limited by the embodiment. As shown in FIGS. 1 to 6, the tilt adjusting device 1 for a rotating object holder according to one aspect of the present invention includes a holder 7, a base 8, and six spacers 9. Further, the tilt adjusting device 1 for the rotating object holder is provided with means for centering the rotating object holder. That is, as shown in FIGS. 1 to 6, the board 2, the plate members 3 and 4, and the operating bodies 5 and 6 are provided. Cross roller guides 10 and 11 are interposed between the substrate 2 and the plate member 3, and the plate member 3 slides with respect to the substrate 2 in the direction of the arrow X which is a direction orthogonal to the axis of the rotating object holder to be centered. It is possible.

The substrate 2 has a recess 12 extending in the direction of arrow Y perpendicular to the axis of the rotating object holder to be centered and also perpendicular to the direction of arrow X, and a female screw hole 13 communicating with the recess 12. The plate member 3 is formed with a groove 14 extending at an angle of 3 ° from the direction of the arrow Y in a portion facing the recess 12. Then, between the substrate 2 and the plate member 3,
An operating body 5 that engages with the concave portion 13 and the groove portion 14 and that is screw-fed in the arrow Y direction is interposed. That is, the operating body 5
Base 15 that fits into recess 12 and is slidable in the direction of arrow Y
And a convex portion 16 which is fitted in the groove portion 14 and is slidable in a direction of an angle of 3 ° in the arrow Y direction, and a through hole 18 into which a screw feed member 17 screwed into the female screw through hole 13 is inserted and locked. Is formed.

Therefore, when the operating member 5 is screwed in the direction of the arrow Y by operating the screw feed member 17, the substrate 2 and the plate member are increased by the product of the amount of the feed and the tangent of an angle of 3 °. 3 relatively slides in the direction of arrow X.
If one pitch of the screw feed member 17 is 0.5 mm, and the minimum angle at which most workers can surely rotate manually is 5 °, the plate member 3 is moved in the direction of arrow X with respect to the substrate 2 in the minimum direction. The unit can be slid at the distance shown below. 0.5 mm × 5 ゜ ÷ 300 ゜ × tan3 ゜ ≒ 0.36 μm A clamping means is interposed between the substrate 2 and the plate member 3.
When the position of the plate member 3 in the direction of the arrow X is obtained with respect to the substrate 2 by operating the screw feed member 17, that is, when the centering in the direction of the arrow X is obtained, the position is held. The clamping means is formed on the base plate 2 with a block 19 fixed to the plate member 3 by screws.
And a female screw hole 2 formed in the substrate 2.
1 and is mainly constituted by a male screw rod 22 that abuts on the block 19 and regulates the position of the block 19.

Further, cross roller guides 23 and 24 are interposed between the plate member 3 and the plate member 4, and the plate member 4 is
In contrast to this, it is slidable in an arrow Y direction which is a direction orthogonal to the axis of the rotating object holder to be centered and also orthogonal to the arrow X direction. The plate member 3 has a concave portion 25 extending in the arrow X direction and a female screw through hole 2 communicating with the concave portion 25.
6 is formed, and a groove 27 is formed in the plate member 4 so as to extend at an angle of 3 ° with respect to the arrow X direction at a portion facing the concave portion 25. Then, between the plate member 3 and the plate member 4,
An operating body 6, which engages with the groove 5 and the groove 27 and is screwed in the direction of the arrow X, is interposed. That is, the operating body 6 is
5 and a convex portion 29 that fits in the groove 27 and slides in a direction of an angle of 3 ° in the arrow X direction, and is screwed into the female screw through hole 26. A through hole 31 through which the screw feed member 30 is inserted is formed.

Accordingly, when the screw 6 is fed in the direction of the arrow X by operating the screw feed member 30, the feed amount is
The plate member 3 and the plate member 4 relatively move in the direction of arrow Y by the product of the tangent of the angle ゜. If one pitch of the screw feed member 30 is 0.5 mm and the minimum angle at which most workers can surely rotate manually is 5 °,
The plate member 4 can be slid with respect to the plate member 3 in the direction indicated by the arrow Y at the minimum unit distance shown below. 0.5 mm × 5 ゜ ÷ 360 ゜ × tan3 ゜ ≒ 0.36 μm A clamping means is interposed between the plate member 3 and the plate member 4, and the screw feed member 30 operates the plate member 4 so that To obtain a position in the direction of arrow Y, ie, arrow Y
When the centering in the direction is obtained, the position is maintained. The clamping means is screwed into a block 32 fixed to the plate member 4 by screwing, a concave portion 33 formed in the plate member 3 for accommodating the block 32, and a female screw hole 34 formed in the plate member 3. It mainly consists of a screw rod (not shown) that abuts and regulates the position of the block 32.

In the apparatus 1 for adjusting the inclination of the rotating object holder, the holder 7 holds the rotating object holder such as a chuck or a collet. The base 8 is formed with a flange portion 35 extending in the axial direction on the outer periphery of the donut plate, and is configured to be screwed and fixed to the plate member 4 together with the holder 7. The surface of the base 8 on the plate member 4 side is a flat surface. The surface of the base 8 opposite to the plate member 4 side is the holder 7
Are formed on the concave surface 36 with the axis of the center as the center. Six spacers 9 are interposed between the holder 7 and the base 8 facing each other. When the spacer 9 is arranged at a fixed position on the same circumference, the surface of the spacer 9 facing the base 8 is formed as a convex surface 37 corresponding to the concave surface 36 of the base 8. Both surfaces of the holder 7 and the spacer 9 facing the holder 7 are formed flat.

When the spacers 9 are arranged at fixed positions on the same circumference, they can be screwed in the radial direction with respect to the axis of the holder 7 independently of each other. That is, each spacer 9 is formed with a female screw portion 38 which advances in the radial direction with respect to the axis of the holder 7, and the feed screw 40 engaged with the hole 39 formed in the flange portion 35 of the base 8 is formed in the female screw portion 38. It is screwed. The tilt adjusting device 1 for the rotating object holder is configured as described above. Therefore, when the feed screw 40 is rotated, the spacer 9 is screw-fed in the radial direction of the base 8, and the spacer 9 moves along the concave surface of the base 8, and the spacer 8 intersects the base 8 where the spacer 9 is interposed. The distance from the holder 7 changes.
Since one plane is determined by three points, the base 8 of the holder 7
Is adjusted by adjusting the inclination of a plane determined by at least three spacers 9 that separate the holder 7 and the base 8 out of the spacers 9 interposed between the holder 7 and the base 8. The inclination of the holder 7 with respect to the base 8 can be adjusted by adjusting the amount of feed of the holder 9 with respect to the axis.

As shown in FIG. 7, the rotary adjusting device 1a of the rotating object holder according to the second invention has the same main configuration as the tilt adjusting device 1 of the rotating object holder. The tilt adjusting device 1a of the rotating object holder further detects the tilt of the holder 7a with respect to the base 8a, and based on the detection result, the holder 7a
There is provided means for automatically feeding the six spacers 9a such that the axis of the rotating object holder is oriented in the same direction as the axis of the rotating object holder. That is, the tilt adjusting device 1a for the rotating object holder includes a detecting means for detecting the tilt of the holder 7a with respect to the base 8a, and the six spacers 9a.
output means for sending radially with respect to the axis of a, and a holder 7 for the base 8a side based on a signal from the detecting means.
An operation control means 45a is provided for calculating and controlling the output amount of the output means so that the inclination of the axis of a coincides with the predetermined direction.

The detecting means for detecting the inclination of the holder 7a with respect to the base 8a is disposed on a circle substantially centered on the axis of the holder 7a similarly to the spacer 9a, and detects the displacement in the radial direction with respect to the axis of the holder 7a. It is mainly composed of six displacement detectors 41a to be detected, and a holding fixture 42a fixed to the substrate 2a and holding the displacement detectors 41a at fixed positions. Output means for sending the spacer 9a in the radial direction with respect to the axis of the holder 7a is rotatably supported by being inserted through a female screw portion 38a formed on the spacer 9a and a flange portion 35a of the base 8a. A feed screw 40a, a geared motor 43a that outputs a rotational force, an output shaft of the geared motor 43a, and a feed screw 4a.
It is mainly composed of a joint 44a for connecting Oa.

The operation control means 45a includes a displacement detector 41a
, That is, six displacement detectors 4
The direction and degree of inclination of the holder 7a with respect to the base 8a based on the six distances from the specific position of the substrate 2a on the base 8a side to the holder 7a (substantially the axis of the holder 7a) determined by 1a. And an arithmetic unit (not shown) for converting the inclination into an inclination with respect to the base 8a side of the axis of the holder 7a. The arithmetic control unit 45a should further cause the arithmetic unit to output the position of each spacer 9a so that the inclination of the axis of the holder 7a matches the inclination of the axis of the base 8a, that is, the geared motor 43a, based on the operation result. Calculate the quantity. The arithmetic control unit 45a is provided with a control unit (not shown) for controlling the output of the geared motor 43a by receiving an amount to be output from the geared motor 43a from the arithmetic unit.

The tilt adjusting device 1a for the rotating object holder is configured as described above. Therefore, when the holder 7a holds a chuck (not shown), which is a rotating object holder, the detection means, the output means, and the arithmetic control means 45a are operated. The displacement detector 41a detects the position of each part of the holder 7a which is in contact with the substrate 2a on the base 8a side, and sends the detection result to the arithmetic control means 45a by a signal. The calculation unit of the calculation control means 45a calculates the direction and how much the axis of the holder 7a is inclined with respect to the base 8a based on the detection result. Subsequently, the control unit of the arithmetic control unit 45a obtains the position of each spacer 9a in which the axis of the holder 7a should be in the original direction, that is, the axis of the holder 7a should be in the direction orthogonal to the base 8a side. The output of the geared motor 43a is controlled. That is, the control unit of the arithmetic control unit 45a
A control signal is sent to the geared motor 43a in order to adjust the amount of feed of the spacer 9 with respect to the axis of the holder 7.

The output means receives a signal from the control section of the arithmetic control means 45a and outputs it in accordance with the signal. That is, when each geared motor 43a outputs, the connected feed screw 40a rotates, and each spacer 9a is sent in the radial direction with respect to the axis of the holder 7a. As a result, the inclination of the holder 7a with respect to the base 8a is reduced. A desired inclination is obtained, so that the axis of the holder 7a obtains a position orthogonal to the base 8a side. Therefore, it is not difficult to obtain a position where the axis of the holder 7a is orthogonal to the base 8a side depending on the degree of finishing of each member, and the axis of the holder 7a is set to a position orthogonal to the base 8a side. This is simple and can be performed within a short time. In order to obtain the stability of the holders 7 and 7a, the tilt adjusting devices 1 and 1a for the rotating object holder have six spacers 9 between the holder 7 and the base 8 and six spacers 9 between the holder 7a and the base 8a. Are interposed.
However, since the inclination of one plane is determined by three points, the spacer 9
And 9a may be three or more.

In the inclination adjusting devices 1 and 1a for the rotating object holder, the inclination adjusting devices 1 and 1a are provided between the base 8 and the spacer 9 and the base 8a, respectively.
An uneven engagement is interposed between the spacer and the spacer 9a. But,
The concave and convex engagement is between the holder 7 and the spacer 9 and between the holder 7 and the spacer 7.
a and the spacer 9a. The degree of convexity of the spacers 9 and 9a, and the feed screws 40 and 40
It is desirable that the pitch a is appropriately selected according to the control accuracy. As for the concave and convex engagement between the spacer and the holder or / and the base, one may be a concave surface and the other may be a convex surface.

[0020]

One aspect of the present invention is to adjust the inclination of the holder with respect to the base side by feeding the base in a radial direction with respect to the axis of the holder between the base and the holder holding the rotating object holder. The interposition of a plurality of spacers simplifies the processing and assembly of the components, especially the processing of the surface finish, thus reducing the manufacturing cost and also re-adjusting the inclination of the holder with respect to the base. This is a simple device for adjusting the inclination of the rotating object holder. The second invention is
In addition to the above invention, when the inclination of the holder with respect to the base side is set to a desired inclination, the feed to the position of the spacer that determines the inclination is automatically performed, so that the inclination of the holder with respect to the base side is set to the desired inclination. This is a device for adjusting the inclination of the rotating object holder that can be performed easily and in a very short time.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of one invention.

FIG. 2 is an exploded perspective view of a main part of the embodiment shown in FIG.

FIG. 3 is an exploded perspective view of a main part of the embodiment shown in FIG. 1;

FIG. 4 is an exploded perspective view of a main part of the embodiment shown in FIG. 1;

FIG. 5 is a sectional view taken along line II of the embodiment shown in FIG. 1;

FIG. 6 is a sectional view taken along line II-II of the embodiment shown in FIG.

FIG. 7 is a diagram corresponding to FIG. 5, showing an embodiment of the second invention.

[Explanation of symbols]

1, 1a ... Rotary object holder tilt adjusting device 2, 2a ... Board 3, 3a, 4, 4a ... Plate member 5, 5a, 6 ... Operating body 7, 7a ... Holder 8, 8a ... Base 9, 9a ... Spacer 35, 35a ... Flange 36 ... Concave surface 37 ... Convex surface 38, 38a ... Female thread 40, 40a ... Feed screw 41a ... Displacement detector (detection means) 43a ... Geared Motor (output means) 45a Calculation control means

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) B23Q 1/00-1/76 B23B 31/36 G01B 5/00 G01B 21/00 G12B 5/00

Claims (2)

(57) [Claims] 1. A base,SaidArranged opposite the base
A holder for holding the rotating object holder,SaidBase and
Interposed between the holders,Distance between the base and holder
And a spacer for keeping the rotation constant
In the tilt adjustment device of An engagement surface of the holder and / or the base with the spacer,
Formed on a concave or convex surface centered on the holder axis, The spacer engages with the holder and / or the base
Corresponding to the concave or convex surface of the holder and / or base
Convex or concave surface is formed, and the base has a space.
Between the engaging portion with the spacer and the engaging portion with the spacer of the holder.
And the corresponding engagement portions of the spacer are brought into direct contact with each other.
At a distance from each other and independently of the axis of the holder.
A plurality of spacers that slide in the radial direction, Each of the spacers is independently aligned with the axis of the holder.
And slide in the radial direction to feed each spacer in the radial direction.
By adjusting the position, the axis of the holder with respect to the base
Adjusting the inclination of the line in a predetermined direction Rotating object
Holder tilt adjustment device. (2)The tilt adjustment of the rotating object holder according to claim 1.
In the device, Substantially fixed to the base, and
Ruda's axis Detecting means for detecting the inclination ofEach of the spacers is independently Send in the radial direction
Output means; andHolder tilt informationBased onS
ToThe inclination of the axis of the holder with respect to
Sea urchinSaidCalculation control for calculating and controlling the output amount of the output means
meansWhen, Characterized by having Tilt adjustment device for rotating object holder
Place.