JP3280923B2 - Heat shock testing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a method for reducing the temperature of an environment to a low or high temperature,
Conversely, the present invention relates to a heat shock tester that performs a temperature characteristic test of electronic components, industrial materials, and the like by switching from a high temperature to a low temperature.

[0002]

2. Description of the Related Art Conventionally, in order to conduct a temperature characteristic test of electronic parts, industrial materials, etc., the environmental temperature is set to a low or high temperature state, or the temperature is rapidly lowered by cooling, or the temperature is rapidly raised by heating. Heat shock testing machines are known. Conventional heat shock testing machines
An independent refrigerating device and a heating device are combined and configured, and as the refrigerating device, a system using Freon (single, binary, or mixed refrigerant) as a refrigerant is known. With respect to the recent regulations for CFCs against the background of global environmental problems, refrigeration systems using HCFC and HFC are known.

[0003] However, according to the above-mentioned conventional configuration,
There are the following problems. First, the conventional heat shock tester requires an independent refrigerating device and a heating device, and has a complicated structure and a high manufacturing cost. Further, the conventional refrigeration system is a two-stage or two-stage refrigeration system, and therefore has a complicated structure and a high cost.

Second, in the case of using a conventional refrigeration system and heating system, the temperature range is approximately -60 to +15.
It can only be set to about 0 ° C., and in particular, a cooling device using chlorofluorocarbon as a conventional refrigerant has a narrow operating temperature range due to the characteristics of its system, and is particularly required with recent technological development in various industrial fields. It is not enough for the requirement of ultra-low temperature range.

[0005] Thirdly, with the full-scale implementation of international approaches to global environmental issues, further restrictions on the use of CFCs, including specific CFCs and alternative CFCs, are required in the future. The need for development has become important.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems, and specifically to solve the following problems. (1) Combination of independent refrigeration unit and heating unit, 2
The structure is complicated by adopting the original or two-stage refrigeration system,
Although the cost was high, a simple and compact structure should be adopted to solve this problem. (2) The operating temperature range for the temperature characteristic test can be made wider than before, and in particular, the temperature characteristic test in the ultra-low temperature range of liquid nitrogen level (around -200 ° C.) is also possible. (3) To provide a heat shock test machine adapted to global environmental problems by enabling the use of a refrigerant other than conventional CFCs, having a high coefficient of performance and good energy efficiency.

[Means for Solving the Problems]

[0007] In order to solve the above-mentioned problems, the present invention provides a Stirling refrigerator having a cold head and a heat exchanger for radiating heat, in which a working gas is filled and cooling a cryogen, and a test object for performing a temperature characteristic test. The temperature characteristic test tank cooled by the cold refrigerant and the cold refrigerant cooled by the cold head are allowed to flow through the temperature characteristic test tank and circulated between the cold head and the temperature characteristic test tank. A heat shock test characterized by performing a temperature characteristic test by applying a heat shock to the test object by cooling or heating the cold refrigerant by rotating the Stirling refrigerator forward or backward by providing a cold refrigerant pipe; Is to provide a machine.

Further, in order to solve the above-mentioned problems, the present invention provides a Stirling refrigerator having a cooling head for enclosing a working gas and cooling a cryogenic refrigerant and a heat exchanger for heat dissipation, and a test for performing a temperature characteristic test. A temperature characteristic test tank containing an object and cooled by the cold refrigerant, and the cold head and the temperature characteristic test tank so that the cold refrigerant cooled by the cold head flows around the temperature characteristic test tank. A cooling / cooling refrigerant pipe which circulates between them, and performs a temperature characteristic test by applying a heat shock to the test object by cooling or heating the cooling and cooling medium by rotating the Stirling refrigerator forward or reverse. To provide a heat shock tester that performs

According to another aspect of the present invention, there is provided a Stirling refrigerating machine having a cooling head for enclosing a working gas and cooling a cold refrigerant and a heat exchanger for radiating heat, and a test for performing a temperature characteristic test. The cold head is provided so as to house the object and penetrate from the bottom thereof, and a temperature characteristic test tank cooled by the cold head is provided. An object of the present invention is to provide a heat shock test machine characterized by performing a temperature characteristic test by applying a heat shock to a test object by cooling or heating.

[0010] The temperature characteristic test tank may be provided with a storage case or a mounting shelf for storing the test object.

The Stirling refrigerator may include a compression cylinder having a compression piston and an expansion cylinder having an expansion piston or a displacer, and the compression piston and the expansion piston or the displacer may reciprocate with a phase difference. .

The working gas of the above Stirling refrigerator is nitrogen, helium or hydrogen, and the cooling / heating refrigerant is ethyl alcohol, HFE (hydrofluoroether), PFC
(Perfluorocarbon), PFG (perfluoroglycol), air, nitrogen or helium.

[0013] Whether the temperature characteristics test tank is provided with a storage case having a vent hole and the test object is stored in the storage case, wherein air, nitrogen or helium is circulated as the cold refrigerant. Alternatively, the configuration may be such that the test object is stored without providing a storage case.

[0014] A temperature adjusting device for controlling the temperature by controlling the operation of the Stirling refrigerator may be provided.

An electric heater is attached to one of the temperature characteristic test tank, the cold head, and the cold / hot refrigerant line to enable precise temperature control and defrosting of the temperature characteristic test tank. Then, by controlling the motor of the Stirling refrigerator to rotate in the reverse direction, the temperature of the temperature characteristic test tank can be raised.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below based on embodiments with reference to the drawings. FIG. 1 is a view showing a first embodiment of the heat shock tester of the present invention.
In FIG. 1, a heat shock test machine 1 includes a Stirling refrigerator 2 and a temperature characteristic test tank 3 in which cooling or heating is performed by the Stirling refrigerator 2.

The housing 4 of the Stirling refrigerator 2 is
It is formed by casting. The interior of the housing 4 is divided into a motor chamber 6 and a crank chamber 7 by a partition wall 5. A rotary reciprocating conversion mechanism 9 for converting into motion is provided. The motor chamber 6 and the crank chamber 7 are closed by lids 10 and 11, respectively, and the inside of the housing 4 is held in a semi-sealed state.

The housing 4 penetrates the partition wall 5,
A crankshaft 15 pivotally supported by bearings 12, 13, and 14 is rotatably disposed. The motor 8 includes a stator 16 and a rotor 17 rotatably arranged on the inner peripheral side of the stator 16, and a crankshaft 15 is fixed to the center of the rotor 17.

The rotary reciprocating conversion mechanism 9 includes crank portions 18 and 19 of a crankshaft 15 extending into the crank chamber 7.
And connecting rods 20 and 21 connected to the crank portions 18 and 19, and cross guide heads 22 and 23 attached to the ends of the connecting rods, and function as drive transmission means of the Stirling refrigerator 2. .

The cross guide heads 22 and 23 are arranged so as to be able to reciprocate in cross guide liners 24 and 25 provided on the inner wall of the cylinder of the housing 4. The crank portions 18 and 19 are formed with a phase difference so that the crank 19 moves ahead of the crank 18 when the motor 8 rotates in the forward direction and the crank 18 moves before the crank 19 when the motor 8 rotates in the reverse direction. Have been. As this phase difference, a phase difference of about 90 degrees is generally adopted.

A compression cylinder 26 and an expansion cylinder 27 located slightly above the compression cylinder 26 are disposed above the crank chamber 7 of the housing 4 of the Stirling refrigerator 2. Compression cylinder 26 and expansion cylinder 27,
In the housing 4, as a working gas, for example,
Helium, hydrogen, nitrogen, etc. are sealed. The compression cylinder 26 has a compression cylinder block 28 fixed to the housing 4 by bolts or the like. A compression piston 29 provided with a piston ring slides back and forth in the space of the compression cylinder block 28, and The upper part is a high-temperature chamber (compression space) 30 in which the working gas is compressed to a high temperature.

The compression piston rod 31 has one end fixed to the compression piston 29 and the other end extending into the crank chamber 7 through an oil seal 32, and is rotatably connected to the cross guide head 22 by a pin. Since the sliding direction of the reciprocating compression piston 29 is reversed at the top dead center and the bottom dead center, the speed becomes zero, and the speed is slow near the top dead center and the bottom dead center, and the change amount of the volume per unit time is also small. It is small and has the maximum speed at each intermediate point when moving from bottom dead center to top dead center and from top dead center to bottom dead center, and the amount of change in volume due to movement of the compression piston 29 per unit time is also maximum. Becomes

On the other hand, the expansion cylinder 27 has an expansion cylinder block 33 fixed to the upper part of the housing 4 by bolts or the like. An expansion piston 34 provided with a piston ring reciprocates in the space of the expansion cylinder block 33. The upper part of this space is moved to a low temperature chamber (expansion space) 35.
The working gas therein expands to a low temperature. One end of an expansion piston rod 36 is fixed to the expansion piston 34, and the other end of the expansion piston rod 36 is connected to the oil seal 3.
7, extends into the crank chamber 7 and is connected to the cross guide head 23. The expansion piston 34 moves ahead of the compression piston 29 by a phase of 90 degrees.

The expansion cylinder block 33 is provided with a manifold 38 through which a working gas flows in and out of the high-temperature chamber (compression space) 30 of the compression cylinder 26 from below in the drawing. The (high-temperature side heat exchanger) 39, the regenerator 40, and the cooling heat exchanger (low-temperature side heat exchanger) are sequentially connected to each other and arranged in an annular shape. Near the upper end of the compression cylinder block 28, a communication hole 38 'for communicating the high-temperature chamber and the manifold 38 is formed, so that the high-temperature chamber (compression space) 30 and the low-temperature chamber (expansion space) 35 communicate with each other. The holes 38 ′, the manifold 38, the heat dissipation heat exchanger 39, the regenerator 40, and the cooling heat exchanger (low-temperature side heat exchanger) 41 are configured to sequentially communicate with each other.

Although not shown, the heat-radiating heat exchanger 39 is an annular type heat exchanger, for example, a shell-and-tube heat exchanger (a number of tubes for flowing a working gas into an annular heat-exchange chamber in the axial direction). A heat exchanger that penetrates and cools working gas by flowing cooling water into the heat exchange chamber.)
Alternatively, there is a heat exchanger or the like in which an annular jacket is provided around the annular working gas flow path, and cooling water flows in the jacket to cool the working gas.

The heat-radiating heat exchanger 39 is connected to the cooling water circulation line 4.
2 and the radiator 43 via the cooling water pump P1 to circulate the cooling water. The cooling water heated and exchanged by the heat radiating heat exchanger 39 is cooled by the cooling fan 44 of the radiator 43.

The heat-radiating heat exchanger 39 may be of an air-cooling type in which air-cooling fins are formed on the outer wall surface of the working gas flow path of the expansion cylinder block 33 instead of the water-cooling type as described above.

At the top (cold head 45) of the expansion cylinder block 33, as described above, the cooling heat exchanger 41 is provided.
Are formed. The cooling heat exchanger 41 is provided with a working gas flow passage 46 formed inside the expansion cylinder block 33.
And cooling fins 47 formed outside. A jacket 48 is provided so as to entirely surround the cold head 45, and the jacket 48 has an inlet and an outlet for cold and hot refrigerant.

The temperature characteristic test tank 3 is provided with a heat insulating wall 49 from the outside.
The tank wall 50 is formed of a metal material or the like surrounded by a circle. Inside the temperature characteristic test tank 3, a sealed storage case 52 in which a test object 51 such as an electronic component to be subjected to a temperature characteristic test is stored is defined. The storage case 52 has an opening at the top, and a lid 53 is attached so as to be openable and closable so as to seal this opening.

When air, nitrogen, helium, or the like is circulated between the temperature characteristic test tank 3 and the cold head 45 as a cold refrigerant, the storage case 52 has a structure in which ventilation holes are formed in its wall. Or a structure formed of a lattice-like member. Alternatively, a structure in which the storage case 52 is not particularly provided may be adopted. In these structures, the circulating cold refrigerant directly touches the test object to directly cool or heat.

The outlet of the jacket 48 is connected to the cold / hot refrigerant line 5.
4 and the inlet of the temperature characteristic test tank 3 via the pump P2.
4 communicates with the outlet of the temperature characteristic test tank 3. Thereby, the cold refrigerant circulates and flows between the jacket 48 and the temperature characteristic test tank 3. Ethyl alcohol, HFE, PFC, PFG, air, nitrogen, helium, etc. are used as the cold refrigerant.

FIG. 4 shows a temperature adjusting device 55 of the heat shock tester of the present invention. This temperature adjusting device 55
Has a temperature setting panel, a temperature control device that enables temperature setting by the temperature setting panel, and a temperature sensor disposed in the temperature characteristic test tank 3 or the storage case 52.

In the comparison circuit in the temperature control circuit constituting the temperature control device 55, the temperature signal in the storage case 52 detected by the temperature sensor is compared with the set temperature, and the allowable temperature around the set temperature is set. It is determined whether or not it is within the range, and according to the result, the motor 8 is subjected to PID control or the motor 8 is rotated in the reverse direction to operate while maintaining the set temperature.

Further, if an electric heater is attached to the temperature characteristic test tank 3 and the electric heater is heated by PID control in addition to the temperature control by the operation control of the motor 8 of the Stirling refrigerator 2, more precise temperature control can be achieved. Is also possible.

The heat shock tester 1 of the present invention comprises a Stirling refrigerator 2 having a compression cylinder 26 and an expansion cylinder 2.
With the use of the two pistons 7, the volume fluctuation of the space filled with the working gas in the Stirling refrigerator 2 is increased, so that the Stirling refrigerator 2 having a large refrigeration capacity can be provided.

In the present invention, the two-piston type Stirling refrigerator 2 is used in the above embodiment, but it is needless to say that another type of Stirling refrigerator 2 such as a displacer type may be used.

Next, the operation of the heat shock tester 1 according to the first embodiment of the present invention will be described. In FIG. 1, the crankshaft 15 is rotated in the forward direction by the motor 8, and the crank portions 18 and 19 in the crank chamber 7 are rotated out of phase with each other. Via connecting rods 20 and 21 rotatably connected to the crank portions 18 and 19, cross guide heads 22 and 23 attached to the distal ends of the connecting rods reciprocate in cross guide liners 24 and 25. . A compression piston 29 and an expansion piston 34 connected to the cross guide heads 22 and 23 via a compression piston rod 31 and an expansion piston rod 36, respectively.
Reciprocate with a phase difference from each other.

While the expansion piston 34 moves slowly near the top dead center ahead of about 90 degrees, the compression piston 29 moves rapidly toward the top dead center near the middle to perform the operation of compressing the working gas. The compressed working gas flows into the heat-radiating heat exchanger 39 through the communication hole 39 and the manifold 38.
The working gas that has radiated heat to the cooling water in the radiating heat exchanger 39
It is cooled by the regenerator 40 and flows into the low temperature chamber (expansion space) 35 through the passage.

When the compression piston 29 is slowly moving near the top dead center, the expansion piston 34 moves rapidly toward the bottom dead center, and the working gas flowing into the low temperature chamber (expansion space) 35 expands rapidly. Cold heat is generated. Thus, the cold head 45 surrounding the low temperature chamber (expansion space) 35 is cooled to a low temperature.

Then, the cold refrigerant in the jacket 48 is cooled in the cold head 45. Expansion piston 34
When the piston moves from the bottom dead center to the top dead center, the compression piston 2
Numeral 9 is from the intermediate position to the bottom dead center, and the working gas flows into the regenerator 40 from the low-temperature chamber (expansion space) 35 through the flow path 46 and stores the cold of the working gas in the regenerator 40.
The cold stored in the regenerator 40 is transferred to the high-temperature chamber 3 as described above.
The working gas sent from 0 through the heat-radiating heat exchanger 39 is reused for cooling again.

The cooling water exchanged in the heat-radiating heat exchanger 39 flows from the cooling-water circulation pipe 42 to the radiator 43, where it is cooled by the cooling fan 44, and is again cooled.
Cycle to 9.

The above is the case where the refrigerator is cooled and the temperature characteristic test tank 3 is set to a low temperature state. When the heating operation is performed and the temperature characteristic test tank 3 is set to a high temperature state, the motor 8 is rotated in the reverse direction. Let it. Then, contrary to the cooling operation described above, the crank portion 18 rotates ahead of the crank portion 19 with a phase shift of about 90 degrees. Thus, the expansion cylinder 27 functions as a compression cylinder, the compression cylinder 26 functions as an expansion cylinder, and the cooling heat exchanger 41 functions as a heat-radiating heat exchanger, which is completely opposite to the cooling operation described above. The temperature of the cold head 45 becomes high. As a result, the cold refrigerant is heated to a high temperature,
8 and the temperature characteristic test tank 3 are circulated to heat the test object.

As described above, by switching the motor 8 between the normal rotation and the reverse rotation, the cooling operation and the heating operation of the refrigerator are switched between each other, and the temperature characteristic test tank 3 is cooled or heated to a low temperature state and a high temperature state. The states can be rapidly switched to each other, and a heat shock due to a temperature change can be applied to the test object.

The temperature applied to the test object 51 in the temperature characteristic test tank 3 is set by a temperature setting panel of the temperature adjusting device 55. The temperature control circuit controls the motor 8 to rotate forward or reverse depending on whether the set temperature is in the low temperature range or the high temperature range.

In the operation state of the Stirling refrigerator 2, the temperature in the temperature characteristic test tank 3 is detected by a temperature sensor, and the detected temperature and the temperature set by the temperature setting panel are used as a temperature control device constituting a temperature control device. A comparison is made in a comparison circuit in the circuit to determine whether the temperature is within an allowable temperature range centered on the set temperature, and PID control of the motor 8 of the Stirling refrigerator 2 is performed according to the result. In some cases, such as when there is a large temperature difference between the detected temperature and the detected temperature, the rotation direction of the motor 8 is switched to rapidly increase or decrease the temperature, and the operation is performed while maintaining the set temperature.

Further, since the temperature characteristic test tank 3 is provided with an electric heater, the motor 8 of the Stirling refrigerator 2
In addition to the temperature control by the operation control, more precise temperature control is possible by controlling and heating the electric heater.

When defrosting the frost generated in the cold head 45 and the temperature characteristic test tank 3, defrosting is detected by defrosting sensors provided in these places, and the temperature is controlled by a defrosting control circuit. Heating is performed by an electric heater attached to the characteristic test tank 3 to perform defrosting. In addition, by rotating the motor 8 of the Stirling refrigerator 2 in the reverse direction, the cold head 45 can be heated to a high temperature to quickly and effectively defrost.

FIG. 2 shows a second embodiment of the present invention. In the heat shock tester 56 shown in FIG.
And the Stirling refrigerator 2 are the same, but the structure of the temperature characteristic test tank is different. The temperature characteristic test tank 57 has a tank wall 59 made of a metal material or the like surrounded by a heat insulating wall 58 from the outside similarly to the first embodiment, and an upper opening is provided with a lid 60 that can be opened and closed. Is provided with a shelf 61 on which the test object 51 is placed. As shown in FIG. 2B, a heat exchange coil 62 is wound around a tank wall 59 of the temperature characteristic test tank 57 and communicates with the cold / hot refrigerant pipe 54.

The heat shock tester 56 of the second embodiment
Then, the cold refrigerant cooled by the cold head 45 is sent to the cold refrigerant 54 by the pump P2, and cools or heats the inside of the temperature characteristic test tank 57 in the heat exchange coil 62. By arranging a temperature sensor in the temperature characteristic test tank 57, the temperature can be adjusted in the same manner as in the first embodiment.

FIG. 3 shows a third embodiment of the present invention. In the heat shock test machine 63 of this embodiment, the Stirling refrigerator 2 is the same as the Stirling refrigerator 2 of the first embodiment, but the structure of the temperature characteristic test tank 64 is different. The temperature characteristic test tank 64 has a tank wall formed of a metal material or the like surrounded by a heat insulating wall as in the first embodiment.

The cold head 4 of the Stirling refrigerator 2
5 is disposed in the temperature characteristic test tank 64 so as to directly penetrate the bottom of the temperature characteristic test tank 64. The temperature characteristic test tank 64 is provided with a lattice-shaped shelf board 65 on which the test object 51 is placed. Instead of providing the shelf board 65, the test object 51 may be directly placed on the upper surface of the cold head 45 to directly cool or heat. or,
Instead of the shelf plate 64, a storage case as in the first embodiment may be provided in the temperature characteristic test tank 64.

The heat shock test machine 63 of the third embodiment
By arranging a temperature sensor in the temperature characteristic test tank 64, the temperature can be adjusted as in the first embodiment. In the heat shock test machine 63, since the cold head 45 is provided directly in the temperature characteristic test tank 64, the cooling and heating effects in the temperature characteristic test tank 64 are excellent.

[0053]

According to the above-described configuration, the present invention has the following effects. (1) Cooling and heating can be performed by rotating the motor of the Stirling refrigerating machine 2 forward and backward, so that the structure is simple without combining an independent refrigerating device and a heating device as in the related art. A low-cost and compact heat shock tester can be realized.

(2) Focusing on the feasibility of a wide temperature range at low and high temperatures, which is the characteristic of the Stirling refrigerator 2, and the possibility of rapid switching of cooling and heating of the cold head 45 by normal rotation and reverse rotation. By using this, it is possible to perform a temperature characteristic test in a wide temperature range and to rapidly raise and lower the temperature required for a recent heat shock tester. In particular, the liquid nitrogen level (around -200 ° C)
Temperature test in the ultra-low temperature range.

(3) By making it possible to use a conventional refrigerant other than CFCs, it is possible to realize a heat shock tester which is adapted to global environmental problems, has a high coefficient of performance, and has good energy efficiency.

[Brief description of the drawings]

FIG. 1 is a view showing a first embodiment of a heat shock tester according to the present invention.

FIG. 2 is a view showing a second embodiment of the heat shock tester of the present invention.

FIG. 3 is a view showing a third embodiment of the heat shock tester of the present invention.

FIG. 4 is a diagram illustrating a temperature adjusting device of the heat shock tester according to the present invention.

[Explanation of symbols]

 1, 56, 63 Heat shock tester 2 Stirling refrigerator 3, 57, 64 Temperature characteristic test tank 8 Motor 26 Compression cylinder 27 Expansion cylinder 29 Compression piston 30 High temperature chamber (Compression space) 34 Expansion piston 35 Low temperature chamber (Expansion space) 39 heat radiation heat exchanger 40 regenerator 41 cooling heat exchanger 45 cold head 51 test object 52 storage case 54 cold refrigerant line

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-2-145939 (JP, A) JP-A-61-68547 (JP, A) JP-A-5-240514 (JP, A) JP-A 62-145 56747 (JP, A) JP-A-11-223404 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) F25B 9/14 520 G01N 3/60 G01R 31/26

Claims (10)

(57) [Claims] A Stirling refrigerator having a cold head and a heat exchanger for radiating heat, in which a working gas is sealed and which cools a cryogenic refrigerant, and a test object to be subjected to a temperature characteristic test are housed and cooled by the cryogenic refrigerant. A temperature characteristic test tank, and a cold refrigerant line for flowing the cold refrigerant cooled by the cold head through the temperature characteristic test tank and circulating between the cold head and the temperature characteristic test tank. A heat shock test machine, wherein a Stirling refrigerator is rotated forward or backward to cool or heat the cold refrigerant to give a heat shock to a test object and perform a temperature characteristic test. 2. A Stirling refrigerating machine having a cooling head for enclosing a working gas and cooling a cryogenic refrigerant and a heat exchanger for heat dissipation, and a test object to be subjected to a temperature characteristic test are housed therein and cooled by the cryogenic refrigerant. A temperature characteristic test tank, and a cold refrigerant line for circulating the cold refrigerant cooled by the cold head between the cold head and the temperature characteristic test tank so as to flow around the temperature characteristic test tank. A heat shock test machine, wherein the Stirling refrigerator is rotated forward or backward to cool or heat the cold refrigerant to apply a heat shock to a test object to perform a temperature characteristic test. 3. A Stirling refrigerator having a cooling head for enclosing a working gas and cooling a cryogenic refrigerant and a heat exchanger for heat radiation, and a test object to be subjected to a temperature characteristic test is accommodated and penetrated from the bottom thereof. The cold head is provided, and a temperature characteristic test tank cooled by the cold head is provided, and the test object is heated by cooling or heating the cold refrigerant by rotating the Stirling refrigerator forward or reverse. A heat shock tester characterized by performing a temperature characteristic test by applying a shock. 4. The heat shock according to claim 1, wherein a storage case or a mounting shelf for storing the test object is provided in the temperature characteristic test tank. testing machine. 5. The Stirling refrigerator includes a compression cylinder having a compression piston, and an expansion cylinder having an expansion piston or a displacer, and controls that the compression piston and the expansion piston or the displacer reciprocate with a phase difference. The heat shock tester according to any one of claims 1 to 4, wherein: 6. The method according to claim 1, wherein the working gas of the Stirling refrigerator is nitrogen, helium or hydrogen, and the cryogenic refrigerant is ethyl alcohol, HFE, PFC, PFG, air, nitrogen or helium. The heat shock tester according to any one of the above. 7. A configuration in which air, nitrogen, or helium is circulated as the cooling / heating refrigerant, and the temperature characteristic test tank is provided with a storage case having a vent hole, and a test object is stored in the storage case. The heat shock tester according to any one of claims 1 to 5, wherein the heat shock tester has a configuration in which a test object is stored without the storage case. 8. The heat shock test machine according to claim 1, further comprising a temperature control device for controlling the temperature of the Stirling refrigerator by controlling the operation thereof. 9. The heat shock tester according to claim 1, wherein an electric heater is attached to one of the temperature characteristic test tank, the cold head, and the cold / hot refrigerant line. 10. The heat shock tester according to claim 1, wherein the motor of the Stirling refrigerator is controlled to rotate in the reverse direction so that the temperature characteristic test tank can be heated. .