JP3271014B2 - Helium gas recovery method and device - Google Patents
Helium gas recovery method and deviceInfo
- Publication number
- JP3271014B2 JP3271014B2 JP33696891A JP33696891A JP3271014B2 JP 3271014 B2 JP3271014 B2 JP 3271014B2 JP 33696891 A JP33696891 A JP 33696891A JP 33696891 A JP33696891 A JP 33696891A JP 3271014 B2 JP3271014 B2 JP 3271014B2
- Authority
- JP
- Japan
- Prior art keywords
- helium gas
- compressor
- pressure
- purity
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation By Low-Temperature Treatments (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ヘリウムガスの回収方
法及び装置に関し、詳しくは、大学の低温センターなど
のように、多数の小口ユーザーからの回収で、ヘリウム
ガスの回収量が一定しない回収系統に好適なヘリウムガ
スの回収方法及び装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for recovering helium gas. The present invention relates to a helium gas recovery method and apparatus suitable for a system.
【０００２】[0002]
【従来の技術】超伝導マグネットの冷却等に用いられた
ヘリウムは、系が閉じた循環経路となっているので、そ
のほとんどが回収されて再使用されているが、大学，学
校の実験設備等では、液体ヘリウムの使用先が多数に及
び、かつその使用量が一定していないため、上記超伝導
マグネット冷却用と同等の閉サイクルの液化プロセスを
用いることができなかった。図４は、このようにヘリウ
ムガスの回収量が一定しない際に設けられる、従来のヘ
リウムガス回収装置の一例を示すもので、回収するヘリ
ウムガスを一時貯留するガスバッグ１と、ガスバッグ１
内のヘリウムガスを吸入して所定圧力、通常は１５０ｋ
ｇ／ｃｍ2 Ｇに昇圧する圧縮機２と、昇圧後のヘリウム
ガス中に含まれる不純物、例えば空気成分である窒素，
酸素，水分等を除去する精製設備３と、精製後のヘリウ
ムガスをボンベ等に充填して貯蔵する貯蔵設備４とから
構成されている。2. Description of the Related Art Helium used for cooling superconducting magnets, etc., has a closed circulation path, so most of it is collected and reused. In this method, liquid helium is used in a large number of places and the amount of liquid helium used is not constant, so that a closed cycle liquefaction process equivalent to that for cooling the superconducting magnet cannot be used. FIG. 4 shows an example of a conventional helium gas recovery device provided when the recovery amount of helium gas is not constant as described above. The gas bag 1 for temporarily storing the helium gas to be recovered, and the gas bag 1
Helium gas is sucked into the chamber and a predetermined pressure, usually 150k
g / cm 2 G, the compressor 2 and the impurities contained in the helium gas after the pressure increase, for example, nitrogen as an air component,
It comprises a refining facility 3 for removing oxygen, moisture and the like, and a storage facility 4 for filling and storing purified helium gas in a cylinder or the like.
【０００３】このヘリウムガス回収装置は、ヘリウム使
用設備から略大気圧で回収されるヘリウムガスをガスバ
ッグ１内に貯留し、該貯留量を測定器（Ｌ）５で測定し
て所定の貯留量となったときに圧縮機２を始動し、回収
ヘリウムガスの昇圧，精製，貯蔵を開始するとともに、
ガスバッグ１内の回収ヘリウムガスが所定量以下になる
と、装置はその運転を停止するように設定されている。In this helium gas recovery apparatus, helium gas recovered from a helium-using facility at approximately atmospheric pressure is stored in a gas bag 1 and the storage amount is measured by a measuring device (L) 5 to determine a predetermined storage amount. , The compressor 2 is started, and the pressurization, purification, and storage of the recovered helium gas are started.
The apparatus is set to stop its operation when the amount of helium gas recovered in the gas bag 1 becomes equal to or less than a predetermined amount.
【０００４】このように、回収ヘリウムガス量が一定し
ない場合の従来のヘリウムガス回収装置は、回収ヘリウ
ムガスが少ないときに、該回収ヘリウムガスを昇圧する
圧縮機２の吸入圧力が負圧になることを防止するため、
回収ラインにガスバッグ１を設けて装置を間欠的に運転
するようにしている。As described above, in the conventional helium gas recovery device in which the amount of recovered helium gas is not constant, when the amount of recovered helium gas is small, the suction pressure of the compressor 2 for increasing the pressure of the recovered helium gas becomes negative. To prevent
A gas bag 1 is provided in the recovery line to operate the apparatus intermittently.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記ガ
スバッグ１は、水分等の空気成分が浸透し易く、ヘリウ
ムガスの純度を劣化させる原因となっている。このた
め、回収したヘリウムガスは、ボンベ等に充填してもそ
のまま使用することはできず、精製設備３を通して精製
する必要があるが、上記のようにガスバッグ１から不純
物が侵入するため、精製設備３の負担が大きくなり、コ
ストアップの原因となっている。However, in the gas bag 1, the air component such as moisture easily penetrates, causing the purity of the helium gas to deteriorate. For this reason, the recovered helium gas cannot be used as it is even if filled into a cylinder or the like, and must be purified through the purification equipment 3. However, since impurities enter from the gas bag 1 as described above, purification The burden on the equipment 3 increases, which causes an increase in cost.
【０００６】そこで本発明は、回収ヘリウムガス量が一
定しない場合でも、不純物が浸透し易いガスバッグを設
置することなく連続的に運転することができるヘリウム
ガスの回収方法及び装置を提供することを目的としてい
る。Accordingly, the present invention provides a method and an apparatus for recovering helium gas which can be operated continuously without installing a gas bag through which impurities easily penetrate even when the amount of recovered helium gas is not constant. The purpose is.
【０００７】[0007]
【課題を解決するための手段】上記した目的を達成する
ため、本発明のヘリウムガスの回収方法は、第１の構成
として、発生量が一定しないヘリウムガスを所定圧力に
昇圧して回収する方法において、回収するヘリウムガス
を逆止弁及びスナバータンクを介して圧縮機に吸入して
所定圧力に昇圧するとともに、該圧縮機の吸入圧力が略
一定になるように、圧縮機吐出側のヘリウムガスを圧縮
機吸入側に循環させることを特徴としている。According to a first aspect of the present invention, there is provided a helium gas recovery method for recovering a helium gas having an inconsistent generation amount by increasing the pressure to a predetermined pressure. At the same time, the helium gas to be recovered is sucked into the compressor through the check valve and the snubber tank to increase the pressure to a predetermined pressure, and the helium gas on the compressor discharge side is set so that the suction pressure of the compressor becomes substantially constant. Is circulated to the compressor suction side.
【０００８】また、本発明方法の第２の構成は、上記第
１の構成において、前記圧縮機にオイルフリータイプを
使用し、該圧縮機の吐出側にヘリウムガスの精製設備と
貯蔵設備とを連設するとともに、圧縮機吐出側のヘリウ
ムガスの純度を測定し、該純度に応じて前記精製設備を
バイパスさせることを特徴とし、第３の構成は、第２の
構成において、前記圧縮機を複数基直列に配設するとと
もに、各圧縮機の吸入圧力が略一定になるように、各圧
縮機吐出側のヘリウムガスを各圧縮機吸入側に循環させ
ることを特徴としている。In a second aspect of the method of the present invention, in the first aspect, an oil-free type compressor is used, and a helium gas purification facility and a storage facility are provided on the discharge side of the compressor. The helium gas is connected continuously, and the purity of the helium gas on the compressor discharge side is measured, and the purifying equipment is bypassed according to the purity. A plurality of units are arranged in series, and helium gas on the discharge side of each compressor is circulated to each compressor suction side such that the suction pressure of each compressor is substantially constant.
【０００９】一方、本発明のヘリウムガスの回収装置
は、第１の構成として、昇圧後のヘリウムガスの貯蔵設
備とを備えたヘリウムガスの回収装置において、前記圧
縮機の吸入側に逆止弁及びスナバータンクを連設すると
ともに、該圧縮機の吸入圧力を測定する圧力計と、該圧
力計で測定した圧力に基づいて圧縮機吐出側のヘリウム
ガスを圧縮機吸入側に循環させる循環経路を設けたこと
を特徴としている。On the other hand, a helium gas recovery device according to the present invention is, as a first configuration, a helium gas recovery device provided with a helium gas storage facility after pressurization, wherein a check valve is provided on the suction side of the compressor. And a snubber tank, a pressure gauge for measuring the suction pressure of the compressor, and a circulation path for circulating helium gas on the compressor discharge side to the compressor suction side based on the pressure measured by the pressure gauge. It is characterized by having been provided.
【００１０】さらに、本発明装置の第２の構成は、上記
第１の構成において、前記圧縮機にオイルフリータイプ
の圧縮機を使用し、圧縮機吐出側にヘリウムガスの純度
を測定する純度計と昇圧後のヘリウムガス中の不純物を
除去する精製設備とを設けるとともに、純度計で測定し
たヘリウムガスの純度に応じて前記精製設備をバイパス
させるバイパス経路を設けたことを特徴とし、第３の構
成は、第２の構成において、前記圧縮機を複数基直列に
配設するとともに、各圧縮機の吸入圧力を測定する圧力
計と、該圧力計で測定した圧力に基づいて各圧縮機吐出
側のヘリウムガスを各圧縮機吸入側に循環させる循環経
路を設けたことを特徴としている。Further, a second configuration of the apparatus according to the present invention is the purity meter according to the first configuration, wherein an oil-free type compressor is used as the compressor, and the purity of helium gas is measured on the discharge side of the compressor. And a purification facility for removing impurities in the helium gas after the pressure increase, and a bypass path for bypassing the purification facility according to the purity of the helium gas measured by a purity meter is provided. The configuration is such that, in the second configuration, a plurality of the compressors are arranged in series, a pressure gauge for measuring a suction pressure of each compressor, and each compressor discharge side based on the pressure measured by the pressure gauge. A circulation path for circulating the helium gas to each compressor suction side is provided.
【００１１】[0011]
【作 用】上記構成によれば、圧縮機吸入側を常に大気
圧以上に保持することができるので、圧縮機を連続運転
することが可能になるとともに、不純物が浸透し易いガ
スバッグを省略でき、回収するヘリウムガスの純度を劣
化させることがない。[Operation] According to the above configuration, since the compressor suction side can always be maintained at a pressure higher than the atmospheric pressure, the compressor can be operated continuously, and the gas bag into which impurities easily penetrate can be omitted. Also, the purity of the recovered helium gas does not deteriorate.
【００１２】[0012]
【実施例】以下、本発明を、図面に示す実施例に基づい
て、さらに詳細に説明する。まず、図１は本発明の第１
実施例を示すもので、回収ヘリウムガスの流れの上流側
から順に、逆止弁１１，スナバータンク１２，圧縮機１
３，精製設備１４，貯蔵設備１５を連設したものであ
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to the embodiments shown in the drawings. First, FIG. 1 shows the first embodiment of the present invention.
1 shows an embodiment in which a check valve 11, a snubber tank 12, and a compressor 1 are arranged in this order from the upstream side of the flow of the recovered helium gas.
3, a refining facility 14 and a storage facility 15 are connected in series.
【００１３】さらに、上記圧縮機１３部分には、該圧縮
機１３の吐出側と吸入側とを接続する循環経路１６が設
けられるとともに、該循環経路１６に設けた流量調節弁
１７の開度を制御する圧力計（Ｐ）１８が設けられてい
る。Further, a circulation path 16 for connecting the discharge side and the suction side of the compressor 13 is provided in the compressor 13 and the opening of a flow rate control valve 17 provided in the circulation path 16 is controlled. A controlling pressure gauge (P) 18 is provided.
【００１４】上記圧力計１８は、圧縮機１３の吸入圧力
を一定の圧力、通常は略大気圧に保つように前記流量調
節弁１７の開度を制御するものであり、回収ヘリウムガ
スが全く発生しない場合でも、流量調節弁１７を開いて
圧縮機吐出側の高圧ヘリウムガスの適当量を循環経路１
６から圧縮機吸入側に循環させ、圧縮機吸入側の圧力を
略大気圧に保つように作動する。The pressure gauge 18 controls the opening of the flow control valve 17 so as to maintain the suction pressure of the compressor 13 at a constant pressure, usually substantially the atmospheric pressure. If not, the flow control valve 17 is opened and an appropriate amount of the high-pressure helium gas on the compressor discharge side is supplied to the circulation path 1.
6 and circulates to the compressor suction side, and operates so as to maintain the pressure on the compressor suction side at substantially atmospheric pressure.
【００１５】このように構成したヘリウムガスの回収装
置は、回収ヘリウムガスが逆止弁１１を介してスナバー
タンク１１内に流入し、圧縮機１３の吸入側の圧力が上
昇すると、該圧力上昇を圧力計１８が検出し、該圧力の
上昇度に応じて流量調節弁１７を閉じ方向に作動させ
る。これにより、循環経路１６から圧縮機吸入側に循環
するヘリウムガス量が減少し、スナバータンク１１内の
ヘリウムガスが圧縮機１３に吸入されて所定の圧力、例
えば１５０ｋｇ／ｃｍ2 Ｇに昇圧され、次工程の精製設
備１４に送られる。In the helium gas recovery device configured as described above, when the recovered helium gas flows into the snubber tank 11 through the check valve 11 and the pressure on the suction side of the compressor 13 increases, the pressure increases. The pressure gauge 18 detects and operates the flow control valve 17 in the closing direction according to the degree of increase in the pressure. As a result, the amount of helium gas circulating from the circulation path 16 to the compressor suction side is reduced, and the helium gas in the snubber tank 11 is sucked into the compressor 13 and pressurized to a predetermined pressure, for example, 150 kg / cm 2 G, It is sent to the refining equipment 14 in the next step.
【００１６】即ち、回収ヘリウムガスの発生量に関係な
く圧縮機１３を連続的に運転するとともに、流入する回
収ヘリウムガスにより変化する吸入側の圧力に応じて圧
力計１８が流量調節弁１７を開閉作動し、循環ガス量を
減らして吸入側の圧力を略一定に保つようにすることに
より、該減少した循環ガス量に対応する量のヘリウムガ
ス、即ち、逆止弁１１から流入する回収ヘリウムガスに
相当する分が、精製設備１４側に送り出される。That is, the compressor 13 is continuously operated irrespective of the amount of the recovered helium gas generated, and the pressure gauge 18 opens and closes the flow control valve 17 in accordance with the suction-side pressure changed by the flowing recovered helium gas. By operating and reducing the amount of circulating gas to keep the pressure on the suction side substantially constant, the amount of helium gas corresponding to the reduced amount of circulating gas, that is, the recovered helium gas flowing from the check valve 11 Is sent out to the refining facility 14 side.
【００１７】また、圧縮機１３の吸入側に設けた前記ス
ナバータンク１２は、回収ヘリウムガスの流量変動によ
る圧力変動（脈動）を吸収し、圧力計１８が過度に反応
してハンチングが発生するのを防止するために設けられ
るもので、適当な容積の密閉空間を有する金属製容器か
らなるものであるから、従来のゴム製等のガスバッグの
ように水分等の不純物が浸透することがなく、回収する
ヘリウムガスの純度が劣化することがない。The snubber tank 12 provided on the suction side of the compressor 13 absorbs pressure fluctuations (pulsations) due to fluctuations in the flow rate of the recovered helium gas, and the pressure gauge 18 excessively reacts to cause hunting. It is provided to prevent the occurrence of impurities such as moisture and the like unlike conventional rubber gas bags, since it is made of a metal container having a closed space of an appropriate volume, The purity of the recovered helium gas does not deteriorate.
【００１８】さらに、回収系の入口部に逆止弁１１を設
けたことにより、循環するヘリウムガスが使用先に逆流
することを防止できる。Further, by providing the check valve 11 at the inlet of the recovery system, it is possible to prevent the circulating helium gas from flowing back to the place of use.
【００１９】次に、図２は、本発明の第２実施例を示す
もので、圧縮機１３にオイルフリータイプを使用し、該
圧縮機１３の吐出側に逆止弁２０と分析計２１とを設け
るとともに、精製設備１４をバイパスするバイパス経路
２２を設けたものである。Next, FIG. 2 shows a second embodiment of the present invention, in which an oil-free type compressor is used, and a check valve 20 and an analyzer 21 are provided on the discharge side of the compressor 13. And a bypass path 22 for bypassing the purification equipment 14 is provided.
【００２０】さらに、上記バイパス経路２２と精製設備
１４に至る経路２３とには、分析計２１の測定結果に応
じていずれか一方が開となる弁２４，２５がそれぞれ設
けられている。即ち、分析計２１で測定した昇圧後のヘ
リウムガスの純度が所定純度以上であった場合には、弁
２５が閉じ、弁２４が開いて昇圧後のヘリウムガスを直
接貯蔵設備１５に送り出し、純度が低ければ、逆に弁２
４が閉じ、弁２５が開いて昇圧後のヘリウムガスを精製
設備１４を経由して精製した後、貯蔵設備１５に導入す
るように構成されている。なお、弁２４，２５は、１個
の三方弁でも良い。Further, the bypass path 22 and the path 23 leading to the refining facility 14 are provided with valves 24 and 25, one of which is opened according to the measurement result of the analyzer 21. That is, when the purity of the helium gas after pressure measurement measured by the analyzer 21 is equal to or higher than the predetermined purity, the valve 25 is closed and the valve 24 is opened to directly send the pressurized helium gas to the storage facility 15, and the purity is increased. If low, valve 2
4 is closed, the valve 25 is opened, and the helium gas after pressurization is purified through the purification facility 14 and then introduced into the storage facility 15. The valves 24 and 25 may be one three-way valve.
【００２１】本実施例のヘリウムガスの回収装置も、前
記第１実施例の回収装置と同様に、逆止弁１１を介して
スナバータンク１２内に流入する回収ヘリウムガスによ
り圧縮機吸入圧力が上昇すると、該圧力上昇により圧力
計１８が流量調節弁１７を閉じ方向に作動させ、循環経
路１６から圧縮機吸入側に循環するヘリウムガス量を減
少させ、圧縮機１３で所定の圧力に昇圧した回収ヘリウ
ムガスを送り出すように構成されている。In the helium gas recovery device of the present embodiment, similarly to the recovery device of the first embodiment, the suction pressure of the compressor is increased by the recovered helium gas flowing into the snubber tank 12 through the check valve 11. Then, the pressure rise causes the pressure gauge 18 to actuate the flow control valve 17 in the closing direction to reduce the amount of helium gas circulating from the circulation path 16 to the compressor suction side, and the compressor 13 recovers the pressure to a predetermined pressure. It is configured to deliver helium gas.
【００２２】このとき、圧縮機１３に、ダイヤフラム式
のように圧縮するガス中に潤滑油等が侵入しないオイル
フリータイプを用いているので、圧縮時に油分や空気成
分が回収ヘリウムガス中に混入することがなく、該圧縮
によりヘリウムガスの純度が劣化することがない。At this time, since the compressor 13 uses an oil-free type such as a diaphragm type in which lubricating oil or the like does not enter into the gas to be compressed, oil and air components are mixed into the recovered helium gas during compression. And the compression does not degrade the purity of the helium gas.
【００２３】昇圧後のヘリウムガスは、逆止弁２０を通
った後、分析計２１で純度が測定され、該純度に応じて
弁２４，２５のいずれか一方が開となり、精製設備１４
を介して精製された後、あるいは精製設備１４を介さず
にバイパス経路２２から直接貯蔵設備１５に送られる。After the pressure of the helium gas has passed through the check valve 20, the purity of the gas is measured by the analyzer 21, and one of the valves 24 and 25 is opened according to the purity.
After being purified via the refrigeration system, or directly from the bypass route 22 to the storage facility 15 without passing through the purification facility 14.
【００２４】本実施例装置では、前述のガスバッグの省
略と、オイルフリータイプの圧縮機の使用とにより、こ
の回収装置の系内でヘリウムガスを汚染することがない
ので、回収ヘリウムガスの純度が規定値を満足していれ
ば、精製しないでそのまま貯蔵し、再使用することがで
きる。In the apparatus of this embodiment, the helium gas is not contaminated in the system of the recovery device by omitting the gas bag and using an oil-free type compressor. If satisfies the specified value, it can be stored as it is without purification and reused.
【００２５】したがって、上記のように分析計２１でヘ
リウムガスの純度を測定し、該純度に応じて精製設備１
４を通さずに直接貯蔵設備１５にヘリウムガスを送り出
すことが可能となり、これによって、ヘリウムガスを精
製するためのランニングコストを低減でき、ヘリウム回
収コストの低減が図れる。Therefore, the purity of the helium gas is measured by the analyzer 21 as described above, and the purifying equipment 1 is determined according to the purity.
The helium gas can be sent directly to the storage facility 15 without passing through the helium gas 4, whereby the running cost for purifying the helium gas can be reduced, and the helium recovery cost can be reduced.
【００２６】また、圧縮機吐出側の循環経路１６より下
流側に逆止弁２０を設けているので、貯蔵設備１５側か
ら循環経路１６にヘリウムガスが逆流することを防止す
ることができる。Since the check valve 20 is provided downstream of the circulation path 16 on the compressor discharge side, backflow of helium gas from the storage facility 15 to the circulation path 16 can be prevented.
【００２７】図３は、本発明の第３実施例を示すもの
で、２基の圧縮機１３ａ，１３ｂにより２段階、例えば
１段目の圧縮機１３ａで大気圧から１０〜１５ｋｇ／ｃ
ｍ2 Ｇまで昇圧し、２段目の圧縮機１３ｂで１０〜１５
ｋｇ／ｃｍ2 Ｇから１５０ｋｇ／ｃｍ2 Ｇにヘリウムガ
スを昇圧するようにするとともに、両圧縮機１３ａ，１
３ｂのそれぞれに循環経路１６ａ，１６ｂ、流量調節弁
１７ａ，１７ｂ、圧力計１８ａ，１８ｂを設けたもので
ある。例えば、１段目はレシプロ方式の圧縮機を用い、
２段目はダイヤフラム式の圧縮機を用い、各段共、圧縮
比は１０〜１５程度に設定する。なお、他の構成は上記
第２実施例と同様に構成されているので、同一要素のも
のには同一符号を付して、その詳細な説明は省略する。FIG. 3 shows a third embodiment of the present invention, in which two compressors 13a and 13b operate in two stages, for example, 10 to 15 kg / c from atmospheric pressure in the first stage compressor 13a.
The pressure is increased to m 2 G, and 10 to 15
The pressure of the helium gas is increased from 150 kg / cm 2 G to 150 kg / cm 2 G, and both compressors 13a, 1
Each of 3b is provided with circulation paths 16a and 16b, flow control valves 17a and 17b, and pressure gauges 18a and 18b. For example, the first stage uses a reciprocating compressor,
The second stage uses a diaphragm type compressor, and the compression ratio is set to about 10 to 15 for each stage. Since other configurations are the same as those of the second embodiment, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
【００２８】本実施例装置において、回収すべきヘリウ
ムガスが無いときには、両流量調節弁１７ａ，１７ｂ
は、略全開状態となって両圧縮機１３ａ，１３ｂの吸入
圧力を所定の圧力、即ち、上記大気圧及び１０〜１５ｋ
ｇ／ｃｍ2 Ｇに保つようにしている。この状態でスナバ
ータンク１１内に回収ヘリウムガスが流入してくると、
１段目の圧縮機１３ａの吸入圧力が上昇するので、該圧
縮機１３ａに付随する圧力計１８ａが作動して流量調節
弁１７ａを絞り、循環経路１６ａからの循環量を減ら
す。これにより、該圧縮機１３ａの吐出側の圧力、即ち
２段目の圧縮機１３ｂの吸入側の圧力が上昇するので、
該圧縮機１３ｂに付随する圧力計１８ｂが作動して流量
調節弁１７ｂを絞り、循環経路１６ｂからの循環量を減
らすので、この分が逆止弁２０を通って貯蔵設備１５側
に送り出される。In the apparatus of this embodiment, when there is no helium gas to be recovered, the two flow control valves 17a, 17b
Is substantially fully opened, and the suction pressure of both compressors 13a, 13b is increased to a predetermined pressure, that is, the atmospheric pressure and 10 to 15k.
g / cm 2 G. When the recovered helium gas flows into the snubber tank 11 in this state,
Since the suction pressure of the first stage compressor 13a rises, the pressure gauge 18a associated with the compressor 13a operates to narrow the flow control valve 17a and reduce the amount of circulation from the circulation path 16a. As a result, the pressure on the discharge side of the compressor 13a, that is, the pressure on the suction side of the second stage compressor 13b increases.
Since the pressure gauge 18b associated with the compressor 13b operates to narrow the flow control valve 17b and reduce the amount of circulation from the circulation path 16b, this amount is sent to the storage facility 15 through the check valve 20.
【００２９】また、回収ヘリウムガスの量が減少する
と、１段目の圧縮機１３ａの吸入圧力が低下してくるの
で、上記とは逆に両流量調節弁１７ａ，１７ｂが開いて
循環量を増加させ、両圧縮機１３ａ，１３ｂのそれぞれ
の吸入圧力を一定に保つようにする。When the amount of the recovered helium gas decreases, the suction pressure of the first stage compressor 13a decreases, and conversely, the two flow control valves 17a and 17b open to increase the circulation amount. Thus, the suction pressure of each of the compressors 13a and 13b is kept constant.
【００３０】このように圧縮機を複数基設けることによ
り、各圧縮機の圧縮比を小さくできるので、圧縮効率の
向上が図れ、また、循環経路における圧力差も小さくな
るので、流量制御が容易になり、その精度も向上する。By providing a plurality of compressors as described above, the compression ratio of each compressor can be reduced, so that the compression efficiency can be improved, and the pressure difference in the circulation path can be reduced, so that the flow rate can be easily controlled. And its accuracy is also improved.
【００３１】なお、３基以上多数の圧縮機を用いる場合
には、各圧縮機にそれぞれ循環経路を設けても良いが、
数基を一組にして循環させるようにしても良い。When three or more compressors are used, a circulation path may be provided for each compressor.
Several units may be circulated as a set.
【００３２】[0032]
【発明の効果】以上説明したように、本発明によれば、
回収ヘリウムガス量が一定しない場合でも、不純物が浸
透し易いガスバッグを設置する必要がなくなるので、回
収するヘリウムの純度を劣化させることがなく、回収ヘ
リウムガスの純度を維持したまま連続的に回収運転を行
うことができる。As described above, according to the present invention,
Even if the amount of recovered helium gas is not constant, there is no need to install a gas bag through which impurities easily penetrate, so the purity of the recovered helium is not degraded, and the recovered helium gas is continuously recovered while maintaining its purity. Driving can be performed.
【００３３】特に、圧縮機にオイルフリータイプを使用
して、該圧縮機でのヘリウムガスの純度劣化を防止する
ことにより、回収ヘリウムガスの純度によっては、精製
設備を通さずに貯蔵して再使用することが可能となり、
精製系のランニングコストを低減できる。In particular, by using an oil-free compressor to prevent the helium gas from deteriorating in the compressor, depending on the purity of the recovered helium gas, the helium gas can be stored without passing through a purification facility and re-used. Can be used,
The running cost of the purification system can be reduced.
【図１】 本発明の第１実施例を示す系統図である。FIG. 1 is a system diagram showing a first embodiment of the present invention.
【図２】 同じく第２実施例を示す系統図である。FIG. 2 is a system diagram showing a second embodiment in the same manner.
【図３】 同じく第３実施例を示す系統図である。FIG. 3 is a system diagram showing a third embodiment.
【図４】 従来のヘリウムガス回収装置の一例を示す系
統図である。FIG. 4 is a system diagram showing an example of a conventional helium gas recovery device.
１１…逆止弁 １２…スナバータンク １３…圧縮
機 １４…精製設備 １５…貯蔵設備 １６…循環経路 １７…流量調節
弁 １８…圧力計 ２１…分析計 ２２…バイパス経路DESCRIPTION OF SYMBOLS 11 ... Check valve 12 ... Snubber tank 13 ... Compressor 14 ... Purification equipment 15 ... Storage equipment 16 ... Circulation path 17 ... Flow control valve 18 ... Pressure gauge 21 ... Analyzer 22 ... Bypass path
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C01B 23/00 ＣＡ（ＳＴＮ)──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) C01B 23/00 CA (STN)
Claims (6)
圧力に昇圧して回収する方法において、回収するヘリウ
ムガスを逆止弁及びスナバータンクを介して圧縮機に吸
入して所定圧力に昇圧するとともに、該圧縮機の吸入圧
力が略一定になるように、圧縮機吐出側のヘリウムガス
を圧縮機吸入側に循環させることを特徴とするヘリウム
ガスの回収方法。1. A method for recovering a helium gas whose generation amount is not constant by increasing the pressure to a predetermined pressure and sucking the recovered helium gas into a compressor through a check valve and a snubber tank to increase the pressure to a predetermined pressure. Helium gas is circulated on the compressor discharge side to the compressor suction side such that the suction pressure of the compressor is substantially constant.
において、前記圧縮機にオイルフリータイプを使用し、
該圧縮機の吐出側にヘリウムガスの精製設備と貯蔵設備
とを連設するとともに、圧縮機吐出側のヘリウムガスの
純度を測定し、該純度に応じて前記精製設備をバイパス
させることを特徴とするヘリウムガスの回収方法。2. The method for recovering helium gas according to claim 1, wherein an oil-free type is used for the compressor,
A helium gas purification facility and a storage facility are connected in series on the discharge side of the compressor, the purity of the helium gas on the compressor discharge side is measured, and the purification facility is bypassed according to the purity. Helium gas recovery method.
において、前記圧縮機を複数基直列に配設するととも
に、各圧縮機の吸入圧力が略一定になるように、各圧縮
機吐出側のヘリウムガスを各圧縮機吸入側に循環させる
ことを特徴とするヘリウムガスの回収方法。3. The method for recovering helium gas according to claim 2, wherein a plurality of said compressors are arranged in series, and each compressor discharge side is arranged such that the suction pressure of each compressor is substantially constant. A method for recovering helium gas, comprising circulating helium gas to each compressor suction side.
機と、昇圧後のヘリウムガスの貯蔵設備とを備えたヘリ
ウムガスの回収装置において、前記圧縮機の吸入側に逆
止弁及びスナバータンクを連設するとともに、該圧縮機
の吸入圧力を測定する圧力計と、該圧力計で測定した圧
力に基づいて圧縮機吐出側のヘリウムガスを圧縮機吸入
側に循環させる循環経路を設けたことを特徴とするヘリ
ウムガスの回収装置。4. A helium gas recovery device comprising a compressor for increasing the pressure of helium gas to a predetermined pressure and a storage device for the helium gas after the pressure increase, wherein a check valve and a snubber tank are provided on the suction side of the compressor. A pressure gauge for measuring the suction pressure of the compressor and a circulation path for circulating helium gas on the compressor discharge side to the compressor suction side based on the pressure measured by the pressure gauge are provided. A unique helium gas recovery device.
において、前記圧縮機にオイルフリータイプの圧縮機を
使用し、圧縮機吐出側にヘリウムガスの純度を測定する
純度計と昇圧後のヘリウムガス中の不純物を除去する精
製設備とを設けるとともに、純度計で測定したヘリウム
ガスの純度に応じて前記精製設備をバイパスさせるバイ
パス経路を設けたことを特徴とするヘリウムガスの回収
装置。5. The helium gas recovery device according to claim 4, wherein an oil-free type compressor is used as the compressor, and a purity meter for measuring the purity of the helium gas is provided on the discharge side of the compressor, and the helium after the pressure is increased. A helium gas recovery apparatus, comprising: a purification facility for removing impurities in a gas; and a bypass path for bypassing the purification facility according to the purity of the helium gas measured by a purity meter.
において、前記圧縮機を複数基直列に配設するととも
に、各圧縮機の吸入圧力を測定する圧力計と、該圧力計
で測定した圧力に基づいて各圧縮機吐出側のヘリウムガ
スを各圧縮機吸入側に循環させる循環経路とを設けたこ
とを特徴とするヘリウムガスの回収装置。6. The helium gas recovery device according to claim 5, wherein a plurality of said compressors are arranged in series, a pressure gauge for measuring a suction pressure of each compressor, and a pressure measured by said pressure gauge. A circulating path for circulating helium gas on the compressor discharge side to each compressor suction side based on the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33696891A JP3271014B2 (en) | 1991-12-19 | 1991-12-19 | Helium gas recovery method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33696891A JP3271014B2 (en) | 1991-12-19 | 1991-12-19 | Helium gas recovery method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05170412A JPH05170412A (en) | 1993-07-09 |
| JP3271014B2 true JP3271014B2 (en) | 2002-04-02 |
Family
ID=18304272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33696891A Expired - Fee Related JP3271014B2 (en) | 1991-12-19 | 1991-12-19 | Helium gas recovery method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3271014B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5863588B2 (en) * | 2012-07-13 | 2016-02-16 | 大陽日酸株式会社 | Helium gas recovery method |
| CN110043467A (en) * | 2019-05-31 | 2019-07-23 | 上海齐耀螺杆机械有限公司 | Two-stage series connection compressor cycle reflux control system |
-
1991
- 1991-12-19 JP JP33696891A patent/JP3271014B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05170412A (en) | 1993-07-09 |
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