JP3268794B2 - Manufacturing method of aperture electrode body - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying machine, a printer,
Aperture electrode for use in a recording apparatus such as a facsimile
And a method for producing the same .

[0002]

2. Description of the Related Art Conventionally, an aperture electrode of this type has been used.
The recording apparatus includes a toner supply source, an aperture electrode body having an opening , and a counter electrode. Charged toner from the toner supply source is supplied to the vicinity of the aperture electrode body, by the aperture electrode member, toner flow is modulated in a controlled passage of the opening. Then, the modulated toner is drawn in the direction of the counter electrode, adheres to the support conveyed to the counter electrode, and an image is formed. This recording device is disclosed, for example, in US Pat.
No. 35, etc.

[0003] The aperture electrode body is disclosed in Japanese Patent Application No. 3-34.
As disclosed At a accompanying specification and drawings in 247 No. of the request thickness, for example, a thickness of a polyimide film of 25μm as an insulating layer, which is made form the thin film type method such as a sputtering method on both surfaces It is composed of a copper film which is an electrode film of 1 μm, polyimide, and an opening provided so as to penetrate the copper films provided on both surfaces thereof. The reason why the thickness of the copper film is as thin as 1 μm is to suppress generation of burrs and the like as much as possible at the stage of manufacturing the opening and to prevent an electrical short inside the opening.

[0004]

However, since the aperture electrode body has a very thin copper film as an electrode film of 1 μm over the entire surface, the aperture electrode body is required to be used when the recording apparatus is assembled or mounted. Contact with other parts, etc., causing disconnection. In addition, since the electric resistance of the electrode film pattern cannot be ignored, the response time of the device may be delayed, or the electrode film may generate heat and cause disconnection. Therefore, the reliability of the recording apparatus has been very low casting.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and it is an object of the present invention to prevent disconnection of an electrode film of an aperture electrode body as much as possible and to provide a manufacturing step near an opening.
The occurrence of burrs on the floor and electrical shorting inside the openings
Method of manufacturing highly reliable aperture electrode body by preventing as much as possible
It is intended to provide.

[0006]

In order to achieve this object, a method of manufacturing an aperture electrode body according to the present invention comprises an insulating substrate.
Form multiple openings for passing charged particles through the plate
And a step corresponding to the opening on the surface of the substrate.
A first electrode including an electrode for generating an electric field in the opening;
And a step of laminating pole layers.
In an area of the first electrode layer excluding the vicinity of the opening,
A step of forming a second electrode layer.
I have.

[0007]

The aperture electrode body of the present invention having the above-described structure is
In the manufacturing method, the aperture electrode body firstly has an insulating property.
Multiple openings for passing charged particles through the substrate
To the opening on the surface of the insulating substrate.
A first electrode layer including a correspondingly formed electrode;
You. Then, in a region excluding the vicinity of the opening of the first electrode layer,
Excludes the vicinity of the opening because the second electrode layer is formed
In the area, disconnection of the electrode layer can be prevented as much as possible.
At the manufacturing stage near the opening.
Burrs and electrical shorts inside openings
Prevent and manufacture a reliable aperture electrode body
Can be.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment embodying a method of manufacturing an aperture electrode body according to the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic configuration diagram of a recording apparatus embodying the present invention . Inside the recording device, a toner supply device 1 is provided.
4, an aperture electrode body 1 which is a toner flow modulating means,
A counter electrode 11 that can rotate and convey the support is provided.

The toner supply device 14 comprises a rotatable brush roller 22, a rotatable supply roller 23, a scraping member 24, and a toner guide plate 25. The supply roller 23 is provided in contact with the brush roller 22. The scraping member 24 is disposed so as to scratch the brush roller 22. Further, the toner guide plate 25
Is provided so as to guide the cloud of toner generated when the toner as charged particles on the brush roller 22 is scraped by the scraping member 24 to the aperture electrode body 1. The guide plate 25 is connected to the ground. These are covered with a toner case 15, and a toner 16 is stored inside the toner case 15.

The aperture electrode body 1 includes the guide plate 2
5 about 5 mm above. As shown in FIG. 2, the aperture electrode body 1 is provided on a resin film 2 as an insulating substrate made of polyimide or the like having a thickness of 25 μm.
Six data electrodes 4 and eight gate electrodes 3 extending in the width direction on the lower side are provided in an oblique lattice shape. The openings 5 are arranged at equal intervals in the width direction at positions where the gate electrode 3 and the data electrode 4 intersect.

The gate electrodes 3 are each connected to a gate electrode driving element 7. The gate electrode driving element 7 is connected to the scanning circuit 9, and 0 volt is sequentially applied to one gate electrode 3, plus 75 volts are applied to the other gate electrodes, and the guide plate 25 connected to the ground is applied. And a toner supply control electric field is formed between them. Each data electrode 4 is connected to a data electrode drive element 8. The data electrode driving element 8 includes an image data output circuit 10
And the data electrode applied voltage is set to 0 according to the image data.
It is configured to be switchable between volts and plus 75 volts.

The gate electrode 3, the data electrode 4, the gate electrode drive element 7, the operation circuit 9, the data electrode drive element 8, and the image data output circuit 10.
Are all surface-mounted on the aperture electrode body 1. Here, the aperture electrode body 1 is formed with a pattern of an electrode film 6 as a first electrode layer so that all of these elements can be mounted. The pattern of the electrode film 6 was formed with a thickness of 1 μm as it was sputtered in the opening region K (similarly on the back side), and the electrode film 6 pattern was formed in the region other than the opening region K. Later the second electrode layer
By performing the thick film process to form a total 20μ
An electrode film having a thickness of about m is formed.

For the film thickness increasing process, for example, an electroplating method is used. That is, an opening area K by a mask, such as by a resist agent, immersing the aperture electrode body chloride copper plating bath, by applying a voltage to the electrode film all hands, the copper film is formed on the electrode film. Finally, by removing the mask, the film thickness can be easily increased.

[0015] By this thickening process, except for the vicinity of the opening.
The electrode film in the region (2) is less likely to be disconnected due to contact with the recording device when assembling or mounting the recording device. Further, the electrical resistance of the electrode film can also be reduced by increasing the thickness of the electrode film. At this time, the reason why the thickening process is not performed on the opening region K is that when about 20 μm copper is formed around the already formed opening, it is electrically isolated by a 25 μm thick polyimide. This is because the data electrode 4 and the gate electrode 3 are connected, and the aperture electrode body cannot be used.
In addition, the opening 5 may be blocked by copper.

The aperture electrode body 1 is adhered to the spacer 27. A piezoelectric element 28 is provided on the spacer 27, and the piezoelectric element 28 is configured so that an oscillating electric field is applied by an oscillator 29. The spacer 27 holds the piezoelectric element 2 by the oscillating electric field generated by the oscillator 29.
8 is configured to resonate. Therefore,
The aperture electrode body 1 is vibrated together with the spacer 27.

In FIG. 1, the counter electrode 11 is connected to a DC power supply 26 of minus 600 volts.

Next, the operation of the recording apparatus of this embodiment will be described.

In the toner supply device 14, the toner 16
Is carried on the supply roller 23 and supplied to the brush roller 22. At this time, the toner 16 is supplied to the supply roller 23,
Then, the friction occurs while being in contact with the brush roller 22, and then, for example, it is charged positively (+).

The toner 16 carried by the brush roller 22 is transported to the position of the scraping member 24 by the rotation of the brush roller 22. At this point, the brush roller 22 is scraped by the scraping member 24. And
Due to the elasticity, when the brush returns, the toner 16 carried on the brush jumps up. As a result, toner 1
6 flies in the form of a cloud and flies along the guide plate 25 in the direction of the aperture electrode body 1.

[0021] Then, the toner 16 which flew cloud is modulated by aperture electrode body 1. That is, 0 volt is applied to one gate electrode 3, and plus 75 volts is applied to the other gate electrodes. Since no electric field is formed between the gate electrode 3 and the guide plate 25 to which a voltage of 0 volt is applied, the toner 16 is supplied as it is. Gate electrode 3 applied with plus 75 volts
In this case, an electric field is formed between the guide plate 25 and the plus (+) charged toner toward the guide plate 25, so that the supplied plus (+) charged toner is not supplied.

In a row of openings provided in the gate electrode 3 to which 0 volt is applied, the supplied plus (+)
The charged toner is modulated by a voltage applied from the data electrode driving element 8. That is, since no electric field is formed inside the opening 6 in the data electrode 4 to which 0 volt is applied, the supplied toner passes through the opening 6 as it is. On the other hand, in the data electrode 3 to which 75 volts is applied, an electric field is generated in the opening 6 where the positive (+) charged toner is directed toward the lower gate electrode 7.
Positive (+) charged toner does not pass through the opening 6. The positive (+) charged toner that has passed through the opening 6 is
Due to the flying electric field formed by 1, the particles fly and adhere to the support.

The scanning circuit sequentially activates the gate electrodes 3, that is, applies 0 volts, and applies 0 volts to the data electrodes 4 in the openings connected to the gate electrodes in accordance with image signals.
The volts are driven by applying plus 75 volts and recording is performed line by line.

When the scanning of the gate electrode 3 has completed one cycle, the support is moved by the dot pitch, and the above process is repeated. By the time the support is completely conveyed, a toner image is formed on the entire surface of the support.

The toner 16 supplied to the aperture electrode body 1 and not involved in recording resonates with the vibration of the piezoelectric element 8 vibrating by the oscillator 29, and vibrates together with the spacer 27 of the aperture electrode body 1. It is screened off by vibration acceleration. As a result, clogging of the opening during recording does not occur.

[0026] The present invention is not limited to the embodiment described above, in the range not departing from its spirit, it is possible to add a correction.

For example, 1 having no matrix structure
It is also possible to apply to a line type aperture electrode body . FIG. 3 shows an aperture electrode manufactured according to the present invention .
FIG. 4 is a perspective view showing a second embodiment of the body. In FIG.
Aperture electrode member 51 across the insulating layer 52, a shield electrode 53, and a plurality of data electrodes 54 are formed, one by one opening 55 to the respective data electrodes aperture electrode body 5
1.

The method of manufacturing the aperture electrode body 51 is as follows.
This is the same as the method described above.

[0029]

As is apparent from the above description , according to the method for manufacturing the aperture electrode body of the present invention, the aperture electrode
The polar body first allows charged particles to pass through an insulating substrate.
Openings are formed and the insulating substrate
On the surface of the plate, a second electrode including an electrode formed corresponding to the opening.
One electrode layer is laminated. And an opening in the first electrode layer
The second electrode layer is formed in a region except the vicinity of the portion.
In areas other than the vicinity of the opening, disconnection of the electrode layer
It can be prevented as much as possible, and
Burrs and the like inside the openings
Highly reliable aperture by minimizing electrical shorts
An electrode body can be manufactured.

[Brief description of the drawings]

FIG. 1 is a sectional view of a configuration of a recording apparatus embodying the present invention.

FIG. 2 is a top view showing a first embodiment of the aperture electrode body manufactured according to the present invention .

FIG. 3 is a perspective view showing a second embodiment of the aperture electrode body manufactured according to the present invention .

[Explanation of symbols]

Reference Signs List 1 aperture electrode body 2 resin film 3 gate electrode 4 data electrode 5 opening 6 electrode film 11 counter electrode 14 toner supply device 51 aperture electrode body 52 insulating layer 53 shield electrode 54 data electrode 55 opening

Claims (1)

(57) [Claims] 1. A method for passing charged particles through an insulating substrate.
Forming a plurality of openings for forming a plurality of openings on the surface of the substrate, the openings corresponding to the openings.
Laminating a first electrode layer including an electrode for generating an electric field
The manufacturing method of the aperture electrode body comprising the steps of:
The second electrode is formed in a region of the first electrode layer excluding the vicinity of the opening.
Characterized by comprising a step of forming a plurality of electrode layers.
A method for manufacturing a tea electrode body.