JP3261176B2 - Mounting method of multilayer piezoelectric actuator - Google Patents
Mounting method of multilayer piezoelectric actuatorInfo
- Publication number
- JP3261176B2 JP3261176B2 JP29872792A JP29872792A JP3261176B2 JP 3261176 B2 JP3261176 B2 JP 3261176B2 JP 29872792 A JP29872792 A JP 29872792A JP 29872792 A JP29872792 A JP 29872792A JP 3261176 B2 JP3261176 B2 JP 3261176B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- piezoelectric actuator
- length
- actuator
- built
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 17
- 230000010287 polarization Effects 0.000 claims description 12
- 230000036316 preload Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は積層型圧電アクチュエ
ータの取付方法、特にサブミクロンオーダーの超精密位
置決めや高速位置決め等が要求される積層型圧電アクチ
ュエータの取付、固定および組み込み方法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of mounting a laminated piezoelectric actuator, and more particularly to a method of mounting, fixing, and assembling a laminated piezoelectric actuator which requires ultra-precision positioning at a submicron order, high-speed positioning, and the like.
【０００２】[0002]
【従来の技術】従来、一般的な積層型圧電アクチュエー
タは、圧電セラミックスを複数枚積層した構造を持つ位
置決め用の素子であり、セラミックスの分極方向と同じ
方向の電圧を印加して、その時のセラミックスの伸び方
向の変位を利用する素子が知られている。従って、この
様な従来における積層型圧電アクチュエータ素子の利用
は、図４に示す様に電圧を印加していない時の素子１０
の長さからの伸びを利用することになる。この様な素子
１０において、変位を取り出すには、何等かの構造物１
１に組み込む必要があり、また、素子１０は素子自体の
構造から素子１０に引張応力が加わると素子１０の寿命
に問題が生じるので、予かじめ予圧を掛けて常に素子１
０に圧縮応力が掛かった状態で使用する必要が有る。2. Description of the Related Art Conventionally, a general laminated piezoelectric actuator is a positioning element having a structure in which a plurality of piezoelectric ceramics are laminated, and a voltage in the same direction as the polarization direction of the ceramics is applied. There is known an element utilizing displacement in the direction of elongation. Therefore, such a conventional laminated piezoelectric actuator element is used when the element 10 is not applied with a voltage as shown in FIG.
Will use the extension from the length. In such an element 10, in order to take out the displacement, some structure 1
In addition, the element 10 needs to be incorporated into the element 1, and if a tensile stress is applied to the element 10 due to the structure of the element itself, there is a problem in the life of the element 10.
It must be used in a state where a compressive stress is applied to 0.
【０００３】このために、素子１０を構造物１１に組み
込むに当たっては、素子１０を例えばネジ１２等によっ
て締め付けたり、或はカシメル等の外部からの何等かの
方法によって素子１０に圧縮応力を掛けて固定する必要
が有る。[0003] For this purpose, when incorporating the element 10 into the structure 11, the element 10 is tightened with, for example, a screw 12 or the like, or a compressive stress is applied to the element 10 by some external method such as Casmel. Must be fixed.
【０００４】[0004]
【発明が解決しようとする課題】従って、従来におい
て、図４に示される様に素子１０を構造物１１に組み込
むに当たっては、図５に示される様に、素子に電圧を印
加していない状態、つまり、素子長さが一番短い状態の
素子長さを素子長さとすれば、素子長さよりも大きな組
み込み部分を作製して、素子を組み込んだ後にネジ等を
用いて素子を固定して予圧を掛けるか、或は組み込み部
の一部をカシメル等の方法によって素子を固定して予圧
を掛けている。従って、素子を組み込むに当たってはネ
ジ止めをしたり、または、カシメル等の工程を必要とし
たり、或は素子に掛ける圧力を一定にするための調整が
困難である等の問題点があって生産性が悪い。Therefore, conventionally, when assembling the element 10 into the structure 11 as shown in FIG. 4, as shown in FIG. 5, a state in which no voltage is applied to the element, In other words, if the element length in the state where the element length is the shortest is defined as the element length, a built-in portion larger than the element length is manufactured, and after the element is assembled, the element is fixed using screws or the like and preload is applied. The element is fixed, or a part of the built-in portion is fixed by a method such as Casimel or the like, and a preload is applied. Therefore, when incorporating the element, there is a problem that the steps such as screwing, caching, etc. are required, or it is difficult to adjust the pressure applied to the element to be constant. Is bad.
【０００５】そこで、この発明の目的は、この様な従来
における問題点を解決するために、積層型圧電アクチュ
エータ素子に分極方向と逆の電圧を印加すると、電圧を
印加していない状態の素子長さよりも素子が縮むことに
着目して、組み込み側に電圧を印加していない状態の素
子長さよりも小さく、逆電圧を印加した状態の素子長さ
よりも大きい組み込み部分を作製して、素子を組み込む
際に当該部分に素子を組み込んだ後に、印加してあった
電圧を除去して素子長さを電圧を印加していない状態の
長さにすることによって、予圧の掛かった状態で素子を
固定して組み込むようにした積層型圧電アクチュエータ
の取付方法を提供することにある。Therefore, an object of the present invention is to solve the above-mentioned conventional problems by applying a voltage in the direction opposite to the polarization direction to the laminated piezoelectric actuator element, and thereby increasing the element length in the state where no voltage is applied. Focusing on the fact that the element shrinks more than the above, the embedded part is made smaller than the element length when no voltage is applied to the installation side and larger than the element length when the reverse voltage is applied, and the element is installed. At this time, after the element is incorporated in the relevant part, the applied voltage is removed and the element length is set to a state where no voltage is applied, thereby fixing the element in a state where a preload is applied. It is an object of the present invention to provide a method of mounting a laminated piezoelectric actuator which is incorporated by mounting.
【０００６】[0006]
【課題を解決するための手段】上述の目的を達成するた
めに、この発明に係る積層型圧電アクチュエータの取付
方法は、電圧を印加しない状態のアクチュエータの長さ
よりも小さく且つその分極方向と逆方向の電圧を印加し
て収縮した状態のアクチュエータの長さよりも大きな組
み込み部分を構造物に形成し、分極方向と逆方向の電圧
を印加することによりアクチュエータを収縮させ、収縮
した状態のアクチュエータを構造体の組み込み部分に組
み込み、その後、印加電圧を除去してアクチュエータを
元の長さに戻すことにより構造体の組み込み部分から予
圧を掛けた状態でアクチュエータが構造体の組み込み部
分に固定される方法である。In order to achieve the above-mentioned object, a method of mounting a laminated piezoelectric actuator according to the present invention is performed in a direction smaller than the length of the actuator in a state where no voltage is applied and in a direction opposite to the polarization direction. The actuator is contracted by applying a voltage in a direction opposite to the polarization direction to form a built-in portion larger than the length of the actuator in the contracted state by applying a voltage of the actuator to the structure. In this method, the actuator is fixed to the built-in portion of the structure while applying a preload from the built-in portion of the structure by removing the applied voltage and returning the actuator to the original length by applying the applied voltage. .
【０００７】[0007]
【作用】従って、この発明は上記の手段に依って、積層
型圧電アクチュエータ素子に分極方向と逆方向の電圧を
印加して、電圧を印加していない状態の素子長さよりも
収縮変位した素子を組み込んだ後に印加してあった電圧
を除去して素子長さを電圧を印加していない状態の長さ
に戻すことによって、素子を予圧の掛かった状態で固定
して組み込むことが出来るものである。Therefore, according to the present invention, by applying a voltage in the direction opposite to the polarization direction to the laminated piezoelectric actuator element by the above means, the element which has contracted and displaced from the element length in a state where no voltage is applied is obtained. By removing the voltage applied after assembling and returning the element length to the state in which no voltage is applied, the element can be fixed and incorporated in a state where a preload is applied. .
【０００８】この発明の他の目的や特長および利点は以
下の添付図面に沿っての詳細な説明から明らかになろ
う。[0008] Other objects, features and advantages of the present invention will become apparent from the following detailed description taken in conjunction with the accompanying drawings.
【０００９】この発明の積層型圧電アクチュエータの取
付方法においては、先ず、図３に示される様に、積層型
圧電アクチュエータの素子１（図１）に分極方向と逆方
向の電圧を印加すると、電圧を印加していない状態の素
子の長さよりも素子が収縮することに着目した。これに
基づいて、図１および図２に示される様に、積層型圧電
アクチュエータの素子１の組み込み側に電圧を印加して
いない状態の素子長さＬよりも小さく、逆電圧を印加し
た状態の素子長さＬ’よりも大きい長さＬ1の組み込み
部分を具備した構造物２を作製し、素子１を構造物２に
組み込む際に素子１に逆電圧を印加して素子１を収縮長
さｓだけ収縮して構造物２の組み込み部分に組み込み、
次いで、構造物２に素子１を組み込んだ後に、印加して
あった電圧を除去して、素子長さを電圧を印加していな
い状態の長さにすることによって、予圧の掛かった状態
で素子１を構造物２の組み込み部分に固定して構造物２
に組み込むようにする。In the method of mounting a multi-layer piezoelectric actuator according to the present invention, first, as shown in FIG. 3, when a voltage in a direction opposite to the polarization direction is applied to the element 1 (FIG. 1) of the multi-layer piezoelectric actuator, Attention was paid to the fact that the element contracts more than the length of the element where no voltage is applied. Based on this, as shown in FIGS. 1 and 2, the element length L in a state where no voltage is applied to the built-in side of the element 1 of the multilayer piezoelectric actuator is smaller than the element length L in a state where a reverse voltage is applied. the element length L 'to prepare a structure 2 provided with the built-in part of the length greater L 1 than the reverse voltage is applied to the element 1 by contracted length of the element 1 when incorporating the device 1 to the structure 2 shrink by s and install it in the built-in part of structure 2.
Next, after incorporating the element 1 into the structure 2, the applied voltage is removed and the element length is reduced to a state where no voltage is applied. 1 is fixed to the built-in portion of the structure 2 and the structure 2
To be incorporated into
【００１０】この様に、この発明の積層型圧電アクチュ
エータの取付方法に依れば、ネジ止めしたり、或はカシ
メル等の何等余計な工程を必要とせず、積層型圧電アク
チュエータの素子１の固定を、予圧を掛けることによっ
て所要の構造物２の組み込み部分に素子１を適宜に組み
込むことが出来る。また、組み込みの際の予圧は、素子
１の長さＬと素子のヤング率と構造物２の組み込み部分
の長さＬ1と組み込み部分のヤング率のみに依存するの
で、ネジ止めやカシメル等の際に必要な微妙な調整が全
く不要である。また、素子長さＬや組み込み部分の長さ
Ｌ1の精度は、近年のラップ技術等に依れば何等支障無
く加工出来る範囲である。As described above, according to the method of mounting the multi-layer piezoelectric actuator of the present invention, the element 1 of the multi-layer piezoelectric actuator is fixed without requiring any extra steps such as screwing or caulking. By applying a preload, the element 1 can be appropriately incorporated into a required portion of the structure 2. Also, the preload during incorporation is dependent only Young's modulus of the length L 1 and an integral part of the length L and Young's modulus and integral part of the structure 2 of the device element 1, screwing or the like caulking There is no need for any subtle adjustments needed. Further, the accuracy of the length L 1 of the element length L and embedded portion is any problem without machining can range According to recent lap technology.
【００１１】[0011]
【実施例】この発明の積層型圧電アクチュエータの取付
方法を実施すべく、５×７×２０mmの積層型圧電アクチ
ュエータ素子を用意した。この素子は図３に示される様
に分極方向に１４０Ｖ印加すると１８ミクロン延び、ま
た、分極方向と逆方向に７０Ｖの電圧を印加すると２３
ミクロン縮む素子である。組み込み部分として１９.９
９０mmの長さを持つ組み込み部分を用意し、素子に分極
方向と逆方向に７０Ｖ電圧を印加した状態で素子を組み
込んで電圧を除去した。この様な方法により、素子は組
み込み部分が、電圧を印加していない状態の素子長さよ
りも短い分だけ予圧が掛かった状態で固定することが出
来た。また、実際の使用に当たって、分極方向に対して
同じ方向に電圧を印加する通常の使用方法においては何
等問題が生じなかった。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to carry out the method of mounting a laminated piezoelectric actuator of the present invention, a laminated piezoelectric actuator element of 5 × 7 × 20 mm was prepared. As shown in FIG. 3, this device extends 18 microns when 140 V is applied in the polarization direction, and 23 μm when a voltage of 70 V is applied in the opposite direction to the polarization direction.
It is an element that shrinks by a micron. 19.9 as embedded part
A built-in portion having a length of 90 mm was prepared, and the device was built in a state where a voltage of 70 V was applied to the device in a direction opposite to the polarization direction, and the voltage was removed. According to such a method, the element can be fixed in a state where the built-in portion is preloaded by an amount shorter than the element length when no voltage is applied. Further, in actual use, no problem occurred in a normal use method in which a voltage is applied in the same direction as the polarization direction.
【００１２】[0012]
【発明の効果】上述した様に、この発明の積層型圧電ア
クチュエータの取付方法に依れば、ネジ止めしたり、或
はカシメル等の余計な工程を必要とせず、積層型圧電ア
クチュエータの素子の固定と予圧を掛けて素子を組み込
むことが出来るので効率が良く、また、ネジ止めやカシ
メル等の際に必要な微妙な調整が全く不要となる等の効
果が得られる。As described above, according to the method of mounting the multi-layer piezoelectric actuator of the present invention, no additional steps such as screwing or caulking are required, and the element of the multi-layer piezoelectric actuator is not required. Since the element can be incorporated by fixing and preloading, the efficiency is high, and effects such as no need for delicate adjustments required at the time of screwing or caulking are obtained.
【図１】この発明の取付方法により積層型圧電アクチュ
エータ素子を取付ける状況を示す概要図である。FIG. 1 is a schematic diagram showing a situation where a laminated piezoelectric actuator element is mounted by the mounting method of the present invention.
【図２】この発明によって素子が取付けられた積層型圧
電アクチュエータを示す概要図である。FIG. 2 is a schematic view showing a laminated piezoelectric actuator to which an element is attached according to the present invention.
【図３】印加電圧と積層型圧電アクチュエータ素子の変
位量との関係を示すグラフである。FIG. 3 is a graph showing a relationship between an applied voltage and a displacement amount of a multilayer piezoelectric actuator element.
【図４】従来技法による積層型圧電アクチュエータ素子
の取付けを示す概要図である。FIG. 4 is a schematic view showing attachment of a multilayer piezoelectric actuator element according to a conventional technique.
【図５】従来技法における印加電圧と積層型圧電アクチ
ュエータ素子の変位量との関係を示すグラフである。FIG. 5 is a graph showing a relationship between an applied voltage and a displacement amount of a multilayer piezoelectric actuator element in a conventional technique.
１ 積層型圧電アクチュエータの素子 ２ 構造物 １０ 積層型圧電アクチュエータの素子 １１ 構造物 １２ ネジ DESCRIPTION OF SYMBOLS 1 Element of laminated piezoelectric actuator 2 Structure 10 Element of laminated piezoelectric actuator 11 Structure 12 Screw
Claims (1)
み込む積層型圧電アクチュエータの取付方法において、 電圧を印加しない状態のアクチュエータの長さよりも小
さく且つその分極方向と逆方向の電圧を印加して収縮し
た状態のアクチュエータの長さよりも大きな組み込み部
分を構造物に形成し、 分極方向と逆方向の電圧を印加することによりアクチュ
エータを収縮させ、 収縮した状態のアクチュエータを構造体の組み込み部分
に組み込み、 その後、印加電圧を除去してアクチュエータを元の長さ
に戻すことにより構造体の組み込み部分から予圧を掛け
た状態でアクチュエータが構造体の組み込み部分に固定
されることを特徴とする積層型圧電アクチュエータの取
付方法。1. A method of mounting a laminated piezoelectric actuator in which the laminated piezoelectric actuator is incorporated in a structure, wherein the actuator is contracted by applying a voltage smaller than the length of the actuator in a state where no voltage is applied and in a direction opposite to the polarization direction. A built-in portion larger than the length of the actuator in the state is formed in the structure, the actuator is contracted by applying a voltage in a direction opposite to the polarization direction, the actuator in the contracted state is built into the built-in portion of the structure, and thereafter, The mounting of the laminated piezoelectric actuator, wherein the actuator is fixed to the built-in portion of the structure under a preload from the built-in portion of the structure by removing the applied voltage and returning the actuator to the original length. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29872792A JP3261176B2 (en) | 1992-11-09 | 1992-11-09 | Mounting method of multilayer piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29872792A JP3261176B2 (en) | 1992-11-09 | 1992-11-09 | Mounting method of multilayer piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06151992A JPH06151992A (en) | 1994-05-31 |
| JP3261176B2 true JP3261176B2 (en) | 2002-02-25 |
Family
ID=17863497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29872792A Expired - Fee Related JP3261176B2 (en) | 1992-11-09 | 1992-11-09 | Mounting method of multilayer piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3261176B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8546877B2 (en) | 2006-09-29 | 2013-10-01 | Semiconductor Components Industries, Llc | Semiconductor device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4992182B2 (en) * | 2005-01-07 | 2012-08-08 | 日本精工株式会社 | Axial fine movement device with rotating mechanism |
| ATE517440T1 (en) * | 2007-03-14 | 2011-08-15 | Delphi Tech Holding Sarl | REDUCTION OF VOLTAGE GRADIENTS WITH PIEZOELECTRIC ACTUATORS |
-
1992
- 1992-11-09 JP JP29872792A patent/JP3261176B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8546877B2 (en) | 2006-09-29 | 2013-10-01 | Semiconductor Components Industries, Llc | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06151992A (en) | 1994-05-31 |
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| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |