JP3260557B2 - Shutter or slitter for optical devices - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shutter or a shutter for an optical device made of a zirconia sintered body having a low light transmittance .
About liters . In light-related equipment that uses light such as laser, ultraviolet light, and visible light, precision-shaped parts that block these lights are required. Parts are widely available for such applications.

Incidentally, the transmittance in the text generally means incident light = transmitted light + reflected light + absorbed light (1) light transmittance = transmitted light / incident light × 100. ... (2) light blocking ratio = 100−transmittance (3). Accordingly, the present invention relates to a use invention in which a ceramic having a reduced light transmittance, that is, a ceramic having a reduced light transmittance is used for a light-shielding component.

[0003]

2. Description of the Related Art A black zirconia-based sintered body is selected from (1) metals of the 4a, 5a and 6a groups and iron group metals of the periodic table as a coloring agent in JP-A-59-227770. At least one or more metals and / or alloys, (2) at least one or more compounds selected from carbides, borides, silicides and mutual solid solutions of metals of groups 4a, 5a and 6a of the periodic table , Are disclosed. However, it is disclosed that its use is suitable for materials for decorative parts such as exterior parts for watches, tie pins, brooches, cufflinks and the like and wear-resistant materials for fishing tackle parts, sliding parts, etc. No mention is made of component applications.

[0004] Such precision light-shielding components include (1) an aluminum alloy having a surface treated with alumite, (2) a metal such as brass, copper, and stainless steel with a black chrome plating, (3). Some of them have a chromium deposition film on the surface of brass or copper.

[0005]

However, these metal parts have in common that the rigidity is low, so that the shape accuracy cannot be maintained, the thermal expansion coefficient is high, and the accuracy is likely to decrease due to a temperature change. There are problems such as the possibility of deformation of parts, the possibility of aging over time due to residual stress and the like, and the deterioration of light shielding properties due to long-term exposure to light.

Further, the aluminum alloy (1) is easily deformed plastically, has low rigidity, and is difficult to process, so that it is difficult to produce a precision processed part. The alumite treatment has a good light-shielding property, but the surface accuracy is deteriorated by the treatment, so that it is not suitable for producing ultra-precision parts.

[0007] Brass, copper, etc. of (2) can be processed relatively easily due to their ease of processing, but the plating thickness of black chrome plating is up to 5 µm, which causes a problem when manufacturing ultra-precise parts.

[0008] The chromium deposited film (3) has a very small thickness and thus is good as a coating film for precision parts. However, since the chromium deposited film is very thin and weak, the film can be easily removed even by a slight scratch. In addition, there is a problem that chromium is deteriorated due to long-time irradiation with strong light and a hole is formed in the film, and a solution is desired.

Although there are various problems with metal materials as described above, as a material having low light transmittance in ceramics,
For example, black alumina, boron carbide, ZrB ₂ , TiB
_2. Description of the Related Art Black ceramic sintered bodies such as 2.TiC and HfC are generally known. However, since these ceramics have low toughness, chipping and chipping are apt to occur when precision processing is performed, and processing time is very long if chipping and chipping is prevented, it becomes very expensive parts. The drawback is that it remains an unsolved problem.

[0010] The present invention solves these problems, it is possible to precision machining, the optical function consisting of zirconia sintered body
An object of the present invention is to provide a shutter or a slitter for a serial device .

[0011]

The gist of the present invention is as follows. (1) At least one of carbides, nitrides, carbonitrides, and borides of metals belonging to groups 4a, 5a, and 6a of the periodic table is selected from 5 to 5
Including 0 vol%, light balance a sintered body consisting essentially of zirconia, sintered body for light of 150~800nm wavelength, characterized in that the light transmittance is less than 2%
Shutter or slitter for related equipment . (2) The integrated reflectance of the ceramic sintered body is 150
20% or less for light having a wavelength of ８００800 nm, wherein the shutter or slot for an optical device according to (1) is provided.
Ter . (3) 100 zirconia in the ceramic sintered body
~ 80wt% partially stabilized zirconia and 0 ~ 20wt%
The shutter or slitter for an optical device according to (1) or (2), characterized by comprising alumina. (4) having a knife edge shape;
(1) The optical-related device chassis according to any one of (1) to (3).
Or slitter . (5) The ceramic sintered body is manufactured by hot pressing, gas pressure sintering, or HIP.
(4) The shutter for an optical device according to any one of (4)
Is a slitter . (6) The three-point bending strength at room temperature of the ceramic sintered body is 1000 MPa or more, and the fracture toughness (IM method) is 7 MNm.
^The shutter or slitter for an optical device according to any one of (1) to (5), wherein the shutter or the slitter is −3/2 or more.
-

Hereinafter, the present invention will be described in detail. First, in the present invention, the above-mentioned problems of the prior art are as follows.
A sintered body containing 5 to 50% by volume of one or more of carbides, nitrides, carbonitrides, and borides of a 5a or 6a group metal and the balance substantially consisting of zirconia is used as a material for these components. It is solved by doing. The metals in the periodic table 4a, 5a, and 6a referred to herein are Ti, V, Cr, Zr,
Nb, Mo, Hf, Ta, W. The partially stabilized zirconia sintered body itself is translucent and cannot be used as a light-shielding component, but zirconia has high toughness among ceramics and can be precisely processed.

Most of the above-mentioned carbides, nitrides, carbonitrides, and borides are light-shielding materials, but these materials are difficult to sinter, and the resulting sintered bodies have poor toughness and strength. Low and unsuitable for precision machining. Therefore, when partially stabilized zirconia and one or more of the above carbides, nitrides, carbonitrides, and borides are combined and sintered, a light-shielding material that can be processed precisely is obtained, and is used as a precision light-shielding part. it can.

It is preferable that the material has few pores and high strength and high toughness because of the necessity of precision processing. Therefore, it is preferable that the material is pressure-sintered by hot press, gas pressure sintering, HIP or the like. The three-point bending strength at room temperature is 10
Above MPa (preferably at least 1200 MPa), as the fracture toughness value (IM method), it is required to be 7 MNm ^-3/2 or more.

If the amount of the above-mentioned carbide, nitride, carbonitride and boride is less than 5% by volume, the light-shielding property is not sufficient, and the light transmittance becomes 2% or more. On the other hand, if the content is more than 50% by volume, the toughness and strength of the sintered body are reduced, so that precise processing cannot be performed.

The term "volume%" as used herein means that, when the specific gravity of zirconia is ρ _z , the weight is W _z , the specific gravity of carbides and the like is ρ _c , and the weight is W _c , volume% = [(W _c / ρ _c ) / (W _c / ρ _c + W _z /
ρ _z )] × 100.

Since zirconia requires high strength and high toughness, partially stabilized zirconia is preferred. The partially stabilized zirconia may contain up to 20% by weight of alumina. This is because alumina up to 20% by weight further increases the strength of the partially stabilized zirconia without lowering the toughness.

In addition, these light-shielding parts may be required to have a specific rigidity due to a high precision requirement. In such a case, such a light-shielding part as Hf.Ta.W carbides, nitrides, carbonitrides, borides and the like is required. High specific gravity products are not preferred.

These light-shielding parts may be required to have a clear light-shielding property at the light-shielding boundary, such as a shutter or a slitter. In this case, a very thin shape is required at the boundary. For example, it has a sharp knife edge shape of 50 to 30 ° and a tip thickness of 10 to 30 μm. Therefore, the material used for these components needs to have a light-shielding property with a thin plate, and the light transmittance at a thickness of 15 μm needs to be 2% or less (preferably 0.2% or less).

If a clear light-shielding property is required at the light-shielding boundary, light reflected from the light-shielding component (irregular reflection light) may be a problem. In this case, the component has a low reflectance. Required. Practically, it is desirable that the integrated reflectance of the component in such a case is 20% or less. The term “integral reflectance” refers to 180 ° including diffuse reflection of incident light.
It means the ratio of the sum of light reflected in all directions.

The light used is a laser, ultraviolet light,
There is a mercury lamp, etc., the wavelength of which is 436 nm in ultraviolet g-line,
365 nm for i-line, 248 nm for KrF excimer laser,
A 633nm with ArF excimer laser 193 nm, with F ₂ excimer laser 157 nm, with He-Ne laser, the wavelength of the light shielding light must cover the 150～800Nm.

[0022]

The present invention will be specifically described below with reference to examples. Example 1 A partially stabilized zirconia (PSZ) HIP sintered body containing 40% by volume of TiC has a bending strength of 1600 MP.
In fracture toughness 9.1 MNm ^-3/2 in a, the transmittance was measured by processing in 15μm thickness. The transmittance of the F ₂ excimer laser was 0.02% or less, and the integrated reflectance was 9.5%.
When the 0.5 mm thick sintered body is knife-edge-processed at a 35 ° tip of 10 μm, the tip tipping width is 3 μm.
m or less.

Example 2 Partially stabilized zirconia (PSZ) containing 30% by volume and 20% by weight of ZrB ₂ alumina
A 70% by volume HIP sintered body has a bending strength of 190
In fracture toughness 8.4 MNm ^-3/2 at 0 MPa, the transmittance was measured by processing in 15μm thickness. The transmittance of ultraviolet i-ray is 0.
At 10%, the integrated reflectance was 10.2%. In addition, when the 0.5 mm-thick sintered body was subjected to knife edge processing at a 35 ° tip of 10 μm, the tip chipping width was 10 μm or less.

Example 3 20% by volume of NbC and Cr ₃ C
HIP sintered partially stabilized zirconia containing ₂ to 10 wt% (PSZ) is a bending strength 1500 MPa, in fracture toughness 8.7 MNm ^-3/2, the transmittance was measured by processing in 15μm thickness . He-Ne laser transmittance is 0.05%
, And the integrated reflectance was 8.9%. In addition, this 0.5
The tip chipping width was 8 μm or less when a 35-degree tip 10 μm knife edge processing was performed on a mm-thick sintered body.

Embodiment 4 TiCN (TiC-TiN)
A 50:50 solid solution) partially stabilized zirconia (PSZ) HIP sintered body containing 50% by weight has a bending strength of 170%.
In 0 MPa, fracture toughness is 10.2 MNm ^-3/2, the transmittance was measured by processing in 15μm thickness. The transmittance of the KrF excimer laser was 0.02% or less, and the integrated reflectance was 7.9%. In addition, a 35 ° tip 1
The tip chipping width when knife edge processing of 0 μm was performed was 12 μm or less.

Example 5 A sintered body having the composition shown in Table 1
m, and the transmittance and integrated reflectance of ultraviolet g-rays were measured. The results are shown in Table 1.

[0027]

[Table 1]

[0028]

Industrial Applicability The present invention has a light-shielding property and a low reflectance for light of 150 to 800 nm, and can be used for a shutter or a slot for a light-related device made of a zirconia sintered body that can be processed precisely.
It can be used as a precision light-shielding component for optical devices such as excimer lasers, ultraviolet rays, and other lasers.

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Shoji Seino 2-6-3 Otemachi, Chiyoda-ku, Tokyo New Nippon Steel Corporation (56) References JP-A-59-227770 (JP, A) JP-A-63-166758 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G02B 1/02 C04B 35/48

Claims (6)

(57) [Claims] 1. A sinter comprising 5 to 50% by volume of at least one of carbides, nitrides, carbonitrides, and borides of metals belonging to groups 4a, 5a, and 6a of the periodic table, with the balance being substantially zirconia. A shutter or slitter for an optical device , wherein the sintered body has a light transmittance of 2% or less with respect to light having a wavelength of 150 to 800 nm. 2. The shutter for an optical device according to claim 1, wherein the integrated reflectance of the ceramic sintered body is not more than 20% at a wavelength of 150 to 800 nm.
Tar or slitter . 3. A partially stabilized zirconia having a zirconia content of 100 to 80% by weight in the ceramic sintered body and a zirconia content of 0 to 2%.
3. The shutter or slitter according to claim 1 , wherein the shutter or the slitter is made of 0% by weight of alumina.
- 4. The optical device according to claim 1, wherein the optical device has a knife edge shape .
Shutter or slitter . 5. The optical system according to claim 1, wherein the ceramic sintered body is manufactured by hot pressing, gas pressure sintering, or HIP.
Jitter or slitter . 6. The ceramic sintered body has a three-point bending strength at room temperature of 1000 MPa or more and a fracture toughness (IM method).
Wherein the but is 7 MNm ^-3/2 or more, claim 1
5. The shutter or shutter for an optical device according to any one of
Liter .