JP3235550B2 - Swing drive - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an object to be processed which is supported in a vacuum processing chamber for performing a predetermined process on the object under a predetermined vacuum, and is processed while being swung. A swing drive device that can be used as a support device, or in other fields, for supporting an object to be swing driven, swinging, or swinging a member such as a mechanical component to be swing driven. About.

[0002]

2. Description of the Related Art A swing drive device is used in various fields. For example, it is installed in a vacuum processing chamber of a vacuum processing apparatus for performing a predetermined process on an object to be processed under a predetermined vacuum, and is used to support and swing the object to be processed. Examples of such a vacuum processing apparatus include: ion implantation into a substrate such as a semiconductor device substrate, a glass substrate for a liquid crystal display device, or the like, or an ion implantation device for ion doping; A film forming apparatus for forming a predetermined thin film, an etching apparatus for etching a film formed on such a substrate or the like according to a predetermined pattern under, for example, plasma can be given.

[0003] In addition, the swing drive device is used in various technical fields to support an object to be swing driven, to swing, or to swing a member such as a mechanical part to be swing driven. ing. Here, referring to FIG. 7, it is installed in a vacuum processing chamber of a vacuum processing apparatus for performing a predetermined process on an object to be processed under a predetermined vacuum, and is used to support and swing the object to be processed. The swing drive device described above will be exemplified and described.

[0004] The swing driving device A 'shown in FIG. 7 has a large area (for example, 550 mm.times.) In a liquid crystal display device under a predetermined vacuum.
650 mm) is provided in a vacuum processing chamber (ion implantation chamber) R of an ion implantation apparatus for performing predetermined ion implantation on a glass substrate G to support the glass substrate G and perform uniform ion implantation on the entire substrate. And a swing driving device as a glass substrate support device for reciprocatingly swinging the glass substrate G in the direction of the arrow α with respect to the ion beam B to be irradiated.

The swing drive device A 'has a member 1' for supporting a glass substrate G. The member 1 'is provided with a balance weight 9 on the side opposite to the glass substrate support side with the swing center 1a' of the member 1 'therebetween. The member 1 'is provided with a swing shaft 2' whose center is aligned with the center of swing 1a 'of the member 1'. The shaft 2 'is mounted on a bearing (not shown) provided on the wall of the ion implantation chamber R. By being supported, the whole is swingably supported. The member 1 'is reciprocally oscillatingly driven in the direction of arrow α in the figure by driving the shaft 2' directly or reversely by the motor M directly or via a transmission mechanism (not shown).

In the swing driving device A 'described above, the swing member 1', and hence the glass substrate G supported thereon, can be swung by operating the motor M in the forward and reverse directions. In the driving device A ′, the balance weight 9
Is provided, the direction of gravity passing through the center of gravity of the swinging member 1 'passing through the center of gravity 1a' passing through the center of gravity 1a 'swings in any direction. When the motor M is moved or returned from the swing position, the rotational torque to be given by the motor M is substantially the same as that of the member 1 ′.
What is necessary is just to meet the inertial force including the weight 9 and the glass substrate G. Therefore, the load on the motor can be reduced and the member 1 'can be swung.

[0007]

However, in order to smoothly swing the member 1 ', the weight 9 must be provided as described above, and if the weight 9 is provided, the swing drive is performed accordingly. The inertia force of the part to be increased becomes large, and the acceleration torque by the motor M is required to swing the member 1 'so that the motor is increased in size and expensive.

In order to reduce the load on the motor M, it is conceivable to transmit the power of the motor M to the member 1 'via a speed reduction mechanism. However, if such a speed reduction mechanism is adopted, the motor M can be moved in one direction. When the motor is rotated and then rotated in the opposite direction, the motor operation cannot be accurately transmitted to the member 1 ′ due to play (backlash) between the transmission members in the speed reduction mechanism, and the member 1 ′ swings. There is a problem that the operation cannot be controlled accurately.

[0009] In addition to the above-described swing driving device A ', in a conventional swing driving device, a balance weight is usually employed to smoothly swing a member to be swing-driven. Therefore, an object of the present invention is to provide a swing drive device capable of smoothly swinging a member to be swing driven by reducing the load on a motor.

Another object of the present invention is to provide a rocking drive device capable of smoothly and accurately rocking a member to be rocked while reducing the load on a motor.

[0011]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a swing member which is driven to swing by a motor, and which is deformed according to a swing displacement in one direction from a neutral position of the swing member. A swing drive device comprising: a spring for storing energy; and a spring for storing deformation energy in accordance with a swing displacement of the swing member in the opposite direction from the neutral position.

More specifically, the present invention provides a swing member which is driven to swing by a motor, and wherein the swing member is swung in one direction from a neutral position to which a moment due to gravity is not applied. A spring for storing a reaction force (deformation energy) for substantially canceling a moment based on an eccentric load applied to the member, and an eccentric load applied to the oscillating member in response to an oscillating displacement of the oscillating member in the opposite direction from the neutral position And a spring for storing a reaction force (deformation energy) for substantially canceling the moment based on the swing driving device.

Here, the neutral position where the moment due to gravity is not applied to the swinging member is defined as the weight of the swinging member or the rotational moment caused by the weight of the member and the object supported by the member. It is a position that does not work. According to this swing driving device, a motor is connected to the swing member directly or indirectly via a suitable transmission mechanism. When the swinging member is directly driven by the motor without passing through a transmission mechanism such as a speed reduction mechanism, the swinging member can be driven with higher accuracy because the backlash does not occur in the transmission mechanism.

In any case, in this swing drive device, the swing member is driven forward and reverse by a motor, so that the swing member is
Alternatively, the object supported thereon can be swung further. Then, a spring that stores a reaction force (deformation energy) in response to the swing displacement in one direction or the opposite direction from the neutral position of the swing member, when the swing member swings in the one direction or the opposite direction, Since the reaction force is stored in accordance with the displacement of the member, the swinging member is displaced from the neutral position, and the swinging member has a weight corresponding to the amount of displacement of the swinging member or the object or the like supported by the swinging member. Even if a moment due to the resulting eccentric load is applied, the moment is substantially offset by the reaction force (deformation energy) stored in the spring, and therefore, the rotational torque required for the motor is substantially reduced by the swing member or What suffices for the inertial force of an object or the like supported by the suffice is sufficient, so that the load on the motor can be reduced and the swing member can be smoothly reciprocated. In addition, since the load on the motor is reduced, the cost of the motor can be reduced.

The swing drive device according to the present invention may include a mechanism for converting the swing operation of the swing member into a reciprocating linear movement, the mechanism including a linear movement member that performs a reciprocating linear movement. When this mechanism is adopted, a spring that stores a reaction force in accordance with a swing displacement in one direction from a neutral position of the swing member is provided in one direction of the linear motion member according to the swing operation of the swing member. A spring that stores a reaction force according to the displacement of the swing member, and a spring that stores the reaction force according to the swing displacement of the swing member in the opposite direction from the neutral position, according to the swing operation of the swing member. The spring may store a reaction force according to the displacement of the linear motion member in the opposite direction.

Further, the reciprocating linear motion converting mechanism may be a simple mechanism, a rotating gear provided so that the center of rotation coincides with the center of rotation of the swinging member and interlocked with the member. A mechanism including a rack gear meshing with the rotating gear as the reciprocating linear motion member can be exemplified. In any case, examples of the spring include a compression coil spring, a tension coil spring, a plate spring, and a wound spring. Further, one spring stores a deformation energy in accordance with a swing displacement in one direction from a neutral position of the swing member, and a spring deforms in accordance with the swing displacement of the swing member in the opposite direction from the neutral position. It may also serve as a spring for storing energy.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic front view of an example of the swing drive device according to the present invention, and FIG. 2 is a schematic side view of a part of the swing drive device shown in FIG. A swing driving device A shown in these figures is a vacuum processing device (an ion implantation device for performing ion doping or ion implantation in a narrow sense, a film forming device, an etching device, etc.) for performing a predetermined process on an object to be processed under a predetermined vacuum. ) Is a swing drive device of a type that can be used to support the object to be processed and swing by being installed in a vacuum processing chamber in the above.

The swing driving device A has a large area (for example, 550 mm × 65 mm) in a liquid crystal display device under a predetermined vacuum.
0 mm) is installed in a vacuum processing chamber (ion implantation chamber) R of an ion implantation apparatus for performing predetermined ion implantation on a glass substrate G to support the glass substrate G and to uniformly ion-implant the entire substrate. And a swing driving device as a glass substrate support device for reciprocatingly swinging the glass substrate G in the direction of the arrow α with respect to the ion beam B to be irradiated.

The swing drive device A has a T-shaped member 1 for supporting a glass substrate G as viewed from the front.
The shape of the member 1 is not particularly limited. Member 1
Is provided with a swinging shaft 2 whose center is aligned with the swinging center 1a. The shaft 2 is supported by a bearing 3 provided on a wall Rw of the ion implantation chamber R, so that the whole is formed. It is swingably supported. A rotating motor M is directly connected to the shaft 2, and the member 1 is driven by the motor M in the forward / reverse operation to move the member 1 in FIG.
It is driven to swing back and forth in the direction of the middle arrow α. Motor M is wall R
w is supported via a support member 82.

A rotating gear 4 is fitted on the shaft 2 so that the center of rotation of the rotating gear 4 coincides with that of the shaft 2, and a rack gear 5 meshes with the gear 4. The rack gear 5 can linearly reciprocate along a guide member 6 installed at a fixed position. The gear 4 and the rack gear 5 constitute a mechanism T for converting the swinging movement of the member 1 into a reciprocating linear movement. The guide member 6 is supported on the outer wall of the ion implantation chamber R via a support member 81.

Compression coil springs 71 and 72 are disposed outside each end of the rack gear 5. A fixed position member 73 is provided outside each spring, and a bolt 74 penetrates through the fixed position member 73 so as to be slidable in the rack gear moving direction. Each fixed position member 73 is provided upright at an end of the guide member 6. Each of the springs 71 and 72 is fitted and supported by the bolt, and is located between the bolt head 741 and the fixed position member 73. Each of the bolts 74 is screwed with a nut 742 for preventing the bolt from dropping out of the member 73 toward the rack gear.

Now, the springs 71 and 72 will be further described. As shown in FIG. 3, the swinging member 1 is a neutral member in which a moment due to an eccentric load caused by the weight W of the member 1 and the glass substrate G is not applied to the member 1. It is assumed that an angle θ ° swings in any direction from the position NP. At this time, the moment m applied to the member 1 is changed from the swing center 1a of the member 1 to the weight W.
If the distance to the center of gravity X (corresponding to the radius of rotation of the center of gravity X) is S, then m = WSSin θ. When this is illustrated, m draws a sine curve as shown in FIG.

Since the reaction force F of the springs 71 and 72 is proportional to the amount of deformation, a straight line L passing through the position where θ is 0 ° and approximating the sine curve of the moment m as shown in FIG.
And the straight line L is used to cancel the moment m.
In view of the reaction force F of 1 and 72, the springs 71 and 72 having a spring constant that satisfies the straight line are employed, and the member 1 is swung in an angle range Y where the straight line L approximates a sine curve. To

According to the swing driving apparatus A described above, the swing member 1 can be further swung by reciprocating the glass substrate G supported by the forward and reverse operation of the motor M. Since the motor M is directly connected to the swinging member 1 without going through a deceleration mechanism or the like, the motor operation can be transmitted to the swinging member with high accuracy, and the member 1 can be driven with high accuracy. Further, the gear 4 rotates in synchronization with the swing of the swing member 1, and the rack gear 5 meshing with the gear 4 linearly moves. Therefore, one direction from the neutral position NP of the swinging member 1 (clockwise in the figure)
Alternatively, the rack gear 5 linearly moves in one direction (left direction in the figure) or in the opposite direction (right direction in the figure) according to the swinging displacement in the opposite direction (counterclockwise direction in the figure), and accordingly, the left side in the figure. The spring 71 or the right spring 72 is compressed, and stores a reaction force (deformation energy).

Therefore, the oscillating member 1 is displaced from the neutral position NP, and the oscillating member 1
Even when a moment m due to an eccentric load caused by the weight W of the glass substrate G or the like is applied, the moment is not affected by the spring 71.
Or the reaction force or deformation energy of 72, and the rotational torque required for the motor M is sufficient to substantially match the inertial force of the swinging member 1 and the glass substrate G. The swinging member 1 and thus the glass substrate G can be smoothly reciprocatedly rocked while reducing the load on M. In addition, since the load on the motor M is reduced, the motor M need only be inexpensive.

In the swing drive device A described above, a mechanism T for converting the swing operation of the swing member into a reciprocating linear movement is employed, and the springs 71 and 72 are provided alongside this. As shown in FIG. 5, a winding spring 7 is
5 and one end 751 thereof is connected to the member 1 and the other end 752 thereof is connected to the wall Rw, or a leaf spring 76 is disposed on both sides of the member 1 as shown in FIG. Deformation energy accompanying movement may be stored.

In place of the mechanism T, the gear 4
Adopts a reciprocating slider crank mechanism with a crank as
The sliders 71 and 72 may be alternately compressed by the slider. When the mechanism T is used, a tension spring may be used instead of the springs 71 and 72.

In the mechanism T, a sector gear may be used instead of the gear 4. In short, the present invention provides a swing member driven to swing and an eccentric load applied to the swing member according to a swing displacement in one direction from a neutral position where a moment due to gravity is not applied to the swing member. A spring storing a reaction force (deformation energy) for substantially canceling the moment based on the eccentric load applied to the swing member in response to the swing displacement of the swing member in the opposite direction from the neutral position. And a spring for storing a corresponding reaction force (deformation energy).

[0029]

As described above, according to the present invention, it is possible to provide a rocking drive device capable of reducing the load on a motor and smoothly rocking a member to be rocked. Further, according to the present invention, it is possible to provide a swing drive device capable of smoothly and accurately swinging a member to be swing-driven while reducing the load on the motor.

[Brief description of the drawings]

FIG. 1 is a schematic front view of an example of a swing drive device according to the present invention.

FIG. 2 is a schematic side view of a part of the swing drive device shown in FIG.

FIG. 3 is an explanatory diagram of a moment applied to a swing member of the swing drive device shown in FIG. 1;

FIG. 4 is a diagram showing a change curve of a moment applied to a swing member of the swing drive device shown in FIG.

FIG. 5 is a schematic side view of another example of the swing drive device according to the present invention.

FIG. 6 is a schematic front view of still another example of the swing drive device according to the present invention.

FIG. 7 is a diagram showing a conventional example.

[Explanation of symbols]

 Reference Signs List A swing drive device 1 swing member 1a swing center NP swing member neutral position 2 swing shaft 3 bearing R ion implantation chamber Rw wall G glass substrate M motor T reciprocal linear motion conversion mechanism 4 rotary gear 5 rack gear 71, 72 compression coil spring 73 fixed position member 74 bolt 741 bolt head 742 retaining nut 75 winding spring 76 leaf spring

Continuation of the front page (58) Fields investigated (Int. Cl. ⁷ , DB name) H01J 37/317 C23C 14/50 C23C 16/44 H01J 37/20 H01L 21/00 H01L 21/265 603

Claims (3)

(57) [Claims] An oscillating member which is oscillated by a motor, and an eccentric load applied to the oscillating member in response to an oscillating displacement of the oscillating member in one direction from a neutral position where a moment due to gravity is not applied. A spring that stores a reaction force that substantially cancels the moment based on the eccentric load applied to the swing member in response to the swing displacement of the swing member in the opposite direction from the neutral position. And a spring for storing the force. 2. A mechanism for converting the swing operation of the swing member into a reciprocating linear movement, the mechanism including a linear movement member that reciprocates linearly, and is provided in one direction from a neutral position of the swing member. A spring that stores a reaction force in accordance with the swing displacement of the linear motion member is a spring that stores a reaction force in accordance with a displacement in one direction of the linear motion member according to the swing operation of the swing member. The spring that stores a reaction force in accordance with the swing displacement in the opposite direction from the neutral position is a spring that stores a reaction force in accordance with the displacement of the linear motion member in the opposite direction in accordance with the swing operation of the swing member. The swing drive device according to claim 1. 3. A predetermined process is performed on an object to be processed under a predetermined vacuum.
Installed in the vacuum processing chamber of the vacuum processing equipment
3. The method according to claim 1, further comprising supporting and swinging the physical object.
Rocking drive.