JP3206992B2 - Automatic pressure regulator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic pressure regulating valve,
In particular, the risk of explosion, and petrochemical plants handling gas with such flammable or toxic automatic pressure adjustment instrumentation that can be used in a semiconductor manufacturing process such as using a so-called semiconductor gas
About the installation .

[0002]

2. Description of the Related Art Conventionally, in a petrochemical plant, a semiconductor manufacturing process, or the like that handles explosive, flammable or toxic gas, an automatic pressure control valve has been used to adjust the gas to a predetermined pressure. I have. As such an automatic pressure regulating valve, there is a pressure reducing valve having a spring for balancing the secondary pressure, and the like. FIG. 8 shows an example of a mechanical pressure reducing valve.

In FIG. 8, a valve element 52 for opening and closing a port 51 communicating between a primary side and a secondary side is provided inside a pressure reducing valve 50. The valve element 52 is ported by the coil spring 53
It is urged in the closing direction with respect to 51 and is urged in the opening direction by a coil spring 54 provided on the opposite side with the port 51 interposed therebetween. A diaphragm 55 is interposed between the valve body 52 and the coil spring 54. The diaphragm 55 compresses the coil spring 54 when receiving the secondary pressure to move the valve body 52 in the closing direction.

[0004] With such a structure, the urging force of the coil spring 54 and the force applied to the diaphragm 55 are balanced to obtain a predetermined secondary pressure. That is, when the secondary pressure is large and the pressing force applied to the diaphragm 55 exceeds the urging force of the coil spring 54,
Port 51 is closed, pressure reducing valve 50 stops supplying secondary pressure
It is supposed to work in Mel direction. Conversely, when the secondary pressure is small and the urging force of the coil spring 54 exceeds the pressing force applied to the diaphragm 55, the port 51 is opened, and the pressure reducing valve 50 moves in the direction of increasing the secondary pressure. It is supposed to work.

[0005]

In such a pressure reducing valve, the secondary pressure and the urging force of the coil spring 54 antagonize in the equilibrium state, so that the force for pressing the valve body 52 toward the port 51 is sufficient. I can't get it. For this reason, even if the secondary pressure reaches a predetermined pressure and it is necessary to stop the gas flow in order to suppress the rise of the secondary pressure, a sufficient pressing force against the rigidity of the diaphragm or the like occurs even if it is necessary to stop the gas flow. Since it does not apply to the body 52, the port 51 cannot be completely closed by the valve body 52, and there is a problem that a so-called outflow phenomenon may occur in which gas leaks to the secondary side and increases the secondary side pressure.

Further, in order to prevent the outflow phenomenon, it is necessary that the valve element 52 be in uniform contact with the entire periphery of the port 51. For this reason, the valve stem 56 projecting from the valve body 52 toward the diaphragm 55 must always be in vertical contact with the surface of the diaphragm 55, and high precision is required for its processing and assembly. There is a problem that it becomes complicated and the production efficiency is poor.

[0007] It is an object of the present invention to provide an automatic pressure adjusting device which can obtain a sufficient pressing force on a valve body even when the secondary side pressure reaches a predetermined pressure, and has a high production efficiency.

[0008]

Means for Solving the Problems The present invention includes a valve body other than the entrance of the fluid is closed, thereby engaging the valve element incorporated in the valve body, the pressure receiving surface of Ru under pressure on the secondary side To
The valve body due to a decrease in the pressure on the secondary side.
Pressure receiving means for moving the
The air pressure is applied inside and supplied,
Non bleed automatic pressure regulating valve and a biasing means for biasing the valve body via the pressure-receiving means in the opening direction, you
And the urging force of the urging means of the automatic pressure regulating valve.
It met automatic pressure regulating device comprising a control means for reduction, before
The control means includes a nozzle for blowing air, and a
Opposed and open / closed
The pressure adjustment discharge path for atmospheric pressure adjustment and the adjustment in this pressure adjustment discharge path
A channel provided with a discharge / exhaust passage for extracting pressure to the outside
Opening and closing the pressure-regulating discharge path, thereby
The pressure is continuously changed from the negative pressure area to the positive pressure area.
The automatic pressure regulating valve is provided in the valve body
And a contact portion that contacts the pressure receiving means,
Means is displaced in a direction away from said abutting portion of said valve body.
To release the contact between the pressure receiving means and the contact portion.
Removing means for pressing the contact portion of the valve body.
From the position to the position separated from the contact portion.
Displaceable, and the pressure of the pressure regulating discharge path of the control means.
Is a positive pressure, the urging means is operated in accordance with the positive pressure.
A step adjusts the opening of the valve body, and adjusts the pressure regulating discharge path.
When the pressure becomes negative, the release means moves the pressure receiving means forward.
Displace in the direction away from the contact part of the valve body,
The contact between the pressure receiving means and the contact portion is released.
It is characterized by that.

In the present invention as described above, the secondary side
Pressure detecting means for detecting pressure is provided, and
Based on the pressure detected by the pressure detecting means.
It is preferable to adopt one that adjusts the biasing force of the biasing means.
No.

[0010]

According to the present invention, the secondary pressure is set to a predetermined pressure.
If the pressure is less than the force, the control means
Supply positive pressure to the stage and press in the closing direction by secondary pressure
The urged valve element is urged in the opening direction by the urging means. This
The valve body opens and closes according to the magnitude of the secondary pressure.
The valve opening is adjusted so that the secondary pressure is the specified pressure.
Is done. On the other hand, when the secondary pressure reaches a predetermined pressure,
The control means supplies a negative pressure to the release means of the automatic pressure regulating valve,
The pressure receiving means and the valve element are separated, and the contact portion between the pressure receiving means and the valve element is separated.
Release the engagement with. As a result, the secondary pressure is
When the pressure has been reached, the pressing force of the urging means
The valve body should be completely closed by primary pressure, etc.
And the outflow phenomenon is prevented. Also,
The control means only needs to supply compressed air to the nozzle,
And negative pressure can be generated.
With an automatic pressure regulating valve that requires both
Also requires no special air source equipment,
Opening / closing mechanism for pressure adjustment discharge path, extraction discharge path and pressure adjustment discharge path
With a simple structure, both positive and negative pressure can be generated
The structure of the automatic pressure regulator can be simplified.
You.

Further, since the engagement between the valve body and the pressure receiving means is released, a portion such as a valve stem provided on the valve body for engaging with the pressure receiving means such as a diaphragm is separated from the surface of the diaphragm or the like. In addition, it is not necessary to always contact the part vertically with the pressure receiving means for complete closure, and high precision is not required for its processing and assembly, thereby achieving the above object.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an automatic pressure adjusting device 1 according to a first embodiment of the present embodiment.
Is for adjusting the high-pressure gas in the tank 2 to a predetermined pressure.

The automatic pressure regulator 1 has a control unit 10 for controlling the pressure of the high pressure gas, an automatic pressure regulating valve 20 for regulating the pressure of the gas to a predetermined value, and a pressure on the upstream side of the automatic pressure control valve 20. A primary pressure gauge 3 to be displayed and a pressure sensor 4 as pressure detecting means for detecting a pressure on the downstream side of the automatic pressure control valve 20 are provided.

The control section 10 is control means for controlling the automatic pressure regulating valve 20 based on the pressure detected by the pressure sensor 4.
A pressure generator 11 for generating air pressure for driving an automatic pressure regulating valve 20, and a control device 12 for controlling the pressure generator 11
And

The pressure generator 11 compresses air by a compressor 13 and stores the obtained compressed air in a tank 14, thereby enabling a stable gas supply.

A nozzle 15 is connected to the tank 14 of the pressure generator 11, and the tip of the nozzle 15 is installed inside the chamber 16. The chamber 16 has two discharge paths 16A and 16B.
Is provided. One discharge passage 16A is arranged near the outlet of the nozzle 15 and extends along the traveling direction of the air blown from the nozzle 15. A servo valve 17 that opens and closes according to a signal from the control device 12 is connected to the end of the discharge path 16A, and the air flowing through the discharge path 16A can be shut off according to a signal from the control device 12. here
In addition, the discharge path 16A faces the nozzle 15 and
Pressure regulating exhaust for air pressure adjustment whose internal channel can be opened and closed
It is a departure route. On the other hand, the discharge path 16B is
A discharge path for taking out the adjusted pressure to the outside
You.

When the servo valve 17 is closed, the air blown out from the nozzle 15 is accumulated in the chamber 16, so that a positive pressure is generated in the other exhaust passage 16B. When the servo valve 17 is opened, the air blown from the nozzle 15 attracts the air in the chamber 16 and discharges it from the exhaust path 16A to the outside, so that a negative pressure is generated in the exhaust path 16B. The opening of the servo valve 17 changes continuously from fully open to fully closed.By changing the opening of the servo valve 17, the pressure in the exhaust path 16B is changed from a negative pressure region to a positive pressure. It is possible to change continuously to the area.

The control device 12 compares a pressure value of the pressure sensor 4 with a set value of the set device 18 to determine a set value of the secondary pressure to be controlled, and compares the pressure value with the set value. Value and
And a controller 19 that outputs a signal to the servo valve 17 so as to correct the deviation of

FIG. 2 shows the mechanical structure of the automatic pressure regulating valve 20. In the figure, the automatic pressure regulating valve 20 is of a so-called non-bleed type. Automatic pressure regulating valve 20
The valve body 210 has a valve body 210 which is closed except for a gas inlet and a gas inlet and outlet, a bonnet 220 installed at an upper part of the valve body 210 in the figure, and a diaphragm motor installed at an upper part of the bonnet 220 in the figure. 230 are provided.

The valve body 210 has a columnar shape in which almost the entire upper surface in the figure is a recess 210A. A port 211 for communicating the primary side and the secondary side is provided inside the valve body 210, and a valve body 21 for closing the port 211 is provided.
2 is provided so as to be movable up and down in the figure. An abutting portion 213 that is raised in a triangular cross section is provided in a ring shape on the periphery of the port 211 on the valve body 212 side.

The valve element 212 has a stepped portion having a tapered lower portion in the figure.
It has a cylindrical shape with 214. Port 21 of valve element 212
A ring-shaped groove 215A is provided on the end surface on the one side. A ring-shaped elastic member 215 is fitted into the groove 215A. At the center of this ring-shaped groove 215A,
Stem protruding through valve 211 to the top of valve body 210
216 are provided. Here, the valve element 212 is
4, the valve body 212 is urged toward the port 211 by the urging force of the coil spring 217 fitted into the elastic member 215.
Is pressed against the contact part 213 on the port 211 side,
Gas does not leak when closed.

The bonnet 220 is shaped like a pot lid bulging outward, and has a through hole 221 at the top of the bulge. The bottom surface of the bonnet 220 is covered with a pressure receiving diaphragm 222 which is a pressure receiving means for receiving a secondary pressure. By fixing the bonnet 220 to the valve body 210 with bolts or the like, the pressure receiving diaphragm 222 and the concave portions of the valve body 210 are formed.
A pressure receiving diaphragm chamber 223 is formed between the pressure receiving diaphragm 210A and the pressure receiving diaphragm chamber 223.

The pressure receiving diaphragm 222 is a disk made of stainless steel. At the center of the pressure receiving diaphragm 222, a thick disk 224 is provided.
A rod 225 extending through the through hole 221 to the inside of the diaphragm motor 230 is provided at the center of the diaphragm motor 230. The distal end of the stem 216 of the valve element 212 is engaged with the central portion of the surface of the disk 224 opposite to the surface having the rod 225. Here, the stem 216 is provided with a pressure receiving diamond as pressure receiving means.
The contact portion is in contact with the flam 222.

The diaphragm motor 230 has an operation diaphragm 232 inside a case 231 formed in a hollow disk shape.
Is installed. The inside of the diaphragm motor 230 is partitioned into two spaces by an operation diaphragm 232, and the upper one in the figure is an operation diaphragm chamber 233 to which air pressure for operation is applied. The distal end of a rod 225 extending from the pressure receiving diaphragm 222 is joined to the central portion of the operation diaphragm 232. What
The side of the hood 220 is clearly visible
Is provided with an atmosphere opening hole penetrating the side wall.
The pressure release die inside the hood 220
Space sandwiched between the diaphragm 222 and the operation diaphragm 232
Is at atmospheric pressure.

Here, when the operation diaphragm chamber 233 is pressurized, a force is generated in the diaphragm motor 230 to push the rod 225 downward in the figure. Thus, as shown in FIG. 3, the diaphragm motor 230 constitutes biasing means for biasing the valve body 212 away from the port 211 via the pressure receiving diaphragm 222, that is, in the opening direction. . The biasing force of the diaphragm motor 230 is
It changes according to the air pressure given from the control unit 10. This air pressure is adjusted by the control unit 10 based on the secondary pressure detected by the pressure sensor 4.

On the other hand, when the pressure in the operation diaphragm chamber 233 is reduced, the diaphragm motor 230
2 is pulled upward in the drawing to generate a force for separating the valve body 212 from the valve body 212. As a result, the diaphragm motor 230 is
As shown in FIG. 5, a release means for releasing the engagement between the pressure receiving diaphragm 222 and the valve body 212 is constituted.

In this embodiment, when the secondary pressure is equal to or lower than the predetermined pressure, the control unit 10 controls the automatic pressure regulating valve 20
A positive pressure is supplied to the diaphragm motor 230, and the valve body 212 pressed in the closing direction by the secondary pressure is urged by the diaphragm motor 230 in the opening direction. This allows
The valve element 212 approaches the port 211 according to the magnitude of the secondary pressure, and the port 211 is adjusted so that the secondary pressure becomes a predetermined pressure.
Is adjusted.

On the other hand, when the secondary pressure reaches a predetermined pressure, the control unit 10 supplies a negative pressure to the diaphragm motor 230 of the automatic pressure regulating valve 20 to separate the pressure receiving diaphragm 222 and the valve body 212. To disengage each other. As a result, the valve element 212 completely closes the port 211 by the urging force of the coil spring 217 and the primary pressure. When the secondary pressure drops below a predetermined pressure, the control unit
10 immediately supplies the positive pressure to the automatic pressure control valve 20, and the adjustment of the secondary pressure is immediately restarted.

According to the above-described embodiment, the following effects can be obtained. That is, when the secondary pressure reaches the predetermined pressure, the engagement between the pressure receiving diaphragm 222 and the valve element 212 is released, and the antagonistic state of the force applied to the valve element 212 is also released. For this reason, the urging force of the coil spring 217 and the pressing of the primary side pressure allow the valve body 212 to completely close the port 211, and when the gas is supplied to the primary side at the time of closing, the gas leaks to the secondary side. It is possible to prevent a so-called outflow phenomenon that causes an increase in the downstream pressure.

Since the pressure receiving diaphragm 222 and the valve body 212 are separated from each other to completely close the port 211, the stem of the valve body is always brought into contact with the pressure receiving diaphragm vertically as in the prior art. Eliminates the need. This eliminates the need for the stem 216 to constantly contact the pressure-receiving diaphragm 222 vertically, and the processing of the stem 216 and the valve body 212
No high precision is required for assembling, and the manufacturing efficiency of the automatic pressure regulating valve 20 can be improved.

Further, the diaphragm motor 230, to which both positive and negative pressures are supplied, is connected to the rod of the pressure receiving diaphragm 222.
225, the pressure receiving diaphragm 222
Is quickly engaged with and separated from the valve element 212, the controllability is improved, and the secondary pressure can always be controlled stably even if the gas pressure or the supply amount fluctuates.

Further, the pressure receiving diaphragm 222 is separated from the valve body 212 by moving in the same direction as the moving direction of the valve body 212, and the engagement between the pressure receiving diaphragm 222 and the valve body 212 is released. The urging means and the releasing means can also be used for 230, and the entire structure of the automatic pressure regulating valve 20 can be simplified.

Further, a pressure sensor 4 for detecting the secondary pressure and a control unit 10 for performing control based on the pressure detected by the pressure sensor 4 are provided, and a feedback loop is formed by these. However, the correction can be performed quickly, and the controllability of the secondary pressure can be improved.

FIG. 5 shows a second embodiment of the present invention. In this embodiment, the diaphragm motor 230 in the first embodiment is replaced with a cylinder motor 240. That is, a disc-shaped cylinder 241 having a hollow inside is mounted on the bonnet 220 on the upper side of the valve body 210. A piston 242 is provided inside the cylinder 241 so as to be movable up and down in the figure. The tip of a rod 225 extending from the pressure receiving diaphragm 222 is joined to the piston 242. A piston ring 243 made of an elastic member such as rubber is fitted on the peripheral surface of the piston 242. As a result, the pressurizing chamber 244 above the piston 242 in the figure is pressurized and depressurized, whereby the pressure receiving diaphragm 222 is engaged with and separated from the valve element 212.

In this embodiment as well, the first
In addition to obtaining the same operation and effect as the embodiment, the cylinder motor 240 can be set to have a higher working limit pressure than the diaphragm motor 230, so that the cylinder motor 240 can be used for higher pressure gas.

[0036]

[0037]

[0038]

[0039]

The present invention is not limited to the above embodiments.
It does not include the following deformations
is there. That is, as the pressure generator, the compressor 13
The pressure generator 11 is not limited to the pressure generator 11 having the tank 14 provided between the nozzle 15 and the nozzle 15. For example, the tank 14 may be omitted and the nozzle 15 may be directly connected to the compressor 13.
Instead of 13, a pressure source such as a high-pressure gas tank may be used. In short, the specific structure and type are not limited as long as both can generate both negative pressure and positive pressure.

Further, the port formed in the valve body is not limited to the port 211 having the abutting portion 213 protruding in a triangular cross-section around the valve body 212 side. For example, there is no bulge around the valve body side. The port may be a port that comes into surface contact with the valve body. In short, the port may be of any shape as long as it can be completely closed and does not cause leakage at the time of closing.

[0042]

As described above, according to the present invention, even if the secondary pressure reaches a predetermined pressure, it is possible to obtain a sufficient pressing force on the valve body and to improve the production efficiency. Can be.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an automatic pressure adjusting device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view illustrating the automatic pressure control valve of the present embodiment.

FIG. 3 is a cross-sectional view showing a state in which the valve body and the operating means of the present embodiment are engaged.

FIG. 4 is a cross-sectional view showing a state in which the engagement between the valve body and the operating means of the present embodiment is released.

FIG. 5 is a view similar to FIG. 2, showing an automatic pressure regulating valve according to a second embodiment of the present invention.

FIG. 6 is a view similar to FIG. 2 showing a conventional example.

[Description of Signs ] 1 Automatic pressure regulator 10 Control unit 15 as control means Nozzle 16 Chamber 16A Discharge path 16B as a pressure regulation discharge path Discharge path as a discharge path 20 Automatic pressure control valve 210 Valve body 212 Valve element 216 Stem 222 as abutting part Pressure-receiving diaphragm 230 as pressure-receiving means Diaphragm motor 240 serving both as urging means and releasing means Cylinder motor also serving as urging means and releasing means

Claims (2)

(57) [Claims] 1. A valve body which is closed except for a port of a fluid,
Thereby engaging the valve element incorporated in the valve body, of the secondary side and has a pressure receiving surface of Ru under pressure on the secondary side
Pressure receiving means for moving the valve body in the opening direction by reducing pressure, and air pressure for operation is applied inside,
A non-bleed-type automatic pressure adjusting valve having an urging means for urging the valve body in the opening direction via the pressure receiving means by the supplied air pressure ; and
An automatic device having control means for adjusting the urging force of the urging means.
A pressure adjusting device , wherein the control means includes: a nozzle for blowing air;
And the internal flow path can be opened and closed.
Adjust the air pressure adjustment discharge path and the pressure adjustment discharge path.
With a discharge passage for taking out the pressure
Opening / closing the pressure-regulating discharge path, thereby taking out the discharge exhaust path.
Pressure continuously changes from the negative pressure area to the positive pressure area.
The automatic pressure control valve is provided in the valve body and the
An abutting portion for abutting against the pressure receiving means, and
Displaced in a direction away from the contact portion of the
Release means for releasing the contact between the step and the contact portion.
The contact portion of the valve body can be pressed from the position where the contact portion can be pressed.
The pressure receiving means can be displaced to a position separated from the contact portion.
And the pressure of the pressure regulating discharge path of the control means is a positive pressure.
In this case, according to the positive pressure, the urging means may
And the pressure in the pressure regulating discharge path is reduced to a negative pressure.
Then, the release means connects the pressure receiving means to the valve body.
By displacing in the direction away from the contact part, the pressure receiving means and
And an automatic pressure control valve for releasing the contact of the contact portion . 2. The automatic pressure adjusting device according to claim 1, further comprising a pressure detecting means for detecting the secondary pressure .
Is, the control means, automatic pressure regulating device, characterized in this <br/> and is for adjusting the biasing force of the biasing means on the basis of the pressure detected by said pressure detecting means.