JP3206208B2 - Disk support device for film forming equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for forming a film on a disk such as a laser disk or a compact disk, and more particularly to a disk supporting apparatus for rotating the film forming apparatus while supporting the disk.

[0002]

2. Description of the Related Art A disk supporting device of a conventional film forming apparatus is
It is as shown in FIG. In the figure, 1 is a film forming chamber, 2 is a cover located at a film forming position of the film forming chamber 1, 3 is a support arm supporting the cover 2, and 4 is a rotatable lower side of the cover 2 via a bearing 5. , A projection 6 protruding from the lower surface of the pressing body 4, and a taper 7 formed on the lower peripheral surface of the projection 6.

Reference numeral 8 denotes a transfer arm, 9 denotes a flat C-shaped support portion at the tip of the transfer arm 8, 10 denotes a disk placed on the support portion 9, 11 denotes a vertically movable rotation shaft, and 12 denotes a rotation shaft 11
A receiving portion protrudes from the peripheral surface of the upper end of the disk 10, and the lower surface of the peripheral portion of the central hole 13 of the disk 10 is placed on the receiving portion 12.
Reference numeral 14 denotes a concave portion formed on the upper end surface of the rotation shaft 11 and into which the protrusion 6 is fitted. Reference numeral 15 denotes a taper formed at the upper end of the rotation shaft 11.

Next, the operation will be described. Support part 9
The disk 10 is transported to a film-forming position above the rotation shaft 11 by the forward rotation of the transfer arm 8 on which the disk 10 is mounted, and the rotation shaft 11 rises and the upper end of the rotation shaft 11 is tapered.
5, the disc 10 is placed on the receiving portion 12, and the concave portion 14 of the rotation shaft 11 is fitted into the protrusion 6 of the pressing body 4 via the taper 7, and the disc 10 The upper surface of the peripheral portion of the central hole 13 is pressed by the pressing member 4, and the disk 10 is held between the receiving portion 12 and the pressing member 4.

Next, the transfer arm 8 rotates in the reverse direction, the support portion 9 moves away from the rotation shaft 11 due to the C-shaped lacking portion of the support portion 9, the transfer arm 8 shifts to the standby position, and the rotation shaft 11 rotates. Then, a film is formed. When the film formation is completed, the transfer arm 8 rotates forward to move to the film formation position, and the rotation shaft 11 rotates.
Is lowered, the disc 10 is placed on the support section 9, and the transfer arm 8 is rotated in the reverse direction to transfer the disc 10 on which the film has been formed.

[0006]

In the conventional disk supporting apparatus, since the supporting arm 3 is located on the film forming surface side of the disk 10, a film is formed on the supporting arm 3 and the film is deposited on the supporting arm 3. The film forming speed is reduced, and the film thickness distribution is disturbed. Further, the film deposited on the support arm 3 peels off and falls on the film-forming surface of the disk 10, which adversely affects the film quality and the film thickness distribution. In addition, in order to align the upper end of the rotation shaft 11 with the holding member 4 at a predetermined position, a taper 7 must be formed at the protrusion 6 of the holding member 4, and the taper 7 and the upper end of the rotation shaft 11 must be aligned. There is a problem in that abrasion powder is generated due to sliding contact, which adversely affects film quality.

In the present invention, taking the above points into consideration, the holding body for pressing the upper surface of the disk is not supported by the support arm located above the disk, so that the deposition rate on the support arm is reduced, It is an object of the present invention to provide a disk support device of a film forming apparatus that prevents an adverse effect on film quality and film thickness distribution.

[0008]

According to a first aspect of the present invention, there is provided a disk supporting apparatus for a film forming apparatus, comprising: a ring-shaped contact member positioned below a film forming position;
A rotation shaft provided at the center of the contact body so as to be able to move up and down,
A support shaft provided on an upper inner side of the rotation axis, the support shaft
A plurality of open / close rods rotatably supported and the rotation shaft
At the lowered position of the rotation axis,
A lower rod of each of the open / close rods located below the contact body ;
The end is extended from the upper end of the rotation shaft and extended outward.
An upper rod of each of the opening and closing rods, and a center of each of the upper rods of the rotation axis
And a spring that pulls the upper rods to the contracted state.
In the retracted state, each of the upper rods is
And does not come out of the peripheral surface of the rotating shaft.
The center hole of the disc fits into the upper end of the
It is placed on the receiving part of the rotation axis,
The tip of each of the lower rods is in contact with the contact body,
Each open / close lever pivots against the spring, and each upper lever expands
The distal end of each of the upper rods and the receiving portion are used to dispose the disc.
It is designed to hold a hook . Claim 2
Akira is a ring-shaped abutment located below the film deposition position,
The upper part is provided at the center of the contact body so as to be movable up and down.
A cylindrical rotating shaft, and a plurality of rotating shafts provided inside an upper portion of the rotating shaft.
Opening and closing supported by several spindles and each of the spindles rotatably
A rod and a descending position of the rotation shaft, which is derived from the rotation shaft.
In the above, each of the tip portion is located below the contact body
The lower rod of the opening / closing rod and the upper end are derived from the upper end of the rotation shaft.
A vertical rod of each of the opening and closing rods, and an outer side from an upper end of each of the vertical rods.
Extending the upper rod and each of the vertical rods toward the center of the rotation shaft
To attract, a spring for each of said upper rod to Chijimi閉state, the
A pressing body that is rotatably supported on the tip of each of the upper rod, each
A spring for holding each of the presser bodies in a vertical state with respect to the upper rod,
It is erected at the upper end of the rotation shaft and has approximately the same diameter as the rotation shaft.
A main cover, and a sub cover fixed to each of the upper rods.
In the closed state, each of the presser body and the
Each sub cover does not protrude from the peripheral surface of the rotation shaft, and
Due to the rise, the center hole of the disc fits on the upper end of the rotation shaft.
The disc is placed on the receiving portion of the rotating shaft by entering, being
Further, due to the rise of the rotation shaft, the tip of each of the lower rods is moved forward.
Each of the opening / closing rods rotates against the spring in contact with the contact body.
Move, the upper rods and the sub-covers open, and the
So that the disc is sandwiched between the holding body and the receiving portion.
It was made.

[0009]

According to the first aspect of the present invention, the present invention is constructed as described above.
The disk supporting device of the film forming apparatus is mounted below the film forming position.
Abutting body is located, and the rotation axis rises to the center of the abutting body.
A support shaft that is provided to be able to descend freely and is provided inside the upper part of the rotation shaft
A plurality of opening / closing rods are rotatably supported on the
The tip of the lower lever of each opened / closed lever is positioned below the abutment.
And the upper lever of each open / close lever is led out from the upper end of the rotation shaft and
The upper rod is extended toward the center of the rotation shaft by a spring.
Pull each upper rod to the closed state, and in the closed state,
Each upper rod does not protrude from the peripheral surface of the rotation shaft, and as the rotation shaft rises,
The center hole of the disc fits into the upper end of the rotation shaft,
It is placed on the receiving part of the rotation axis,
The tip of each lower rod abuts against the abutment body and each open / close rod resists the spring.
And each upper rod expands, and the tip of each upper rod and the receiving part
As a result, there is no support arm that supports the disc holding part on the film deposition side of the disc, so that there is no obstruction to the disc deposition, and the positioning no wear portion, adverse effects on reduction and quality-thickness distribution of the deposition rate is prevented, teeth
Duck configuration Ru easy der. Next, claim 2 of the present invention
According to the invention, a ring-shaped contact body is positioned below a film forming position.
And a rotating shaft with a cylindrical top at the center of the contact body
And a plurality of supports provided inside the upper part of the rotation shaft.
The opening and closing rod is rotatably supported by the shaft, and is drawn out from the rotation shaft.
When the tip of the lower rod of each open / close rod is
The upper end of the vertical bar of each open / close lever is located below the abutment body.
Derived from the upper end of the pivot axis, the upper rod is outward from the upper end of the vertical rod
It is extended, and each vertical rod is pulled toward the center of the rotation shaft by a spring.
Move each upper rod to the closed state, and presser body at the tip of each upper rod.
It is rotatably supported, and each presser body for each upper rod by a spring.
Is held vertically, and the upper end of the rotation axis is almost the same as the rotation axis.
A main cover having a diameter is provided, and a sub cover is fixed to each upper rod.
In the closed state, each holding body and each sub-cover
It does not protrude from the peripheral surface of the rotating shaft, and the rising of the rotating shaft
The center hole of the disk fits into the upper end, and the disk
It is placed on the receiving part, and when the rotation axis rises,
The tip comes into contact with the contact body, and each open / close lever rotates against the spring
Then, each upper rod and sub-cover expand, and each holding body and receiving part
Due to so as to sandwich the more disk, according to claim 1, wherein
In addition to the action of the device of
The disc is clamped and the main cover covers the axis of rotation.
The surface is covered, and the upper rod and holding body are
Is covered, and adverse effects on film quality and film thickness distribution are more reliably prevented.
Is done.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment will be described with reference to FIGS. In these figures, the same reference numerals as those in FIG. 5 denote the same or corresponding parts, 16 denotes a cylindrical body standing below the film-forming position, 17 denotes a bearing provided on the inner surface at the upper end of the cylindrical body 16, and 18 denotes This is a ring-shaped contact body rotatably supported by the bearing 17.

Reference numeral 19 denotes a cylindrical rotation shaft which is provided at the center of the cylindrical body 16 so as to be movable up and down, and has a cylindrical upper portion. Reference numeral 20 denotes three support shafts formed inside the upper portion of the rotation shaft 19. Is an L-shaped opening / closing rod whose base is rotatably supported by a support shaft 20; , A lower rod of the open / close rod 22, a vertical rod of the open / close rod 22 slightly raised from the upper end of the rotation shaft 19, and a vertical rod 24
The upper rods 26 extending outward from the upper ends of the rods are springs bridged by the respective vertical rods 24, and draw the respective vertical rods toward the center of the rotation shaft 19, thereby closing the respective upper rods 25. .

Reference numeral 27 denotes a holding member rotatably supported at the tip of the upper rod 25, and reference numeral 28 denotes a spring for holding the holding member 27 in a vertical position with respect to the upper rod 25. In the state shown in FIG. Does not rotate left from that position, and right rotation can be close to 90 degrees. Reference numeral 29 denotes an erect shaft that is set up on the upper end of the rotation shaft 19.
9 is a disk-shaped main cover having substantially the same diameter as 9; 30 is a fan-shaped sub-cover fixed to the upper rod 25;
Spread outward from below.

Next, the operation of the above embodiment will be described. When the rotation shaft 19 is in the lowered position, as shown in FIG. 2, each upper rod 25 is in the contracted position via each vertical rod 24 by a spring 26, and each holding body 27 and each sub-cover 30 are rotated. It does not protrude from the peripheral surface of the shaft 19 and is directly below the main cover 29,
Each lower rod 23 is located at a position substantially in a horizontal plane.

When the disk 10 is transported to the film forming position by the forward rotation of the transport arm 8, the rotation shaft 19 in the state shown in FIG. 2 rises, and the upper end of the rotation shaft 19 fits into the central hole 13 of the disk 10. Then, when the disk 10 is placed on the receiving portion 12 and the rotation shaft 19 is further raised, the distal end of each lower rod 23 comes into contact with the contact body 18, and the opening / closing rod 22 is opposed to the spring 26 and the support shaft 20. , The upper rod 25 and the sub-cover 30 expand as shown in FIG. At this time, the lower edge of each holding member 27 abuts on the upper surface of the peripheral portion of the center hole 13 of the disk 10, the holding member 27 rotates against the spring 28, and the holding member 27 and the receiving portion 12 The disk 10 is clamped. Then, the transfer arm 8 rotates in the reverse direction, and the rotation shaft 19 rotates to perform film formation.

After the film formation, the lower rods 23 are separated from the abutment 18 by the lowering of the rotation shaft 19, and the openable and closable rods 22 and the presser 27 are contracted and closed by the springs 26 and 28, as shown in FIG. The disk 10 is placed on the support 9 of the transfer arm 8. In the above-described embodiment, the case where the number of the opening / closing rod 22 and the pressing body 27 is three has been described, but the number is not limited.

[0016]

Since the present invention is configured as described above, it has the following effects. 請 of the present invention
Disk support apparatus of the film deposition apparatus of Motomeko 1 wherein the film formation position
The ring-shaped contact body 18 is located below the
A rotation shaft 19 is provided at the center so as to be movable up and down.
A plurality of opening / closing rods 22 are attached to a support shaft 20 provided inside
Are rotatably supported, and each opening extending from the rotation shaft 19 is
The distal end of the lower rod 23 of the closed rod 22 is positioned below the abutment 18.
From the upper end of the rotation shaft 19
It is drawn out and extended outward, and each upper rod 25 is
To the center of the rotation shaft 19 to close and close each upper rod 25.
In the retracted state, each of the upper rods 25 is
Of the rotating shaft 19,
The central hole 13 of the disk 10 fits into the upper end of the disk.
10 is mounted on the receiving portion 12 of the rotation shaft 19,
19, the tip of each lower rod 23 comes into contact with the abutting body 18.
Each open / close lever 22 rotates against the spring 26 in contact with the
The rods 25 are expanded, and the top end of each upper
Since the disk 10 is sandwiched , there is no support arm for supporting the holding member on the film forming surface side of the disk 10 as in the related art, and there is no obstacle to the film formation on the disk 10, And the film thickness distribution is not disturbed. Further, since the peeling film from the support arm of the conventional holding body does not fall on the film-forming surface of the disk 10 and there is no abrasion part for the conventional alignment, the film quality and the film thickness distribution are adversely affected. Can be prevented , and the configuration is simple . Next, according to the second aspect of the present invention, the position of
The ring-shaped contact member 18 is located at the center of the contact member 18.
A rotating shaft 19 having a cylindrical upper portion is provided so as to be movable up and down.
Open and close a plurality of spindles 20 provided inside the upper part of the shaft 19
A rod 22 is rotatably supported, and is led out from the rotation shaft 19.
The tip of the lower lever 23 of each open / close lever 22 is positioned below the rotation shaft 19.
In the lowered position, each open / close lever is located below the contact body 18.
The upper end of the vertical rod 24 is led out from the upper end of the rotation shaft 19.
The upper rod 25 extends outward from the upper end of the vertical rod 24,
The vertical rod 24 is pulled toward the center of the rotation shaft 19 by a spring 26.
And bring each upper rod 25 into the contracted state, and
The holding body 27 is rotatably supported, and each holding body 27 is
Each holding body 27 is held vertically with respect to the rod 25,
A main cover having substantially the same diameter as the rotation shaft 19 at the upper end of the main body 19
29, and the sub cover 30 is fixed to each upper rod 25.
In the closed state, each holding body 27 and each sub-cover 3
0 does not come out of the peripheral surface of the rotation shaft 19, and
And the central hole 13 of the disk 10 fits into the upper end of the rotation shaft 19.
And the disc 10 is placed on the receiving portion 12 of the rotation shaft 19.
Further, as the rotation shaft 19 rises, the tip of each lower rod 23
The opening and closing levers 22 abut against the abutting body 18 so that
And each upper rod 25 and each sub-cover 30 are expanded,
The disk 10 is held between the holding members 27 and the receiving portion 12.
As a result, the operation and effect of the device according to claim 1 are achieved.
In addition to the nut, the disc is securely
And the main cover 29 holds the rotation shaft 1
9 is covered, and the upper cover is
25 and presser body 27 are covered, adversely affecting film quality and film thickness distribution
The sound can be more reliably prevented.

[Brief description of the drawings]

FIG. 1 is a cutaway front view of one embodiment of the present invention.

FIG. 2 is a cutaway front view of another state of FIG. 1;

FIG. 3 is a plan view of a part of FIG. 1;

FIG. 4 is an enlarged view of a part of FIG. 2;

FIG. 5 is a cutaway front view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Disc 12 Receiving part 13 Center hole 19 Rotation axis 27 Holding body

Claims (2)

(57) [Claims] 1. A ring-shaped contact located below a film forming position.
A contact body, a rotation shaft provided at the center of the contact body so as to be able to move up and down, a support shaft provided inside the upper part of the rotation shaft, and a plurality of pivotally supported by the support shaft. An opening / closing rod, which is derived from the rotation shaft, and is located at a lowered position of the rotation shaft.
The opening and closing rods each having a tip portion located below the contact body.
The lower rod and the upper end are led out from the upper end of the rotation shaft, and are extended outward.
The upper and lower bars of each of the open / close bars are pulled toward the center of the rotation shaft, and
A spring for closing the upper rod, wherein each of the upper rods is a peripheral surface of the rotation shaft in the closed state.
From the upper end of the rotating shaft due to the rise of the rotating shaft.
The center hole of the shaft fits and the disc fits into the receiving part of the rotation shaft.
The lower end of each lower rod is placed
Each of the opening / closing rods abuts on the abutting body against the spring.
Rotate, the upper rods expand, and the front end of each upper rod is
The disc is sandwiched by the recording section
A disk support device for a film forming apparatus , characterized by: 2. A ring-shaped contact located below a film forming position.
A tangent, The upper part is provided at the center of the contact body so as to be movable up and down.
A cylindrical rotation axis, A plurality of support shafts provided inside the upper part of the rotation shaft, An opening and closing rod rotatably supported by each of the spindles; Derived from the rotation axis, and at a lowered position of the rotation axis.
The opening and closing rods each having a tip portion located below the contact body.
And the lower rod, The upper end of each of the opening / closing rods is derived from the upper end of the rotation shaft.
A vertical rod, An upper rod extending outward from an upper end of each of the vertical rods, Pull each of the vertical rods toward the center of the rotation shaft, and
A spring for closing the upper rod, A presser body rotatably supported at the tip of each of the upper rods, If each holding body is held vertically with respect to each of the upper rods
Ne, It is erected at the upper end of the rotation shaft and has approximately the same diameter as the rotation shaft.
A main cover having A sub-cover fixed to each of the upper rods, In the closed state, each of the presser bodies and each of the sub-covers
-Does not come out of the circumference of the rotation shaft, Due to the rise of the rotation shaft, a disc is placed on the upper end of the rotation shaft.
The center hole of the shaft fits and the disc fits into the receiving part of the rotation shaft.
Placed, Further, the tip of each of the lower rods is raised due to the rise of the rotation shaft.
Each of the opening / closing rods abuts on the abutting body against the spring.
Rotate, the upper rods and the sub-covers expand,
The disc is clamped between each presser body and the receiving portion.
Disk supporting device for a film forming apparatus, characterized in that
Place.