JP3205155U - Diaphragm valve device - Google Patents

Abstract

In closing an opening of a casing that houses a drive mechanism with a wall-shaped lid member, the structure of the closure is devised, and the opening-side end surface of the casing and a corresponding portion of the wall-shaped lid member with respect to the end surface are arranged. Provided is a diaphragm type valve device that can be engaged with each other. As a structure in which a rectangular cylindrical peripheral wall 20a that accommodates a drive mechanism is assembled with a wall-shaped lid member 30, both locking portions 25 project from the opening end face of the axial opening 21 of the rectangular cylindrical peripheral wall 20a. On the other hand, both locked portions 35 are formed on the wall-shaped lid member 30. And after inserting each latching | locking part 25 in the thickness direction insertion opening part 35a of each to-be-latched part 35, relatively rotating the upper casing and the wall-shaped cover member 30 which mutually overlap, The bent portion 25b of each locking portion 25 is inserted into the surface direction insertion opening 35b of each corresponding locked portion 35. [Selection] Figure 7

Description

  The present invention relates to a diaphragm type valve device suitable for controlling the flow of a chemical used for manufacturing a semiconductor element or a liquid crystal panel.

  Conventionally, in a valve device similar to this type of diaphragm valve device, for example, there is a fluid control valve disclosed in Patent Document 1 below. The fluid control valve is assembled by overlapping the actuator part, the body, and the mounting plate and fixing them with bolts.

  In the fluid control valve, the actuator unit is configured by a cylinder, a drive unit accommodated in the cylinder, and a cover that closes an opening of the cylinder. Here, the drive unit includes a piston rod, a piston supported by an axially intermediate portion of the piston rod, and a spring fitted to the piston rod on the piston cover side and sandwiched between the piston and the cover. It is configured with it.

  Further, in the actuator portion, the cylinder has a locking portion, and the locking portion protrudes radially inward with respect to the inner wall of the cylinder and is formed in an arc shape in the circumferential direction of the inner wall. On the other hand, the cover has a protruding portion, and the protruding portion protrudes radially outward with respect to the annular portion of the cover and is formed in an arc shape corresponding to the shape of the locking portion in the circumferential direction of the annular portion. Has been.

  When closing the opening of the cylinder with the cover, the cover is overlapped with the opening of the cylinder while compressing the spring, and then the cover is moved to the position where the protrusion reaches the locking part of the cylinder. By rotating relative to the cylinder, the cover is anchored to the locking portion of the cylinder at the protruding portion, and the opening of the cylinder is closed.

JP 2011-153651 A

  By the way, in the above-described fluid control valve, the locking portion is formed so as to protrude to the inside of the diameter of the cylinder, and the protruding portion is formed to protrude to the outside of the diameter of the cover. This means that the locking portion and the protruding portion are formed so as to protrude in the radial direction of the cylinder and the cover, respectively.

  However, when the cylinder and the cover are respectively molded with resin, as described above, the locking portion and the protruding portion are formed so as to protrude in the radial direction of the cylinder and the cover, respectively. There is a problem that the molding becomes complicated.

  Therefore, in order to deal with such a situation, the present invention has been devised to close the opening of the casing that houses the drive mechanism with the wall-shaped lid member, and the opening side end face of the casing It is an object of the present invention to provide a diaphragm type valve device that can be engaged with a corresponding portion of a wall-like lid member with respect to the end face.

In solving the above problems, the diaphragm type valve device according to the present invention, according to claim 1,
An end wall which has a cylindrical peripheral wall (20a) and is integrally formed with resin together with the cylindrical peripheral wall and closes the opening on one side in the axial direction of the cylindrical peripheral wall is defined as one side end wall (20b). A one-side casing (20) having;
A wall-like lid member (30) assembled to the one-side casing so as to close the cylindrical peripheral wall of the one-side casing at its other axial opening (21);
The one-side casing has an axial one-side opening supported by the other-side opening in the axial direction through a wall-shaped lid member, and the shaft of the one-side casing has the one-side opening in the axial direction. A cylindrical peripheral wall (40a) that is coaxially assembled to the opening on the other side of the direction through a wall-shaped lid member, and the resin together with the cylindrical peripheral wall so as to close the opening on the other side in the axial direction of the cylindrical peripheral wall An other casing (40) having an integrally formed other end wall (40b);
The one side chamber (22c) and the other side chamber (which are accommodated in the hollow portion of the cylindrical peripheral wall of the one side casing so as to be axially movable and divide the hollow portion into regions on the one side end wall side and the wall-like lid member side. 22d), a piston rod (50a) extending from the piston through the wall-shaped lid member and extending axially into the other casing, and accommodated in the one side chamber or the other side chamber A drive mechanism (D) having a spring (60) for urging the piston in one axial direction or the other axial direction;
A valve body (70a) that is coaxially supported by the extending end of the piston rod extending into the other casing, a boundary between the other casing and the wall-shaped lid member, and an outer wall of the valve body So as to partition the hollow portion of the other casing into a valve body chamber (Rb) that houses the valve body and an air chamber (Ra) that is opened to the outside through the wall-shaped lid member. A diaphragm (70) having an annular membrane portion (70b, 70c) formed integrally with the resin together with the valve body,
The other casing is formed on the cylindrical peripheral wall and opens to the valve body chamber, and the other casing is configured to form a valve portion together with the valve body in the valve body chamber. An annular valve seat (40c) formed on the side end wall and an other side flow path (43b, 45) formed on the other end wall so as to open into the valve body chamber via the annular valve seat. And the other liquid is allowed to flow from one side of the one side and the other side channel toward the other through the valve part and the valve body chamber.

In the diaphragm type valve device,
The one-side casing is provided with a plurality of engaging portions (25) at intervals along the circumferential direction on the opening end face of the other axial side opening of the cylindrical peripheral wall,
The wall-shaped lid member has a plurality of locked portions (35) arranged on the outer periphery thereof so as to correspond to the plurality of locking portions,
Each of the plurality of locking portions is a protruding portion that protrudes in the axial direction from the portion of the cylindrical peripheral wall of the one-side casing on the opening end surface of the axially other side opening toward the wall-shaped lid member. (25a) and a bent portion (25b) extending so as to be bent in an L shape in the same direction along the circumferential direction from the protruding portion,
Each of the plurality of locked portions can be inserted in the thickness direction of the wall-shaped lid member from the bent portion at each corresponding portion of the wall-shaped lid member with respect to each of the latched portions. The thickness direction insertion opening (35a) is formed as described above, and the bent portion can be inserted when the wall-shaped lid member is rotated relative to the one-side casing in the direction opposite to the extending direction of the bent portion. The surface direction insertion opening (35b) formed so as to extend in the extending direction of the bent portion along the surface of the wall-shaped lid member from the thickness direction insertion opening,
The one-side casing inserts the plurality of locking portions from the respective bent portions into the corresponding thickness direction insertion openings of the plurality of locked portions at the axial opening end of the cylindrical peripheral wall. The wall-shaped lid member is rotated relative to the one-side casing so as to insert the respective bent portions into the corresponding plane-direction insertion openings in a state of being superimposed on the wall-shaped lid member. Thus, the one-side casing and the wall-shaped lid member are assembled.

  According to this, in assembling the one-side casing and the wall-shaped lid member to each other, the drive mechanism is pushed into the one-side casing against the spring by the wall-shaped lid member, so that each locking portion corresponds to each other. The one-side casing and the wall are arranged so as to eliminate the overlapping state after the one-side casing and the wall-shaped lid member are twisted to each other while being inserted into the insertion opening in the thickness direction of the locked portion. The one-side casing and the wall-shaped lid member are assembled to each other so that the bent portions of the respective locking portions are inserted into the surface direction insertion openings of the corresponding locked portions by relatively rotating the lid members.

  Therefore, even if the repulsive force of the coil spring is strong, the assembly between the one-side casing and the wall-shaped lid member can be easily achieved.

  Further, as described above, each locking portion protrudes in the axial direction on the opening end surface of the axial opening portion of the cylindrical peripheral wall of the one-side casing, while each locked portion is formed in the wall-shaped lid member. It is formed so as to be locked in the axial direction by the corresponding locking portion. Therefore, formation of the one-side casing and the wall-shaped lid member with resin is simplified.

  In addition, since the locking state of each locking portion with each locked portion is hidden between the wall-shaped lid member and the cylindrical peripheral wall of the lower casing by assembling the other casing to the wall-shaped lid member, The appearance of the diaphragm valve device is not impaired.

  In addition, as described above, the drive mechanism can be firmly housed and held in the one-side casing by assembling the wall-shaped lid member with respect to the one-side casing. The assembly can be performed without damaging the valve body or the annular valve seat. Therefore, the generation of particles due to the assembly of the valve device can be satisfactorily suppressed.

According to the description of claim 2, the present invention provides the diaphragm valve device according to claim 1,
The surface direction insertion opening of each of the locked portions is formed with a groove (35c) so as to open toward the bent portion at an intermediate portion in the extending direction with respect to the thickness direction insertion opening. ,
The bent portion of each of the locking portions protrudes toward the groove portion so as to engage with the groove portion of the surface direction insertion opening of each corresponding locked portion at the extended end portion thereof. Forming a protruding portion (25c),
When each of the locking portions is inserted into the corresponding insertion portion in the surface direction at each of the bent portions, each of the bent portions is inserted in the surface direction of each of the corresponding locked portions at the protrusion. It is characterized by engaging in the groove portion of the opening.

  According to this, in assembling the one-side casing and the wall-shaped lid member, each of the locking portions is fitted to the corresponding cover so that the drive mechanism is pushed into the one-side casing by the wall-shaped lid member against the spring. The one-side casing and the wall-shaped lid are arranged so as to eliminate the superimposed state after the one-side casing and the wall-shaped lid member are twisted together while being inserted into the insertion opening in the thickness direction of the locking portion. The member is relatively rotated, and the bent portion of each locking portion is inserted into the surface direction insertion opening of each corresponding locked portion.

  At this time, the bent portion of each locking portion is inserted in each surface direction while gently bending to the opposite side to the groove portion against the elastic force caused by the contact with the inner surface of the surface direction insertion opening of the protruding portion. It is inserted into the opening. Thereafter, each bent portion engages in the groove portion of each of the surface direction insertion openings at the projecting portion based on the elasticity.

  For this reason, each bending part can be firmly inserted and held in each surface direction insertion opening. As a result, the operation and effect of the device according to claim 1 can be further improved by further strengthening the assembly between the one-side casing and the wall-shaped lid member.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a perspective view showing the diaphragm type valve device concerning a 1st embodiment of the present invention. It is a longitudinal cross-sectional view of the diaphragm type valve apparatus which follows the 2-2 line of FIG. It is a longitudinal cross-sectional view of the diaphragm type valve apparatus which follows the 3-3 line of FIG. It is a disassembled perspective view shown in the state which decomposed | disassembled the one side casing and the wall-shaped cover member in the said 1st Embodiment. FIG. 5 is an exploded perspective view showing a state in which the drive mechanism is pushed into the cylindrical peripheral wall of the one-side casing by the wall-shaped lid member in FIG. 4. FIG. 6 is an exploded perspective view showing a state in which the wall-shaped lid member is in a state of being twisted with respect to the one-side casing and brought into contact with the cylindrical peripheral wall in FIG. FIG. 7 is an enlarged perspective view of a portion indicated by reference numeral C in FIG. 6. It is a perspective view shown in the state where the twist with respect to the cylindrical surrounding wall of the one side casing of the wall-shaped lid member in FIG. 6 was eliminated. It is an expansion fracture perspective view of the portion shown by code C1 in FIG. It is an expansion fracture perspective view showing the important section of a 2nd embodiment of the present invention. FIG. 11 is a cutaway perspective view showing a state in which the locking portion shown in FIG. 10 is engaged in the groove portion of the surface direction insertion opening of the locked portion at the protruding portion of the bent portion.

Embodiments of the present invention will be described below with reference to the drawings.
(First embodiment)
FIG. 1 shows a first embodiment of a diaphragm type valve device according to the present invention. The diaphragm type valve device (hereinafter also referred to as a diaphragm type valve device V) is accommodated in the casing 20 (hereinafter also referred to as the upper casing 20) and the upper casing 20 as shown in any of FIGS. Drive mechanism D, a wall-shaped lid member 30 that closes the hollow portion of the upper casing 20, and a lower casing 40 are provided. In the first embodiment, the upper casing 20, the wall-shaped lid member 30, and the lower casing 40 are formed of polytetrafluoroethylene or other resin together with a diaphragm 70 described later.

  As shown in FIG. 2 or 3, the upper casing 20 includes a square cylindrical peripheral wall 20a and an upper wall 20b, and the upper wall 20b covers the upper end opening of the square cylindrical peripheral wall 20a. The upper casing 20 is formed integrally with the square cylindrical peripheral wall 20a.

  The rectangular cylindrical peripheral wall 20a is formed as a stepped inner hole portion 22 at its hollow portion, and the stepped inner hole portion 22 is constituted by a large diameter inner hole portion 22a and a small diameter inner hole portion 22b. ing.

  Here, the large-diameter inner hole portion 22 a and the small-diameter inner hole portion 22 b are formed coaxially from the axially open end 21 of the upper casing 20 to the upper wall 20 b of the upper casing 20.

  Further, the upper casing 20 has an inflow hole portion 23 and a discharge hole portion 24 at its square cylindrical peripheral wall 20a, and the inflow hole portion 23 penetrates the lower portion of the square cylindrical peripheral wall 20a. It communicates with the inside of the rectangular cylindrical peripheral wall 20a through the formed communication passage portion 23a. Thereby, a high-pressure air flow from an air flow supply source (not shown) passes through the inflow hole portion 23 and the communication passage portion 23a in the lower chamber 22d (described later) of the rectangular cylindrical peripheral wall 20a of the upper casing 20. Inflow. In addition, the discharge hole portion 24 communicates with the inside of an upper chamber 22c (described later) in the rectangular cylindrical peripheral wall 20a through a communication passage portion 24a formed in a penetrating manner in the upper portion of the rectangular cylindrical peripheral wall 20a. The air in the upper chamber 22c is discharged outside.

  As shown in FIG. 2, FIG. 3, or FIG. 4, the wall-shaped lid member 30 includes a quadrangular wall portion 31 and an upper protruding wall portion 32 that projects coaxially from the wall portion 31 toward the piston 50 (described later). The wall-shaped lid member 30 is fitted into the rectangular cylindrical peripheral wall 20a through the O-ring 32a through the O-ring 32a in the rectangular tubular peripheral wall 20a at the upper protruding wall portion 32, and has a rectangular shape. The wall 31 is in contact with the axial opening 21 of the square cylindrical peripheral wall 20a. Thereby, the wall-shaped cover member 30 plays the role which obstruct | occludes the hollow part of the square cylindrical surrounding wall 20a.

  The wall-shaped lid member 30 includes a lower protrusion 33 that coaxially protrudes from the quadrangular wall 31 to the opposite side of the upper protrusion 32, and the lower protrusion 33 has a small diameter. The protrusion 34 protrudes into the lower casing 40.

  The lower casing 40 includes a rectangular cylindrical peripheral wall 40a and a bottom wall 40b. The bottom wall 40b is integrated with the rectangular cylindrical peripheral wall 40a so as to close the lower end opening of the rectangular cylindrical peripheral wall 40a. The lower casing 40 is formed.

  As shown in FIG. 2, the rectangular cylindrical peripheral wall 40 a is formed as a stepped inner hole 42 in the hollow portion, and the stepped inner hole 42 includes a small diameter inner hole 42 a and a large diameter inner hole 42 a. It is configured with a hole 42b.

  The small-diameter inner hole portion 42a is located on the bottom wall 40b side, and the large-diameter inner hole portion 42b is located on the opening side of the rectangular cylindrical peripheral wall 40a as shown in FIG. It is formed coaxially with 42a.

  Further, as shown in FIG. 2, the lower casing 40 has an annular valve seat 40c, and the annular valve seat 40c is formed so as to open at the center of the bottom wall of the small-diameter inner hole portion 42a. It faces a valve body 70a described later.

  The lower casing 40 includes an inflow path portion 43a, an outflow path portion 43b, an inflow tube 44, and an outflow tube 45. The inflow passage portion 43a is formed between the annular valve seat 40c and the inner end opening of the inflow tube 44 inside the bottom wall 40b of the lower casing 40, and the inflow passage portion 43a is formed therein. The end opening communicates with the small diameter inner hole portion 42a of the stepped inner hole portion 42 through the hollow portion of the annular valve seat 40c.

  On the other hand, the outflow passage 43b is formed in the lower casing 40 between the peripheral wall opening of the small-diameter inner hole portion 42a and the inner end opening of the outflow tube 45, and the outflow passage 43b is The inside of the small-diameter inner hole portion 42 a is communicated with the inside of the outflow cylinder 45.

  The inflow tube 44 is connected to the outer end opening of the inflow passage portion 43a at the inner end opening, and the inflow tube 44 has a first pipe (not shown) at the outer end opening. Is connected to the outflow end opening. Accordingly, the chemical solution from the first pipe can flow into the small diameter inner hole portion 42a through the inflow tube 44, the communication passage 43 and the annular valve seat 40c.

  The outflow tube 45 is connected to the outer end opening of the outflow passage portion 43b at the inner end opening, and the outflow tube 45 is connected to the second pipe (not shown) at the outer end opening. Are connected to the inflow end opening. Accordingly, the chemical solution in the small diameter inner hole portion 42a can flow into the second pipe through the outflow passage portion 43b and the outflow tube portion 45.

  The drive mechanism D includes a columnar piston 50, a piston rod 50a, and a coil spring 60. The piston 50 is housed in the hollow portion of the square cylindrical peripheral wall 20a so as to be axially movable through an O-ring 51a, and the hollow portion. Are divided into regions on the upper wall side and the wall-like lid member side to form an upper chamber 22c and a lower chamber 22d. The piston rod 50 a extends from the piston 50 through the O-ring 54 through the hollow portion of the wall-shaped lid member 30 so as to be axially movable inside the lower casing 40.

  The coil spring 60 is wound around a cylindrical portion 20c extending from the upper wall 20b into the small-diameter inner hole portion 22b of the square cylindrical peripheral wall 20a. The coil spring 60 is interposed between the upper wall 20b and the piston 50. Is sandwiched between. Thereby, the coil spring 60 plays a role of urging the piston 50 toward the lower chamber 22d.

  According to the drive mechanism D configured as described above, when the piston 50 is located at the lower moving end, the valve body 70a is seated on the annular valve seat 40c so that the valve body chamber Rb flows into the inflow passage of the lower casing 40. Shut off from the portion 43a. This means that the valve device V blocks the outflow of the chemical solution from the first pipe to the second pipe by closing the valve portion.

  Further, when the piston 50 moves up, the valve body 70a is dissociated from the annular valve seat 40c, and the valve body chamber Rb is communicated with the inflow path portion 43a of the lower casing 40 (see FIG. 2). This means that the valve device V causes the chemical solution from the first pipe to flow into the second pipe by opening the valve portion.

  Further, as shown in FIG. 2, the valve device V includes a diaphragm 70, and the diaphragm 70 includes a valve body 70a, an annular thin film portion 70b, and an annular thick film portion 70c. The valve body 70a is coaxially screwed to a male screw portion 53b formed at the extending end of the piston rod 50a at the female screw hole portion. Here, the said valve body 70a opposes the annular valve seat 40c, and comprises the valve part of the valve apparatus V with the said annular valve seat 40c.

  Further, the diaphragm 70 has an annular thick film portion 70c in which the lower projection 33 of the wall-like lid member 30 and the large-diameter inner hole portion 42a and the small-diameter inner hole portion 42b of the stepped inner hole portion 42 are annularly formed. It is sandwiched between the boundary steps. The annular thin film portion 70b is connected and formed between the annular thick film portion 70c and the proximal end portion of the valve body 70a.

  Thus, the diaphragm 70 divides the stepped inner hole portion 42, and passes through the communication passage 37 formed through the lower projection 33 and the rectangular wall portion 31 of the wall-shaped lid member 30. An air chamber Ra communicating with the valve body and a valve body chamber Rb for accommodating the valve body 70a are formed.

  Thereby, the diaphragm 70 is seated on the annular valve seat 40c by the valve body 70a while being bent downward along with the downward axial movement of the piston 50 based on the urging force of the coil spring 60, and closes the valve portion. . On the other hand, the diaphragm 70 is separated from the annular valve seat 40c by the valve body 70a while opening upward, while being bent upward along with the upward axial movement against the coil spring 60.

  Next, the configuration of the main part of the present invention will be described. As shown in any of FIGS. 4 to 9, the upper casing 20 is coupled to the opening end face of the axial opening 21 of the rectangular cylindrical peripheral wall 20a. Stop portions 25 are disposed at equal intervals along the circumferential direction, and each of the locking portions 25 is disposed on the opening end surface of the axial opening 21 of the rectangular cylindrical peripheral wall 20a. A projecting portion 25a projecting in the axial direction from the projecting portion 25a toward the wall-shaped lid member 30, and a bent portion 25b extending from the projecting portion 25a so as to be bent in an L shape in the same direction along the circumferential direction. It is composed. Note that the bent portion 25b extends in a gentle arc shape like a surface direction insertion opening 35b described later.

  On the other hand, as shown in any of FIGS. 4 to 9, the wall-shaped lid member 30 is configured such that both the locked portions 35 are arranged on the outer peripheral portion so as to correspond to the both locked portions 25. Therefore, each of the both locked portions 35 is connected to each locking portion 25 of the wall-shaped lid member 30 from the bent portion 25b of the wall-shaped lid member 30 at each corresponding portion with respect to each locking portion 25. The thickness direction insertion opening 35a is formed so as to be inserted in the thickness direction.

  Further, as shown in FIG. 7 or FIG. 9, each of the locked portions 35 rotates the wall-shaped lid member 30 relative to the upper casing 20 in the direction opposite to the extending direction of the bent portion 25 b. The surface direction insertion opening 35b formed so as to extend in the extending direction of the bent portion 25b along the surface of the wall-shaped lid member 30 from the thickness direction insertion opening 35a so that the bent portion 25b can be inserted. Formed.

  Here, in the first embodiment, the locked portion 35 is formed in a penetrating manner at a portion facing the corresponding locking portion 25 in the wall-shaped lid member 30 in the thickness direction insertion opening 35a. ing. In addition, the locked portion 35 has a wall-shaped lid member 30 extending from the thickness direction insertion opening 35a in the extending direction of the corresponding bent portion 25b at the surface direction insertion opening 35b. It is formed by cutting out in a circular arc shape from the lower casing 40 side in a concave shape and with the center of the wall-shaped lid member 30 as a reference.

  In the first embodiment configured as described above, when the upper casing 20 and the wall-shaped lid member 30 are assembled to each other, the upper casing 20 is at the axially open end 21 of the rectangular cylindrical peripheral wall 20a. The two locking portions 25 are twisted about the axis relative to the wall-shaped lid member 30 so as to be inserted into the corresponding thickness direction insertion openings 35a of the both locked portions 35 from the respective bent portions 25b. It is superimposed in the state.

  This superposition is performed while pushing the wall-shaped lid member 30 into the rectangular cylindrical peripheral wall 20a with the coil spring 60 (see FIGS. 4 to 6). At this time, each latching part 25 is located in the thickness direction opening part 35a of each corresponding to-be-latched part 35 in the protrusion part 25a (refer FIG. 7). Here, each bending part 25b is located facing each corresponding surface direction insertion opening 35b.

  When the wall-shaped lid member 30 is relatively rotated with respect to the upper casing 20 so as to eliminate the twisting so that the bent portions 25b are inserted into the corresponding surface direction insertion openings 35b in the pushed state as described above. Each locking portion 25 is inserted into the surface direction insertion opening 35b of each corresponding locked portion 35 at its bent portion 25b, and each corresponding locked portion 35 at the protruding portion 25a. The surface direction insertion opening 35b is locked to the base end extending from the thickness direction insertion opening 35a (see FIGS. 7 and 9).

  Thereby, the one side casing 40 and the wall-shaped cover member 30 are mutually assembled | attached (refer FIG. 8). After assembling, the diaphragm 70 and the lower casing 40 are fastened with a plurality of bolts to the upper casing 20 via the wall-shaped lid member 30 as described above, whereby the assembly of the diaphragm valve device V is completed. .

  As described above, in the first embodiment, as the configuration in which the upper casing 20 that houses the drive mechanism D is assembled with the wall-shaped lid member 30, both the locking portions 25 are configured as described above, and the casing 20 The rectangular tubular peripheral wall 20a is projected on the opening end face of the axial opening 21. On the other hand, both the locked portions 35 are formed on the wall-shaped lid member 30 with the above-described configuration.

  Then, the drive mechanism D is pushed into the upper casing 20 by the wall-shaped lid member 30, and as described above, each locking portion 25 is inserted into the thickness direction insertion opening 35 a of each corresponding locked portion 35. The upper casing 20 and the wall-shaped lid member 30 are twisted together while being inserted into each other, and then the upper casing 20 and the wall-shaped lid member 30 are relatively rotated so as to eliminate the superimposed state, The bent portions 25b of the locking portions 25 are inserted into the surface direction insertion openings 35b of the corresponding locked portions 35, and the protrusions 25a are inserted into the thickness direction insertion openings of the surface direction insertion openings 35b. It was made to latch on the extended base end part from 35a.

  Therefore, even if the repulsive force of the coil spring 60 is strong, the assembly between the upper casing 20 and the wall-shaped lid member 30 can be easily achieved.

  Further, as described above, each locking portion 25 protrudes in the axial direction on the opening end face of the axial opening 21 of the square cylindrical peripheral wall 20a, while each locked portion 35 is a wall-shaped lid member. 30 is formed so as to be locked in the axial direction by the corresponding locking portions 25. Therefore, as described at the beginning of this specification, the upper casing 20 is compared with the case where the locking portion and the protruding portion are formed to protrude in the radial direction of the cylinder and the cover, respectively, in the fluid control valve. And resin molding by the metal mold | die of the wall-shaped cover member 30 becomes easy.

  Further, when the locking state of the locking portions 25 with the locked portions 35 is assembled to the wall-shaped lid member 30, the rectangular cylindrical peripheral walls of the wall-shaped lid member 30 and the lower casing 40 are assembled. Since it hides between 40a, it does not impair the appearance of the diaphragm valve device.

  Further, the drive mechanism D can be firmly accommodated and held in the upper casing 20 by assembling the wall-shaped lid member 30 to the upper casing 20 as described above. Therefore, the assembly of the diaphragm 70 and the lower casing 40 to the upper casing 20 and the wall-shaped lid member 30 can be performed without damaging the valve body 70a and the annular valve seat 40c. As a result, the generation of particles due to the assembly of the valve device V can be satisfactorily suppressed.

(Second Embodiment)
10 and 11 show the main part of a second embodiment of the diaphragm valve device according to the present invention. In the second embodiment, the surface direction insertion opening 35b of each locked portion 35 of the wall-shaped lid member 30 described in the first embodiment is extended in the thickness direction insertion opening 35a. A groove portion 35c is formed at an intermediate portion so as to open toward the bent portion 25b of each locking portion 25 provided on the rectangular cylindrical peripheral wall 20a of the upper casing 20 described in the first embodiment.

  On the other hand, the bent portion 25b of each locking portion 25 of the square cylindrical peripheral wall 20 engages in the groove portion 35c of the surface direction insertion opening 35b of each corresponding locked portion 35 at its extended end portion. Thus, a protrusion 25c is formed that protrudes toward the groove 35c. Other configurations are the same as those in the first embodiment.

  In the second embodiment configured as described above, when the upper casing 20 and the wall-shaped lid member 30 are assembled, the drive mechanism D is inserted into the upper casing 20 by the wall-shaped lid member 30 as in the first embodiment. As illustrated in FIG. 10, the upper casing 20 and the wall-shaped lid member 30 are inserted while the locking portions 25 are inserted into the thickness-direction insertion openings 35 a of the corresponding locked portions 35. Are superimposed on each other.

  Thereafter, the upper casing 20 and the wall-like lid member 30 are relatively rotated so as to eliminate the superimposed state, and the bent portions 25b of the respective locking portions 25 are inserted in the surface direction of the corresponding locked portions 35. It inserts in the opening part 35b as shown in FIG. At this time, each of the locking portions 25 is gently bent in the bent portion 25b to the opposite side to the groove portion 35c against the elastic force caused by the contact with the inner surface of the surface insertion opening 35b of the projection 25c. It is inserted into each surface direction insertion opening 35b while being curved.

  Then, each bent portion 25b is engaged with the groove portion 35c of each surface direction insertion opening 35b by the projection 25c based on the elasticity thereof, and the protrusion 25a of each locking portion 25 is engaged with each surface direction insertion opening. It latches on the base end part extended from each thickness direction insertion opening part 35a of 35b.

  Thereby, each bending part 25b can be firmly inserted and held in each surface direction insertion opening 35b. As a result, the assembly between the upper casing 20 and the wall-shaped lid member 30 can be further strengthened. Other functions and effects are the same as those of the first embodiment.

In carrying out the present invention, the following various modifications are possible without being limited to the above embodiments.
(1) In carrying out the present invention, the numbers of the locking portions 25 of the upper casing 20 and the locked portions 35 of the wall-shaped lid member 30 are different from those of the above-described embodiments and may be three or more. Good.
(2) In carrying out the present invention, in the valve device V, the coil spring 60 is coaxially interposed between the piston 50 and the wall-shaped lid member 30 in the lower chamber portion 22a, unlike the above embodiments. You may make it wear. Thereby, the valve apparatus V functions as a diaphragm type normally open type valve apparatus.
(3) In carrying out the present invention, each bent portion 25b of both locking portions 25 may extend from each protruding portion 25a in the opposite direction to the above embodiments. In this case, each surface direction insertion opening 35 of both the locked portions 35 may be extended from each thickness direction opening 35a in the opposite direction to the above embodiments.

10 ... Diaphragm valve, 20 ... Upper casing,
20a, 40a ... Square cylindrical peripheral wall, 20b ... Upper wall, 21 ... Axial opening end,
22, 42 ... stepped inner hole part, 22c ... upper chamber, 22d ... lower chamber, 23 ... inflow hole part,
23a, 24a, 37 ... communication path, 25 ... locking part, 25a ... projecting part,
25b ... bent portion, 30 ... wall-shaped lid member, 35 ... locked portion,
35a ... Thickness direction insertion opening, 35b ... Planar direction insertion opening, 35c ... Groove,
40 ... lower casing, 40b ... bottom wall, 40c ... annular valve seat, 43a ... inflow passage,
43b ... Outflow passage, 44 ... Inflow cylinder, 45 ... Outflow cylinder, 50 ... Piston,
50a ... piston rod, 60 ... coil spring, 70 ... diaphragm,
70a ... Valve, Ra ... Air chamber, Rb ... Valve chamber.

Claims (2)

A one-side casing having a cylindrical peripheral wall and having an end wall integrally formed with a resin together with the cylindrical peripheral wall and closing an axial one-side opening of the cylindrical peripheral wall as a one-side end wall;
A wall-shaped lid member assembled to the one-side casing so as to close the cylindrical peripheral wall of the one-side casing at its other axial opening;
The one-side casing has an axial one-side opening supported through the wall-shaped lid member at the other axial-side opening, and the one-side casing has the one-side opening. A cylindrical peripheral wall that is coaxially assembled to the other opening in the axial direction via the wall-shaped lid member, and the resin together with the cylindrical peripheral wall so as to close the other axial opening in the cylindrical peripheral wall. A second casing having a second end wall integrally formed therewith;
The one side chamber and the other side chamber are formed by being accommodated in a hollow portion of the cylindrical peripheral wall of the one side casing so as to be axially movable and dividing the hollow portion into regions on the one side end wall side and the wall-like lid member side. A piston rod that extends from the piston through the wall-shaped lid member to the inside of the other casing so as to be axially movable, and is housed in the one-side chamber or the other-side chamber, and the piston is disposed on one side thereof. A drive mechanism having a spring biased in the axial direction or the other axial direction;
A valve body coaxially supported by an extension end of the piston rod extending into the other casing, a boundary between the other casing and the wall-shaped lid member, and an outer wall of the valve body Together with the valve body so as to partition the hollow portion of the other casing connected to each other into a valve body chamber that houses the valve body and an air chamber that opens to the outside through the wall-like lid member. A diaphragm having an annular film portion formed integrally with the resin,
The other casing is formed on the cylindrical peripheral wall and opens on the other end wall so as to form a valve portion together with the valve body in the valve body chamber. An annular valve seat formed, and an other-side flow channel formed in the other end wall so as to open into the valve body chamber via the annular valve seat, In the diaphragm type valve device adapted to flow from one side of the one side and the other side channel toward the other through the valve part and the valve body chamber,
The one-side casing has a plurality of engaging portions arranged at intervals along the circumferential direction on the opening end face of the other axial side opening of the cylindrical peripheral wall,
The wall-shaped lid member has a plurality of locked portions arranged on the outer periphery thereof so as to correspond to the plurality of locking portions,
Each of the plurality of locking portions protrudes in the axial direction toward the wall-shaped lid member from an arrangement portion of the cylindrical peripheral wall of the one-side casing with respect to the opening end surface of the other axial opening. It is composed of a protruding portion and a bent portion extending from the protruding portion so as to be bent in an L shape in the same direction along the circumferential direction.
Each of the plurality of locked portions is inserted in the thickness direction of the wall-shaped lid member from the bent portion at each corresponding portion of the wall-shaped lid member with respect to each locking portion. A thickness direction insertion opening is formed as possible, and the bent portion is inserted when the wall-shaped lid member is rotated relative to the one-side casing in a direction opposite to the extending direction of the bent portion. A surface direction insertion opening formed to extend in the extending direction of the bent portion along the surface of the wall-shaped lid member from the thickness direction insertion opening as possible is formed,
In the axial opening end of the cylindrical peripheral wall of the one-side casing, the plurality of locking portions are inserted from the respective bent portions into the corresponding thickness direction insertion openings of the plurality of locked portions. In a state of being superimposed on the wall-shaped lid member so as to be inserted, the wall-shaped lid member is relative to the one-side casing so as to insert the respective bent portions into the corresponding surface direction insertion openings. A diaphragm valve device, wherein the one-side casing and the wall-shaped lid member are assembled by rotating. The surface direction insertion opening of each of the locked portions is formed with a groove so as to open toward the bent portion at an intermediate portion in the extending direction with respect to the thickness direction insertion opening,
The bent portion of each locking portion protrudes toward the groove portion so as to engage with the groove portion of the surface direction insertion opening of each corresponding locked portion at the extended end portion thereof. Forming a protruding part,
When the respective locking portions are inserted into the corresponding insertion openings in the respective planes at the respective bent portions, the respective bent portions are inserted in the planes of the corresponding locked portions at the projections. 2. The diaphragm valve device according to claim 1, wherein the diaphragm valve device is engaged with the groove of the opening.

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