JP3187196B2 - Actuator control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator control device, and more particularly to an actuator control device for controlling an actuator to a predetermined state when a failure occurs.

[0002]

2. Description of the Related Art Generally, in an aircraft or the like, one control object (for example, one control surface) is controlled by a plurality of control systems,
When one of the control systems fails, the control target is controlled by the other control system to ensure safety. In such a case, if the hydraulic (hydraulic) actuator of the failed control system maintains the state at the time of the failure, the control by the other control systems is adversely affected. It is necessary to return to a predetermined position or to make it slidable by external force. Therefore, conventionally, in a device for controlling the operation of an actuator,
In some cases, a function for controlling the actuator to a predetermined state as described above when a failure occurs is added.

[0003] This type of actuator control device includes:
For example, JP-A-63-297802 and JP-A-2-1
The thing described in 13101 gazette is known. In these actuator control devices, when a servo control valve that controls the supply and discharge of working fluid to the actuator becomes inoperable due to a failure in an electric system, a predetermined solenoid valve is operated to operate the servo control valve by hydraulic pressure. Is moved to a predetermined position, thereby returning the actuator to the neutral position.

[0004]

However, such a conventional actuator control device can cope with a failure of an electric system but cannot cope with a failure of a hydraulic system. In addition, the operator's response to the occurrence of a failure (specifically, for example, a pilot operation which was hydraulically amplified and operated in a normal state, the input operation of the minimum control system with a limited output due to a hydraulic failure) Until the aircraft is stabilized by manual control after the failure, maintain the position of the other control system at the time of the failure, and then return to the predetermined position (usually the neutral position) at a speed that does not affect the manual operation. (Required), the actuator is returned to the neutral position irrespective of the required time, and the return timing of the piston is not a suitable timing in consideration of the operator's response. That is, these points have been issues to be improved in order to ensure a higher level of safety.

[0005] Therefore, the present invention enables the piston to return to a predetermined position or to move by an external force after maintaining the control state before the failure for a predetermined time when a failure occurs,
It is an object of the present invention to provide an actuator control device that can ensure a high level of safety in consideration of the handling of an operator.

[0006]

According to one aspect of the present invention, there is provided a fluid chamber of an actuator having a piston housed in a cylinder and defining a plurality of fluid chambers on both sides of the piston. A supply / discharge control valve for supplying a working fluid from a supply source or discharging the working fluid from the fluid chamber to the outside, and switching a connection of a flow path provided between the supply / discharge control valve and the actuator between the two. A switching valve, the actuator control device comprising:
According to a pilot pressure supplied from a predetermined pilot passage, it is possible to switch between a first switching position in which fluid chambers on both sides of the piston communicate with each other and a second switching position in which communication between the fluid chambers is interrupted. And a pressure accumulating means for accumulating pressure with a normal working fluid pressure from the supply source so as to maintain the pilot pressure at a predetermined pressure when the pressure on the supply source decreases, and a pressure accumulating means or the pilot passage through a throttle valve. A throttle passage that is connected to the supply source side and gradually reduces the pilot pressure from the predetermined pressure when the pressure on the supply source side is reduced, and a working fluid pressure on the supply source side is provided. When the time is lowered, the switching valve is held at the second switching position for a predetermined time by the time delay element, and is switched to the first switching position after the predetermined time.

According to a second aspect of the present invention, there is provided a cam member which has a cam surface which engages with a piston of the actuator and which drives the piston when moving within a predetermined movement range, and which receives pressure of the pilot pressure. A pressure-receiving member for moving the cam member out of the predetermined movement range; and a predetermined movement of the cam member or the pressure-receiving member when the working fluid pressure in the pilot passage is reduced. An elastic member for returning to a specific position within the range, wherein the pressure accumulating means is constituted by the pressure receiving member and the elastic member. The invention according to claim 3, wherein the time delay element is And a slide valve provided in the throttle passage closer to the pilot passage than the throttle valve, and when the pressure on the supply source side decreases, the slide valve after a predetermined time from the decrease in the pressure. It is characterized in that the de-valve communicates directly said pilot passage to the supply source side.

[0008]

According to the first aspect of the present invention, when the normal working fluid pressure is supplied from the supply source, the actuator is controlled by the supply / discharge control valve, and the pressure accumulating means of the time delay element is provided with the normal working fluid pressure. To accumulate pressure. On the other hand, when the working fluid pressure on the supply source decreases due to a decrease in the working fluid pressure from the supply source or a failure of the supply / discharge control valve, the pressure accumulating means operates to maintain the pilot pressure at a predetermined pressure, and the throttle passage is closed. A pressure accumulating means or a pilot passage is connected to the supply source side via a throttle valve to gradually lower the pilot pressure from the predetermined pressure. Therefore, when the working fluid pressure on the supply source side decreases, the working fluid pressure in the pilot passage is maintained at a predetermined pressure level for a predetermined time, and the switching valve is held at the second switching position. When the pressure drops below the set value, the switching valve switches to the first switching position.
When the switching valve is at the first switching position, the fluid chambers on both sides of the piston communicate with each other, and when the switching valve is at the second switching position, communication between the fluid chambers is shut off. As a result, after maintaining the control state before the failure for a predetermined time required for the operator to respond to the failure, the piston can return to the predetermined position or move following the external force.

According to the second aspect of the present invention, when the pressure receiving member receives the pilot pressure, the cam member is driven out of the predetermined moving range, so that the piston is not driven by the cam member. When the working fluid pressure in the pilot passage decreases due to a decrease in pressure or a failure of the supply / discharge control valve, the elastic member returns the cam member to a specific position within the predetermined movement range after a predetermined time has elapsed, and accordingly, the actuator Return to the predetermined position. Further, since the pressure receiving member and the elastic member constitute pressure accumulating means, the pressure accumulating means of the time delay element and the means for returning the piston when a failure occurs can be used.

Further, in the invention according to claim 3, the slide valve provided in the time delay element causes the pilot passage to directly communicate with the supply source side a predetermined time after the pressure drop on the supply source side. The piston of the actuator can be quickly returned to the predetermined position.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be specifically described below with reference to the drawings. FIGS. 1 and 2 are diagrams showing an embodiment of the actuator control device according to the first to third aspects of the present invention. First, the configuration will be described.

In FIG. 1, reference numeral 1 denotes an actuator unit. The actuator unit 1 includes an actuator 2, an actuator control device 3, and a unit main body case 4 in which these are housed. The actuator 2 has a cylinder 21 and a piston 22 slidably inserted into the cylinder 21.
A plurality of fluid chambers 23, 24 are defined on both sides of the inner piston 22. That is, the actuator 2 is driven by the differential pressure between the fluid chambers 23 and 24 partitioned by the piston 22.
And controls an unillustrated control object (for example, a control surface) connected to the piston 22 via the connection pin 25. Further, a piston 22 of another actuator 2 (not shown) is also connected in parallel to the connection pin 25, and the control target is controlled by a plurality of actuator units 1. Therefore, when one of the plurality of actuator units 1 fails, the control target can be controlled by another actuator unit 1. The displacement of the piston 22 is detected by a known position sensor 29 such as a differential transformer.

The actuator control device 3 includes a supply port 41 and a return port 42 formed in the unit body case 4.
, A control valve 32 (supply / discharge control valve) connected to an outlet port of the solenoid valve 31 and the return port 42, respectively, and fluid chambers 23 and 24.
And a switching valve 33 that is provided between the control valve 32 and the outlet port of the control valve 32 and that switches the connection between the flow paths 43 and 44 therebetween. When the solenoid valve 31 is not energized, the spring 31
The supply port 41 is shut off at the discharge position j by the urging force of f, and the inlet port of the control valve 32 is communicated with the return port 42. However, when energized, the spring 31f is switched to the supply position i while compressing the spring 31f. The inlet port of the control valve 32 communicates with the supply port 41. The control valve 32 is a so-called force motor 32m (DC motor) corresponding to a deviation between a command input from a control unit (not shown) and a position detection signal of the position sensor 29.
To supply a working fluid (working oil) from a supply source (not shown) to the fluid chambers 23 and 24 of the actuator 2,
The working fluid from the fluid chambers 23 and 24 can be discharged to an external reservoir tank, and all ports can be shut off. The switching valve 33 is connected to the predetermined pilot passage 3
By compressing or expanding the spring 36 in response to the pilot pressure from 4, 35, the fluid chambers on both sides of the piston 22
The switching position is switched to one of a switching position a connecting the outlets 23 and 24 to the outlet port of the control valve 32 and a switching position b (second switching position) closing the outlets of the fluid chambers 23 and 24 and the control valve 32. Or fixed throttle valve for fluid chambers 23 and 24
The switching position can be switched to a switching position c (first switching position) for communicating with each other via 33g. That is, the switching valve 33
Is switched to the switching position a if the pilot pressure is the normal pressure level, and is switched to the switching position b if the pilot pressure is at the predetermined value level slightly lower than the normal pressure level, and furthermore, the pilot pressure is reduced by any failure. When the level falls below the predetermined value level, the position is switched to the switching position c.

Further, in the actuator control device 3, a time delay element is provided between the fluid pressure passage 46 connected to the outlet port of the solenoid valve 31 and the pilot passage 35, that is, between the supply source side and the pilot passage 35. 50 are provided. The time delay element 50 has a pressure accumulating means 51 and a throttle passage 52, and the pressure accumulating means 51 has a passage 46 on the supply source side.
The pressure is accumulated by the normal working fluid pressure from the fluid pressure passage 46 so as to keep the pilot pressure in the pilot passage 35 at a predetermined pressure when the pressure of the pressure falls. In particular,
The pressure accumulating means 51 of the present embodiment includes a pilot passage 35 and a throttle passage.
A pressure accumulating chamber 53 provided between the pressure accumulating chambers 52, a ram 54 (pressure receiving member) for receiving the working fluid pressure in the pressure accumulating chamber 53, and constantly biasing the ram 54 toward a predetermined position (upward in FIG. 1). Elastic member 55
And a pressure accumulating chamber 53 provided between the pressure accumulating chamber 53 and the fluid pressure passage 46.
And a check valve 56 that closes when the pressure becomes higher than the fluid pressure passage 46, and when the normal working fluid pressure is acting in the accumulator chamber 53, the elastic member 55 is actuated by the working fluid pressure. It is elastically deformed and accumulates pressure. When the pressure in the pressure accumulating chamber 53 decreases, the pressure accumulating means 51
, The working fluid in the accumulator chamber 53 can be pressurized to a predetermined value in cooperation with the fixed throttle valve 52a in the throttle passage 52 (described later). In this embodiment, since the switching valve 33 compresses the spring 36 according to the pilot pressure, the switching valve 33 itself can have a function as a pressure accumulating means.

The ram 54 and the elastic member 55 constitute a piston return mechanism 60 together with the annular cam member 57.
The piston return mechanism 60 returns the piston 22 to a neutral position (predetermined position) when a failure occurs. The cam member 57 has a cam surface 57a that engages with a roller 22r mounted on the piston 22, The piston 22 is driven by the cam surface 57a when rotating within a predetermined rotation (movement) range. When a normal working fluid pressure is supplied to the pressure accumulating chamber 53, the cam member 57 receives the pressure (pilot pressure) in the pressure accumulating chamber 53 and moves downward in FIG. Part of the roller 54a,
It moves out of the predetermined rotation range (the state of FIG. 1). When the cam member 57 is out of the predetermined rotation range, the piston 22 is slidable. on the other hand,
When the pressure in the pressure accumulating chamber 53 falls below a predetermined value level due to some failure, the cam member 57 is pushed up by the elastic member 55 and returns to the specific position within the predetermined moving range. Here, the specific position within the predetermined moving range refers to the cam member 57.
The rotation position is such that the roller 22r enters the concave portion 57b forming a part of the cam surface 57a in the predetermined rotation range, and when the cam member 57 is rotated to this rotation position, the piston 22 is in a predetermined neutral position. Return to position.

The throttle passage 52 is connected to the pressure accumulating means 51 (pilot passage).
35 may be connected to the fluid pressure passage 46 via a fixed throttle valve 52a and a check valve 52b in parallel with the fixed throttle valve 52a. When the fluid pressure passage 46 side is at a normal working fluid pressure, the working fluid pressure is checked. The pressure is supplied to the pressure accumulating means 51 via the valve 52b, and when the pressure on the fluid pressure passage 46 side falls below a predetermined level, the check valve 52b is closed and the pressure on the pilot passage 35 side is reduced from the predetermined pressure by the fixed throttle valve 52a. It gradually decreases.

A pilot passage is provided from the fixed throttle valve 52a.
A slide valve 71 and a spring 72 are provided in the throttle passage 52 on the 35 side, and a damper chamber 73 containing these is defined. When the pressure in the fluid pressure passage 46 decreases, the slide valve 71 strokes for a predetermined stroke distance h within a predetermined time from the pressure decrease, and after the predetermined time elapses, the pilot passage 35 passes through the communication passage 75 through the fluid pressure passage 46. To communicate directly with The predetermined elapsed time can be arbitrarily set by selecting the size of the throttle of the fixed throttle valve 52a and the stroke distance h of the slide valve 71.

The configuration around the throttle passage 52 is as follows.
For example, by installing a slidable valve body 74 at one end of the slide valve 71 as shown in FIG. 2, the number of parts can be reduced. Next, the operation will be described. First, when a normal working fluid pressure is supplied from the supply source to the supply port 41, the inlet port of the control valve 32 and the fluid pressure passage 46 through the solenoid valve 31 are supplied.
Is supplied with normal working fluid pressure. At this time, the control valve 32
Thus, the supply and discharge of the working fluid to and from the fluid chambers 23 and 24 are controlled, and the actuator 2 is controlled. Further, when the working fluid pressure in the fluid pressure passage 46 is introduced into the pressure accumulating chamber 53 via the check valve 56, the ram 54 elastically deforms the elastic member 55 via the cam member 57, and the pilot passage 35 And the fluid pressure passage on the supply side
The pressure accumulating means 51 provided between the pressure accumulating means 46 and the pressure accumulating means 46 accumulates the pressure. Further, when the ram 54 receives the pilot pressure, the cam member 57 is driven out of the predetermined movement range, so that the piston 22 can slide without being driven by the cam member 57.

In such a state, the operating fluid pressure in the fluid pressure passage 46 is reduced due to a decrease in the working fluid pressure from the supply source for some reason or a failure of the solenoid valve 31 for controlling the supply and discharge of the working fluid. When the fluid pressure decreases, the pressure accumulating means 51 operates to maintain the pilot pressure in the pilot passage 35 at a predetermined pressure, and the throttle passage 52 connects the pressure accumulating means 51 (or the pilot passage 35) to the supply source via the fixed throttle valve 52a. And the pilot pressure in the pilot passage 35 is gradually reduced from the predetermined pressure. Therefore, when the working fluid pressure in the fluid pressure passage 46 decreases, the working fluid pressure in the pilot passage 35 is maintained at a predetermined pressure level for a predetermined period of time, that is, for a time during which the slide valve 71 strokes the distance h. 33 is held at the second switching position b. After the elapse of the predetermined time, the slide valve 71
When the pilot passage 35 communicates with the fluid pressure passage 46 through the communication passage 75 by the operation of
The working fluid pressure in 53 immediately drops below the set value and the switching valve
33 switches to the first switching position c. And the switching valve 33
Is switched to the first switching position c, the fluid chambers 23 and 24 on both sides of the piston 22 communicate with each other. Further, after a lapse of a predetermined time from a decrease in the working fluid pressure in the pilot passage 35,
Since the elastic member 55 returns the cam member 57 to the specific position within the predetermined movement range, the piston 22 of the actuator 2 returns to the predetermined position accordingly. Therefore, when a failure occurs, the operator (for example, a pilot) can maintain the control state before the failure for a predetermined time necessary to determine a response to the failure, and then return the piston 22 to the neutral position. As a result, Thus, a high level of safety can be ensured in consideration of the handling of the operator.

In this embodiment, since the ram 54 and the elastic member 55 constitute the pressure accumulating means 51, the pressure accumulating means 51 of the time delay element 50 and the means for returning the piston 22 when a failure occurs can be used. Thus, the configuration can be simplified. Furthermore, the pilot valve 35 is directly communicated with the fluid pressure passage 46 on the supply source side a predetermined time after the pressure drop on the supply source side by the slide valve 71 provided on the time delay element 50, and while waiting for the operator to determine the response, After the response is determined, the piston 22 can be quickly returned to the predetermined position, and safety can be improved.

FIG. 3 is a diagram showing another embodiment of the actuator control device according to the first and third aspects of the present invention.
In this embodiment, the single rod type actuator 10 is used.
2, a corresponding control valve 132 and a switching valve 133 are provided, and a piston return mechanism 80 is provided in the actuator 102 instead of the piston return mechanism 60 of the above-described example. Accumulation means 1 by 53
Make up 51. Since other configurations are almost the same as those in the above-described example, members that are the same as or correspond to those in the above-described example are denoted by the same reference numerals, and redundant description of the content will be omitted.

In FIG. 3, the piston 122 of the actuator 102 has different left and right pressure receiving areas. Normally, a fluid chamber 124 on the side of the left and right pressure receiving surfaces having a smaller pressure receiving area is provided via a solenoid valve 31 and a switching valve 133. The working fluid pressure from the supply source is constantly introduced. A switching valve 133 is provided in the fluid chamber 123.
An outlet port of the control valve 132 is connected via the control valve 132. The operation of the actuator 102 is controlled by supplying and discharging the working fluid into and from the fluid chamber 123 by the control valve 132.

The piston return mechanism 80 includes a position sensor
It has retainers 81 and 82 externally movably mounted only in a predetermined range on the cylindrical fixed side member 29a of 29, and a compression spring 83 compressed and contracted on the fixed side member 29a via both retainers 81 and 82. The retainers 81 and 82 have inner diameters that are fixed members of the position sensor 29.
Piston 1 of actuator 102 smaller than 29a and outer diameter
It is larger than the inner diameter of 22 (the piston 122 and the fixed side member 29a have concave shapes corresponding to the retainers 81 and 82, respectively). The compression spring 83 is compressed via the retainers 81 and 82 when the piston 122 is displaced from the neutral position, and the switching valve 133 is switched to the switching position c (first switching position) and the fluid chambers 123 and 124 are switched. Is a fixed throttle valve 133g
When the piston 122 communicates with the piston 122, the piston 122 returns to a predetermined neutral position or expands and contracts by an external force acting on the piston 122. 29b is a moving side member of the position sensor 29.

The time delay element 50 has a pressure accumulating means 151 and a throttle passage 52, and a slide valve 71 and a spring 72 are housed in the throttle passage 52 as in the above-described embodiment. The pressure accumulating means 151 includes a pressure accumulating chamber 53 provided between the pilot passage 35 and the throttle passage 52, a switching valve 33 for receiving a working fluid pressure in the pressure accumulating chamber 53, and pressurizes the switching valve 33 with the working fluid pressure. And a check valve 56 that is provided between the pressure accumulating chamber 53 and the fluid pressure passage 46 and closes when the pressure of the pressure accumulating chamber 53 becomes higher than that of the fluid pressure passage 46. When a normal working fluid pressure is acting inside the pressure accumulating chamber 53, the spring 136 is elastically deformed by the working fluid pressure to accumulate the pressure. Then, when the pressure on the supply source side is reduced, the pressure accumulating means 151 moves the switching valve 133 in the pressurizing direction by the spring 136 and the fixed throttle valve 52a in the throttle passage 52.
The working fluid in the pressure accumulating chamber 53 is cooperated with a predetermined pressure (switching position b).
Pressure).

Also in this embodiment, after the actuator 102 is kept in the control state before the failure for a predetermined time when a failure occurs, the piston 122 can be returned to a predetermined position and can be moved by an external force. It is possible to ensure a high level of safety in consideration of the correspondence, and it is possible to obtain the same operation and effect as the above-described example.

[0026]

According to the first aspect of the present invention, the pressure is accumulated by the pressure accumulating means by the normal working fluid pressure from the supply source, and when the working fluid pressure on the supply source side is reduced due to a failure or the like, the pressure accumulating means is increased. The pilot pressure to the switching valve is gradually decreased from a predetermined pressure through a throttle passage connecting the oil supply source and the supply source side. Therefore, when the working fluid pressure on the supply source side decreases, the pilot pressure is reduced for a predetermined time. The switching valve can be held at the second switching position while maintaining the predetermined pressure level, and the switching valve can be switched to the first switching position after the predetermined time. As a result, after maintaining the control state before the failure for a predetermined time required for the operator's response in the event of a failure, the piston can be returned to a predetermined position or made movable according to external force. Therefore, it is possible to provide an actuator control device that can ensure a high degree of safety while taking into account the above.

According to the second aspect of the present invention, the cam member is driven out of the predetermined moving range while the elastic member is elastically deformed by the pressure receiving member receiving the normal pilot pressure, thereby enabling the normal stroke of the piston. On the other hand, if the working fluid pressure in the pilot passage decreases due to a failure or the like, the cam member is returned to a specific position within a predetermined movement range by an elastic member after a predetermined time from the pressure reduction, and the piston of the actuator is returned to a predetermined position. So that
The pressure accumulating means is constituted by the pressure receiving member and the elastic member, and these can also be used as the piston return means, so that the structure can be simplified.

According to the third aspect of the present invention, the pilot passage is directly connected to the supply source side a predetermined time after the pressure drop on the supply source side by the slide valve provided in the time delay element. After the lapse of the predetermined time, the piston of the actuator can be quickly returned to the predetermined position, and appropriate and quick response to a failure or the like can be performed.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of an embodiment of an actuator control device according to the present invention.

FIG. 2 is a sectional view of a specific example of a throttle passage of the time delay element.

FIG. 3 is an overall configuration diagram of another embodiment of the actuator control device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Actuator unit 2, 102 Actuator 3 Actuator control device 4 Unit body case 21, 121 Cylinder 22, 122 Piston 23, 24, 123, 124 Fluid chamber 31 Solenoid valve (supply / discharge control valve) 32, 132 Control valve (supply / discharge control) Valve) 33, 133 Switching valve 36, 136 Spring 43, 44 Flow path (flow path between both) 46 Fluid pressure passage (passage on the supply source side) 50-hour delay element 51, 151 Accumulator 52 Throttle passage 52a Fixed throttle valve 54 Ram (pressure receiving member) 55 Elastic member 56 Check valve 57 Cam member 57a Cam surface 60 Piston return mechanism 71 Slide valve 80 Piston return mechanism b Switching position (second switching position) c Switching position (first switching position)

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akira Ito 1110-1 Ozaki, Miyashiro, Tarui-cho, Fuwa-gun, Gifu Prefecture Teijin Machinery Co., Ltd. Gifu First Plant (56) References JP-A-4-252104 (JP, A) JP-A-4-302704 (JP, A) JP-A-5-39093 (JP, A) JP-A-61-149601 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name ) F15B 20/00 B64C 13/40

Claims (3)

(57) [Claims] A working fluid is supplied from a supply source to a fluid chamber of an actuator having a piston housed in a cylinder and a plurality of fluid chambers defined on both sides of the piston, or a working fluid from the fluid chamber. And a switching valve provided between the supply / discharge control valve and the actuator and configured to switch a connection between flow paths between the two. In accordance with the pilot pressure supplied from the pilot passage of the piston, switching between a first switching position in which the fluid chambers on both sides of the piston communicate with each other and a second switching position in which the communication between the fluid chambers is interrupted. A pressure accumulating means for accumulating pressure with a normal working fluid pressure from the supply source so as to maintain the pilot pressure at a predetermined pressure when the pressure on the supply source side is reduced; A throttle passage that connects the pilot passage to the supply source side via a throttle valve and gradually reduces the pilot pressure from the predetermined pressure when the pressure on the supply source side is reduced; Actuator control characterized in that when the working fluid pressure on the supply source side drops, the switching valve is held at the second switching position for a predetermined time by the time delay element and is switched to the first switching position after the predetermined time. apparatus. 2. A cam member having a cam surface engaged with a piston of the actuator and driving the piston when moving within a predetermined movement range; and receiving the pilot pressure to move the cam member in the predetermined movement range. A pressure receiving member to be moved outward, and the cam member or the pressure receiving member being constantly urged toward a predetermined position to return the cam member to a specific position within the predetermined movement range when the working fluid pressure in the pilot passage decreases. 2. The actuator control device according to claim 1, further comprising an elastic member, wherein the pressure accumulating means is constituted by the pressure receiving member and the elastic member. 3. The time delay element has a slide valve provided in the throttle passage closer to the pilot passage than the throttle valve, and when the pressure on the supply source side decreases, a predetermined time from the decrease of the pressure. 3. The actuator control device according to claim 1, wherein the slide valve directly connects the pilot passage to the supply source.