JP3182583B2 - Magnetic drive rotation introducing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary driving device for transferring and handling wafers in a high vacuum, such as a semiconductor manufacturing device, and more particularly to a magnetic driving rotary driving device suitable for introducing a large rotary power. About.

[0002]

2. Description of the Related Art In a conventional rotation introducing apparatus, a rotary transfer robot used in a vacuum chamber of a semiconductor manufacturing apparatus or the like, a rotary support for mounting a semiconductor wafer, and a vacuum such as a magnetic fluid seal or an O-ring seal are used. Power is introduced through a seal, a mechanical system that converts the miso-slip motion into a rotary motion using a bellows, a magnetic coupling system that uses magnetism, or an air gap of a rotary motor is widened to create a vacuum. There is a method of installing a partition wall of a chamber that separates the atmosphere. In the mechanical system, a bellows is generally used, and the rotation is introduced into the vacuum by a miso-slip motion from the atmosphere side, separating the vacuum and the atmosphere via the bellows. In a magnetic coupling system using magnetism, as disclosed in Japanese Patent Application Laid-Open No. 3-136779, a magnetic force is transmitted from a driving magnetic pole to a driven magnetic pole through a part of the wall of a vacuum chamber. In addition, JP-A-59-200863
In the example disclosed in Japanese Patent Laid-Open Publication No. H11-209, a thin partition is installed in an air gap of a rotary motor.

[0003]

The above prior arts have the following problems. Although the method using a magnetic fluid seal is widely used, the limit of the degree of vacuum that can be used is determined by the vapor pressure of the oil used for the magnetic fluid, and it is not possible to cope with ultra-high vacuum. Even when an O-ring seal is used, the degree of vacuum that can be similarly applied is about 1/10 ⁷ torr. In the mechanical method, a bellows is used, and the vacuum is separated from the atmosphere through the bellows, and the rotation is introduced into the vacuum by the miso-slip motion from the atmosphere side. In this method, since movement of the bellows is involved, high-speed rotation cannot be introduced, and the life of the bellows is limited by fatigue of the bellows. In addition, there is a problem that a crack may be caused by fatigue of the bellows during rotation and vacuum breakdown may occur. There is also a problem in that a clean environment important for semiconductor manufacturing must be maintained, such as deformation of the bellows itself due to the movement of the bellows, generation of wear foreign substances due to sliding, and gas emission.

In a magnetic coupling system using magnetism, a magnetic force is transmitted from a magnetic pole on a driving side to a magnetic pole on a driven side through a part of a wall of a vacuum chamber. In order to prevent problems such as deformation, it is necessary to have sufficient strength, so that the wall thickness is large, it is difficult to transmit sufficient magnetic force, the performance of the magnetic coupling is small, and it is mounted on the driven side. There are problems such as a decrease in the followability of structures such as robot arms and vibrations. In addition, in the method disclosed in the above publication, since the introduction of power for introducing two independent rotational movements necessary for driving the robot is coaxial, it is necessary to arrange the motors from above and below. However, there is a problem that a column on a cylinder penetrating the upper and lower surfaces of the vacuum chamber needs to be installed and a motor must be arranged in the column, and there is a problem that it cannot be mounted depending on the shape of the vacuum chamber. In addition, JP-A-59-20086
In the example disclosed in Japanese Patent Publication No. 3 (1995), although a thin partition is installed in the air gap of the rotary motor, the position of the rotor installed in the vacuum is detected, and the pressure difference between the atmospheric pressure and the vacuum is endured. In consideration of the structure and the like, sufficient consideration has not been given to assembly and the like.

An object of the present invention is to provide a magnetically driven rotation introducing device having a strong magnetic coupling force and high reliability in introducing rotational power.

It is another object of the present invention to provide a magnetically driven rotary introduction device that can be easily mounted from one side of a vacuum chamber even for the introduction of multiple degrees of freedom (two or more independent rotations). It is in.

[0007]

In order to achieve the above object, a magnetic drive rotation introducing device according to the present invention is directed to a magnetic drive rotation introduction device in which a driving magnetic pole and a driven magnetic pole opposed to each other rotate and interlock with each other. The drive-side magnetic pole is covered with a hollow cylindrical cover, at least a part of the cylindrical surface of the cover is formed of a thin plate partition, and the drive-side magnetic pole and the driven-side magnetic pole that are connected to each other in a non-contact manner through the thin plate partition are opposed to each other. disposed, and a configuration in which fixed the columnar structure rotatably supporting the coupling vital driving magnetic pole of the upper and lower end faces the center portion of the cover.

Then , a circular rack is fixed to the driving magnetic pole.
Provide a pinion to wear and mesh with the rack, and
Insert the drive shaft of the pinion into one end of the cover
May be provided through a vacuum seal.

Further, in a magnetic drive rotation introducing device in which a driving magnetic pole and a driven magnetic pole opposed to each other rotate and interlock with each other, the driving magnetic pole is covered with a hollow cylindrical cover whose one end face is open, and an inner surface of the cylindrical surface of the cover is provided. At least a part of the thin-plate partition is formed, and the drive-side magnetic pole and the driven-side magnetic pole that are coupled to each other in a non-contact manner through the thin-plate partition are disposed facing each other,
An end face cover is detachably provided on one end face of the cover, and a columnar structure that supports the other end face of the cover and rotatably supports the drive section magnetic pole is fixedly provided at the center of the end face cover, and the drive side magnetic pole and the end face are fixed. The cover may be configured to be assembled to the cover from one direction.

Further , a circular rack is fixed to the driving magnetic pole.
Provide a pinion to wear and mesh with the rack, and
The drive shaft of the pinion is connected to the vacuum
May be provided to penetrate the tool.

A coil is wound around one of the driving magnetic pole and the driven magnetic pole, an AC voltage is applied to the coil to generate a current, a change in the current is detected, and the driving magnetic pole and the driven magnetic pole are connected to each other. A configuration provided with a displacement sensor that detects a relative displacement between them may be employed.

The drive shaft of the pinion is driven by a motor installed outside the cover, and the rotational position detected by the motor and the relative displacement between the drive magnetic pole and the driven magnetic pole are determined from the respective values of the driven magnetic pole. May be provided with a means for detecting the rotational position of.

Further, a coil is wound around one of the drive side magnetic pole and the driven side magnetic pole, an AC voltage is applied to the coil to generate a current, and a change in the current is detected to detect the change in the current between the drive side magnetic pole and the driven side magnetic pole. A displacement sensor for detecting relative displacement between the magnetic poles, and a means for flowing current through the coil using information from the displacement sensor to attenuate relative vibration between the driving magnetic pole and the driven magnetic pole.

A plurality of drive-side magnetic poles and driven-side magnetic poles may be provided in the axial direction, and the drive-side magnetic poles and the driven-side magnetic poles of each row may be driven by independent motors to introduce a plurality of independent rotational movements. .

The driven magnetic pole is installed in a vacuum chamber, the cover for covering the driving magnetic pole is sealed, and the inside of the cover is kept at low vacuum or atmospheric pressure. Bearings and gears used in the cover are made of oil, It may be configured to lubricate with grease or solid lubricant.

Further, a structure may be provided in which a pressure in the vacuum chamber in which the driven magnetic pole is installed and a pressure in the cover in which the driving magnetic pole is installed and hermetically closed are provided.

And a rotary motor as the drive-side magnetic pole.
A rotary motor as the driven magnetic pole
May be provided . In addition, the hollow cylindrical cover is divided into an upper cover and a lower cover, and the lower cover is formed in a comb shape having a space for inserting a stator of the motor,
A thin plate partition may be attached to the cylindrical surfaces of the upper cover and the lower cover by welding or brazing.

Further, the stator may be divided into two parts, and one of the stator ends may be fixed to the thin plate partition wall by closely adhering thereto, and the other coil-wound stator may be disposed inside the stator end.

Then, the rotor is set in a vacuum chamber,
A configuration may be provided in which a means for balancing the pressure inside the hollow cylindrical cover covering the stator with the pressure inside the vacuum chamber is provided.

Further, the stator and the rotor may be arranged in a plurality of rows in the axial direction, and a plurality of independent rotational motions may be introduced into the vacuum chamber.

Further, the multi-chamber wafer processing apparatus is configured to use the magnetically driven rotation introducing device described in any one of the respective descriptions.

[0022]

According to the present invention, a part of the cylindrical surface of the hollow cylindrical cover that covers the drive-side magnetic pole is circumferentially formed by a thin plate partition,
In the structure in which the magnetic poles on the driving side and the driven side are arranged to face each other via the thin plate partition wall, the distance between the magnetic poles is reduced,
This acts to increase the magnetic coupling force between the two magnetic poles while maintaining a high vacuum in the vacuum chamber. The columnar structure that supports and connects the upper and lower end surfaces of the hollow cylindrical cover has a pressure difference between vacuum and atmosphere that cannot be supported by the thin plate partition (usually, the driven side is installed in a vacuum chamber, and the driving side is under atmospheric pressure. Or exposed to low vacuum).

An AC voltage is applied to a coil wound around one of the magnetic poles, and a change in current generated by a change in magnetic coupling is detected. Relative vibration). Using the information on the displacement, a phase advance is made through a phase compensation circuit, that is, a speed signal (damping vibration) is generated, and the current of the coil wound on the magnetic pole is controlled according to this signal. Has an effect of giving a damping effect to the relative vibration of.

In a rotary type motor, the stator is covered with a hollow cylindrical cover, and a part of the cylindrical surface of the cover is circumferentially formed as a thin plate partition, and the stator and the rotor are arranged to face each other through the thin plate partition. The structure has an effect of reducing the distance between the rotor and the stator, and an effect of strongly transmitting the electromagnetic force from the stator to the rotor while maintaining a high vacuum in the vacuum chamber.

Further, the cover for covering the magnetic pole on the drive side is divided into two parts, namely, a hollow cylindrical cover on which the driven magnetic pole is rotatably mounted, and the drive-side magnetic pole having an outer diameter smaller than the inner diameter of the cover. By separating the hollow cylindrical cover into the vacuum chamber wall first, and then mounting a flange with a drive-side mechanism inside this hollow cylinder through its opening, There is a function that can be assembled from one direction. Further, by constructing a plurality of such structures in the axial direction, a magnetic coupling for introducing a plurality of independent rotational movements required for driving a robot or the like into the vacuum chamber can be assembled from one direction. .

In a rotary type motor, a structure in which a stator magnetic pole is constituted by two parts, that is, a magnetic pole tip fixed to a hollow cylindrical cover and a stator main body wound with a coil, is provided on a wall surface of a vacuum chamber. First, a hollow cylindrical cover is attached, and then the stator body is attached from the opening of the hollow cylindrical cover,
It has the function of incorporating a rotary motor from one direction. Further, by constituting a plurality of this structure in the axial direction, a rotary motor for introducing a plurality of independent rotating powers into the vacuum chamber can be incorporated from one direction as described above.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows a multi-chamber type film forming apparatus used for semiconductor manufacturing. This type of film forming apparatus is suitable for producing a high-performance thin film required for a high-density VLSI or the like. As shown in FIG. 1, a wafer 10 taken into the vacuum chamber from the load lock chambers 1a and 1b is rotated by a linear transfer device 3 in a linear transfer chamber 2 maintained at a high vacuum. 4) The wafer is conveyed in a rotary conveyance robot 6 and carried into each of the processing chambers 5a to 5f. Each processing room 5a-5
In f, various kinds of film formation, etching, pretreatment, etc. are performed. However, since the processing is completely completed, and is completely shut off from the atmospheric environment until it is carried out of the load lock chamber 1b, for example, A semiconductor with good film quality and high reliability can be manufactured without any contamination from the environment, that is, contamination by minute foreign substances in the atmosphere, oxygen, water, and other harmful molecules.

FIG. 2 is a conceptual diagram of the rotary transfer robot.
The rotary transfer chamber 4 must always be kept at a high vacuum in order to prevent contamination of the wafer transferred through the gate valve 8 by the atmosphere and to maintain the degree of vacuum in the processing chamber 5. Transfer robot arm 7c, 7d
And a rotary transfer robot rotary actuator 7a, 7
It is indispensable to introduce rotational power to the rotary transfer robot 6 driven by b in a manner that can maintain a high vacuum.

FIG. 3 is a sectional view showing an embodiment of the present invention. A magnetic drive rotation introducing device that is rotationally linked to each other by opposing drive side magnetic poles 11a and driven side magnetic poles 11b, wherein the drive side magnetic poles 11a are covered with a hollow cylindrical cover 18, and at least a part of the cylindrical surface of the cover 18 is covered. Thin plate partition 9
The drive-side magnetic pole 11a and the driven-side magnetic pole 11b, which are connected to each other in a non-contact manner via the thin plate partition 9, are disposed to face each other, and the drive unit magnetic pole 11a is rotated at the center of each end face of the cover 18. This is a configuration in which a columnar structure 18a that freely supports is fixed. That is, the thin plate partition wall 9 is provided between the driving magnetic pole 11a and the driven magnetic pole 11b to completely shut off the high-vacuum rotary transfer chamber 4 from the atmospheric or low-vacuum mechanical chamber 17. The smaller the gap 11ab between the drive side and the driven side magnetic poles is, the larger the magnetic force transmitting the rotation is, and the larger the rotational force can be transmitted to the driven side magnetic pole 11b. Therefore, if the thin plate partition wall 9 is made thin, the magnetic poles 11a and 11b can be close to each other, and a large rotational force can be introduced. With the current welding technology, the thickness of the thin plate partition is 50
The thickness can be reduced to about μm. Further, if a brazing is used, a thin plate partition can be further attached. FIG. 4 shows an example of a method of attaching the thin plate partition wall 9, and shows the driving-side magnetic pole 11.
A hollow cylindrical cover 18 is provided so as to completely cover a.
The structure which welds the thin plate partition 9 to the cylindrical surface is shown. However, since it is necessary to attach such a thin plate partition 9 over the entire circumference of the cylindrical surface of the cover 18, the structure becomes very weak in terms of strength. As shown in FIG. 3, the cylindrical surface of the cover 18 needs strength to support the driven magnetic pole 11 b via the vacuum bearing 12. Therefore,
By providing the columnar structure 18a and thereby fixing the upper and lower end surfaces of the cover 18, a structure having sufficient strength can be obtained. Also, the load acting on the thin plate partition wall 9 can be reduced by setting the inside of the cover 18 to a vacuum pressure and balancing the pressure by a balancing means (not shown) for controlling the pressure difference from the vacuum pressure of the rotary transfer chamber 4. The drive-side magnetic pole 11a to which the permanent magnet 19 is fixed is rotatably mounted on a columnar structure 18a via a bearing 17a, and its drive is performed by a pinion 14 meshing with a circular rack 13 mounted on the drive-side magnetic pole 11a. I,
The pinion 14 is rotated by a motor 15 and an encoder 15c installed in the atmosphere via a drive shaft 14a provided through a vacuum seal 16 attached to the lower end surface of the cover 18. Also, a cover 18 covering the drive-side magnetic pole 11a
To keep the inside at low vacuum or atmospheric pressure,
The bearings and gears used therein may be configured to be lubricated with oil, grease, or solid lubricant.

With the above configuration, a magnetic coupling having sufficient strength and capable of introducing a strong rotational force is realized. In this embodiment, as shown in FIG. 5, the configuration of the magnetic pole is such that a plurality of permanent magnets 19 are provided only on the drive-side magnetic pole 11a, but permanent magnets are also provided on the driven-side magnetic pole 11b. Then, a stronger magnetic coupling force can be obtained. As for the driving magnetic pole, an electromagnet can be used instead of the permanent magnet.

FIGS. 6, 7 and 8 show a means (displacement sensor) for detecting the relative displacement of the magnetic poles on the driving side and the driven side as another embodiment of the present invention. In order to accurately position the rotary transfer robot shown in FIG. 2, the rotational position of the driven magnetic pole 11b must be accurately detected. As shown in FIG. 7, a coil 22 is wound around one of the drive-side magnetic poles 11a, and an AC voltage is applied to the coil 22 from this coil. The current flowing in this circuit changes depending on the magnetic coupling state of the magnetic circuit formed by the driving-side magnetic pole 11a and the driven-side magnetic pole 11b and the air gap therebetween. That is, if the two magnetic poles are relatively displaced, the overlap of the magnetic poles in the air gap portion changes, and as a result, the state of leakage of the magnetic flux changes and the current flowing through the coil 22 changes. Therefore, by detecting this current with the current circuit 23, the relative displacement between the two magnetic poles can be detected. FIG. 6 shows an equivalent circuit of the displacement sensor, in which an effective oscillator internal resistance r, an input voltage ein, a current i ₀ , a pole iron core eddy current loss resistance Rs, and a coil self-inductance (change due to a magnetic pole shift) L are illustrated. ing. FIG. 8 is a block diagram of the displacement sensor, in which the output current pressure is taken into the detection circuit input section 25, and only the DC component is taken out through the low-pass filter 27 to obtain a displacement output. Based on the relative displacement and the rotational position of the drive-side magnetic pole obtained from the rotational position detector (encoder 15c) attached to the motor 15 shown in FIG. 3, the rotational position of the driven-side magnetic pole, that is, the rotational position of the robot (the rotary transfer robot 6 shown in FIG. 2) Can be accurately detected.

FIG. 9 shows another embodiment of the present invention in which a relative vibration between a driving magnetic pole and a driven magnetic pole is damped. The relative displacement output e is given a phase advance to the displacement signal through the phase compensation circuit 28, and this signal is used by the power amplifier 2
9 to the damping force generating coil 30 (means for damping). With this configuration, it is possible to attenuate relative vibration (relative displacement with respect to the driving magnetic pole that occurs when the driven magnetic pole stops).

FIG. 10 shows another embodiment of the present invention. This embodiment is configured so that it can be easily incorporated into the rotary transfer chamber from one direction. A hollow cylindrical cover (upper cover) 3 having the drive-side magnetic pole 11a open at one end.
1 and at least a part of the inner surface of the cylindrical surface of the cover 31 is formed by a thin partition wall 9a, and the driving magnetic pole 11a and the driven magnetic pole 11b are connected to each other in a non-contact manner via the thin partition 9a.
And an end face cover (lower cover) 32 is detachably provided on one end face of the cover 31, the other end face of the cover 31 is supported at the center of the end face cover 32, and the drive section magnetic pole 11 a Is fixedly provided with a columnar structure 18a for rotatably supporting the columnar structure 18a. That is, the hollow cylindrical cover that covers the drive-side magnetic pole 11a is divided into two members, namely, the driven-side magnetic pole 1
1b is rotatably mounted on the upper cover 31 having the thin plate partition 9a and the lower cover 32 on which the driving magnetic pole 11a is rotatably mounted, and the inner diameter of the upper cover 31 is slightly larger than the outer diameter of the driving magnetic pole 11a. It forms so that it may become. As shown in FIG. 11, the upper cover 31 is first mounted on the rotary transfer chamber 4 with the mounting bolts 35 as shown in FIG. 11, and then the drive side magnetic pole is attached to the columnar structure 18a of the lower cover 32 as shown in FIG. 11a is mounted via a bearing, and the pinion 14 is meshed with the rack 13, and the drive shaft 14a and the motor 15 are assembled integrally with the lower cover 32 through the vacuum seal 16, and the upper cover is mounted with the mounting bolts 36. By screwing it to the upper cover 31 and screwing the tip to the upper cover 31 by inserting the mounting bolt 34 into the columnar structure 18a, simple assembly from one direction becomes possible.

FIG. 13 shows another embodiment of the present invention in which two independent rotating powers necessary for driving the robot shown in FIG. 2 are introduced. Also in the present embodiment, the configuration is such that assembly from one direction is possible. That is, the two driven magnetic poles 11
d and 11f are rotatably mounted, respectively, and an upper cover 41 having two thin plate partitions 9a and 9b opposed to the respective magnetic poles, and motors 15a and 15b for independently driving the two drive-side magnetic poles 11c and 11e, respectively. Is separated into two parts, a lower cover 42 that is rotatably mounted, and an upper cover 41.
Is slightly larger than the outer diameter of the driving magnetic pole 11a. As shown in FIG. 14, first, the upper cover 41 is attached to the rotary transfer chamber 4 with the attachment bolts 38, and then the drive-side magnetic poles 11c and 11e are attached to the columnar structure 18b of the lower cover 42 with the vacuum bearings 12a and 12b. And pinions 14 on racks 13a and 13b.
b and 14c are engaged with each other, and the drive shafts 14d and 14e and the motors 15a and 15b are assembled integrally with the lower cover 42 through the vacuum seals 16a and 16b. By inserting the mounting bolt 37 into the columnar structure 18b and screwing the tip to the upper cover 41, simple assembly from one direction becomes possible.

FIG. 15 shows another embodiment of the present invention. In the air gap (non-contact) between the stator 51 of the rotary motor and the rotor permanent magnet 50a fixed to the rotor 50
And a thin plate partition 53 is provided. This embodiment shows an outer rotor type, in which a stator 51 is covered with a hollow cylindrical cover 56, and a part of the cylindrical surface is a thin plate partition 53. If the current welding technology is used, the thickness of the thin plate bulkhead 53 is 5
The thickness can be reduced to about 0 μm, and it can be sufficiently installed in the air gap (about 0.3 mm to 0.7 mm) of a normal motor. The wiring 57 from the coil 52 is a vacuum seal 55
Take it out via. With such a configuration, it is possible to install the rotor 50 of the motor directly in the vacuum chamber and transmit sufficient rotational power. FIG. 16 shows an example of the configuration of the thin plate partition wall. The thin plate partition wall 53 is wound around the entire circumference of an upper cover 53a and a lower cover 53b that are fitted between the magnetic poles of the stator 51 so as to fit in a comb shape. Is welded or brazed. Further, by performing spot welding 59 at some points so as to withstand the pressure from the inside, the strength is increased.

FIG. 17 shows an embodiment of the means for detecting the rotational position of the rotor of the motor shown in FIG. That is, the rotor 5
A scale 60 having an optical or magnetic scale is installed on the end face of the vacuum chamber 0, and this is connected to an optical or magnetic sensor 6 via a view port 62 installed on the vacuum chamber wall.
1, the rotation position of the rotor is detected. Although the above description is directed to the outer rotor type, the same configuration can be applied to the inner rotor type shown in FIG. The stator 71 is covered with a lower cover 74b fixed to the outside of a hollow cylindrical upper cover 74a, and a part of the inner cylindrical surface of the lower cover 74b is a thin plate partition 73.
And The rotor 72 includes a stator 71 and a rotor permanent magnet 7.
8 is rotatably attached via a bearing to a columnar structure 18c provided at the center and opposed to each other via a wire 8. A wire 77 from the coil 70 is taken out through a vacuum seal 75.

FIG. 19 is a sectional view showing another embodiment of the rotary motor of the present invention. In this embodiment, the stator of the motor is divided into two parts. In other words, the rotor tip 80a of the motor, to which the rotor permanent magnet 85 is fixed, is fixed to the hollow cylindrical upper cover 81 having the thin plate partition 53 rotatably supported via the vacuum bearing 84, and the stator tip portion 81a is fixed to the two. Then, the stator 82a around which the coil 83 is wound is fixed to the lower cover 82 having a flange. The wiring is taken out through the hermetic seal 86. The inner diameter of the stator tip portion 81a is slightly larger than the outer shape of the stator 82a, and as shown in FIG.
Can be assembled from one direction. The thin plate partition 53
As shown in FIG. 20, a stator tip 81a is fixed to an opening formed in a cylindrical surface of an upper cover 81, a thin plate partition wall 53 is wound thereon, and the periphery is welded or brazed 87. it can.

FIG. 22 shows another embodiment in which the rotary motor having the thin plate partition of the present invention is applied to the rotary transfer robot shown in FIG. In order to introduce two independent rotational movements required for driving the robot into the rotary transfer chamber 4, the rotary motor shown in FIG. That is, the motor rotor permanent magnets 95a, 95
Rotors 90 of two motors each having a fixed 5b.
a and 90b are rotatably mounted via vacuum bearings 94a and 94b, and fixed to the cylindrical upper cover 91 having thin plate partition walls 91c and 91d, the distal ends 91a and 91b of the two divided stators. I do. On the other hand, the coil 93a,
The stators 92a and 92b around which 93b is wound are fixed to the lower cover 92, and can be assembled from below in the same manner as in FIG. The wiring is taken out through a vacuum seal 96. With this configuration, the robot arms 7a and 7b used in a high vacuum can be driven strongly and with high reliability through the thin plate partition, as if driven by a normal direct drive motor. Also, accurate position control is possible by combining the rotational position detecting means shown in FIG.

According to the present invention, a part of the cylindrical surface of the hollow cylindrical cover that covers the drive side magnetic pole is formed into a thin plate partition wall in a circumferential shape,
The structure in which the magnetic poles on the driving side and the driven side are arranged to face each other via the thin plate partition can reduce the distance between the magnetic poles, thereby increasing the magnetic coupling force between the magnetic poles. Therefore, a large rotational force can be introduced into the vacuum while maintaining a high vacuum in the vacuum chamber, and the relative displacement and vibration of both magnetic poles can be reduced.
Further, there is an effect that operability and reliability of a robot or the like driven by these magnetic couplings are improved.

The columnar structure that supports and couples the upper and lower end surfaces of the hollow cylindrical cover makes it possible to support the driven magnetic pole, which cannot be supported only by the thin plate partition wall, with sufficient strength. And the pressure difference between the air and the atmosphere (usually the driven side is installed in a vacuum chamber and the driving side is exposed to atmospheric pressure or low vacuum). But it has the effect of making it usable.

By applying an AC voltage to the coil wound around one of the magnetic poles and detecting the current flowing through the coil, the relative displacement between the driving and driven magnetic poles can be detected. Has an effect that the robot driven by the magnetic coupling can be controlled. In addition, the method of controlling the current of the coil wound around the magnetic pole through the phase compensation circuit using the information on the displacement can provide an attenuation effect on the relative vibration between the two magnetic poles. There is an effect that the vibration of the robot to be suppressed is suppressed and the robot is driven stably.

In a rotary type motor, the stator is covered with a hollow cylindrical cover, and a part of the cylindrical surface of the cover is circumferentially formed as a thin plate partition, and the stator and the rotor are arranged to face each other via the thin plate partition. The structure can reduce the distance between the rotor and the stator, and can strongly transmit the electromagnetic force from the stator to the rotor, so that a strong vacuum is maintained in the vacuum chamber while maintaining a high vacuum in the vacuum chamber. This has the effect of introducing rotational force.

The cover for covering the magnetic pole on the driving side is separated into two parts.
That is, a hollow cylindrical cover in which the driven-side magnetic pole is rotatably mounted, and a structure in which the driving-side magnetic pole having an outer diameter smaller than the inner diameter of the cover is separated into a rotatably mounted flange, and the hollow cylindrical cover is first formed. By attaching the cover to the vacuum chamber wall, and then mounting a flange with a drive-side mechanism in this cylinder through its opening, assembly can be performed from one direction, which has the effect of simplifying the assembly work. is there. Also, by constructing a plurality of this structure in the axial direction, a plurality of magnetic couplings for introducing a plurality of independent rotational movements necessary for driving a robot or the like into the vacuum chamber can be assembled from one direction, and the assembly can be performed in one direction. This has the effect of simplifying the work.

In a rotary type motor, a structure in which a stator pole is constituted by two parts, that is, a pole tip fixed to a hollow cylindrical cover and a stator body wound with a coil, is first provided on the wall surface of the vacuum chamber. By attaching the cylindrical cover, and then attaching the stator body through the opening of the cylindrical cover, the rotary motor can be incorporated from one direction, which has the effect of simplifying the assembly operation. Further, by constructing a plurality of this structure in the axial direction, a rotary motor for introducing a plurality of independent rotating powers into the vacuum chamber can be incorporated from one direction as in the case of the magnetic coupling. This has the effect of simplifying the installation work.

[0045]

According to the present invention, since the magnetic poles on the driving side and the driven side are arranged at a narrow interval via the thin plate partition wall and the strength is reinforced by the columnar structure, it can withstand the load due to the pressure difference between the vacuum and the atmosphere. This has the effect of introducing a large rotational force while maintaining a high vacuum in the vacuum chamber.

[Brief description of the drawings]

FIG. 1 is a plan view of a film forming apparatus to which the present invention is applied.

FIG. 2 is a view showing the concept of the rotary transfer robot of FIG. 1;

FIG. 3 is a longitudinal sectional view showing one embodiment of the present invention.

FIG. 4 is a perspective view showing a thin plate partition of FIG. 3;

FIG. 5 is a plan view of FIG. 3;

FIG. 6 is a circuit diagram showing an equivalent circuit of a displacement sensor provided in one embodiment of the present invention.

FIG. 7 is a diagram showing a relative position detection sensor provided in one embodiment of the present invention.

FIG. 8 is a block diagram illustrating a detection circuit of FIG. 7;

FIG. 9 is a diagram illustrating the damping mechanism of FIG. 7;

FIG. 10 is a diagram illustrating another embodiment of the present invention.

FIG. 11 is a diagram for explaining an assembling method of the embodiment shown in FIG. 10;

FIG. 12 is a view for explaining an assembling method of the embodiment shown in FIG. 10;

FIG. 13 is a longitudinal sectional view showing another embodiment in which two-degree-of-freedom rotational power for a robot according to the present invention is introduced.

FIG. 14 is a view for explaining an assembling method of the embodiment shown in FIG. 13;

FIG. 15 is a longitudinal sectional view of an outer rotor type motor having a thin plate partition wall according to another embodiment of the present invention.

FIG. 16 is a view showing the thin plate partition of FIG.

FIG. 17 is a diagram showing a rotational position detecting means of the rotor of FIG. 15;

FIG. 18 is a longitudinal sectional view of an inner rotor type motor having a thin plate partition wall showing another embodiment of the present invention.

FIG. 19 is a longitudinal sectional view of a rotary motor showing another embodiment of the present invention.

FIG. 20 is a view showing the thin partition of FIG. 19;

FIG. 21 is a diagram showing an assembling method of the embodiment shown in FIG. 19;

FIG. 22 is a longitudinal sectional view of a two-degree-of-freedom one-way assembling rotary motor showing another embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 9 thin plate partition 11a drive-side magnetic pole 11b driven-side magnetic pole 13 rack 14 pinion 14a drive shaft 16 vacuum seal 18 cover 18a columnar structure 61 optical or magnetic position detector

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Kazuo Honma 502, Kandatecho, Tsuchiura-shi, Ibaraki Pref. Machinery Research Laboratory, Hitachi, Ltd. (56) References JP-A-3-136779 (JP, A) JP-A-4- 46781 (JP, A) JP-A-3-150041 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H02K 29/00, 21/00 H02K 5/00, 7/00

Claims (5)

(57) [Claims] 1. A magnetic drive rotation introducing device, wherein a drive side magnetic pole and a driven side magnetic pole facing each other rotate and interlock with each other.
The drive-side magnetic pole and the driven-side magnetic pole that cover the drive-side magnetic pole with a hollow cylindrical cover, form at least a part of the cylindrical surface of the cover with a thin plate partition, and are connected to each other in a non-contact manner through the thin plate partition. arranged to face the door, on the cover
A magnetic drive rotation introducing device, wherein a columnar structure is fixedly connected to a lower end surface center portion and rotatably supporting the drive side magnetic pole. 2. The magnetically driven rotation introducing device according to claim 1.
In the above, when a circular rack is fixed to the drive side magnetic pole,
Both are provided with a pinion meshing with the rack, and
The drive shaft of the Nion was inserted into one end face of the cover
A magnetically driven rotation introducing device characterized by being provided through a vacuum seal . 3. A magnetic drive rotation introducing device which is rotationally linked to each other by opposing drive side magnetic poles and driven side magnetic poles,
The drive-side magnetic pole is covered with a hollow cylindrical cover having one end face opened, and at least a part of the inner surface of the cylindrical surface of the cover is formed of a thin plate partition, and is connected to each other in a non-contact manner through the thin plate partition. The drive-side magnetic pole and the driven-side magnetic pole are disposed so as to face each other, an end face cover is detachably provided on one end face of the cover, and the other end face of the cover is supported at a central portion of the end face cover, and A magnetic drive rotation introducing device, wherein a columnar structure for rotatably supporting a drive unit magnetic pole is fixedly provided, and the drive side magnetic pole and the end face cover are assembled to the cover from one direction. 4. A magnetically driven rotation introducing device according to claim 3.
In the above, when a circular rack is fixed to the drive side magnetic pole,
Both are provided with a pinion meshing with the rack, and
The vacuum shaft with the drive shaft of the Nion inserted into the end face cover
A magnetically driven rotation introducing device, which is provided so as to penetrate through the tool . 5. A magnetically driven rotation introducing device according to claim 1.
In the above, a stay of a rotary motor is used as the drive-side magnetic pole.
A rotor of the rotary motor as the driven magnetic pole.
A magnetically driven rotation introducing device, characterized in that the data is provided .