JP3173714B2 - Suspension system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

FIELD OF THE INVENTION The present invention relates to a head gimbal assembly for a data recording disk file.
In particular, the electrical conductor is the flexure stiffness
A head gimbal assembly that contributes to the minimum.

[0002]

BACKGROUND OF THE INVENTION The present application relates to U.S. patent application Ser.
No. 370928 (filed July 5, 1994), which is a partial continuation of No. 3 (filed July 5, 1994).

[0003] Magnetic recording disk files are known that use a transducer mounted on a slider to read and write data on at least one rotating disk. In such systems, the slider is typically attached to the actuator arm by a suspension system.

It is known to use solder balls to attach a slider to slider support means. For example, Ains
U.S. Pat. No. 4,761,699 to Lie et al. discloses the use of reflow solder balls for both mechanical attachment of a slider to a suspension and connection of a transducer to a disk file read / write circuit.

[0005] The use of laminate materials to construct slider suspension systems is also known. For example, U.S. Pat. No. 4,996,623 to Erpelding et al. Discloses a suspension system that includes a sheet of polyimide material sandwiched between two metal layers. The patent also discloses a technique in which a plurality of conductors are formed in a copper layer of the suspension to provide electrical connection to the slider. It is also known to use individual layers to construct a suspension. For example, G. Oberg US Patent No. 4
No. 819094 discloses a suspension system in which a flexible copper conductor is sandwiched between a pair of polyimide films.

[0006] Many suspension systems (also called head gimbal assemblies) include a flexure that is sandwiched between the slider and the suspension in a particular manner. For example, R. Watrous is U.S. Pat.
No. 765 discloses a flexure added on a stiffening member. Blaeser et al. In U.S. Pat. No. 5,1989,945 disclose another design utilizing the suspension material as a flexure.

The problem with both of these approaches is that it is difficult to make electrical connections between the magnetic transducer and the signal conductors on the suspension without adversely affecting the pitch and roll stiffness of the head gimbal assembly. It is.

An approach to reduce the effect of the electrical lead wires on the spring characteristics of the suspension is described in Tak
No. 53-30310 by Ahashi. Disclosed herein is a magnetic head assembly in which electrical lead wires are embedded in a flexible printed circuit that acts as a spring. Toshima et al.
No. 15 discloses a similar system.

[0009]

In summary, a preferred embodiment of the present invention is a suspension system for supporting a magnetic read / write slider, wherein a load beam for mechanically supporting the slider and a slider for mechanically supporting the slider. Includes a slider support that provides a mounting area and a flexure that connects the load beam to the slider support. The flexure includes a first flexure arm forming a first outer edge of the flexure, and a second flexure arm forming a second outer edge of the flexure. The first flexure arm is located closer to the disk hub than the second flexure arm.

[0010]

SUMMARY OF THE INVENTION A plurality of electrical conductors electrically connecting a magnetic data transducer formed on a slider to a disk file electronic system are provided.
Extending along the side edge of the load beam including the flexure arm. The electrical conductor is located proximate to the second flexure arm but outside the second flexure arm so as not to contribute to the stiffness of the second flexure arm.

In a preferred embodiment, the electrical conductor comprises a laminate material including a conductor layer, an insulating layer and a support layer. The conductor layer is made of a high-strength conductive material such as a high-strength copper alloy.
The insulating layer is made of an electrically insulating material such as polyimide, Teflon or epoxy. The support layer is made of a non-magnetic high strength material such as stainless steel, titanium or beryllium copper.

In the region adjacent to the second flexure arm, the support layer is completely removed from below the conductor.
In the region along the edge of the load beam, the support layer is removed from below the conductor that functions as the read line. The use of high-strength materials in the conductor layer allows for the removal of the support layer in those areas without excessively weakening the conductor.

Another embodiment of the present invention includes a suspension system having a flexure for connecting a load beam to a slider support. A first flexible finger region having a flexure extending along a first outer edge thereof;
A second flexible finger region extending along an outer edge of the second finger. A first plurality of slots extend through the first flexible finger region, and a second plurality of slots extend through the second flexible finger region.

A first plurality of electrical conductors extend along the first flexible finger region and are disposed on the first plurality of slots. A second plurality of electrical conductors extend along the second flexible finger region and are disposed on the second plurality of slots. The slots provide an area where the electrical conductor can move as the flexure flexes, thereby reducing the contribution of the conductor to flexure stiffness.

The flexure comprises a laminate material including a conductor layer, an insulating layer and a support layer. The conductor layer is made of a high strength conductive material, such as a high strength copper alloy, allowing the conductor to be formed directly on this layer. The insulating layer is polyimide,
It consists of an electrically insulating material such as Teflon or epoxy. The support layer is made of a non-magnetic high strength material such as stainless steel, titanium or beryllium copper.

[0016]

FIG. 1 shows a first transducer suspension 10 and a second transducer suspension 14 mounted on an actuator arm 18. FIG. Suspensions 10 and 14
Is also referred to as the head gimbal assembly.

A first slider 22 is provided at the end of the first transducer suspension 10 with an actuator
Disposed distally on arm 18. A second slider 26 is located at the end of the second transducer suspension 14 and distal to the actuator arm 18. The slider 22 is a hard magnetic disk 30
And one or more data transducers 27 for reading and writing data on magnetic media such as. Similarly, slider 26 includes one or more data transducers 28 for reading and writing data on magnetic media, such as hard magnetic disk 34.

FIG. 2 is a cross-sectional view of the first transducer suspension 10 in which the first suspension 10 is
The multilayer laminate 39 includes the layer 40, the second layer 44, and the third layer 48. The first layer 40 is one of the second layers 44
The third layer 48 is disposed adjacent to a different surface of the second layer 44, disposed adjacent the surface. Thus, the second layer 44 separates the first layer 40 and the third layer 48, and the layers 40, 44 and 4
8 are all arranged in planes parallel to each other. Layers 40, 44
And 48 are generally between layers 40 and 44 and layers 44 and 4
8 are secured together by a thin adhesive layer provided between them.

Representative dimensions and configurations of the various elements shown in FIG. 2 are as follows. In a preferred embodiment, the first layer 4
0 has a thickness "w" of about 0.051 mm and includes very hard stainless steel 301, 302 or 304. More generally, the first layer 40 has a thickness "w" of about 0.076 mm or less.
And includes a hard material such as stainless steel. Normal,
The first layer 40 comprises 300 series stainless steel,
Other stainless steels or other hard materials can be used (eg, beryllium copper or titanium).

In a preferred embodiment, the second layer 44 is made of DuPont de Nemours and Company ("Dupont").
t ")) manufactured by Kapton® E (Kapt
on E) Includes polyimides having properties similar to those of branded polyimides and has a dielectric constant in the range of about 3.0 to 3.5. Furthermore, the coefficient of thermal expansion (CTE) of polyimide is
After formation of the laminate 39, the laminate 39 should be in a neutral stressed state. The neutral stress state means that the laminate 39 is flat after being formed and does not curl even after the first layer 40 or the third layer 48 is etched. Additionally, the adhesive used to secure layers 40, 44 and 48 together should be sufficiently resistant to keep laminate 39 intact up to a temperature of about 350 ° C.

In a preferred embodiment, the second layer 44 is about 0.01
It has a thickness "x" of 65 mm. This thickness is chosen because the thin layer 44 must keep the stiffness of the suspension 10 low. However, 0.01
In practice, the cost of polyimide films thinner than 65 mm is beyond consideration.

Rogers (Circuit Materials Unit) (Chandra, AZ) supplies a laminate having a second layer 44 that meets the above specifications. Upon ordering the laminate 39, the desired material corresponding to the third layer 48, such as one of the alloys described below, is provided to Rogers with specifications for the first layer 40, the second layer 44, and the third layer 48. Rogers
The company then prepares the suitable laminate by proprietary methods.

In the Rogers laminate, the second layer 44 includes a 0.0165 mm polyimide layer (layer 44), which is manufactured by Kool Base, manufactured by Mitsui Toatsu Chemicals, Inc.
It is considered to be the same (or similar) polyimide as the polyimide used in branded materials. Kool Bas
For polyimide e, a thin layer of adhesive is applied to each side of the polyimide layer to bond layer 44 to layers 40 and 48.

An alternative to the Rogers laminate is a custom made laminate from DuPont, which is DuPont's EKJ self-adhesive polyimide composite (Kapton® E-brand polyimide manufactured by DuPont). And meets the other specifications described above for the second layer 44.

More generally, the second layer 44 is about 0.01
It has a thickness "x" of less than or equal to 8 mm, including a dielectric constant in the range of about 3.0 to 3.5, and a coefficient of thermal expansion such that the laminate 39 is in a neutral stressed state after formation of the laminate 39.

US Pat. Nos. 4,839,232 and 4,
Polyimides of the type described in US Pat. Nos. 543295 and 5298331 are potentially useful as second layers, but the suitability of certain polyimides for special purposes should be verified. Further, a Teflon compound of the formula F (CF ₂ ) _n F is also suitable as the second layer 44, like non-conductive epoxy and other insulating materials.

In a preferred embodiment, third layer 48 is about 0.01
A copper-nickel-silicon-magnesium alloy (composition: Cu96.50) having a thickness "y" of 78 mm and a copper alloy C7025 with a TMO3 additive (a very hard thermal additive) manufactured by Olin Brass. 2%, Ni 3%, Si
0.65%, Mg 0.15%).

Examples of other specific materials that function as the third layer 48 include: 1. High-strength beryllium copper alloy (composition: Cu 97.2% to 98.4%, Be 0.2% to 0.6%, Ni 1.4
% To 2.2%, for example, Brush Well with HT additive
beryllium copper alloy 3 (C17510) from man. 2. High strength brass alloy (composition: Cu 97.5%, Fe2.
35%, 0.03% P, 0.12% Zn, for example Olin Brass copper alloy C194 with spring additives). 3. High-strength titanium copper alloy (composition: Cu 96.1% to 9
6.6%, Ti 2.9% to 3.4%, for example Nippon M
titanium copper alloy with TiCuR1-EHM additive from Ining).

More generally, the third layer 48 comprises a high strength conductive material and has a thickness "y" of about 0.018 mm or less. In the present invention, the term "high strength"
A material that has a tensile yield strength (S _y ) greater than 70 ksi (kilopounds per square inch) and does not soften by more than 10% when exposed to 300 ° C. for 1 hour.

FIG. 3 is a perspective view of the first transducer 10 of the suspension 10. The suspension 10 includes a slider portion 54, an arm portion 58, and a link portion 62.
(Also referred to as a load beam). A plurality of electrical signal lines 66 are present on surface 70 of suspension system 10. Each electrical signal line 66 has a space 74 along itself so that each electrical signal line does not short circuit with an adjacent signal line.

A plurality of hinges (grooves) 78 are shown on surface 70. Hinge 78 is the area where the third layer has been removed to form a channel in third layer 48. Hinge 78 increases the flexibility of suspension 10 and also allows bending of suspension 10 at an angle. Similarly, the hinge is formed by etching a channel in the first layer 40.

While the portions 54, 58 and 62 define the area of the suspension 10, the suspension 10 is preferably formed from a continuous piece of laminate material, as described in connection with FIGS.

The slider portion 54 is a part of the suspension 10 on which the read / write slider 22 is mounted.
The electrical signal line 66, as described in connection with FIG.
Form an electrical connection for connecting slider 22 and transducer 27 to an external system.

The arm portion 58 is a part of the suspension 10 connected to the actuator arm 18. Typically, the arm portion 58 is attached to the actuator arm 18 by gluing, welding, swaging or screwing the arm portion 58 to the actuator arm 18 along the first layer 40 shown in FIG.

A link portion 62 connects the arm portion 58 to the slider portion 54. The second suspension 14 is identical to the first suspension 10 and includes all the elements shown in FIG. 3, namely the parts 54, 58 and 62, the electric signal lines 66 and the like.

FIG. 4 is a sectional view of the suspension 10 and shows that the electric signal lines 66 correspond to the region of the third layer 48. These regions have a substantially rectangular cross-section and are separated from each adjacent electrical signal line 66 by one of the spaces 74. The space 74 extends to the second layer 44 below, and the second layer 44 is exposed through the space 74.

The electrical signal lines 66 are formed by etching the surface 70 using standard metal etching techniques. For example, if the third layer 48 comprises one of the copper alloys, the third layer 48 is etched with iron chloride or another suitable etching reagent. The etching process removes metal from the designated area, thereby causing electrical signal lines 66
Is formed. In practice, a typical chemical etching process does not form a groove having a perfect rectangular shape as shown in FIG.
The actual grooves formed by the chemical etching process may be slightly rounded or tapered as is known. Generally, mechanisms such as the electric signal line 66, the space 74, and the hinge 78 are formed by a photolithographic process.
Alternatively, it is formed directly on the third layer 48 by a numerically controlled imaging technique such as a laser device.

In a preferred embodiment, the first layer 40, the second layer 44
And the third layer 48 initially comprises a continuous sheet of laminate material of a copper alloy / polyimide / stainless steel laminate. A plurality of slider suspension systems 10 are manufactured from the sheets of the laminate using the technique.

A general procedure for preparing a metal-polyimide laminate material is described in St. No. 4,543,295 issued to Clair et al., Issued September 1985.

FIG. 5 is a block diagram of a magnetic recording disk file system 84 using the transducer suspension system 10 of the present invention. The suspension system 14 is identical to the suspension system 10 and the following applies to both the suspension system 10 and the suspension system 14. The suspension systems 10 and 14 also
It can be used for other data storage systems, such as a floppy disk drive, optical drive or compact disk player.

Magnetic Recording Disk File System 8
4 includes a plurality of magnetic recording disks 88 suitable for use in a hard disk drive. The magnetic recording disk 88 is mounted on a spindle shaft 92,
Shaft 92 is coupled to spindle motor 96.
The spindle motor 96 is mounted on the chassis 100.

A plurality of read / write sliders 22 and 26
Are disposed on disks 88, each disk 88 being accessed by one of sliders 22 or 26. Each slider 22 or 26 includes a transducer 22 or 26 that reads and writes data on a plurality of concentric data tracks on disk 88 and is attached to one of suspension systems 10 (or 14). Each suspension system 10 (or 14) is mounted on an actuator arm 18, which is mounted on a rotary actuator 104. The rotary actuator 104 moves the actuator arm 18 (and thus the suspension system 10 or 14 and slider 22 or 26) radially across the disk 88. The enclosure 108 (shown in dashed lines in FIG. 5)
Encloses file system 84 and provides protection from certain contaminations.

The controller unit 112 provides overall control of the magnetic recording disk file system 84. The control unit 112 is a central processing unit (CPU),
It includes a memory unit and other digital circuits and is connected to the actuator control / drive unit 116. The latter is further electrically connected to the rotary actuator 104. As a result, the controller unit 112 sends the magnetic recording disk 8 via the rotary actuator 104.
8 to control the movement of the sliders 22 and 26.
The controller unit 112 includes the read / write channel 12
0, and the latter is further connected to sliders 22 and 2
6 is electrically connected. As a result, the controller unit 112 transmits and receives data to and from the disk 88. The controller unit 112 is also electrically connected to a spindle control / drive unit 124, the latter further comprising a spindle
It is electrically connected to the motor 96. Thereby, the control device unit 112 can control the rotation of the magnetic recording disk 88. The host system 128 is typically a computer system and the controller unit 112
Is electrically connected to The host system 128 transmits digital data stored on the magnetic recording disk 88 to the controller unit 112, requests reading of digital data from the magnetic recording disk 88 and transmission to the host system 128. I do. The basic operation and structure of a data storage system, such as a magnetic recording disk file system 84 (without the suspension system 10 or 14) is known, and C.I. Den
nis Mee and Eric D. Daniel co-authored "Magnetic Recording H
andbook "(McGraw-Hill Book Company (1990)).

FIG. 6 is a top view of the transducer suspension 130 having flexures 134 and 138. The construction and use of the transducer suspension 130 is similar to the construction and use of the transducer suspension 10 shown in FIG. 3, and the transducer suspension 130 is similar to the transducer suspension 10 in the disk file system 84 shown in FIG. 14 can be substituted.

In particular, suspension 130 includes a slider portion 142 similar to slider portion 54, a link portion 146 similar to link portion 62 (also referred to as a load beam), and an arm portion similar to arm portion 58 (shown in FIG. Z). The suspension 130 also includes a slider 152 similar to the slider 22 (including one or more data transducers for reading and writing data on magnetic media), a plurality of electrical signal lines 15 similar to the electrical signal lines 66.
4 and a plurality of spaces 158 similar to space 74.

The flexures 134 and 138 are areas having low stiffness (compared to the link portion 146), which separate the slider portion 142 from the link portion (load beam) 146 and allow the slider 152 to move to the magnetic recording disk 88. Make it possible to float in alignment.

FIG. 7 is a cross-sectional view of the transducer suspension 130 in which the suspension 130 has a first layer 162 similar to the first layer 40 and a second layer 162 similar to the second layer 44.
This shows a multilayer structure including a layer 164 and a third layer 166 similar to the third layer 48. These layers 162, 16
The dimensions, configuration and orientation of 4 and 166 are the same as for layers 40, 44 and 48 described in connection with FIG. In the suspension 130, the directions of the layers 162, 164 and 166 correspond to the directions of the magnetic recording disk
8 is arranged such that the third layer 166 is closest. The case of the laminate 39 shown in FIG. 2 is also arranged in this manner.

FIG. 7 also shows that the electrical signal lines 154 correspond to regions of the third layer 166 that are substantially rectangular in cross section, each being separated from adjacent electrical signal lines 154 by one of the spaces 158. The space 158 extends down to the second layer 164, and the second layer 164 is exposed through the space 158. Each space 158 is disposed along each side of the electrical signal line 154 to prevent a short circuit between adjacent signal lines. The electric signal line 154 is formed in the same manner as the electric signal line 66 described above. A pair of outer regions 167 and 1 of the third layer 166
68 functions as a guard signal line for reducing the influence of electromagnetic interference.

FIG. 8 includes a region of suspension 130 where flexure 138 separates slider portion 142 from link portion (load beam) 146, where second layer 164 for connecting slider portion 142 to link portion 146. And only the third layer 166 is left.
FIG. 2 is a cross-sectional view showing that 2 is completely removed from under a second layer 164. The configuration of the flexure 134 is the flexure 1
38.

By removing the first layer 162 entirely or partially from below the second layer 164, the flexure 1
The stiffness of 34 or 138 is reduced. Third layer 1
The use of a high-strength alloy as 66 allows for the slider portion 14 (even if the first layer 162 is completely or partially removed).
2 and flexures 134 and 138 to provide sufficient strength to support slider 2 and slider 152.
2 maintain the flexibility (low stiffness) required to fly in alignment with the recording disk 88.

Next, the usefulness of the laminate structure 39 will be described with reference to FIGS. The trend toward smaller drives in the hard disk drive industry requires very small and low cost head gimbal assemblies.
The laminated structure of the transducer suspension 10 is particularly suitable when the third layer 48 comprises high strength electrical conductors.
Enables the design of very small head gimbal assemblies.

The three layers of the suspension 10 function as follows. First layer 40 (or 162) is a stiffener layer that provides stiffness to suspension system 10. The second layer 44 (or 164) is made of an insulating material that functions as an electrical insulator between the first layer 40 (or 162) and the third layer 48 (or 166). In certain applications, the second layer 44 (or 164) has a viscoelastic properti which increases damping.
It is useful that the insulating material (e.g., polyimide) having es). Viscoelasticity means that the stress of the deformed material is proportional to both strain and strain rate. Viscoelastic materials can also be used for creep and relaxation.
The behavior of n) is shown. Creep means that the strain increases with time under constant stress. Relaxation means that the stress decreases steadily over time under a fixed strain.

The third layer 48 (or 166) comprises a high strength conductive material, such as one of the high strength copper alloys described above. The third layer 48 (or 166) preferably comprises a highly conductive alloy (eg, a copper alloy). This is because the electric signal line 66 (or 154) needs to function as an efficient electric conductor.

The use of a high strength alloy in the third layer 48 (or 166) is important for several reasons. First, the use of high strength alloys in the conductor layers is
(Or 130), which is important when the slider 22 (or 152) is small (see Example 2 below).

Second, the use of a high-strength alloy is not required for the third layer 48.
(Or 166) thickness below 18 μm (thickness is inversely proportional to the square root of yield strength, as shown in Example 1 below).

Third, the use of a high-strength alloy is not required for the electric signal line 6.
6 (or 154) and hinge 78 directly into third layer 48 (or 166), allowing for many design options. Similarly, the use of high strength alloys allows the use of flexures 134 and 138. Because the first layer 162
Is removed, the third layer 166 bears most of the load.

Fourth, high-strength copper alloys add robustness to the suspension and reduce production losses due to handling damage during the manufacturing process.

EXAMPLE 1 The reason why the use of a high-strength alloy reduces the thickness of the third layer 48 (or 166) is as follows.

The thickness “t” of a rectangular metal strip having a width “w” and a length “L” is related to the yield strength “S _y ” of the material according to equation 1 below.

## EQU1 ## t = C / √S _y Equation 1

Here, C = constant = (6PL / w) ^1/2 , and P is a load applied to the metal strip to bend it.

In the following calculation, Equation 1 shows the following. That is, if the metal strips must carry the same load (P) and are formed from a second material having a yield strength three times that of the first metal, the metal strips of the second material will 42% thinner and has the same strength. For example, S
_y1 = yield strength of annealed copper = 30 ksi, when the yield strength = 90 ksi of S _y2 = high strength copper _{alloy, t 2 / t 1 = (} S y1 /
S _y2 ) ^1/2 = 0.58 (42% reduction in thickness).

Example 2: The reason why the use of a high-strength alloy reduces the stiffness of the third layer 48 (or 166) is as follows.

The stiffness “k” of a rectangular metal strip having a width “w” and a length “L” is related to the material thickness “t” according to equation 2 below.

## EQU2 ## k = Dt ³ Equation 2

Here, D = constant = Ew / 6L ³ and E
Is the Young's modulus.

The following calculation shows the following from the results of Equations 2 and 1. That is, if the metal strips must carry the same load (P) and are formed of a second material having a yield strength three times that of the first metal, the stiffness of the metal strips of the second material Is reduced by 81%. For example, S _y1 =
Assuming that the yield strength of mild copper = 30 ksi and S _y2 = the yield strength of a high-strength copper alloy = 90 ksi, k ₂ / k ₁ = (t ₂ / t ₁ )
³ = become (0.58 ³⁾ = 0.19 (81% stiffness reduction).

FIG. 9 is an exploded view of the transducer suspension 170. The construction and use of suspension 170 is similar to the construction and use of suspensions 10 and 130, and
0 may be replaced with suspension 10 or 14 in magnetic recording disk file system 84 shown in FIG.

In particular, suspension 170 includes a slider portion 174 similar to slider portion 54, a link portion 176 similar to link portion 62 (also referred to as a load beam), and an arm portion similar to arm portion 58 (shown in FIG. Z). The suspension 170 also includes a slider 180 similar to the slider 22, a plurality of electrical signal lines 184 similar to the electrical signal line 66, and a plurality of spaces 188 similar to the space 74. Slider 180 further includes one or more data transducers 192 for reading and writing data on magnetic media.

The plurality of solder balls 196 are connected to the electric signal line 1.
84 at the end. Solder balls 196 are arranged to melt a plurality of solder balls 198 arranged on slider 180. When melted together, solder balls 196 and 198 connect to electrical connector 208 (FIG. 10).
Reference).

The suspension 170 also has a shim (shi
m) 200 and stiffener 204. Stiffener 204
Is an optional element for increasing the rigidity of the link portion 176. If the rigidity of the link portion 176 is not required,
The stiffener 204 may be omitted from the suspension 170 if achieved by additional forming of the link portion 176. A pair of notches 205 is stiffener 2
04 avoids shorting the electrical signal lines 184 in the pair of regions 206.

FIG. 10 shows a slider 180 assembled on a suspension 170. Shim 200 is slider 1
It is located between 80 and the slider portion 174.

In the preferred embodiment, slider 180 is 1 m
It has dimensions of mx 1.25 mm x 0.3 mm. However, the invention is not limited to this slider size. The transducer 192 has a plurality of electrical connectors 2.
08, it is electrically connected to the electric signal line 184.
Connector 208 is referred to as a right angle fillet joint and is described in U.S. Pat.
No. 1699.

In the preferred embodiment, slider 180 is a conventional magnetoresistive (MR) slider having an air bearing surface 212, a leading edge 216 and a trailing edge 220. A plurality of rails 224 are provided on the air bearing surface 21.
2 are arranged. Transducer 192 is a conventional thin film read / write transducer located on trailing edge 220 and is used to read and write data on a hard magnetic disk. However, the invention is not limited to thin film transducer or hard magnetic disk technology. The present invention is a suspension system that can also be used with other types of data transducers and systems, such as optical disc systems or photodetectors in flexible magnetic media systems.

FIG. 11 is a sectional view when the slider 180 is placed on the shim 200. The shim 200 serves two purposes. First, shim 200 provides a means to mechanically attach slider 180 to slider portion 174.
In the preferred embodiment, slider 180 is attached to shim 200 by epoxy. Shim 200 is slider part 17
4 is attached by epoxy or spot welding. Second, the height of shim 200 provides clearance between electrical signal line 184 and slider 180 (see dimension "e" in FIG. 11). This clearance corresponds to the electrical signal line 184
Is required to bend or be distorted by a load force or the like pushing the slider 180 toward the magnetic recording disk 88, or due to vibration generated while the slider 180 flies above the magnetic recording disk 88. Normal,"
e "is about 0.075 mm.

FIG. 11 also shows that the suspension 170 comprises a three-layer laminate similar to the laminate structure shown in FIG. The suspension 170 is the first layer 4
It comprises a first layer 230 similar to 0, a second layer 234 similar to the second layer 44, and a third layer 238 similar to the third layer 48. The first layer 230 has a thickness "a", the second layer 234 has a thickness "b", and the third layer 238 has a thickness "c". These thicknesses "a", "b" and "c" and the layers 230, 234
And 238 are similar in configuration and orientation to layers 40, 44 and 48 described in connection with FIG.

FIG. 11 also shows that the electric signal lines 184 correspond to the third regions 238, and their cross sections are substantially rectangular.
It is shown that one of the spaces 188 is located on each side of each. The space 188 extends to the second layer 234 below, and the second layer 234 is exposed through the space 188. Each space 188 is disposed between adjacent electric signal lines 184 to prevent a short circuit between adjacent signal lines. Electric signal line 1
84 is formed in the same manner as in the case of the electric signal line 66 described above.

FIG. 12 shows that the suspension 170
Shown is the shape of the first layer 230 when the layer 234 and the third layer 238 are removed. Flexure portion 242 connects link portion 246 to slider portion 250. Link portion 246 forms one layer of link portion 176 shown in FIG. 9, and slider portion 250 forms one layer of slider portion 174 shown in FIG.

The flexure portion 242 includes a link portion 246
Is a region having a lower stiffness than that of the region. Reduction of the stiffness of the flexure portion 242 is achieved by the slider 180
Can fly in alignment with a magnetic medium such as the magnetic recording disk 88 shown in FIG.

The flexure portion 242 includes a first flexible finger 254, a second flexible finger 258, and an intermediate section 262. Flexible fingers 254 extend along one outer edge of flexure portion 242, and flexible fingers 258 extend along the other outer edge of flexure portion 242. Intermediate section 262 is located between flexible fingers 254 and 258. Middle section 2
62 includes a dimple 265 which is
6 is provided to the slider 180 through the shim 200. The dimple 265 is a raised area formed in the first layer 230.

A plurality of slots 266 are provided for the flexible fingers 2.
54 and 258 are formed. Slot 266 is the first
It extends through the layers and has various elongated shapes. The particular shape of the slot 266 is not critical and is chosen with three objectives described below.

First, the slots 266 reduce the amount of metal contained in the flexible fingers 254 and 258, thereby reducing the stiffness of the flexible fingers 254 and 258. Further, slot 266 in flexible finger 254
The pattern of slots 26 is generally similar to that of slots 26 in flexible fingers 258 so as to maintain the symmetry of suspension 170.
6 is a mirror image of the pattern No. 6;

Second, the flexible fingers 254 and 258
When the bends, the slots 266 provide an area where the second layer 234 and the third layer 238 can flex, thereby further reducing the stiffness of the flexible fingers 254 and 258.

Third, the slot 266 is connected to the electric signal line 18.
4 to reduce the capacitance between ground. This is because it provides an area where the electrical signal lines 184 can be routed without encountering metal from the first layer 230.

A V-shaped slot 270 is formed in the first layer 230 to ensure that the flexible fingers 254 and 258 are part of the flexure portion 242 forming a mechanical connection with the slider portion 250. I do.

A plurality of slots 274 form a link portion 246
Formed within. The slot 274 extends through the first layer 230 and has various shapes such as a circle, an oval, and a rectangle. The particular shape of the slot 274 is not critical and is selected to provide an area where the electrical signal lines 184 can be routed without encountering metal from the first layer 230. This reduces the capacitance between electrical signal line 184 and ground.

FIG. 13 shows a state in which the suspension 170
Second layer 2 when layer 230 and third layer 238 are removed
FIG. The second layer 234 includes the flexure portion 2
42, a flexure portion 272 located on flexible fingers 254 and 258, an elongated link portion 276 located on link section 246, and a slider portion 25.
And a slider portion 278 located above zero.

FIG. 14 shows a state where the suspension 170
Shown is the shape of the third layer 238 when the layer 230 and the second layer 234 are removed. The electric signal line 184 is connected to the second layer 23
4. The third layer 238 includes a flexure portion 282 located on the flexure portion 272.
And an elongated link section 286 located on the link section 276 and a slider portion 290 located on the slider portion 278. Multiple pads 294
Is a region of the third layer 238 where the solder balls 196 are arranged.

The use of a high-strength alloy as the third layer 238 allows the thickness of the third layer 238 to be kept sufficiently small without significantly contributing to the rigidity of the flexure portion 282, and also allows the manufacturing process to withstand. Provide sufficient resistance.

If a highly flexible flexure portion is required, the first layer 230 is completely eliminated from the flexible fingers 254 and 258 and the second layer 234 and the third layer 238
Only function as flexible fingers 254 and 258 (see FIGS. 6 and 8). The third layer 238 corresponds to FIG.
Including any of the high-strength materials described above in relation to the third layer 48.

It should be noted that the present invention is not limited to the situation where the electrical conductor 184 is formed in the third layer 238. The suspension 170 is a flexible finger 25
4 and 258 may be configured with individual wires arranged as electrical conductors 184. In this case, the second layer 234 and the third layer 238 are deleted.

FIG. 15 shows a design of a transducer suspension 300 where the electrical conductors contribute little or no stiffness to the flexure. The structure and use of the suspension 300 are the suspensions 10 and 170
The transducer suspension 300 is similar to the configuration and use of the magnetic recording disk shown in FIG.
It can be replaced with the suspension 10 or 14 in the file 84.

In particular, suspension 300 includes a slider portion 304 similar to slider portion 54, a link portion 308 similar to link portion 62 (also referred to as a load beam), and an arm portion similar to arm portion 58 (not shown). Z). The suspension 300 is the slider 2
2 includes a slider 312 similar to 2, a plurality of electrical signal lines 316 similar to the electrical signal line 66, and a plurality of spaces 320 similar to the space 74. Slider 312 also includes one or more data transducers 314 for reading and writing data on magnetic media.

The suspension 300 also has a stiffener 32
4 inclusive. Stiffener 324 is an optional element that functions to increase the rigidity of link portion 308 in bending and torsion. If increased rigidity of the link portion 308 is not required, or if this is achieved by additional forming of the link portion 308, the stiffener 324
Can be removed from the suspension 300.

In the preferred embodiment, slider 312 is 1 m
It has dimensions of mx 1.25 mm x 0.3 mm. However, the invention is not limited to this slider size. Transducer 314 includes electrical connector 32
8, 330, 332, and 334 electrically connect to the electrical signal line 316.
Electrical connectors 328, 330, 332, and 334 are referred to as right angle fillet joints and Ainsli
No. 4,761,699 by E. et al.

In the preferred embodiment, slider 312 is a conventional magnetoresistive (MR) slider having an air bearing surface 336, a leading edge 340, and a trailing edge 344. A plurality of rails 346 are provided on the air bearing surface 3
36. Transducer 314 is formed on trailing edge 344 and is a conventional thin film read / write used to read and write data on a hard magnetic disk.
It is a write transducer. However, the invention is not limited to thin film transducer or hard magnetic disk technology. The invention relates to optical detectors, such as optical disc systems or flexible magnetic media system photodetectors.
It is a suspension system that can be used with other types of data transducers and systems.

FIG. 15 also shows that slider portion 304 is connected to link portion 308 by first flexure arm 350 and second flexure arm 354. The first flexure arm 350 is located on the portion of the suspension 300 closest to the spacer ring 356. The spacer ring 356 is a portion of the spindle shaft 92 that separates the magnetic recording disks 88 from each other as shown in FIG.

The slider 312 is disposed on the slider portion 304. A plurality of electrical connectors 328, 330, 33
2 and 334 (also referred to as termination pads) are located on the trailing edge 344. In the preferred embodiment, connectors 328 and 330 are configured as write-write termination pads and connectors 332 and 334 are configured as read-read termination pads. This allows the write signal line to act as an electromagnetic shield for the read signal line during a read operation.

The electrical signal line 316 is connected to the electrical connector 32
Starting at 8, 330, 332 and 334, the spacer
It is routed along the edge of the suspension 300 remote from the ring 356. In region 358, there is no first layer 370 below electrical signal line 316, and this region is referred to as "freely suspended". Area 3
58 is adjacent to flexure arm 354 but outside flexure arm 354. This is the area 358
Is further away from the spacer ring 356 than the flexure arm 354.

In region 362, electrical signal line 316 extends along the edge of suspension 300, where a plurality of support tabs 364 and / or suspension 300 are positioned below electrical signal line 316 for support. FIG.
In the embodiment shown in FIG. 2, two read signal lines (ie, the electric signal lines 31 connected to the connectors 332 and 334)
6) is located along the outermost of the suspension 300 and is supported only by the support tabs 364. In contrast, two write signal lines (ie, connectors 328 and 3
The electrical signal lines 316) connected to 30 are supported by several support tabs 364 and sections of the first layer 370. This structure reduces the capacitance between the read signal line and the ground.

In the preferred embodiment, electrical signal lines 316 extend continuously from electrical connectors 328, 330, 332, and 334 at least through the end of region 362. However, the electrical signal line 316 may be interrupted at any point and electrically reconnected. For example, the region 358 includes a first plurality of electric signal lines, and the region 362 includes a second plurality of electric signal lines connected to the first plurality of electric signal lines.

FIG. 16 shows a region 362 where the suspension 300 comprises a three-layer laminate similar to the laminate structure shown in FIG. Suspension 300
Are a first layer 370 similar to the first layer 40, a second layer 374 similar to the second layer 44, and a third layer 37 similar to the third layer 48.
8 inclusive. The thickness and configuration of these layers 370, 374 and 378 are the same as described above in connection with layers 40, 44 and 48 of FIG.

FIG. 16 shows that the electric signal lines 316 correspond to the region of the third layer 378 having a substantially rectangular cross section, and the space 320 is provided on each side of each signal line. Space 32
0 extends to the second layer below and the second layer 374 is exposed through the space 320. Each space 320 is disposed between adjacent signal lines 316 to prevent a short circuit between adjacent signal lines. The electric signal line 316 is formed in the same manner as the electric signal line 66 described above.

FIG. 16 also shows two write signal lines 316.
Shows a section of the suspension 300, that is, the portion of the region 362 supported by the first layer 370.
The two write signal lines 316 are labeled 382 and 384 in FIG. 16 and are about twice as wide as the two read signal lines 316 and 386 and 388. Region 362
Along the entire length of the read signal lines 386 and 3
88 is not supported by the first layer 370 as shown in FIG.

FIG. 17 is a cross-sectional view of region 358, showing that electrical signal line 316 is not supported by first layer 370. In the region 358, all the electric signal lines 316 have the same width and are arranged at equal intervals, and only the second layer 374 is arranged below the electric signal lines 316.

FIG. 18 shows the state of the suspension 300 from the second position.
First layer 3 when layer 374 and third layer 378 are removed
70 shows the shape of the reference numeral 70. A flexure portion 392 is located between the link portion 308 and the slider portion 304. However, slider portion 304 is not connected to flexure portion 392. A raised dimple 393 similar to dimple 265 is disposed on flexure portion 392.

The first layer 370 includes a plurality of tabs 364 disposed along the edge 394. Tab 364 provides support for readout electrical signal line 316. Multiple slots 3
96 is formed in the link portion 308. Slot 39
6 extends through the first layer 370. The function of slot 396 is to allow the stiffness of link portion 308 to be controlled primarily by a pair of load adjustment regions 400. The load adjustment area 400 is the dominant mechanism for controlling the preload of the suspension 300.

FIG. 19 shows that the suspension 300
Second layer 37 when layer 370 and third layer 378 are removed
4 shows the shape of FIG. The second layer includes a flexure portion 404 that extends adjacent the flexure arm 354 and is positioned further away from the spacer ring 356 than the flexure arm 354, and the flexure arm 35
No overlap with 4. Slender link section 4
08 extends adjacent the edge of the first layer 370 and is disposed on the tab 364 and a portion of the link section 308. The slider portion 412 is at an angle of about 90 degrees with the flexure portion 404 and is disposed on the slider portion 304 of the first layer 370. In a preferred embodiment, the second layer 374 comprises a continuous layer of metal, and the portions 404, 408 and 412 merely refer to a particular section of this continuous layer.

FIG. 20 shows a state in which the suspension 300
Third layer 3 when layer 370 and second layer 374 are removed
Fig. 78 shows a shape 78. An electric signal line 316 is disposed on the second layer 374. The third layer is a flexure section 416 located on flexure section 404, link section 408.
It includes an elongated link section 420 located above, and a slider portion 424 located above slider portion 412. The plurality of pads 428 are connected to the electrical connectors 328, 33.
0, 332 and 334 are regions of the third layer.

In the preferred embodiment, third layer 378 comprises a continuous layer of metal, and 416, 420 and 424 merely refer to particular sections of this continuous layer. Flexure portion 416 corresponds to region 358 of FIG. 15, and link portion 420 corresponds to region 358 of FIG.
5 corresponds to the area 362.

FIG. 21 shows flexure arms 350 and 3
54 indicates that it is part of a flexure member 430 separate from layers 370, 374 and 378. The flexure member 430 is made of stainless steel similar to the first layer 370 (for example, 3
02 stainless steel), but the flexure member 430
Is thinner and more flexible than the first layer 370. A cavity 434 is located between flexure arms 350 and 354 and extends through flexure member 430. Crossbar 438 is used for flexure arms 350 and 3
54 is connected.

At the time of assembling the suspension 300, the flexure member 430 is attached to the side of the first layer 370 opposite to the side in contact with the second layer 374 by epoxy or spot welding. During assembly, flexure member 430 is positioned below flexure portion 392 and crossbar 438 is positioned and mounted below slider portion 304. Cavity 434 is located below flexure portion 392. Therefore, the slider 312 is
4 and the dimple 393.

In use, a stiffener 324 (see FIG. 15) is attached to the first layer 370 by spot welding or epoxy and acts as a stiffener to increase the rigidity of the suspension 300.

The flexure arms 350 and 354 are regions having a lower stiffness as compared to the link portion 308. The reduction in stiffness of flexure arms 350 and 354 allows slider 312 to float in alignment with a magnetic medium, such as magnetic recording disk 88 shown in FIG.

The function of the suspension 300 will be described with reference to FIGS. Suspension 300 provides a head gimbal assembly design that achieves four benefits. The first advantage is that the electric signal line 3
Sixteen stiffness flexure arms 350 and 35
4 does not significantly affect the stiffness. FIG.
As shown in (2), the electric signal line 316 is wired to one side of the region 358. Since the electrical signal lines 316 do not overlap with the flexure arms 350 or 354, they can be flexure arms 350 or 354.
Does not contribute much to stiffness. Further, FIG. 17 shows a state in which the first layer 370 has been removed from below the electric signal line 316 in the region 358. This means that flexure arms 350 and 354 are the dominant mechanical members that provide stiffness to slider 312. As the third layer 378, the above-described Cu—Ni—Si—Mg alloy, Be—C
u-Ni alloy, Cu-Fe-Zn-P alloy or Cu-Ti
The use of a high strength alloy, such as an alloy, allows the thickness of the third layer 378 to be kept sufficiently thin that it does not significantly contribute to the stiffness of the flexure arms 350 and 354.
It supports the electrical signal lines 316 and provides sufficient strength to withstand the manufacturing process.

In the present invention, the electric signal line 316 is connected to the third
It should be noted that the situation is not limited to being formed in layer 378. The suspension 300 is connected to the electric signal line 31.
It may be configured with individual wires located in regions 358 and 362 to function as 6. In this case, the second layer 374 and the third layer 378 are deleted.

A second advantage of the design of the suspension 300 is that the electric capacity of the read signal line is reduced by removing the first layer 370 from below the two read electric signal lines 316 over substantially the entire length, and the suspension 300 To improve the data processing capacity of FIGS. 15 and 16 show that the first layer 370 has been removed from beneath the two readout electrical signal lines 316 (ie, the outermost signal lines 316) except for the area of the support tab 364. FIG.

In certain embodiments, it may be desirable to reorder the electrical signal lines 316 into a write-read-write-read configuration. In such a case, the slot 266 shown in FIG.
One or more slots may be used.

A third advantage of the design of the suspension 300 is that the conventional termination pads in a write-read-read-write sequence can be used in this design to simply use the connector 328 as a write pad and the connectors 330 and 332 as read pads. This can be achieved by configuring the connector 334 as a writing pad. Wiring corresponding to this configuration of electrical signal line 316 is achieved without increasing the susceptibility to pick up electromagnetic (EM) noise. Electric signal line 31 connected to read pads 330 and 332
6 need to be kept close together and at a certain distance so as not to create loops of conductive material acting as antennas for EM noise. On the other hand, in FIG.
In order to avoid situations that create conductor loops that are sensitive to noise, the electrical signal lines 184 are read-read, write-
It can be seen that the writing order must be maintained.

A fourth advantage of the design of the suspension 300 is that by routing the electrical signal lines 316 along the outside of the suspension 300, the suspension 300 is closer to the spacer ring 356. This allows more data tracks to be accessed by the slider 312 than is possible in other suspension designs.

While the present invention has been described in connection with a preferred embodiment, it will be understood that such a disclosure is not limiting. Accordingly, various modifications may occur to those skilled in the art without departing from the spirit and scope of the invention.

In summary, the following items are disclosed regarding the configuration of the present invention.

(1) A suspension system for supporting a magnetic read / write slider, comprising: a load beam for mechanically supporting the slider; and a slider support member for providing an area to which the slider is mechanically mounted. A flexure having a stiffness less than the load beam and connecting the load beam to the slider support member, the first flexible finger region extending along a first outer edge of the flexure; A second flexible finger region extending along a second outer edge of the flexure, wherein the first and second flexible finger regions comprise a first layer of a hard material, an insulating material. A laminate comprising a second layer disposed on the first layer, and a third layer disposed on the second layer and comprising a conductive material; A flexure and at least one extending through the first layer of the first flexible finger region
And one slot formed in the third layer of the first flexible finger region and at the location of the flexure,
On the slot, the first layer is encountered by the slot.
At least one electrical conductor arranged so as not to be unsuitable . (2) The suspension system according to (1), wherein the third layer has a thickness of 18 μm or less. (3) The third layer is a Cu-Ni-Si-Mg alloy, Be
-The suspension system according to (1), comprising a conductive material selected from a group including a Cu-Ni alloy and a Cu-Ti alloy. (4) The above (1), wherein the first layer is made of stainless steel.
The described suspension system. (5) The suspension system according to (1), wherein the second layer is made of polyimide. (6) at least one slot extending through the first layer of the second flexible finger region; and a second slot formed in the third layer of the second flexible finger region; At least one electrical conductor disposed on the slot extending through the first layer of the flexible finger region of the suspension system. (7) A suspension system for supporting a magnetic transducer, comprising: a magnetic read / write transducer for reading and writing data on a magnetic storage medium; a slider for holding the transducer; and an area where the slider is mechanically mounted. A slider support member, a load beam for mechanically attaching the slider support member to an actuator, and a flexure having a stiffness smaller than the load beam and connecting the load beam to the slider support member. ,
A first flexible finger region extending along a first outer edge of the flexure, and a second flexible finger region extending along a second outer edge of the flexure;
A first layer of a hard material, a second layer of an insulating material disposed on the first layer, and a second layer of Cu-Ni disposed on the second layer; -S
i-Mg alloy, Be-Cu-Ni alloy, and Cu-Ti
A flexure comprising a laminate material comprising a third layer of a conductive material selected from the group comprising an alloy; and at least one slot extending through the first layer of the first flexible finger region. , it is formed on the third layer in the first flexible finger region, the frame
At the position of the kisha, the slot
At least one electrical conductor positioned so as not to encounter said first layer by the first layer . (8) A suspension system for supporting a magnetic transducer, comprising: a data storage medium; a data transducer for reading and writing data on the data storage medium; and an actuator for moving the data transducer with respect to the data storage medium. A slider holding the data transducer, a slider support member providing an area to which the slider is mechanically mounted, a load beam for mechanically attaching the slider support member to an actuator, and a load beam. A flexure connecting the load beam to the slider support member, the flexure extending along a first outer edge of the flexure; and a second flexible finger region extending along a first outer edge of the flexure. A second extending along the outer edge of the A first layer of a hard material, a second layer of an insulating material disposed on the first layer, and a first layer of a hard material. Cu-Ni- disposed on the second layer
Si-Mg alloy, Be-Cu-Ni alloy, and Cu-T
the flexure and at least one slot extending through the first layer of the first flexible finger region, the flexure comprising a laminate material including a third layer of a conductive material selected from the group comprising an i-alloy. When formed on the third layer in the first flexible finger region, the frame
At the position of the kisha, the slot
At least one electrical conductor positioned so as not to encounter said first layer by the first layer . (9) A suspension system for supporting a magnetic read / write slider, wherein the load beam mechanically supports the slider, wherein the first beam is made of a hard material.
A second layer made of an insulating material and disposed on the first layer.
The load beam, a slider support member providing an area to which the slider is mechanically attached, the load beam comprising a layer, and a laminate material comprising a conductive material and a third layer disposed on the second layer; A flexure connecting a beam to the slider support member, the first flexure arm forming a first outer edge of the flexure; and the second flexure arm forming a second outer edge of the flexure. And a plurality of electrical conductors formed in the third layer of the load beam, wherein the plurality of electrical conductors overlap the first layer of the load beam along an outer edge of the load beam. A second section and a second section of the load beam that does not overlap with the first layer. Wherein the said second section adjacent said second flexure arm, the is disposed outside the second flexure arm, including, said electrical conductor, the suspension system. (10) The suspension system according to (9), wherein the plurality of electric conductors have a thickness of 18 μm or less. (11) The plurality of electric conductors are Cu-Ni-Si-Mg.
The suspension system according to (9), comprising a high-strength conductive material selected from the group comprising an alloy, a Be-Cu-Ni alloy, and a Cu-Ti alloy. (12) The suspension system according to (9), wherein the flexure includes a separate piece attached to the load beam. (13) Suspension that supports the transducer
A data storage medium; a data transducer for reading and writing data on the data storage medium; an actuator for moving the data transducer with respect to the data storage medium;
A slider for holding a transducer, a slider support for providing an area to which the slider is mechanically mounted, and a load beam for mechanically mounting the slider support to the actuator, the first layer comprising a hard material; A second layer made of an insulating material and disposed on the first layer; and a Cu-N layer disposed on the second layer.
i-Si-Mg alloy, Be-Cu-Ni alloy, and Cu
A flexure connecting the load beam to the slider support member, the flexure including a third layer of a conductive material selected from the group comprising a Ti alloy, wherein the flexure comprises a first outer edge. A first flexure arm forming the first flexure arm and a second flexure arm forming a second outer edge of the flexure;
The flexure arm and the plurality of electrical conductors formed in the third layer of the load beam, wherein the flexure arm is disposed further away from the center of the data storage medium than the first flexure arm. Wherein the first layer of the load beam overlaps a first section along an outer edge of the load beam, and the second layer and the third layer of the load beam, A layer and a second section that does not overlap, wherein the second section is disposed adjacent to and outside of the second flexure arm. And a suspension system, including: (14) The suspension system according to (13), wherein the plurality of electric conductors have a thickness of 18 μm or less. (15) The suspension system according to (13), wherein the flexure includes a separate piece attached to the load beam.

[0122]

As described above, according to the present invention, it is possible to provide a head gimbal assembly in which an electric conductor contributes to the stiffness of a flexure to a minimum.

[Brief description of the drawings]

FIG. 1 is a side view of a slider suspension system according to the present invention.

FIG. 2 is a cross-sectional view of the slider suspension system taken along line 2-2 of FIG.

FIG. 3 is a perspective view of a slider suspension system.

FIG. 4 is a cross-sectional view of the slider suspension system taken along line 4-4 of FIG.

FIG. 5 is a configuration diagram of a disk file using the slider suspension system according to the present invention.

FIG. 6 is a top view of a slider suspension system having a pair of flexures in a head support area.

FIG. 7 is a cross-sectional view of the slider suspension system taken along line 7-7 of FIG.

FIG. 8 is a cross-sectional view of the slider suspension system taken along line 8-8 of FIG.

FIG. 9 is an exploded view of a slider suspension system having a pair of flexible finger regions in a flexure according to the present invention.

FIG. 10 is a perspective view of a slider showing a plurality of right angle fillet joints used to make electrical connections to conductors.

11 shows a slider along line 11-11 in FIG.
FIG. 2 is a cross-sectional view of the suspension system.

FIG. 12 shows a slider suspension shown in FIG.
FIG. 3 is a top view of the support layer of the system.

FIG. 13 shows a slider suspension shown in FIG.
FIG. 3 is a top view of the insulating layer of the system.

FIG. 14 shows a slider suspension shown in FIG.
FIG. 3 is a top view of a conductor layer of the system.

FIG. 15 is a perspective view of a slider suspension system having electrical conductors located below the load beam plane, away from the flexure, in accordance with the present invention.

16 illustrates a slider along line 16-16 of FIG.
FIG. 2 is a cross-sectional view of the suspension system.

17 shows a slider along line 17-17 in FIG.
FIG. 2 is a cross-sectional view of the suspension system.

18 is a top view of a support layer of the slider suspension system shown in FIG.

19 is a top view of an insulating layer of the slider suspension system shown in FIG.

20 is a top view of a conductor layer of the slider suspension system shown in FIG.

21 is a top view of the flexure member of the slider suspension system shown in FIG.

[Explanation of symbols]

10, 14, 130, 170, 300 Suspension 18 Actuator arm 22, 26, 152, 180, 312 Slider 27, 28, 192, 314 Transducer 30, 34 Hard magnetic disk 39 Multilayer laminate 40, 162, 230, 370 First Layers 44, 164, 234, 374 Second layers 48, 166, 238, 378 Third layers 54, 142, 174, 250, 278, 280, 30
4, 412, 424 Slider part 58 Arm part 62, 146, 176, 246, 276, 286, 30
8, 408, 420 Link section 66, 154, 184, 316 Electric signal line 74, 158, 188, 320 Space 78 Hinge 84 Magnetic recording disk file 88 Magnetic recording disk 92 Spindle shaft 96 Spindle motor 100 Chassis 104 Rotary Actuator 108 Enclosure 134, 138, 242 Flexure 196, 198 Solder Ball 200 Shim 204, 324 Stiffener 205 Notch 208, 328, 330, 332, 334 Electrical Connector 212, 336 Air Bearing Surface 216, 340 Leading Edge 220, 344 Trailing End Edge 224, 346 Rail 242, 272, 282, 392, 404, 416 Flexure portion 254, 258 Finger 262 Intermediate section 265, 39 Dimple 266, 270, 274, 396 Slot 294, 428 Pad 301, 302, 304 Stainless steel 350, 354 Flexure arm 356 Spacer ring 364 Tab 382, 384 Write signal 386, 388 Read signal 400 Load adjustment area 430 Flexure member 434 Cavity 438 Crossbar

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Darrell Di Palmer USA 95120, San Jose, California, Foxhurst Way 1090 (72) Inventor Oscar Jay Luitz United States 95127, San Francisco, California Jose, Perea's Lane 785 (72) Inventor Saya Patanike, USA 95133, Glaser Drive, San Jose, CA 2796 (56) References JP-A-3-71477 (JP, A) JP-A-6-295546 ( JP, A) JP-A-52-102823 (JP, A) JP-A-4-214414 (JP, A) JP-A-6-295545 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , (DB name) G11B 5/60 G11B 21/21

Claims (15)

(57) [Claims] 1. A suspension system for supporting a magnetic read / write slider, comprising: a load beam for mechanically supporting the slider; and a slider support member for providing an area to which the slider is mechanically mounted. A flexure having a stiffness less than the load beam and connecting the load beam to the slider support member, a first flexible finger region extending along a first outer edge of the flexure; A second layer of flexible fingers extending along a second outer edge of the flexure, wherein each of the first and second flexible finger areas comprises a first layer of a hard material, an insulating material. The frame, comprising a laminate material comprising a second layer disposed on the first layer, and a third layer disposed on the second layer; And Shah, through the first layer of the first flexible finger region, the
At least one extending along the first flexible finger region
Three elongate shaped slots formed in the third layer of the first flexible finger region and positioned at the flexure over the slots such that the slots do not encounter the first layer. At least one electrical conductor, which is provided. 2. The suspension system according to claim 1, wherein said third layer has a thickness of 18 μm or less. 3. The method according to claim 2, wherein the third layer is a Cu—Ni—Si—Mg alloy,
The suspension system according to claim 1, comprising a conductive material selected from the group comprising Be-Cu-Ni alloy and Cu-Ti alloy. 4. The suspension system according to claim 1, wherein said first layer comprises stainless steel. 5. The suspension system according to claim 1, wherein said second layer comprises polyimide. 6. The first flexible finger region of the first flexible finger region.
At least one slot extending through a layer; and formed in the third layer of the second flexible finger region and extending through the first layer of the second flexible finger region. The suspension system of claim 1, comprising: at least one electrical conductor disposed on the slot. 7. A suspension system for supporting a magnetic transducer, comprising: a magnetic read / write transducer for reading and writing data on a magnetic storage medium; a slider for holding the transducer; and an area to which the slider is mechanically mounted. A load beam that mechanically attaches the slider support member to the actuator; and a flexure that has a stiffness smaller than the load beam and connects the load beam to the slider support member. A first flexible finger region extending along a first outer edge of the flexure, and a second flexible finger region extending along a second outer edge of the flexure; And a first layer in which each of said second flexible finger regions comprises a hard material A second layer made of an insulating material and disposed on the first layer; and a Cu-Ni-Si-Mg alloy, a Be-Cu-Ni alloy, and a Cu-Ti alloy disposed on the second layer. A flexure, comprising a laminate material including a third layer of a conductive material selected from the group; and a first layer of the first flexible finger region ,
At least one extending along the first flexible finger region
Three elongate shaped slots, formed in the third layer of the first flexible finger region and positioned at the flexure over the slots such that the slots do not encounter the first layer. At least one electrical conductor, which is provided. 8. A suspension system for supporting a magnetic transducer, comprising: a data storage medium; and a data storage medium for reading and writing data on the data storage medium.
A transducer; an actuator for moving the data transducer with respect to the data storage medium; a slider for holding the data transducer; a slider support member providing an area to which the slider is mechanically attached; A load beam for mechanically attaching a member to an actuator; and a flexure having a stiffness smaller than the load beam and connecting the load beam to the slider support member, wherein the flexure is connected to a first outer edge of the flexure. A first flexible finger region extending along a second outer edge of the flexure, the first and second flexible finger regions including a first flexible finger region extending along a second outer edge of the flexure. Is a first layer made of a hard material, and is arranged on the first layer made of an insulating material. A second layer, and a third layer disposed on the second layer and made of a conductive material selected from the group including a Cu-Ni-Si-Mg alloy, a Be-Cu-Ni alloy, and a Cu-Ti alloy. The flexure, comprising a laminate material comprising: a first layer of the first flexible finger region ;
At least one extending along the first flexible finger region
Three elongate shaped slots formed in the third layer of the first flexible finger region and positioned at the flexure over the slots such that the slots do not encounter the first layer. At least one electrical conductor, which is provided. 9. A suspension system for supporting a magnetic read / write slider, wherein the load beam mechanically supports the slider, wherein the first layer is made of a hard material and the first beam is made of an insulating material. Providing the load beam and a region to which the slider is mechanically attached, the laminate comprising a laminate material comprising a second layer disposed on the layer and a conductive material comprising a third layer disposed on the second layer; A flexure connecting the load beam to the slider support, comprising: a first flexure arm forming a first outer edge of the flexure; and a second flexure forming a second outer edge of the flexure. A plurality of electrical conductors formed in the third layer of the load beam, the second flexure arm including a second flexure arm. The first layer of the load beam and a first section overlapping along an outer edge of the load beam; and the second and third layers of the load beam; The layer includes a non-overlapping second section, wherein the second section is adjacent to the second flexure arm and includes a second section.
The electrical conductor disposed outside the flexure arm of the suspension system. 10. The suspension system according to claim 9, wherein said plurality of electrical conductors have a thickness of 18 μm or less. 11. The method according to claim 11, wherein the plurality of electric conductors are Cu--Ni--Si--
Consisting of a high-strength conductive material selected from the group comprising Mg alloys, Be-Cu-Ni alloys, and Cu-Ti alloys,
The suspension system according to claim 9. 12. The suspension system according to claim 9, wherein said flexure includes a separate piece attached to said load beam. 13. A suspension system for supporting a transducer, comprising: a data storage medium; and a data storage medium for reading and writing data on the data storage medium.
A transducer; an actuator for moving the data transducer with respect to the data storage medium; a slider for holding the data transducer; a slider support member providing an area to which the slider is mechanically attached; A load beam mechanically attaching a member to the actuator, the load beam comprising a first layer of a hard material, a second layer of an insulating material disposed on the first layer, and disposed on the second layer. , Cu-Ni-Si-
A load beam including a third layer of a conductive material selected from the group comprising a Mg alloy, a Be-Cu-Ni alloy, and a Cu-Ti alloy; and a flexure connecting the load beam to the slider support member. Wherein a first flexure arm forming a first outer edge of the flexure and a second flexure arm forming a second outer edge of the flexure, wherein the second flexure arm comprises The flexure, wherein the flexure is located further away from the center of the data storage medium than the first flexure arm, and a plurality of electrical conductors formed in the third layer of the load beam; A first overlapping the first layer of the beam along an outer edge of the load beam;
And a second section comprising the second and third layers of the load beam, wherein the second section does not overlap the first layer, wherein the second section comprises the second flexure section. An electrical conductor disposed outside the second flexure arm adjacent to the arm. 14. The suspension system according to claim 13, wherein said plurality of electrical conductors have a thickness of 18 μm or less. 15. The suspension system according to claim 13, wherein said flexure includes a separate piece attached to said load beam.